TW200806813A - Method of producing a micro-perforated electroformed metal structure with a lift-off process and the structure thereof - Google Patents
Method of producing a micro-perforated electroformed metal structure with a lift-off process and the structure thereof Download PDFInfo
- Publication number
- TW200806813A TW200806813A TW95127176A TW95127176A TW200806813A TW 200806813 A TW200806813 A TW 200806813A TW 95127176 A TW95127176 A TW 95127176A TW 95127176 A TW95127176 A TW 95127176A TW 200806813 A TW200806813 A TW 200806813A
- Authority
- TW
- Taiwan
- Prior art keywords
- layer
- metal layer
- microperforated
- material layer
- perforated
- Prior art date
Links
- 239000002184 metal Substances 0.000 title claims abstract description 63
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 63
- 238000000034 method Methods 0.000 title claims abstract description 43
- 239000000758 substrate Substances 0.000 claims abstract description 29
- 239000000463 material Substances 0.000 claims abstract description 27
- 230000008021 deposition Effects 0.000 claims abstract description 5
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 238000002161 passivation Methods 0.000 claims description 6
- 229920002120 photoresistant polymer Polymers 0.000 claims description 6
- 229920000307 polymer substrate Polymers 0.000 claims description 2
- 239000004575 stone Substances 0.000 claims description 2
- 239000011521 glass Substances 0.000 claims 1
- 238000005323 electroforming Methods 0.000 abstract description 6
- 239000011148 porous material Substances 0.000 abstract description 5
- 239000011159 matrix material Substances 0.000 abstract 2
- 239000007788 liquid Substances 0.000 description 21
- 239000007921 spray Substances 0.000 description 5
- 239000004020 conductor Substances 0.000 description 2
- 238000005553 drilling Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 235000010627 Phaseolus vulgaris Nutrition 0.000 description 1
- 244000046052 Phaseolus vulgaris Species 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000002537 cosmetic Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical group [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000009616 inductively coupled plasma Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 238000003032 molecular docking Methods 0.000 description 1
- 239000002120 nanofilm Substances 0.000 description 1
- 239000012811 non-conductive material Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 230000037452 priming Effects 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000006188 syrup Substances 0.000 description 1
- 235000020357 syrup Nutrition 0.000 description 1
Landscapes
- Manufacture Or Reproduction Of Printing Formes (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW95127176A TW200806813A (en) | 2006-07-25 | 2006-07-25 | Method of producing a micro-perforated electroformed metal structure with a lift-off process and the structure thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW95127176A TW200806813A (en) | 2006-07-25 | 2006-07-25 | Method of producing a micro-perforated electroformed metal structure with a lift-off process and the structure thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200806813A true TW200806813A (en) | 2008-02-01 |
| TWI305552B TWI305552B (enExample) | 2009-01-21 |
Family
ID=44766437
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW95127176A TW200806813A (en) | 2006-07-25 | 2006-07-25 | Method of producing a micro-perforated electroformed metal structure with a lift-off process and the structure thereof |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW200806813A (enExample) |
-
2006
- 2006-07-25 TW TW95127176A patent/TW200806813A/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| TWI305552B (enExample) | 2009-01-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |