TWI340518B - - Google Patents

Info

Publication number
TWI340518B
TWI340518B TW095105114A TW95105114A TWI340518B TW I340518 B TWI340518 B TW I340518B TW 095105114 A TW095105114 A TW 095105114A TW 95105114 A TW95105114 A TW 95105114A TW I340518 B TWI340518 B TW I340518B
Authority
TW
Taiwan
Application number
TW095105114A
Other versions
TW200644374A (en
Inventor
Katsunori Ueno
Tomoya Takahashi
Makoto Umeki
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of TW200644374A publication Critical patent/TW200644374A/zh
Application granted granted Critical
Publication of TWI340518B publication Critical patent/TWI340518B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16B—DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
    • F16B35/00—Screw-bolts; Stay-bolts; Screw-threaded studs; Screws; Set screws
    • F16B35/04—Screw-bolts; Stay-bolts; Screw-threaded studs; Screws; Set screws with specially-shaped head or shaft in order to fix the bolt on or in an object
    • F16B35/06—Specially-shaped heads
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02J—CIRCUIT ARRANGEMENTS OR SYSTEMS FOR SUPPLYING OR DISTRIBUTING ELECTRIC POWER; SYSTEMS FOR STORING ELECTRIC ENERGY
    • H02J4/00—Circuit arrangements for mains or distribution networks not specified as ac or dc
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B70/00—Technologies for an efficient end-user side electric power management and consumption
    • Y02B70/30—Systems integrating technologies related to power network operation and communication or information technologies for improving the carbon footprint of the management of residential or tertiary loads, i.e. smart grids as climate change mitigation technology in the buildings sector, including also the last stages of power distribution and the control, monitoring or operating management systems at local level
    • Y02B70/3225—Demand response systems, e.g. load shedding, peak shaving
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y04—INFORMATION OR COMMUNICATION TECHNOLOGIES HAVING AN IMPACT ON OTHER TECHNOLOGY AREAS
    • Y04S—SYSTEMS INTEGRATING TECHNOLOGIES RELATED TO POWER NETWORK OPERATION, COMMUNICATION OR INFORMATION TECHNOLOGIES FOR IMPROVING THE ELECTRICAL POWER GENERATION, TRANSMISSION, DISTRIBUTION, MANAGEMENT OR USAGE, i.e. SMART GRIDS
    • Y04S20/00—Management or operation of end-user stationary applications or the last stages of power distribution; Controlling, monitoring or operating thereof
    • Y04S20/20—End-user application control systems
    • Y04S20/222—Demand response systems, e.g. load shedding, peak shaving

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Supply And Distribution Of Alternating Current (AREA)
TW095105114A 2005-02-18 2006-02-15 Operation control device and method for a plurality of electric power consuming systems, program and memory medium thereof TW200644374A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005043244A JP4753172B2 (ja) 2005-02-18 2005-02-18 複数の電力使用系の動作制御装置、動作制御方法及び記憶媒体

Publications (2)

Publication Number Publication Date
TW200644374A TW200644374A (en) 2006-12-16
TWI340518B true TWI340518B (zh) 2011-04-11

Family

ID=36936221

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095105114A TW200644374A (en) 2005-02-18 2006-02-15 Operation control device and method for a plurality of electric power consuming systems, program and memory medium thereof

Country Status (5)

Country Link
US (1) US7376490B2 (zh)
JP (1) JP4753172B2 (zh)
KR (1) KR100960428B1 (zh)
CN (1) CN100570981C (zh)
TW (1) TW200644374A (zh)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9563877B2 (en) * 2008-03-11 2017-02-07 Microsoft Technology Licensing, Llc Customizable controls provided by a messaging application for performing selected actions
US9830670B2 (en) * 2008-07-10 2017-11-28 Apple Inc. Intelligent power monitoring
JP5293385B2 (ja) * 2009-04-28 2013-09-18 東京エレクトロン株式会社 熱処理システム
US9075408B2 (en) * 2009-11-16 2015-07-07 Applied Materials, Inc. Energy savings and global gas emissions monitoring and display
US9740184B2 (en) * 2009-11-16 2017-08-22 Applied Materials, Inc. Controls interface solution for energy savings
JP5469678B2 (ja) * 2009-12-25 2014-04-16 キヤノンアネルバ株式会社 基板加熱処理装置の温度制御方法、半導体デバイスの製造方法、基板加熱処理装置の温度制御プログラム及び記録媒体
US8938322B2 (en) * 2010-12-06 2015-01-20 Henrik Westergaard Apparatus and method for controlling consumer electric power consumption
WO2013077191A1 (ja) 2011-11-25 2013-05-30 東京エレクトロン株式会社 処理装置群コントローラ、生産処理システム、処理装置群制御方法、生産効率化システム、生産効率化装置および生産効率化方法
JP5992994B2 (ja) * 2012-03-09 2016-09-14 東京エレクトロン株式会社 基板処理装置の消費エネルギー監視システム及び基板処理装置の消費エネルギー監視方法
WO2013161342A1 (ja) * 2012-04-26 2013-10-31 ソニー株式会社 電力制御装置及び電力消費機器
GB201211191D0 (en) * 2012-06-25 2012-08-08 Surface Generation Ltd Tool management system
US9207270B2 (en) * 2012-08-31 2015-12-08 Elwha Llc Method and apparatus for measuring negawatt usage of an appliance
JP2013070102A (ja) * 2013-01-21 2013-04-18 Ebara Corp 基板処理装置の排気装置とシステム
JP6210203B2 (ja) * 2013-08-26 2017-10-11 清水建設株式会社 設備稼働スケジューリング調整システム及びその調整方法
US10048670B2 (en) * 2014-05-08 2018-08-14 Beet, Llc Automation operating and management system
JP6313671B2 (ja) 2014-06-23 2018-04-18 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置のためのスケジュール作成方法および基板処理装置
JP6293845B2 (ja) * 2016-11-01 2018-03-14 東京エレクトロン株式会社 生産効率化システム、生産効率化装置および生産効率化方法
EP3334000B1 (en) * 2016-12-06 2020-04-15 ABB S.p.A. A method for controlling an electric power distribution micro-grid
JP6573693B2 (ja) * 2018-03-23 2019-09-11 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置のためのスケジュール作成方法および基板処理装置
JP7025279B2 (ja) * 2018-05-07 2022-02-24 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置、電力制御装置、基板処理方法および電力制御方法
JP7027273B2 (ja) * 2018-07-11 2022-03-01 三菱電機ビルテクノサービス株式会社 設備選択支援装置及びプログラム
WO2023153236A1 (ja) * 2022-02-10 2023-08-17 東京エレクトロン株式会社 半導体製造システム群への電力供給システム

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08181110A (ja) 1994-12-22 1996-07-12 Hitachi Ltd 半導体製造装置および半導体製造方法
JP3468602B2 (ja) * 1995-01-04 2003-11-17 新日本製鐵株式会社 使用電力量予測装置
JP3491002B2 (ja) * 1995-06-08 2004-01-26 東京エレクトロン株式会社 複数の電力使用系の動作制御方法及びその装置
JPH10216813A (ja) * 1997-02-12 1998-08-18 Nisshin Steel Co Ltd 圧延設備の使用電力量制御方法
JP3977554B2 (ja) * 1999-09-30 2007-09-19 大日本スクリーン製造株式会社 基板処理装置および基板処理装置のシミュレート装置並びにコンピュータ読み取り可能な記録媒体
JP2001332463A (ja) * 2000-05-24 2001-11-30 Tokyo Electron Ltd 半導体製造に用いられる装置の管理装置及びその管理方法
TW479193B (en) * 2000-11-29 2002-03-11 Ind Tech Res Inst Multiplier with low power consumption and the operation method thereof
KR100572911B1 (ko) * 2001-02-20 2006-04-24 동경 엘렉트론 주식회사 배기열 이용 시스템, 배기열 이용 방법, 반도체 제조 설비및 반도체 제조 공장의 열회수 시스템
JP4073186B2 (ja) * 2001-09-20 2008-04-09 大日本スクリーン製造株式会社 基板処理装置のスケジュール作成方法及びそのプログラム
JP2003142358A (ja) * 2001-11-07 2003-05-16 Canon Inc 製造システム及びその制御装置及び制御方法及び制御プログラム及び記憶媒体
JP2003188067A (ja) 2001-12-14 2003-07-04 Canon Inc 半導体露光装置

Also Published As

Publication number Publication date
JP4753172B2 (ja) 2011-08-24
JP2006230146A (ja) 2006-08-31
CN100570981C (zh) 2009-12-16
KR100960428B1 (ko) 2010-05-28
KR20060093055A (ko) 2006-08-23
US7376490B2 (en) 2008-05-20
CN1825731A (zh) 2006-08-30
US20060253225A1 (en) 2006-11-09
TW200644374A (en) 2006-12-16

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees