CN110381657B - Apparatus for eliminating static electricity - Google Patents
Apparatus for eliminating static electricity Download PDFInfo
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- CN110381657B CN110381657B CN201910658985.XA CN201910658985A CN110381657B CN 110381657 B CN110381657 B CN 110381657B CN 201910658985 A CN201910658985 A CN 201910658985A CN 110381657 B CN110381657 B CN 110381657B
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
- H05F3/00—Carrying-off electrostatic charges
- H05F3/06—Carrying-off electrostatic charges by means of ionising radiation
Abstract
In the apparatus for eliminating static electricity provided by the present application, the apparatus for eliminating static electricity includes a carrier, a pipeline and an ion generating device, the carrier is used for bearing a substrate, the carrier has a plurality of through holes, the through holes penetrate through the carrier, the pipeline includes an air inlet end and an air outlet end, the air inlet end is used for inputting gas, the air outlet end is connected to the through holes of the carrier, the ion generating device is disposed on a gas flow path of the pipeline, the ion generating device is used for ionizing the gas entering the pipeline, i.e., forming ionized gas, and the ionized gas is conveyed to the surface of the carrier bearing substrate through the pipeline and neutralized with charges carried on the surface of the substrate borne by the carrier, thereby improving the ability of eliminating static electricity.
Description
Technical Field
The application relates to the technical field of display, in particular to static electricity eliminating equipment.
Background
During the manufacturing process of the display panel, the relative movement between the substrate and the equipment inevitably generates static electricity, and the damage is represented by the broken substrate caused by electrostatic adsorption and the breakdown of devices caused by electrostatic discharge. The current method for eliminating static electricity is to eliminate static electricity by additionally installing an X-ray generating device, but the method for eliminating static electricity cannot completely eliminate static electricity and has high cost.
Disclosure of Invention
The embodiment of the application provides equipment for eliminating static electricity, so that the static electricity eliminating capacity is improved.
The embodiment of the application provides a static elimination's equipment, includes:
the carrying platform is used for carrying a substrate and is provided with a plurality of through holes, and the through holes penetrate through the carrying platform;
the pipeline comprises an air inlet end and an air outlet end, the air inlet end is used for inputting air, and the air outlet end is connected with the through hole of the carrier; and
the ion generating device is arranged on the air flow path of the pipeline and used for ionizing the gas entering the pipeline, and the ionized gas is conveyed to the carrying platform through the pipeline and is conveyed to the surface of the carrying platform bearing substrate through the through hole.
In the equipment of static elimination that this application provided, the pipeline divide into a first subduct, a second subduct, a plurality of third subduct and a plurality of fourth subduct, first subduct is connected the second subduct, the second subduct is connected a plurality ofly the third subduct, each the third subduct is connected one the fourth subduct, each the fourth subduct is connected a plurality of the through-hole.
In the equipment of elimination static that this application provided, first sub-pipeline includes a first inlet air sub-end and a first outlet air sub-end, ion generating device set up in between first inlet air sub-end and the first outlet air sub-end, first outlet air sub-end is connected the second sub-pipeline, the second sub-pipeline includes a second inlet air sub-end and a plurality of second outlet air sub-end, the second inlet air sub-end is connected first outlet air sub-end, each second outlet air sub-end connects one the third sub-pipeline.
In the equipment of static elimination that this application provided, each the third subduct includes a third inlet sub-end and a third outlet sub-end, and is a plurality of the third inlet sub-end is connected with a plurality of the second outlet sub-end one-to-one, each the third outlet sub-end is connected one the fourth subduct.
In the equipment of static elimination that this application provided, each the fourth sub-pipeline includes a fourth inlet sub-end and a plurality of fourth outlet sub-end, and is a plurality of fourth inlet sub-end and a plurality of third outlet sub-end one-to-one is connected, and is a plurality of the fourth outlet sub-end with the through-hole one-to-one of microscope carrier is connected.
In the apparatus for eliminating static electricity provided by the present application, the apparatus for eliminating static electricity further includes a first pressure vessel, the first pressure vessel is disposed on the airflow path of the first sub-pipeline, the first pressure vessel is located between the first gas inlet sub-end and the first gas outlet sub-end, and the ion generating device is disposed in the first pressure vessel.
In the apparatus for eliminating static electricity provided in the present application, the apparatus for eliminating static electricity further comprises a first valve, and the first valve is disposed between the first pressure vessel and the first gas outlet.
In the equipment of elimination static that this application provided, its characterized in that, the pipeline still includes the fifth sub-pipeline, the fifth sub-pipeline includes fifth inlet gas sub-end and fifth outlet gas sub-end, first sub-pipeline still includes the sixth outlet gas sub-end, the sixth outlet gas sub-end set up in first valve with between the first outlet gas sub-end, fifth inlet gas sub-end intercommunication the sixth outlet gas sub-end, the fifth outlet gas sub-end is used for the exhaust.
In the apparatus for eliminating static electricity provided by the present application, the apparatus for eliminating static electricity further comprises a second pressure vessel, and the second pressure vessel is located on the passage of the fifth sub-pipe.
In the static elimination apparatus provided by the present application, the static elimination apparatus further comprises a second valve disposed between the fifth gas inlet sub-port and the second pressure vessel.
In the static elimination equipment provided by the application, the static elimination equipment comprises a carrying platform, a pipeline and an ion generation device, wherein the carrying platform is used for bearing a substrate, the carrying platform is provided with a plurality of through holes, the through holes penetrate through the carrying platform, the pipeline comprises an air inlet end and an air outlet end, the air inlet end is used for inputting air, the air outlet end is connected with the through holes of the carrying platform, the ion generation device is arranged on an air flow path of the pipeline, the ion generation device is used for ionizing dry gas entering the pipeline, namely ionized gas, the pipeline is used for conveying the ionized gas to the carrying platform through the pipeline, and the ionized gas is transmitted to the surface of the bearing substrate through the through holes.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
Fig. 1 is a schematic view of an apparatus for eliminating static electricity provided in the present application.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
Referring to fig. 1, fig. 1 is a schematic view of an apparatus for eliminating static electricity according to the present application. The apparatus 10 for eliminating static electricity includes a stage 100, a pipe 1000, and an ion generating device 700.
The carrier 100 may be horizontally disposed. The carrier 100 is used for carrying a substrate 20. The carrier 100 has a plurality of through holes 101. The through hole 101 penetrates the carrier 100.
In one embodiment, the through hole 101 may vertically penetrate through the surface 30 of the carrier 100 for carrying the substrate 20. In other embodiments, the through hole 101 may penetrate through the carrier 100 at an appropriate inclination angle, which may be 50 degrees, 80 degrees, 150 degrees, or the like. The through hole 101 is connected to the pipe 1000.
The pipe 1000 includes an inlet end 1001 and an outlet end 1002. The inlet 1001 is used for gas input. The air outlet end 1002 is connected with the through hole 101. The pipeline 1000 is divided into a first subduct 200, a second subduct 300, a plurality of third subducts 400 and a plurality of fourth subducts 500.
The first subduct 200 includes a first inlet gas sub-end 201 and a first outlet gas sub-end 203. The first gas inlet terminal 201 is used for inputting dry gas. The first outlet terminal 203 is connected to the second subduct 300. The first gas outlet end 203 is used to transmit the ionized gas to the second sub-pipe 300.
The second subduct 300 includes a second inlet subduct 301 and a plurality of second outlet subducts 302. The second gas inlet terminal 301 is connected to the first gas outlet terminal 203. The second gas inlet end 301 is used for inputting the ionized gas discharged from the first gas outlet end 203 into the second subduct 300. Each of the second outlet terminals 302 is connected to one of the third subducts 400. The second gas outlet end 302 is used to transmit the ionized gas to the third subduct 400.
Each of the third subducts 400 comprises a third inlet subduct 401 and a third outlet subduct 402. The third gas inlet sub-ends 401 are connected with the second gas outlet sub-ends 302 in a one-to-one correspondence manner. The third gas inlet end 401 is used for inputting the ionized gas flowing out from the second gas outlet end 302 into the third sub-pipe 400. Each of the third outlet terminal 402 is connected to one of the fourth subducts 500. The third gas outlet end 402 is used to transmit the ionized gas to the fourth sub-pipe 500.
Each of the fourth sub-pipes 500 includes a fourth gas inlet sub-end 501 and a plurality of fourth gas outlet sub-ends 502. The plurality of fourth gas inlet terminal 501 and the plurality of third gas outlet terminal 402 are connected in a one-to-one correspondence. The fourth gas inlet sub-end 501 is used for inputting the ionized gas flowing out of the third gas outlet sub-end 402 into the fourth sub-pipe 500. A plurality of the fourth outlet terminals 502 are connected to the through holes 101 of the carrier 100 in a one-to-one correspondence. The fourth gas outlet end 502 is used for transmitting the ionized gas to the through hole 101 of the carrier 100. The pipe diameter of the fourth sub-pipe 500 is smaller than that of the third sub-pipe 400. In other embodiments, the pipe diameter of the fourth sub-pipe 500 may be the same as the pipe diameter of the third sub-pipe 400.
The ion generating device 700 is disposed in the air flow path of the duct 1000. Specifically, the ion generating device 700 is disposed between the first gas inlet terminal 201 and the first gas outlet terminal 203 of the first sub-pipe 200. The ion generating device 700 is used for ionizing the dry gas to form a gas with positive and negative charges, i.e., an ionized gas. The ionized gas is delivered through the conduit 1000 to the surface 30 of the carrier substrate 20 of the carrier 100.
The apparatus 10 for eliminating static electricity further includes a first pressure vessel 801. The first pressure vessel 801 is disposed on the airflow path of the first sub-pipe 200. The first pressure vessel 801 is located between the first gas inlet terminal 201 and the first gas outlet terminal 203. The ion generating device 700 is disposed in the first pressure vessel 801. The first pressure vessel 801 is used to buffer the ionized gas.
The static elimination apparatus 10 further includes a first valve 901. The first valve 901 is disposed between the first pressure vessel 801 and the first gas outlet 203. The first valve 901 is used for controlling the transmission speed of the ionized gas, so as to reduce the damage to the substrate 20 carried by the stage 100 when the ionized gas flows out at a high speed. When the static electricity eliminating apparatus 10 eliminates static electricity, the first valve 901 is in an open state. After the static electricity eliminating device 10 eliminates the static electricity, the first valve 901 is in a closed state.
The pipe 1000 further comprises a fifth subduct 600, the fifth subduct 600 comprising a fifth inlet subduct 601 and a fifth outlet subduct 602. The fifth subduct 600 is for conveying the remaining gas. The first subduct 200 also includes a sixth outlet terminal 202. The sixth gas outlet 202 is disposed between the first valve 901 and the first gas outlet 203. The fifth gas inlet sub-end 601 is communicated with the sixth gas outlet sub-end 203, and the fifth gas inlet sub-end 601 is used for inputting the residual gas transmitted to the sixth gas outlet sub-end 202 of the first sub-pipe 200 into the fifth sub-pipe 600. The fifth gas outlet 602 is used for discharging the residual gas.
The static elimination apparatus 10 further includes a second pressure vessel 802. The second pressure vessel 802 is located on the path of the fifth subduct 600. Specifically, the second pressure vessel 802 is disposed between the fifth inlet sub-pipe 601 and the fifth outlet sub-pipe 602 of the fifth sub-pipe 600. The second pressure vessel 802 is used to buffer the remaining gas.
The apparatus 10 for removing static electricity further comprises a second valve 902, wherein the second valve 902 is disposed between the fifth gas inlet terminal 601 and the second pressure vessel 802. The second valve 902 is used to prevent the ionized gas from exiting. When the static electricity eliminating apparatus 10 performs static electricity elimination, the second valve 902 is in a closed state. After the static electricity eliminating device 10 eliminates the static electricity, the second valve 902 is in an open state.
In the present application, a dry gas enters the ion generating device 700 from the first gas inlet sub-end 201 of the first sub-pipe 200 to form an ionized gas, i.e., ionized gas, when the first valve 901 is opened and the second valve 902 is closed, the ionized gas is transmitted to the second sub-pipe 300 through the first gas outlet end 203 of the first sub-pipe 200, the ionized gas is input to the second sub-pipe 300 from the second gas inlet sub-end 301, the ionized gas is transmitted to the third sub-pipe 400 through the second gas outlet end 302, the ionized gas is input to the third sub-pipe 400 from the third gas inlet sub-end 401, the ionized gas is transmitted to the fourth sub-pipe 500 through the third gas outlet end 402, and the ionized gas is input to the fourth sub-pipe 500 from the fourth gas inlet sub-end 501, the ionized gas is transmitted to the through hole 101 of the stage 100 through the fourth gas outlet end 502, the ionized gas is transmitted to the surface 30 of the substrate 20 carried by the stage 100 through the through hole 101 of the stage 100, the ionized gas and the charges carried by the substrate 20 carried by the stage 100 are neutralized, so as to achieve the purpose of eliminating static electricity, at this time, the first valve 901 is closed, the second valve 902 is opened, after the ionized gas and the charges carried by the substrate 20 carried by the stage 100 are neutralized, the residual gas flows to the sixth gas outlet end 202 through the fourth sub-pipe 500, the third sub-pipe 400, the second sub-pipe 300 and the first sub-pipe 200 in sequence, the residual gas flows to the fifth gas inlet end 601 through the sixth gas outlet end 202, and the residual gas flows to the fifth gas outlet end 602 through a second pressure container arranged on the fifth sub-pipe 600, the remaining gas is discharged from the fifth gas outlet terminal 602.
In the static electricity eliminating equipment provided by the application, the static electricity eliminating equipment comprises a carrying platform, a pipeline and an ion generating device, wherein the carrying platform is used for bearing a substrate, the carrying platform is provided with a plurality of through holes, the through holes penetrate through the carrying platform, the pipeline comprises an air inlet end and an air outlet end, the air inlet end is used for inputting dry gas, the air outlet end is connected with the through holes of the carrying platform, the ion generating device is arranged on a gas flow path of the pipeline, the ion generating device is used for ionizing the dry gas entering the pipeline, namely ionized gas, the pipeline is used for conveying the ionized gas to the carrying platform through the pipeline, and the ionized gas passes through the through holes to the surface of the bearing substrate.
The foregoing provides a detailed description of embodiments of the present application, and the principles and embodiments of the present application have been described herein using specific examples, which are presented solely to aid in the understanding of the present application. Meanwhile, for those skilled in the art, according to the idea of the present application, the specific implementation manner and the application scope may be changed, and in summary, the content of the present specification should not be construed as a limitation to the present application.
Claims (3)
1. An apparatus for eliminating static electricity, comprising:
the carrying platform is used for carrying a substrate and is provided with a plurality of through holes, and the through holes penetrate through the carrying platform;
the pipeline comprises an air inlet end and an air outlet end, the air inlet end is used for inputting air, and the air outlet end is connected with the through hole of the carrying platform; and
the ion generating device is arranged on the air flow path of the pipeline and is used for ionizing the gas entering the pipeline, and the ionized gas is conveyed to the carrying platform through the pipeline and is conveyed to the surface of the carrying substrate of the carrying platform through the through hole;
the pipeline is divided into a first sub-pipeline, a second sub-pipeline, a plurality of third sub-pipelines and a plurality of fourth sub-pipelines, the first sub-pipeline is connected with the second sub-pipeline, the second sub-pipeline is connected with the plurality of third sub-pipelines, each third sub-pipeline is connected with one fourth sub-pipeline, and each fourth sub-pipeline is connected with the plurality of through holes;
the first sub-pipeline comprises a first air inlet sub-end and a first air outlet sub-end, the ion generating device is arranged between the first air inlet sub-end and the first air outlet sub-end, the first air outlet sub-end is connected with the second sub-pipeline, the second sub-pipeline comprises a second air inlet sub-end and a plurality of second air outlet sub-ends, the second air inlet sub-end is connected with the first air outlet sub-end, and each second air outlet sub-end is connected with one third sub-pipeline;
the static electricity eliminating equipment further comprises a first pressure container, the first pressure container is arranged on the airflow passage of the first sub-pipeline, the first pressure container is located between the first air inlet sub-end and the first air outlet sub-end, and the ion generating device is arranged in the first pressure container;
the static electricity eliminating equipment also comprises a first valve, wherein the first valve is arranged between the first pressure container and the first gas outlet end;
the pipeline further comprises a fifth sub-pipeline, the fifth sub-pipeline comprises a fifth gas inlet sub-end and a fifth gas outlet sub-end, the first sub-pipeline further comprises a sixth gas outlet sub-end, the sixth gas outlet sub-end is arranged between the first valve and the first gas outlet sub-end, the fifth gas inlet sub-end is communicated with the sixth gas outlet sub-end, and the fifth gas outlet sub-end is used for discharging gas;
the static eliminating equipment further comprises a second pressure container, and the second pressure container is positioned on the passage of the fifth sub-pipeline;
the apparatus for eliminating static electricity further comprises a second valve disposed between the fifth gas inlet sub-port and the second pressure vessel.
2. The apparatus according to claim 1, wherein each of the third sub-pipes comprises a third gas inlet sub-pipe and a third gas outlet sub-pipe, wherein a plurality of the third gas inlet sub-pipes are connected to a plurality of the second gas outlet sub-pipes in a one-to-one correspondence, and each of the third gas outlet sub-pipes is connected to one of the fourth sub-pipes.
3. The apparatus according to claim 2, wherein each of the fourth sub-pipes comprises a fourth gas inlet terminal and a plurality of fourth gas outlet terminals, the plurality of fourth gas inlet terminals are connected to the plurality of third gas outlet terminals in a one-to-one correspondence, and the plurality of fourth gas outlet terminals are connected to the through holes of the carrier in a one-to-one correspondence.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910658985.XA CN110381657B (en) | 2019-07-22 | 2019-07-22 | Apparatus for eliminating static electricity |
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| CN201910658985.XA CN110381657B (en) | 2019-07-22 | 2019-07-22 | Apparatus for eliminating static electricity |
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| CN110381657B true CN110381657B (en) | 2022-11-04 |
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Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014015485A1 (en) * | 2012-07-25 | 2014-01-30 | 深圳市华星光电技术有限公司 | Device bearing apparatus |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| KR100713815B1 (en) * | 2005-07-08 | 2007-05-02 | 주식회사 태성기연 | Apparatus for transferring of glass panel |
| JP2010225640A (en) * | 2009-03-19 | 2010-10-07 | Tokyo Electron Ltd | Substrate processing apparatus and method of exhausting |
| CN201828743U (en) * | 2010-10-25 | 2011-05-11 | 北京京东方光电科技有限公司 | Production equipment for base device and liquid crystal display |
| CN104715995A (en) * | 2013-12-17 | 2015-06-17 | 中微半导体设备(上海)有限公司 | Gas supply device and plasma reaction unit thereof |
| CN105188245B (en) * | 2015-10-22 | 2017-03-15 | 四川大学 | Xelminator |
| CN205864832U (en) * | 2016-06-29 | 2017-01-04 | 昆山国显光电有限公司 | A kind of glass substrate electrostatic removal device and display floater detecting system |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014015485A1 (en) * | 2012-07-25 | 2014-01-30 | 深圳市华星光电技术有限公司 | Device bearing apparatus |
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Address after: 9-2 Tangming Avenue, Guangming New District, Shenzhen City, Guangdong Province Applicant after: TCL Huaxing Photoelectric Technology Co.,Ltd. Address before: 9-2 Tangming Avenue, Guangming New District, Shenzhen City, Guangdong Province Applicant before: Shenzhen China Star Optoelectronics Technology Co.,Ltd. |
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