1332435 ⑴ 九、發明說明 【發明所屬之技術領域】 本發明係關於，將具有微細圖案之壓模緊壓於熱塑性 樹脂板的表面，以在熱塑性樹脂板的表面上轉印微細圖案 之技術；特別是關於在模壓成形後容易使熱塑性樹脂板從 壓模進行脫模之技術。 【先前技術】 使用熱塑性樹脂材料，在真空或減壓狀態之真空室內 熱轉印微細圖案之模壓成形裝置爲既有技術。該模壓成形 裝置’例如應用於液晶顯示面板用的熱塑性樹脂製的導光 板之製造等等。 這種模壓成形裝置，係將具有微細圖案之壓模緊壓於 熱塑性樹脂板的表面，當完成圖案的轉印後，必須使熱塑 性樹脂板從壓模進行脫模。然而，壓模可能緊貼於熱塑性 樹脂板的表面而無法順利地進行脫模。針對這種情形，專 利文獻1記載著’對加工對象物與壓模之接觸面噴吹空 氣’將空氣送入加工對象物與壓模之間以進行脫模。 〔專利文獻1〕日本特開2006-167788號公報 使用噴吹空氣之脫模，當加工對象物與壓模之間產生 些微間隙時，噴吹空氣能送入加工對象物與壓模間之間隙 (脫模面）而能發揮良好作用。 【發明內容】 -4- (2) 1332435 然而，當壓模與加工對象物之間形成真空時，加 象物與壓模之間完全沒有間隙。因此，即使進行氣體 吹，氣體可能無法送入加工對象物與壓模之間，而造 法脫模。這種現象，在真空或接近真空之減壓狀態進 壓成形時，特別容易發生。 於是，本發明之目的係提供一種模壓成形裝置， 壓模緊壓於加工對象物而完成圖案之轉印後，容易使 對象物從壓模確實地進行脫模。 依據本發明一實施態樣之模壓成形裝置（1)， 備：用來對板狀的熱塑性加工對象物（2)實施模壓成 第1及第2模具（35 a, 35 b)'用來對前述第1及第2模 施加熱及冷卻之第1及第2溫度調節部（3 4a, 3 4 b)、用 前述第1及第2溫度調節部的溫度控制成目標溫度之 控制裝置（60)、用來噴吹空氣之空氣噴嘴（41,41);將 第1及第2模具緊壓於前述加工對象物的兩面而進行 成形後，使用來自前述空氣噴嘴之空氣使前述加工對 從前述第1及第2模具進行脫模。前述溫度控制裝置 備加熱控制手段以及冷卻控制手段；該加熱控制手段 將前述第1及第2模具緊壓於前述加工對象物而進行 成形時’係將前述第1及第2溫度調節部都加熱控制 述加工對象物的軟化溫度以上之目標溫度：該冷卻控 段’在前述空氣噴嘴噴吹出空氣時，係將前述第1及 溫度調節部冷卻控制成前述軟化溫度以下之互相不同 標溫度。 工對 之噴 成無 行模 當將 加工 係具 形之 具實 來將 溫度 前述 模壓 象物 係具 ，在 模壓 成前 制手 第2 的目 -5- (3) (3)1332435 在較佳的實施態樣，前述冷卻控制手段係控制成：將 前述第1及第2溫度調節部從前述軟化溫度以上之目標溫 度冷卻成前述互相不同的目標溫度。 在另一較佳的實施形態，前述冷卻控制手段係控制 成：將前述第]及第2溫度調節部冷卻後進行再加熱，而 使前述第1及第2溫度調節部成爲前述互相不同的目標溫 度。 依據本發明一實施態樣之模壓成形方法，係使用模壓 成形裝置（1)之模壓成形方法，該模壓成形裝置（1)係具 備：用來對板狀的熱塑性加工對象物（2)實施模壓成形之 第1及第2模具（35a，35b)、用來對前述第】及第2模具實 施加熱及冷卻之第1及第2溫度調節部（3 4a，3 4b)、用來噴 吹空氣之空氣噴嘴（4 1,4 1);該模壓成形方法包括：前述第 1及第2溫度調節部將前述第1及第2模具加熱至前述加 工對象物的軟化溫度以上之步驟、將前述加熱至軟化溫度 以上之第1及第2模具緊壓於前述加工對象物的兩面而進 行模壓成形之步驟、在前述模壓成形後將前述第1及第2 模具間之距離擴大既定距離，朝向前述第1及第2模具分 別和前述加工對象物之接觸面噴吹來自前述空氣噴嘴之空 氣的步驟、在前述噴吹空氣時，將前述第1及第2溫度調 節部冷卻成不同的目標溫度之步驟。 【實施方式】 以下，針對本發明一實施形態之模壓成形裝置，使用 -6 - (4) (4)1332435 圖式來做說明。 第1圖係顯示本發明之模壓成形裝置1之槪略構造。 模壓成形裝置1，如第1圖所示係具備：用來模壓加 工對象物2之模壓部3 0、以及用來控制模壓部3 0之構 造。用來控制模壓部30之構造係具備：用來使滑件21上 下運動之電動機（伺服馬達11，11)、用來將伺服馬達n，n 的旋轉轉換成滑件21的直線運動之動力轉換機構（滑輪 12，12'確動皮帶13，13、滾珠螺桿14,14)、用來驅動伺服 馬達1 1，1 1之控制器1 7、用來調節壓模3 5的溫度之溫度 控制裝置60。控制器17，係根據滑件位置檢測手段23，2 3 的輸出，而輸出藉由位置.控制來驅動伺服馬達11，1 1之控 制訊號；並根據加壓力檢測手段24，24之輸出，而輸出藉 由加壓力控制來驅動伺服馬達1 1，1 1之控制訊號。以下會 對控制器1 7所輸出之控制訊號做詳細說明。當伺服放大 器1 6,1 6接收來自控制器1 7之控制訊號後，根據該控制 訊號與編碼器15,15之輸出來控制輸出至伺服馬達11,11 之電流。亦即，依據控制器1 7之指示使伺服馬達1 1動 作，而使安裝於滑件21之後述壓模35接近或遠離加工對 象物2。此外，依據控制器17之指示使壓模35緊壓於加 工對象物2，而對加工對象物2實施模壓成形。 加工對象物2，係熱塑性樹脂板，例如爲丙烯酸酯製 或聚碳酸酯製之導光用板。壓模35a,35b，例如是在表面 具有凹凸形狀（待形成於導光板表面）之不鏽鋼製或鎳製之 0_2〜2.0mm厚的薄板。 (5) (5)1332435 第2圖係顯示模壓部30的詳細構造之截面圖，第3 圖係顯示模壓部30與溫度控制裝置6〇的詳細構造。 模壓部3 0係具有：結合於滑件21之上殼體3 1與結 合於承板22之下殼體32。隨著滑件21之上下移動，上 殼體31會進行上下移動。又在上殼體31與下殼體32之 接觸部分，分別安裝著真空密封件39,39,39,39。又當上 殼體31下降而使上殼體31所安裝之真空密封件39,39和 下殼體32所安裝之真空密封件39,39接觸時，會在上殼 體3 1及下殼體3 2的內部形成密閉空間（真空室）。 下殼體32具備用來噴吹空氣之空氣噴嘴41，41。當模 壓成形後，爲了使加工對象物2從壓模3 5脫模，係將空 氣噴吹至壓模35與加工對象物2的接觸面附近。以下會 對噴吹空氣之時點等做說明。 在下殼體32設有大氣開放口 36及真空吸引口 37» 大氣開放口 36係透過真空閥46使大氣進入。真空吸引口 37係透過真空閥45連接於真空泵40。當真空室內形成真 空或減壓狀態時’將真空閥45打開並將真空閥46關閉， 用真空泵4〇進行真空抽吸。使大氣進入真空室內時，將 真空閥45關閉並將真空閥46打開。在下殻體32，安裝 有用來檢測真空室內的氣壓之壓力檢測器（未圖示）。 在上殻體3 1及下殼體32各個之內側，從外側向內側 依序積層以下構件：隔熱板3 3 (3 3 a, 33 b)、板狀之溫度調 節容器（以下稱溫度調節板）34(34a，34b)、用來將既定的凹 凸圖案轉印於加工對象物2之模具之壓模3 5 (3 5 a，35b)。 (6) (6)1332435 在溫度調節板34a，34b ’設有用來檢測溫度調節板的溫度 之溫度檢測器3 8 a，3 8 b。 在溫度調節板34的內部設有流路，以使供給自溫度 控制裝置60之液體或氣體等的流體通過。藉由使既定溫 度的流體流過該流路，以進行壓模35之加熱及冷卻。如 後述般，溫度控制裝置60，藉由控制流過溫度調節板34 內的流路之流體溫度，以決定溫度調節板34之加熱溫度 及冷卻溫度。 溫度控制裝置60，係將溫度調節板34的溫度控制成 目標溫度。例如，溫度控制裝置60，係使用高溫蒸氣（用 來加熱溫度調節板3 4的介質）、低溫冷卻水（用來冷卻的 介質），將其中任一方供給至上下之溫度調節板3 4a, 3 4b 各個。亦即，溫度控制裝置60係具備：供冷卻水流入之 冷卻水供給口 62、供蒸氣流入之蒸氣供給口 63、用來排 出冷卻水之冷卻口回流口 64、用來從溫度調節板34除去 冷卻水之空氣供給口 6 5。 各供給口 62、63，分別連接於用來將蒸氣或冷卻水 供給至上下的溫度調節板34a，34b之供給管線66，冷卻水 回流口 64，係連接於延伸自上下的溫度調節板34a,34b之 排水管線67 »在各供給口 62、63與供給管線66之間配 置電磁閥611〜616。如後述般，藉由控制電磁閥611〜 616之開閉，以進行上下的溫度調節板34a，3 4b之加熱及 冷卻。 溫度控制裝置 60，可獨立控制上下的溫度調節板 -9- (7) 1332435 34a，34b ’以使上下的溫度調節板34a 34b形成不同溫度 將溫度調節板34加熱或冷卻時，係預先設定複數個目 設定溫度’溫度控制裝置60從中選擇一個溫度作爲目 溫度。例如’在本實施形態，如第4圖所示，關於上下 溫度調節板34 a，3 4b的溫度，係設定2組加熱用模式 組冷卻用模式，而以其中任一個溫度模式進行加熱或 卻。 φ 接著說明，將溫度調節板34加熱或冷卻時關於溫 控制裝置6 0之控制。 首先’在加熱時，溫度控制裝置 60將電磁 613,614,615 打開’將電磁閥 611，612,616,617 關閉。 此，對上下的溫度調節板34a, 3 4b供給來自蒸氣供給口 之蒸氣，而進行加熱。這時，溫度控制裝置60，係藉 溫度感測器38a，38b來監測上下的溫度調節板34a，34b 別的溫度。 • 例如，在選擇「加熱1」之溫度模式時，溫度控制 置60對上溫度調節板34a供給蒸氣，當溫度超過設定 度Hul時關閉電磁閥613。電磁閥613關閉後，會停止 上溫度調節板34a供給蒸氣，因此上溫度調節板34a之 度開始下降。當上溫度調節板34a之溫度低於設定溫 Hu 1時，溫度控制裝置60再度打開電磁閥6 1 3，再度 始對上溫度調節板3 4a供給蒸氣。藉由控制該電磁閥6 之開閉，能使上溫度調節板34a的溫度維持於設定溫 Hul，因此溫度調節板34a能將壓模35a加熱至設定溫 標 標 的 • 2 冷 度 閥 藉 63 由 個 裝 溫 對 溫 度 開 1 3 度 度 -10- (8) (8)1332435 H u 1。 在加熱下溫度調節板3 4 b的情形，同樣地’溫度控制 裝置60控制電磁閥6 1 4之開閉以維持設定溫度HI 1。藉 此，溫度調節板34b能將壓模35b加熱至設定溫度ΗΠ。 這時，藉由使電磁閥613及電磁閥614獨立地進行開 閉，能將上下的溫度調節板34a，34b及壓模35a,35b分別 加熱至不同的溫度。 此外，在選擇「加熱2」之溫度模式時，上下的溫度 調節板34a,34b之設定溫度分別爲Hu2及H12，並進行與 「加熱1」的情形同樣的控制。 另一方面，在冷卻時，溫度控制裝置 60將電磁閥 611，612,616 打開，將電磁閥 613,614,615,617 關閉。藉 此，對上下的溫度調節板34a，3 4b供給冷卻水’以冷卻溫 度調節板34a，34b。和加熱情形相同，藉由溫度感測器 38a,38b來監測上下的溫度調節板34a,34b的溫度，根據 監測結果，如下述般進行溫度調節板34a，34b之溫度控 制。 亦即，在選擇「冷卻1」之溫度模式時，對上溫度調 節板3 4 a供給冷卻水’當溫度低於設定溫度c u 1時關閉電 磁閥611。藉由關閉電磁閥61丨，會停止對上溫度調節板 34a供給冷卻水’而使上溫度調節板34a之溫度下降趨 緩。關於下溫度調節板34b也是同樣地’對下溫度調節板 3 4b供給冷卻水，當溫度低於設定溫度C11時關閉電磁閥 612。如此，可將上下的溫度調節板34a，3 4b分別冷卻至 -11 - (9) (9)1332435 設定溫度 Cul ,C11，同時，利用冷卻後之溫度調節板 34a,34b能將壓模35a,35b冷卻至設定溫度Cu],CIl。 這時，藉由使電磁閥611及電磁閥612獨立地進行開 閉，能將上下的溫度調節板34a，34b及壓模35a，35b分別 冷卻至不同的溫度。 此外，在選擇「冷卻2」之溫度模式時，上下的溫度 調節板34a，34b之設定溫度分別爲Cu2及C12，並進行與 「冷卻1」的情形同樣的控制。 此外，爲了防止溫度調節板34之過度冷卻，可將溫 度調節板3 4上多餘的冷卻水施以排水。該排水，係在關 閉電磁閥6 Π，6 1 2的狀態下.，藉由打開電磁閥6 1 7來進 行。 接著，使用第5〜9圖，說明用本實施形態之模壓成 形裝置 1對加工對象物進行模壓動作之1週期。 第5 A〜D圖，係顯示將加工對象物2施以模壓之第1 模壓動作中，1週期之各種狀態的時間變化。亦即，第 5A圖顯示上下方向的滑件之位置變化，第5B圖顯示模壓 加壓力之變化，第5C圖顯示溫度調節板34之溫度變化， 第5D圖顯示真空室內之氣壓變化。 第6A〜D圖係示意顯示模壓部30的1週期的動作狀 態。圖中以S 1〜S4表示滑件位置的變化。S 1〜S4係對應 於第5A圖之縱軸上的S1〜S4。 第7圖係顯示模壓加工之1週期的處理順序之流程 圖。 -12- (10) (10)1332435 首先，在時刻〇，滑件2 1位於上限位置s 1。這時， 加工對象物2被搬入模壓部30(S 1 1)。開始藉由控制器1 7 進行位置控制，使滑件2 1下降至上下真空密封件3 9，3 9 互相接觸之位置S2(S12)。 當滑件21下降至S2時（時刻tl)，真空泵40開始進 行真空室內之真空抽吸（S 13)。藉此，如第5D圖所示，真 空室內的壓力開始降低。 在時刻11以後，和真空抽吸動作並行，如第5 C圖所 示，溫度控制裝置60依「加熱1」之溫度模式開始進行 上下溫度調節板34a，3 4b的加熱（S 14)。在第1模壓動作， 「加熱 1」之上下溫度調節板 34a，34b的設定溫度 (Hu 1，ΗΠ)相等，此設定溫度比加工對象物2之軟化溫度 Tg高3 0°C以上。因此，例如，當加工對象物2爲丙烯酸 酯的情形，Hul=HlI = 120 〜140°C。 接著，當上下的溫度調節板34a，34b之溫度大致到達 設定溫度（Hu 1，H11)，且真空室內之真空度到達預定之設 定真空度P時（時刻t2)，藉由控制器1 7之加壓力控制， 使滑件21下降。這時，如第5B圖所示，控制器17會使 滑件21下降而成爲所設定之加壓力L，以加壓力L用壓 模3 5對加工對象物2進行模壓（S 1 5)。維持此加壓力L — 段時間以對加工對象物2進行模壓成形。 以加壓力L進行模壓時’如第5 A圖所示，滑件21 大致位於S3的位置。然而，這時並未實施位置控制，而 是實施加壓力控制，因此，隨著溫度調節板34a, 34b及加 (11) (11)1332435 工對象物2因加熱及冷卻所產生之熱膨脹與熱收縮，滑件 21的位置也會稍微上下移動，而使加壓力保持一定。 接著，溫度控制裝置60，如第5C圖所示，從溫度t3 起，以「冷卻1」的溫度模式開始進行上下溫度調節板 34a，34b的冷卻（S16)。這時，滑件21的位置（第5A圖）、 滑件加壓力（第5B圖）、真空室內的氣壓（第5D圖）維持不 變 〇 在第1模壓動作，「冷卻1」之溫度調節板34a,34b 之設定溫度Cul，Cll，都比加工對象物之軟化溫度Tg爲 低，且上溫度調節板3 4 a之設定溫度c u 1和下溫度調節板 34b之設定溫度C11設定成不同（例如Cul>Cll)。因此， 當加工對象物爲丙烯酸酯的情形，Cul與C11可在50〜90 °C之間。 當上下的溫度調節板34a,34b的溫度冷卻至「冷卻 1」之設定溫度時，控制器1 7藉由位置控制，使滑件2 1 上昇既定距離ΔΗ而將上下壓模35a，35b間的距離擴大， 滑件2 1移動至位置S 4 ( S 1 7)。在此，滑件2 1之移動距離 △ H，只要不致使真空室打開’且能在加工對象物2的表 面與壓模3 5之間形成供噴吹空氣送入的間隙即可。 這時，在上下溫度調節板34a,34b之溫度不同的狀態 下使滑件2 1上昇’利用加工對象物2之上面與下面之間 所產生之溫度梯度使加工對象物2發生彎曲變形◊利用該 彎曲’會在上下的壓模3 5 a, 3 5 b和加工對象物2之間形成 些微間隙。在此’加工對象物2之彎曲越小越好。因此， -14 - (12) (12)1332435 藉由將移動距離ΔΗ及設定溫度Cul，C11最佳化，能以最 小彎曲進行加工對象物2之脫模。 在時刻t4，使大氣進入真空室（S1 8)，同時從空氣噴 嘴41朝向加工對象物2的上下面和壓模35a,35b之間噴 吹空氣（S 19)，藉此，在加工對象物2和壓模35a，3 5b間將 空氣送入，而使加工對象物2從壓模進行脫模。空氣噴吹 是進行既定的時間（在此，是在時刻t4〜t5之間）。 之後，溫度控制裝置60，以「冷卻2」的溫度模式將 上下溫度調節板34a，34b實施冷卻（S20)。 在「冷卻2」，溫度調節板之設定溫度Cu2，C丨2爲同 —溫度，且比「冷卻1」之上下溫度調節板34a，34b之設 定溫度Cul,Cll爲低。藉由使設定溫度Cu2與C12形成相 等，能矯正加工對象物2之彎曲。因此，加工對象物爲丙 烯酸酯的情形，Cu2與C 12可設定在40〜7 0°C之間。 當上下溫度調節板34a，34b之溫度到達「冷卻2」之 設定溫度Cu2，C12時（時刻t5)，藉由對滑件21進行位置 控制使其上昇至上限位置S 1 ( S 2 1 )，如此可將成形後的加 工對象物2取出。 然後，說明第2模壓動作。主要是針對其和第1模壓 動作之不同點做說明。 第8圖及第9圖係顯示：在將加工對象物2實施模壓 之第2模壓動作中，1週期的各種狀態之時間變化的曲線 圖及流程圖。桌2模壓動作，在時刻13爲止係和第1模 壓動作相同。因此’其流程圖之步驟S 3 1〜S 3 5，係和第1 -15- (13) (13)1332435 模壓動作之步驟S ] 1〜S 1 5相同。 在第2模壓動作，於時刻t3以後，溫度控制裝置 60’根據設定溫度設定成Cul=Cll之「冷卻1」的溫度模 式，將溫度調節板34a,34b予以冷卻（S36)。此處之設定溫 度Cul，Cll都在加工對象物2之軟化溫度Tg以下。接 著，當溫度調節板3 4 a，3 4 b冷卻至設定溫度後，亦即到達 時刻t4時，溫度控制裝置60根據「加熱2」之溫度模式 將溫度調節板34a, 3 4b予以再加熱（S 37)。 這時之設定溫度Hu2，H12都在加工對象物2之軟化溫 度Tg以下，且上溫度調節板34a之設定溫度Hu2和下溫 度調節板 34b之設定溫度 H12設定成不同（例如 Hu2>H12)。 以「加熱2」模式進行加熱而使加工對象物2產生溫 度梯度時，藉由控制器1 7進行位置控制，使滑件2 1上昇 △ H移動至S4的位置（S38)。當滑件21移動至S4後，在 時刻t5，使大氣進入真空室（S39)，同時由空氣噴嘴41朝 向加工對象物2之上下面與壓模35之間噴吹空氣（S40)， 藉此’和第1模壓動作的情形同樣地，對稍微彎曲之加工 對象物2和壓模35a，3 5b之間吹入空氣，而使加工對象物 2從壓模35a,35b進行脫模。 亦即，在第2模壓動作，當上下的壓模35a，35b —旦 冷卻至加工對象物2的軟化溫度以下之相同溫度後，將上 下壓模35a,35b再度加熱成不同的溫度（軟化溫度以下）， 使加工對象物2產生溫度梯度而形成彎曲。 -16- (14) (14)1332435 之後，和第1模壓動作的情形同樣地，根據「冷卻 2 j之溫度模式將上下溫度調節板34a,34b冷卻至相同溫 度（S41)，使滑件21上昇至上限位置S1(S42)。 上述本發明之實施形態，僅是用來說明本發明之例 示，本發明的範圍並不限定於該等實施形態。在不脫離本 發明要旨的範圍內，當然能以其他各種態樣來實施本發 明。 例如，在上述實施形態，雖是針對在真空進行模壓成 形的情形做說明，但本發明也適用於在非真空狀態進行模 壓成形的情形。另一方面，像上述實施形態般在真空進行 模壓成形時，特別是壓模和加工對象物之接觸面容易形成 真空而造成脫模困難，因此本發明特別有效。 【圖式簡單說明】 第1圖係顯示本實施形態之模壓成形裝置1之槪略 構造。 第2圖係顯示模壓部30的詳細構造之截面圖。 第3圖係顯示模壓部30與溫度控制裝置60之詳細構 造。 第4圖係顯示加熱及冷卻的目標溫度之設定模式。 第5A〜D圖係顯示第I模壓動作之1週期的各種狀 態之時間變化。 第6A〜D圖係示意顯示模壓部30之1週期的動作狀 態。 -17- (15) (15)1332435 第7圖係顯示第1模壓動作之模壓加工之1週期的處 理順序之流程圖。 第8圖係顯示第2模壓動作之1週期的各種狀態之時 間變化。 第9圖係顯示第2模壓動作之模壓加工之1週期的處 理順序之流程圖。 【主要元件對照表】 1 :模壓成形裝置 1 1 :伺服馬達 1 2 :滑輪 13 :確動皮帶 14 :滾珠螺桿 1 5 :編碼器 1 6 :伺服放大器 1 7 :控制器 2 1 :滑件 22 :承板 2 3 :滑件位置檢測手段 24 :加壓力檢測手段 3 0 :模壓部 3 1 :上殼體 32 :下殼體 3 3 :隔熱板 -18- (16) (16)1332435 3 4 a, 3 4 b :溫度調節板 35a，35b :壓模 3 6 :大氣開放口 37 :真空吸引口 38a,38b :溫度感測器 3 9 :真空密封件 40 :真空泵 41 :空氣噴嘴 6 0 :溫度控制裝置1332435 (1) The present invention relates to a technique of pressing a stamp having a fine pattern against a surface of a thermoplastic resin sheet to transfer a fine pattern on the surface of the thermoplastic resin sheet; It is a technique for easily releasing a thermoplastic resin sheet from a stamper after press molding. [Prior Art] A molding apparatus for thermally transferring a fine pattern in a vacuum chamber in a vacuum or a reduced pressure state using a thermoplastic resin material is a prior art. This press molding apparatus is applied, for example, to the manufacture of a light guide plate made of a thermoplastic resin for a liquid crystal display panel or the like. In this press forming apparatus, a stamp having a fine pattern is pressed against the surface of a thermoplastic resin sheet, and after the transfer of the pattern is completed, the thermoplastic resin sheet must be released from the stamper. However, the stamper may be in close contact with the surface of the thermoplastic resin sheet and cannot be smoothly released. In this case, Patent Document 1 describes that air is blown into the contact surface between the object to be processed and the stamper, and air is sent between the object to be processed and the stamper to release the mold. [Patent Document 1] Japanese Laid-Open Patent Publication No. 2006-167788 discloses a mold release by blowing air, and when a slight gap is formed between the object to be processed and the stamper, the blown air can be sent to the gap between the object to be processed and the stamper. (release surface) can play a good role. SUMMARY OF THE INVENTION -4- (2) 1332435 However, when a vacuum is formed between the stamper and the object to be processed, there is no gap at all between the imager and the stamper. Therefore, even if a gas is blown, the gas may not be sent between the object to be processed and the stamper, and the mold may be released. This phenomenon is particularly likely to occur when pressure forming in a vacuum or a vacuum-reduced state. Accordingly, an object of the present invention is to provide a press molding apparatus which can easily release a target from a stamper after the stamper is pressed against the object to be processed and the pattern is transferred. A press molding apparatus (1) according to an embodiment of the present invention is for molding a sheet-shaped thermoplastic object (2) into a first and a second mold (35 a, 35 b) The first and second temperature adjustment units (3 4a, 3 4 b) for applying heat and cooling to the first and second molds, and the control device for controlling the target temperature by the temperature of the first and second temperature adjustment units (60) An air nozzle (41, 41) for blowing air; after the first and second molds are pressed against both surfaces of the object to be processed, the air is blown from the air nozzle to make the processing pair The first and second molds are released from the mold. The temperature control device includes a heating control means and a cooling control means for heating the first and second temperature adjustment units when the first and second molds are pressed against the object to be processed. The target temperature at which the softening temperature of the object to be processed is equal to or higher than the softening temperature of the object to be processed is: when the air nozzle blows air, the first and the temperature adjusting unit are cooled and controlled to have mutually different standard temperatures equal to or lower than the softening temperature. The spray is formed into a non-line mold. When the processing system is formed, the temperature is molded to the former, and in the second step of the molding, the target is -5-(3) (3) 1332435. In the embodiment, the cooling control means controls the first and second temperature adjustment units to be cooled from the target temperature equal to or higher than the softening temperature to the target temperatures different from each other. In another preferred embodiment, the cooling control means is configured to control the first and second temperature adjustment units to be reheated, and to cause the first and second temperature adjustment units to be different from each other. temperature. A press molding method according to an embodiment of the present invention is a press molding method using a press molding apparatus (1) for molding a sheet-shaped thermoplastic object (2). The first and second molds (35a, 35b) are formed, and the first and second temperature adjustment units (34a, 34b) for heating and cooling the first and second molds are used to blow air. The air nozzle (4, 4 1); the press molding method includes the step of heating the first and second molds to a softening temperature of the object to be processed, and heating the first and second temperature adjusting portions a step of press-molding the first and second molds that are at least the softening temperature to the both surfaces of the object to be processed, and expanding the distance between the first and second molds by a predetermined distance after the press molding, toward the first a step of blowing air from the air nozzle between the first mold and the second mold, and a step of cooling the first and second temperature adjustment units to different target temperatures during the blowing of the air. . [Embodiment] Hereinafter, a press molding apparatus according to an embodiment of the present invention will be described using a -6 - (4) (4) 1332435 pattern. Fig. 1 is a schematic view showing a schematic configuration of a press forming apparatus 1 of the present invention. As shown in Fig. 1, the press molding apparatus 1 is provided with a molded portion 30 for molding the object 2 to be processed, and a structure for controlling the molded portion 30. The structure for controlling the molding portion 30 is provided with a motor (servo motor 11, 11) for moving the slider 21 up and down, and a power conversion for converting the rotation of the servo motor n, n into a linear motion of the slider 21. Mechanism (pulleys 12, 12' to actuate the belts 13, 13, ball screws 14, 14), a controller 17 for driving the servo motors 1, 1, 1 and a temperature control device for adjusting the temperature of the stamper 35 60. The controller 17 outputs the control signals of the servo motors 11, 11 by position control according to the outputs of the slider position detecting means 23, 23; and according to the output of the pressure detecting means 24, 24, The output drives the servo motor 1 1,1 1 control signal by pressure control. The control signals output from the controller 17 will be described in detail below. When the servo amplifiers 16, 6 receive the control signal from the controller 17, the current output to the servo motors 11, 11 is controlled based on the control signals and the outputs of the encoders 15, 15. That is, the servo motor 11 is actuated in accordance with the instruction of the controller 17, so that the stamper 35, which will be described later, is attached to the slider 21 to approach or move away from the processed object 2. Further, the stamper 35 is pressed against the workpiece 2 in accordance with an instruction from the controller 17, and the object 2 is subjected to press forming. The object 2 to be processed is a thermoplastic resin sheet, for example, a light guide sheet made of acrylate or polycarbonate. The stampers 35a and 35b are, for example, sheets of 0_2 to 2.0 mm thick made of stainless steel or nickel having irregularities on the surface (to be formed on the surface of the light guide plate). (5) (5) 1332435 Fig. 2 is a cross-sectional view showing a detailed structure of the molded portion 30, and Fig. 3 shows a detailed structure of the molded portion 30 and the temperature control device 6A. The molded portion 30 has a housing 31 that is coupled to the upper member of the slider 21 and a housing 32 that is coupled to the lower portion of the carrier 22. As the slider 21 moves up and down, the upper casing 31 moves up and down. Further, vacuum sealing members 39, 39, 39, 39 are attached to the contact portions of the upper casing 31 and the lower casing 32, respectively. Further, when the upper casing 31 is lowered so that the vacuum seals 39, 39 to which the upper casing 31 is mounted and the vacuum seals 39, 39 to which the lower casing 32 is mounted are in contact with the upper casing 3 1 and the lower casing The inside of the 3 2 forms a closed space (vacuum chamber). The lower casing 32 is provided with air nozzles 41, 41 for blowing air. After the press molding, in order to release the object 2 from the stamper 35, air is blown to the vicinity of the contact surface of the stamper 35 and the object 2 to be processed. The following will explain the timing of blowing air. The lower casing 32 is provided with an atmosphere opening port 36 and a vacuum suction port 37». The atmosphere opening port 36 is passed through the vacuum valve 46 to allow the atmosphere to enter. The vacuum suction port 37 is connected to the vacuum pump 40 through a vacuum valve 45. When the vacuum chamber is in a vacuum or decompressed state, the vacuum valve 45 is opened and the vacuum valve 46 is closed, and vacuum suction is performed by a vacuum pump 4〇. When the atmosphere is introduced into the vacuum chamber, the vacuum valve 45 is closed and the vacuum valve 46 is opened. A pressure detector (not shown) for detecting the air pressure in the vacuum chamber is attached to the lower casing 32. On the inner side of each of the upper casing 31 and the lower casing 32, the following members are sequentially laminated from the outer side to the inner side: a heat insulating plate 3 3 (3 3 a, 33 b), a plate-shaped temperature regulating container (hereinafter referred to as temperature adjustment) A plate 34 (34a, 34b) and a stamper 35 (3 5 a, 35b) for transferring a predetermined uneven pattern to a mold of the object 2 to be processed. (6) (6) 1332435 A temperature detector 3 8 a, 3 8 b for detecting the temperature of the temperature adjustment plate is provided in the temperature adjustment plates 34a, 34b'. A flow path is provided inside the temperature adjustment plate 34 to allow a fluid such as a liquid or a gas supplied from the temperature control device 60 to pass therethrough. Heating and cooling of the stamper 35 are performed by flowing a fluid of a predetermined temperature through the flow path. As will be described later, the temperature control device 60 determines the heating temperature and the cooling temperature of the temperature adjustment plate 34 by controlling the temperature of the fluid flowing through the flow path in the temperature adjustment plate 34. The temperature control device 60 controls the temperature of the temperature adjustment plate 34 to the target temperature. For example, the temperature control device 60 uses high-temperature steam (a medium for heating the temperature adjustment plate 34), low-temperature cooling water (a medium for cooling), and supplies one of them to the upper and lower temperature adjustment plates 34a, 3 4b each. In other words, the temperature control device 60 includes a cooling water supply port 62 through which the cooling water flows, a steam supply port 63 through which the steam flows, a cooling port return port 64 for discharging the cooling water, and is used to be removed from the temperature adjustment plate 34. The air supply port 65 of the cooling water. Each of the supply ports 62, 63 is connected to a supply line 66 for supplying steam or cooling water to the upper and lower temperature regulating plates 34a, 34b, and the cooling water return port 64 is connected to the temperature regulating plate 34a extending from the upper and lower sides. The drain line 67 of 34b is provided with solenoid valves 611 to 616 between the supply ports 62 and 63 and the supply line 66. As will be described later, by controlling the opening and closing of the electromagnetic valves 611 to 616, heating and cooling of the upper and lower temperature regulating plates 34a, 34b are performed. The temperature control device 60 can independently control the upper and lower temperature adjustment plates -9-(7) 1332435 34a, 34b' so that the upper and lower temperature adjustment plates 34a to 34b form different temperatures to heat or cool the temperature adjustment plate 34, and the plural is preset. The target temperature setting unit 'temperature control device 60 selects one of the temperatures as the mesh temperature. For example, in the present embodiment, as shown in Fig. 4, the temperature of the upper and lower temperature adjustment plates 34a, 34b is set to two sets of heating mode group cooling modes, and heating is performed in either of the temperature modes. . φ Next, the control of the temperature control device 60 when the temperature regulating plate 34 is heated or cooled will be described. First, 'on heating, temperature control unit 60 turns on electromagnetic 613, 614, 615' to close solenoid valves 611, 612, 616, 617. Thus, the steam from the steam supply port is supplied to the upper and lower temperature adjustment plates 34a, 34b to be heated. At this time, the temperature control means 60 monitors the temperature of the upper and lower temperature regulating plates 34a, 34b by the temperature sensors 38a, 38b. • For example, when the temperature mode of “Heating 1” is selected, the temperature control unit 60 supplies steam to the upper temperature adjustment plate 34a, and closes the solenoid valve 613 when the temperature exceeds the set degree Hul. When the solenoid valve 613 is closed, the upper temperature regulating plate 34a stops supplying steam, so that the temperature of the upper temperature regulating plate 34a starts to decrease. When the temperature of the upper temperature regulating plate 34a is lower than the set temperature Hu1, the temperature control means 60 opens the electromagnetic valve 613 again, and then supplies the vapor to the upper temperature regulating plate 34a. By controlling the opening and closing of the solenoid valve 6, the temperature of the upper temperature regulating plate 34a can be maintained at the set temperature Hul, so that the temperature regulating plate 34a can heat the stamper 35a to the set temperature mark. Temperature to temperature is 1 3 degrees -10- (8) (8) 1332435 H u 1. In the case where the temperature regulating plate 34b is heated, the temperature control device 60 controls the opening and closing of the solenoid valve 614 to maintain the set temperature HI1. Thereby, the temperature regulating plate 34b can heat the stamper 35b to the set temperature ΗΠ. At this time, by opening and closing the electromagnetic valve 613 and the electromagnetic valve 614 independently, the upper and lower temperature regulating plates 34a, 34b and the stampers 35a, 35b can be heated to different temperatures. Further, when the temperature mode of "heating 2" is selected, the set temperatures of the upper and lower temperature adjusting plates 34a, 34b are Hu2 and H12, respectively, and the same control as in the case of "heating 1" is performed. On the other hand, upon cooling, the temperature control device 60 opens the solenoid valves 611, 612, 616 and closes the solenoid valves 613, 614, 615, 617. Thereby, cooling water ' is supplied to the upper and lower temperature regulating plates 34a, 34b to cool the temperature adjusting plates 34a, 34b. As in the case of heating, the temperature of the upper and lower temperature regulating plates 34a, 34b is monitored by the temperature sensors 38a, 38b, and the temperature of the temperature regulating plates 34a, 34b is controlled as follows according to the monitoring result. That is, when the "cooling 1" temperature mode is selected, the upper temperature regulating plate 34a is supplied with cooling water'. When the temperature is lower than the set temperature c u1, the electromagnetic valve 611 is closed. By closing the solenoid valve 61, the supply of the cooling water to the upper temperature adjustment plate 34a is stopped, and the temperature of the upper temperature adjustment plate 34a is lowered. Similarly to the lower temperature adjustment plate 34b, cooling water is supplied to the lower temperature adjustment plate 34b, and when the temperature is lower than the set temperature C11, the electromagnetic valve 612 is closed. Thus, the upper and lower temperature regulating plates 34a, 34b can be respectively cooled to -11 - (9) (9) 1332435 set temperatures Cul, C11, and at the same time, the stamper 35a can be pressed by the cooled temperature adjusting plates 34a, 34b, 35b is cooled to the set temperature Cu], CIl. At this time, by opening and closing the electromagnetic valve 611 and the electromagnetic valve 612 independently, the upper and lower temperature regulating plates 34a, 34b and the stampers 35a, 35b can be cooled to different temperatures. Further, when the temperature mode of "cooling 2" is selected, the set temperatures of the upper and lower temperature adjusting plates 34a, 34b are Cu2 and C12, respectively, and the same control as in the case of "cooling 1" is performed. Further, in order to prevent excessive cooling of the temperature regulating plate 34, excess cooling water on the temperature adjusting plate 34 may be drained. This drainage is performed by opening the solenoid valve 6 1 7 while the solenoid valve 6 Π, 6 1 2 is closed. Next, a cycle in which the object to be processed is subjected to the molding operation by the press molding apparatus 1 of the present embodiment will be described with reference to the fifth to ninth drawings. In the fifth A to D drawings, the time change of each state in one cycle in the first molding operation in which the object 2 is molded is shown. That is, Fig. 5A shows the positional change of the slider in the up and down direction, Fig. 5B shows the change of the pressurization plus pressure, Fig. 5C shows the temperature change of the temperature adjustment plate 34, and Fig. 5D shows the change of the air pressure in the vacuum chamber. Figs. 6A to 6D schematically show the operation state of the one-cycle of the molded portion 30. In the figure, changes in the position of the slider are indicated by S 1 to S4. S 1 to S 4 correspond to S1 to S4 on the vertical axis of Fig. 5A. Fig. 7 is a flow chart showing the processing sequence of one cycle of the molding process. -12- (10) (10) 1332435 First, at time 滑, the slider 2 1 is at the upper limit position s 1. At this time, the object 2 is carried into the molded portion 30 (S 1 1). At the beginning of the position control by the controller 17, the slider 2 1 is lowered to a position S2 where the upper and lower vacuum seals 3 9, 3 9 are in contact with each other (S12). When the slider 21 is lowered to S2 (time t1), the vacuum pump 40 starts vacuum suction in the vacuum chamber (S 13). Thereby, as shown in Fig. 5D, the pressure in the vacuum chamber starts to decrease. After time 11 and in parallel with the vacuum suction operation, as shown in Fig. 5C, the temperature control device 60 starts heating the upper and lower temperature adjustment plates 34a, 34b in the "heating 1" temperature mode (S14). In the first molding operation, the set temperature (Hu 1, ΗΠ) of the temperature adjusting plates 34a, 34b is equal to or higher than "heating 1", and the set temperature is higher than the softening temperature Tg of the object 2 by more than 30 °C. Therefore, for example, when the object 2 is acrylate, Hul = HlI = 120 to 140 °C. Next, when the temperature of the upper and lower temperature adjustment plates 34a, 34b substantially reaches the set temperature (Hu 1, H11), and the vacuum degree in the vacuum chamber reaches the predetermined set vacuum degree P (time t2), by the controller 17 Pressure control is applied to lower the slider 21. At this time, as shown in Fig. 5B, the controller 17 lowers the slider 21 to the set pressing force L, and presses the object 2 with the pressing force L by the pressing force L (S 15). This pressing force L is maintained for a period of time to press-form the object 2 to be processed. When the pressing is performed by the pressing force L, as shown in Fig. 5A, the slider 21 is located substantially at the position of S3. However, at this time, the position control is not performed, but the pressure control is performed. Therefore, with the temperature expansion plates 34a, 34b and the addition (11) (11) 1332435, the object 2 is thermally expanded and contracted due to heating and cooling. The position of the slider 21 is also slightly moved up and down, and the pressing force is kept constant. Next, as shown in Fig. 5C, the temperature control device 60 starts the cooling of the upper and lower temperature adjustment plates 34a and 34b in the temperature mode of "cooling 1" from the temperature t3 (S16). At this time, the position of the slider 21 (Fig. 5A), the pressure of the slider (Fig. 5B), and the pressure of the vacuum chamber (Fig. 5D) remain unchanged in the first molding operation, and the temperature adjustment plate of "Cooling 1" The set temperatures Cul, C11 of 34a, 34b are both lower than the softening temperature Tg of the object to be processed, and the set temperature cu 1 of the upper temperature adjustment plate 34a and the set temperature C11 of the lower temperature adjustment plate 34b are set to be different (for example, Cul>Cll). Therefore, when the object to be processed is an acrylate, Cul and C11 may be between 50 and 90 °C. When the temperature of the upper and lower temperature adjustment plates 34a, 34b is cooled to the set temperature of "cooling 1", the controller 17 raises the slider 2 1 by a predetermined distance ΔΗ by position control to move the upper and lower stampers 35a, 35b. As the distance increases, the slider 2 1 moves to the position S 4 (S 1 7). Here, the moving distance ΔH of the slider 2 1 is not required to cause the vacuum chamber to open, and a gap for blowing air to be blown can be formed between the surface of the object 2 and the stamper 35. At this time, the slider 2 1 is raised in a state where the temperatures of the upper and lower temperature adjustment plates 34a and 34b are different. The temperature gradient generated between the upper surface and the lower surface of the workpiece 2 causes the object 2 to be bent and deformed. The bending 'will form a slight gap between the upper and lower stampers 3 5 a, 3 5 b and the object 2 to be processed. Here, the smaller the curvature of the object 2 is, the better. Therefore, -14 - (12) (12) 1332435 By optimizing the moving distance ΔΗ and the set temperatures Cul, C11, the object 2 can be released with the minimum bending. At time t4, the atmosphere is introduced into the vacuum chamber (S18), and air is blown from the air nozzle 41 toward the upper and lower surfaces of the object 2 and the stampers 35a and 35b (S19), whereby the object to be processed is processed. 2, air is fed between the stampers 35a and 35b, and the object 2 is released from the stamper. Air blowing is performed for a predetermined time (here, between time t4 and t5). Thereafter, the temperature control device 60 cools the upper and lower temperature adjustment plates 34a, 34b in the "cooling 2" temperature mode (S20). In "Cooling 2", the set temperatures Cu2 and C2 of the temperature adjustment plate are the same temperature, and are lower than the set temperatures Cul and C11 of the temperature adjusting plates 34a and 34b above the "cooling 1". By forming the set temperatures Cu2 and C12 in phase, the bending of the object 2 can be corrected. Therefore, in the case where the object to be processed is acrylate, Cu2 and C12 can be set between 40 and 70 °C. When the temperature of the upper and lower temperature adjustment plates 34a, 34b reaches the set temperatures Cu2, C12 of "cooling 2" (time t5), the slider 21 is positionally controlled to rise to the upper limit position S 1 (S 2 1 ), Thus, the object 2 to be processed can be taken out. Next, the second molding operation will be described. It mainly explains the difference between it and the first molding action. Fig. 8 and Fig. 9 are graphs and flowcharts showing temporal changes in various states of one cycle in the second molding operation of molding the object 2 to be processed. The table 2 molding operation is the same as the first molding operation at time 13. Therefore, the steps S 3 1 to S 3 5 of the flowchart are the same as the steps S 1 1 to S 1 5 of the first -15-(13) (13) 1332435 molding operation. In the second molding operation, after the time t3, the temperature control device 60' sets the temperature mode of "cooling 1" of Cul = C11 in accordance with the set temperature, and cools the temperature regulating plates 34a, 34b (S36). Here, the set temperatures Cul and C11 are both below the softening temperature Tg of the object 2 to be processed. Next, when the temperature adjustment plates 3 4 a, 3 4 b are cooled to the set temperature, that is, when the time t4 is reached, the temperature control device 60 reheats the temperature adjustment plates 34a, 34b according to the "heating 2" temperature mode ( S 37). At this time, the set temperatures Hu2 and H12 are both below the softening temperature Tg of the object 2, and the set temperature Hu2 of the upper temperature adjusting plate 34a and the set temperature H12 of the lower temperature adjusting plate 34b are set to be different (for example, Hu2 > H12). When heating is performed in the "heating 2" mode to cause a temperature gradient in the object 2, the controller 7 performs position control to move the slider 2 1 up to ΔH to the position of S4 (S38). When the slider 21 is moved to S4, the atmosphere is introduced into the vacuum chamber at time t5 (S39), and air is blown between the upper surface of the object 2 and the stamper 35 by the air nozzle 41 (S40). In the same manner as in the case of the first molding operation, air is blown between the object 2 to be slightly bent and the stampers 35a and 35b, and the object 2 is released from the stampers 35a and 35b. In other words, in the second molding operation, when the upper and lower stampers 35a and 35b are cooled to the same temperature below the softening temperature of the object 2, the upper and lower stampers 35a and 35b are again heated to different temperatures (softening temperature). Hereinafter, the object 2 is subjected to a temperature gradient to form a curve. -16- (14) (14) 1332435 Then, in the same manner as in the case of the first molding operation, the upper and lower temperature adjustment plates 34a, 34b are cooled to the same temperature (S41) in the temperature mode of cooling 2j, and the slider 21 is caused. The present invention is not limited to the embodiments of the present invention, and the scope of the present invention is not limited to the scope of the present invention. The present invention can be carried out in various other aspects. For example, in the above embodiment, the case where the press molding is performed under vacuum is described, but the present invention is also applicable to the case where the press molding is performed in a non-vacuum state. When the press molding is performed under vacuum as in the above-described embodiment, the contact surface between the stamper and the object to be processed is likely to form a vacuum, which is difficult to release the mold. Therefore, the present invention is particularly effective. [Simplified description of the drawing] Fig. 1 shows The schematic structure of the press molding apparatus 1 of the present embodiment. Fig. 2 is a cross-sectional view showing the detailed structure of the molded portion 30. Fig. 3 shows the molded portion 30 and the temperature control device 60. Fig. 4 shows a setting mode of the target temperature for heating and cooling. Fig. 5A to Fig. D show temporal changes of various states of one cycle of the first molding operation. Figs. 6A to 3D schematically show the molding portion 30. The operation state of one cycle. -17- (15) (15) 1332435 Fig. 7 is a flow chart showing the processing sequence of one cycle of the first molding operation, and Fig. 8 shows the second molding operation. Fig. 9 is a flow chart showing the processing sequence of one cycle of the molding process of the second molding operation. [Main component comparison table] 1 : Molding molding apparatus 1 1 : Servo motor 1 2 : Pulley 13 : Actuation belt 14 : Ball screw 1 5 : Encoder 1 6 : Servo amplifier 1 7 : Controller 2 1 : Slide 22 : Carrier 2 3 : Slider position detecting means 24 : Pressure detecting means 3 0 : Molded part 3 1 : upper case 32 : lower case 3 3 : heat shield 18 - (16) (16) 1332435 3 4 a, 3 4 b : temperature regulating plate 35a, 35b: stamper 3 6 : atmosphere Open port 37: vacuum suction port 38a, 38b: temperature sensor 3 9 : vacuum seal 40: vacuum pump 41: air spray 60: temperature control means