TWI310724B - - Google Patents

Description

1310724 IX. Description of the Invention: TECHNICAL FIELD OF THE INVENTION The present invention relates to a transport cleavage for transporting, for example, a heated substrate in a vacuum environment. [Prior Art]

A handling device for carrying, for example, a heated substrate in a vacuum environment is disclosed in, for example, Japanese Laid-Open Patent Publication No. Hei. No. Hei. No. Hei. In the above-described conveying device, a pair of link arm mechanisms are provided on the rotary base, and each of the tip end portions of the link arm mechanism is provided with a handle for holding a plate-like workpiece such as a substrate horizontally. When the rotating base rotates on the Gugo base around the wrong straight axis, the _ continuous arm mechanism will also rotate. When the link arm mechanism swings, the plate-shaped workpiece held by the shank will be in the horizontal plane. Linear movement. As a result, the plate-like workpiece is transported to other locations from a predetermined position. Other inventions include, for example, the invention disclosed in Japanese Laid-Open Patent Publication No. 20 05-1 25479. At the rotating base of the conveying device, a guide is fixed when the link arm mechanism swings, and the handle body is moved to guide the handle body in a predetermined direction. When this configuration is used, it is possible to linearly move the handle of the plate-like workpiece in a more stable posture. There is a strict use of the condition of the plate-like workpiece that has been heated in the dust-free process. However, in the previous handling device, the plate-shaped workpiece was transported under the empty ring, or when it was moved, it could not be withstood. Environmental gas conditions or temperature concerns. For example, when a fixed base is provided under atmospheric pressure, the 2215-8312-PF 5 1310724 seat is placed in a space that is kept in a vacuum state, and when the gas 2 is in a true environment, when a plate-shaped workpiece is transported, Rotating base = There is a vacuum seal for maintaining airtightness. However, when the above-mentioned plate-shaped workpiece is heated to about 2 〇 产, for example, the vacuum seal 塾 receives heat from the plate-like workpiece, so that the direct airtightness is lowered. - The function of the reading pad will be reduced and there will be gas. When the link arm mechanism is subjected to heat of about 2 (10) t or so, there will be deformation. Therefore, it is difficult to ensure the accuracy of the conveyance. [Patent Document 1] Japanese Laid-Open Patent Publication No. Hei. No. Hei. No. Hei. No. 5-125479. A problem or a handling device that at least reduces the above problems. [Means for Solving the Problem] The transport device according to the present invention includes a fixed base, a rotating base that can be rotatably held relative to the fixed base, and can be held in a swingable manner with respect to the rotating base. The link arm mechanism and the handle supported by the link arm mechanism are moved along with the rotation base and the link arm mechanism: 'the handle is conveyed while the workpiece is held horizontally. a gas-tight gasket is disposed between the rotating base and the fixed base, and a refrigerant circulation line is disposed on the fixed base and the front material rotating base, and the refrigerant circulation line is partially- The system is disposed in the vicinity of the airtight 2215-8312-PF 6 1310724 ,, and the rotating base has a loop formed on the boundary of the fixed base. Space. The ring shape is set to be concentrically arranged in the space-like work room. The seated space has a description space 'attached to the fixed base or the rotating base has an annular groove from the upper part 3. Preferably, the ring is In the space, the air-tightness of the 禆 _ It It It It It It It It It It It It It It It It It It It It It It It It It It It It It It It It It It It It It It It It It It It It Preferably, the forward path for the outward path is the forward path and the return path, and the base is connected to the link arm to communicate with each other. The θ month is preferably a rotating base. The reducer of the cup # mechanism is provided with the passage for the return of the above-mentioned reducer. It is good to repeat the description of the link arm mechanism before the support, the front and the +, j field. Guided uranium, today, +, + 守 (1) month j stalk body to the established side v-track, just to say that the path and return route are connected with each other through the general guide. Pad vacuum seal. [Embodiment] Hereinafter, the details will be described with reference to the drawings. The preferred embodiment 2215-8312-pf 7 1310724 of the present invention will be described with reference to Figs. 1 to 3. Fig. 1 to Fig. 3 show the drawing of the embodiment of the present invention. For transporting, for example, a glass substrate for a liquid crystal panel (not shown), the transport device μ has a fixed base i and can be rotated relative to the fixed base 1 The held rotating base 2, the paired link f mechanism 3 that can be held in the horizontal plane with respect to the rotating base 2, and the handle body 4 that is held by each link arm mechanism 3^: the handle body 4, The object of the thin plate-shaped workpiece such as the glass substrate is horizontally held. The „and the transport device A1 ′ is located above the reference plane B (see FIG. 2 ), and is a cavity that is held in a vacuum state. The object that transports the workpiece in the space'· and the space below the reference plane B (see Fig. 2) is the object that is held at atmospheric pressure. As shown in Fig. 2, the body/two seats are provided with a substantially cylindrical casing ‘: −1°, the upper wall portion 11 is fixed along the base through the flange portion 11B. The entire casing 10 is disposed below the reference plane B. A central opening iu is formed in the upper wall portion u of the housing ίο. The mountain is provided with a lifting base 12 inside the casing 1G. The lifting base 12 has its upper end projecting upward through the center opening 11A. The entire structure of the lifting base 1 2 is movable up and down by, for example, the Fen & Β , 衮 螺 screw cup sliding mechanism 13 . Between the upper wall portion 11 and the lower end flange portion m of the lifting base 12, there is a vacuum tube 14 14 surrounding the entire lifting base 12, and the material descending base 12 moves up and down to expand and contract the object. ; 14, the moon 匕 play to maintain the internal space of the casing 10 (below the reference surface

2215-8312-PF 8 1310724 space) and the task of airtightness of the cavity space above the reference plane B. In the inside of the conveyance device, as shown by the flow of the refrigerant in the arrow of Fig. 2, the refrigerant circulating material m is provided. In the embodiment, for example, air is used as the medium. 〜 From the inside to the upper end portion of the hoisting base 12, there are provided a path for the passage 1G()a and a path for the return path ma which form a refrigerant circulation path. At the end of the trip - the lower end is connected to the air that will be sent out as the refrigerant air. At the lower end portion of the return path 200a, air is discharged to the internal space of the lift base 12. At the upper end of the lifting base 12, as shown in Fig. 3, the four-port Hi® m connected to the outward path l〇〇a is used for private use of each groove 110A and connected to the return path. The loop 200 of the passage 200a is configured in a concentric circle. The annular recesses U 〇 A, 21 〇 A are opened in the boundary between the fixed base 1 and the rotary base 2 to form an annular space. The v-transfer base 2' is configured to be integrated with the hollow shaft 21 in the housing 2 with the hole bottom 20A. The hollow shaft 2 is rotatably supported by an opening provided on the upper end portion of the elevating base 12 through the bearing 22a. In the inner peripheral wall of the lifting base 12, the bottom of the bottom wall 2〇a is provided with a vacuum seal 气 (airtight 塾) which is airtight to the space below the reference surface β and the space above the reference surface β. m. The true "cushion 23" is located beside the annular groove n 0A, 21 QA. Therefore, the genuine seal 23A #' is efficiently cooled by the air flowing in the annular grooves 11 GA, 21GA. The rotational driving force of the rotation of the motor M1 is transmitted to the lower end of the hollow through the belt and the belt 2215-8312-pf 9 1310724. Thereby, the rotary base 2 is attached to the liter base 12 The upper shaft is rotated about the vertical axis. Inside the middle shaft 21, there are provided shafts 24 and 25 for swinging the respective link arm mechanisms 3. The corresponding shafts of the side link arm mechanisms 3 are in the middle. The transmission shafts 2 4 It is rotatably rotatably supported by the inner peripheral wall of the hollow shaft 21 through the bearing 2 2 b. The inclined n is rotatably driven by the drive shaft 25 of the other link arm mechanism 3, and the shaft 22c is rotatably driven by the inner peripheral wall of the drive shaft The upper right side and the upper end of the moving shaft 24' 25 are connected to the rotating shaft 3A of the lever arm mechanism 3 via a belt and a pulley. The swinging motor μ, the output of the rotating driving force is transmitted through the mountain π and the skin τ wheel. It is transmitted to the drive shafts 24, 25 鸲. 卩. By this, each link arm mechanism 3 will swing. At the square turn base 2, it is provided with cold The medium circulation arm mechanism 3 is formed by the sea to the county. The county is connected to the hurricane to use the path 100b, 1〇〇2〇〇b, 200c. The use of the 1nnu Han 枉 passage channel 100b and the return trip With the port P' under the passage 200b, the bottom of the hole is penetrated by 2 〇a, and the entanglement is connected with the ring-shaped concave m21GA^ 舰 ship, Wei, and 'I〇A. In the inside of the casing 20, go The passage 2 for the service and return is transmitted through the joint 41. The shoulder = m position, _. The passage of each of the passages reaches the base end of the link boom mechanism 3. When the rotary base 2 rotates, the passage The lower end of i〇〇b, 2〇〇b follows the annular groove 210A and moves in a circular trajectory. Therefore, :=嶋, 拠 and annular concave= are connected. Comment and continue the cup arm mechanism 3, The body is connected with a plurality of arms f number #body 30 to 33

2215-8312-PF 10 !310724 pieces 'The main components and operations are the same as the previous ones, so a detailed description thereof will be omitted here. As shown in Fig. 2, the base end portion 3A of the arm body 30 is rotatably supported by an opening provided in the upper portion of the casing 2 of the rotary base 2 via a bearing 22d. A rotating shaft 3A is provided at the lower end of the base end portion 30A. A vacuum gasket 23B for maintaining airtightness is interposed between the inner peripheral wall of the base end portion 30A and the outer peripheral wall of the upper portion of the casing 20. The out-of-way annular groove ιι〇β connected to the outward path 100c at the upper portion of the casing 2 is concentric with the returning annular groove 21 〇B connected to the return path 2〇〇c

- The inside of the #body 30 is provided with a bypass passage l〇〇d and a return path 2〇〇d extending to the outer tip of the drawing. Each of the passages i〇〇d, 2(10), and the lower portion reaches the annular recesses #n〇B, 21〇B and communicates with the annular grooves 11 0B, 21 0B.曰 In the tip end portion of the arm body 30, the outward path 1〇〇d is connected to the return path and d is connected to each other (not shown). When the arm body 3 is centered on the rotating shaft 3 and (four), the respective paths are viewed, and the lower end portion is moved in a circular path following the groove 21 〇Β. Therefore, l〇〇d, 200d and the annular groove u are relatively red-turned and continue, and the shape is ~, and the air is circulated as a refrigerant. Therefore, when the passage to the inside of the arm body 30 is used, the passage of the 2_ passage l〇〇d, 2〇〇d, is made by the machine. The entire body of the H' body 30 is efficiently cooled by the passage path 100. For example, the through-passage or the metal pipe is formed through the through-member, a~l〇〇d and the return path 2〇〇a~2〇〇d, It is formed by a through-passage or metal f, and the 34-series is connected in a sure manner to avoid loss of airtightness.

2215-8312-PF 1310724 In the handling device A1, when the workpiece heated to a temperature of, for example, about 200 C is repeatedly conveyed in a vacuum environment, the heat report of the workpiece is easily transmitted to the rotary base 2 or the link arm mechanism. 3. The vacuum gaskets 23A, 23B provided on the rotating base 2 or the rotating portion of the link arm mechanism 3 (the housing 2 has a hole bottom 2A or the arm body 3 base end 30A) can be kept airtight. Sex to a certain temperature, but when it exceeds the established durability temperature, there is a reduction in airtightness. Further, since the arm body 30 and the like are made of a metal such as stainless steel, the higher the temperature, the larger the dimensional error due to thermal expansion.

Here, in the first embodiment, annular recesses 110A, 110B, 210A, 210B constituting a refrigerant circulation passage are provided in the vicinity of the vacuum seals 23A, 23B. By flowing the air in these annular grooves U0A'110B, 210A, 210B, the heat dissipation effect can be improved, so that the vacuum gaskets 23, 23, do not exceed the durability temperature. In the inside of the arm body 30 or the like, a material 1GQd, 2QQd which constitutes a refrigerant circulation path from the base end portion to the tip end portion is provided, and the air flowing through the passage l〇〇d, 2_ and serving as a refrigerant can The heat dissipation effect is improved, so that, for example, the arm body 30 does not overheat to cause an excessive dimensional error due to thermal expansion, and does not cause an obstacle to the movement of the arm body 3. Therefore, when the transport apparatus A1 of the i-th embodiment is used, even in a severe use environment in which a heated member is transported under a vacuum environment, μ does not impair the airtightness due to the vacuum seal 23Α, 23Β. The ground handler arm (10), etc., is cooled by the passage of the passage that constitutes the cold loop material, and the heat is efficiently dissipated in the south without excessive heat expansion. Therefore, the arm or the like can correctly move the handle through the link arm mechanism 3, and (10) the second fine 2215-8312-PF 12 1310724 degrees and smoothly convey the workpiece. Fig. 4 to Fig. 6 show a conveying device according to a second embodiment of the present invention. The components that are the same as or similar to the above-described first embodiment are denoted by the same reference numerals and the description thereof will not be repeated. As shown in Fig. 4, the conveying device A2 of the second embodiment includes a fixed base, a rotary base 2, a pair of link arm mechanisms 3, and a pair of handle bodies 4. Further, the 'transport device A2' has two sets of guides 5 for guiding a pair of handles to move in a predetermined horizontal straight direction. These fixed bases f1, the rotary base 2, and the link arm mechanism 3 The configuration of the above-described first embodiment is the same as that of the above-described embodiment, and the configuration of the handle 4 and the guide rail 5 is different from that of the above-described embodiment. The guide = as shown in Fig. 5, is rotated through the support frame The center of the base is 20B. The guides 5 are connected to the plurality of rails 5A. Moreover, the D-links the rails 5. In the figure of the brother 6, the system is omitted.典, „ ', π block 40 is inside the 2 guides 5 buildings. The upper handle body 4 is such that the lower handle body 4 is adapted to be erected by the outer two guide rails 5. ' 息 逍, π block 40 5 The left object arm mechanism 3 arm body W in the figure [At the lower handle body 4, there is, = freely connected to the upper handle body... The other side: even: the side of the outer rail is connected to the right side of the arm mechanism 3 arm) the tip end shovel "in the fifth picture ♦ one side, "the ground is connected to the extension". Field, arm mechanism 3 When swinging, the upper side handle body 4 H ϋ g and the side is slid by the inner two rails 5 & shank 4 and its interlocking rail 5 - the side slides horizontally.

2215-8312-PF 13 1310724 When the two-arm mechanism 3 is swung, the lower-handle body 4 does not interfere with the upper-handle body and is horizontally slid while being supported by the outer two guide rails 5. At this time, the material body, 4 and The extension portion of the link f mechanism 3 is not slid by the support frame 5. Therefore, the load placed on the handle body & is carried. The workpiece on the thick 4 is in a stable posture at the guide rail 5' As shown in Fig. 6, the group is provided with a ring-shaped pipe: a refrigerant circulation passage is formed in the entire circumference of the wide-circle guide rail 5. It is connected to the lower part of the ring of the Thai, and is connected downwards. The loop 1UUe of the path for the forward path is connected to the path of the return path of each % official 500 at the rear end side 2 (10) of the guide rail 5 at the other end portion of the guide rail 5: at the front end side of the guide 5 Connected to the lower part in the lower: = is not connected to the joint 44 in the rear end of the guide 5 "interferingly with the extension 4". . Each joint 430, 44. It is not connected to the extended 邛4A to extend to 1(10)UOGf. The path of the passage 2 is close to the center of the rotary base 2, and the end of the T-end is as shown in Fig. 5, and the joint of the system is 41〇42〇^, which is connected to the annular tube 5 around the inner rail 5 of the working base 2. / Sense, through the configuration of each guide muscle g ί) ϋΟ and communicate with each other. In combination: in the transport device Α 2, when the guide rail 5 is subjected to the teaching from the workpiece, = thermal expansion and deformation. In the second embodiment, a loop tube 5〇〇 constituting the refrigerant helium loop passage is provided around the guide, and the loop is passed through the loop.

2215-8312-PF 14 1310724 The air (refrigerant) of the tube 500 can improve the heat dissipation effect near the guide 5. Therefore, the guide 5 does not overheat to the extent of deformation due to thermal expansion. Further, a refrigerant circulation passage similar to that of the above-described first embodiment is provided beside the vacuum seals 23A, 23B or inside the arm body 3. Therefore, the heat dissipation effects of these vacuum seals 23, 23, and the vicinity of the arm body 30 are also improved. Therefore, when the conveying device 2 of the second embodiment is used, it is possible to prevent the guide rail of the support handle 4 from being deformed by thermal expansion in addition to the above-described first embodiment. Therefore, the workpiece can be transported in a stable posture through the guide rail 5 even in the case where the workpiece to be heated is transported in a vacuum environment. 7 and 8 show a conveying device according to a third embodiment of the present invention, and the transportation device of the present invention is configured similarly to the above-described third embodiment, and therefore The same or similar components are denoted by the same reference numerals and the description thereof will be omitted.

As shown in Fig. 7, the transport apparatus according to the third embodiment has a fourth (four) speed reducer 60 for transmitting a driving force to a link arm mechanism (not shown) on the spin base 2, and the third embodiment is implemented. The shape of the object is very different. Further, the details are also different from the articles of the first embodiment. Inside the lifting base 12, a driving path 15a and a return path 2a are formed in the driving unit 15' of the driving unit 15' such as the drive unit 15' of the hollow vehicle 21 or the transmission shaft 4, 25 . The drive unit Η ^ 1 5A is coupled to the perforated bottom portion 20A or the hollow shaft 2 of the rotary base 2. ^ The upper cover 15A' is rotated integrally with the rotary base 2. Therefore, (1) the inner peripheral wall of the upper opening of the lowering base 12 and the outer peripheral wall of the perforated bottom 2〇a are raised 2215-8312-pf 15 1310724, and a vacuum gasket 23A for maintaining airtightness is provided, and at the same time, on the outer peripheral wall of the upper cover 15a A vacuum gasket 23A is also provided. The vacuum gasket 23A on the upper side of the perforated bottom portion 20A is brought into contact, and is provided in a double structure in order to improve airtightness. In contact with the lower side vacuum seal pad 23A' of the upper cover 15A and the upper vacuum seal pad 23A, a return space annular space 21A is connected to the outward path 200a. At the lower side than the lower side vacuum gasket 23A', between the inner peripheral wall of the upper portion of the lifting base 12 and the outer peripheral wall of the upper cover 15A, a passage for connecting to the outward path is formed. 110A'. These out-of-way annular spaces u〇A, and the return-type %-shaped space 21 0 A' are separated from each other by the vacuum gasket 23 A to form a space, so that the air as a refrigerant circulates without leaking. The annular space blue, 21G A, is adjacent to the vacuum seals 23A, 23A'. Therefore, the vacuum seals 23a, 23a are efficiently circulated by the air flowing through the two compartments 110A, 210 A'. Further, the drive unit 15 is provided with bearings 22a to 22c for rotatably arranging the hollow shaft 21 and the like, and these (4) are also distributed through the outward path IGGa and the return path 2QGa. The annular space uqa, the air of the river A is efficiently cooled. At the upper end of the drive shafts 24, 25, the main vehicle of the reducer 6 is connected to the belt through the belts 24A, 25A and the pulleys 24B, 25B. The reducer 6〇 is composed of a planetary gear mechanism. As shown in the δth diagram, the speed reducer 6〇 includes a main shaft 6〇Α, a gear having an outer flange _ (not shown), a carrier between the main shaft 60Α and the internal gear, and a bearing 6〇c. And supported by the carrier 60E through the carrier 6〇D and snapped to the spindle 6〇88 sun sauce

2215-8312-PF 16 1310724 Not shown) and multiple planetary gears (not shown) of the internal gear. The appropriate part of the outward method 60B is provided with a 9 nn & π 逍 100c and a return path 0c. A suitable portion of the carrier _ is provided with a path for passage 100c. This type of reducer 60, such as the 7k

As shown in the figure, the perforated upper flange portions 20C, 20D are fixed to the rotary base 2 through the outer flange 60B. The cut piece 6〇D is connected to the base end portion 30A of the arm body (the entire figure is omitted). When the main shaft 6〇a rotates, the planetary gear rotates around the sun gear while rotating, and the carrier θ is rotated around the main shaft 60A. Thereby, the arm body (four) 30A will rotate, and the arm body will smoothly swing. Therefore, the spin base 2 has the hole upper cover portion 2〇c, and the inner peripheral wall of the 2〇D and the outer peripheral wall of the arm body end portion are also provided with the airtight seals 23β, 23β'. The upper vacuum (four) 塾 23B is set to a double structure in order to improve airtightness. The lower vacuum seal 塾 23β is formed on the upper surface of the contact _60D, and is formed in the gap ’ between the vacuum seal 塾 23B' and the upper vacuum seal ’ to be connected to the return path 2 〇〇. , 2_ wide ^ space recommended.纟 下 下 下 下 下 下 下 下 下 下 下 下 下 下 下 下 下 下 下 下 下 下 下 下 下 下 下 下 下 下 下 下 下 下 下 下 下 下 下 下 下 下 下 下 下 下 下 下 下 下 下 下Annular space 110B,. These departures use the annular space u〇B, and. The annular space 210B'' is passed through the vacuum gasket 23β' to form a space therebetween, so that the air as the refrigerant circulates without leaking. = ring: space: 〇B', discussion, 'attach the vacuum seal 塾 23B'23B, so the vacuum seals 23B, 23B' are efficiently and efficiently measured by the air, the air, the air At = 2215-8312-PF 17 1310724, by circulating in the path of the material, back to the % space, 11 〇 β, 2 ^ one with the passage 200c in the work of the gas * South efficiency # six, , the shaft of the salt speed machine (9), the coffee, the coffee, etc. are also efficiently cooled by the seven parts. A is the space of the refrigerant (7). Therefore, when the effect of the first embodiment described above is used, the effect of the first embodiment is the same, and the image of 60 is reduced to the most acne. The workpiece, the limit, and the like, can be heated more smoothly. Of course, the scope of the present invention is not limited to the above-described body. For example, the refrigerant may be an inert gas such as helium, or a liquid refrigerant circulation path such as water, or a ring pipe or a passage may be interposed to the lower surface of the shank. The dry, =-shaped groove can be maintained as long as it is rotated relative to the passage. For example, an annular groove can be provided at the bottom of the rotating base to provide a passage inside the lifting base, and the passage is made. It is in communication with the aforementioned annular groove. The %-shaped space is between the relatively rotating member and the member, and the object to be removed and the object for the return can be made to be independent of each other. The speed reducer may be provided in a conveying device having a guide rail, or an annular space may be provided beside the speed reducer as in the second embodiment. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is an overall perspective view of a conveying device according to a first embodiment of the present invention.

2215-8312-PP 18 1310724 Figure. Fig. 2 is a cross-sectional view showing an important part of the conveying device shown in Fig. 1. Fig. 3 is a perspective exploded view of an important part of the conveying device shown in Fig. 1. Figure 4 is the overall structure of the g 2 #施式_装置 of the present invention. Figure 4 is a diagram of the non-transportation of the skirt. One-to-one _ Important section of the IW stand. Stereoscopic view of the 卩 position Figure 6 is the fourth figure of the present invention. Figure 7 is the third sound of the present invention. ...3 The vertical part of the transmission device is attached. Figure 8 is a perspective view of the gear unit with the conveying device shown in Figure 7. [Main component symbol description] A1, A2, A3 handling device

1 fixed base 2 rotating base 23A, 23, 23B, 23B, 3 link arm mechanism 4 handle vacuum seal (airtight pad 5 guide rail 60 0 reducer 100a ~ 100f path for passage 110A, 110B to travel ring Shaped groove 11 0A', 11 OB' to travel with annular space

2215-8312-PF 19 1310724 20 0a~200f Return path 210A, 210B Round groove for return stroke 21 0A', 21 OB' Round space for return 50 0 Ring tube

2215-8312-PF 20

Claims (1)

1310 Le 43 3 666 Patent Application Scope Lin Xia 10, the scope of application for patents: 1. - Type of handling device, including: (4) base, rotating base that can be held relative to the aforementioned solid foundation, can The handle that is held in front of the swing (4) and (4), and the handle of the above-mentioned joint (four) mechanism = with the movement of the rotating base and the link f mechanism, the workpiece is held horizontally with the handle The utility model is characterized in that: a gas-tight crucible is provided between the rotating base and the fixed base, and the same way:: a fixed base and a rotating medium circulation tube are arranged on the rotating base; The portion of the road is disposed in the airtight 塾 固 固 固 固 固 环 环 环 环 环 环 环 环 环 环 环 环 环 环 环 环 环 环 环 环 环 环 环 环 环 环 环 环 环 环 环 环 环 环 环The space is arranged concentrically. • The handling device described in item ith of the scope of claim π, the ring space is similar to i, +. m ^ ', 〒 状 groove. '... Or the above-mentioned rotating base is provided with a ring as described in the first paragraph of the patent scope 1 Set, Α, 乂 逑 逑 空间 藉 藉 藉 田 田 田 田 田 田 ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' In the transfer device described in the first item of the patent range, the refrigerant circulation piping package, the out-of-way passage, and the %-shaped space passage are used. And a transfer device according to the fourth aspect of the invention, wherein the forward travel path and the return travel link arm mechanism are used in a transfer device that is connected to the return space for the return air space 22l5-83l2-ppi 21 1310724 And (4) the pedestal extends to the front 6. As described in the fourth paragraph of the patent application, the rotary base is provided with a heart-passing-type reduction gear, and the above-mentioned reduction gear is provided with the aforementioned == arm mechanism Use the passage and the return stroke. 7. If the above-mentioned rotating base is moved as described in item 4 of the patent application park, the solid transport device's armor is supported by the support arm body-side movement ^1 link arm mechanism In the case of a side rail, the foregoing outward travel:: the port guide: ^ is connected to each other. The return path is extended to the periphery of the guide rails. 8. The airtight gasket vacuum seal described in the scope of claim i. ,before 2215-8312-PF1 22