TWI305552B - - Google Patents
Download PDFInfo
- Publication number
- TWI305552B TWI305552B TW95127176A TW95127176A TWI305552B TW I305552 B TWI305552 B TW I305552B TW 95127176 A TW95127176 A TW 95127176A TW 95127176 A TW95127176 A TW 95127176A TW I305552 B TWI305552 B TW I305552B
- Authority
- TW
- Taiwan
- Prior art keywords
- layer
- microperforated
- opening
- substrate
- metal structure
- Prior art date
Links
- 229910052751 metal Inorganic materials 0.000 claims description 59
- 239000002184 metal Substances 0.000 claims description 59
- 238000000034 method Methods 0.000 claims description 41
- 239000000758 substrate Substances 0.000 claims description 26
- 239000000463 material Substances 0.000 claims description 23
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 229920002120 photoresistant polymer Polymers 0.000 claims description 6
- 230000005611 electricity Effects 0.000 claims description 4
- 238000002161 passivation Methods 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims description 3
- 238000000151 deposition Methods 0.000 claims description 2
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims 1
- 238000005266 casting Methods 0.000 claims 1
- 229920000307 polymer substrate Polymers 0.000 claims 1
- 229910052707 ruthenium Inorganic materials 0.000 claims 1
- 239000007788 liquid Substances 0.000 description 19
- 238000005323 electroforming Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000007921 spray Substances 0.000 description 3
- 238000003491 array Methods 0.000 description 2
- 238000009616 inductively coupled plasma Methods 0.000 description 2
- 239000002861 polymer material Substances 0.000 description 2
- 206010011224 Cough Diseases 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 210000003298 dental enamel Anatomy 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 229910052747 lanthanoid Inorganic materials 0.000 description 1
- 150000002602 lanthanoids Chemical class 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000008267 milk Substances 0.000 description 1
- 210000004080 milk Anatomy 0.000 description 1
- 235000013336 milk Nutrition 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 239000012811 non-conductive material Substances 0.000 description 1
- 210000000496 pancreas Anatomy 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
Landscapes
- Manufacture Or Reproduction Of Printing Formes (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW95127176A TW200806813A (en) | 2006-07-25 | 2006-07-25 | Method of producing a micro-perforated electroformed metal structure with a lift-off process and the structure thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW95127176A TW200806813A (en) | 2006-07-25 | 2006-07-25 | Method of producing a micro-perforated electroformed metal structure with a lift-off process and the structure thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200806813A TW200806813A (en) | 2008-02-01 |
| TWI305552B true TWI305552B (enExample) | 2009-01-21 |
Family
ID=44766437
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW95127176A TW200806813A (en) | 2006-07-25 | 2006-07-25 | Method of producing a micro-perforated electroformed metal structure with a lift-off process and the structure thereof |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW200806813A (enExample) |
-
2006
- 2006-07-25 TW TW95127176A patent/TW200806813A/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| TW200806813A (en) | 2008-02-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP6835991B2 (ja) | ネブライザのための開口板を製造する方法 | |
| CN113691916B (zh) | Mems麦克风及其制备方法 | |
| RU2013129238A (ru) | Фотоопределяемая дырчатая пластина и способ ее изготовления | |
| JP6173824B2 (ja) | 開口プレートの製造方法 | |
| CN207993902U (zh) | Mems压电扬声器 | |
| TWI305552B (enExample) | ||
| CN109830511A (zh) | 掩膜板制作方法及掩膜板 | |
| CN101435093A (zh) | 电铸金属结构及其制作方法 | |
| JP2012101196A5 (enExample) | ||
| TW200526419A (en) | Mandrel for electroformation of an orifice plate | |
| KR102581043B1 (ko) | 다공성 박막을 이용한 메쉬형 분무 장치 및 이의 제조방법 | |
| TWI417532B (zh) | 用於多階衝擊器之多微孔噴嘴板之製造方法 | |
| TW200835818A (en) | Method of manufacturing electroforming metal structure | |
| US7335463B2 (en) | Electroplated three dimensional ink jet manifold and nozzle structures using successive lithography and electroplated sacrificial layers | |
| TW200804627A (en) | The method of manufacturing electroformed metal structure with micro porous array by laser ablation process | |
| TWI334062B (en) | Method of manufacturing suspension structure and chamber | |
| CN114640934A (zh) | Mems麦克风及其制备方法 | |
| JP2008094018A5 (enExample) | ||
| CN111769816B (zh) | 声表面波滤波器及其制备方法 | |
| TW200804628A (en) | The method of manufacturing nozzle with micro-porous structure by electroforming process and the structure thereof | |
| JP2007230223A5 (enExample) | ||
| CN101391241A (zh) | 喷孔结构及制备方法 | |
| TWI298899B (en) | Nozzle plate and manufacturing processe thereof | |
| TWI305930B (en) | Method of fabricating suspended structure | |
| JP2002363730A5 (enExample) |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |