1332474 (1) 九、發明說明 【發明所屬之技術領域】 本發明是關於一種爲了加工或檢査等來搬運板狀工件 的托盤搬運系統。 【先前技術】 眾知，先前將使用於電子顯示器（液晶顯示器或電漿 顯示器）等的板狀工件沿著搬運路徑一面搬運一面製造的 •托盤搬運系統。在此種托盤搬運系統中，沿著將滾子運送 機作爲搬運手段的搬運路徑，板狀工件的處理裝置依照處 理順序配置成一列。然後，沿著搬運路徑來搬運未加工的 板狀工件，而以設於搬運路徑的各部的處理裝置施以加工 處理。 板狀工件是在容納於托盤等的保護殻的狀態，被投入 至搬運路徑。如此，成爲需要在將板狀工件供給於處理裝 φ置之際，從托盤取出板狀工件所用的手段，及將板狀工件 從搬運路徑搬運至處理裝置所用的手段，及保管取出板狀 工件的托盤所用的手段，及處理後再將板狀工件容納於托 盤所用的手段，及將板狀工件從處理裝置搬運至搬運路徑 所用的手段。 爲了解決上述課題，由本案申請人申請複數件有關於 將板狀工件由托盤取出或容納所用的手段，及將托盤保管 成層積之狀態所用的手段的發明。例如有專利文獻1或專 利文獻2。 -4- (2) 1332474 在上述申請發明中，作爲將托盤保管成層積的狀態所 用的手段’分別提案有最先被保管在保管手段的托盤是在 最後被取出至搬運路徑的所謂「先入後出式」者（專利文 獻υ，及不管被保管在保管手段的順序，選擇任意的托 盤而可取出至搬運裝置的所謂「選擇出入式」者（專利文 獻2)。又，「選擇出入式」的保持手段，是也可功能作 爲從被保管在保管手段的托盤依次被取出至搬運路徑的所 .φ 謂「先入後出式」的保管手段。 -專利文獻1:日本特開2004-168484號公報 專利文獻2:日本特開2004-168469號公報 【發明內容】 上述「先入後出式」及「選擇出入式」的保管手段是 分別具有特徵，又，分別具有優點。例如在「選擇出入式 」的保管手段，以任意順序可取出托盤，因此適用於將板 φ狀工件供給於決定板狀工件的處理間的等待時間所決定的 處理裝置的情形，或是將最先被保管的板狀工件最先進行 處理的情形等。「先入後出式」的保管手段，是比「選擇 出入式」者，可將裝置構成作成更簡單，因此可作成高速 化、小型化，而可抑制成本。 在本發明中，鑑於上述習知技術，將可實行托盤的「 先出後入的保管手段，及可實行托盤的先出先入的保管手 段，及選擇任意的托盤而可出入的保管手段，加以適當地 組合並配置於搬運路徑，提案一種作成可進行有效率的托 (3) 1332474 盤搬運系統。 本發明欲解決的課題是如上所述，以下說明解決該課 題所用的手段。 亦即，在申請專利範圍第1項中，一種托盤搬運系統 ，屬於在將板狀工件容納對於托盤的狀態下進行搬運，並 從托盤取出板狀工件的手段，及將板狀工件容納於托盤的 手段，及在搬運路徑保管托盤所用的保管手段具備在搬運 φ 路徑的托盤搬運系統，其特徵爲：作爲上述保管手段具備 :將托盤保管在朝一方向依次層積的狀態，而且從最後被 層積的托盤依次可取出至搬運路徑的先入後出式的保管裝 置，及將托盤保管在朝一方向依次層積的狀態，而且從最 初被層積的托盤依次可取出至搬運路徑的選擇出入式的保 管裝置。 在申請專利範圍第2項中，沿著上述搬運路徑配置複 數處理裝置，對於在處理時間的實行間隔被要求均勻性的 φ處理裝置，在到達其處理裝置的搬運路徑上，設置上述選 擇出入式的處理裝置，而對於其他處理裝置，在到達該其 他處理裝置的搬運路徑上，設置上述先入後出式的保管裝 置。 在申請專利範圍第3項中，一種托盤搬運系統，屬於 在將板狀工件容納對於托盤的狀態下進行搬運，並從托盤 取出板狀工件的手段，及將板狀工件容納於托盤的手段， 及在搬運路徑保管托盤所用的保管手段具備在搬運路徑的 托盤搬運系統，其特徵爲：作爲上述保管手段具備：將托 -6- (4) 1332474 盤保管在朝一方向依次層積的狀態，而且從最後被層積的 托盤依次可取出至搬運路徑的先入後出式的保管裝置，及 將托盤保管成層積的狀態，而且將所期望的托盤從所保管 的托盤選擇性地取出至搬運路徑的選擇出入式的保管裝置 〇 在申請專利範圍第4項中，在上述選擇出入式的保管 裝置，具備：被保管於該保管裝置的層積托盤中，將被層 φ 積於取出選擇的托盤上方的托盤，及被層積於取出選擇的 托盤下方的托盤，疏散至未干涉到取出選擇的托盤對於搬 運路徑的取出動作的位置的手段》 在申請專利範圍第5項中，將上述先入後入式的保管 裝置，設置於在搬運路徑上從托盤取出板狀工件的手段及 將板狀工件容納於托盤的手段之間；將上述選擇出入式的 保管裝置，設置於從托盤取出板狀工件的手段的搬運路徑 上游，及將板狀工件容納於托盤的手段的搬運路徑下游中 φ ，任一方，或是雙方。 作爲本發明的效果，發揮如下所示的效果。 在申請專利範圍第1項中，將先入後出式的保管手段 ，及實行托盤的先入先出的選擇出入式的保管手段適當地 組合而具備於搬運路徑，成爲有效率地進行搬運。 在申請專利範圍第2項中，一面謀求托盤搬運系統整 體的搬運路徑的縮短，及與托盤搬運系統的構成的成本的 均衡，一面可進行有效率的搬運。 在申請專利範圍第3項中，將先入後出式的保管手段 (5) 1332474 ，及選擇任意的托盤而可出入的選擇出入式的保管手段適 當地組合而具備於搬運路徑，成爲有效率地進行搬運。 在申請專利範圍第4項中，可簡單地構成被層積保管 的托盤中選擇性地取出所期望的托盤所用的機構。 在申請專利範圍第5項中，有關於板狀工件的搬運， 可作成先入先出方式，而對於托盤單體的搬運，可作成先 入後出方式，就可減低托盤搬運系統的成本。 【實施方式】 以下，說明發明的實施形態，第I圖是表示本發明的 實施例的托盤搬運系統的整體性構成的圖式。第2圖是表 示搬運運送機的構造的圖式；第3圖是表示板狀工件與托 盤的構造的圖式；第4圖是表示所層積的托盤的圖式；第 5圖是表示移載裝置的構造的圖式；第6圖是表示先入後 出式保管裝置的構造的圖式；第7圖是表示一枚托盤被保 φ管的保管裝置的樣子的圖式；第8圖是表示欲保管新托盤 的保管裝置的樣子的圖式；第9圖是表示一枚托盤被保管 的保管裝置的樣子的圖式；第10圖是表示選擇出入式保 管裝置的構造的圖式；第Π圖是表示欲保管新托盤的保 管裝置的樣子的圖式；第12圖是表示三枚托盤被保管的 保管裝置的樣子的圖式；第13圖是表示托盤被取出至搬 運路徑的保管裝置的樣子的圖式；第14圖是表示說明托 盤搬運系統的保管裝置的配置的圖式。 如第1圖及第14圖所示地，托盤搬運系統100是將 -8- (6) 1332474 容納板狀工件1的托盤2，沿著搬運路徑3進行搬運者。 作爲以本發明的托盤搬運系統100所處理的板狀工件，有 被使用於電子顯示器（液晶顯示器或電漿顯示器等）的板狀 工件，或被使用於有機EL的樹脂板等》又，處理裝置5 是在電子顯示器的製程，例如爲洗淨裝置，或檢查裝置， 成膜裝置，蝕刻裝置等，在板狀工件1施以處理所用的裝 置，或是組合此些裝置。但是，處理裝置6是並不被限定 φ 於作爲上述一例所列舉的處理者。 托盤2的搬運手段是作爲搬運運送機4,而直線狀地 連結搬運運送機4，4…，以構成搬運路徑3。在搬運路徑 3的途中，配置有：從被搬運在搬運路徑3上的托盤2取 出板狀工件1所用的移載裝置3 2(3 2A)，及將板狀工件1 交接到處理裝置5所用的連絡運送機3 0(30 A)，及將板狀 工件1從處理裝置5交接到搬運路徑3所用的連絡運送機 3 0 (3 0B)，及將板狀工件容納於搬運在搬運路徑3上的托 φ盤2所用的移載裝置32(32B)。又，在搬運路徑3的途中 ，具備有將托盤2保管成層積狀態的保管裝置15(15A)， 15(15B)。又，運送機30及移載裝置32的符號，是在對 於處理裝置5的搬入側賦予符號A，而對於處理裝置5的 搬出側賦予符號B。 以下說明搬運運送機4β如第1圖及第2圖所示地， 在搬運運送機4具備：支持托盤2並進行搬運的多數滾子 13，13···，及容納滾子13的驅動力傳達機構的本體4a， 及在搬運方向的左右端豎設於本體4a的導件4b，4b。又 -9 - (7) 1332474 ，本體4a是藉由支持腳4c，4c···，被支持在地板面上方 。以沿著搬運方向串聯地配置的滾子13，13···，來構成 複數滾子例，作爲具備於本體4a的驅動手段的電動機（未 圖示）的動力，經由皮帶或滑輸等驅動力傳達手段被傳達 ，而來驅動各滾子13。由此，托盤朝搬運方向移動滾子 13，13…上，成爲被搬運至搬運路徑3上。 以下說明托盤2。如第1圖及第3圖所示地，板狀工 φ 件1是以板面la與搬運運送機4的搬運面成爲大約平行 的姿勢被容納在托盤2。容納板狀工件1的托盤2是藉由 搬運運送機4被搬運在搬運路徑3上，當被搬運到沿著搬 運路徑3所配設的處理裝置5的側方時，藉由移載裝置 32使得板狀工件1從托盤2取出而被移載至連絡運送機 30。 如第3圖所示地，托盤2的形狀是對應於板狀工件1 的形狀而作成板狀。托盤2是主要由底面2a，導件2b， 馨導件2c，卡合凹部2d，突出部2a，卡合穴2f，階段差部 2h，載置板狀工件1而用以支持的支持體14，在移載裝 置32利用於板狀工件1的交接的通過孔31等。 在底面2a的搬運方向前後兩端，豎設有比支持體14 上端更朝上方延出的導件2b，2b，以謀求防止板狀工件1 朝搬運方向前後的脫落。一方面，在底面2a的搬運方向 左右周緣部，分別豎設有前後一對的導件2c，2c，以謀 求防止板狀工件1的搬運方向左右的脫落。 在托盤2’於導件2b的上面左右，突設有突出部2e -10- (8) 1332474 ，2e，而且從底面2a的下面朝下方形成有卡合穴2f，2f …。又’如第4圖所不地’當上下地重疊托盤2，2時， 使得各突出部2 <卡合於各卡合穴2f，被制止所層積的 托盤2，2朝水平方向的移動，而精度優異地可層積多數 托盤2。 以下說明移載裝置32。由托盤2取出板狀工件1的 移載裝置32a’及將板狀工件1容納於托盤2的移載裝置 p 32B，是大約相同的構成，切換下述的移載滾子36的旋轉 方向，就可切換成由托盤2取出板狀工件1的動作，及將 板狀工件1容納於托盤2的動作，而功能作爲移載裝置 32A或移載裝置32B® 如第5圖所示地’移載裝置32是主要由：共部33， 昇降台34，滾子單元35，移載滾子36，控制裝置40等 所構成。移載裝置32是被配置在構成搬運路徑3的搬運 運送機4下方。移載裝置32的基部33是具有朝上下方向 φ昇降的機構，而在基部33上部設有昇降台34。又，在昇 降台34的上面，豎設有滾子單元35，35...，而在滾子單 元35的上面軸線方向與搬運路徑3的搬運方向大約一致 的移動滾子36，36···，被樞裝成可旋轉驅動。又，移載 裝置32的昇降及移載滾子36的旋轉驅動，是藉由控制手 段40被控制。 一方面，在搬運運送機4的底面穿設有開口部，而滾 子單元35是貫通搬運運送機4底面的開口部而朝上方突 出。滾子單元35上面的高度是當移載裝置32下降時，則 -11 - (9) 1332474 位在比搬運運送機4的滾子13，13···，的上端更低，且 與沿著搬運路徑3被搬運的托盤2底面未抵接的待機位置 。又，滾子單元35上面的高度是當移載裝置32上昇時， 比搬運運送機4的滾子13，13…的上端更高，且與沿著 搬運路徑3被搬運的托盤2底面抵接的移動裝置。亦即， 移載裝置32是藉由控制手段40，在待機位置與移載位置 之間切換自如地控制滾子單元35，由托盤2僅可移載板 φ 狀工件1。 又，滾子單元35，35…是當托盤2位於搬運運送機 中上，且移載裝置32正上方位置時，配置成在平面視與 穿設於托盤2的底面2a的通過孔31，31…大約一致。設 於滾子單元35，35…上面的移載滾子36，36...，是其上 端比滾子單元35，35…上面更朝上方突出，使得移載裝 置32進行上昇時，移動滾子36的上端是來到比設於搬運 路徑3上的托盤2的支持體14的上端更高的位置。 φ 藉由如上的構成，當托盤2位於搬運運送機4上，且 在移載裝置32的正上方時，使得移載裝置32上昇，得滾 子單元35是由托盤2的通過孔31朝上方突出。又，於托 盤2容納有板狀工件1時，則板狀工件1的下面是藉由移 動滾子36’ 36…上端所支持，成爲由支持體分開而被 抬高的狀態。在該狀態下使得移載滾子3 6被旋轉驅動， 則被支持於移載滾子36的板狀工件1是被搬運至搬運路 徑3的側方，而且托盤2在搬運運送機4上朝搬運方向被 搬運。由此，從托盤2取出板狀工件1而朝連絡運送機 -12- (10) 1332474 3 0A移載板狀工件1，或是可將連絡運送機3 OB所搬運來 的板狀工件1容納於托盤2。 以下說明連絡運送機3 0。如第1圖所示地，連絡運 送機3 0(3 0A)，3 0(3 0B)，是配置於設在搬運運送機4的移 載裝置3 2的側方。設於搬運路徑3的上游側的連絡運送 機30(30A)是連接搬運路徑3與處理裝置5的搬入口（未圖 示），成爲將板狀工件1從搬運路徑3搬入到處理裝置5 φ 所用的搬入路徑。又，設於搬運路徑3的下游側的連絡運 送機30(30B)是連接搬運路徑3與處理裝置5的搬出□(未 圖示），成爲將板狀工件1從處理裝置5搬出到搬運路徑 3所用的搬出路徑。 連絡運送機30的基本上的構成是與搬運運送機4大 約相同，具備：多數滾子37，37···，及旋轉驅動該滾子 37的驅動力傳達機構（未圖示），及板狀工件1不會從連絡 運送機30脫落所用的導件38，38，及支持腳39，39…等 籲。 以下說明保管裝置15»如第1圖所示地，在搬運路 徑3的適當位置，設有儲存托盤2的保管裝置15(15A， 15B)。保管裝置15是由搬運路徑3暫時疏散托盤2者》 又’保管裝置15是將所保管的托盤2投入在搬運路徑3 者。又，被保管於保管裝置15的托盤2，是藉由搬運路 徑3的保管裝置的托盤2,是藉由搬運路徑3的保管 裝置15的配置，成爲板狀工件1被容納的狀態或板狀工 件1被取出成爲空的狀態。 -13- (11) 1332474 設於搬運路徑3的保管裝置15，以托盤2的積載方 法及取出方法可進行分類，一種是以與被積載保管者相反 的順序來取出托盤2的「先入後出式保管裝置15A」。另 —種是不管所保管的順序，可取出被積載保管的托盤2, 2…中的任意托盤2的「達擇出入式保管裝置15B」。又 ，選擇出入式保管裝置15B是由最先保管的托盤2，以被 積載保管者相同的順序可進行取出，也可功能作爲所謂「 φ 先入先出式」的保管裝置》以下，說明各保管裝置的構造 〇 以下說明先入後出式保管裝置15A。如第6圖所示地 ，先入後出式保管裝置15A是主要由保持手段18，昇降 手段1 9，控制此些的控制手段4 1等所構成。 在昇降手段19具備：被載置於地板面的基部20，及 對於基部20進行上下地進退的昇降台21。在昇降台21， 於基板21a的前後豎設有板狀構件的支持板21b，21b， φ在側面視作成凹形狀。在搬運運送機4的下面，形成有插 通支持板21b，21b的開口 4d，4d，使得支持板21b，21b 通過滾子13，13間而成爲與托盤2下面可抵接的狀態· 因此，藉由將昇降手段19進行昇降，可將位於搬運路徑 3上且位於昇降手段19正上方的托盤2,從搬運路徑3分 開，而朝上方抬高或下降而可載置在搬運路徑3上》 保持手段18是圍繞昇降手段19般地，由配置在搬運 運送機4的外側的四個制止部22，22…所構成。各制止 部22是具備：豎設於地板面的圓柱狀支柱23,及與支柱 -14- (12) 1332474 23同軸地設置，且將支柱23的長度方向作爲轉動軸進行 轉動的旋轉體24,在旋轉體24固設有平面視呈大約L型 的制止構件25。制止構件25是藉由制止部22的轉動， 構成可移動在與托盤2卡合的卡合位置，及解除與托盤2 的卡合的卡合解除位置之間。 對於由如上述所構成的先入後出式保管裝置15A產 生的托盤2的保管順序加以說明。第6圖是表示藉由搬運 φ 運送機4將托盤2搬運到保管裝置15的正上方的狀態。 由表示於第6圖的狀態，首先將保持手段18的制止部22 轉動至卡合解除位置，來解除托盤2與制止構件25的卡 合。之後將昇降手段19進行上昇，將托盤2朝上方抬高 被穿設於托盤2的導件2b，2b的卡合凹部2d，2d及保持 手段18的制止構件25成爲大約相同高度爲止的位置。 然後，轉動保持手段18的制止部22，來卡合托盤2 與制止構件25。該狀態表示於第7圖的狀態，托盤2是被 φ保持手段18所支持，即使下降昇降手段19，托盤2是仍 被保持在與搬運路徑3上方分開的位置。又，這時候，若 下降昇降手段，可將藉由保持手段18所保持的狀態的托 盤2下方作成可通過其他托盤2。 第8圖是表示藉由保持手段18使得托盤2所保持的 狀態下，其他托盤2沿著搬運路徑3被搬運到昇降手段 19正上方爲止的狀態。從該狀態，首先使得新保管的托盤 2的上面，與層積保持於保持手段18的最下層的托盤2 的底面2a抵接的位置爲止一直上昇昇降手段19，俾將新 -15- (13) 1332474 保管的托盤2層積在最下層。然後，轉動保持手段18的 制止部22，俾解除被層積保持於保持手段18的最下層的 托盤2及制止構件25的卡合。之後，使得新保管的托盤 2的卡合凹部2d，2d，及保持手段】8的制止構件25成爲 大約相同高度爲止一直上昇昇降手段19。又，制止構件 25的前端部25a，卡合於新保管的托盤2的卡合凹部2d ，2d的位置爲止，一直轉動保持手段18的制止部22。該 φ 狀態爲表示於第9圖的狀態。構成如此，可將新托盤2層 積在被層積保持於保持手段18的托盤2，2…的最下層。 以下，說明取出被保管於先入後出式保管裝置15A 的托盤2的順序。以層積狀態被保管於該先入後出式保管 裝置15的托盤群，是位於比由運送機4所搬運的托盤2 更上方位置，俾將托盤群的下方沿著搬運路徑3，托盤2 是位於移動自如的狀態。如此，首先，抵接於層積於保持 手段18的最下層的托盤2爲止，一直上昇昇降手段19。 φ在該狀態下，轉動保持手段18的制止部22，以解除最下 層的托盤2，及制止構件25的卡合。然後，比層積於最 下層的托盤2更上方的托盤2的卡合凹部2d，2d，及保 持手段1 8的制止構件25成爲大約相同高度的位置爲止， 一直下降昇降手段19。又，轉動保持手段18的制止部22 ，卡合最下層的托盤2與保持手段18的制止構件25。又 ，使得最下層的托盤2到達搬運運送機4上爲止一直下降 昇降手段19。如此地，被層積於保持手段18的托盤2，2 …中，從位於最下層的托盤2，依次地被取出至搬運路徑 -16- (14) 1332474 3»因此，最先被保管的最上層的托盤2，成爲最後被取 出。 在先入後出式保管裝置15A，是將托盤2從下方朝一 方向重疊層積於搬運路徑3的上方並加以保管。又，被層 積保管的托盤2中，從位於最下層的托盤2取出至搬運路 徑3。但是，可將托盤2保管成層積於搬運路徑3側方的 狀態的形態者，或是將從上方朝一方向堆積托盤2並加以 φ 保管而由被層積保管的托盤2中位於最上層的托盤2取出 至搬運路徑3的形態者，採用作爲先入後出式保管裝置 15A。亦即，先入後出式保管裝置15A是並不被限定於上 述實施例的構成，將可層積保管被搬運在搬運路徑3的托 盤2，而以與被層積保管的順序相反的順序可取出至搬運 路徑3者，可採用作爲先入後出式保管裝置15A。 以下說明選擇出入式保管裝置15B。如第10圖所示 地在選擇出入式保管裝置15B是由：以層積托盤2的狀態 φ地保管在比搬運運送機4的搬運面更高位置所用的保持手 段18，及昇降托盤2，又以層積托盤2的狀態地保管在比 搬運運送機4的搬運面更低位置所用的昇降手段19，及 從托盤2的搬運面疏散搬運滾子的疏散手段5 0，及控制 此些的控制手段4 I等所構成。 在昇降手段19具備：被載置於地板面的基部20，及 對於基部20進行上下地進退的昇台21。昇降台21是疏 散補助運送機49，49的情形下，經被形成於搬運面的開 口，作成在搬運面的上下地可移動。 -17- (15) 1332474 保持手段18是圍繞昇降手段19般地，由配置在 運送機4的外側的四個制止部22，22…所構成。各 部22是具備：豎設於地板面的圓柱狀支柱23，及與 23同軸地設置，且將支柱23的長度方向作爲轉動軸 轉動的旋轉體24，在旋轉體24固設有平面視呈大約 的制止構件25。又》保持手段]8是與具備於先入後 保管裝置15A者大約同樣的構造。1332474 (1) Description of the Invention [Technical Field] The present invention relates to a pallet transport system for transporting a plate-shaped workpiece for processing, inspection, or the like. [Prior Art] Conventionally, a pallet handling system manufactured by transporting a plate-shaped workpiece such as an electronic display (liquid crystal display or plasma display) along a conveyance path has been known. In such a pallet transport system, the processing means of the plate-shaped workpieces are arranged in a row in the order of processing along the transport path using the roller conveyor as a transport means. Then, the unprocessed plate-shaped workpiece is conveyed along the conveyance path, and the processing is performed by the processing means provided in each part of the conveyance path. The plate-like workpiece is placed in a conveyance path in a state of being housed in a protective case such as a tray. In this way, it is necessary to take out the plate-shaped workpiece from the tray when the plate-shaped workpiece is supplied to the processing device φ, and the means for transporting the plate-shaped workpiece from the conveyance path to the processing device, and to take out the plate-shaped workpiece. The means used for the tray and the means for accommodating the plate-like workpiece in the tray after processing, and the means for transporting the plate-shaped workpiece from the processing device to the transport path. In order to solve the above problems, the applicant of the present invention has applied for a plurality of means for removing or accommodating a plate-like workpiece from a tray, and a means for storing the tray in a state of being stacked. For example, there is Patent Document 1 or Patent Document 2. -4- (2) 1332474 In the above-mentioned application, the means for storing the trays in a stacked state is proposed as the so-called "pre-entry" in which the trays that are first stored in the storage means are finally taken out to the conveyance path. (Public document), and the "selection and entry type" that can be taken out to the transport device by selecting an arbitrary tray regardless of the order of the storage means (Patent Document 2). In the case of the holding means, the storage means is taken from the tray which is stored in the storage means in order to the conveyance path, and the storage means is "the first-in, first-out-out type". - Patent Document 1: Japanese Patent Laid-Open No. 2004-168484 [Patent Document 2: JP-A-2004-168469] SUMMARY OF THE INVENTION The above-mentioned "first-in, first-out-out" and "select-in-and-out" storage means each have their own characteristics, and each has its own advantages. For example, in "selecting an access type" Since the storage means can take out the tray in an arbitrary order, it is suitable for the position determined by the waiting time for supplying the sheet-shaped workpiece to the processing for determining the plate-like workpiece. In the case of the device, the case where the plate-shaped workpiece stored first is processed first, etc. The storage means of "first-in, first-out-out" is simpler than the "selection-in" type, and the device configuration can be made simpler. Therefore, it is possible to increase the speed and size, and it is possible to suppress the cost. In the present invention, in view of the above-described conventional techniques, it is possible to implement a "first-in and second-out storage means for the tray" and a storage means for the first-in-first-out of the tray. And a storage means that can be accessed by selecting an arbitrary tray, and appropriately arranged and arranged in the conveyance path, and a tray conveyance system capable of performing efficient (3) 1332474 is proposed. The problem to be solved by the present invention is as described above. In the first aspect of the patent application, a pallet handling system belongs to a case where a plate-shaped workpiece is accommodated in a state in which a tray is accommodated, and a plate-shaped workpiece is taken out from the tray. Means, means for accommodating the plate-like workpiece on the tray, and means for storing the φ path in the storage means for the storage path storage tray In the storage system, the storage device includes a storage device in which the trays are sequentially stacked in one direction, and the storage trays are sequentially taken out from the last stacked trays to the conveyance path. The tray is stored in a state in which the trays are stacked in the first direction, and the trays that are initially stacked are sequentially taken out to the storage type of the storage type. In the second item of the patent application, the plurality of processing is arranged along the conveyance path. In the device, the φ processing device that requires uniformity in the execution interval of the processing time is provided with the processing device for selecting the input/exit type on the transport path that reaches the processing device, and the other processing device is at the other processing device. In the transport path, the storage device of the above-described first-in and last-out type is provided. In the third aspect of the patent application, a pallet handling system belongs to a state in which a plate-shaped workpiece is accommodated in a tray and a plate-shaped workpiece is taken out from the tray. Means, means for accommodating the plate-like workpiece on the tray, and storage in the transport path The storage means for the disk is provided with a tray conveyance system in the conveyance path, and the storage means is provided in a state in which the trays of the trays are stacked in one direction, and are stacked in the last direction. The trays are sequentially taken out to the storage device, and the trays are stored in a stacked state, and the desired trays are selectively taken out from the stored trays to the storage path. In the fourth aspect of the patent application, the storage device of the above-described selection type is provided in a storage tray that is stored in the storage tray, and the layer φ is accumulated on the tray above the tray selected for removal, and is The means for arranging the trays under the trays under the selected trays and evacuating them to the position where the trays are removed from the selected trays for the removal operation of the transport path. In the fifth item of the patent application, the storage device of the first-in and the second-in type is Provided between means for taking out the plate-like workpiece from the tray on the transport path and means for accommodating the plate-shaped workpiece on the tray; The storage device of the selective type is provided in the upstream of the conveyance path of the means for taking out the plate-like workpiece from the tray, and in the downstream of the conveyance path of the means for accommodating the plate-shaped workpiece on the tray, either or both. As an effect of the present invention, the following effects are exhibited. In the first aspect of the patent application, the storage means for the first-in and the-out type, and the storage means for selecting the in-and-out-out type of the tray are appropriately combined and provided in the conveyance path, and are efficiently transported. In the second application of the patent application, efficient transportation can be performed while reducing the overall conveyance path of the pallet transport system and balancing the cost of the configuration of the pallet transport system. In the third item of the patent application, the storage means (5) 1332474 of the first-in and the last-out type, and the storage means for selecting the access type which can be selected and accessed by selecting an arbitrary tray are appropriately combined and provided in the conveyance path, and are efficiently Carry it out. In the fourth item of the patent application, the mechanism for selectively taking out the desired tray in the tray stored in the stack can be easily constructed. In the fifth item of the patent application, the handling of the plate-shaped workpiece can be made into a first-in first-out method, and the handling of the tray unit can be made into a first-in and second-out mode, thereby reducing the cost of the pallet handling system. [Embodiment] Hereinafter, an embodiment of the invention will be described. Fig. 1 is a view showing an overall configuration of a pallet transport system according to an embodiment of the present invention. Fig. 2 is a view showing a structure of a transport conveyor; Fig. 3 is a view showing a structure of a plate-shaped workpiece and a tray; Fig. 4 is a view showing a stacked tray; and Fig. 5 is a view showing shifting FIG. 6 is a view showing a structure of a first-in and last-out type storage device; and FIG. 7 is a view showing a state in which a tray is protected by a φ tube; FIG. 8 is a view FIG. 9 is a view showing a state in which a storage device for storing a new tray is stored; FIG. 10 is a view showing a configuration of a storage device in which a tray is stored; and FIG. 10 is a view showing a structure for selecting a storage device for depositing and receiving; FIG. 12 is a view showing a state in which a storage device for storing a new tray is stored; FIG. 12 is a view showing a state in which a storage device for storing three trays is stored; and FIG. 13 is a storage device showing a tray being taken out to a conveyance path; Fig. 14 is a view showing the arrangement of a storage device for the pallet transport system. As shown in Figs. 1 and 14, the pallet transport system 100 is a pallet 2 in which a plate-like workpiece 1 is accommodated by -8-(6) 1332474, and is transported along the transport path 3. The plate-shaped workpiece to be processed by the pallet conveyance system 100 of the present invention may be used for a plate-shaped workpiece for an electronic display (such as a liquid crystal display or a plasma display) or a resin plate for an organic EL. The device 5 is a process for manufacturing an electronic display, for example, a cleaning device, an inspection device, a film forming device, an etching device, or the like, a device for performing processing on the plate-like workpiece 1, or a combination of such devices. However, the processing device 6 is not limited to φ as a processor as exemplified in the above example. The transport means of the tray 2 is a transport conveyor 4, and the transport conveyors 4, 4, ... are linearly connected to constitute the transport path 3. In the middle of the conveyance path 3, a transfer device 3 2 (32A) for taking out the plate-like workpiece 1 from the tray 2 conveyed on the conveyance path 3, and a transfer device for transferring the plate-like workpiece 1 to the processing device 5 are disposed. The transport conveyor 30 (30 A) and the transport conveyor 3 (30B) for transporting the plate-like workpiece 1 from the processing device 5 to the transport path 3, and the plate-shaped workpiece are accommodated in the transport path 3 The transfer device 32 (32B) used for the upper φ disk 2. Further, in the middle of the conveyance path 3, storage devices 15 (15A), 15 (15B) for storing the trays 2 in a stacked state are provided. Further, the symbols of the conveyor 30 and the transfer device 32 are assigned a symbol A to the loading side of the processing device 5, and a symbol B is assigned to the carrying-out side of the processing device 5. In the transport conveyor 4, as shown in FIG. 1 and FIG. 2, the transport conveyor 4 includes a plurality of rollers 13 and 13 that support the tray 2 and are transported, and a driving force for accommodating the rollers 13. The main body 4a of the communication mechanism and the guides 4b, 4b of the main body 4a are erected at the left and right ends in the conveying direction. Further -9 - (7) 1332474, the body 4a is supported above the floor surface by the support legs 4c, 4c, .... The roller 13 , 13 . . . , which is arranged in series along the conveyance direction, constitutes a plurality of rollers, and is driven by a belt or a slip as a power of a motor (not shown) provided in a driving means of the main body 4a. The force communication means is conveyed to drive the rollers 13. Thereby, the tray is moved to the conveyance path 3 by moving the rollers 13, 13 ... in the conveyance direction. The tray 2 will be described below. As shown in Fig. 1 and Fig. 3, the plate-shaped workpiece 1 is housed in the tray 2 in a posture in which the plate surface la and the conveyance surface of the conveyance conveyor 4 are approximately parallel. The tray 2 accommodating the plate-shaped workpiece 1 is transported on the transport path 3 by the transport conveyor 4, and when transported to the side of the processing device 5 disposed along the transport path 3, the transfer device 32 is transported. The plate-like workpiece 1 is taken out from the tray 2 and transferred to the contact conveyor 30. As shown in Fig. 3, the shape of the tray 2 is formed into a plate shape corresponding to the shape of the plate-like workpiece 1. The tray 2 is a support body 14 mainly for supporting by the bottom surface 2a, the guide 2b, the singular guide 2c, the engaging recess 2d, the protruding portion 2a, the engaging hole 2f, the step portion 2h, and the plate-like workpiece 1 being placed thereon. In the transfer device 32, the through hole 31 or the like for the transfer of the plate-like workpiece 1 is used. Guide members 2b and 2b extending upward from the upper end of the support body 14 are vertically provided at the front and rear ends of the bottom surface 2a in the conveyance direction, so as to prevent the plate-like workpiece 1 from coming off before and after the conveyance direction. On the other hand, a pair of front and rear guides 2c and 2c are vertically provided on the left and right peripheral edges of the bottom surface 2a in the conveyance direction, so as to prevent the conveyance direction of the plate-like workpiece 1 from falling off to the right and left. On the upper and lower sides of the guide 2b of the tray 2', projecting portions 2e-10-(8) 1332474, 2e are protruded, and engaging holes 2f, 2f, ... are formed downward from the lower surface of the bottom surface 2a. Further, when the trays 2 and 2 are stacked up and down as shown in Fig. 4, the projections 2 are engaged with the respective engagement holes 2f, and the stacked trays 2, 2 are prevented from being horizontally oriented. Moving, and stacking most of the trays 2 with excellent precision. The transfer device 32 will be described below. The transfer device 32a' for taking out the plate-like workpiece 1 from the tray 2 and the transfer device p32B for accommodating the plate-like workpiece 1 on the tray 2 have the same configuration, and the rotation direction of the transfer roller 36 to be described later is switched. The operation of taking out the plate-like workpiece 1 from the tray 2 and the operation of accommodating the plate-like workpiece 1 on the tray 2 can be switched to function as the transfer device 32A or the transfer device 32B® as shown in Fig. 5. The carrier device 32 is mainly composed of a common portion 33, a lifting table 34, a roller unit 35, a transfer roller 36, a control device 40, and the like. The transfer device 32 is disposed below the transport conveyor 4 constituting the transport path 3. The base portion 33 of the transfer device 32 has a mechanism for raising and lowering in the vertical direction φ, and a lifting platform 34 is provided on the upper portion of the base portion 33. Further, on the upper surface of the elevating table 34, the roller units 35, 35 are vertically provided, and the moving rollers 36, 36·· which are approximately coincident with the conveying direction of the conveying path 3 in the upper axial direction of the roller unit 35. · It is pivoted to be rotatably driven. Further, the lifting and lowering of the transfer device 32 and the rotational driving of the transfer roller 36 are controlled by the control means 40. On the other hand, an opening is formed in the bottom surface of the transport conveyor 4, and the roller unit 35 protrudes upward through the opening of the bottom surface of the transport conveyor 4. The height above the roller unit 35 is such that when the transfer device 32 is lowered, the -11 - (9) 1332474 position is lower than the upper end of the rollers 13, 13 ... of the transport conveyor 4, and along with The standby position where the bottom surface of the tray 2 to which the conveyance path 3 is conveyed is not abutted. Further, the height of the upper surface of the roller unit 35 is higher than the upper end of the rollers 13, 13 of the transport conveyor 4 when the transfer device 32 is raised, and is in contact with the bottom surface of the tray 2 that is transported along the transport path 3. Mobile device. That is, the transfer device 32 controls the roller unit 35 to be freely switchable between the standby position and the transfer position by the control means 40, and the tray 2 can only transfer the workpiece φ-shaped workpiece 1. Further, the roller units 35, 35, ... are arranged such that the tray 2 is placed in the transport conveyor and is disposed at a position directly above the transfer device 32, and is disposed in a plane view and a through hole 31, 31 which is bored in the bottom surface 2a of the tray 2. ...about the same. The transfer rollers 36, 36... disposed on the roller units 35, 35... are protruded upward from the upper end of the roller units 35, 35... so that when the transfer device 32 is raised, the movement roller is moved. The upper end of the sub-36 is at a position higher than the upper end of the support 14 of the tray 2 provided on the conveyance path 3. φ With the above configuration, when the tray 2 is placed on the transport conveyor 4 and directly above the transfer device 32, the transfer device 32 is raised, and the roller unit 35 is directed upward by the through hole 31 of the tray 2. protruding. Further, when the plate-like workpiece 1 is accommodated in the tray 2, the lower surface of the plate-like workpiece 1 is supported by the upper ends of the moving rollers 36' 36, and is lifted by the support and raised. When the transfer roller 36 is rotationally driven in this state, the plate-like workpiece 1 supported by the transfer roller 36 is conveyed to the side of the conveyance path 3, and the tray 2 is moved toward the conveyance conveyor 4 The conveying direction is carried. Thereby, the plate-like workpiece 1 is taken out from the tray 2, and the plate-like workpiece 1 is transferred toward the ligature conveyor -12-(10) 1332474 3 0A, or the plate-shaped workpiece 1 carried by the ligature conveyor 3 OB can be accommodated. On the tray 2. The connection conveyor 30 will be described below. As shown in Fig. 1, the transport conveyors 30 (30A) and 30 (30B) are disposed on the side of the transport device 3 2 provided in the transport conveyor 4. The connection conveyor 30 (30A) provided on the upstream side of the conveyance path 3 is an entrance (not shown) that connects the conveyance path 3 and the processing apparatus 5, and carries the plate-shaped workpiece 1 from the conveyance path 3 to the processing apparatus 5 φ The moving path used. In addition, the connection conveyor 30 (30B) provided on the downstream side of the conveyance path 3 is an unloading port (not shown) that connects the conveyance path 3 and the processing apparatus 5, and carries out the plate-shaped workpiece 1 from the processing apparatus 5 to the conveyance path. 3 used to move out the path. The basic structure of the transport conveyor 30 is substantially the same as that of the transport conveyor 4, and includes a plurality of rollers 37, 37, and a driving force transmission mechanism (not shown) that rotationally drives the rollers 37, and a board. The guides 38, 38 for the workpiece 1 are not detached from the conveyor 30, and the support legs 39, 39, etc. Hereinafter, as shown in Fig. 1, the storage device 15» is provided with a storage device 15 (15A, 15B) for storing the tray 2 at an appropriate position of the conveyance path 3. The storage device 15 temporarily evacuates the tray 2 by the conveyance path 3, and the storage device 15 is the one that puts the stored tray 2 on the conveyance path 3. In addition, the tray 2 stored in the storage device 15 is the tray 2 of the storage device 3, and is placed in the state in which the plate-shaped workpiece 1 is accommodated by the storage device 15 of the conveyance path 3. The workpiece 1 is taken out to be in an empty state. -13- (11) 1332474 The storage device 15 provided in the transport path 3 can be classified by the stowage method and the take-out method of the tray 2, and the tray 2 is taken out in the reverse order of the stowage holder. Storage device 15A". In addition, regardless of the order of storage, it is possible to take out the "selective access storage device 15B" of any of the trays 2, 2, ... which are stored and stored. In addition, the in-and-out storage device 15B is selected from the trays 2 that are stored in the first place, and can be taken out in the same order as the stowage storage person. Structure of Apparatus 先 The first-in and last-out type storage apparatus 15A will be described below. As shown in Fig. 6, the first-in and last-out type storage device 15A is mainly constituted by the holding means 18, the raising/lowering means 192, and the control means 4 1 and the like. The elevating means 19 includes a base 20 that is placed on the floor surface, and a lifting table 21 that moves up and down the base 20 up and down. In the elevating table 21, the support plates 21b, 21b of the plate-like members are vertically disposed on the front and rear sides of the substrate 21a, and φ is formed in a concave shape on the side surface. On the lower surface of the transport conveyor 4, openings 4d and 4d through which the support plates 21b and 21b are inserted are formed so that the support plates 21b and 21b pass through the rollers 13 and 13 to be in contact with the lower surface of the tray 2. Therefore, By raising and lowering the lifting and lowering means 19, the tray 2 located on the conveying path 3 and positioned directly above the lifting and lowering means 19 can be separated from the conveying path 3 and raised or lowered upward to be placed on the conveying path 3. The holding means 18 is constituted by four stopping portions 22, 22, ... disposed outside the conveying conveyor 4, around the lifting means 19. Each of the stopping portions 22 includes a cylindrical pillar 23 that is vertically disposed on the floor surface, and a rotating body 24 that is disposed coaxially with the pillar 14-(12) 1332474 23 and that rotates the longitudinal direction of the pillar 23 as a rotating shaft. A stopper member 25 having an approximately L shape in plan view is fixed to the rotary body 24. The stopper member 25 is configured to be movable between the engagement position with the tray 2 and the engagement release position for releasing the engagement with the tray 2 by the rotation of the stopper portion 22. The storage order of the tray 2 produced by the first-in and last-out type storage device 15A configured as described above will be described. Fig. 6 is a view showing a state in which the tray 2 is transported directly above the storage device 15 by the transport φ transporter 4. In the state shown in Fig. 6, first, the restraining portion 22 of the holding means 18 is rotated to the engagement releasing position, and the engagement between the tray 2 and the restraining member 25 is released. Then, the elevating means 19 is raised, and the tray 2 is raised upward. The engaging recesses 2d, 2d of the guides 2b, 2b which are inserted through the tray 2, and the restraining members 25 of the holding means 18 are at the same height. Then, the stopper portion 22 of the holding means 18 is rotated to engage the tray 2 and the restraining member 25. This state is shown in the state of Fig. 7, and the tray 2 is supported by the φ holding means 18. Even if the lifting means 19 is lowered, the tray 2 is held at a position separated from above the conveyance path 3. Further, at this time, if the lifting means is lowered, the lower tray 2 can be made to pass through the other tray 2 under the state held by the holding means 18. Fig. 8 is a view showing a state in which the other tray 2 is transported along the transport path 3 to the front side of the elevating means 19 while the tray 2 is held by the holding means 18. In this state, first, the upper surface of the tray 2 that has been newly stored is raised and lowered by the lifting means 19 until the position where the bottom surface 2a of the tray 2 of the lowermost layer of the holding means 18 is held in contact with each other, and the new -15- (13 1332474 The tray 2 to be stored is stacked on the lowermost floor. Then, the stopper portion 22 of the holding means 18 is rotated, and the engagement between the tray 2 and the stopper member 25 which are stacked and held in the lowermost layer of the holding means 18 is released. Thereafter, the engagement recesses 2d, 2d of the trays 2 to be newly stored and the stopper members 25 of the holding means 8 are raised and lowered by the same height. Further, the distal end portion 25a of the restraining member 25 is rotated until the position of the engaging recessed portions 2d, 2d of the tray 2 newly stored, and the stopping portion 22 of the holding means 18 is always rotated. This φ state is the state shown in Fig. 9. In this configuration, the new tray 2 can be laminated on the lowermost layer of the trays 2, 2, ... which are stacked and held by the holding means 18. Hereinafter, the procedure for taking out the tray 2 stored in the first-in and last-out storage device 15A will be described. The tray group stored in the first-in and last-out storage device 15 in a stacked state is located above the tray 2 conveyed by the conveyor 4, and the tray group is placed below the tray group 2, and the tray 2 is Located in a state of freedom of movement. As described above, first, the elevating means 19 is raised as it abuts on the tray 2 stacked on the lowermost layer of the holding means 18. In this state, φ rotates the stopper 22 of the holding means 18 to release the engagement between the lowermost tray 2 and the stopper member 25. Then, the elevating means 19 is lowered until the engagement recesses 2d, 2d of the tray 2 stacked above the lowermost tray 2 and the restraining members 25 of the holding means 18 are at the same height. Further, the stopping portion 22 of the holding means 18 is rotated to engage the lowermost tray 2 and the holding member 25 of the holding means 18. Further, the lowermost tray 2 is caused to descend to the elevating means 19 until it reaches the transport conveyor 4. In this way, the trays 2, 2, ... stacked in the holding means 18 are sequentially taken out from the tray 2 located at the lowermost stage to the conveyance path - 16 - (14) 1332474 3» The upper tray 2 is finally taken out. In the first-in and last-out storage device 15A, the tray 2 is stacked on top of the conveyance path 3 in a direction from the lower side and stored. Further, the tray 2 which is stacked and stored is taken out from the tray 2 located at the lowermost stage to the conveyance path 3. However, the tray 2 can be stored in a state of being stacked on the side of the conveyance path 3, or the tray 2 can be stacked in one direction from the top and stored in the φ, and the trays located in the uppermost tray can be stacked. 2 The person who has taken out the form of the conveyance path 3 is used as the first-in and last-out type storage device 15A. In other words, the first-in and last-out storage device 15A is not limited to the configuration of the above-described embodiment, and the trays 2 that are transported on the transport path 3 can be stacked and stored in the reverse order of the order in which they are stacked. If it is taken out to the conveyance path 3, it can be used as the first-in and last-out type storage device 15A. The entrance and exit storage device 15B will be described below. As shown in FIG. 10, the entrance and exit storage device 15B is selected such that the holding means 18 and the elevating tray 2 are stored at a position higher than the conveyance surface of the conveyance conveyor 4 in the state of the stacking tray 2; Further, the elevating means 19 for lowering the transport surface of the transport conveyor 4 and the evacuation means 50 for transporting the rollers from the transport surface of the transport tray 2 are stored in the state of the stacking tray 2, and the evacuation means 50 for transporting the rollers from the transport surface of the pallet 2 are controlled. The control means 4 I and the like are constituted. The lifting and lowering means 19 includes a base portion 20 that is placed on the floor surface, and a lifting table 21 that advances and retreats up and down with respect to the base portion 20. When the elevating table 21 is the evacuation assisting conveyors 49, 49, the opening is formed on the conveying surface to be movable up and down on the conveying surface. -17-(15) 1332474 The holding means 18 is constituted by four stopping portions 22, 22, ... disposed outside the conveyor 4, around the lifting means 19. Each of the portions 22 includes a cylindrical pillar 23 that is vertically disposed on the floor surface, and a rotating body 24 that is disposed coaxially with the 23 and that rotates the longitudinal direction of the pillar 23 as a rotating shaft. The rotating body 24 is fixed in plan view. Suppression member 25. Further, the "holding means" 8 has approximately the same structure as that of the pre-entry storage device 15A.
| 在設有搬運運送機4的選擇出入式保管裝置15B 分，設有左右一對補助運送機49，49，及將補助運 49分開於運搬機4的搬運路徑外側的疏散手段50， ，可將托盤2形成作爲朝搬運運送機4的搬運面上下 移動的開口。 在搬運路徑3上，設有選擇出入式保管裝置15B 分，代替搬運運送機4，設有左右一對的補助運送機 49»補助運送機49是由對於搬運方向大約中央設成 φ退的可動框51，51，及被支撑在可動框51，51的複 運滾子52，52···。搬運滾子52，52…是使用未圖示 動機構朝搬運托盤2的方向被旋轉驅動。可動框51 是使用油壓式或電動式疏散手段50，對於搬運方向 中央進行進退驅動。 於是，在可動框51，51對於搬運方向大約中央 進出的狀態下，托盤2通過補助運送機49，49上， 著搬運路徑3，可使用搬運運送機4搬運托盤2。又 可動框51，51對於搬運方向大約中央進行後退的狀 搬運 制止 支柱 進行 L型 出式 的部 送機 由此 進行 的部 49， 可進 數搬 的驅 ，51 大約 進行 而沿 ，在 態下 -18- (16) 1332474 ，使得補助運送機49，49朝搬運方向左右地後退，而在 搬運運送機4形成有開口，經該開口使得托盤2上下地可 自由移動搬運面。又，在第10圖中，表示補助運送機49 ，49朝搬運方向左右地後退的狀態。 說明由如上述所構成的選擇出入式保管裝置15B產生 的托盤2的保管順序。第11圖是表示托盤2藉由搬運運 送機4被搬運到保管裝置15正上方的狀態。在該狀態下 φ 在搬運運送機4的搬運面上方，使用保持手段18使得複 數托盤2，2…被層積的狀態。 由表示於第11圖的狀態，首先，抵接於搬運運送機 4上的新保管的托盤2爲止，一直上昇昇降手段19。之後 ，由搬運路徑2後退補助運送機49，49。於是，新保管 的托盤2，層積在被層積保持在搬運面上方的托盤2，2… 的最下層托盤2爲止，一直更上昇昇降手段19。然後， 轉動保持手段1 8的制止部2 2，以解除托盤2與制止構件 φ 25的卡合。在該狀態下，使用昇降手段19支持被層積的 所有托盤2，2…。然後，被穿設於新保管的托盤2的導 件2，2b的卡合凹部2d，2d，及保持手段1 8的制止構件 25成爲大約相同高度的位置爲止，一直移動昇降手段19 。於是，轉動保持手段1 8的制止部2 2，以卡合制止構件 25與新保管的托盤2。然後，使得昇降手段19至搬運運 送機4的搬運面下方爲止，一直下降昇降手段19，俾將 補助運送機49，49進出至搬運路徑3’而使用補助運送 機49，49作成可搬運托盤2的狀態。由此，如第1 2圖所 -19- (17) 1332474In the selective entrance/exit storage device 15B provided with the transport conveyor 4, a pair of left and right auxiliary conveyors 49, 49 and an evacuation means 50 for separating the auxiliary transport 49 from the outside of the transport path of the transporter 4 are provided. The tray 2 is formed as an opening that moves downward on the conveying surface of the conveyance conveyor 4. In the conveyance path 3, the entrance/exit storage device 15B is provided, and instead of the conveyance conveyor 4, a pair of right and left auxiliary conveyors 49 are provided. The auxiliary conveyor 49 is movable from the center of the conveyance direction to the center. Frames 51, 51, and reload rollers 52, 52, ... supported by movable frames 51, 51. The conveyance rollers 52, 52, ... are rotationally driven in the direction of the conveyance tray 2 by using a moving mechanism. The movable frame 51 is driven by the hydraulic or electric evacuation means 50 to advance and retreat in the center of the conveyance direction. Then, in a state where the movable frames 51, 51 are moved in and out about the center in the conveyance direction, the tray 2 passes through the auxiliary conveyors 49, 49, and the conveyance path 3 is conveyed, and the tray 2 can be conveyed by the conveyance conveyor 4. Further, the movable frame 51, 51 is configured such that the portion 49 that is carried out by the L-type delivery device is retracted in the conveyance direction about the center of the conveyance stop struts in the conveyance direction, and the drive can be carried out in the same manner. -18- (16) 1332474, the auxiliary conveyors 49, 49 are retracted to the left and right in the conveyance direction, and an opening is formed in the conveyance conveyor 4, and the conveyance surface can be moved up and down by the tray 2 through the opening. In addition, in the tenth figure, the state in which the auxiliary conveyors 49 and 49 are retracted to the left and right in the conveyance direction is shown. The storage order of the trays 2 generated by the selective storage device 15B configured as described above will be described. Fig. 11 is a view showing a state in which the tray 2 is transported directly above the storage device 15 by the transport conveyor 4. In this state, φ is placed on the conveyance surface of the conveyance conveyor 4 by the holding means 18 so that the plurality of trays 2, 2, ... are stacked. In the state shown in Fig. 11, first, the lifting means 19 is raised as it comes into contact with the newly stored tray 2 on the transport conveyor 4. Thereafter, the transfer conveyors 49, 49 are retracted by the transport path 2. Then, the newly stored tray 2 is stacked on the lowermost tray 2 of the trays 2, 2, ... which are stacked and held above the conveyance surface, and the lifting means 19 is further raised. Then, the stopping portion 2 2 of the holding means 18 is rotated to release the engagement of the tray 2 with the restraining member φ 25. In this state, all the trays 2, 2, ... which are stacked are supported by the lifting means 19. Then, the engagement recesses 2d, 2d of the guides 2, 2b of the tray 2 that are newly stored, and the stopper members 25 of the holding means 18 are at positions of approximately the same height, and the lifting means 19 is always moved. Then, the stopper portion 2 2 of the holding means 18 is rotated to engage the stopper member 25 with the tray 2 newly stored. Then, the elevating means 19 is lowered to the lower side of the transport surface of the transport conveyor 4, and the elevating means 19 is lowered, and the auxiliary transporters 49, 49 are taken in and out to the transport path 3', and the auxiliary transporter 49, 49 is used to form the transportable tray 2. status. Thus, as shown in Figure 1 -19- (17) 1332474
示地，可將托盤21重新層積在選擇出入式保管裝置15B 〇 又，在上述保管順序中，托盤2是從下方朝一方向堆 積，而被保管在搬運路徑3的上方。但是，在選擇出入式 保管裝置15B，在被層積保管的托盤2的任意位置重新地 保管托盤2,或是作成從上方向朝一方向地堆積托盤2而 保管在搬運路徑3的下方也可以。 ϋ 以下，說明選擇被保管於如上所構成的選擇出入式保 管裝置15Β的一托盤2而加以取出的順序。 如第12圖所示地，在搬運運送機4的搬運面的上方 ，以保持手段18使得複數托盤2，2…被保持在層積的狀 態。從該狀態，將補助運送機49，49由搬運路徑3後退 ，並抵接於被層積保管在搬運面上方的托盤爲止，一直上 昇昇降手段。在此，當托盤2，2…群被支持在昇降台21 ，則轉動保持手段1 8的制止部22，以解除托盤2與制止 φ構件25的卡合。於是，穿設於取出選擇的托盤2的一層 上的托盤2的導件2b，2b的卡合凹部2d，2d，及保持手 段1 8的制止構件25成爲大約相同的高度位置爲止，一直 移動昇降手段19，並轉動保持手段18的制止部22，俾卡 合制止構件25與重新保管的托盤2。由此，被層積於被 取出選擇的托盤2上方的托盤2,是使用保持手段18，來 疏散到不會干涉被取出選擇的托盤2對於搬運路徑3的取 出動作的位置。 然後，被取出選擇.的托盤2到搬運運送機4的搬運面 -20- (19) 1332474 2的任意位置，重新地保管托盤2，或是可選擇任意托盤 2而加以取出，因此，也可從下方朝一方向堆積托盤2而 加以層積保管，並將與被保管的順序相同順序被層積保管 的托盤2取出至搬運路徑3的作爲先入先出方式的保管裝 置的功能。 在以上構成中，選擇出入式保管裝置15B是將被層積 於取出選擇的托盤2的上層的托盤群，及被層積於取出選 φ 擇的托盤2的下層的托盤群，作爲疏散至不會干涉到取出 選擇的托盤對於搬運路徑的取出動作的位置的手段，具備 保持手段18,及昇降手段19，及疏散手段50。尤其是， 保持手段18是將被層積於取出選擇的托盤2上層的托盤 群。分開於搬運路徑（補助運送機49，49)上方，而可疏散 至不會干涉的位置的手段。昇降手段19是將被層積於取 出選擇的托盤下層的托盤群，分開於搬運路徑（補助運送 機49，49)下方，而可疏散至不會干涉的位置的手段。疏 φ散手段50是將補助運送機49，49進行移動至搬運路徑外 側的手段，在疏散由昇降手段產生的下層托盤群之際，形 成其疏散路徑的手段，爲補助疏散由昇降手段19產生的 下層托盤群者。 上述先入後出式保管裝置15A是構成簡單，又，層 積托盤2，或取出托盤2成爲簡單，因此具有可將裝置作 成高速化、小型化，而且裝置的成本變低的優點°另一方 面，在選擇出入式保管裝置15B是由層積保管托盤2的狀 態，可取出任意的托盤2，並可變更托盤2的取出順序， -22- (20) 1332474 因此可適當地變更板狀工件1的處理或檢查，搬出等的順 序。 在第14圖表示運送機一直線狀地舖設所成的搬運路 徑4。在該搬運路徑4上，配置有處理裝置5A，5B。又 ，處理裝置5A與處理裝置5B是在1施加於板狀工件的 處理內容不相同之故，因而僅是處理裝置5是作爲不相同 的符號。又，在第14圖，在搬運路徑4上，圖示對應於 φ 處理裝置5的保管裝置15的配設位置，分別爲位置a， 位置b，位置c及位置d。 位置a是對於處理裝置5A的搬運路徑4的上游位置 ，在此，配置有實托盤保管用的保管裝置15。又，所謂 實托盤，是指收容板狀工件1的托盤2的情形。位置b是 在搬運路徑4上，位於在處理裝置5A的搬入口與搬出口 之間的位置，在此，配置有空托盤保管用的保管裝置15 。又，空托盤是指沒有板狀工件1的只是托盤2者。同樣 φ地，位置c是對於處理裝置5B的搬運路徑4的上述位置 ，在此，配置有實托盤保管用的保管裝置15。位置d是 在搬運路徑上，爲處理裝置5B的搬入口與搬出口之間的 位置，在此，配置有空托盤保管用的保管裝置15。又， 保管裝置15是總稱先入後出式保管裝置15A及選擇出入 式保管裝置15B » 配置於位置a或是配置於位置c的實托盤保管用的保 管裝置15，是依據如下的基準進行配置。在此處理時間 的實行間隔上被要求均勻性時，亦即，期盼將由事先工程 -23- (21) 1332474 的處理裝置5所搬出的板狀工件1，搬入至後續工程的處 理裝置5的時間間隔作成相等時，作爲設於事先工程與後 續工程的途中的保管裝置15，盼望可進行先入先出者。 因此，在位於連續工程的前後的一對處理裝置中被要求均 勻性時，若處理裝置5A是後續工程的處理裝置5A,則配 置於位置a的保管裝置15，是可進行先入先出的選擇出 入式保管裝置15B理想15B。同樣被要求均勻性時，若位 φ 於連續工程前後的一對處理裝置爲處理裝置5A與處理裝 置5B，則配置於位置c的保管裝置15，也盼望爲可進行 先入先出的選擇出入式保管裝置15B。 另一方面，在處理時間的實行間隔未被要求均勻性時 ，特別是不必配置可進行先入先出的保管裝置15，因此 配置先入後出式的先入後出式保管裝置15A就可以。如 此地，因應於搬運的實行間隔的需要，可分別使用可進行 先入先出的保管裝置15，及先入後出式保管裝置，一面 φ可進行適當的搬運一面不會影響到整體托盤搬運系統的成 本0 又，配置於位置b或位置c的空托盤保管用的保管裝 置15，不會有搬運順序的問題，因此配置先入後出式的 先入後出式保管裝置15A就可以。當然，若需要1對1 來對應板狀工件1與托盤2等，而被要求先入先出時，則 作成配置可進行先入先出的保管裝置15者。 又，具備本發明的托盤搬運系統】00的保管裝g ]5( 先入後出式保管裝置15A，選擇出入式保管裝置ι5Β)， -24 - (22) 1332474 移載裝置32,搬運運送機4，連絡運送機30，是並不被 限定於上述實施例所述的構造者，而分別可發揮與上述實 施例所述者大約同樣的功能者就可以。 【圖式簡單說明】 第1圖是表示本發明的實施例的托盤搬運系統的整體 性構成的圖式》 B 第2圖是表示搬運運送機的構造的圖式。 第3圖是表示板狀工件與托盤的構造的圖式。 第4圖是表示所層積的托盤的圖式。 第5圖是表示移載裝置的構造的圖式。 第6圖是表示先入後出式保管裝置的構造的圖式。 第7圖是表示一枚托盤被保管的保管裝置的樣子的圖 式。 第8圖是表示欲重新地保管托盤的保管裝置的樣子的 φ圖式》 第9圖是表示一枚托盤被保管的保管裝置的樣子的圖 式。 第10圖是表示選擇出入式保管裝置的構造的圖式。 第圖是表示欲重新地保管托盤的保管裝置的樣子 的圖式。 第U圖是表示三枚托盤被保管的保管裝置的樣子的 圖式。 第圖是表示托盤被取出至搬運路徑的保管裝置的 -25- (23) 1332474 樣子的圖式。 第14圖是表示說明托盤搬運系統的保管裝置的配置 的圖式。In the display, the tray 21 can be re-laminated in the selective storage device 15B. In the storage sequence, the tray 2 is stacked in the one direction from the lower side and stored above the conveyance path 3. However, the tray 2 is stored in any position of the tray 2 that is stacked and stored, or the tray 2 is stacked in one direction from the top and stored under the conveyance path 3. ϋ In the following, the procedure for selecting and storing a tray 2 that is stored in the above-described selective inlet and outlet type storage device 15A is selected. As shown in Fig. 12, the plurality of trays 2, 2, ... are held in a stacked state by the holding means 18 above the conveyance surface of the conveyance conveyor 4. From this state, the auxiliary conveyors 49, 49 are retracted by the conveyance path 3, and are brought into contact with the pallets stacked on the conveyance surface, and the lifting means is raised. Here, when the trays 2, 2, ... are supported by the lifting table 21, the stopping portion 22 of the holding means 18 is rotated to release the engagement between the tray 2 and the stopper φ member 25. Then, the engagement recesses 2d, 2d of the guides 2b, 2b of the tray 2 which are placed on one layer of the tray 2 for taking out the selected tray 2 and the stopper member 25 of the holding means 18 are at about the same height position, and are moved up and down. The means 19 rotates the stopping portion 22 of the holding means 18 to engage the restraining member 25 with the tray 2 to be stored again. Thereby, the tray 2 stacked on the tray 2 to be taken out is used to be evacuated to a position where the removal operation of the transport path 3 is not interfered with by the tray 2 selected and taken out. Then, the tray 2 of the selected tray is taken out to any position of the transport surface -20-(19) 1332474 2 of the transport conveyor 4, and the tray 2 is stored again, or any tray 2 can be selected and taken out, and therefore, The trays 2 are stacked in one direction from the bottom, and are stored in a stacked manner, and the tray 2 that has been stacked and stored in the same order as the order of storage is taken out to the storage line 3 as a first-in-first-out storage device. In the above configuration, the in-and-out storage device 15B is a tray group that is stacked on the upper layer of the tray 2 that has been taken out, and a tray group that is stacked on the lower layer of the tray 2 that is selected and removed as evacuation to no The means for taking out the position of the tray to be taken out of the selected path for the removal path is provided with the holding means 18, the lifting means 19, and the evacuation means 50. In particular, the holding means 18 is a tray group to be stacked on the upper layer of the tray 2 for taking out the selection. Separate from the transport path (subsidy conveyors 49, 49), and means that can be evacuated to a position where it does not interfere. The elevating means 19 is a means for arranging the tray groups stacked under the trays to be selected and removed, and separating them from the conveyance paths (substituting conveyors 49, 49) to evacuate them to positions where they do not interfere. The means for dispersing the air 50 is a means for moving the auxiliary conveyors 49, 49 to the outside of the conveyance path, and means for forming an evacuation path when evacuating the lower tray group generated by the lifting means, and generating the evacuation means by the lifting means 19. The lower tray group. The above-described first-in and last-out storage device 15A has a simple configuration, and the laminated tray 2 or the take-out tray 2 is simple. Therefore, the device can be made high-speed and small, and the cost of the device is lowered. In the state in which the storage tray 2 is selected, the tray 2 is stacked, and the tray 2 can be taken out, and the order of taking out the tray 2 can be changed. -22-(20) 1332474 Therefore, the sheet-like workpiece 1 can be appropriately changed. The order of processing or inspection, moving out, etc. Fig. 14 shows a conveyance path 4 formed by the conveyor being laid in a line. Processing devices 5A, 5B are disposed on the transport path 4. Further, since the processing device 5A and the processing device 5B are different in the processing content applied to the plate-like workpiece, the processing device 5 is only a different symbol. Further, in Fig. 14, the arrangement position of the storage device 15 corresponding to the φ processing device 5 is shown on the conveyance path 4, and is a position a, a position b, a position c, and a position d, respectively. The position a is the upstream position of the conveyance path 4 of the processing apparatus 5A, and the storage apparatus 15 for solid tray storage is arrange|positioned here. Further, the solid tray refers to a case where the tray 2 of the plate-like workpiece 1 is housed. The position b is located between the carry-in port and the carry-out port of the processing apparatus 5A on the transport path 4, and a storage device 15 for empty tray storage is disposed. Further, the empty tray refers to only the tray 2 without the plate-like workpiece 1. Similarly to φ, the position c is the above-described position of the conveyance path 4 of the processing apparatus 5B. Here, the storage device 15 for storing the solid tray is disposed. The position d is a position between the transfer inlet and the transfer port of the processing apparatus 5B on the conveyance path, and a storage device 15 for empty tray storage is disposed here. Further, the storage device 15 is generally referred to as the first-in and last-out storage device 15A and the selective storage device 15B. The storage device 15 for storing the solid trays disposed at the position a or at the position c is arranged in accordance with the following criteria. When uniformity is required at the execution interval of the processing time, that is, the plate-like workpiece 1 carried out by the processing device 5 of the prior art -23-(21) 1332474 is expected to be carried into the processing device 5 of the subsequent project. When the time intervals are equal, the storage device 15 provided in the middle of the prior art and the subsequent work is expected to be a first-in first-out. Therefore, when uniformity is required in a pair of processing apparatuses located before and after the continuous process, if the processing apparatus 5A is the processing apparatus 5A of the subsequent process, the storage apparatus 15 disposed at the position a is a first-in-first-out selection. The access storage device 15B is ideal 15B. Similarly, when uniformity is required, if the pair of processing devices before and after the continuous process is the processing device 5A and the processing device 5B, the storage device 15 disposed at the position c is also expected to be a first-in, first-out selection. Storage device 15B. On the other hand, when the execution interval of the processing time is not required to be uniform, in particular, it is not necessary to arrange the storage device 15 that can be used in the first-in first-out manner. Therefore, the first-in, first-out-out type storage device 15A can be disposed. In this way, in accordance with the need for the interval between the transportations, the first-in-first-out storage device 15 and the first-in-first-out storage device can be used, and the φ can be appropriately transported without affecting the entire pallet handling system. Cost 0 Further, since the storage device 15 for empty tray storage disposed at the position b or the position c does not have a problem of the conveyance order, the first-in, first-out-out type storage device 15A may be disposed. Of course, if one-to-one correspondence is required for the plate-like workpiece 1 and the tray 2, and the first-in first-out is required, the storage device 15 in which the first-in first-out is placed is provided. Further, the storage system of the pallet transport system 00 of the present invention is provided with a storage device 5] (the first-in and last-out storage device 15A, and the storage device ι5Β is selected), the -24 - (22) 1332474 transfer device 32, and the transport conveyor 4 The connection conveyor 30 is not limited to the structure described in the above embodiment, and may have the same functions as those described in the above embodiments. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a view showing the overall configuration of a pallet transport system according to an embodiment of the present invention. FIG. 2B is a view showing a structure of a transport conveyor. Fig. 3 is a view showing the structure of a plate-like workpiece and a tray. Fig. 4 is a view showing a stacked tray. Fig. 5 is a view showing the structure of the transfer device. Fig. 6 is a view showing the structure of the first-in and last-out storage device. Fig. 7 is a view showing a state of a storage device in which one tray is stored. Fig. 8 is a view showing a state in which a storage device for a tray is to be stored again. Fig. 9 is a view showing a state in which a storage device for storing one tray is stored. Fig. 10 is a view showing the structure of the selective storage device. The figure is a diagram showing how the storage device of the tray is to be stored again. Fig. U is a diagram showing the appearance of a storage device in which three trays are stored. The figure is a diagram showing the appearance of -25- (23) 1332474 in which the tray is taken out to the storage path. Fig. 14 is a view showing the arrangement of a storage device for the pallet transport system.
【主要元件符號說明】 1 板 狀 工 件 2 托 盤 3 處 理 裝 置 4 搬 運 運 送 機 5 處 理 裝 置 15 保 管 裝 置 1 5 A 先 入 後 出 式 保 管 裝 置 1 5B Nxee m 擇 出 入 式 保 管 裝 置 32 移 載 裝 置[Main component symbol description] 1 Plate-shaped workpiece 2 Pallet 3 Processing device 4 Transporting machine 5 Processing device 15 Pipe-keeping device 1 5 A First-in and rear-out pipe-protection device 1 5B Nxee m Select-in pipe-type device 32 Transfer device
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