TWI335058B - - Google Patents

Description

1335058 . 1? Dry month, slave replacement page IX, invention description: -..* [Technical field of the invention] - The present invention relates to an engagement device and a bonding method for joining the bodies to be joined by ultrasonic vibration . [Prior Art]

For example, electrical characteristics inspection of an electronic circuit such as an IC or an LSI formed on a semiconductor wafer is performed using a probe card attached to the probe device. Probe cards usually contain a circuit board and a contactor. Under the contactor opposite to the wafer, a plurality of probe pins are supported via the connection terminals; by electrically contacting the probe pins of the plurality of electrodes with the electrodes of the electronic circuit, the electrical conductivity of the wafer is performed.仏 ( (refer to Japanese Patent Publication No. 2_77242). As means for bringing the small components such as the probe pin and the connecting material into contact with each other, a device for performing ultrasonic bonding is known. The joining device includes an engaging member that abuts the (four) pin and an ultrasonic vibration 给予 that imparts ultrasonic vibration to the engaging member. When the probe pin and the connection terminal are joined, for example, as shown in FIG. 12, the connection of the contact terminal 92 of the contactor 91 is upward, and the circuit board 93 is placed, and the probe pin is placed on the connection terminal 92. The probe pin % is pressed from above by the front end of the joint member 96. Then, the joint member 96 is ultrasonically vibrated by the vibration of the ultrasonic vibrator. Then: by transmitting the ultrasonic vibration of the joint member 96 to the probe pin 95, the probe pin % friction end 92 rubs against each other, and the probe pin % and the connecting material are generated to observe: H can make the probe pin 95 Connection terminal %. Connected. The device, by means of the joint member 96, is easily slid laterally relative to the pile-in-the-spot pin & member 96, in this case, not from 116I50-990223.doc 1335058 f|year > month 9 page The joint member 96 transmits vibration to the probe pin 95 efficiently. Further, the probe pin 95 is also apt to slide laterally with respect to the connection terminal 92. In this case, the probe pin 95 cannot be joined to the correct position. Therefore, it is necessary to increase the pressing force of the joint member 96, but in this case, the joint terminal 92 and the probe pin 95 may be deformed by deformation. SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and an object thereof is to provide an engaging device capable of preventing a joint body from being smoothly joined to each other even if a low C-force is applied to prevent lateral sliding of the joined body. And bonding method. The present invention for solving the above problems is an engaging device characterized in that: the engaging member is brought into contact with the upper surface of the first joined body placed on the upper surface of the first joined body by The joining member ultrasonically vibrates the second joined body, thereby joining the first joined body and the second joined body; and the joining member is provided with the second joined body The contact portion and the holding portion of the holder. Further, the contact member may be provided with the uneven portion on the second member body = the uneven portion (four), and the contact portion and the holding portion may be formed by the unevenness on the joint member. The concavities and convexities of the joint member are described, and the amp & _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The thousand-faced surface serves as the aforementioned contact portion, the aforementioned convex portion. The convex portion may be disposed at the center of the flat surface of the .f ^ ” bitter ί. In addition, the convex portion may be provided with plural numbers. M6I50-990223.doc 1335058 Previous:: Set:: Borrow _ In the contact member, the recessed portion may be provided as the holding portion: the wide recessed portion, or may be provided at a central portion of the flat surface. Further, a plurality of recessed portions may be provided.

The moving concave and convex portions may be arranged alternately along the ultrasonic vibration direction of the joint member. The first to-be-joined body may be an electrode that is disposed on the surface of the probe to be inspected in the probe card of the electrical property of the object to be inspected, and the second object to be joined is used to contact the object to be inspected. Probe pin. <

According to the present invention, the present invention is characterized in that it is a joining method in which the first joined body and the second joined body are slidably joined by ultrasonic vibration, and the first joined body is joined. The upper surface mounting portion: the joined body '- while holding the upper surface of the first-joined body by the holding portion provided on the joint member, presses the contact portion provided on the joint member against the second portion The object to be joined is ultrasonically vibrated by the ultrasonic vibration of the joining member, and the first joined body and the second joined body are welded to each other. The joint member may be ultrasonically vibrated while the concavities and convexities provided on the joint member are engaged with the concavities and convexities provided in the second joined body. The first object to be joined may be an electrode provided on a surface facing the object to be inspected in a probe card for inspecting electrical characteristics of the object to be tested, and the first object to be joined may be in contact with the object to be inspected. Probe pin. According to the present invention, the second joined body is laterally slid with respect to the engaging member when the engaging member vibrates by the holding portion of the engaging member holding the second engaged 116150-990223.doc 1335058. Therefore, it is possible to prevent the second (four) joint (4) from being displaced from the position of the first joined body, and the accuracy of the joint position of the first joined body can be improved, and the contact portion of the joint member contacts the second joined body. 'ΓThe vibration of the joint member is surely transmitted to the second joined body: the straw can be safely pressurized without damaging the first joined body and the second joined body, preventing the positional displacement of the second joined body The second joined body and the connecting terminal are efficiently welded and a sufficient bonding force is obtained. [Embodiment] A preferred embodiment of the present invention will be described. The figure shows the configuration of the probe device 3 and the probe device of the connection terminal by the bonding device of the present invention. In the probe device 1, for example, the parent office right w #丨卜Λ X is provided with the (4) card 2, and the mounting table 3 which is the W0W of the object to be inspected is placed. The probe card 2 includes, for example, a plurality of probe pins 1A for contacting the wafer electrodes, a contactor U for holding the plurality of probe pins underneath, and a wafer for inspection A printed wiring board (circuit board) 12 having electrical characteristics. The contactor Μ printed wiring board 12 is formed, for example, in a substantially rectangular plate shape. The contactor 11 includes an outer surface opposite to the wafer w at the time of electrical property inspection (the lower surface ma and the connection surface (upper surface) iib mounted on the printed wiring board 12. The plurality of connection terminals are provided on the outer ua' (electrode) (1) The probe pin 10' is bonded to each of the connection terminals 13. W. On the connection surface iib, a plurality of contact terminals (electricity 4: capacitors 15, etc.) connected to the printed wiring board 12 are disposed. The wire substrate 12 is implanted via the contact end B 116150-990223.doc 1335058.·??^刀#03⁄4 page change *rm-I, Λ -· pirate U can be energized to be configured and can be probed by the contactor 11 Pin 〇 〇 _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ 20, and bending the front end portion η at a specific angle with respect to the beam portion 2 (). In Fig. 2, a concave portion 22 is provided on the flat surface 2A of the lower surface side of the beam portion 20. The concave portion 22, along the beam The width direction of the part 2〇 (the direction orthogonal to the longitudinal direction, the direction from the front side to the inner side in Fig. 2) The side surface extending from the side of one side of the beam portion 20 (front side) to the side of the other side (inner side) is provided in an elongated groove shape. The longitudinal cross-sectional shape of the recess 22 has a specific width (the length direction of the beam portion 20) The width of the b) and the specific depth (the step between the plane 2〇 & and the bottom surface of the recess 22) h is substantially rectangular. The recess 22 and the recess in the longitudinal direction of the beam 20 are located. The plane 2〇a on both sides of the 22 (i.e., the convex portion with respect to the concave portion 22) is formed with irregularities 23; in the longitudinal direction of the beam portion 2〇, the concave portion 22 is formed alternately with the plane 2〇a of the convex portion The shape of φ is set, and the two side faces on the inner side of the concave portion 22 are configured to be substantially perpendicular to the vibration direction D1 of the ultrasonic vibration to be described later when the probe pin 1 is joined to the connection terminal 13 by the bonding device 30 to be described later. Vertically and respectively contacting both sides of the convex portion 42 of the joint member 31. The connection terminal 13' is formed of a conductive material such as metal. The probe pin 1 is supported as a flat plane 2 on the upper surface side of the beam portion 20. 〇b is bonded under the connection terminal 13 The plane i3a is in a state where the front end portion 21 is inclined downward. Further, the probe pin 1 is electrically connected to the printed wiring board 12 via the connection terminal 丨3 and the contactor. 116150-990223.doc 1335058 When the electrical characteristics of the electronic circuit formed on the wafer w are checked, as shown in FIG. 1, the wafer w is placed on the summer gate 3 of the first battle, and the crystal is placed by placing 3 The circle W rises to the side of the contactor, and then the electrodes of the sundial W are brought into contact with the front end 21 of the corresponding probe pin 10*> Then, an electrical signal is transmitted and received between the printed circuit board 12, the contact terminal 14, the contactor 丨丨, and the contact ferrule 13 and the probe (4). Thereby, the electrical characteristics of the electronic circuit on the wafer are inspected. Next, the configuration of the bonding apparatus 3G of the present embodiment will be described. Fig. 2 shows a joining device 3 for joining the probe pin 1 as the second joined body to the connecting terminal 13 as the first joined body. As shown in Fig. 3, the engaging device 30 includes an engaging member (member) 31, a holding mechanism 32 for holding the engaging member, and a body 34 in which the ultrasonic vibrator 33 for vibrating the engaging member 31 is housed. Further, under the bonding member 31, the contact center holding before mounting on the printed wiring board 12 and the mounting table 36 on which the holder 35 is placed are included. Further, the step of "joining the probe (4) to the connection terminal 13 by the bonding means 3" is performed before the contactor 11 is mounted on the printed wiring board 12. The holding mechanism 32 is supported by the body 34 of the joining device 3 in such a manner that the axial direction is in a lateral direction in the vibration direction (the left-right direction in Fig. 3) D1. The joint member 31' is attached to the front end portion of the holding mechanism 32 with the front end portion facing downward. The ultrasonic vibrator 33' is provided on the base end side of the holding mechanism 32. By the vibration of the ultrasonic vibrator 33, the holding mechanism 32 vibrates in the axial direction, and the front end portion of the joint member 31 vibrates in the vibration direction D1. As shown in Fig. 4, at the front end of the joint member 3 1 , substantially horizontally disposed J16150-990223.doc

1335058 has a flat face 40 of generally rectangular shape. A convex portion 42 is provided at a central portion of the flat surface 4A in the vibration direction di. The convex portion 42 protrudes downward from the front end portion of the joint member 3 1 . Further, the convex portion 42 is formed in an elongated substantially rectangular parallelepiped shape 'and is provided in the width direction D2 (the direction orthogonal to the vibration direction D1, the direction from the front side to the inner side in FIG. 4), from the front end portion of the joint member 3 The edge portion of one side (front side) extends to the edge portion of the other side (inner side). The longitudinal cross-sectional shape of the convex portion 42 has a specific width (width of the vibration direction (1))

Degree) b, a substantially rectangular shape of a specific step (step difference between the flat surface 40 and the lower surface of the convex portion 42) h. The convex portion 42 has two side faces which are respectively substantially perpendicular to the vibration direction D1 of the joint member 31, and is configured such that when the probe pin 1〇 and the connection terminal 13 are engaged, the two side faces of the convex portion 42 are respectively disposed along the aforementioned The two sides of the recess 22 on the pin 10 are in contact therewith. Thus, the ultrasonic vibration of the joint member 31 can be efficiently transmitted from the both side faces of the convex portion 4 2 to the probe pin 10. The uneven portion 43 is formed by the convex portion 42 and the flat surface 4〇 located on both sides of the convex portion 42 (i.e., the two concave portions with respect to the convex portion 42). The unevenness 43 is formed in a shape in which the concave portion 22 and the plane 2〇a of the convex portion are alternately arranged in the vibration direction D1. Further, the concavities and convexities 43 can be engaged with the concavities and convexities 23 of the probe pins 1A, as shown in Fig. 5, in a state where the convex portions 42 are inserted into the concave portions 22, the flat faces 40 and the concave portions 22 on both sides of the convex portion a can be made. The planes 20a on both sides are in close contact with each other. In this case, the 'convex is mainly used as the fixed portion'; the flat surface 4 on both sides of the convex portion 42. Mainly = the vibration of the joint member 31 is transmitted to the probe pin 10 to contact the contact portion of the probe pin Functioning, that is, being individually set as a holding part and 116150-990223.doc -11- 1335058

The composition of the parts. The functional portion and the concave portion 22 provided as the contact portion of the probe pin H) function as a held portion held by the convex portion (4). Further, the planes 2〇& on both sides of the concave portion 22 function as contact portions of the contact flat surface 40.

The holding body 35 is formed in a substantially rectangular tray shape, and a holding space 51 having a size that can be inserted into a portion of the contact surface Ub of the contactor is opened. The holding space 51 has an internal space 5U for accommodating the contact terminal 14 and the capacitor 15 and the like from the upper surface of the holding body 35 to a specific depth. The outer periphery of the internal space 51a is provided with a connection for placing the contactor u. The step portion 51b of the peripheral portion of the surface lib. The contactor u is in a state in which the connection surface of the connection surface is the lower surface, the contact terminal 14 and the capacitor 15 are housed in the internal space 51a, and the peripheral edge portion of the connection surface 11b is in contact with the upper surface of the step portion 51b, and the outer surface 11a is oriented. The upper side and the connection terminal 13 are inserted into the holding space 51 in a state of being above the contactor n. In this manner, the contact is held by the holder 35, and the holder 35 is placed on the upper surface of the substantially horizontal level of the mounting table, and the contactor 丨丨 is kept substantially horizontal. Further, the plane 13a formed as the connecting member 13 is substantially horizontal, and the plane 2〇a of the probe pin 10 placed on the flat surface 13a is also substantially horizontal. The contact terminal 14 on the side of the connection surface, the capacitor 15, and the like are protected by surrounding the holder 35 in the internal space 51a in a non-contact state. Therefore, damage to the contact terminal 14 and the capacitor 15 on the connection surface lib side can be prevented. Further, a plurality of pressing members 53 are attached to the holding body 35 to press the peripheral portion of the outer surface 11a of the contactor 11 into which the holding space 51 has been inserted. The base end portion of each pressing member 53 is detachably attached to the surface of the holding body 116150-990223.doc -12-1335058, and the front end portion extends to one of the holding portions 51 before the end portion can be pressed from above. :卩# by compaction. The outer lla holds the contactor 11. another

In addition, in the illustrated example, 'the outer surface of the contactor u is u A step portion 11 c, which is the step portion i i c. , '.卩δ is further provided with a body 35拄/, and 3 is mounted to mount the contactor 11 on the side of the central portion of the holding 4 which is lower than the outer surface 11a, and the pressing member

The upper surface is disposed, "the front end of the pressing member 53 is I: the side surface on the center side of the outer surface. The base end of each pressing member 邛 is fixed to the holding body 35 by screwing or the like by screws 53a, for example. The upper surface, and the pressing member 53, for example, may be provided correspondingly to the four sides of the outer surface Ua of the contactor U. Thus, the contactor 11 can be held. The bonding device 3A is configured to connect the probe pin 1 to the connection terminal 13. First, as shown in Fig. 3, the contactor 11 is inserted into the holding space 51 of the holding body 35, and the pressing member is mounted. The outer surface 11a of the contactor 11 is held. When the holding space 51 is inserted, the contactor

The "year" correction replacement page outer surface 11a faces upward, the peripheral portion of the connection surface 11b is placed on the step portion 51b, and the contact terminal 14 and the capacitor 15 are disposed in the internal space 5u. The holder of the contactor 11 is thus held. After being fixed to the mounting table 36, as shown in FIG. 5, the probe pin 1 is placed on one of the connection terminals 13 mounted on the contactor U. That is, 'as the plane 2 below the beam portion 20 〇b is in contact with the plane i3a which is the upper surface of the connection terminal 13, and the probe pin 10 is placed. After the beam portion 20 is placed on the connection terminal 13, the joint member 31 is lowered from above the beam portion 2'. The unevenness 43 is close to the unevenness 23 of the plane 20a which is the surface of the upper surface of the replacement page as the beam portion 2〇116150-990223.doc 1335058. At this time, the vibration direction D1 of the joint member 3i and the length of the beam portion 2〇 are formed. The direction in which the direction of the 'joining member' is in the width direction D2 coincides with the width direction of the beam portion 2'. Then, the convex portion 42 of the joint member η is inserted into the concave portion 22 of the beam portion 2 from above. Thereby, the concavo-convex and the concavities 43 resonate with each other, and the flat surfaces 40 on both sides of the convex portion 42 are respectively adhered to each other along the plane 20a on both sides of the concave portion 22, and the beam portion 2 is pressed from above by the joint member 31. Thus, the concavo-convex 23 and the concavities and convexities 43 are in mesh with each other, the joint member Η is pressed against the beam portion 汕, and the plane 2〇b of the beam portion 20 is in close contact with the plane ua of the connection terminal 13 and the second is from the super-chopper vibrator 3 2 The vibration ultrasonic vibration causes the joint member 3 i to vibrate in the vibration direction D1. The ultrasonic vibration of the ultrasonic vibrator 32 is transmitted to the beam portion 2 by the holding mechanism 32 and the joint member 3''. Thereby, the probe pin ίο vibrates in the vibration direction D1, and the plane 2〇b of the beam portion 2〇 and the plane 13a of the connection terminal 13 rub against each other. By the frictional heat, the planes 2〇b are respectively melted and welded to each other. In particular, both side faces of the convex portion 42 and the side faces of the concave portion are in close contact with each other while being substantially perpendicular to the vibration direction (1), whereby the vibration of the engaging member 31 is effectively directed from the both sides of the convex portion 42 toward the picking pin 10. transfer. In this manner, ultrasonic vibration is given by the joint member 31, whereby the probe pin 10 is joined to the connection terminal 13. Then, the engaging member 31 ascends from the probe pin 10, and the convex portion 42 is withdrawn from the recess 22. As described above, the joining by the joining device 30 ends. The contactor 接合 to which the probe pin 接合 is bonded is carried out from the bonding device 30, and then mounted on the printed wiring board 12. Thereby, the probe card 2 is completed. According to the above embodiment, the probe pins are respectively disposed on the probe pins 116150-990223.doc • 14-1335058 10, the concavo-convex 23 of the joint member 31, and the concavities and convexities 43 are meshed with each other, and the probe pin 1 The member to be joined 3 1 is pressed, thereby reliably holding the probe pin. When the probe member 3 1 'is vibrated, the convex portion 42 does not come out of the concave portion 22, and the convex portion 42 surely continues to hold the concave portion 22, so that the probe pin 10 can be prevented from the joint member 3 1 slide horizontally. Therefore, it is possible to prevent the position of the probe pin 1 〇 from being displaced with respect to the joint member 3 1 and the probe pin 1 连接 of the connection terminal 13 , and the probe pin 1 可以 can be accurately engaged with the correct position with respect to the connection terminal 13 . φ set. In particular, by arranging the concave portion and the convex portion in the vibration direction D1 of the joint member 31 and the probe pin 1〇, the positional displacement of the joint member 3丨 and the probe pin 10 in the vibration direction D1 can be effectively prevented. . Further, even if the engaging member 31 lowers the pressing force of the pressing probe pin and vibrates, the positional displacement of the probe pin 10 can be surely prevented. That is, the bonding of the probe pins 10 can be performed safely by the appropriate pressing force of the undamaged joint member 31, the probe pin 10, and the connecting terminal 13. Further, by preventing the probe pin 10 from sliding relative to the probe pin 1 of the engaging member 31, the vibration energy of the engaging member 31 is surely transmitted to the probe pin 10, and is efficiently converted into the probe pin 10. Friction heat between the connection terminal 13. Therefore, the bonding by ultrasonic vibration can be performed efficiently. Further, although the concave portion 22 is held by the convex portion 42, the flat surface fastener is pressed on both sides of the convex portion 42 and the concave portion 22, and the probe pin can be held more stably. 10, and the vibration of the engaging member 31 can also be reliably transmitted to the probe pin. Furthermore, the contact member 3ι is in contact with the probe pin 1〇

The area (refer to Fig. 6) is larger than the contact area of the joint member of the device and the probe pin (refer to Fig. 11) compared with the previous $#$, A element, and the force L ^ J is opposite to the pin pin 1 A larger range is given a pressure of 116150-990223.doc -15-1335058. In this case, the area where the heat is generated between the plane 20b and the plane l3a is increased, and the joint between the plane 20b and the plane 13a is increased by the joint of the (4) joint, and the probe is fixedly mounted to the connection terminal 13 . In the above embodiment, the first to-be-joined body is the connection terminal 13, and the first to-be-joined body is the probe pin 1G. However, the first to-be-joined body and the second are not limited thereto. Further, the present invention is not limited to the case where the probe is pinned: the connection terminal of the wood pin card can be applied to the connection of various electronic components or the like, and can be applied to, for example, a bonding device of a semiconductor wafer. That is, a bonded body may be a connection electrode of a semiconductor wafer, and the second bonded body may be a bonding wire. In the above embodiment, the joint member 31 is ultrasonically vibrated in the lateral direction of vibration D1, but the present invention is also applicable to the longitudinal direction of the vibration, that is, the probe pin 1 is made by the joint member 31. When the ultrasonic wave is vibrated in the vertical direction, the position of the probe pin 1〇 can be surely prevented from being displaced by being held in the state in which the convex portion 42 is inserted into the concave portion 22. In the above embodiment, when the probe pin 1 is joined to the connection terminal 13, the flat surface 4 of the contact portion of the joint member 31 and the flat surface 20 of the contact portion of the probe pin 1 are brought into contact with each other, but The convex portion 42 of the holding portion and the concave portion 22 of the held portion may not necessarily be in contact. For example, as shown in Fig. 7, the step h with respect to the convex portion 42 of the flat surface 40 may be formed to be smaller than the depth h of the concave portion 22. In this configuration, in a state where a gap is formed between the lower surface of the convex portion 42 and the bottom surface of the concave portion 22, the flat surface 40 contacts the respective probe pins 1A. Thus, the flat surface 40 can be surely brought into contact with the flat surface 20a, so that the vibration of the joint member H6I50-990223.doc -16·1335058_.day correction replacement page '·31 is reliably transmitted from the flat surface 40. Further, since the processing accuracy of the concave portion 22 and the convex portion 42 is not strictly required, the processing is easy. Further, the shape of the concave portion 22, the convex portion 42, and the like is not limited to those disclosed in the above embodiments. For example, both side surfaces of the convex portion 42 and the two side surfaces of the concave portion 22 are substantially perpendicular to the vibration direction D1. However, as shown in FIG. 8, for example, the convex portion 42 and the concave portion 22 may be configured to have a vibration direction di. The longitudinal cross-sectional shape of the substantially trapezoidal shape is narrower as the width becomes smaller, and both side faces of the convex portion 42 and both side faces of the concave portion are inclined with respect to the vibration direction m. In the case of this climbing, it is possible to prevent friction between the outer surface of the convex portion and the inner surface of the concave portion 22 when the insertion convex portion 42 is inserted into the concave portion 22, and it is easy to smoothly insert and insert. In the above embodiment, the concavities and convexities 43 are formed by i convex portions 42 and flat surfaces 4 〇 (i.e., two concave portions) on both sides, and the concave portion 23 is formed by i concave portions 22 and planes on both sides thereof 20a (that is, two convex portions), the total of three pairs of concave portions and convex portions are sprayed together, but the number of concave portions and convex portions φ included in each of the irregularities 43 and 23 is not limited to this form, and may be Four or more pairs of recesses are engaged with the jaws. For example, a plurality of convex portions 42 may be arranged in the vibration direction m on the flat surface 4, and the convex portions 42 are respectively inserted into the plurality of concave portions 22 which are arranged in the longitudinal direction on the plane 2〇a. Further, in the above embodiment, the description has been made of the case where the convex portion 42 is provided on the flat surface 40 of the joint member 31 and the concave portion ^ is provided on the plane 2〇a of the probe pin 10, but for example, as shown in FIG. Further, a concave portion 61 that is recessed upward from the flat surface 4〇 may be provided at a central portion of the flat surface 40 of the joint member 31, and the flat surface 2〇a of the probe pin 1〇 may be provided to protrude upward from the plane 2〇a. The convex 116150-990223.doc 1335058 ?? 命月相狂 replacement page # 62 ° 形 悲 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , In other words, the convex portion 63 is formed on the central portion and the flat surface 2〇a provided on both sides of the convex portion 4 62 with respect to the two convex portions of the concave portion 6丨 (that is, with respect to the convex portion) The two recesses 62 are configured to constitute the unevenness 64. Further, the concave portion 61 configured as the concave-convex portion 63 functions as a holding portion, and the convex portion 62 functions as a held portion, and the flat surface 40 on both sides of the concave portion 61 functions as a contact portion, and the planes on both sides of the convex portion Q 2〇a acts as a part to be touched. At the time of joining, in a state where the convex portion "inserted into the concave portion 61, the flat surface 4A on both sides of the concave portion 61 and the convex portion 62 is in contact with the flat surface 20a. In this case, the concave portion may be inserted by the convex portion. Preventing the position of the probe pin 10 from being displaced with respect to the engaging member 31, the probe pin 1 可以 can be surely held. The depth of the concave 卩6 1 (the step difference between the upper surface of the concave portion 6 与 and the flat surface (10)) h3 The height of the convex portion 62 (the step difference between the upper surface of the convex portion 62 and the plane 2〇a) h4 may be almost the same as each other, but as shown in FIG. 1A, the depth...the height h4 may be large. In other words, the flat surface 40 may be brought into contact with the probe pin 1G in a state in which a moderate gap is formed between the upper surface of the convex portion Q and the upper surface of the concave portion 61. Thus, the flat surface (10) can be surely The contact plane 20a reliably transmits the vibration of the joint member 31 from the flat surface 4. In addition, the processing of the recess 22 and the projection 42 is not strictly required: 2 = 2, and the present invention is described with reference to the drawings. The preferred embodiment has been described. However, the present invention is not limited to this example. When have been appreciated at 5 contained in the range of the technical idea within the scope of the patent application, it is conceivable for each 116150-990223 .doc 1335058 V% correction replaced monthly private page

A modified example or a modified example, the scope of the technique. It is a matter of course that the present inventors have made the joining force (plane 2〇b and plane 13a) when the probe pin 1〇 and the connection terminal 13 are joined by the bonding device 30 described in the embodiment. The bonding force between the bonding force and the bonding force between the probe pin 10 and the connection terminal 13 using the prior bonding device was as follows: 1. Experiment 1) (Experiment 1) ® Using the bonding device 3〇, Forty-six specimens having the elongated substantially rectangular parallelepiped probe pin 7 and the connection terminal 13 as shown in FIG. The probe pin 70 of the prototype used has the same unevenness 23 as the beam portion 2'' on the proximal end side. The front end side of the probe pin 70 is extended to the outer side of the connection terminal 13 in a state where the base end side is joined to the flat surface 13a of the connection terminal 13. The prototype was placed with the probe pin 7 〇 facing the bear above the connection terminal 丨 3, and the front end of the probe pin 70 was pressed from above, and the probe pin 7 was bent.

φ Pressurization of the probe pin 70 is performed until the lower end of the front end of the probe pin 70 contacts the outer surface Ua of the contactor U located below it (the state indicated by the chain line in Fig. u), or until the base of the probe pin 70 The end side is peeled off from the connection terminal 13. In this manner, it is confirmed whether or not the probe pin 7 is peeled off from the connection terminal 对3 for each of the prototypes, and the bonding force between the probe pin 70 and the connection terminal 13 is compared. The table shows the results of the experiment. Further, in Table 1, the magnitude of the joining force is expressed by a ratio with respect to the reference value when a certain reference value is set to 1 (the same is also shown in Table 2 to be described later). As shown in Table 1, among the 46 prototypes, the peeling of the probe pin 70 and the connection terminal 13 occurred in the three prototypes. That is, the peeling hair Z U6150-990223.doc 1335058 _ fl year > month _ positive replacement page rate is about 6.5 [%]. Further, the joining force of 46 prototypes had a minimum value (Min) of 13, a maximum value (Max) of 21, an average value (Ave) of about 19.8, and a third value (σ: standard deviation) of about 4.1. Table 1 Prototype number joint force peeling 1 13 occurs 2 19 3 19 4 19 5 19 6 18 7 20 8 19 9 19 10 19 11 21 12 20 13 20 14 20 15 20 16 21 occurs 17 20 18 20 19 20 20 20 21 20 22 20 23 19 24 20 25 20 26 21 27 20 28 20 29 20 30 21 31 20 32 21 33 20 116150-990223.doc -20- 1335058

Opening Year > 4th Day Correction Replacement Page I 34 20 35 16 Occurrence 36 20 37 21 38 20 39 21 40 20 41 20 42 21 43 21 44 20 45 21 46 20 Peeling Number 3 Peeling Rate [%] 6.5 Bonding Force Min 13 joint force Max 21 joint force Avg 19.76087 joint force 3σ 4.107787

(Experiment 2)

Using the prior joining device, 46 prototypes to which the probe pins 70 and the connection terminals 13 were joined were fabricated. Then, in the same manner as in Experiment 1, the probe pin 70 was pressed against the tip end of the connection terminal 13 in the same manner as in Experiment 1, and the test of the joint force was examined. Table 2 shows the results of this experiment. As shown in Table 2, out of the 46 prototypes, peeling of the probe pins 70 occurred in 43 prototypes. That is, the incidence of peeling is about 93.5 [%]. Further, for the highest load applied to the 46 prototypes, the minimum value (Min) was about 0, the maximum value (Max) was 19, the average value (Ave) was about 9.5, and the third σ was about 15.0. Table 2 Prototype No. Joint Force Peeling 1 4 Occurrence 2 6 Occurrence 3 13 Occurrence 116150-990223.doc -21 1335058 11th of the next month 4th Renovation Replacement Page 4 0 Occurrence 5 12 Occurrence 6 5 Occurrence 7 5 Occurrence 8 10 Occurrence 9 12 occurs 10 0 occurs 11 12 occurs 12 4 occurs 13 12 occurs 14 12 occurs 15 1 occurs 16 15 occurs 17 9 occurs 18 7 occurs 19 16 occurs 20 4 occurs 21 13 occurs 22 2 occurs 23 13 occurs 24 13 occurs 25 13 Occurrence 26 9 occurrence 27 8 occurrence 28 12 occurrence 29 5 occurrence 30 4 occurrence 31 0 occurrence 32 11 occurrence 33 5 occurrence 34 10 occurrence 35 19 36 19 37 7 occurrence 38 10 occurrence 39 12 occurrence 40 13 occurrence 41 17 116150-990223. Doc -22· 1335058 Intermediary, 曰Revision replacement page 42 12 Occurrence 43 13 Occurrence 44 10 Occurrence 45 13 Occurrence 46 16 Occurrence rate ❼ Engagement force Max Engagement force Avg 93.5 19 Joint force 3σ 9.521739 15.04313 With the above experiment丨As a result of 2, it can be confirmed that the bonding is performed by using the bonding device 30 of the embodiment, and the sigma can be used in comparison with the previous bonding device. Pins 7〇 more difficult to peel off from the connection terminal 3 Shu; Further, even when the distal end portion 70 of the pin on the needle applies a force pick left foot, can resist a greater force to maintain the state of engagement. Therefore, it can be confirmed that the joining force can be lifted by using the joining device 3〇. In addition, the inventors of the present invention have compared the positional accuracy (the position of the probe pin 1〇 with respect to the connection terminal 13) when the probe pin 1 is joined to the connection terminal 13 by using the bonding apparatus 30 described in the embodiment. Experiments 3 and 4 were carried out in accordance with the positional accuracy when the probe pin 1 〇 and the connection terminal 13 were joined using the previous bonding apparatus. (Experiment 3) 48 joint probe pins and connection terminals were produced by using the bonding apparatus 30', and then tested on each of the prototypes 'in the width direction (four) direction of the probe pin 10) and the length direction (axis direction). The probe pin 1〇 is offset from the normal position (position offset measurement 'applied by image recognition technology. Table 3 shows the result. And H6150-990223.doc •23· ^58 W year ○ month is not replaced In Table 3, the magnitude of the positional offset is expressed by the ratio of the reference value to the reference value (the table 4 described later also shows the positional shift in the X-axis direction as shown in Table 3). The average value (Ave) is about 4.6, and the average value (Ave) of the positional shift in the Y-axis direction is about 48.9. In addition, the positional deviation of the X-axis direction is about 7.4, and the positional shift in the Y-axis direction is 3σ is approximately 31.1 〇 Table 3 Prototype number position offset X-axis Y-axis 1 4 41 2 2 41 3 -2 29 4 5 23 5 1 25 6 4 43 7 4 51 8 4 39 9 3 39 10 7 57 11 7 54 12 7 50 13 8 51 14 5 52 15 6 56 16 7 43 17 4 60 18 4 63 19 5 50 20 5 64 21 2 24 22 2 34 23 6 51 24 7 50 25 8 47 2 6 2 35 27 4 45 28 9 55 1161.50-990223.doc -24- 1335058

(Experiment 4)

Milk replacement page

Forty-eight specimens were joined with the probe pins 10, and the test pieces were attached to the respective test articles' and the test 3, and the previous joint device was used with respect to the connection terminals 13 to make a test piece for connecting the creepers 13. Then, the position of the probe pin 10 in the X-axis direction and the Y-axis direction is shifted. The measurement of positional offset is performed using image recognition techniques. Table 4 shows the results. As shown in Table 4, the average value (Ave) of the positional shift in the X-axis direction is about 8.3, and the average value (Ave) of the positional shift in the Y-axis direction is about 51.3. Further, 3 σ of the positional shift in the X-axis direction is about 27·7, and 3 σ of the positional shift in the γ-axis direction is about 146.8. I16150-990223.doc -25- 1335058 1 year>> (10) Two replacement page Table 4 Prototype position offset number X axis Y axis 1 22 38 2 2 38 3 2 56 4 3 112 5 22 90 6 - 8 31 7 25 93 8 17 103 9 8 27 10 11 49 11 15 31 12 6 20 13 8 41 14 20 88 15 11 74 16 11 -76 17 11 69 18 2 65 19 2 33 20 1 26 21 2 6 22 7 33 23 20 126 24 4 22 25 2 37 26 4 148 27 24 41 28 9 31 29 2 33 30 10 -13 31 -2 73 32 -2 30 33 13 166 34 -6 -84 35 -4 6 36 16 9 37 13 23

116150-990223.doc -26- 1335058 38 9 116 39 -6 44 40 3 60 41 16 103 42 16 64 43 35 ^ 107 44 9 50 45 -4 60 46 12 27 47 -2 2 48 5 ----- --- 134 Min -8 -84 Max 35 166 Avg 8.3 51.3 3 σ 27.7 146.8 By the results of Experiments 3 and 4 above, it is known that the joining is performed using the joining device 3〇, which is the case of joining with the previous joining device. The magnitude of the positional shift is reduced. With respect to 3σ, the X-axis direction and the ¥axis direction are respectively about 1/3 or less, and the deviation of the positional deviation is reduced. Therefore, it can be confirmed that the positional accuracy of the joint can be effectively improved by using the joint & [Simple description of the map]

Fig. 1 is a schematic side view showing the configuration of a probe device. Fig. 2 is a perspective view showing the configuration of the probe pin and the connection terminal in an enlarged manner. Fig. 3 is a side view showing the outline of the configuration of the joining device. Fig. 4 is a perspective view showing the front end portion of the joint member. Fig. 5 is an explanatory view showing a state in which the probe pin is joined to the connection terminal. Fig. 6 is an explanatory view showing a contact area and a joint area. Fig. 7 is such that the step of placing the crucible on the convex portion of the joint member is smaller than the recess provided in the probe pin. An explanatory diagram of the implementation form of the 洙 洙 。. Fig. 8 is an explanatory view showing an embodiment in which the cross-sectional shape of the convex portion provided in the joint member is substantially 116150-990223.doc • 27-1335058 trapezoidal. Fig. 9 is an explanatory view showing an embodiment in which a concave portion is provided as a holding portion in a joint member, and a convex portion as a held portion is provided in a probe pin. Fig. ui is an explanatory view showing an embodiment in which the depth of the concave portion provided in the joint member is larger than the step of the convex portion provided on the probe pin. Figure 11 is a series. The positional relationship between the connection terminal and the probe pin of the test 1 and 2 and the state in which the probe pin is deformed.

Fig. 12 is an explanatory view showing a state in which the probe pin is joined to the connection terminal by the prior engagement member. [Main component symbol description] 1 Probe device 2 Probe card 3 Mounting table 10, 70, 95 Probe pin 11 '91 Contactor 11a Outside (lower) lib Connecting surface (upper surface) 11c Step portion 12 Wiring board 13 ' 92 Connection terminal (electrode) 13a Plane 14 Contact terminal (electrode) 15 Capacitor 20 Beam part 116150-990223.doc •28- 1335058 ”烊>Month 4曰Revision replacement page

20a ' 20b plane 21 front end 22 ' 61 recess 23 ' 43 , 63 ' 64 concave and convex 30 engagement means 31, 96 engagement member 32 holding mechanism 33 ultrasonic vibration 34 main body 35 holding body 36 mounting table 40 flat surface 42, 62 convex portion 51 holding space 51a inner space 51b step portion 53 pressing member 53a screw b width D1 vibration direction D2 width direction h step difference W wafer 116150-990223.doc -29-

Claims (1)

1335058 Private Calling Day Correction Replacement Page I, Patent Application Range: t 1. - Type of engaging means 'which causes the engaging member to contact the upper surface of the second joined body placed on the upper surface of the first joined body, and The second joined body is ultrasonically vibrated by the joining member to thereby engage the first joined body and the second joined body, and the second engaging member is provided on the engaging member. a contact portion of the bonded body and a holding portion for holding the second joined body; the joint member is provided with an unevenness that is coupled to the unevenness of the second joined body; and the joint member is The concavities and convexities constitute the aforementioned contact portion and the aforementioned holding portion. 2. = the bonding device of claim i, wherein the joint structure is provided by a flat surface provided on the joint portion of the joint 楳 夕 w w 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及 及, the first $ a few stands, the pound is composed, and the flat surface is the aforementioned contact portion.卩 is the aforementioned holding part. 3. As in the central part of the joint of claim 2. The aforementioned convex portion is disposed in the aforementioned flat portion 5. As claimed in claim 2. Two sets, wherein the foregoing four parts are provided with plural numbers. The joint member is a flat surface of the concave portion of the flat surface, and the concave portion is provided in the front portion, and the flat surface is the contact portion 6 as described in the request. • The joint of the clothing item 5 is worn, and it is on the center of the face. The above-mentioned concave portion is provided in the above-mentioned flat portion. The joint device according to claim 5, wherein the plurality of concave portions are provided. 116150-990223.doc 1335058 8. 9. The year of the Japanese version of the replacement page, the joining device of item 1, wherein the concavities and convexities of the engaging members are alternately arranged along the vibration direction of the ultrasonic vibration of the engaging member. The bonding device of claim 1, wherein said first bonded system is disposed; - an electrode of a probe card having electrical characteristics of the object to be inspected on a surface opposite to the object to be inspected; / said second being joined (four) for contact In the above-mentioned inspection Zhao's probe 10' kind bonding method', which is welded by ultrasonic vibration to join the first joined body and the second joined body; and the surface of the first joined body is described Mounting the second joined body; pressing the contact portion provided on the joining member against the second joined body while holding the upper surface of the second joined body by the holding portion provided in the joining member; Ultrasonic vibration of the joint member causes ultrasonic vibration of the second joined body to weld the first joined body and the second joined body to a concave portion provided in the joint member The engaging member is ultrasonically vibrated in a state of being engaged with the unevenness of the second joined body. 11. The joining method of claim 10, wherein the first joined system is set in the inspection Check the electrical connection of the body, 1_4$: ^^1_上_^1&1 the electrode on the opposite side of the probe card to the object to be inspected; the second joined system is used to contact The probe pin of the above-mentioned object to be inspected. 116150-990223.doc 1335058 巧)〉〇二, 换页七, designated representative figure: (1) The representative representative of the case is: (3). (2) The representative figure Brief description of component symbols: 10 Probe pin 11 Contactor 11a Outside (below) lib Connection surface (upper surface) 11c Step portion 13 Connection terminal (electrode) 13a Plane 14 Contact terminal (electrode) 15 Capacitor 30 Engagement device 31 Engagement member 32 Holding mechanism 33 Ultrasonic vibrator 34 Main body 35 Holding body 36 Mounting table 51 Holding space 51a Internal space 51b Step portion 53 Pressing member 53a Screw D1 Vibration direction, if there is a chemical formula in this case, Please reveal the chemical formula that best shows the characteristics of the invention (none) 116150-990223.doc