KR100797537B1 - Transfer Apparatus - Google Patents

Abstract

The conveying apparatus A1 includes a fixed base 1, a pivot base 2 rotatably supported with respect to the fixed base 1, and a link arm mechanism 3 pivotably supported with respect to the pivot base 2. ) And a hand 4 supported by the link arm mechanism 3, and are conveyed while supporting the work horizontally with the hand 4 in accordance with the operation of the turning base 2 and the link arm mechanism 3. . An airtight seal 23A is provided between the swing base 2 and the fixed base 1, and a refrigerant circulation path is provided at the fixed base 1 and the swing base 2, and a part of the refrigerant circulation path is provided. Is arranged in the vicinity of the airtight seal 23A, while the refrigerant circulation path includes annular spaces 110A and 210A formed at the boundary between the fixed base 1 and the swing base 2.

Conveyer, Refrigerant Circuit, Airtight Seal, Fixed Base, Swivel Base

Description

Transfer Apparatus}

1 is an overall perspective view of a conveying apparatus based on the first embodiment of the present invention.

FIG. 2 is a sectional view of principal parts of the conveying apparatus shown in FIG. 1. FIG.

3 is an exploded perspective view of main parts of the conveying apparatus shown in FIG. 1.

4 is an overall perspective view of a conveying apparatus according to a second embodiment of the present invention.

FIG. 5 is a sectional view of principal parts of the conveying apparatus shown in FIG. 4. FIG.

FIG. 6 is a perspective view of principal parts of the conveying apparatus shown in FIG. 4. FIG.

7 is a sectional view of principal parts of a conveying apparatus according to a third embodiment of the present invention.

8 is a perspective view of a speed reducer provided in the conveying apparatus shown in FIG. 7.

<Description of the code>

A1, A2, A3 Carrier

1 fixed base

2 turning base

23A, 23 ', 23B, 23B' Vacuum Seal (Seal Seal)

3 link arm mechanism

4 hand

5 guide rail

60 reducer

100a to 100f passage

110A, 110B Fantasy Home

110A ', 110B' Royal Dragon's Fantasy Space

200a to 200f return path

210A, 210B Return Home

210A ', 210B' return space for return

500 annular pipe

TECHNICAL FIELD This invention relates to the conveying apparatus for conveying a heated board | substrate, for example in a vacuum atmosphere.

As a conveying apparatus for conveying a heated board | substrate in a vacuum atmosphere, there exist some which were disclosed by Unexamined-Japanese-Patent No. 2005-186259, for example. In this conveying apparatus, a pair of link arm mechanisms are provided on the swing base, and a hand capable of horizontally supporting a plate-like work such as a substrate is provided at each distal end of these link arm mechanisms. When the pivot base pivots around the vertical axis on the stationary base, the pair of link arm mechanisms swing accordingly, and when the link arm mechanism swings, the plate-like workpiece supported by the hand moves linearly in the horizontal plane. Thereby, a plate-shaped workpiece is conveyed from a predetermined position to another position.

As another conveying apparatus, there exist some which were disclosed by Unexamined-Japanese-Patent No. 2005-125479, for example. A guide rail for guiding movement in a predetermined direction is fixed to the pivot base of the conveying device while supporting the hand when the link arm mechanism swings. According to the said structure, the hand which supported the plate-shaped workpiece can be linearly moved to a more stable posture.

However, in the conventional conveying apparatus, when conveying a plate-shaped workpiece | work in the vacuum atmosphere in a clean process, or conveying a heated board | substrate workpiece | work, there exists a possibility that it cannot endure a severe use environment in terms of an atmospheric condition and a heating condition.

For example, when the swing base is placed in a space kept in a vacuum state in a state where a fixed base is installed in an atmospheric pressure atmosphere, and the plate-shaped workpiece is conveyed in a vacuum atmosphere as an atmospheric condition, it is necessary to maintain airtightness at the periphery of the swing base. A vacuum seal is installed. However, when the plate-shaped workpiece is heated to, for example, about 200 ° C., since the vacuum seal receives heat from the plate-shaped workpiece, there is a possibility that the function of the vacuum seal is lowered and the airtightness is impaired.

In addition, when the link arm mechanism is subjected to the heat of about 200 ° C. as described above, there is a risk of deformation, which also makes it difficult to secure the conveying accuracy.

Patent Document 1 : Japanese Patent Application Laid-Open No. 2005-186259

Patent Document 2 : Japanese Patent Application Laid-Open No. 2005-125479

An object of the present invention is to provide a conveying apparatus that can solve or at least reduce the above-mentioned problems.

The conveying apparatus provided by the present invention includes a stationary base, a pivot base pivotably supported with respect to the stationary base, a link arm mechanism pivotably supported with respect to the pivot base, and a hand supported by the link arm mechanism. And a conveying apparatus for conveying while supporting the plate-shaped workpiece horizontally with the hand in accordance with the operation of the pivot base and the link arm mechanism, wherein an airtight seal is provided between the pivot base and the fixed base. At the same time, a refrigerant circulation path is provided in the fixed base and the swing base, and a part of the refrigerant circulation path is disposed near the hermetic seal, while the refrigerant circulation path is located at the boundary between the fixed base and the pivot base. It is characterized by including the formed annular space.

Preferably, as said annular space, the annular space for a road and the annular space for a return are provided in concentric form.

Preferably, the annular space is formed by an annular groove provided in the fixed base or the pivot base.

Preferably, the annular space is provided so that the annular space for the return path and the annular space for the return path form a space separated from each other via an airtight seal.

Preferably, the coolant circulation passage includes a passage for communicating with the annular space for the return path and a passage for communicating with the return space for communicating with the return space.

Preferably, the paths for the return path and the return path extend from the pivot base to the link arm mechanism and communicate with each other.

Preferably, the revolving base is provided with a speed reducer for transmitting a driving force to the link arm mechanism, and passages for the return path and the return path are provided in the periphery of the speed reducer.

Preferably, the pivot base is fixed with a guide rail for guiding movement in a predetermined direction while supporting the hand when the link arm mechanism swings. It extends to the circumference and communicates with each other.

Preferably, the hermetic seal is a vacuum seal.

Implement the invention  for Best  shape

Hereinafter, with reference to the accompanying drawings, preferred embodiments of the present invention will be specifically described.

First, a description will be given with reference to FIGS. 1 to 3. 1-3 is a figure which shows the conveying apparatus based on 1st Embodiment of this invention.

The said conveying apparatus A1 is for conveying thin-shaped workpiece | work (not shown), such as a glass substrate for liquid crystal panels, for example. As shown in FIG. 1, the conveying apparatus A1 includes a fixed base 1, a pivot base 2 rotatably supported about a vertical axis with respect to the fixed base 1, and a horizontal plane in the horizontal plane with respect to the pivot base 2. A pair of link arm mechanisms 3 which are supported to be able to swing at a position and a hand 4 supported by each link arm mechanism 3 are provided. The hand 4 horizontally supports thin-shaped workpieces, such as the said glass substrate.

In addition, the conveying apparatus A1 conveys a workpiece | work in spaces, such as a chamber hold | maintained in the vacuum state upward from the reference surface B (refer FIG. 2), and keeps the space below from the reference surface B at atmospheric pressure.

As shown in Fig. 2, the fixed base 1 includes a substantially cylindrical housing 10. The housing 10 is fixed so that the upper wall part 11 may conform to the reference plane B via the flange part 11B. A center opening 11A is formed in the upper wall portion 11 of the housing 10.

An elevating base 12 is provided inside the housing 10. The lifting base 12 has its upper end projecting upward through the center opening 11A. The whole lifting base 12 is comprised so that it may move to an up-down direction, for example with the ball screw slide mechanism 13.

A bellows 14 is provided between the upper wall portion 11 of the housing 10 and the lower flange portion 12A of the elevating base 12 to surround the entire elevating base 12. The bellows 14 expands and contracts with the vertical movement of the lifting base 12. The bellows 14 plays a role of maintaining the airtightness between the inner space of the housing 10 (space below the reference plane B) and the chamber space above the reference plane B.

Inside the conveying apparatus A1, a coolant circulation path is provided as indicated by the arrow in FIG. 2 to indicate the flow direction of the coolant. In this embodiment, for example, air is used as the refrigerant.

From the inside of the elevating base 12, the passage 100a for return paths and the return passage 200a which form a refrigerant circulation path are provided. An air pump 300 for sending air as a refrigerant is connected to the lower end portion of the passage 100a for the forward passage. The lower end of the return passage 200a is provided to discharge air into the inner space of the lifting base 12.

As shown in FIG. 3, the upper end of the elevating base 12 has an annular groove 110A for the return path continuous with the path 100a for the return path and an annular groove for the return path that is continuous with the path 200a for the return path. 210A is formed in a concentric shape. The annular grooves 110A and 210A form an annular space at the boundary between the fixed base 1 and the swing base 2.

The revolving base 2 has a structure in which the hollow shaft 21 is integrated with the hole 20A of the housing 20. The hollow shaft 21 is rotatably supported by the opening 22a at the upper end of the lifting base 12 via the bearing 22a.

In the opening of the elevating base 12, a vacuum is provided between the inner circumferential wall and the outer circumferential wall of the hole bottom portion 20A to shield the space below and the chamber space above from the reference plane B to maintain airtightness. A seal (sealed seal) 23A is provided. The vacuum seal 23A is located near the annular grooves 110A and 210A. Therefore, the vacuum seal 23A is efficiently cooled by the air flowing through the annular grooves 110A and 210A.

At the lower end of the hollow shaft 21, the rotational driving force from the turning motor M1 is transmitted through the prebelt and the pregear. As a result, the swing base 2 swings around the vertical axis on the lift base 12.

Inside the hollow shaft 21, rotary shafts 24 and 25 for swinging each link arm mechanism 3 are provided. The transmission shaft 24 corresponding to one link arm mechanism 3 has shown the hollow form. The transmission shaft 24 is rotatably supported on the inner circumferential wall of the hollow shaft 21 via the bearing 22b. The transmission shaft 25 corresponding to the other link arm mechanism 3 is rotatably supported on the inner circumferential wall of the transmission shaft 24 via the bearing 22c.

The rotary shaft 3A of each link arm mechanism 3 is connected to the upper end of each transmission shaft 24, 25 via a prebelt and a free gear. Rotational driving forces from the swing motors M2 and M3 are transmitted to the lower ends of the transmission shafts 24 and 25 via the prebelt and the free gear. As a result, each of the link reading mechanisms 3 swings.

The revolving base 2 is provided with paths 100b and 100c for return paths and paths 200b and 200c for return paths so as to extend and form a refrigerant circulation path to each link arm mechanism 3. The lower ends of the passages 100b and 200b for the return path and the return path penetrate through the hole bottom portion 20A to reach the annular grooves 110A and 210A and communicate with the annular grooves 110A and 210A. . In the housing 20, the passages 100c and 200c for the return path and the return path are connected to the passages 100b and 200b via the joints 410 and 420, respectively. Upper ends of the passages 100c and 200c extend to the proximal end of the link arm mechanism 3.

When the turning base 2 turns, the lower ends of the passages 100b and 200b move to draw a circle while following the annular grooves 110A and 210A. For this reason, the passages 100b and 200b and the annular grooves 110A and 210A are relatively in communication with each other.

The link arm mechanism 3 is configured by connecting a plurality of arms 30 to 33. Since the main structure and operation thereof are the same as those in the related art, detailed description thereof will be omitted. As shown in FIG. 2, the base end portion 30A of the arm 30 is rotatably supported by an opening provided in the upper portion of the housing 20 of the turning base 2 via the bearing 22d. 3 A of rotation shafts are provided in the lower end of the base end part 30A.

A vacuum seal 23b for maintaining airtightness is provided between the inner circumferential wall of the base end portion 30A and the outer circumferential wall in the upper portion of the housing 20. The upper part of the housing 20 is formed in a concentric circle with an annular groove 110B for communicating with the path 100c for the return path and an annular groove 210B for communicating with the path 200c for the return path. Inside the arm 30, a passage 100d for a return path and a passage 200d for a return path are provided to extend to a tip outside the drawing. Lower ends of the passages 100d and 200d reach the annular grooves 110B and 210B and are provided to communicate with these annular grooves 110B and 210B.

At the distal end of the arm 30, passages 100d and 200d for the return path and the return path are connected to each other (not shown). When the arm 30 rotates about the rotation axis 3A, the lower ends of the passages 100d and 200d move along the annular grooves 110B and 210B to draw a circle. For this reason, the passages 100d and 200d and the annular grooves 110B and 210B circulate relatively, while circulating air as the refrigerant in a state of always communicating. Therefore, according to the passages 100d and 200d extending to the inside of the arm 30, the entire arm 30 is efficiently cooled by the air flowing through them.

The passages 100a-100d and 200a-200d for the return path and the return path are made of, for example, a through passage and a metal tube formed through the member, and the through passage and the metal tube are reliably connected so as not to impair airtightness. have.

In the conveying apparatus A1, when the workpiece heated to 200 degreeC back and forth is repeatedly conveyed in a vacuum atmosphere, the turning base 2 and the link arm mechanism 3 receive the heat from a workpiece easily. The vacuum seals 23A and 23B provided on the rotating base 2 and the rotating part of the link arm mechanism 3 (20A of the hole 20 of the housing 20 and 30A of the base end of the arm 30) have a certain degree. The airtightness is maintained up to the temperature, but there is a risk of impairing the airtightness if it exceeds a predetermined content temperature. In addition, since the arm 30 is made of metal such as stainless steel, there is a possibility that a large error occurs in the dimension due to thermal expansion as the temperature becomes higher.

Therefore, in the first embodiment, annular grooves 110A, 110B, 210A and 210B constituting the refrigerant circulation path are provided in the vicinity of the vacuum seals 23A and 23B. The heat radiation effect can be enhanced by air (refrigerant) flowing through these annular grooves 110A, 110B, 210A, and 210B, and the vacuum seals 23A and 23B do not become overheated until they exceed the inner temperature.

Inside the arm 30 and the like, passages 100d and 200d constituting the refrigerant circulation path are provided from the proximal end to the distal end. The heat dissipation effect can be enhanced according to the air flowing through the passages 100d and 200d as the refrigerant, and the arm 30 is not overheated until a large numerical error due to thermal expansion occurs, for example, and the operation of the arm 30 is performed. It does not interfere with.

Therefore, according to the conveying apparatus A1 of 1st Embodiment, even in the severe use environment which conveys the workpiece heated in the vacuum atmosphere, a workpiece can be conveyed without damaging the airtightness by vacuum seal 23A, 23B. The arm 30 and the like are efficiently radiated by the passages 100d and 200d constituting the refrigerant circulation path, and do not excessively expand. Therefore, the arm 30 can move the hand 4 correctly via the link arm mechanism 3, and can convey a workpiece with high precision and smoothly.

4 to 6 show a conveying apparatus based on the second embodiment of the present invention. In addition, the same code | symbol is attached | subjected about the component same or similar to 1st Embodiment mentioned above, and the description is abbreviate | omitted.

As shown in FIG. 4, the conveying apparatus A2 of 2nd Embodiment is provided with the fixed base 1, the turning base 2, the pair of link arm mechanisms 3, and the pair of hands 4. As shown in FIG. . In addition, the conveying apparatus A2 is provided with two sets of guide rails 5 for guiding the pair of hands 4 to move along a predetermined horizontal straight direction. These fixed base 1, the turning base 2, and the link arm mechanism 3 have the same structure as the 1st embodiment mentioned above, and the structure of the hand 4 and the guide rail 5 mentioned above is 1st. It differs from that by the embodiment.

As shown in FIG. 5, the guide rail 5 is supported by the support frame 50 at the center upper opening part 20B of the turning base 2. As shown in FIG. Each guide rail 5 is comprised by engaging 5 A of some rail as shown in FIG. 6, the pair of guide rails 5 is omitted.

The lower hand 4 is supported by two inner guide rails 5 via a slide block 40. The upper hand 4 bypasses the side of the lower hand 4 and is supported by the outer two guide rails 5 via the slide block 40. The tip of the arm 31 (one on the left in FIG. 5) of one link arm mechanism 3 is rotatably connected to the upper hand 4. The lower hand 4 is provided with an extension portion 4A that extends outward through the lower side of the outer guide rail 5. The tip portion of the arm 31 (the one on the right side in FIG. 5) of the other link arm mechanism 3 is rotatably connected to the extension portion 4A.

When one link arm mechanism 3 swings, the upper arm 4 slides horizontally while being interlocked with the upper hand 4 being supported by the two inner guide rails 5. When the other link arm mechanism 3 swings, the lower hand 4 is horizontally supported while being supported by the two outer guide rails 5 without interfering with the upper hand 4. At that time, the extension part 4A connecting the lower hand 4 and the link arm mechanism 3 slides without being obstructed by the support frame 50. As a result, the work loaded on the hand 4 is conveyed in a stable posture.

As shown in FIG. 6, each guide rail 5 is provided with an annular pipe 500 so as to surround the entire circumference in an annular manner to form a refrigerant circulation path. A part of the annular pipe 500 which becomes the front end side of the guide rail 5 is connected with a passage 100e for a path made of a metal pipe so as to extend downward. The other part of the annular pipe 500 which becomes the rear end side of the guide rail 5 is connected with the return passage 200e which has the same structure.

The passage 100e for the route connected to each annular pipe 500 is connected to the joint 430 below the front end side of the guide rail 5 so as not to interfere with the extension 4A. The return passage 200e is connected to the joint 440 below the rear end side of the guide rail 5 so as not to interfere with the extension portion 4A. Each joint 430, 440 is connected to the passages 100f and 200f extending to the vicinity of the center of each guide rail 5 so as not to interfere with the extension 4A. As shown in FIG. 5, the lower ends of the passages 100f and 200f are connected to the joints 410 and 420 in the inside of the turning base 2 through the center upper opening 20B of the turning base 2. have. That is, the paths 100e, 100f, 200e, and 200f for reciprocating paths and return paths constituting the refrigerant circulation path communicate with each other via the annular pipes 500 disposed around the guide rails 5.

In the conveying apparatus A2, when the guide rail 5 receives heat from a workpiece, there exists a possibility that it may deform | transform by thermal expansion. In the second embodiment, the annular pipe 500 constituting the refrigerant circulation path is provided around the guide rail 5, and the heat radiation effect near the guide rail 5 by the air (refrigerant) flowing through the annular pipe 500 is provided. Can increase. Therefore, the guide rail 5 is not overheated to the extent that it deforms by thermal expansion.

In the vicinity of the vacuum seals 23A and 23B or inside the arm 30, a coolant circulation path is provided in the same manner as in the first embodiment described above. Therefore, the heat dissipation effect can be enhanced also in the vicinity of these vacuum seals 23A and 23B and the arm 30.

Therefore, according to the conveying apparatus A2 of 2nd Embodiment, not only the effect by 1st Embodiment mentioned above can be acquired, but the deformation | transformation by the thermal expansion of the guide rail 5 which supports the hand 4 can be prevented. have. Therefore, the workpiece can be conveyed in a more stable posture via the guide rail 5 even in a harsh use environment such as conveying the heated workpiece in a vacuum atmosphere.

7 and 8 show a conveying apparatus based on the third embodiment of the present invention. In addition, since the conveying apparatus of this embodiment has the structure similar to 1st embodiment mentioned above, the same code | symbol is attached | subjected about the component similar or similar to 1st embodiment, and the description is abbreviate | omitted.

As shown in FIG. 7, the conveying apparatus A3 of 3rd Embodiment is equipped with the revolving base 2 with the speed reducer 60 for transmitting a driving force to a link arm mechanism (not shown), and it mentioned above in this regard. It differs greatly from that according to the first embodiment. Other details are also slightly different from those according to the first embodiment.

The drive unit 15 which knitted the hollow shaft 21 and the transmission shafts 24 and 25 is provided in the lifting base 12, and the passage 100a for a path | route etc. in the wall part of the said drive unit 15 etc. is provided. And a return passage 200a is formed. The top 15A of the drive unit 15 is coupled to the hole 20B of the swing base 2 or the hollow shaft 21, and the top 15A rotates integrally with the swing base 2. . Therefore, between the inner circumferential wall of the upper opening of the elevating base 12 and the outer circumferential wall of the hole bottom portion 20A, a vacuum seal 23A for maintaining airtightness is provided and between the outer circumferential wall of the upper opening 15A. A vacuum seal 23A is also provided.

The upper vacuum seal 23A in contact with the hole bottom portion 20A is provided in double to increase airtightness. Between the lower vacuum seal 23A 'which contacts the upper opening 15A, and the upper vacuum seal 23A, the return annular space 210A' continuous to the return passage 200a is formed. More downward than the lower vacuum seal 23A ', an annular ring for the path that is continuous to the passage 100a for the path is spaced between the inner circumferential wall of the upper opening of the elevating base 12 and the outer circumferential wall of the upper opening 15A. The space 110A 'is formed. The annular spaces 110A 'and 210A' for the return path and the return path form a space separated from each other via the vacuum seal 23A ', and are configured to circulate air as a refrigerant without leaking.

Since the annular spaces 110A 'and 210A' are adjacent to the vacuum seals 23A and 23A ', the vacuum seals 23A and 23A' are efficiently cooled by the air flowing through the annular spaces 110A 'and 210A'. . In addition, bearings 22a to 22c are provided inside the drive unit 15 to rotatably support the hollow shaft 21 and the like, and these bearings 22a to 22c are also used for a return path and a return path. It is efficiently cooled by the air flowing through the passages 100a and 200a or the annular spaces 110A 'and 210A'.

The main shaft 60A of the reduction gear 60 is connected to the upper end of the transmission shaft 24, 25 via the prebelt 24A, 25A and the free gear 24B, 25B. The reduction gear 60 consists of a planetary gear mechanism. As shown in FIG. 8, the reduction gear 60 has a main shaft 60A, an inner tooth having an outward flange 60B (not shown), and a bearing between the main shaft 60A and the inner tooth ( Supported by the bearing 60E to the carrier 60D and carrier 60D knitted through 60C), and meshed with the solar gear (not shown) and internal gear of the main shaft 60A. It is composed of having a plurality of planetary gears (not shown). Passing portions 100c and 200c for the return path and the return path are provided at the appropriate portion of the outward flange 60B. The passage 100c for the road is also provided in the appropriate | suited part of carrier 60D.

As shown in FIG. 7, such a speed reducer 60 is fixed to the hole openings 20C and 20D of the turning base 2 via the outward flange 60B. The carrier 60D is connected to the proximal end 30A of the arm (not shown in its entirety). When the main shaft 60A rotates, the planetary gear rotates around the solar gear while the carrier 60D rotates around the main shaft 60A. As a result, the base end portion 30A of the arm rotates, and the arm swings smoothly.

Therefore, vacuum seals 23B and 23B 'which maintain airtightness are also provided between the inner circumferential wall of the upper hole openings 20C and 20D of the turning base 2 and the outer circumferential wall of the base end portion 30A of the arm. . The upper vacuum seal 23B is provided in double in order to improve airtightness. The lower vacuum seal 23B 'is in contact with a part of the upper surface of the carrier 60D, and is connected to the return passages 200c and 200d between the vacuum seal 23B' and the upper vacuum seal 23B. An annular space 210B 'for returning home is formed. On the lower side than the lower vacuum seal 23B ', at the interval between the inner circumferential wall of the upper hole openings 20C and 20D of the turning base 2 and the outer circumferential wall of the reducer 60, a passage 100c for the path is provided. An annular space 110B 'for continuous paths is formed. The annular spaces 110B 'and 210B' for the return path and the return path form a space separated from each other via the vacuum seal 23B ', and are configured to circulate air as a refrigerant without leaking.

Since the annular spaces 110B 'and 210B' are also adjacent to the vacuum seals 23B and 23B ', the vacuum seals 23B and 23B' are efficiently cooled by the air flowing in the annular spaces 110B 'and 210B'. do. In addition, the reducer 60 is also cooled efficiently by air flowing in the passages 100c and 200c for the return and return paths and the annular spaces 110B 'and 210B', and is provided with a bearing installed inside the reducer 60 ( 60C, 60E) and the like are also efficiently cooled by air as a refrigerant.

Therefore, according to the conveying apparatus A3 of 3rd Embodiment, not only the effect by 1st Embodiment mentioned above can be acquired but also the influence of the heat to the reducer 60 is suppressed to the minimum, and the heated workpiece is made smoother. You can return it.

Of course, the scope of this invention is not limited to the above-mentioned embodiment.

For example, an inert gas such as helium may be used as the refrigerant, or a liquid such as water may be circulated.

The refrigerant circulation path may be formed from the link arm mechanism to the lower surface of the hand via the annular pipe or the passage.

The annular groove may be configured to always communicate while rotating relative to the passage. For example, an annular groove is installed at the bottom of the hole base of the swing base, and a passage is provided inside the lifting base to communicate with the annular groove. Also good.

The annular space may be provided between the member and the member which rotates relatively, so as to form a closed space independent of each other for the return path and the return path.

The reducer may be provided in the conveying apparatus provided with the guide rail, and the annular space may be provided in the vicinity of the reducer similarly to the second embodiment.

In the conveying apparatus which conveys a board | substrate etc. horizontally, this invention WHEREIN: Since a hermetic seal is provided between the turning base and the fixed base of a conveying apparatus, and a refrigerant circulation path is provided in the turning base and the fixed base, it is a vacuum atmosphere. Alternatively, the plate-shaped workpiece and the substrate workpiece can be safely transported even under high temperature conditions of about 200 ° C, and thus, they can be widely used for conveyance of various substrates and the like requiring conveyance accuracy.

Claims (9)

A fixed base 1, a pivot base 2 pivotably supported relative to the fixed base 1, a link arm mechanism 3 pivotably supported relative to the pivot base 2, and the link In the conveying apparatus provided with the hand 4 supported by the arm mechanism 3, and conveying, while supporting the workpiece horizontally with the hand 4 according to the operation | movement of the said turning base 2 and the link arm mechanism 3, In Airtight seals 23A and 23A 'are provided between the turning base 2 and the fixed base 1, and at the same time, the fixed base 1 and the turning base 2 have a refrigerant. The circulation paths 100a to 100f and 200a to 200f are provided, and the refrigerant circulation paths 100a to 100f and 200a to 200f are arranged to cool the airtight seals 23A and 23A ', The refrigerant circulation paths 100a to 100f and 200a to 200f include annular spaces 110A, 110A '. 210A and 210A' formed at the boundary between the fixed base 1 and the pivot base 2. Characterized in that the conveying apparatus. The method of claim 1, The conveyance apparatus characterized by the above-mentioned annular space, 110 A of return spaces and 210 A of return paths are provided in concentric form. The method of claim 2, The annular space is formed by an annular groove (110A, 210A) provided in the fixed base (1) or the pivot base (2). The method of claim 1, As said annular space, a conveyance apparatus characterized in that the annular space 110A 'for the return path and the annular space 210A' for the return path are formed to form a space separated from each other via the airtight seal 23A '. . The method according to claim 2 or 4, The refrigerant circulation path for return paths 100a to 100f communicating with the annular spaces 110A and 110A 'for the return path and for return path 200A for communication with the annular spaces 210A and 210A' for return paths. And 200f). The method of claim 5, And the passages (100a to 100f, 200a to 200f) for the return path and the return path extend from the pivot base (2) to the link arm mechanism (3) and communicate with each other. The method of claim 5, The revolving base (2) is provided with a reducer (60) for transmitting a driving force to the link arm mechanism (3), and a passage for return and return for cooling the reducer is provided. Conveying device. The method of claim 5, A guide rail 5 is fixed to the pivot base 2 for guiding movement while supporting the hand 4 when the link arm mechanism 3 swings. 100a to 100f and 200a to 200f extend to the periphery of the guide rail 5 and communicate with each other. The method of claim 1, Said hermetic seals (23A, 23A ') are vacuum seals.

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