TW200804627A - The method of manufacturing electroformed metal structure with micro porous array by laser ablation process - Google Patents

Abstract

The present invention relates to the method of manufacturing electroformed metal structure with micro porous array by laser ablation process. This method includes the following steps : (1) supply a substrate body to form a deposited metal layer on its surface; (2) form plural ablated pores with predefined width by using a laser beam emitted from a laser generator to ablate the predefined ablation area of the deposited metal layer; (3) use the deposited metal layer as the starting area of electroform to form the electroformed metal layer having a thickness less than half of the predefined width at the surface and the side wall which is the interface of deposited metal layer and ablated pores; (4) separate the electroformed metal layer from the deposited metal and the substrate body to form a electroformed metal structure with micro porous array.

Description

200804627 IX. INSTRUCTIONS: [Technical Field] The present invention relates to a technique for fabricating a metal structure having a microperforated array by an electroforming process, particularly relating to a method for fabricating a microperforated array by a laser stripping process A method of casting a metal structure. [Prior Art]

Investigating an electroformed metal structure with a micro-perforated array, as disclosed in the Republic of China in November and November, the invention patent "Liquid Spraying Device" of the Republic of China Patent Publication No. 271. The liquid mist device has a liquid storage portion for storing a liquid, a vibration source for supplying the liquid of the liquid storage portion to the front end portion, and a mesh member having a plurality of fine perforation configurations for abutting the end surface of the vibration source The liquid of the reservoir is atomized by the vibration of the vibration source and the mesh member. The mesh member not disclosed in the above patent is formed by electroforming technology, and is preferably an electrically conductive metal structure having a microperforated array. ........ Structure with micro-perforation array similar to the above-mentioned mesh member, ink® for inkjet printer, sprayer for medical or cosmetic syrup, and color dye ink spray And so on. And the micro-perforated array of scorpions made by Baizhi technology is made of (1) base plate by inductively coupled plasma etching to make micro-perforated structure; (7) (4) imine ^ . . . , water (ICP) surnamed (p yimide) high Molecular film structure; and (3) using a cylindrical photoresist block, , . The electroforming method of the structure produces a micro-threading structure and the like. In addition, the whole w i with the micro-gear-shaped gold light speaker and earphones is applied to the microphone and the special deaf earphones for the adjustment function of the sound. 5 200804627 The electromagnetic wave generated by the place. The manufacturing method comprises the following steps: (1) preparing a micro-perforated metal structure by dry or wet etching of a metal material; (2) preparing a micro-perforated structure by laser drilling with a polyimide polymer film, supplemented by coating. Or a permeable conductive material; and (3) a method of fabricating a micro-perforated metal structure by an electroforming method using a cylindrical photoresist structure. SUMMARY OF THE INVENTION The technical problem to be solved by the present invention is as follows:

Each of the fine perforations disclosed in the invented patented mesh member of the Republic of China Publication No. 508271 has a liquid inlet end and a liquid discharge end, and the liquid inlet end and the liquid discharge end are not smooth due to the process. And the change in its radius is not in the form of a gradient. The problem that the mesh member having such fine perforation is easy to be produced is that when the liquid is ejected from the liquid discharge end through the fine perforation from the liquid discharge end, uneven liquid discharge is likely to occur. Moreover, it is also extremely difficult to handle the spray condition and the consistency of the spray effect. In addition, the above patent does not disclose a detailed process flow for such a micro-perforated array electroformed metal structure, and the method of the process is not known to those skilled in the art. Further, in the microperforation structure applied to the liquid ejecting apparatus by the conventional technique, ICP etching has the disadvantage of being expensive, and the mesh member made of a polymer material has a drawback of a short service life. The micro-perforation structure is fabricated by electroforming of a cylindrical photoresist structure, and there is a problem that the cylindrical photoresist structure has a horizontal dimension and a vertical thickness variation. The aperture accuracy of the micro-piercing structure. 200804627 In addition, there are also shortcomings in the production of audio adjustment and resistance to electromagnetic waves. The fabrication of micro-perforated structures by polymers is supplemented by the process of coating or precious materials, which also increases the complexity and cost of the process. The main purpose of the invention is to provide a method for fabricating a f-transferred metal structure having a microperforated array by a method of forming a fine perforated-shaped electroformed metal structure, and more preferably forming a microperforated structure as a smooth structure, and having a :°

The end of the liquid inlet end and the liquid discharge end are different; the diameter: and each: (4) is gradually changed from a larger radius to a smaller radius: the technical means to solve the problem. = The technique used to solve the problem of knowing the technology. "The stripping process is made by electroforming a micro-perforated array."

The ::: method comprises the steps of: providing a substrate body and forming a deposited metal layer on the surface thereof; and removing the stripping width of the laser beam, the anode, the laser beam, and the stripping width of the laser beam 5 domains, to form a plurality of having - pre-1 table: the same as the deposition of the metal layer as the electroforming starting region, in the second = accumulation, the stripping of the sidewalls of the stripping holes form two axes into two: 4 pre-viewing—half of the electroformed metal layer; and, making the microperforated array of electrical structures. The material body blade "in the preferred embodiment of the invention" further comprises the steps of modulating the beam to form a stripped laser beam, and further comprising: = 200804627 surface formation of the deposited metal layer - passivation gold layer and deposition metal Separation of layers. Another/step to facilitate the subsequent electro-pray substrate. The system can be a glass pulsed laser generator, and the glass plate, the 11 substrate, the polymer substrate - the present invention The efficacy of the technology: Compared with the prior art, the micro-perforation array of the electric prayer metal structure process has a micro-perforated structure _1 and the precision fabrication has a radius unequal to each other 1 = genus structure 'where each micro-perforation knot The radius change is from the y Λ Wei end 'and each micro-perforated structure = the micro-permanent micro-perforation system prepared by the process method of the present invention is a smooth structure, and the application of (4) liquid-through ^ to achieve a liquid spray sentence And the electromagnetic wave that is consistent with the effect of the mouth liquid. The function of the heart function and the resistance of the voice coil magnetic field [Embodiment] 立凊 Refer to the brother-picture, which shows the laser stripping device of the present invention. , the present invention ν, beam W... idiot 1 emission-laser beam ΐ — — 调制 调制 调制 调制 调制 调制 调制 调制 调制 调制 调制 调制 光 调制 调制 调制 光 光 光 调制 调制 光 调制 调制 调制 调制 调制 调制 调制 调制 调制 调制 调制 调制 调制 调制 调制 调制 调制For the stripping, please refer to the second to seventh figures, which are schematic diagrams showing the steps of the steps of the laser stripping 8 200804627 for the production of the surface-punched array scales of the present invention, and the invention is also invented. The laser stripping process is used to form the punch-through pattern, which shows the plan and the process chart. As shown in the figure, the process of making the scale gold has a micro-perforated array laser stripping method. Method (hereinafter referred to as

The first substrate body 31 is provided as the substrate 1 (step 1〇1), and the hard substrate such as the stone substrate can also be two or two, which can be The glass substrate and the three figures show that the substrate body 3 is a soft f substrate. Such as the first heart... The method of the Shicheng method can be physical vapor deposition (P or chemical vapor deposition (CVD) and other technologies.: As shown in the fourth figure, the laser generator i is emitted - the laser beam L 3 The laser beam L is modulated by the mask 2 (step 104), and the mask 2 has at least a light-transmitting region 21 and at least one resisting region 22' through which the light-transmitting region 21 passes. The laser beam l forms the stripping laser beam L. The method is to strip the laser beam l and project to the stripping region of the depositing gold rider 32 (step 1 () 5), and Stripping the laser beam L, stripping the selected stripping regions of the deposited metal layer 32 to form a plurality of stripping holes 33 having a predetermined width w (step 106), as shown in the fifth figure, performing a passivation process The surface of the deposited metal layer 32 is formed into a passivation film 34 (step 107). As shown in the sixth figure, the deposited metal layer 32 is subjected to an electric current, and the passivation film 34 is used as an electroforming starting region 9 200804627 The field 'forms an electroformed metal layer 35 on the surface of the purification film 34 (step 〇8), and the electroformed metal layer 35 is also formed on the strips The electroformed metal layer 35 is deposited only by the conductive passivation film 34 except that the substrate side wall 331 of the hole 33 is made of a non-conductive material. The method controls the electroformed metal layer 35. The amount of growth, so that the electroformed metal layer is formed in the

The deposition thickness t of the sidewalls 331 of the stripping holes 33 is less than one half of the predetermined width w (steps 1 and 9). As shown in the seventh figure, the method separates the electroformed metal layer 35 from the deposited metal layer 32 and the substrate body 31 (step 11A) to form an electroformed metal structure 4 having a microperforated array (steps) m). In this application, in addition to the reticle type laser generator with a reticle, it is also possible to use a direct-write laser that does not need to be used with a reticle. The laser beam emission mode of the laser generator can be either continuous laser or pulsed laser. , δ 食 阅 秘 围 围 围 围 围 兴 , , , , , , , , δ δ δ δ δ δ δ δ δ δ δ δ δ δ δ δ δ δ δ δ δ δ 十 十 十 十 十 十 十 十 十 十 十 十 十Figure = the electroformed metal layer 35-shaped metal structure 4 has a - second surface 42, the electroformed metal structure, the surface structure - wherein the «hole structure 43 is located in the first opening 431, which has - the first opening radius, and the axis I:: structure: 3 is located in the first having the second opening 43 and the second opening aperture radius. , , you have ' 200804627 亚, the first opening radius a radius larger than the half hole of the micro-perforated structure 43 and a second opening radius. The other radius is gradually changed to the same as the method of the present invention, which has a micro-perforation along with the method of electroforming a metal structure of the fine human structure. The method is based on the thickness of the deposited metal layer 32. Referring to the eleventh and thirteenth drawings, the structural design of the fourth embodiment is substantially the same as that of the previous embodiment. The component of = is labeled with the same component number to correspond to the deposited metal layer 32. The thickness is extremely thin, and the recessed structure generates the surface 42 according to the thickness of the deposited metal layer 32. The above preferred embodiment is based on the electric prayer metal structure of the 穿孔 丨, / + & perforated array. An electroformed metal structure having an array of micro-perforated structures, which are unequal between the liquid inlet end and the liquid discharge end, and the second == change is from semi-pure to larger _ change to a smaller radius. The fine perforation system with the structure of the sleeping genus prepared by the method of the invention has a smooth structure, and the application of the second and second gold can easily achieve the uniformity of the liquid spray and grasp the effect of the liquid discharge effect. It can be seen from the above embodiments of the present invention that the present invention has a shame value. However, the above embodiments are merely illustrative of the present invention, and those skilled in the art can use the above-mentioned invention: :: various improvements and variations of the invention. However, various modifications and variations made in accordance with the present invention are still within the scope of the invention of the invention = 200804627 and the patents of the boundary. [Simplified illustration] The figure shows the laser stripping device of the present invention Schematic diagrams of the second embodiment to the seventh embodiment show preferred embodiments of the present invention;

Figure 8 is a flow chart showing a method for fabricating a metal structure having a microperforated array by a laser stripping process according to the present invention; J ninth graph = the electroformed metal structure having a microperforated array of the present invention = ten graph display In the ninth figure, 1 (a cross-sectional view of the MG section; the tenth-axis shows a perspective view of the electroformed metal of the present invention with a micro-perforated array; ^12 shows the section of the tenth-figure 12_12 Sectional view; Twelve diagrams' shows an enlarged view of the portion of the diagram in Figure 12. [Main component symbol description] 2 3 31 32 33 331 Laser generator mask processing workpiece substrate body deposition metal layer stripping Hole hole sidewall 12 200804627

34 Purified film 35 Electroformed metal layer 4 Electrical per metal structure 41 First surface 42 Second surface 43 Microperforated structure 431 First opening 432 Second opening 44 Concave structure L Laser beam L, stripping laser beam t deposition thickness w predetermined width

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Claims (1)

200804627, the scope of the patent application: The method for fabricating a micro-perforated array by a laser stripping process comprises the following steps: (a) providing a substrate body; (b) providing a substrate body a surface-deposited metal layer; a metal layer (4) emitting a laser beam by a laser generator: a selected stripping region of the sink; a stripping width of the selected stripping region of the deposited metal layer; Except for the holes, and each stripping hole has a predetermined (e) = "the metal layer is an electroforming starting region, and the metal of the deposited metal layer is difficult to strip the sidewall of the hole to form a gamma II layer, and the electricity is formed. The cast metal layer is formed on the stripping holes 1 and the deposited thickness of the soil is less than one half of the predetermined width. (1) The metal layer is separated from the deposited metal layer and the riding body, and is formed into an electroformed metal structure having a microperforated array. The method for producing an electro-rotation metal structure having a t-array according to the laser stripping process described in the above, wherein the substrate of the step (8) is one of the glass substrate, the stone substrate, and the polymer substrate. A method for fabricating an electroformed metal structure having a U-hole array by a laser stripping process as described in the patent scope f1, wherein the laser generator 14 200804627 is a direct-write laser generator. The method of the f-spraying process described in the first item of the range is to produce a method with =:=scales, wherein the laser is generated, and the laser is mounted on the _^^step We)t. % 5.:;= The method of laser stripping _^ = hole = electroformed metal as described in item 1 of the benefit range, wherein = step of forming a sharpening film on the surface of the deposited metal layer 6. A method for fabricating a continuous structure, wherein the laser generator, such as the first paragraph of the patent scope of the application, +, ... the micro-perforation array of the scale metal ^ ^ stripping process has a system A pulsed laser generator method, wherein the laser generator 15