200900336 九、發明說明 【發明所屬之技術領域】 本發明係關於層疊式承盤之收授，尤其是關於將層疊 式承盤與層疊式承盤作進一步重疊。 【先前技術】 申Sra人已開發出一種將液晶基板等搭載於承盤並予以 搬運的系統’而在專利文獻1中有提出一種從層疊後的承 盤中逐片切出承盤的系統。然而，該專利文獻1有可藉由 處理裝置而一次處理的基板之數目不同、以及在處理裝置 間搬運時的承盤之層疊數目與保管於卡匣等時的層疊數目 不同等之問題。爲了解決此問題，只要能將層疊後的承盤 予以分割，或者在層疊後的承盤上進一步重疊層疊式承盤 即可。 (專利文獻1 )日本特願2006-8646號 【發明內容】 (發明所欲解決之問題） 本發明之課題，係在於可自如地進行被層疊後的承盤 之堆疊增加或分離，並收授保管設備或處理裝置所需的片 數之層疊式承盤。又追加的課題，係在於使層疊式承盤整 齊排列，並使層疊式承盤正確地進行堆疊增加。 (解決問題之手段） -4- 200900336 本發明之承盤收授裝置，其特徵在於設有： ，係用以將層疊有複數個承盤的第1層疊式承盤 外部收授自如的方式支撐；以及保持手段，係用 支撐手段上的前述第1層疊式承盤保持於前述支 上方，藉此而可利用前述支撐手段來支撐第2層 ，並且將前述支撐手段或是前述保持手段之至少 升降自如。 本發明之承盤收授裝置，其特徵在於設有： ，係用以將層疊有複數個承盤的第1層疊式承盤 外部收授自如的方式支撐；以及保持手段，係用 支撐手段上的前述第1層疊式承盤保持於前述支 下方，藉此而可利用前述支撐手段來支撐第2層 ，並且將前述支撐手段或是前述保持手段之至少 升降自如。 更爲理想則是設置用以使前述第1及第2層 中之下方的層疊式承盤進行整齊排列的整齊排列 (發明效果） 本發明中，可藉由保持手段將層疊式承盤保 手段之上方或者下方，且使支撐手段或者保持手 重疊在其他的層疊式承盤上，藉此使複數個層疊 爲一體（以下簡稱爲合體）。又藉由以保持手段 疊式承盤之一部分，即可將層疊式承盤分割成複 由此等構成’即可製作保管設備或處理裝置所需 支撐手段 ，以可與 以將前述 撐手段之 疊式承盤 一方設成 支撐手段 ，以可與 以將前述 撐手段之 疊式承盤 一方設成 疊式承盤 手段。 持於支撐 段升降以 式承盤合 來保持層 數個。藉 的片數之 -5- 200900336 層疊式承盤，並予以收授。 在此一旦使複數個層疊式承盤之下方的層疊式承盤整 齊排列’就可正確地堆疊層疊式承盤。 【實施方式】 以下係顯示用以實施本發明的最佳實施例。 (實施例） 第1圖至第8圖係顯示實施例與其變化。各圖中，元 件符號2爲承盤，4、5爲框架；框架4係位於比框架5 較高的位置。在承盤2之底面搭架複數個橫桿6，於其間 形成開口 9，且在框架4、5設置突起7與間隔件8，並在 上下的承盤2、2間使突起7與間隔件8形成卡合自如。 將複數個承盤2以間隔件8來與突起7相卡合並層疊的狀 態，稱爲密接狀態。 實施例的承盤2係用於液晶基板之搬運或保管，除此 以外亦可用於板狀構件之搬運及保管。使用承盤2的環境 係在無塵室內，而承盤2係在被層疊的狀態下藉由無人搬 運車或者堆高式起重機等而搬運，又被層疊的承盤可保持 原來狀態或者容納於卡匣等，並保管於自動倉庫之棚架等 。從被層疊的承盤逐片切出承盤，並使用開口 9來分離承 盤2與所容納的液晶基板，進而將液晶基板供給至處理裝 置。另外將接受被層疊的承盤，並將承盤逐片分離，進而 取出液晶基板再供給至處理裝置的裝置，稱爲裝載器。裝 -6- 200900336 載器，係將從處理裝置排出的液晶基板設定於承盤，且將 設定有液晶基板的承盤予以層疊。 第3圖係顯示搭載有實施例之承盤收授裝置的無人搬 運車20。元件符號22爲層疊式承盤，其被收納於承盤收 納部24內，而移載裝置26係爲支撐手段之例，其爲滑動 式叉架或者標度機械臂、輸送機等。爪28係藉由進退驅 動部3 0而朝向層疊式承盤2 2側進退自如，並進入藉由間 隔件2 8所設的承盤2、2間之間隙，沿著導軌3 1藉由皮 帶32等之升降構件而升降。藉由爪28至皮帶32構成保 持手段。由於爪28可進入層疊式承盤22之任意位置，所 以可將層疊式承盤22逐以任意片數分割成上下二個的層 疊式承盤。又一旦使層疊式承盤22以爪28朝上方升高， 且在以移載裝置26搬入其他的層疊式承盤之後，使爪28 下降’就可使二個的層疊式承盤合體。元件符號34爲推 進機’例如用以使層疊式承盤22之最下層的承盤整齊排 列。 第4圖係顯示層疊式承盤22之操作。藉由使第3圖 的爪28進出於所期望的位置並上升，即可將層疊式承盤 22分離成複數個層疊式承盤36、37。下方之層疊式承盤 36係可藉由第3圖的移載裝置26而搬入於處理裝置之裝 載器等。又反之’亦可先以爪28使層疊式承盤22上升， 且在移載裝置26接受其他的層疊式承盤36，並使之合體 〇 藉由此等就可進行以下之操作。例如在保管層疊式承 200900336 盤之卡匣或棚架等中，係以40片單位保管承盤。處理裝 置所需要的層疊式承盤之片數，係依其處理能力等而有各 種不同。例如有要求20片單位之層疊式承盤的處理裝置 、與要求10片單位的處理裝置。因此使第3圖的承盤收 納部2 4之容納片數與最大的層疊片數4 0片一致，且使用 爪28從層疊式承盤22中取出所需片數之承盤，並供給至 處理裝置。又使利用移載裝置26而支撐著的層疊式承盤 以爪28朝上方退避，且從處理裝置中重新接受層疊式承 盤’並使爪28下降，使二個層疊式承盤合體。如此在卡 匣或者棚架之保管能力方面就不會發生浪費，而可供給處 理裝置所需的片數之層疊式承盤。 爲了使承盤之突起與間隔件正確地卡合，俾使層疊式 承盤安定，或者爲了對裝載器等以正確的位置供給承盤， 較佳者係使承盤整齊排列。因此第3圖的無人搬運車2 0 之推進機34，係使框架4、5等從兩側朝移載裝置26上 之承盤推送並使之整齊排列。又推進機34係藉由進退驅 動部38而進退自如’被設置於與爪28互不干涉的位置。 如此就可相對於層疊式承盤22，使其最下層的承盤整齊 排列。一旦使進退驅動部3 8升降自如，就可利用爪2 8使 比欲整齊排列的承盤更靠上方之承盤退避，藉由使所留下 的層疊式承盤之最上層的承盤整齊排列，即可使層疊式承 盤2 2中的任意之承盤整齊排列。 在承盤爲未使用突起與間隔件進行卡合之情況，或者 使空的承盤整齊排列之情況，藉由如第6圖般地藉由進退 -8 - 200900336 驅動部42使推進機40進退，並從層疊式承盤22之左右 兩側或者前後雙方推，即可使層疊式承盤22 —次整齊排 列。 第7圖係顯示使用實施例之承盤收授裝置的裝載器 50。另外在第1圖至第6圖之元件符號加上100或200、 或者300等的元件符號係顯示相同者，有關第1圖至第6 圖之實施例的記載，只要沒有特別說明亦直接適用於第7 圖之裝載器50。元件符號52爲移載裝置，其具備可在第 7圖之左側位置（實線）與右側位置（虛線）之間左右移 動自如並升降自如的輥子54，用以從承盤2搬出入液晶 基板56。在移載裝置52之上部，具有移載裝置進入空間 58、59，其爲第3圖之無人搬運車20的移載裝置26等所 進入的空間。元件符號122、222係用以層疊收納有液晶 基板之承盤的層疊式承盤；322係層疊有空的承盤之層疊 式承盤。元件符號128、228、328、428爲爪；130、230 爲進退驅動件；131、231、331爲導軌。爪128、228、 328、428係藉由進退驅動件130、230等而進退自如與升 降自如，爪128係對應支撐構件，藉由來自外部的移載裝 置可使爪128上之層疊式承盤122移載自如。又爪228係 對應保持手段。 在從無人搬運車等之移載裝置接受層疊式承盤之前， 使爪128下降以使層疊式承盤122與層疊式承盤222合體 。其次使爪128上升，在空間58接受滑動式叉架等之移 載裝置，藉由爪128保持所接受的層疊式承盤。然後一旦 -9- 200900336 無人搬運車等之移載裝置後退，層疊式承盤之接受動作就 會完成。移載裝置52，係利用輥子54將液晶基板56逐 片搬入至未圖示的處理裝置側，且將空承盤搬運至第7圖 的右側。一旦移載裝置52回到第7圖的左側，爪228就 會下降’將層疊式承盤2 22移至移載裝置52上，且留下 最下層的承盤，並將所留下的層疊式承盤222往上舉起。 藉此可對處理裝置逐片供給液晶基板5 6。 在第7圖的裝載器50之右側保管空承盤，一旦空承 盤藉由移載裝置52搬入，就使爪328下降，俾與層疊式 承盤322合體。一旦爪328上的層疊式承盤322達到所需 片數，就使爪328上升或使爪428下降，且另移至爪428 。然後將由爪428所支撐的空之層疊式承盤，另移至進入 至空間59之無人搬運車等的移載裝置。另外在移載裝置 52上藉由推進機34使最下層的承盤整齊排列，且調整供 給至處理裝置的液晶基板5 6之位置。又對層疊式承盤 3 22藉由推進機40進行整齊排列作業。 對於從處理裝置排出的液晶基板，執行前述的相反處 理，從層疊式承盤3 22使空的承盤1片以移載裝置52移 動至第7圖的左側，且以輥子5 4接受液晶基板，進而使 用爪228使之與層疊式承盤222合體。其次使用爪128、 228，將層疊式承盤122、222合體，且搬出至無人搬運車 等。 在第7圖之裝載器50上，一旦層疊式承盤222之片 數變少，就以爪128使層疊式承盤122下降，使之與層疊 -10- 200900336 式承盤222合體。因而層疊式承盤222不會變空，且對 理裝置側的液晶基板5 6之供給不會中斷。又由於從層 式承盤222至移載裝置52的承盤之供給、與對爪128 層疊式承盤1 22之搬入係獨立進行，所以可以適當的時 補給層疊式承盤122。 第8圖係顯示改用爪28、128、228、328、42 8等 取代爪84之變化例。元件符號81、83爲導軌；82爲 平移動部；導軌8 1係與水平移動部82同時沿著導軌 而水平移動。在導軌81上有複數個爪84排列於上下方 ，且夾介連桿88而安裝於鏈條86。然後在爪84、84 設置例如1個的連桿89。另外鏈條86可爲無端環鏈或 爲無端環鏈。 在此一旦使鏈條86上升，就會在爪84、84間發生 隙，隨之亦會在層疊式承盤2、2間發生間隙。另一方 一旦使鏈條86下降，爪84、84就會密接，隨之承盤2 2亦會密接。因而藉由使用層疊式承盤升降裝置80，就 使層疊式承盤變化成密接狀態與具有間隙的狀態。又在 導軌8 1退避至第8圖的左側之狀態下，藉由使鏈條86 降至所期望之位置，接著使爪84與導軌81同時前進’ 可從層疊式承盤之任意位置分離上側的承盤並使之上升 【圖式簡單說明】 第1圖係實施例中所用的承盤之平面圖。 第2圖係實施例中所用的承盤之側視圖。 處 疊 的 序 來 水 83 向 間 非 間 面 、 可 將 下 即 -11 - 200900336 第3圖係搭載有實施例之承盤收授裝置的無人搬運車 之側視圖。 第4圖係顯示第3圖中之層疊式承盤之處理的模型圖 〇 第5圖係顯示實施例之承盤收授裝置中的承盤之整齊 排列的模型圖。 第6圖係顯示承盤之整齊排列之變化例的模型圖。 第7圖係適用實施例之承盤收授裝置的裝載器之主要 部分正面圖。 第8圖係顯示變化例中的多層爪。 【主要元件符號說明】 2 :承盤 4、5 :框架 6 :橫桿 7 :突起 8 =間隔件 9 :開口 20 :無人搬運車 22 :層疊式承盤 24 :承盤收納部 2 6 :移載裝置 28 :爪 3 〇 :進退驅動部 -12- 200900336 3 1 :導軌 32 :皮帶 34、40 :推進機 36、37 :層疊式 38、42:進退驅 50 :裝載器 52 :移載裝置 5 4 :輥子 5 6 :液晶基板 58、59 :移載裝 8 0 :層疊式承盤 8 1、8 3 :導軌 8 2 :水平移動部 84 :爪 8 6 :鏈條 88、89 :連桿 122 、 222 、 322 : 128 、 228 > 328 、 130 、 230 :進退 131、 231、 331 ： 承盤 動部 置進入空間 升降裝置 層疊式承盤 428 ：爪 驅動件 導軌 -13-200900336 IX. Description of the Invention [Technical Fields of the Invention] The present invention relates to the hiring of a laminated carrier, and more particularly to the further overlapping of a laminated carrier and a laminated carrier. [Prior Art] The Sra has developed a system in which a liquid crystal substrate or the like is mounted on a retainer and transported. In Patent Document 1, a system in which a retainer is cut one by one from a stacked tray is proposed. However, Patent Document 1 has a problem in that the number of substrates that can be processed at one time by the processing device and the number of stacked disks when transported between the processing devices are different from the number of stacked ones when stored in a cassette or the like. In order to solve this problem, it is only necessary to divide the stacked trays or to further overlap the stacked trays on the stacked trays. (Patent Document 1) Japanese Patent Application No. 2006-8646 (Discussion of the Invention) Problem to be Solved by the Invention An object of the present invention is to freely add or separate stacks of stacked trays and to accept them. The number of stacked pallets required to store equipment or processing equipment. A further problem is to arrange the stacked trays neatly and to increase the stacking of the stacked trays correctly. (Means for Solving the Problem) -4-200900336 The present invention is characterized in that: the present invention is provided with: a support for supporting the exterior of the first stacked tray on which a plurality of trays are stacked And a holding means for holding the first stacked tray on the support means above the support, whereby the second layer can be supported by the support means, and the support means or at least the holding means Lifting freely. The tray receiving device of the present invention is characterized in that: it is provided for supporting the outside of the first stacked tray on which a plurality of trays are stacked, and the holding means is supported by means of support The first stacked tray is held under the support, whereby the second layer can be supported by the supporting means, and at least the supporting means or the holding means can be lifted and lowered. More preferably, it is preferable to arrange the stacked trays below the first and second layers in a neat arrangement (the effect of the invention). In the present invention, the stacked trays can be secured by means of holding means. Above or below, the support means or the holding hand is superposed on the other laminated tray, whereby a plurality of layers are integrally formed (hereinafter simply referred to as a combination). Moreover, by means of a part of the stacking tray by the holding means, the laminated tray can be divided into a plurality of such structures to form a supporting means for the storage device or the processing device, so as to be able to One side of the stacking retainer is provided as a supporting means for providing a stacked retaining plate with one of the stacked retaining plates. Hold the support section and lift it to hold the number of layers. The number of pieces borrowed -5- 200900336 tiered platters and will be accepted. Here, the stacked trays can be correctly stacked once the stacked trays under the plurality of stacked trays are aligned. [Embodiment] The following is a preferred embodiment for carrying out the invention. (Embodiment) Figs. 1 to 8 show an embodiment and variations thereof. In each of the figures, the symbol 2 is the retainer, and the 4 and 5 are frames; the frame 4 is located higher than the frame 5. A plurality of cross bars 6 are placed on the bottom surface of the retainer 2, an opening 9 is formed therebetween, and the protrusions 7 and the spacers 8 are disposed on the frames 4, 5, and the protrusions 7 and the spacers are arranged between the upper and lower retaining plates 2, 2. 8 forms a free fit. A state in which a plurality of the retainers 2 are joined to the projections 7 by the spacers 8 is referred to as a close contact state. The retainer 2 of the embodiment is used for transporting or storing a liquid crystal substrate, and can be used for transporting and storing a plate member. The environment in which the retainer 2 is used is in a clean room, and the retainer 2 is transported by an unmanned transport vehicle or a stacker crane in a stacked state, and the stacked retainers can be kept in their original state or accommodated in the original state. Cards, etc., and kept in scaffolding in automatic warehouses. The retainer is cut out from the stacked trays one by one, and the opening 2 is used to separate the tray 2 from the liquid crystal substrate accommodated, and the liquid crystal substrate is supplied to the processing apparatus. In addition, a device that receives the stacked trays and separates the trays one by one, and then takes out the liquid crystal substrate and supplies them to the processing device is called a loader. The -6-200900336 carrier is a liquid crystal substrate that is discharged from a processing device, and is placed on a retainer, and a disk in which a liquid crystal substrate is set is stacked. Fig. 3 is a view showing an unmanned vehicle 20 on which the tray receiving device of the embodiment is mounted. The component symbol 22 is a laminated tray which is housed in the retainer receiving portion 24, and the transfer device 26 is an example of a supporting means, which is a slide fork, a scale robot, a conveyor, or the like. The claws 28 are retracted toward the side of the stacking tray 2 by the advancing and retracting drive unit 30, and enter the gap between the retainers 2 and 2 provided by the spacers 28, along the guide rails 3 1 by the belts. Lifting members such as 32 are lifted and lowered. The holding means is constituted by the claws 28 to 32. Since the claws 28 can enter any position of the stacked tray 22, the stacked trays 22 can be divided into upper and lower stacked trays by any number of sheets. Further, once the stacked tray 22 is raised upward by the claws 28, and the other stacked trays are carried by the transfer device 26, the claws 28 are lowered, and the two stacked trays can be combined. The component symbol 34 is a pusher', for example, for aligning the lowermost trays of the stacked tray 22. Figure 4 shows the operation of the stacked tray 22. The stacked tray 22 can be separated into a plurality of stacked trays 36, 37 by causing the jaws 28 of Fig. 3 to enter the desired position and ascend. The lower stacked tray 36 can be carried into a loader or the like of the processing apparatus by the transfer device 26 of Fig. 3. On the other hand, the stacked tray 22 can be raised by the claws 28, and the other stacked trays 36 can be received by the transfer device 26, and the resultant can be operated by the following. For example, in a cassette or a scaffold in which a stacked stack of 200900336 is stored, the tray is stored in 40 units. The number of stacked pallets required for the processing apparatus varies depending on the processing capability and the like. For example, there are a processing device that requires a stacking tray of 20 units, and a processing device that requires 10 units. Therefore, the number of sheets of the tray accommodating portion 24 in Fig. 3 is matched with the maximum number of sheets of 40 sheets, and the number of sheets required to be taken out from the stacking tray 22 by the claws 28 is supplied to the tray. Processing device. Further, the stacked tray supported by the transfer device 26 is retracted upward by the claws 28, and the stacked trays are re-accepted from the processing apparatus, and the claws 28 are lowered to join the two stacked trays. In this way, no waste is caused in the storage capacity of the cassette or the scaffold, and the number of stacked trays required for the processing device can be supplied. In order to properly engage the projections of the retainer and the spacer, to stabilize the laminated tray, or to supply the retainer in the correct position for the loader or the like, it is preferred that the retainers are aligned. Therefore, the pusher 34 of the automated guided vehicle 20 of Fig. 3 pushes the frames 4, 5 and the like from the both sides toward the retainer on the transfer device 26 and arranges them neatly. Further, the pusher 34 is moved forward and backward by the advancing and retracting drive unit 38, and is disposed at a position that does not interfere with the claws 28. Thus, the lowermost tray can be aligned with respect to the stacked tray 22. Once the advancing and retracting drive unit 38 is freely lifted and lowered, the claws 28 can be used to retreat the upper tray from the upper tray which is to be aligned, by tidying the uppermost tray of the laminated tray. By arranging, any of the stacked trays 2 2 can be arranged neatly. In the case where the retainer is engaged with the spacer and the spacer is arranged, or the empty retainer is arranged neatly, the pusher 40 is advanced and retracted by the drive unit 42 as shown in Fig. 6 by the advancement and retreat -8 - 200900336 And pushing the stacked trays 22 in order from the left and right sides of the stacked tray 22 or both front and rear. Fig. 7 is a view showing a loader 50 using the tray receiving apparatus of the embodiment. In addition, the component symbols of the first to sixth figures are 100 or 200, or 300, and the like, and the descriptions of the first to sixth embodiments are directly applicable unless otherwise specified. The loader 50 of Figure 7 is shown. The component symbol 52 is a transfer device, and is provided with a roller 54 that is freely movable in the left-right position (solid line) and the right-side position (dashed line) in FIG. 7 for lifting and ejecting from the retainer 2 into the liquid crystal substrate. 56. At the upper portion of the transfer device 52, there are transfer device entry spaces 58, 59 which are spaces into which the transfer device 26 of the automated guided vehicle 20 of Fig. 3 enters. The reference numerals 122 and 222 are laminated pallets for laminating a disk in which a liquid crystal substrate is housed, and 322 is a laminated carrier in which an empty disk is stacked. The component symbols 128, 228, 328, and 428 are claws; 130 and 230 are forward and backward driving members; and 131, 231, and 331 are guide rails. The claws 128, 228, 328, and 428 are retractable and retractable by the advancing and retracting driving members 130, 230, etc., and the claws 128 are corresponding to the supporting members, and the stacked trays on the claws 128 can be made by the transfer device from the outside. 122 transfer freely. The claw 228 is corresponding to the holding means. Before receiving the stacked tray from the transfer device such as an automated guided vehicle, the claws 128 are lowered to fit the stacked tray 122 and the stacked tray 222. Next, the claws 128 are raised, and the transfer device such as a slide type fork is received in the space 58, and the received stacked tray is held by the claws 128. Then, once the transfer device such as the -9-200900336 unmanned vehicle is retracted, the acceptance of the stacked tray will be completed. In the transfer device 52, the liquid crystal substrate 56 is carried by the roller 54 to the processing device side (not shown) one by one, and the empty tray is transported to the right side of Fig. 7. Once the transfer device 52 returns to the left side of Figure 7, the jaws 228 will descend 'to move the stacked tray 2 22 to the transfer device 52, leaving the lowermost carrier and leaving the resulting stack The tray 222 is lifted up. Thereby, the liquid crystal substrate 56 can be supplied to the processing apparatus piece by piece. The empty retainer is stored on the right side of the loader 50 of Fig. 7, and once the empty tray is carried in by the transfer device 52, the claws 328 are lowered and the stack is combined with the stacked tray 322. Once the stack of retainers 322 on the jaws 328 has reached the desired number of sheets, the jaws 328 are raised or the jaws 428 are lowered and moved to the jaws 428. The empty stacked tray supported by the claws 428 is then moved to a transfer device such as an unmanned vehicle entering the space 59. Further, on the transfer unit 52, the lowermost trays are aligned by the pusher 34, and the position of the liquid crystal substrate 56 supplied to the processing apparatus is adjusted. Further, the stacked trays 32 are arranged in alignment by the pusher 40. With respect to the liquid crystal substrate discharged from the processing apparatus, the reverse processing described above is performed, and the empty tray 1 is moved from the stacked tray 3 22 to the left side of the seventh drawing by the transfer device 52, and the liquid crystal substrate is received by the roller 54. Further, the claws 228 are used to fit the stacked retainer 222. Next, the stacked trays 122 and 222 are combined by the claws 128 and 228, and are carried out to an automated guided vehicle or the like. In the loader 50 of Fig. 7, once the number of stacked trays 222 is reduced, the stacked trays 122 are lowered by the claws 128 to be combined with the laminated-10-200900336 type tray 222. Therefore, the laminated retainer 222 does not become empty, and the supply of the liquid crystal substrate 56 on the handle side is not interrupted. Further, since the supply of the retainer from the layered tray 222 to the transfer device 52 is performed independently of the loading of the stacked trays 128 of the claws 128, the stacked trays 122 can be replenished as appropriate. Fig. 8 shows a variation of the replacement claws 84 such as the modified claws 28, 128, 228, 328, and 42 8 . The component symbols 81 and 83 are guide rails; 82 is a flat moving portion; and the guide rails 8 1 are horizontally moved along the guide rails simultaneously with the horizontal moving portion 82. A plurality of claws 84 are arranged on the upper and lower sides of the guide rail 81, and the link 86 is attached to the chain 86. Then, for example, one link 89 is provided to the claws 84, 84. Alternatively, the chain 86 can be an endless loop or an endless loop. When the chain 86 is raised, a gap occurs between the claws 84, 84, and a gap is formed between the stacked trays 2, 2. On the other hand, once the chain 86 is lowered, the claws 84, 84 are in close contact, and the retainer 22 is also in close contact. Therefore, by using the stacked tray lifting and lowering device 80, the laminated tray is changed into a closed state and a state having a gap. Further, in a state where the guide rail 8 1 is retracted to the left side of Fig. 8, by lowering the chain 86 to a desired position, and then advancing the claw 84 simultaneously with the guide rail 81, the upper side can be separated from any position of the laminated tray. Carrying the tray and raising it [Simplified description of the drawings] Fig. 1 is a plan view of the retainer used in the embodiment. Figure 2 is a side view of the retainer used in the embodiment. The stacked water supply 83 is in the inter-vehicle direction, and the lower side is -11 - 200900336. Fig. 3 is a side view of the automated guided vehicle equipped with the carrier receiving device of the embodiment. Fig. 4 is a model diagram showing the processing of the stacked tray in Fig. 3 〇 Fig. 5 is a model diagram showing the neat arrangement of the retainers in the tray receiving apparatus of the embodiment. Fig. 6 is a model diagram showing a variation of the neat arrangement of the retainers. Fig. 7 is a front elevational view showing the main part of the loader of the tray receiving apparatus of the embodiment. Fig. 8 shows the multilayered claws in the variation. [Description of main component symbols] 2: retainer 4, 5: frame 6: crossbar 7: projection 8 = spacer 9: opening 20: unmanned transporter 22: laminated retainer 24: retainer receptacle 2 6 : shift Carrier device 28: Claw 3 〇: Advance and retract drive unit -12- 200900336 3 1 : Guide rail 32: Belt 34, 40: Propulsion machine 36, 37: Stacking type 38, 42: Advance and retraction drive 50: Loader 52: Transfer device 5 4: Roller 5 6 : Liquid crystal substrate 58 , 59 : Transfer carrier 80 : Stacked retainer 8 1 , 8 3 : Guide rail 8 2 : Horizontal moving portion 84 : Claw 8 6 : Chain 88 , 89 : Link 122 , 222, 322: 128, 228 > 328, 130, 230: Advance and retreat 131, 231, 331: Dish moving part into space lifting device Stacked retainer 428: Claw drive member guide-13-