TW200900336A - Tray delivery device - Google Patents

Tray delivery device Download PDF

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Publication number
TW200900336A
TW200900336A TW096134300A TW96134300A TW200900336A TW 200900336 A TW200900336 A TW 200900336A TW 096134300 A TW096134300 A TW 096134300A TW 96134300 A TW96134300 A TW 96134300A TW 200900336 A TW200900336 A TW 200900336A
Authority
TW
Taiwan
Prior art keywords
tray
stacked
trays
supporting
claws
Prior art date
Application number
TW096134300A
Other languages
Chinese (zh)
Inventor
Yukihiro Imaeda
Naoki Goto
Original Assignee
Murata Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2006345301A priority Critical patent/JP2008156040A/en
Application filed by Murata Machinery Ltd filed Critical Murata Machinery Ltd
Publication of TW200900336A publication Critical patent/TW200900336A/en

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303Apparatus specially adapted to the manufacture of LCDs
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/22Devices influencing the relative position or the attitude of articles during transit by conveyors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742Mechanical parts of transfer devices

Abstract

To provide a stage-stacking tray and a tray delivery device of the size corresponding to the number of plates required by a processor and the number of plates stored in a cassette. The stage-stacking tray 22 is vertically divided by a claw 28 by a support means of arranging a transfer device 26 and a freely advancing-retreating/lifting claw 28 in a tray storage part 24 of an unmanned carrier 20.

Description

200900336 IX. Description of the Invention [Technical Fields of the Invention] The present invention relates to the hiring of a laminated carrier, and more particularly to the further overlapping of a laminated carrier and a laminated carrier. [Prior Art] The Sra has developed a system in which a liquid crystal substrate or the like is mounted on a retainer and transported. In Patent Document 1, a system in which a retainer is cut one by one from a stacked tray is proposed. However, Patent Document 1 has a problem in that the number of substrates that can be processed at one time by the processing device and the number of stacked disks when transported between the processing devices are different from the number of stacked ones when stored in a cassette or the like. In order to solve this problem, it is only necessary to divide the stacked trays or to further overlap the stacked trays on the stacked trays. (Patent Document 1) Japanese Patent Application No. 2006-8646 (Discussion of the Invention) Problem to be Solved by the Invention An object of the present invention is to freely add or separate stacks of stacked trays and to accept them. The number of stacked pallets required to store equipment or processing equipment. A further problem is to arrange the stacked trays neatly and to increase the stacking of the stacked trays correctly. (Means for Solving the Problem) -4-200900336 The present invention is characterized in that: the present invention is provided with: a support for supporting the exterior of the first stacked tray on which a plurality of trays are stacked And a holding means for holding the first stacked tray on the support means above the support, whereby the second layer can be supported by the support means, and the support means or at least the holding means Lifting freely. The tray receiving device of the present invention is characterized in that: it is provided for supporting the outside of the first stacked tray on which a plurality of trays are stacked, and the holding means is supported by means of support The first stacked tray is held under the support, whereby the second layer can be supported by the supporting means, and at least the supporting means or the holding means can be lifted and lowered. More preferably, it is preferable to arrange the stacked trays below the first and second layers in a neat arrangement (the effect of the invention). In the present invention, the stacked trays can be secured by means of holding means. Above or below, the support means or the holding hand is superposed on the other laminated tray, whereby a plurality of layers are integrally formed (hereinafter simply referred to as a combination). Moreover, by means of a part of the stacking tray by the holding means, the laminated tray can be divided into a plurality of such structures to form a supporting means for the storage device or the processing device, so as to be able to One side of the stacking retainer is provided as a supporting means for providing a stacked retaining plate with one of the stacked retaining plates. Hold the support section and lift it to hold the number of layers. The number of pieces borrowed -5- 200900336 tiered platters and will be accepted. Here, the stacked trays can be correctly stacked once the stacked trays under the plurality of stacked trays are aligned. [Embodiment] The following is a preferred embodiment for carrying out the invention. (Embodiment) Figs. 1 to 8 show an embodiment and variations thereof. In each of the figures, the symbol 2 is the retainer, and the 4 and 5 are frames; the frame 4 is located higher than the frame 5. A plurality of cross bars 6 are placed on the bottom surface of the retainer 2, an opening 9 is formed therebetween, and the protrusions 7 and the spacers 8 are disposed on the frames 4, 5, and the protrusions 7 and the spacers are arranged between the upper and lower retaining plates 2, 2. 8 forms a free fit. A state in which a plurality of the retainers 2 are joined to the projections 7 by the spacers 8 is referred to as a close contact state. The retainer 2 of the embodiment is used for transporting or storing a liquid crystal substrate, and can be used for transporting and storing a plate member. The environment in which the retainer 2 is used is in a clean room, and the retainer 2 is transported by an unmanned transport vehicle or a stacker crane in a stacked state, and the stacked retainers can be kept in their original state or accommodated in the original state. Cards, etc., and kept in scaffolding in automatic warehouses. The retainer is cut out from the stacked trays one by one, and the opening 2 is used to separate the tray 2 from the liquid crystal substrate accommodated, and the liquid crystal substrate is supplied to the processing apparatus. In addition, a device that receives the stacked trays and separates the trays one by one, and then takes out the liquid crystal substrate and supplies them to the processing device is called a loader. The -6-200900336 carrier is a liquid crystal substrate that is discharged from a processing device, and is placed on a retainer, and a disk in which a liquid crystal substrate is set is stacked. Fig. 3 is a view showing an unmanned vehicle 20 on which the tray receiving device of the embodiment is mounted. The component symbol 22 is a laminated tray which is housed in the retainer receiving portion 24, and the transfer device 26 is an example of a supporting means, which is a slide fork, a scale robot, a conveyor, or the like. The claws 28 are retracted toward the side of the stacking tray 2 by the advancing and retracting drive unit 30, and enter the gap between the retainers 2 and 2 provided by the spacers 28, along the guide rails 3 1 by the belts. Lifting members such as 32 are lifted and lowered. The holding means is constituted by the claws 28 to 32. Since the claws 28 can enter any position of the stacked tray 22, the stacked trays 22 can be divided into upper and lower stacked trays by any number of sheets. Further, once the stacked tray 22 is raised upward by the claws 28, and the other stacked trays are carried by the transfer device 26, the claws 28 are lowered, and the two stacked trays can be combined. The component symbol 34 is a pusher', for example, for aligning the lowermost trays of the stacked tray 22. Figure 4 shows the operation of the stacked tray 22. The stacked tray 22 can be separated into a plurality of stacked trays 36, 37 by causing the jaws 28 of Fig. 3 to enter the desired position and ascend. The lower stacked tray 36 can be carried into a loader or the like of the processing apparatus by the transfer device 26 of Fig. 3. On the other hand, the stacked tray 22 can be raised by the claws 28, and the other stacked trays 36 can be received by the transfer device 26, and the resultant can be operated by the following. For example, in a cassette or a scaffold in which a stacked stack of 200900336 is stored, the tray is stored in 40 units. The number of stacked pallets required for the processing apparatus varies depending on the processing capability and the like. For example, there are a processing device that requires a stacking tray of 20 units, and a processing device that requires 10 units. Therefore, the number of sheets of the tray accommodating portion 24 in Fig. 3 is matched with the maximum number of sheets of 40 sheets, and the number of sheets required to be taken out from the stacking tray 22 by the claws 28 is supplied to the tray. Processing device. Further, the stacked tray supported by the transfer device 26 is retracted upward by the claws 28, and the stacked trays are re-accepted from the processing apparatus, and the claws 28 are lowered to join the two stacked trays. In this way, no waste is caused in the storage capacity of the cassette or the scaffold, and the number of stacked trays required for the processing device can be supplied. In order to properly engage the projections of the retainer and the spacer, to stabilize the laminated tray, or to supply the retainer in the correct position for the loader or the like, it is preferred that the retainers are aligned. Therefore, the pusher 34 of the automated guided vehicle 20 of Fig. 3 pushes the frames 4, 5 and the like from the both sides toward the retainer on the transfer device 26 and arranges them neatly. Further, the pusher 34 is moved forward and backward by the advancing and retracting drive unit 38, and is disposed at a position that does not interfere with the claws 28. Thus, the lowermost tray can be aligned with respect to the stacked tray 22. Once the advancing and retracting drive unit 38 is freely lifted and lowered, the claws 28 can be used to retreat the upper tray from the upper tray which is to be aligned, by tidying the uppermost tray of the laminated tray. By arranging, any of the stacked trays 2 2 can be arranged neatly. In the case where the retainer is engaged with the spacer and the spacer is arranged, or the empty retainer is arranged neatly, the pusher 40 is advanced and retracted by the drive unit 42 as shown in Fig. 6 by the advancement and retreat -8 - 200900336 And pushing the stacked trays 22 in order from the left and right sides of the stacked tray 22 or both front and rear. Fig. 7 is a view showing a loader 50 using the tray receiving apparatus of the embodiment. In addition, the component symbols of the first to sixth figures are 100 or 200, or 300, and the like, and the descriptions of the first to sixth embodiments are directly applicable unless otherwise specified. The loader 50 of Figure 7 is shown. The component symbol 52 is a transfer device, and is provided with a roller 54 that is freely movable in the left-right position (solid line) and the right-side position (dashed line) in FIG. 7 for lifting and ejecting from the retainer 2 into the liquid crystal substrate. 56. At the upper portion of the transfer device 52, there are transfer device entry spaces 58, 59 which are spaces into which the transfer device 26 of the automated guided vehicle 20 of Fig. 3 enters. The reference numerals 122 and 222 are laminated pallets for laminating a disk in which a liquid crystal substrate is housed, and 322 is a laminated carrier in which an empty disk is stacked. The component symbols 128, 228, 328, and 428 are claws; 130 and 230 are forward and backward driving members; and 131, 231, and 331 are guide rails. The claws 128, 228, 328, and 428 are retractable and retractable by the advancing and retracting driving members 130, 230, etc., and the claws 128 are corresponding to the supporting members, and the stacked trays on the claws 128 can be made by the transfer device from the outside. 122 transfer freely. The claw 228 is corresponding to the holding means. Before receiving the stacked tray from the transfer device such as an automated guided vehicle, the claws 128 are lowered to fit the stacked tray 122 and the stacked tray 222. Next, the claws 128 are raised, and the transfer device such as a slide type fork is received in the space 58, and the received stacked tray is held by the claws 128. Then, once the transfer device such as the -9-200900336 unmanned vehicle is retracted, the acceptance of the stacked tray will be completed. In the transfer device 52, the liquid crystal substrate 56 is carried by the roller 54 to the processing device side (not shown) one by one, and the empty tray is transported to the right side of Fig. 7. Once the transfer device 52 returns to the left side of Figure 7, the jaws 228 will descend 'to move the stacked tray 2 22 to the transfer device 52, leaving the lowermost carrier and leaving the resulting stack The tray 222 is lifted up. Thereby, the liquid crystal substrate 56 can be supplied to the processing apparatus piece by piece. The empty retainer is stored on the right side of the loader 50 of Fig. 7, and once the empty tray is carried in by the transfer device 52, the claws 328 are lowered and the stack is combined with the stacked tray 322. Once the stack of retainers 322 on the jaws 328 has reached the desired number of sheets, the jaws 328 are raised or the jaws 428 are lowered and moved to the jaws 428. The empty stacked tray supported by the claws 428 is then moved to a transfer device such as an unmanned vehicle entering the space 59. Further, on the transfer unit 52, the lowermost trays are aligned by the pusher 34, and the position of the liquid crystal substrate 56 supplied to the processing apparatus is adjusted. Further, the stacked trays 32 are arranged in alignment by the pusher 40. With respect to the liquid crystal substrate discharged from the processing apparatus, the reverse processing described above is performed, and the empty tray 1 is moved from the stacked tray 3 22 to the left side of the seventh drawing by the transfer device 52, and the liquid crystal substrate is received by the roller 54. Further, the claws 228 are used to fit the stacked retainer 222. Next, the stacked trays 122 and 222 are combined by the claws 128 and 228, and are carried out to an automated guided vehicle or the like. In the loader 50 of Fig. 7, once the number of stacked trays 222 is reduced, the stacked trays 122 are lowered by the claws 128 to be combined with the laminated-10-200900336 type tray 222. Therefore, the laminated retainer 222 does not become empty, and the supply of the liquid crystal substrate 56 on the handle side is not interrupted. Further, since the supply of the retainer from the layered tray 222 to the transfer device 52 is performed independently of the loading of the stacked trays 128 of the claws 128, the stacked trays 122 can be replenished as appropriate. Fig. 8 shows a variation of the replacement claws 84 such as the modified claws 28, 128, 228, 328, and 42 8 . The component symbols 81 and 83 are guide rails; 82 is a flat moving portion; and the guide rails 8 1 are horizontally moved along the guide rails simultaneously with the horizontal moving portion 82. A plurality of claws 84 are arranged on the upper and lower sides of the guide rail 81, and the link 86 is attached to the chain 86. Then, for example, one link 89 is provided to the claws 84, 84. Alternatively, the chain 86 can be an endless loop or an endless loop. When the chain 86 is raised, a gap occurs between the claws 84, 84, and a gap is formed between the stacked trays 2, 2. On the other hand, once the chain 86 is lowered, the claws 84, 84 are in close contact, and the retainer 22 is also in close contact. Therefore, by using the stacked tray lifting and lowering device 80, the laminated tray is changed into a closed state and a state having a gap. Further, in a state where the guide rail 8 1 is retracted to the left side of Fig. 8, by lowering the chain 86 to a desired position, and then advancing the claw 84 simultaneously with the guide rail 81, the upper side can be separated from any position of the laminated tray. Carrying the tray and raising it [Simplified description of the drawings] Fig. 1 is a plan view of the retainer used in the embodiment. Figure 2 is a side view of the retainer used in the embodiment. The stacked water supply 83 is in the inter-vehicle direction, and the lower side is -11 - 200900336. Fig. 3 is a side view of the automated guided vehicle equipped with the carrier receiving device of the embodiment. Fig. 4 is a model diagram showing the processing of the stacked tray in Fig. 3 〇 Fig. 5 is a model diagram showing the neat arrangement of the retainers in the tray receiving apparatus of the embodiment. Fig. 6 is a model diagram showing a variation of the neat arrangement of the retainers. Fig. 7 is a front elevational view showing the main part of the loader of the tray receiving apparatus of the embodiment. Fig. 8 shows the multilayered claws in the variation. [Description of main component symbols] 2: retainer 4, 5: frame 6: crossbar 7: projection 8 = spacer 9: opening 20: unmanned transporter 22: laminated retainer 24: retainer receptacle 2 6 : shift Carrier device 28: Claw 3 〇: Advance and retract drive unit -12- 200900336 3 1 : Guide rail 32: Belt 34, 40: Propulsion machine 36, 37: Stacking type 38, 42: Advance and retraction drive 50: Loader 52: Transfer device 5 4: Roller 5 6 : Liquid crystal substrate 58 , 59 : Transfer carrier 80 : Stacked retainer 8 1 , 8 3 : Guide rail 8 2 : Horizontal moving portion 84 : Claw 8 6 : Chain 88 , 89 : Link 122 , 222, 322: 128, 228 > 328, 130, 230: Advance and retreat 131, 231, 331: Dish moving part into space lifting device Stacked retainer 428: Claw drive member guide-13-

Claims (1)

  1. 200900336 X. Patent application scope 1. A shoe receiving device, characterized in that: a supporting means is provided for laminating a plurality of first plurality of retaining plates, so as to be freely receivable from the outside And the holding means for holding the first stacked tray on the supporting means above the supporting means, whereby the second stacked tray can be supported by the supporting means, and At least one of the support means or the holding means is set to be freely movable. 2. A type of tray receiving device, comprising: a supporting means for supporting a first stacked tray on which a plurality of trays are stacked, so as to be externally receivable and freely supported; The holding means is configured to hold the first stacked tray on the supporting means below the supporting means, whereby the second stacked tray can be supported by the supporting means, and the supporting means or At least one of the holding means is set to be freely movable. 3. The tray receiving device according to the first aspect of the invention, wherein the stacking trays disposed below the first and second stacked trays are arranged neatly. 4. The tray receiving device according to the second aspect of the invention, wherein the stacking tray of the -14-200900336 under the first and second stacked trays is arranged neatly. Neatly arranged means. -15-
TW096134300A 2006-12-22 2007-09-13 Tray delivery device TW200900336A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006345301A JP2008156040A (en) 2006-12-22 2006-12-22 Tray delivery device

Publications (1)

Publication Number Publication Date
TW200900336A true TW200900336A (en) 2009-01-01

Family

ID=39657413

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096134300A TW200900336A (en) 2006-12-22 2007-09-13 Tray delivery device

Country Status (3)

Country Link
JP (1) JP2008156040A (en)
KR (1) KR20080059039A (en)
TW (1) TW200900336A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104670910A (en) * 2015-01-26 2015-06-03 河北羿珩科技股份有限公司 Vertical stacking table for laminated solar cell module discharge

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102514942A (en) * 2011-10-12 2012-06-27 华北电网有限公司计量中心 Unstacking and stacking machine for transformer turnover box transportation
CN103818673B (en) * 2014-02-27 2016-06-15 清华大学 The close heap orifice plate access device of subpackage instrument facade trunnion axis V belt translation
CN104071534B (en) * 2014-07-01 2016-09-07 苏州博众精工科技有限公司 A kind of double cylinder elevating mechanism
JP6381499B2 (en) * 2015-09-04 2018-08-29 中外炉工業株式会社 Continuous heat treatment equipment
CN105236150A (en) * 2015-09-29 2016-01-13 单家正 Gantry lifting device for stacking
CN111746861A (en) * 2019-03-28 2020-10-09 广东科达洁能股份有限公司 Automatic tray feeding machine

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104670910A (en) * 2015-01-26 2015-06-03 河北羿珩科技股份有限公司 Vertical stacking table for laminated solar cell module discharge

Also Published As

Publication number Publication date
JP2008156040A (en) 2008-07-10
KR20080059039A (en) 2008-06-26

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