TWI321826B - Structure for improving interlevel conductor connections - Google Patents
Structure for improving interlevel conductor connections Download PDFInfo
- Publication number
- TWI321826B TWI321826B TW093110277A TW93110277A TWI321826B TW I321826 B TWI321826 B TW I321826B TW 093110277 A TW093110277 A TW 093110277A TW 93110277 A TW93110277 A TW 93110277A TW I321826 B TWI321826 B TW I321826B
- Authority
- TW
- Taiwan
- Prior art keywords
- layer
- decane
- degrees celsius
- integrated circuit
- adhesive layer
- Prior art date
Links
- 239000004020 conductor Substances 0.000 title description 2
- 239000010410 layer Substances 0.000 claims description 28
- 238000000034 method Methods 0.000 claims description 16
- 239000012790 adhesive layer Substances 0.000 claims description 12
- 238000000151 deposition Methods 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 4
- -1 decane compound Chemical class 0.000 claims description 2
- DIOQZVSQGTUSAI-UHFFFAOYSA-N n-butylhexane Natural products CCCCCCCCCC DIOQZVSQGTUSAI-UHFFFAOYSA-N 0.000 claims description 2
- POOSGDOYLQNASK-UHFFFAOYSA-N tetracosane Chemical compound CCCCCCCCCCCCCCCCCCCCCCCC POOSGDOYLQNASK-UHFFFAOYSA-N 0.000 claims description 2
- GTJOHISYCKPIMT-UHFFFAOYSA-N 2-methylundecane Chemical compound CCCCCCCCCC(C)C GTJOHISYCKPIMT-UHFFFAOYSA-N 0.000 claims 1
- 238000003723 Smelting Methods 0.000 claims 1
- 150000001875 compounds Chemical class 0.000 claims 1
- CBFCDTFDPHXCNY-UHFFFAOYSA-N icosane Chemical compound CCCCCCCCCCCCCCCCCCCC CBFCDTFDPHXCNY-UHFFFAOYSA-N 0.000 claims 1
- FIGVVZUWCLSUEI-UHFFFAOYSA-N tricosane Chemical compound CCCCCCCCCCCCCCCCCCCCCCC FIGVVZUWCLSUEI-UHFFFAOYSA-N 0.000 claims 1
- 239000010949 copper Substances 0.000 description 9
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 7
- 229910052802 copper Inorganic materials 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 4
- 230000008021 deposition Effects 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- JJWKPURADFRFRB-UHFFFAOYSA-N carbonyl sulfide Chemical compound O=C=S JJWKPURADFRFRB-UHFFFAOYSA-N 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000011229 interlayer Substances 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- IANXAXNUNBAWBA-UHFFFAOYSA-N 2,2,3-trimethylundecane Chemical compound CCCCCCCCC(C)C(C)(C)C IANXAXNUNBAWBA-UHFFFAOYSA-N 0.000 description 1
- 241000251468 Actinopterygii Species 0.000 description 1
- MXAYPKDGZIJLED-UHFFFAOYSA-N CC(C(CCCCCCCCCC)(C)C)(CCCCCCCC)C Chemical compound CC(C(CCCCCCCCCC)(C)C)(CCCCCCCC)C MXAYPKDGZIJLED-UHFFFAOYSA-N 0.000 description 1
- 229910018540 Si C Inorganic materials 0.000 description 1
- JEUJLYFOFHOMTM-UHFFFAOYSA-N [C].[Ru]=O Chemical compound [C].[Ru]=O JEUJLYFOFHOMTM-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 125000005626 carbonium group Chemical group 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 230000001934 delay Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- UBHZUDXTHNMNLD-UHFFFAOYSA-N dimethylsilane Chemical compound C[SiH2]C UBHZUDXTHNMNLD-UHFFFAOYSA-N 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- NFFIWVVINABMKP-UHFFFAOYSA-N methylidynetantalum Chemical compound [Ta]#C NFFIWVVINABMKP-UHFFFAOYSA-N 0.000 description 1
- UIUXUFNYAYAMOE-UHFFFAOYSA-N methylsilane Chemical compound [SiH3]C UIUXUFNYAYAMOE-UHFFFAOYSA-N 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000027756 respiratory electron transport chain Effects 0.000 description 1
- 229910001925 ruthenium oxide Inorganic materials 0.000 description 1
- WOCIAKWEIIZHES-UHFFFAOYSA-N ruthenium(iv) oxide Chemical compound O=[Ru]=O WOCIAKWEIIZHES-UHFFFAOYSA-N 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 229910003468 tantalcarbide Inorganic materials 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 238000005496 tempering Methods 0.000 description 1
- CZDYPVPMEAXLPK-UHFFFAOYSA-N tetramethylsilane Chemical compound C[Si](C)(C)C CZDYPVPMEAXLPK-UHFFFAOYSA-N 0.000 description 1
- PQDJYEQOELDLCP-UHFFFAOYSA-N trimethylsilane Chemical compound C[SiH](C)C PQDJYEQOELDLCP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02126—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
- H01L21/02299—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment
- H01L21/02312—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment treatment by exposure to a gas or vapour
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/314—Inorganic layers
- H01L21/316—Inorganic layers composed of oxides or glassy oxides or oxide based glass
- H01L21/31604—Deposition from a gas or vapour
- H01L21/31633—Deposition of carbon doped silicon oxide, e.g. SiOC
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76829—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/31051—Planarisation of the insulating layers
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Description
U21826
【發明所屬之技術領域】 本發明是有關於使用在半導體製造中的一種内連線 (interconnection)結構與製程方法,且特別是有關於一 種結構與方法,用以在積體電路的製造中改善金屬值 材料層不同複數層之間的連線(ε〇ηηβ(^1〇η5) (reliability)。 靠度 【先前技術】
為了改善次四分之一微米(sub-qUarter micron)半導 路上的邏輯(log ic)之元件速度,銅作為内連線材料是受 歡迎的。用銅作為内連線材料可充分利用銅的低電阻率^
(electrical resistivity)以及對電子遷移 (electromigration)優良的抵抗力。隨著元件的尺寸減 小’内連線系統的電阻電容(Resistance-Capacitance, RC)時間延遲(time delay)變成對積體電路之性能最重要 的限制因素之一。為了把信號傳輸延遲降至最低,不可避 免會使用低介電常數(dielectric constant)之材料,例 如層間以及詹内介電質(inter-layer and intra-layer dielectrics ’ ILDs)。當許多低介電常數(i〇w k)材料已 被用為ILDs時’具有高介電常數的氮化矽可能被作為在銅 的大馬士革(damascene)結構中所要求的蝕刻停止層 (etch-stop layer)。所以,令人合意的是以具有低介電 常數的複數新材料取代氮化矽,為了進一步降低複數有效 介電常數以進一步降低鋼(Cu)内連線系統的有效介電常
第5頁 1321826 五、發明說明(2) 數。一種持續的興趣是關於低應力(stress)與熱穩定 (thermally stable)、低介電常數且基於非晶的 (amorphous)碳化矽之薄膜,此薄膜係藉由使用有機矽氣 體(organosi 1 icon gases)之電漿加強式化學氣相沉積法 (Plasma-Enhanced Chemical Vapor Deposition > PECVD) 所沉積的。
目前’黏著層(glue layer)被用來在沉積蝕刻停止層期間 避免銅(Cu)被氧化。一種雛形的結構,以向上的次^^ 括:銅/黏著層/蝕刻停止層。在某些例子中,黏著層可^ 會阻礙產量(能Kthroughput),而且造成由於厚度變化= 製程不穩定性。依據本發明’被揭露的是一種結構與方 法’用以在積體電路的製造中改善金屬或傳導材料層不同 複數層之間的連線之可靠度。 【發明内容】 本發明是有關於一種改良的積體電路結構,此結構包括鄰 近的傳導性介電層,這些傳導性介電層具有一連續 (continuous)而平面的(planar)上表面。此積體電路結構 係藉由一製程方法而產生,此製程方法包含以一矽烷化合 物處理此表面’接著在此表面上沉積一蝕刻停止層,其; 並沒有施加一黏著層到此表面上。 【實施方式】 依據本發明’碳化矽(Si C)未被使用作為黏著層。代替的
1321826
五、發明說明(3) 是’在沉積碳氧化矽(SiOC)(主要的沉積製程)之前,銅鱼 低介電常數表面會經歷一特定的處理,例如處在例如攝/氏 400度之溫度的四甲基矽烷(4MS,tetramethylsilane) 〇 然後’沉積碳氧化矽層在此表面上。使用在本發明的處理 中的四曱基矽烷能夠被例如三甲基石夕娱; (trimethylsilane)、二甲基矽烷(dimethylsilane)或甲 基石夕垸(methylsilane)所替代。處理的溫度可以在從約攝 氏3 50度至450度的範圍中,而處理的時間可以從约5秒至 3 0秒。 ,在請參照第1圖,存在於先前技藝中的是碳氧化矽蝕刻 停止層1 0和11、碳化矽黏著層1 2、鋼或例如鋁(A1 )金屬電 極13以及金屬層間(intermetal)介電層14。蝕刻停止層1〇 的厚度可以是約550埃(Angstroms),而且黏著層12的厚度 可以是約20埃至50埃》跟此技藝的狀態有關的進一步細節 可以在第6383943號美國專利中找到,此第638394 專利在此时照的方式被包括在叫贿pQrated 3 reference)。 現在請參照第2圖,注意在本發明中黏著層〗2並不存在。 為了實施有存在以下的標準:在沉積蝕刻停止層之前藉 由例如在原位置之回火(in_situ anneaHng)而施加四甲钃 基矽烷或其他適合的材料,以形成無黏著層的蝕刻停止 層。以下的沉積條件存在:1〇〇〇至15〇〇 sccffl (“㈣心以 cubic centimeter per minute,每分鐘標準立方公分)的 流率(flow rate)、1. 7 χ 〇. 〇 (π毫米汞柱(T〇rr)的壓力、 1321826 五、發明說明(4) 經過5至30秒的時間以及攝氏350度至450度的溫度。 本發明提供一種結構和製程方法,與先前的結構比起來能 造成改善的產量與可靠度表現。在測試如第1圖和第2圖中 所繪示與以上所敘述的具代表性的結構中,藉由依據本發 明而去除黏著層’可達成產量改善,例如從每小時22至23 個直徑8吋的晶圓到每小時25至26個直徑8吋的晶圓,以及 達成與電子遷移表現有關的最大電流密度jmax(A/cm2)值改 善,在標準的互相比較的電子遷移連續製程測試操作中從 4. 74E + 05C有黏著層)到1. 30E + 06(無黏著層)以及從 1. 0 5E + 05C有黏著層)到1. 21E + 06C無黏著層)。 j 雖然本發明已以一較佳實施例揭露如上/然其並非用以限 定本發明,任何熟習此技藝者,在不脫離本發明之精神和 範圍内’當可作各種之更動與濶飾,因此本發明之保護範 圍當視後附之申請專利範圍所界定者為準。
1321826 圖式簡單說明 【圖式簡單說明】 在形成本說明的重要部分之附加圖示中: 第1圖係圖解地以截面的表示方式繪示先前技藝,而 第2圖係圖解地以截面的表示方式繪示本發明的一實施 例。 【元件代表符號簡單說明】 1 0、11 :蝕刻停止層 12 黏著層 13 銅或例如銘金屬電極 〇 14 金屬層間介電層
Claims (1)
1321826 _案號 93110277 贫年T月/心 修正_ 六、申請專利範圍 1. 一種製造一積體電路的方法,該積體電路包括鄰近的傳 導性介電層,該些傳導性介電層具有一連續而平面的上表 面,該積體電路係藉由一製程方法而產生,該製程方法至 少包含: 在該表面上沉積一姓刻停止層之前,先以一石夕烧化合物處 理該表面,其中該矽烷化合物係為四曱基矽烷、三曱基矽 烷、二甲基矽烷或曱基矽烷; 在該表面上沉積該#刻停止層;以及 其中並沒有施加一黏著層到該表面上。 2. 如申請專利範圍第1項所述之方法,其中處理的溫度係 從約攝氏3 5 0度至45 0度。 3 ·如申請專利範圍第2項所述之方法,其中處理的溫度係 約攝氏4 0 0度。 4.如申請專利範圍第1項所述之方法,其中處理的時間係 為從約5秒至3 0秒。
第10頁
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/441,511 US6753607B1 (en) | 2003-05-19 | 2003-05-19 | Structure for improving interlevel conductor connections |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200426989A TW200426989A (en) | 2004-12-01 |
TWI321826B true TWI321826B (en) | 2010-03-11 |
Family
ID=32469644
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW093110277A TWI321826B (en) | 2003-05-19 | 2004-04-13 | Structure for improving interlevel conductor connections |
Country Status (3)
Country | Link |
---|---|
US (1) | US6753607B1 (zh) |
CN (1) | CN1302535C (zh) |
TW (1) | TWI321826B (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7090516B2 (en) * | 2004-02-09 | 2006-08-15 | Adc Telecommunications, Inc. | Protective boot and universal cap |
US20060113675A1 (en) * | 2004-12-01 | 2006-06-01 | Chung-Liang Chang | Barrier material and process for Cu interconnect |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1049764C (zh) * | 1996-02-14 | 2000-02-23 | 台湾茂矽电子股份有限公司 | 集成电路中介电层的制造方法 |
US5773197A (en) * | 1996-10-28 | 1998-06-30 | International Business Machines Corporation | Integrated circuit device and process for its manufacture |
US6287990B1 (en) * | 1998-02-11 | 2001-09-11 | Applied Materials, Inc. | CVD plasma assisted low dielectric constant films |
US6288448B1 (en) * | 1999-05-14 | 2001-09-11 | Advanced Micro Devices, Inc. | Semiconductor interconnect barrier of boron silicon nitride and manufacturing method therefor |
US6465345B1 (en) * | 1999-05-28 | 2002-10-15 | Advanced Micro Devices, Inc. | Prevention of inter-channel current leakage in semiconductors |
US6316351B1 (en) * | 2000-05-31 | 2001-11-13 | Taiwan Semiconductor Manufacturing Company | Inter-metal dielectric film composition for dual damascene process |
US6383943B1 (en) * | 2000-10-16 | 2002-05-07 | Taiwan Semiconductor Manufacturing Company | Process for improving copper fill integrity |
US6498112B1 (en) * | 2001-07-13 | 2002-12-24 | Advanced Micro Devices, Inc. | Graded oxide caps on low dielectric constant (low K) chemical vapor deposition (CVD) films |
-
2003
- 2003-05-19 US US10/441,511 patent/US6753607B1/en not_active Expired - Fee Related
-
2004
- 2004-04-13 TW TW093110277A patent/TWI321826B/zh not_active IP Right Cessation
- 2004-05-10 CN CNB2004100378172A patent/CN1302535C/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
TW200426989A (en) | 2004-12-01 |
US6753607B1 (en) | 2004-06-22 |
CN1551330A (zh) | 2004-12-01 |
CN1302535C (zh) | 2007-02-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN1134049C (zh) | 增强无机介质与铜的粘附性的等离子体处理 | |
US6391777B1 (en) | Two-stage Cu anneal to improve Cu damascene process | |
US7763979B2 (en) | Organic insulating film, manufacturing method thereof, semiconductor device using such organic insulating film and manufacturing method thereof | |
US8035230B2 (en) | Semiconductor device and method for manufacturing same | |
US7193325B2 (en) | Reliability improvement of SiOC etch with trimethylsilane gas passivation in Cu damascene interconnects | |
JPH09246264A (ja) | 低誘電率非晶質フッ素化炭素皮膜およびその製法 | |
TW406313B (en) | Semiconductor device and manufacturing method of the same | |
JP4746829B2 (ja) | 半導体装置およびその製造方法 | |
US6958524B2 (en) | Insulating layer having graded densification | |
JP3173426B2 (ja) | シリカ絶縁膜の製造方法及び半導体装置の製造方法 | |
JP3244058B2 (ja) | 半導体装置の製造方法 | |
JP4638140B2 (ja) | 半導体素子の銅配線形成方法 | |
JP2002203899A (ja) | 銅相互接続構造の形成方法 | |
TWI234847B (en) | A dielectric diffusion barrier | |
JP3816091B1 (ja) | 半導体装置及びその製造方法 | |
TWI321826B (en) | Structure for improving interlevel conductor connections | |
JP2003142580A (ja) | 半導体装置の製造方法 | |
JP2005038999A (ja) | 半導体装置の製造方法 | |
JP2000174019A (ja) | 半導体装置及びその製造方法 | |
JP4747755B2 (ja) | 有機絶縁膜とその作製方法,及び有機絶縁膜を用いた半導体装置 | |
JP2009094123A (ja) | 半導体装置の製造方法 | |
JP2002118169A (ja) | 半導体装置およびその製造方法 | |
JP2007088495A (ja) | 有機絶縁膜及びその製造方法及び有機絶縁膜を用いた半導体装置及びその製造方法 | |
TW413895B (en) | Method for improving stability of copper processing | |
TW472353B (en) | Forming method of dual damascene |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |