CN105817150A - Multi-gas rapid mixing device for special electronic vacuum equipment - Google Patents
Multi-gas rapid mixing device for special electronic vacuum equipment Download PDFInfo
- Publication number
- CN105817150A CN105817150A CN201610174998.6A CN201610174998A CN105817150A CN 105817150 A CN105817150 A CN 105817150A CN 201610174998 A CN201610174998 A CN 201610174998A CN 105817150 A CN105817150 A CN 105817150A
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- gas
- mixing
- mixed gas
- special
- gas tank
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/10—Mixing gases with gases
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
- B01F25/20—Jet mixers, i.e. mixers using high-speed fluid streams
- B01F25/21—Jet mixers, i.e. mixers using high-speed fluid streams with submerged injectors, e.g. nozzles, for injecting high-pressure jets into a large volume or into mixing chambers
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Arc Welding In General (AREA)
Abstract
The invention relates to a multi-gas rapid mixing device for special electronic vacuum equipment, in particular to a device which is suitable for working environments of vacuum coating, CVD vapor deposition, a vacuum furnace, plasma etching and semiconductor inert gas shielding encapsulation in which stable and uniform special gas needs to be charged, and belongs to the field of special electronic vacuum equipment.Multiple gases are charged into gas mixing tanks and then naturally mixed to be uniform to enter the equipment needing a special atmosphere, and the technological requirements of the equipment are met.The equipment mainly comprises the first gas mixing tank, the second gas mixing tank, a stainless steel gas inlet pipe and a stainless steel gas outlet pipe, has the advantages of being simple and reliable in structure, good in manufacturability and low in cost and has the extremely high technical and economical values.
Description
Technical field
The present invention relates to Electronic Special Equipment field; it is suitable for the working environment that vacuum coating, CVD vapour deposition, vacuum drying oven, plasma etching, quasiconductor inert gas shielding encapsulation etc. need to be filled with under stable and uniform special gas particularly to a kind of; equipment has simple and reliable for structure, good manufacturability, with low cost, has high technology and economic worth.
Background technology
Gas mixing apparatus is mainly used in the electrovacuum special equipments such as vacuum coating, CVD vapour deposition, plasma etching, quasiconductor noble gas encapsulation, multiple gases carries out mix homogeneously before entering the device, meets the special process demand of particular device.As: the uniform mixing gas mixtures such as argon, nitrogen, hydrogen need to be filled with during magnetic control sputtering vacuum coating, it is desirable near target surface, gas component difference is less, meets the concordance of plated film operating mode, and then guarantees the concordance of the workpiece thin film of the upper and lower clamping of workpiece plate.And gas mixer conventional at present mostly is traditional static mixer or the gas mixing device of built-in S baffle plate, such device is difficult to the high request meeting special process to gas component, is badly in need of that a kind of good manufacturability, with low cost, mixed gas is uniform, easy to connect and gastight gas mixing device.
Summary of the invention
For solving the technical problem that current existing gas mixing device exists, the present invention is by changing gas mixing device structure, realize three natural diffuseness of gas are mixed gas by input pipe, mixed gas tank I, mixed gas tank II before mixed gas, also gas tank can be mixed according to this invention tandem multi-stage, solve former tradition gas mixing device and mix the problem that gas is uneven, the special gas mixing device of technical matters economical uniform for a kind of gas with low cost, mixed of electrovacuum special equipment offer.
The technical scheme that the present invention is used for achieving the above object is: a kind of electrovacuum special equipment many gas mixing apparatus, it is characterized in that including: outlet tube after input pipe, mixing before mixed gas tank I, mixed gas tank II, mixing, all parts all use SUS304 high-quality Stainless Steel manufacture, use vacuum argon arc welding single face-formed technique welded seal, inside and outside electrochemical polishing treatment after having welded, rear use helium mass spectrometer leak detector carries out vacuum leak hunting, and leak rate must be better than 1X10-8Pa.L/S.nullAt air inlet pipe end, stainless steel tube personality card casing joint can be installed to be attached with external gas source，Also one or more threeway can be concatenated、The special cutting ferrule of four-way stainless steel tube enters in the front input pipe of mixing by multiple gases，Before mixing, input pipe end face argon arc welding blind flange seals，Gas can only diffuse to mixed gas tank I by the some apertures on stainless steel tube cylinder，The most mutually diffusive mixing has been carried out in gas input pipe before combination，Gas carries out the mixed gas of second time after diffusing to mixed gas tank I by the aperture of input pipe cylinder before mixing，Mixed gas tank II is entered by the hole of mixed gas tank I cylinder，After entering mixed gas tank II, gas carries out third time diffusive mixing，The gas of mixing is uniformly exported by outlet tube after mixing，Threeway can be concatenated at output pipe end according to equipment feature、Four-way stainless steel tube personality card bell and spigot joint，Divide gas to the ad-hoc location of electrovacuum special equipment，Meet the special process demand of equipment.
Preferably, described device feature all uses SUS304 high-quality rustless steel manufacture, and carries out the electrochemical polishing treatment of surfaces externally and internally, and to reach after gas enters gas mixing device, gas all can natural flow and diffusion.
Preferably, described device feature uses vacuum argon arc welding to form, and its leak rate is better than 1X10-8Pa.L/S.
Preferably, the end blind flange of described device input pipe before combination seals, caliber cylinder arranges one or more apertures, gas enters mixed gas tank I by cylinder aperture, mixed gas tank II is entered afterwards by the hole on mixed gas tank I cylinder, afterwards by the gas of outlet tube output mix homogeneously after mixing, one or more blending tank can be set according to gas flow and the uniform actual demand of mixed gas.
Preferably, output and the input of described device mixing arrangement all use chemical polishing pipe inside and outside rustless steel, use personality card casing joint to reach gas not reveal, preventing traditional gas flexible pipe easy to fall off, rubber hose easily brings gas overflowing etc. to cause the danger of gas component the most pure and mild generation security incident simultaneously.
The method have the advantages that Novel electric vacuum special equipment many gas mixing apparatus of the present invention, multiple gases uniformly can be mixed, the gas source that component is consistent with flow is provided for electrovacuum special equipment intracavity, meet the particular demands of technique, product rejection is greatly lowered, improve conforming product rate, guarantee the concordance of same lots processed properties of product, use rustless steel inside and outside polishing pipe as the input/output port of gas simultaneously, use personality card sleeve pipe, be possible to prevent tradition flexible pipe in use come off and the flexible pipe gas that brings of venting is impure, development to product has undesirable effect, security incident is even caused to endanger.
Accompanying drawing explanation
Fig. 1 is cross-sectional view of the present invention:
In figure: 1-mixes input pipe before gas；；2-mixes input pipe end face seal flange before gas；；3-mixes input pipe cylinder hole before gas；4-mixes gas tank I；5-mixes gas tank I cylinder hole；6-mixes gas tank II；7-mixes outlet tube after gas.
Detailed description of the invention
Before multiple gases enters mixed gas, the most mixed gas is passed through in input pipe (1) internal phase counterdiffusion mixing；After mixed gas, before overmulling gas, input pipe cylinder hole (3) diffuses into mixed gas tank I(4) carry out the mixed gas of second time；Mixed gas diffuses to mixed gas tank II(6 by mixed gas tank I cylinder hole) carry out third time diffusive mixing, mix homogeneously gas outlet tube (7) after overmulling gas is transported to the optional position that equipment needs, according to equipment desired gas flow adjusting pipe diameter, tank diameter, pipe and tank cylinder gas overflowing aperture, whether meeting equipment particular requirement according to gas mixing can also increase suit air accumulator quantity.
The above; it is only the present invention preferably detailed description of the invention; but protection scope of the present invention is not limited to this; any those familiar with the art is in the technical scope of present disclosure; according to technical solution of the present invention and conceive equivalent or change in addition, all should be within protection scope of the present invention.
Claims (5)
1. electrovacuum special equipment many gas mixing apparatus, it is characterized in that including: outlet tube after input pipe, mixing before mixed gas tank I, mixed gas tank II, mixing, all parts all use SUS304 high-quality Stainless Steel manufacture, use vacuum argon arc welding single face-formed technique welded seal, inside and outside electrochemical polishing treatment after having welded, rear use helium mass spectrometer leak detector carries out vacuum leak hunting, and leak rate must be better than 1X10-8nullPa.L/S，At air inlet pipe end, stainless steel tube personality card casing joint can be installed to be attached with external gas source，Also one or more threeway can be concatenated、The special cutting ferrule of four-way stainless steel tube enters in the front input pipe of mixing by multiple gases，Before mixing, input pipe end face argon arc welding blind flange seals，Gas can only diffuse to mixed gas tank I by the some apertures on stainless steel tube cylinder，The most mutually diffusive mixing has been carried out in gas input pipe before combination，Gas carries out the mixed gas of second time after diffusing to mixed gas tank I by the aperture of input pipe cylinder before mixing，Mixed gas tank II is entered by the hole of mixed gas tank I cylinder，After entering mixed gas tank II, gas carries out third time diffusive mixing，The gas of mixing is uniformly exported by outlet tube after mixing，Threeway can be concatenated at output pipe end according to equipment feature、Four-way stainless steel tube personality card bell and spigot joint，Divide gas to the ad-hoc location of electrovacuum special equipment，Meet the special process demand of equipment.
A kind of electrovacuum special equipment many gas mixing apparatus the most according to claim 1, its special type is that all parts all use SUS304 high-quality rustless steel manufacture, and carry out the electrochemical polishing treatment of surfaces externally and internally, after reaching gas entrance gas mixing device, gas all can natural flow and diffusion.
A kind of electrovacuum special equipment many gas mixing apparatus the most according to claim 1, it is characterised in that all parts use vacuum argon arc welding to form, and its leak rate is better than 1X10-8Pa.L/S.
A kind of electrovacuum special equipment many gas mixing apparatus the most according to claim 1, it is characterized in that the end blind flange of input pipe before combination seals, caliber cylinder arranges one or more apertures, gas enters mixed gas tank I by cylinder aperture, mixed gas tank II is entered afterwards by the hole on mixed gas tank I cylinder, afterwards by the gas of outlet tube output mix homogeneously after mixing, the mixed gas tank of one or more similar inventive structure can be set with mixed gas actual effect according to gas flow.
A kind of electrovacuum special equipment many gas mixing apparatus the most according to claim 1, it is characterized in that output and the input of mixing arrangement all use chemical polishing pipe inside and outside rustless steel, use personality card casing joint to reach gas not reveal, preventing traditional gas flexible pipe easy to fall off, rubber tube can bring gas overflowing etc. to cause the danger of gas component the most pure and mild generation security incident simultaneously.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610174998.6A CN105817150A (en) | 2016-03-25 | 2016-03-25 | Multi-gas rapid mixing device for special electronic vacuum equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610174998.6A CN105817150A (en) | 2016-03-25 | 2016-03-25 | Multi-gas rapid mixing device for special electronic vacuum equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105817150A true CN105817150A (en) | 2016-08-03 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610174998.6A Pending CN105817150A (en) | 2016-03-25 | 2016-03-25 | Multi-gas rapid mixing device for special electronic vacuum equipment |
Country Status (1)
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| CN (1) | CN105817150A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107321203A (en) * | 2017-09-06 | 2017-11-07 | 国网黑龙江省电力有限公司电力科学研究院 | The gas mixer of nitrogen and sulfur hexafluoride |
| CN107802441A (en) * | 2017-10-30 | 2018-03-16 | 潍坊潍医医院 | A kind of medical oxygen cabinet with plateau analog functuion |
| CN113186518A (en) * | 2021-04-29 | 2021-07-30 | 河南芯钻新材料有限公司 | Gas mixing device |
-
2016
- 2016-03-25 CN CN201610174998.6A patent/CN105817150A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107321203A (en) * | 2017-09-06 | 2017-11-07 | 国网黑龙江省电力有限公司电力科学研究院 | The gas mixer of nitrogen and sulfur hexafluoride |
| CN107802441A (en) * | 2017-10-30 | 2018-03-16 | 潍坊潍医医院 | A kind of medical oxygen cabinet with plateau analog functuion |
| CN113186518A (en) * | 2021-04-29 | 2021-07-30 | 河南芯钻新材料有限公司 | Gas mixing device |
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Application publication date: 20160803 |