CN103787267A - Making method of flat workpiece having surface microstructure - Google Patents
Making method of flat workpiece having surface microstructure Download PDFInfo
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- CN103787267A CN103787267A CN201210420712.XA CN201210420712A CN103787267A CN 103787267 A CN103787267 A CN 103787267A CN 201210420712 A CN201210420712 A CN 201210420712A CN 103787267 A CN103787267 A CN 103787267A
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Abstract
The invention provides a making method of a flat workpiece having a surface microstructure. The making method comprises the following steps: providing a coining machine comprising a first die and a second die, wherein the first die includes a coined pattern formed on the first surface of the first die, and the second die faces the first surface having the coined pattern; providing a preform arranged between the first die and the second die; heating the first die and the second die to a temperature enabling the preform to be in a plastic state; switching the first die and the second die to make the pattern of the first die coiled onto the preform in order to obtain a preform having the coiled pattern; and cooling second die to make the preform having the coiled pattern shrink and separate from the first die in order to obtain the flat workpiece having a surface microstructure. The making method can improve the process pass rate, the shape of the surface microstructure and the dimension and precision consistency, so the flat workpiece having a highly precise surface microstructure can be smoothly obtained.
Description
Technical field
The invention relates to a kind of preparation method of the flat panel workpieces with surface micro-structure, espespecially a kind of preparation method of bearing optical fiber device.
Background technology
Optical fiber (optical fibers) is that one utilizes light in fiber, to produce total reflection, and can be used for the accurate fiber of remote optical communication, and it is mainly made up of a core, fine shell and protection batch coating from inside to outside.Although the external diameter of fine shell is about 125 microns, but only approximately 10 microns to 62.5 microns of the external diameters of core, cause plural optical fiber carrying out when optics connects having high contraposition precision, could effectively reduce the decay situation of optical signalling, reach the object of transmitting optical signalling.
Generally speaking, in order to promote the packaging efficiency of many optical fiber, mostly be the assembling mode that adopts passive type contraposition (passive alignment), many optical fiber are first carried on bearing optical fiber device, and on bearing optical fiber device or other optical elements (as: optical transmitting set, optical receiver, optical waveguide etc.), be labeled with calibration mark, make many optical fiber carry out optics can be via the in addition contraposition and fixing of this calibration mark while connecting.But this kind of assembling mode must use the bearing optical fiber device of the surface micro-structure that possesses high precision, just can guarantee that many optical fiber obtain required contraposition precision in the time carrying out optics connection.
Refer to shown in Fig. 6, on two bearing optical fiber devices 61,62, there are respectively multiple V-grooves to carry many optical fiber 611,621.When making two optical fiber 611, when 621 mutual optics connect, use two and possess high accurancy and precision micro-structural (, have that rule is arranged in parallel and V-groove consistent in shape and size) bearing optical fiber device 61,62, can guarantee that optical fiber 611 on a bearing optical fiber device 61 wherein and the optical fiber 621 of another bearing optical fiber device 62 carry out optics and cun obtains required contraposition precision while being connected, so as to significantly reducing the decay situation of optical signalling.
But, in the time of non-being arranged parallel to each other of groove of a bearing optical fiber device 61 wherein, optical fiber 612 and another optical fiber 622 of deviation (misalignment) cannot obtain required contraposition precision, cause optical signalling at two optical fiber 612,622 junction produces serious optical signalling decay, and significantly reduces the coverage of optical fiber transmission optical signalling.
In addition, though the V-groove on two bearing optical fiber devices arrange in the mode being parallel to each other, if when the position of V-groove produces slightly deviation, the optical fiber that is arranged at different fiber bogey still cannot obtain required contraposition precision.
Refer to shown in Fig. 7, be arranged at respectively two bearing optical fiber devices 71, optical fiber 711 on 72,712,721,722 all arrange in the mode being parallel to each other, but due to two bearing optical fiber devices 71,72 size inconsistent (for example: groove is different from the spacing between groove), while causing optical fiber 711 with optical fiber 721 accurate contraposition, optical fiber 712 can produce dislocation slightly with optical fiber 722, causes two optical fiber 712,722 optical signallings that transmit are significantly decayed, and reduce the coverage of optical fiber transmission optical signalling.
Therefore, attempt at present to develop one and there is bearing optical fiber device, it can be in order to carry many optical fiber, many optical fiber can be parallel in the V-groove of this bearing optical fiber device, not only can utilize the mode of passive type contraposition to promote the joint efficiency of plural optical fiber, also can improve the problem that optical signalling is attenuated in the time that optics connects.
Tradition is utilized stamping technique to make to have in the method for flat panel workpieces of surface micro-structure, comprises heating mould and preform, impression preform, the demoulding and each the step such as cooling around preform.But, traditional fabrication method has shortcomings, for example: (1) from preform, around each face is cooling from outside to inside simultaneously, the cooling temperature field that makes preform is presented to circular distribution (as shown in Figure 8, the center of surface micro-structure and the temperature contrast in each outside are large), cause the improper contraction of outer surface micro-structural of flat panel workpieces and produce gross distortion, and the shape precision of deteriorated its surface micro-structure; (2) in the time that the number of active lanes of the surface micro-structure of flat panel workpieces is larger, by making, each outer surface micro-structural of flat panel workpieces and the horizontal temperature field variation of center surface micro-structural are larger, cause the width tolerance of groove in surface micro-structure and the spacing tolerance of groove and groove all exceed ± more than 1 micron, thereby cannot make smoothly the flat panel workpieces of high size precision and high channel surface micro-structure.
Summary of the invention
Because the problem that prior art faces, the object of the present invention is to provide a kind of preparation method of the flat panel workpieces with surface micro-structure, its precision that can significantly promote surface micro-structure (, precision), while making it as a bearing optical fiber device, can significantly reduce the degree that optical signalling is depleted in the junction of two optical fiber.
For reaching aforementioned object, the preparation method that the invention provides a kind of flat panel workpieces with surface micro-structure, it comprises: A provides an impression board, and this impression board comprises: one first mould, it includes an imprinted pattern, and this imprinted pattern is formed at the first surface of this first mould; And one second mould, it has the first surface of imprinted pattern in the face of being arranged at this; B provides a preform, and this preform is arranged between this first mould and this second mould, and this preform is adjacent to this second mould; C heats this second mould of this first mould, until be enough to make this preform to be the temperature of plasticity state; This first mould of D pressing and this second mould, so as to making the imprinted pattern of this first mould be stamped on this preform, acquisition one has the preform of imprinted pattern; And cooling this second mould of E, so as to make this preform with imprinted pattern via cooling contraction with this first mould separating, obtain this and have the flat panel workpieces of surface micro-structure.
Have in the preparation method of flat panel workpieces of surface micro-structure in the present invention, be arranged between the first mould and the second mould owing to thering is the preform of imprinted pattern, and be adjacent to the second described mould, when aforementioned step e is only carried out when cooling the second mould, it can carry out evenly cooling in the cooling mode of one side via conduction of heat, make temperature field be the layered distribution of level, there is the micro-structural precision of the flat panel workpieces of surface micro-structure so as to promoting the present invention.
According to the present invention, described imprinted pattern is one to be convexly equipped with the stereochemical structure that is formed at the first mould, after imprint step, this imprinted pattern will be stamped on preform, and a surface of preform that has an imprinted pattern so as to order is arranged with the stereochemical structure being formed with imprinted pattern that should the first mould.
According to the present invention, described precision finger-type is formed in imprinted pattern on the preform skew situation before and after the cooling processing of step e.If one is formed at imprinted pattern on preform after cooling processing, the cooling shrinkage factor variation of outermost surface micro-structure and intermediate surface micro-structural is worth when low, can promote the shape of surface micro-structure, the uniformity of size, and then obtain the flat panel workpieces of high accurancy and precision surface micro-structure; When the cooling shrinkage factor variation of outermost surface micro-structure and intermediate surface micro-structural is worth when too high, can reduce the size precision of flat panel workpieces upper surface micro-structural.
Preferably, according to preparation method of the present invention, between step B and step C, more comprise a step B ': make this this preform, the first mould and this second mould be placed in the confined space of a low vacuum below 5 × 10-3 holder (torr), produce heat exchange phenomenon (comprising: heat conduction and thermal convection current phenomenon) with the preform contact gas after keeping from heat, be horizontal distribution so as to the cooling temperature field of guaranteeing the flat panel workpieces with surface micro-structure, reach the object of the micro-structural precision that promotes the flat panel workpieces with surface micro-structure.
According to the present invention, described preform is to be a kind ofly heated to proper temperature and the material of shaping is made, for example, but be not limited to: glass, optical glass, polymethyl methacrylate (polymethylmethacrylate, PMMA), PETG (polyethylene terephthalate, or Merlon (polycarbonate, PC), epoxy resin or quartz PET).Preferably, in the time that the preform of selecting is optical glass, heat this first mould and the second mould to 350 ℃ between 700 ℃, be beneficial to carry out the imprinting process of step D.In this step, because preform is arranged on the second mould, therefore, in the time of the second mold heated, can make via conduction of heat simultaneously preform with heating.
Preferably, according to preparation method of the present invention, between step D and step e, further comprise step D ': constant temperature impresses this preform with imprinted pattern and reaches 60 seconds to 100 seconds, the flat panel workpieces so as to eliminating with surface micro-structure is subject to the thermal stress producing after hot padding, prevents that surface micro-structure from producing distortion.
Preferably, according to preparation method of the present invention, this step e comprises being less than or equal to cooling this second mould of cooldown rate of 0.5 ℃/sec, make to have imprinted pattern preform can via cooling contraction smoothly with the first mould separating, obtain the flat panel workpieces with surface micro-structure.Preferably, this step e more comprises being less than or equal to cooling this first mould of cooldown rate of 0.5 ℃/sec, in order to assisting the preform with imprinted pattern via cooling contraction and the first mould separating.
Preferably, according to preparation method of the present invention, after step e, further comprise step e ' with cooling this second mould of the cooldown rate secondaries of 1.5 ℃/sec to 2 ℃/sec.
Preferably, step e and/or step e ' comprise and use a gas to blow to the second surface of this second mould, so as to cooling this second mould equably, make the present invention have surface micro-structure flat panel workpieces can via with the conduction of heat of the second mould, carry out evenly cooling in the cooling mode of one side.Preferably, this gas comprises nitrogen, oxygen or its combination, for example: air.
Preferably, the present invention has the micro-structural of flat panel workpieces and the imprinted pattern complementation of this first mould of surface micro-structure.Preferably, the flat panel workpieces with surface micro-structure includes multiple grooves, and these grooves are arranged with the upper surface that is formed at this and has the flat panel workpieces of surface micro-structure, and these grooves extend parallel to each other towards a bearing of trend.
Preferably, each groove is made up of two planes that are acute angle, forms the cross-section structure just like V-shape.
Preferably, described impression board more comprises two fixed parts, and it is arranged on this second mould and the corresponding both sides of this preform, and is set in parallel in the bearing of trend of these grooves, so as to promoting the precision of outer surface micro-structural of flat panel workpieces.In this, the end of the bearing of trend of these grooves is no longer provided with fixed part, can discharge thus in order to the thermal stress of the flat panel workpieces with surface micro-structure.
Preferably, the mean breadth of these grooves is between 105 microns to 196 microns, and the width tolerance of these grooves is between ± 0.1 to ± 0.35 micron, better between ± 0.2 to ± 0.35 micron.Preferably, the spacing between two grooves is between 127 microns to 250 microns, and spacing tolerance between these grooves and groove is between ± 0.2 micron to ± 0.5 micron.
Preferably, the first mould and second mould of described impression board are obtained by a heat conducting material, for example: tungsten carbide or tool steel, the Coating Materials of described these fixed parts can be platinumiridio or class is bored carbon.Preferably, the center line average roughness of the first surface of this first mould (Ra) is lower than below 20 nanometers.
Preferably, the flat panel workpieces that the present invention has surface micro-structure can be used as a bearing optical fiber device, and it can be arranged at plural optical fiber in groove, so as to carrying plural optical fiber.Because the described flat panel workpieces with surface micro-structure can possess high accurancy and precision, and the angle setting of these grooves to set; Preferably, its grade is arranged in parallel, thereby can in the time that optics connects, effectively reduce the loss of optical fiber.
Accordingly, attainable concrete effect of preparation method that the present invention has a flat panel workpieces of surface micro-structure comprises:
1. after imprint step, directly carry out cooling step, utilize cooling contraction to make preform smoothly from the first mould separating, so as to guaranteeing the micro-structural precision of the flat panel workpieces with surface micro-structure, promote the processing procedure acceptance rate of preparation method of the present invention;
2. carry out one side level by the second surface of the second mould cooling, so as to making temperature field be the layered distribution of level, and then promote the surface micro-structure precision of flat panel workpieces;
3. in the closed environment of vacuum, complete the steps such as heating, impression, the cooling and demoulding, can avoid the outer surface of the flat panel workpieces with surface micro-structure and the gas of confined space to contact and heat exchange phenomenon occurs, be the layered distribution of level so as to effective reduction horizontal temperature field variability and holding temperature field, avoid the first mould and the second mould oxidized simultaneously, and then promote the surface micro-structure precision of flat panel workpieces;
4. utilize two fixed parts to increase the frictional force of preform and the second mould, while avoiding the first mould liter to lift, preform produces displacement, so as to promoting the outer surface micro-structural precision of flat panel workpieces of the present invention;
5. the flat panel workpieces with surface micro-structure described in can be used as a kind of bearing optical fiber device, and it can guarantee the contraposition precision that many optical fiber connect in optics, produces the situation of decay so as to significantly reducing plural fiber optics junction.
Accompanying drawing explanation
The following drawings is only intended to the present invention to schematically illustrate and explain, not delimit the scope of the invention.Wherein:
Fig. 1 is the flow chart that the present invention makes the flat panel workpieces with surface micro-structure.
Fig. 2 A, for not yet carrying out before imprint step, impresses the structural representation of board and preform.
Fig. 2 B when carrying out imprint step, the structural representation of impression board and preform.
Fig. 2 C is for carrying out after cooling step, and impression board and the present invention have the structural representation of the flat panel workpieces of surface micro-structure.
Fig. 3 is that the present invention makes in the process of the flat panel workpieces with surface micro-structure, the temperature of vacuum, first, second mould and the stress graph of a relation to the time.
Fig. 4 is the structural representation that the present invention has the flat panel workpieces of surface micro-structure.
Fig. 5 is the prepared flat panel workpieces internal temperature field pattern with surface micro-structure of preparation method of the present invention.
Fig. 6 uses two bearing optical fiber device optics to connect the docking schematic diagram of multiple optical fiber in prior art.
Fig. 7 uses two bearing optical fiber device optics to connect another docking schematic diagram of multiple optical fiber in prior art.
Fig. 8 is from preform each face cooling preform internal temperature field pattern from outside to inside around in prior art.
Main element label declaration:
1 impression board 11 first moulds
111 second surface 112 first surfaces
12 second mould 121 first surfaces
122 second surface 13 fixed parts
14 imprinted pattern 21 preforms
211 grooves 4 have the flat panel workpieces of surface micro-structure
41 groove D bearing of trends
61,62 bearing optical fiber device 611,612 optical fiber
621,622 optical fiber 71,72 bearing optical fiber devices
711,712 optical fiber 721,722 optical fiber
The specific embodiment
Understand for technical characterictic of the present invention, object and effect being had more clearly, now contrast accompanying drawing explanation the specific embodiment of the present invention.
Please refer to shown in Fig. 1, it is as described below that the present invention has the preparation method of flat panel workpieces of surface micro-structure:
Refer to shown in Fig. 2 A, an impression board 1 is first provided in steps A, this impression board 1 comprises one first mould 11, one second mould 12 and two fixed parts 13.Wherein, the first mould 11 has a first surface 112 and back to the second surface 111 in first surface 112, and wherein this imprinted pattern 14 is formed on the first surface 112 of this first mould 11; And the second mould 12 has the first surface 112 of imprinted pattern 14 in the face of being arranged at the first mould 11, and two fixed parts 13 are arranged on this second mould 12 and the both sides of the first mould 11.
In step B, a preform 21 is arranged between the first mould 11 and the second mould 12 and between two fixed parts 13, and is adjacent on the first surface 121 of this second mould 12.In this, described preform is made by optical glass, is beneficial to be formed with as the imprinted pattern of the first mould in a surface imprint of preform via follow-up imprint step.
As shown in Figure 2 A, have in the preparation method of flat panel workpieces of surface micro-structure in the present invention, described preform 21, the first mould 11 and the second mould 12 is arranged at (not shown) in a confined space.As shown in Figure 3, heating (step C, impression (step D, cooling (step e and the demoulding (step e ' etc. before step, first carry out a step B ' by below the vacuum degree control 5 × 10-3 holder in confined space, to avoid the γ-ray emission heat exchange phenomenon in confined space, promote preform one side cooling stability, and reach and prevent the first mould and the oxidized object of the second mould.
Afterwards, in step C, be to heat this first mould 11 to approximately 540 ℃ with the rate of heat addition of 5 ℃/sec, then heated at constant temperature approximately 100 seconds; Simultaneously heat this second mould 12 to approximately 540 ℃ with the rate of heat addition of 3.86 ℃/sec, then heated at constant temperature approximately 80 seconds, make the preform 21 being arranged on the second mould 12 be plasticity state.In the present embodiment, the first described mould and the second mould are formed by the tungsten carbide of heat conducting material, and the center line average roughness of the first surface of this first mould is lower than below 20 nanometers.
Then, please further consult shown in Fig. 2 B and Fig. 3, be heated and be after plasticity state until preform 21, in step D, this preform 21 is folded between the first mould 11 and the second mould 12, and press down approximately 86.4 microns, this first mould 11 with the pressure of 150N and the speed of 1.5 micro-meter per seconds, so as to making the imprinted pattern 14 on the first surface 112 that is formed at the first mould 11 be stamped on a surface of preform 21, acquisition one has the preform 21 of imprinted pattern.In this, be formed in the imprinted pattern on preform 21 and include multiple grooves 211, approximately 105.8 microns of the width of each groove 211, and between these grooves 211 and groove 211 at a distance of approximately 128 microns.
Then, in step D ', continue to impress approximately 100 seconds with the identical height constant temperature that presses down, the flat panel workpieces so as to eliminating with surface micro-structure is subject to the thermal stress producing after hot padding.
Afterwards, please further consult shown in Fig. 3, in step e, comprise use air respectively equably the second surface 122 of the second surface 111 to the first mould 11 and the second mould 12 blow, this second surface 122 is back in this first surface 121, so as to the second surface 111 of cooling this first mould 11 of cooldown rate difference one side of 0.5 ℃/sec and the second surface 122 of the second mould 12, make the first mold cools down to approximately 460 ℃, and the second mould is also cooled to 460 ℃.
Accordingly, as shown in Figure 2 C, after using air to blow to the second surface 122 of the second mould 12, via the second mould 12 and there is the conduction of heat between the preform 21 of imprinted pattern, there is the preform 21 cooling contraction thereupon from the bottom to top of imprinted pattern, and be cooled to approximately 490 ℃ when the first mould 11, the contact force of preform 21 and the first mould 11 levels off to 0, and be able to smoothly to depart from the second surface 112 of the first mould 11 and the fixed part 13 that is arranged at both sides.
Then, in step e ' in, can be more further with the cooldown rate of 1.5 ℃/sec, the second surface 122 of this second mould 12 to be carried out to secondary cooling, and with the cooldown rate that is less than 5 ℃/sec, the first mould 11 is carried out to cooling step simultaneously, be down to room temperature so as to the temperature that makes the first mould 11 and the second mould 12.In this step, also the first mould 11 is returned back to original height simultaneously.
Finally, until the first mould 11 and second mould 12 is cooling complete after, abolish the vacuum of confined space, can obtain the flat panel workpieces with surface micro-structure 4 as shown in Figure 4.In this, the described flat panel workpieces with surface micro-structure 4 is the preform after cooling with imprinted pattern.
Refer to shown in Fig. 4, the upper surface that the present invention has the flat panel workpieces 4 of surface micro-structure is formed with multiple grooves 41, these grooves 41 are arranged with the upper surface that is formed at the flat panel workpieces 4 with surface micro-structure, and these grooves 41 extend parallel to each other towards a bearing of trend D.As shown in Figure 4, these grooves 41 are made up of two planes that are acute angle, and the section of for example this groove is V-shaped, but is not limited only to this.
In the present embodiment, after cooling step, the mean breadth of these grooves is 105 microns, the width tolerance of groove is ± 0.1 micron, and between these grooves and groove at a distance of 127 microns, spacing tolerance between these grooves and groove is ± 0.3 micron, confirms can make smoothly via method of the present invention the flat panel workpieces with surface micro-structure that possesses high accurancy and precision and high channel ratio.
Please further consult shown in Fig. 2 C and Fig. 4, in step D, be subject to after the downforce of the first mould owing to being the preform 21 of plasticity state, can be toward surrounding diffusion, therefore, preparation method of the present invention arranges two fixed parts 13 in the bearing of trend D of the corresponding arranged on left and right sides of preform 21 and parallel these grooves, so as to reaching the object of the outer shape of fixing preform and the precision of lifting surface micro-structure.
In the present embodiment, two fixed parts are formed by a heat insulator, and a surface-coated of this insulating materials has the platinumiridio of thickness approximately 100 nanometers, so that anti-stick effect to be provided.In addition, in preparation method of the present invention, the both sides, front and back (, the end of the bearing of trend of these grooves) of preform are no longer provided with two fixed parts, can discharge via the both sides, front and back of the flat panel workpieces with surface micro-structure in order to the thermal stress that is subject to produce after hot padding.
Refer to shown in Fig. 5, after the one side cooling step of the present invention via step e and E ', can guarantee that cooling temperature field presents the layered distribution of level, and then effectively control and reduce the horizontal temperature field variability of surface micro-structure, thereby can obtain the flat panel workpieces of the surface micro-structure with high accurancy and precision.
Embodiment 2
The embodiment of the present invention 2 is mainly to make the flat panel workpieces with surface micro-structure via the method as described in embodiment 1, its difference is that the imprinted pattern of this first mould is different from the imprinted pattern of embodiment 1, in step D, this preform is to be folded between the first mould and the second mould, and press down approximately 170 microns, this first mould with the pressure of 280N and the speed of 2.5 micro-meter per seconds, be formed in the imprinted pattern on preform, approximately 198 microns of the width of each groove, and between these grooves and groove at a distance of approximately 252 microns.
Via the preparation method as embodiment 1, after cooling step, have in the flat panel workpieces of surface micro-structure, the mean breadth of these grooves is 196 microns, the width tolerance of groove is ± 0.1 micron, and between these grooves and groove, at a distance of 250 microns, the spacing tolerance between these grooves and groove is less than ± 0.35 micron, confirms that method of the present invention can make the flat panel workpieces with surface micro-structure that possesses high accurancy and precision and high channel ratio smoothly.
In sum, it is cooling that the present invention directly carries out one side level to the second surface of the second mould after imprint step, make preform via cooling contraction smoothly by the first mould separating, thereby can effectively promote processing procedure acceptance rate, and make smoothly the flat panel workpieces with surface micro-structure of high accurancy and precision characteristic.
The foregoing is only the schematic specific embodiment of the present invention, not in order to limit scope of the present invention.Any those skilled in the art, not departing from equivalent variations and the modification done under the prerequisite of design of the present invention and principle, all should belong to the scope of protection of the invention.
Claims (15)
1. a preparation method with the flat panel workpieces of surface micro-structure, it comprises:
(A) provide an impression board, this impression board comprises:
One first mould, tool includes an imprinted pattern, and this imprinted pattern is formed at the first surface of this first mould; And one second mould, it has the first surface of imprinted pattern in the face of being arranged at this;
(B) provide a preform, this preform is arranged between this first mould and this second mould;
(C) heat this second mould of this first mould, until be enough to make this preform to be the temperature of plasticity state;
(D) this first mould of pressing and this second mould, so as to making the imprinted pattern of this first mould be stamped on this preform, acquisition one has the preform of imprinted pattern; And
(E) cooling this second mould, so as to make this preform with imprinted pattern via cooling contraction with this first mould separating, obtain this and have the flat panel workpieces of surface micro-structure.
2. preparation method as claimed in claim 1, it is characterized in that, between step B and step (C), more comprise a step (B '): make this this preform, the first mould and this second mould be placed in a confined space, and the low vacuum of this confined space is below 5 × 10-3 ask.
3. preparation method as claimed in claim 1 or 2, it is characterized in that, between step (D) and step (E), further comprise step (D '): constant temperature impresses this preform with imprinted pattern and reaches 60 to 100 seconds.
4. preparation method as claimed in claim 1 or 2, is characterized in that, the material of this preform is optical glass, and this step (C) comprises that heating this first mould and the second mould to 350 ℃ are between 700 ℃.
5. preparation method as claimed in claim 1 or 2, it is characterized in that, this second mould comprises a first surface and a second surface, wherein the first surface of this second mould has the surface of imprinted pattern in the face of this first mould, and this second surface is back in the first surface of this second mould, and this step (E) comprises cooling this second mould of second surface from this second mould.
6. preparation method as claimed in claim 5, is characterized in that, this step (E) comprises being less than or equal to cooling this second mould of cooldown rate of 0.5 ℃/sec.
7. preparation method as claimed in claim 6, is characterized in that, this step (E) more comprises being less than or equal to cooling this first mould of cooldown rate of 0.5 ℃/sec.
8. preparation method as claimed in claim 5, is characterized in that, in step (E) afterwards, further comprises step (E ') cooling this second mould of secondary, and wherein the cooling cooldown rate of secondary is between 1.5 ℃/sec to 2 ℃/sec.
9. preparation method as claimed in claim 5, is characterized in that, this step (E) comprises the second surface air blowing of use one gas to this second mould, and so as to cooling this second mould, wherein this gas is nitrogen, oxygen or its combination.
10. preparation method as claimed in claim 1, it is characterized in that, this flat panel workpieces with surface micro-structure includes multiple grooves, these grooves are arranged with a surface that is formed at this flat panel workpieces with surface micro-structure, and these grooves extend parallel to each other towards a bearing of trend, and each described groove is made up of two planes that are acute angle.
11. preparation methods as claimed in claim 10, is characterized in that, the mean breadth of these grooves is between 105 microns to 196 microns, and the width tolerance of these grooves is between ± 0.1 micron to ± 0.35 micron.
12. preparation methods as claimed in claim 11, is characterized in that, the spacing between these grooves and groove is between 127 microns to 250 microns, and spacing tolerance between these grooves and groove is between ± 0.2 micron to ± 0.5 micron.
13. preparation methods as claimed in claim 10, is characterized in that, this impression board more comprises two fixed parts, and it is arranged on this second mould and the corresponding both sides of this preform, and are set in parallel in the bearing of trend of these grooves.
14. preparation methods as claimed in claim 13, is characterized in that, the material of this first mould and this second mould is tungsten carbide or tool steel, and the Coating Materials of these fixed parts is that platinumiridio or class are bored carbon.
15. preparation methods as claimed in claim 5, is characterized in that, the center line average roughness of the first surface of this first mould is lower than 20 nanometers.
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Cited By (4)
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| CN104359082A (en) * | 2014-10-17 | 2015-02-18 | 复旦大学 | Method for manufacturing LED (Light-Emitting Diode) diffuser of inorganic microstructure |
| CN107473177A (en) * | 2017-07-14 | 2017-12-15 | 华中科技大学 | A kind of preparation method of 3D solids micro-nano structure |
| CN111633882A (en) * | 2020-06-04 | 2020-09-08 | 清华大学 | Method for constructing grid-shaped microstructure on surface of FEVE fluorocarbon resin |
| CN111792619A (en) * | 2020-07-17 | 2020-10-20 | 中国科学技术大学 | Method for continuously manufacturing micro-nano structures on glass surface in batch |
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