1301821 玖、發明說明·· 【—發明所屬 本發明係有關於平板玻璃傳送裝置，尤其是通過板片下 部的空氣層緩和部平穩地排出空氣，以使板片上的空氣層 保持均勻的平板玻璃傳送裝置。 【先前技術】 通常，用於檢查液晶顯示器（LCD)、等離子顯示器 • 的薄板型平板玻璃的品質檢查裝置上，作為將平板玻璃傳 送到檢查部一側的傳送裝置，使用如下的傳送裝置：在旋 轉轴上同軸設置有用於支撐並傳送平板玻璃底面的多個自 由輥，這種旋轉軸沿著傳送裝置的長度方向整體進行設置。 但是，採用上述自由輥的平板玻璃傳送裝置，基本上是 在平板玻璃與自由輥外表面相互接觸的狀態下進行平板玻 璃的傳送，所以也不能完全排除接觸摩擦力所產生的細微 的搖晃、振動現象。因為上述的振動，從而在平板玻璃檢 查時，產生不能正確測定不合格率、檢查精度下降等問題。 為了解決上述問題，本申請人在先申請的平板玻璃傳送 • 裝置，如第1圖、第2圖所示，其傳送部20結構為，空氣 室22上端設有基板23，基板23上設有複數通孔23& ;而 基板23上方没置有4檢程式24 ;隔著一定間隔排列的複 數板片25,所述板片25覆篕上述篩檢程式24並設有排氣 孔25a，該排氣孔25a與基板23上的通孔23a對應。 上述現有技術，通過上述板片25的排氣孔25a排出的 空氣在板片25上方形成空氣層，使平板玻璃4〇浮起來， 而通過持續排氣形成空氣層的空氣中的剩餘空氣，則通過 5 1301821 板片25之間的通道26排出至傳送部2〇之外部。 但是，it種現有技術中的平板玻璃傳送裝置，因只通過 々板片25之間的狹小的通道26，向外排出空氣故其排 乳量有限，導致排氣不均句。盆社果， J兵、、、口禾，形成在板片25上方 的空氣層的全體或局部空氣詈妗大，合 、 Λ里增大會使平板玻璃過度浮 起’導致檢查平板玻璃時，Α沐搶并拉冰 吁無法進仃精確測定，從而降低 檢查精度。 — • 【發明内容】 正是針對上述問題，本發明的目的在於提供一種平板玻 ，傳送裝置，即通過板片下方的空氣層緩和部均勻排出空 氣，Μ呆持板片上的空氣層穩定，以防止平板玻璃鼓起，在 檢查平板玻璃時可精確測定不良品率，從而可提高檢查精 度的平板玻璃傳送裝置。 為了實現上述目的，本發明的平板玻璃傳送裝置，在工 作臺的上面設置有傳送部、並且在該傳送部的一側設有可 移動傳送部上方之平板玻璃的傳送機，而上述傳送部包 括·内部女裝有排氣扇的風扇箱；設置在上述風扇箱上面， 其上部呈開放狀態的空氣室；覆蓋且緊密結合上述空氣室 之開放的上部，並且在其表面上設置有上下貫通的複數通 孔的基板；設置在上述基板上部的板片部，所述平板玻璃 傳送裝置，其特徵在於，上述板片部包括：篩檢程式托架， 設置在上述基板各通孔上方，在中心設有與基板通孔連通 的貫通孔；篩檢程式，設置在上述篩檢程式托架的貫通孔 内複數板片’覆蓋上述篩檢程式托架的上部，並設有 與筛檢程式托架的貫通孔所對應的排氣孔，而且板片之間 61301821 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 【 【 【 【 【 【 平板 平板 平板 平板 平板 平板 平板 平板 平板 平板 平板 平板 平板 平板 平板 平板 平板 平板 平板 平板 平板 平板 平板 平板 平板 平板 平板 平板 平板 平板 平板 平板 平板 平板 平板Device. [Prior Art] In general, a quality inspection device for inspecting a thin-plate type flat glass of a liquid crystal display (LCD) or a plasma display is used as a transfer device for transporting flat glass to the inspection unit side, using the following transfer device: A plurality of free rollers for supporting and conveying the bottom surface of the flat glass are coaxially disposed on the rotating shaft, and the rotating shaft is integrally disposed along the longitudinal direction of the conveying device. However, the flat glass conveying device using the above-described free roller basically carries out the conveyance of the flat glass in a state where the flat glass and the outer surface of the free roller are in contact with each other, so that the slight shaking and vibration caused by the contact friction force cannot be completely excluded. phenomenon. Because of the vibration described above, problems such as failure rate measurement and deterioration of inspection accuracy are caused when the flat glass is inspected. In order to solve the above problems, the flat glass transfer apparatus according to the applicant's application, as shown in FIG. 1 and FIG. 2, has a transfer portion 20 configured such that a substrate 23 is provided at an upper end of the air chamber 22, and a substrate 23 is provided on the substrate 23. The plurality of through holes 23&; and the fourth inspection program 24 are not disposed above the substrate 23; the plurality of sheets 25 are arranged at regular intervals, and the sheet 25 covers the screening program 24 and is provided with a vent hole 25a. The vent hole 25a corresponds to the through hole 23a on the substrate 23. In the above prior art, the air discharged through the vent hole 25a of the plate 25 forms an air layer above the plate 25, causing the flat glass 4 to float, and by continuously exhausting the remaining air in the air forming the air layer, It is discharged to the outside of the conveying portion 2 through the passage 26 between the 5 1301821 sheets 25. However, in the prior art flat glass conveying device, since the air is discharged outward only through the narrow passage 26 between the seesaw pieces 25, the amount of milk discharged is limited, resulting in an exhaust unevenness. The basin, the J soldiers, the mouth, the mouth, the air layer formed above the plate 25, the whole or part of the air is large, and the increase in the squats will cause the flat glass to float excessively. Mu grabs and pulls the ice and can't make accurate measurements, thus reducing the inspection accuracy. - [Explanation] It is against the above problems that the object of the present invention is to provide a flat glass, conveying device that uniformly discharges air through the air layer mitigation portion below the plate, and the air layer on the plate is stabilized. A flat glass conveyor that can prevent the flat glass from bulging and accurately measure the defective rate when inspecting the flat glass, thereby improving the inspection accuracy. In order to achieve the above object, the flat glass conveying device of the present invention is provided with a conveying portion on the upper surface of the table, and a conveyor for moving the flat glass above the conveying portion on one side of the conveying portion, and the conveying portion includes a fan case with an exhaust fan inside; a fan chamber disposed above the fan case and having an open upper portion; covering and closely combining the open upper portion of the air chamber, and having a top and bottom through surface a substrate for a plurality of through holes; a plate portion provided on an upper portion of the substrate, wherein the plate portion includes: a screening program holder disposed above each of the through holes of the substrate at a center a through hole communicating with the through hole of the substrate; a screening program disposed in the through hole of the screening program bracket, the plurality of plates covering the upper portion of the screening program bracket, and being provided with the screening program bracket The vent hole corresponding to the through hole, and between the plates 6
1301821 相隔一定距離。 另外，本發明的平板玻璃傳送裝置中，上 架的貫通孔内圓周表面上，最好形成有供安 安裝槽。 另外，本發明的平板玻璃傳送裝置中，上 於橫向配置的#他各板片&平板玻璃的移動 端最好相互交錯排列。 另外，在本發明的平板玻璃傳送裝置中， 在平板玻璃^入和送出的冑後端部至距離 定間隔並相互對稱的端部上設置的板片，其 別的部分最好更密集。 π盱廷裝罝干 集形成的各排氣孔底部的各筛檢程式托架 設有直面部，以形成相互間的直線通道。 本發明的平板玻璃傳送裝置，其優點在 :的空氣層緩和部均句排出空氣，從而保 ::定’以防止平板玻璃過度浮起，在檢 Π測定不良品率，從而可提高檢查精度 以下’結合附圖對本發明的 如當 丹體實； 至5圖所示，本發明的平柄 在上部中央處設置有檢查部丨丨的工 臺1 0從前部到後部的全部位置 的傳送部2。；設置在與上述傳送： 述篩檢程式托 裝篩檢程式的 述各板片相對 方向，其前後 上述板片中， 工作臺中心一 排氣孔相對於 設置在上述密 表面上，最好 ，通過板片下 板片上的空氣 平板玻璃時可 平板玻璃傳送 i行詳細說明。 送裝置包括： :在上述工作 相互形成對稱 側相鄰接的工 7 13〇1821 作臺l〇上方的傳送機30。 上述工作臺1〇，為台型的方桌狀，在從該工作臺 表面起距離一定高度的上方，設置有橫跨工作=二 a和攝像裝置Ub的檢查部1^ 、光 =述傳送部20,以工作臺1〇的中央為基準、相 為了使平板玻璃40通過檢查部n的下方 心述工…。的長度方向上的從前部到後部的: 且形成相互對稱的長方形的板材形狀。 上述傳送機30，可在鱼楂1 ^ t , 工 恢 杜興傳送部2〇的一個側面相鄰接 上的：1〇上石著其長度方向滑動，並將移動到傳送部 ^平板玻璃40的1固定住，使平板玻璃以浮起在傳 的-定高度上方的狀態，通過檢查部Η的下方。 用迫裏，因為上述工作i 10、檢查部11以及傳送機30 :了公知的技術，戶斤以省略對其詳細的說明。以下，對 發明作為要點的傳送部2G進行如下的詳細說明。 上述傳送部20，包括：具有排氣扇21a的風扇箱21， 置在上述風扇箱21上部的空氣室22，覆蓋上述空氣室 上邛的基板23，分別結合在上述基板23上部的相應新 的複數板片部5 0。 上述風扇箱21為四方形箱體結構，其開放的上部覆蓋 清潔用篩檢程式21d，在其内部設有向上方排出空氣以 氣扇2 1 a 。 而且，在上述風扇箱21的側面及底面等處設置有··肩 通過位於開放的上部的清潔筛檢程式21d均勻地排出3 的通孔21b’·使排氣屬2u電源的電源線2ic穿過的超 21b ° 的 源 定 設 部 的 20 送 使 本 安 22 位 有 排 了 氣 孔 8 1301821 而且’上述風扇箱21的清潔篩檢程式21d具有如下功 能·使從排氣扇21a排出的空氣不直接流入空氣室22内， 初步去除空氣中的微小灰塵等雜質的空氣淨化功能以及平 緩排氣壓力的功能。1301821 is separated by a certain distance. Further, in the flat glass conveying device of the present invention, it is preferable that the inner circumferential surface of the through hole of the upper frame is formed with a mounting groove. Further, in the flat glass conveying device of the present invention, the moving ends of the flat plates and the flat glass disposed in the lateral direction are preferably staggered with each other. Further, in the flat glass conveying device of the present invention, the sheets provided on the end portions of the crucible glass which are fed in and out of the flat glass and which are spaced apart from each other at a predetermined interval are preferably denser. Each of the screening program trays at the bottom of each of the vent holes formed by the π 盱 罝 设有 设有 设有 设有 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 The flat glass conveying device of the present invention has the advantages that the air layer mitigation portion discharges air uniformly, thereby ensuring that: the slab glass is prevented from being excessively floated, and the defective product rate is measured, thereby improving the inspection accuracy. As shown in Fig. 5, the flat shank of the present invention is provided with a transfer portion 2 of the inspection table 丨丨 at the upper center at all positions from the front portion to the rear portion of the table 10 at the upper center. . Preferably, in the opposite direction to the above-mentioned transfer: the screening mode of the screening program, in the front and rear of the plate, a vent hole in the center of the table is disposed on the dense surface, preferably, The flat glass can be transported through the air plate glass on the lower plate of the plate. The feeding device comprises: a conveyor 30 adjacent to the symmetry side of the above-mentioned work, and a conveyor 30 above the table. The table 1 is a table-shaped table shape, and an inspection unit 1 and a light transmission unit 20 are provided above the surface of the table at a constant height from the surface of the table. The plate glass 40 is passed through the lower part of the inspection unit n based on the center of the table 1 . From the front to the rear in the length direction: and form a rectangular plate shape that is symmetrical with each other. The conveyor 30 can be adjacently connected to one side of the fishing rod 1 ^ t, the Gonghui Duxing conveying part 2〇: 1〇 the upper stone slides in the longitudinal direction thereof, and moves to the conveying part ^ flat glass 40 The 1 is fixed so that the flat glass floats above the transmitted-fixed height and passes under the inspection section. In the case of the above-mentioned work i 10, the inspection unit 11 and the conveyor 30: well-known techniques, the detailed description thereof will be omitted. Hereinafter, the transmission unit 2G, which is the main point of the invention, will be described in detail below. The transport unit 20 includes a fan case 21 having an exhaust fan 21a, an air chamber 22 disposed on an upper portion of the fan case 21, and a substrate 23 covering the upper portion of the air chamber, respectively coupled to a corresponding new one on the upper portion of the substrate 23. A plurality of plate portions 50. The fan case 21 has a square box structure, and its open upper portion is covered with a cleaning screening program 21d, and an air fan 2 1 a is exhausted upward. Further, the side wall and the bottom surface of the fan case 21 are provided with a through hole 21b' that is uniformly discharged through the cleaning screening program 21d located at the upper portion of the opening, and the power supply line 2ic that is exhausted to the 2u power source is worn. The 20-feed of the source setting portion of the over 21b° is provided with the air hole 8 1301821 in the intrinsic safety position 22, and the cleaning screening program 21d of the fan box 21 has the following functions: the air discharged from the exhaust fan 21a is not Directly flowing into the air chamber 22, the air purifying function of impurities such as minute dust in the air and the function of smoothing the exhaust pressure are initially removed.
上述空氣室22為底部中心部分及整個上部呈開放狀態 的四方形箱體結構，在中心部分形成有空間，使排氣扇2 1 a 排出的空氣充滿其中，並使空氣通過基板23上的全部通孔 23a向外排出；而安置在風扇箱21上面的空氣室底面的中 心部分，設置有與風扇箱2 1的開放上部形成連通的通孔 22a ;在空氣室22的内部，形成有空間部22b ;並且，空 氣室22的開放上部全體與基板23緊密結合。 也就是說，在上述空氣室22中，由排氣扇21a排出的空 氣暫時收容於空氣室22的空間部22b内，然後通過由排氣 扇21a持續流入空氣室22内的空氣，將上述空氣室22内 的空氣向上方擠壓，並通過基板23的通孔23a排出。 上述基板23，是長方形的板材形狀，其覆蓋且緊密結合 在空氣至22的開放上部；在基板23的表面，設置有上下 貫通的複數通孔23a。 另外’上述基板23上部設有板片部5〇，以形成均勻的 空氣層。 上述板片部50包括：安裝固定在基板23的各通孔23& 上方的筛檢私式托架52;安裝在上述筛檢程式托架52的 貫通孔52a内部的篩檢程式54;覆蓋上述篩檢程式托架52 上部的複數板片56。 上述篩檢程式托架52與上述基板23中全部通孔23a對 應配置，並通過螺釘等固定工具固定在基板23上方，而其 9 1301821 中〜部汉有與基板23的通孔23a具有相同直徑並與通孔 23a形成連通的貫通孔52a，在上述貫通孔52a内圓周表面 設有供安裝篩檢程式54的安裝槽5 2b。 上述筛檢程式托架52的貫通孔52a，為了在其上方安裝 篩檢程式54，分為兩段設置的貫通孔狀，包括，具有與篩 檢程式54相同的直徑和高度的大直徑部；從上述大直徑部 直接向下延伸的小直徑部。 上述大直徑部和小直徑部的接壤部分即為安裝槽5孔， 供安裝篩檢程式54。 另外，上述各篩檢程式托架52中，在具有密集形成之各 排氟孔的板片底部形成的各篩檢程式托架5 2外圓周表面 上，各設有互不接觸並相距一定間隔的直面部52c，以形 成直線通道。 上述筛檢程式54可拆卸地安裝在篩檢程式托架52的貫 通孔52a内部’其表面呈圓形板狀，使其與篩檢程式托架 52上端形成相同的平面❶上述篩檢程式54位於基板23的 各通孔23a上，並最好採用燒結篩檢程式，這樣，空氣室 22内的空氣並非直接通過基板23的通孔23a向外排出， 而是使排氣壓平緩到一定程度，其結果是，空氣以滲出程 度的氣壓通過上述篩檢程式24被排出。 上述板片56覆蓋篩檢程式托架52的上面，通過螺釘等 固定工具固定在上述篩檢程式托架52上，並設有與上述筛 檢程式托架52之貫通孔52a對應的排氣孔56a，而且複Z 板片5 6之間距離一定間隔。 上述排氣孔5 6 a直徑最好小於篩檢程式5 4的直徑，這樣 可防止篩檢程式54通過排氣孔56a向外脫離。 10 1301821 另外，上述各板片56相對於橫向配置的. 和平板玻璃40的移動方向，其前後端相互交 k向鄰接的各排氣孔5 6 a之間相互交錯排列 列。 另外’上述板片56中，平板玻璃40的進 送部20前後端部至工作臺中心相距一定距 的傳送部20的端部的板片56上的各排氣孔 別的部分更密集，以增加排向平板玻璃4〇纪 •具有上述結構的本發明之平板玻璃傳送裝 扇21a旋轉，將空氣向上排出，空氣先在空氣 通過排氣扇21a的持續供氣，空氣室22内的 出’並通過固定在空氣室22上部的基板23 上排出。這時，通過上述基板23的通孔23a 氣’經過篩檢程式托架52的篩檢程式54時 變得平緩，以滲出的形式通過板片56的排· 在板片56上形成一種空氣層。 即，通過在平板玻璃4〇和板片56之間形 φ 持續補充（流入）空氣，繼續保持空氣層。 形成在上述板片56上的空氣層，支擇放 的平板玻璃40的同時，通過上述板片56 下部之各篩檢程式托架52之間形成的空氣 向傳送部20外部進行排氣，重復上述過輕 40在板片56上方浮起—定高产。 另外，上述空氣層緩和部58使板片56 J： 的體積向下降低，緩和氣壓，同時可使排 之外的空氣層氣流保持均勻，從而防止平板 其他各板片56 L錯排列。即， ，而非整齊排 入和送出的傳 離並相互對稱 ,5 6 a，相對於 J排氣量。 置，通過排氣 室22充滿後， 空氣被向上擠 的通孔23a向 向上排出的空 ’其排氣速度 I孔5 6 a，最終 成的空氣層中 置在板片5 6上 上部和板片5 6 層緩和部5 8， 〔，使平板玻璃 •的全體空氣層 出至傳送部2 0 玻璃40中央部 11 1301821 被鼓起的現象。 例如’在；支有空氣層緩和部58的平整的平板上形成空氣 層時’由於邊框側的空氣比平板中央部的空氣更迅速地向 外部排出’作為整體，形成了中央部的空氣層比平板邊框 處厚’其結果產生了平板玻璃40的中央部向上方膨脹鼓起 的現象’但是，此時通過如本發明的形成有空氣層緩和部 58’可將空氣層的空氣通過空氣層緩和部58排出，來部分 緩和空氣層的壓力，從而能夠防止平板玻璃40的鼓起現 象。 木如上所述，如果在板片25上面形成有空氣層的狀態下， 當作為檢查物件的平板玻璃40移動至工作臺1〇上的傳送 部2〇時，從此時開始，由於空氣層的存在，平板玻璃4〇 處於浮起在一定高度上的狀態，此時，工作臺10的傳送機 30 一邊真空吸附平板玻璃4〇的一個側面、使其向檢查部 11的方向滑動，一邊進行平板玻璃4〇的品質檢查，而經 過該檢查部U的平板玻璃4〇，繼續移動進入下一工序。 在平板玻璃40接受品質檢查的過程中，不與傳送部2〇 接觸以浮在空氣中的狀態下傳送的，因此可以在沒有接 觸摩擦等引起的任何搖晃的情況下進行檢查。 另外，本發明的平板玻璃傳送裝置，也;以在平板玻璃 檢查設備以外的物流以及其他用途方面使用。 如上所述，|照上述實施例，詳細地進行了說明，但本 ^月並不僅限於此。在不偏離本項發明的基本技術思想的 範圍内，本領域的專業人員可以進行其他多樣的變更。此 夕卜，本發明必須根據所附申請專利範圍來確定其技術性範 12 1301821 【圖式簡單說明】 第1圖是現有技術中的平板玻璃傳送裝置立體圖； 第2圖是第1圖的部分放大圖； 第3圖是本發明的平板玻璃傳送裝置立體圖；The air chamber 22 has a square box structure in which the bottom center portion and the entire upper portion are open, and a space is formed in the center portion, so that the air discharged from the exhaust fan 2 1 a is filled therein, and the air passes through all the substrates 23 . The through hole 23a is discharged outward; and a central portion of the bottom surface of the air chamber disposed above the fan case 21 is provided with a through hole 22a that communicates with the open upper portion of the fan case 21; and a space portion is formed inside the air chamber 22. 22b; and the open upper portion of the air chamber 22 is tightly coupled to the substrate 23. In other words, in the air chamber 22, the air discharged from the exhaust fan 21a is temporarily accommodated in the space portion 22b of the air chamber 22, and then the air is continuously supplied to the air in the air chamber 22 by the exhaust fan 21a. The air in the chamber 22 is pressed upward and discharged through the through hole 23a of the substrate 23. The substrate 23 has a rectangular plate shape and is covered and tightly bonded to the open upper portion of the air 22; on the surface of the substrate 23, a plurality of through holes 23a penetrating therethrough are provided. Further, the upper portion of the substrate 23 is provided with a plate portion 5A to form a uniform air layer. The plate portion 50 includes: a screening private bracket 52 mounted on the through hole 23 & of the substrate 23; and a screening program 54 mounted inside the through hole 52a of the screening program bracket 52; Screen the plurality of plates 56 on the upper portion of the program tray 52. The screening program tray 52 is disposed corresponding to all of the through holes 23a in the substrate 23, and is fixed above the substrate 23 by a fixing tool such as a screw, and the portion of the 91301821 has the same diameter as the through hole 23a of the substrate 23. A through hole 52a that communicates with the through hole 23a is provided, and a mounting groove 52b for mounting the screening program 54 is provided on the inner circumferential surface of the through hole 52a. The through hole 52a of the screening program bracket 52 is provided in a through hole shape provided in two stages in order to mount the screening program 54 thereon, and includes a large diameter portion having the same diameter and height as the screening program 54; A small diameter portion that extends directly downward from the large diameter portion. The border portion of the large diameter portion and the small diameter portion is a hole of the mounting groove 5 for mounting the screening program 54. Further, in each of the screening program trays 52, the outer circumferential surfaces of the screening program holders 52 formed on the bottoms of the sheets having the densely formed fluorine-containing holes are provided with no mutual contact and a certain interval. Straight face portion 52c to form a straight channel. The screening program 54 is detachably mounted inside the through hole 52a of the screening program bracket 52. The surface thereof has a circular plate shape so as to form the same plane as the upper end of the screening program bracket 52. The screening program 54 It is located on each of the through holes 23a of the substrate 23, and preferably a sintering screening program is used. Thus, the air in the air chamber 22 is not directly discharged through the through holes 23a of the substrate 23, but the exhaust pressure is flattened to a certain extent. As a result, air is discharged through the above-described screening program 24 at a gas pressure of oozing. The plate 56 covers the upper surface of the screening program bracket 52, and is fixed to the screening program bracket 52 by a fixing tool such as a screw, and is provided with a vent hole corresponding to the through hole 52a of the screening program bracket 52. 56a, and the distance between the complex Z plates 5 6 is a certain interval. Preferably, the venting opening 56a has a diameter smaller than the diameter of the screening program 514, which prevents the screening program 54 from being detached outwardly through the venting opening 56a. 10 1301821 Further, the above-mentioned respective sheets 56 are arranged in a staggered arrangement with respect to the direction of movement of the sheet glass 40 and the front and rear ends of the sheet 56 intersecting each other. Further, in the above-mentioned sheet 56, the portions of the respective vent holes on the sheet 56 of the end portion of the conveying portion 20 at a certain distance from the front end portion of the feeding portion 20 of the sheet glass 40 to the center of the table are denser, Increasing the discharge to the flat glass 4: The flat glass transfer fan 21a of the present invention having the above structure is rotated to discharge the air upward, and the air is first supplied with air through the exhaust fan 21a, and the air chamber 22 is discharged. And discharged through the substrate 23 fixed to the upper portion of the air chamber 22. At this time, the through-hole 23a of the substrate 23 passes through the screening program 54 of the screening program holder 52, and becomes smooth, and forms an air layer on the sheet 56 through the row of the sheets 56 in the form of exudation. That is, the air layer is continuously held by continuously replenishing (flowing in) air between the flat glass 4 〇 and the sheet 56. The air layer formed on the above-mentioned plate piece 56 is used to discharge the plate glass 40, and the air formed between the respective screening program brackets 52 at the lower portion of the plate piece 56 is exhausted to the outside of the conveying unit 20, and is repeated. The above-mentioned light 40 floats above the plate 56 - high yield. Further, the air layer absorbing portion 58 lowers the volume of the plate 56 J: downward, moderates the air pressure, and at the same time keeps the air flow outside the exhaust air uniform, thereby preventing the other plates 56 L of the flat plate from being misaligned. That is, instead of neatly arranging and sending out the symmetry and symmetry, 5 6 a, relative to J displacement. After the exhaust chamber 22 is filled, the air is exhausted upward by the through hole 23a, and the exhaust speed I hole is 5 6 a, and the finally formed air layer is placed on the upper portion of the plate and the plate. Sheet 5 6 layer relief portion 5 8, [, the entire air layer of the sheet glass is discharged to the conveying portion 2 0. The central portion 11 1301821 of the glass 40 is swollen. For example, when the air layer is formed on the flat plate on which the air layer absorbing portion 58 is attached, the air layer ratio at the center portion is formed as the air on the frame side is discharged to the outside more quickly than the air at the center portion of the flat plate. The thickness of the flat frame is increased as a result of the fact that the central portion of the flat glass 40 is swollen upwards. However, at this time, the air layer absorbing portion 58' can be used to relax the air of the air layer through the air layer. The portion 58 is discharged to partially relieve the pressure of the air layer, so that the bulging phenomenon of the flat glass 40 can be prevented. As described above, in the state in which the air layer is formed on the upper surface of the plate 25, when the flat glass 40 as the inspection object is moved to the conveying portion 2 on the table 1 ,, from this point on, due to the presence of the air layer The flat glass 4 is in a state of being floated at a certain height. At this time, the conveyor 30 of the table 10 vacuum-adsorbs one side surface of the flat glass 4 to slide in the direction of the inspection portion 11, and performs flat glass. After 4 hours of quality inspection, the flat glass of the inspection unit U is moved to the next step. In the process of receiving the quality inspection of the sheet glass 40, it is not conveyed in contact with the conveying portion 2 to float in the air, so that it can be inspected without any shaking caused by contact friction or the like. Further, the flat glass conveying device of the present invention is also used in logistics other than flat glass inspection equipment and other uses. As described above, the above embodiment has been described in detail, but the present month is not limited thereto. Various other modifications can be made by those skilled in the art without departing from the basic technical idea of the invention. Further, the present invention must be determined according to the scope of the appended patent application. The technical scope 12 1301821 [Simplified description of the drawings] Fig. 1 is a perspective view of a flat glass conveying device in the prior art; Fig. 2 is a portion of Fig. 1 3 is a perspective view of a flat glass conveying device of the present invention;
第4 圖 是 第 3 圖的 立 體 組裝圖； 第5 圖 是 第 3 圖的 局 部 剖視圖^ 元件 代 表 符 號 簡 單 說明】 10 工 作 臺 11 檢 查 部 11a 光 源 lib 攝 像 裝 置 20 傳 送 部 21 風 扇 箱 21a 排 氣 扇 21b，22a， 2 3 a通 孔 21c 電 源 線 21d 清 潔 用 篩 檢 程式 22 空 氣 室 22b 空 間 部 23 基 板 24, 54 筛 檢 程式 25，56 板 片 2 5 a， 56a 排 氣 孔 26 通 道 30 傳 送 機 40 平 板 玻 璃 50 板 片 部 52 篩 檢 程 式 托 架 52a 貫 通 孔 52b 安 裝 槽 52c 直 面 部 58 空 氣 層 緩 和 部 13Fig. 4 is a perspective assembled view of Fig. 3; Fig. 5 is a partial cross-sectional view of Fig. 3; a simple description of the symbol of the component: 10 table 11 inspection portion 11a light source lib camera device 20 transfer portion 21 fan case 21a exhaust fan 21b, 22a, 2 3 a through hole 21c power supply line 21d cleaning screening program 22 air chamber 22b space portion 23 substrate 24, 54 screening program 25, 56 plate 2 5 a, 56a vent hole 26 channel 30 conveyor 40 Plate glass 50 Plate portion 52 Screening program bracket 52a Through hole 52b Mounting groove 52c Straight surface portion 58 Air layer mitigation portion 13