200923373 九、發明說明： 【發明所屬之技術領域】 尤指—種適用於探針卡 本發明係關於一種校正設備 校正設備。 【先前技術】 度 r:r:::r …、 顯微鏡辅以比對罩進行探針卡的比m ΓΓ的比對記號產生經向或與緯向位置偏斜二= 進行經、緯向校正，此校正動作持續到探針正確地 二=號為止。若針對探針之平均高度進行校正，則是 15 針以校正，將較平均高度凸出或凹陷的探 仃南度调整以使整體探針的高度平均— 2經向與緯向偏斜之校正是以_台專用設、= 交正探針卡於兩套設備之間，不僅於使用上不： 搬運盘：：費人！及時間，而調校好之探針卡也因來回的 /、女 '"而可能使定位偏移而造成調校的精準度變差 ^而衍生諸多問題㈣將兩 為-的探針卡校正設備，以解決上述種種問題。口而 【發明内容】 20 200923373 本發明為一種探針卡校正設備，包括：—基座、 動平台、-比對裝置、以及一複合顯微裳置。”，移動 =台:=二上方’並能相對於基座作二維度移動調 正移動平台上組設有—於赭鄱A, ,轉載σ ’並此相對於移動平台 作=度旋轉’旋轉載台上設置有至少一夹具用以夹持 =針^比對裝置包括有_比對罩，㈣罩卿式地移 丁於-比對位置與-遠離位置之間。比對罩還包括有一透 明月’透明片上包括有—比對區，比對區内標記有至少一 比對記號。複合崎置包括有—支架、一轉換塊、一低 賴鏡、及—高倍顯微鏡。支架固設於基座上，轉換塊 活汉於支架i ’低倍顯微鏡與高倍顯微鏡分別組設於轉換 塊上。低倍顯微鏡包括有一低倍物鏡’高倍顯微鏡包括有 一南倍物鏡，轉換塊是選擇式地移動於一第一位置與一第 二位置之間。其中’第一位置是指低倍顯微鏡之低倍物鏡 15 對準到比對罩位於其比對位置時之比對區位置，第二位置 疋指南倍顯微鏡之高倍物鏡對準到比對罩位於其比對位置 時之比對區位置。 因此，本發明透過移動轉換塊於第一位置與第二位置 之間，能快速切換使用轉換塊上的低倍顯微鏡、或高倍顯 微鏡藉以對準比對罩之比對區，故能達成精準、方便、迅 速地校正探針卡的目的。 上述複合顯微裝置之支架上可設有一橫向滑槽，而轉 換塊則可使用一滑塊以對應橫向滑移於橫向滑槽内；或是 於支架上改設一旋轉槽，而轉換塊則改用—旋轉塊以樞設 20 200923373 轉槽内'並能相對旋轉於第—、二角度位置之間亦可。 複合顯微裝置更可包括有—第一致動器'及一第一開關。 第一開關與第—致動器電性連結，啟動第-開關後可致使 第$動器帶動滑塊沿著橫向滑槽橫向滑移並選擇式地定 位於第&置或第二位置上。第一致動器可以是指一油壓 缸或可改用氣壓缸、步進馬達、或皮帶、鍊條傳動…等 本發明之比對裝置可包括一翻調裝置、及一轉桿。比 對罩之-側可固設於轉桿上，翻調裝置是驅動轉桿轴向旋 轉以使比對罩翻轉、並選擇式地定位於比對位置或遠離位 :上；或可將翻調裝置改用一升降裝置，藉以帶動該比對 上升下降以選擇式地移行於_位於下方之比對位置、與 :位於上方之遠離位置。本發明之比對裝置可更包括有一 15 第二開關’翻調裝置則可包括—第二致動器。第二致動器 與第二開關電性連結’啟動第二開關可致使第二致動心 :轉桿軸向旋轉。第二致動器可以是指一旋轉式油壓紅， 或可改用氣壓缸、馬達·.等皆可。 上述高倍顯微鏡可更包括_垂向滑塊、—第三致動 、及-第三開關。第三致動器與第三開關電性連結，啟 ^三開射致使第三致動器帶動垂向滑塊垂直滑移 :塊上’藉以微調高倍顯微鏡之焦距。第三致動器可以曰 指—油壓缸，或可改用氣壓缸、馬達·.等皆可。 疋 上述低倍顯微鏡可以i包括—垂直滑塊、及—垂直 整裝置。透㈣直調整裝置可以帶動垂直滑塊垂直滑移於 20 200923373 轉換塊上’藉以調整 置可以是指—手=倍㈣鏡之焦距。上述垂直調整裝 置皆可。 疋、、或電動按鈕、或其他等效調整裝 本發明之移動平台可以包括 向調整裝置，衮置、及—緯 緯㈣… 裝置可調整移動平台之經向位置， 向Γ可調整移動平台之緯向位置。上述之經、緯 置可以分別採用電動馬達調整，或 二整’因此，透過校正設備的自動化的輔助 f 的权正工作更具便利、及精確性。當然，上 位〔詈，:緯向調整裝置也可以簡單採用如手動之旋叙來調整 位置，猎以降低成本。 【實施方式】 月〆閱圖1 ’其顯不為本發明一較佳具體實施例之立體 15組^圖、。—本實施例之探針卡校正設備包括-基座卜-移動 平口 2比對裝置3(C〇mpadng device)、以及-複合顯微 裝置 4 (hybrid miCroscopic apparatus)。 5 如圖I所示，本實施例之移動平台2是組設於基座 方’並能相對於基座1作圖1顯示之X方向（下稱經向）、與γ 20方向（下稱緯向）的二維度移動調整，移動平台2上組設有一 方疋轉載台2 1，並能相對於移動平台2作z軸方向的第三維度 旋轉：在本例中，旋轉載台21上設置有四組夹具2ιι用以夾 持一待校正與調整其上探針81之探針卡8(pr〇card)。 200923373 如圖卜比對裝置3設有一比對罩叫顧…—翻調裳 <32、一轉桿32卜及一第二開關]4。比對罩31之—側是固 設於轉桿32!之-端上，轉桿321之另一端則連結於翻調襄 置32之第二致動器上，於本例中此第二致動器係採用一旋 5轉式油4紅33，此旋轉式油塵紅33並與第二開關^電性連 結。故當使用者啟動此第二開關34，可使旋轉式油壓幻3 帶動轉桿321作軸向旋轉。 在實際操作校正與調針過程中，使用者需要先將比對 罩31翻轉到探針卡8上方並接近到各探針81之位置，如圖^ 1〇所示之比對罩31實線位置（下稱比對位置？1)，俾與各探針進 行近距離之經緯位置的顯微比對；一旦比對出有任何探針 偏離其正確位置，使用者又需將比對罩31翻轉離開上述各 探針位置，如圖1所示之比對罩31虛線位置（下稱遠離位置 P2)，以方便使用者透過手動來調整該偏差探針之經緯位 15置。因此，使用者會多次開啟此第二開關34以控制旋轉式 油壓缸33驅動轉桿321軸向旋轉，而使比對罩31前後翻轉、 並依需要而選擇式地定位於上述比對位置ρι或遠離位置p2 上。 圖1並顯示本實施例之複合顯微裝置4包括有一支架 20 4〇、一轉換塊、一低倍顯微鏡42、及一高倍顯微鏡43。本 例之支架40是直接固設於基座^复方並呈直立狀，支架4〇上 設有一橫向滑槽401。於本例中上述之轉換塊是採用一滑塊 41以活設於支架40上，更精確地說，是將滑塊41對應橫向 滑移於橫向滑槽401内。圖！顯示低倍顯微鏡42與高倍顯微 200923373 • 鏡43是共同組設於此滑塊41上，並能跟隨著滑塊4卜同沿 著橫向滑槽4G1作橫向滑移。於本例中，另於支架4()上組裝 有一第一致動器，例如圖丨所示之油壓缸5，該油壓缸5是與 。又於基座1上之第-開關5 i電性連結。故當使用者啟動第 5 -開關51 ’可致使油㈣5前端之推桿帶動滑塊仙著橫向 滑槽401橫向地左、右滑移。 本實施例之低倍顯微鏡42包括有一低倍物鏡421、一垂 直滑塊422、及一垂直調整裝置。於本例十，垂直調整裝置 、 是指一手動旋鈕423，透過旋轉手動旋鈕423可以帶動垂直 H)滑塊4助對於滑塊41作垂直滑移，此舉可以調整低倍顯微 鏡42之高低位置，甚至調整低倍顯微鏡“相對於比對罩η 之焦距。 本實施例之高倍顯微鏡4 3包括有一高倍物鏡4 3卜一垂 向滑塊44' -第三致動器、及一第三開關从。於本例中， 15第三致動器是指一油壓缸45，其與第三開關46電性連結。 使用者可以啟動第三開關46致使油壓缸45帶動垂向滑塊料 相對於滑塊41作垂直滑移，此舉可以調整高倍顯微鏡“之 。 向低位置’甚至微調高倍顯微鏡43之焦距。 圖2顯示本實施例比對罩31之放大示意圖，比對罩只包 2〇括有—透明片311，透明片311上形成有一比對區312，在= 對區312内已經預先標記有相應於探針卡探針數目、與正確 位置的複數個比對記號313。 、 、當欲進行探針卡的校正時，使用者先操作圖丨之旋轉式 油壓缸33驅動轉桿321軸向旋轉，使得比對罩31向前翔轉到 200923373 則述圖1之比對位置？1處，此時比對罩31的比對區扣將對 準到探針卡8之各探針81位置處，亦即圖2所在之角度位 置’實際上此處透明片311與其上比對區312之各個比對記 號313將十分#近下方之探針卡8之各個探針W之針尖，但 為圖不π楚’故圖2中特意把其中—支探針81繪成稍為遠離 所對應之比對記號3 13以方便檢視。 15 使用者是透過目視比對彼此十分靠近之各比對記號 313與各探針8〗之針尖，便可直接校正比對各探針μ之針頭 有無偏離其正確位置。若當目視比對有探_偏離其所對 應之比對記號313時，則表示該探⑽明顯偏離其正確位 〃使用者便可操作圖i之旋轉式油塵紅％驅動轉桿Μ1轴 ^疋轉’使得比對罩31向後翻轉到前述之遠離位置p2後， 藉以騰出操作空間再以鑷子等工具進行手工調針工作。由 圖1顯示，本例所謂的遠離位置？2，是將比對罩31之 W2向後翻轉移離開探針卡8之各探針“位置處。手工調針 後’使用者若需再次驗證所調整的距離是否正讀，只要再 次將比對罩31翻轉回來前述⑸之比對位置Η處再次比對 即:。因此，週而復始的校正比對與調針動作將持續到每 一探針81均調整到其正確位置為止。 咕/主思’珂述之校正比對過鋥φ 訂10程τ，使用者都需透過顯 微鏡以協助其進行細小物件之曰 』扨仟之目視比對，本實施例並提供 一種可迅速轉換使用不同低、高 ’、 冋顯碱鏡42,43以協助目視 比對之結構。 20 200923373 承上所述，本實施例在進行校正比對探針81作業時， 需先將比對罩31向前翻轉到圖i之比對位置^ n比對 區312恰好位於探針卡8上方位置、朗準各探針8i m 均顯示本實施例之比對罩31已經翻轉到了其比對位置_ 5 前視圖。 圖3更顯示其滑塊41相對於橫向滑槽4〇1滑移並停止於 圖3所顯現的第一位置歧’此第一位置a是指其低倍顯微 鏡42之低倍物鏡421恰好對準到比對區312的位置，必要時 可再以手動調整低倍顯微鏡42作垂直滑移，藉以進行低倍 10率之顯微檢視作業，例如調整探針之經緯位置、或作較大 區域範圍之檢視。 圖4則顯示其滑塊41相對於橫向滑槽4〇1滑移並停止於 圖4所顯現的第二位置b處’此第二州是指其高倍顯微鏡 15200923373 IX. Description of the invention: [Technical field to which the invention pertains] In particular, the invention relates to a calibration device for a calibration device. [Prior Art] Degree r:r:::r ..., the microscope is supplemented by the comparison cover, and the ratio of the probe card is m ΓΓ. The alignment marks the warp direction or the latitudinal position is skewed two = the warp and weft correction are performed. This corrective action continues until the probe is correctly two = number. If the average height of the probe is corrected, it is 15 stitches to correct, and the average height of the convex or concave probe is adjusted to adjust the height average of the whole probe - 2 warp and latitude skew. It is a special device for _ desk, = positive probe card between the two sets of equipment, not only in use:: Handling tray:: Fees! And time, and the tuning probe card is also due to the back and forth /, female '" may cause the positioning to shift and the accuracy of the adjustment is worse ^ and derive many problems (four) will be two - the probe card Correct the device to solve the above problems. [Explanation] 20 200923373 The present invention is a probe card calibration device comprising: a base, a moving platform, a comparison device, and a composite microsole. ", mobile = station: = two above' and can be moved two-dimensionally relative to the base. The mobile platform is set up on the mobile platform - Yu 赭鄱 A, , reproduced σ ' and rotated relative to the mobile platform The transfer table is provided with at least one clamp for clamping=needle^the comparison device includes a _aligning cover, and (4) the cover is moved between the aligning position and the -away position. The aligning cover further includes a The transparent moon 'transparent film includes an alignment area, and at least one alignment mark is marked in the comparison area. The composite surface includes a bracket, a conversion block, a low mirror, and a high power microscope. The bracket is fixed on the transparent microscope. On the pedestal, the conversion block is lived on the support i' low-power microscope and high-power microscope are respectively arranged on the conversion block. The low-power microscope includes a low-magnification objective lens. The high-power microscope includes a south objective lens, and the conversion block is selectively moved. Between a first position and a second position, wherein the 'first position refers to the alignment position of the low magnification objective lens 15 of the low power microscope aligned to the alignment cover at its alignment position, the second position 疋The guide microscope is aligned with the high magnification objective lens The position of the alignment zone when the cover is at its aligned position. Therefore, the present invention can quickly switch between the first position and the second position by moving the conversion block, and can quickly switch between using a low power microscope on the conversion block or a high power microscope. The alignment of the cover is accurate, and the purpose of correcting the probe card can be achieved accurately, conveniently and quickly. The composite microscopic device can be provided with a lateral sliding groove on the bracket, and the conversion block can use a slider. Corresponding to lateral sliding in the transverse chute; or a rotating slot is modified on the bracket, and the conversion block is switched to use the rotating block to pivot 20 in the 200923373 slot and can be rotated relative to the first and second angle positions. The composite microscopy device may further include a first actuator and a first switch. The first switch is electrically connected to the first actuator, and the first actuator is activated to activate the first actuator. The sliding block is laterally slid along the transverse sliding groove and selectively positioned at the second position or the second position. The first actuator may be a hydraulic cylinder or a pneumatic cylinder, a stepping motor, Or belt, chain drive, etc. The device may include a flipping device and a rotating rod. The side of the matching cover may be fixed on the rotating rod, and the turning device drives the rotating shaft to rotate axially to flip the matching cover and selectively position Aligning position or moving away from the position: Up; or changing the flipping device to a lifting device, thereby driving the comparison to rise and fall to selectively move to the lower position of the lower position, and the remote position at the upper position. The comparison device of the present invention may further include a 15 second switch' flipping device, which may include a second actuator. The second actuator is electrically coupled to the second switch to activate the second switch to cause the second Momentum: The rotation of the rotating rod is axial. The second actuator can be a rotary oil pressure red, or can be changed to a pneumatic cylinder, a motor, etc. The above high power microscope can further include a vertical slider, The third actuator and the third switch. The third actuator is electrically connected to the third switch, and the third actuator causes the third actuator to drive the vertical slider to slide vertically: the block is used to fine tune the high magnification. The focal length of the microscope. The third actuator may be a finger-hydraulic cylinder, or may be replaced with a pneumatic cylinder, a motor, or the like.疋 The above low power microscope can include a vertical slider and a vertical unit. The through-four (4) straight adjustment device can drive the vertical slider to slide vertically on the 20 200923373 conversion block. The adjustment can be used to refer to the focal length of the hand = double (four) mirror. The above vertical adjustment device is acceptable.疋,, or an electric button, or other equivalent adjustment device, the mobile platform of the present invention may include an adjustment device, a device, and a weft (4) device. The device can adjust the meridional position of the mobile platform, and the adjustable mobile platform can be adjusted. Latitude position. The above-mentioned warp and weft can be adjusted by electric motor, respectively, or two times. Therefore, it is more convenient and accurate to pass the correct operation of the automatic auxiliary f of the correcting device. Of course, the upper position [詈,: the latitudinal adjustment device can also simply use manual rotation to adjust the position, hunting to reduce costs. [Embodiment] FIG. 1 is a perspective view of a preferred embodiment of the present invention. The probe card correcting apparatus of this embodiment comprises a pedestal 2 aligning device 3 and a hybrid miCroscopic apparatus. 5, as shown in FIG. 1, the mobile platform 2 of the present embodiment is disposed on the base side and can be displayed in the X direction (hereinafter referred to as the warp direction) and the γ 20 direction (hereinafter referred to as the display 1) with respect to the base 1. The two-dimensional movement adjustment of the latitudinal direction, the mobile platform 2 is provided with a side turntable 2 1 and can be rotated in the third dimension with respect to the moving platform 2 in the z-axis direction: in this example, the rotating stage 21 Four sets of clamps 2 ιι are provided for holding a probe card 8 (pr〇card) to be corrected and adjusted on the upper probe 81. 200923373 The reference device 3 is provided with a matching cover called ... - flipping the slider < 32, a rotating lever 32 and a second switch] 4 . The side of the aligning cover 31 is fixed to the end of the rotating rod 32!, and the other end of the rotating rod 321 is coupled to the second actuator of the flipping cymbal 32. In this example, the second The actuator adopts a rotary 5-turn oil 4 red 33, and the rotary oil dust red 33 is electrically connected to the second switch. Therefore, when the user activates the second switch 34, the rotary oil pressure magic 3 can drive the rotating rod 321 to rotate axially. In the actual operation of the correction and needle adjustment process, the user needs to first flip the comparison cover 31 over the probe card 8 and approach the position of each probe 81, as shown in FIG. Position (hereinafter referred to as the alignment position? 1), 俾 and the probes are closely aligned at the close position of the latitude and longitude; once any probe is out of the correct position, the user needs to compare the mask 31 Flip off the position of each of the above probes, as shown in FIG. 1 , the position of the alignment of the cover 31 (hereinafter referred to as the distance from the position P2), so that the user can manually adjust the latitude and longitude of the deviation probe 15 . Therefore, the user may turn on the second switch 34 a plurality of times to control the rotary hydraulic cylinder 33 to drive the rotation of the rotating rod 321 in the axial direction, so that the comparison cover 31 is turned back and forth, and is selectively positioned in the above-mentioned comparison as needed. Position ρι or away from position p2. 1 and shows that the composite microscopy apparatus 4 of the present embodiment includes a holder 20, a conversion block, a low power microscope 42, and a high power microscope 43. The bracket 40 of this embodiment is directly fixed to the base and is in an upright shape, and the bracket 4 is provided with a lateral sliding slot 401. In the present embodiment, the above-mentioned conversion block uses a slider 41 to be alive on the bracket 40, and more precisely, the slider 41 is laterally slidably moved into the lateral slot 401. Figure! The low power microscope 42 and the high power microscope are displayed. 200923373 • The mirror 43 is collectively disposed on the slider 41 and can be laterally slid along the slider 4G1 along the slider 4. In this example, a first actuator, such as the hydraulic cylinder 5 shown in Fig. 5, is assembled on the bracket 4 (), and the hydraulic cylinder 5 is and . The first switch 5 i on the susceptor 1 is electrically connected. Therefore, when the user activates the 5th switch 51', the pusher of the front end of the oil (4) 5 causes the slider to slide laterally to the left and right sides of the sliding slot 401. The low power microscope 42 of this embodiment includes a low magnification objective lens 421, a vertical slider 422, and a vertical adjustment device. In the tenth example, the vertical adjustment device refers to a manual knob 423, and the vertical H) slider 4 can be driven to vertically slide the slider 41 by rotating the manual knob 423, which can adjust the height position of the low magnification microscope 42. Even adjusting the low power microscope "with respect to the focal length of the comparison cover η. The high power microscope 4 3 of the embodiment includes a high power objective lens 4 3 a vertical slider 44' - a third actuator, and a third switch In this example, the third actuator refers to a hydraulic cylinder 45 that is electrically coupled to the third switch 46. The user can activate the third switch 46 to cause the hydraulic cylinder 45 to drive the vertical slider. Vertical sliding relative to the slider 41 can be adjusted by a high power microscope. To the low position' even fine-tunes the focal length of the high power microscope 43. 2 shows an enlarged schematic view of the comparison cover 31 of the present embodiment. The comparison cover only includes a transparent sheet 311, and a transparent area 311 is formed with a matching area 312, which is pre-marked in the = area 312. The number of probe card probes is compared with a plurality of correct positions to mark 313. When the calibration of the probe card is to be performed, the user first operates the rotary hydraulic cylinder 33 of the drawing to drive the rotary shaft 321 to rotate axially, so that the comparison cover 31 is forwarded to 200923373, and the ratio of FIG. 1 is described. For the location? At one point, the alignment buckle of the alignment cover 31 will be aligned with the position of each probe 81 of the probe card 8, that is, the angular position of FIG. 2, where the transparent sheet 311 is actually aligned with it. Each of the alignment marks 313 of the region 312 will be very close to the tip of each probe W of the probe card 8 below, but the figure is not π chu. Therefore, in FIG. 2, the probe 81 is deliberately drawn slightly away. Corresponding to the comparison mark 3 13 for easy viewing. 15 The user can directly correct the relative position of the needles of the probes μ by directly comparing the alignment marks 313 and the tips of the probes 8 which are close to each other. If the visual comparison has a probe _ deviating from its corresponding comparison mark 313, it means that the probe (10) is obviously deviated from its correct position, and the user can operate the rotary oil dust red drive screw Μ 1 axis ^ The twirling 'turns the comparison cover 31 backward to the aforementioned distance p2, thereby freeing the operation space and performing manual adjustment work with a tool such as a tweezers. As shown in Figure 1, this example is called the far away position? 2, the W2 of the comparison cover 31 is turned back and forth to the position of each probe of the probe card 8. "After manual adjustment", if the user needs to verify again whether the adjusted distance is being read, as long as the comparison is performed again The cover 31 is flipped back to the position (Η) of the above (5) for comparison again. Therefore, the repeated correction and the adjustment of the needle movement will continue until each probe 81 is adjusted to its correct position. 咕/主思' The calibrated comparison of the 鋥 鋥 鋥 10 10 10 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , ', 冋 alkali lens 42, 43 to assist in the visual alignment of the structure. 20 200923373 As described above, in the present embodiment, when performing the calibration comparison probe 81, the comparison cover 31 needs to be flipped forward to the figure. The alignment position of i is just above the position of the probe card 8, and each of the probes 8i m shows that the comparison cover 31 of the present embodiment has been turned over to its alignment position _ 5 front view. 3 further shows that its slider 41 slips and stops relative to the lateral chute 4〇1 The first position a appears in FIG. 3, which means that the low magnification objective lens 421 of the low power microscope 42 is just aligned to the position of the alignment area 312, and the low magnification microscope can be manually adjusted if necessary. Vertical slip, for microscopic inspection of low magnification, such as adjusting the warp and weft position of the probe, or viewing the larger area. Figure 4 shows its slider 41 relative to the transverse chute 4〇1 Slip and stop at the second position b shown in Figure 4 'This second state refers to its high power microscope 15
20 43之尚倍物鏡mi恰好對準到比對區312的位置，必要時可 再以電動調整高倍顯微鏡43作垂直滑移，藉以進行高倍率 之顯微檢視作業，例如調整探針之高度位置、或作細小區 域範圍之檢視。 °° 、由於本實施例可透過第一開關51以啟動油壓缸5來推 動滑塊41沿著橫向滑槽4〇1作橫向左、右滑移，故能迅速的 變換滑塊41的位置使其停止於第一位置a或一第二位置δ 上，故能快速切換使用滑塊41上的低倍顯微鏡42、及高忤 顯微鏡43來對準比對罩31之比對區312。因此，可改善 探針卡杈正需先經由一個經、緯校正設備作經 '緯校正後， 再以另一個平均高度校正設備作平均高度校正。之後若需 12 200923373 再作經、緯校正之確認，則又需再搬回到經、緯校正設備 上作校正比對之不便。 因此，本發明得以省卻探針卡搬移於兩套設備間之不 當’故得以改善習知於使用上不方便、耗費人力及時間， 5及調校好之探針卡也因來回的搬運與安裝而可能使定位偏 移而造成調校的精準度變差的諸多問題。透過本發明，得 以達成精準、方便、迅速地校正探針卡的目的。 于 上述實施例僅係為了方便說明而舉例而已，本發明所 主張之權利範圍自應以申請專利範圍所述為準，而非僅限 10 於上述實施例。 义 【圖式簡單說明】 圖1係本發明一較佳具體實施例之立體組合圖。 圖2係本發明一較佳具體實施例之比對罩之放大示意圖。 15圖3係本發明一較佳具體實施例之滑塊移動至第一位置的 前視圖。 1, 圖4係本發明一較佳具體實施例之滑塊移動至第二位置的 前視圖。 【主要元件符 基座1 失具211 透明片3 11 翻調裝置32 說明】 移動平台2 比對裝置3 比對區3 12 轉桿321 旋轉載台21 比對罩31 比對記號3 13 旋轉式油壓缸33 13 200923373 第二開關34 橫向滑槽401 低倍物鏡42 1 高倍顯微鏡4 3 油壓缸45,5 比對位置P1 探針81 複合顯微裝置4 滑塊41 垂直滑塊422 高倍物鏡431 第三開關46 遠離位置P2 支架40 低倍顯微鏡42 垂直調整裝置423 垂向滑塊44 第一開關5 1 探針卡8 14The objective lens mi of the 20 43 is just aligned to the position of the comparison area 312, and if necessary, the motor can be vertically adjusted by the electric adjustment microscope 43 to perform high-magnification microscopic inspection operations, for example, adjusting the height position of the probe. Or as a review of a small area. °°, since the first switch 51 can be used to activate the hydraulic cylinder 5 to push the slider 41 to slide laterally left and right along the lateral sliding slot 4〇1, the position of the slider 41 can be quickly changed. The stop is stopped at the first position a or the second position δ, so that the low magnification microscope 42 on the slider 41 and the sorghum microscope 43 can be quickly switched to align the alignment area 312 of the comparison cover 31. Therefore, it is possible to improve the probe cassette by first performing a latitude correction through a warp and weft correction device, and then using another average height correction device for the average height correction. If you need 12 200923373 to confirm the warp and weft correction, you need to move back to the warp and weft correction equipment for correction. Therefore, the present invention can save the improper movement of the probe card between the two sets of devices, so that it is inconvenient, labor-intensive, and time-consuming to use. 5 and the adjusted probe card is also transported and installed back and forth. There are many problems that may cause the positioning to be offset and the accuracy of the adjustment is deteriorated. Through the invention, the purpose of correcting the probe card accurately, conveniently and quickly is achieved. The above-described embodiments are merely examples for the convenience of the description, and the scope of the claims is intended to be limited to the above embodiments. BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a perspective assembled view of a preferred embodiment of the present invention. 2 is an enlarged schematic view of a comparison cover of a preferred embodiment of the present invention. Figure 3 is a front elevational view of the slider moving to the first position in accordance with a preferred embodiment of the present invention. 1, Figure 4 is a front elevational view of the slider moving to the second position in accordance with a preferred embodiment of the present invention. [Main component symbol base 1 Frustration 211 Transparent film 3 11 Flip device 32 Description] Mobile platform 2 Comparison device 3 Comparison area 3 12 Rotary rod 321 Rotating stage 21 Comparison cover 31 Comparison mark 3 13 Rotary type Hydraulic cylinder 33 13 200923373 Second switch 34 Transverse chute 401 Low magnification objective lens 42 1 High power microscope 4 3 Hydraulic cylinder 45, 5 Alignment position P1 Probe 81 Composite microscopy 4 Slider 41 Vertical slider 422 High magnification objective 431 Third switch 46 away from position P2 Bracket 40 Low magnification microscope 42 Vertical adjustment device 423 Vertical slider 44 First switch 5 1 Probe card 8 14