CN208655583U - A kind of gas supply device - Google Patents
A kind of gas supply device Download PDFInfo
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- CN208655583U CN208655583U CN201821192419.1U CN201821192419U CN208655583U CN 208655583 U CN208655583 U CN 208655583U CN 201821192419 U CN201821192419 U CN 201821192419U CN 208655583 U CN208655583 U CN 208655583U
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Abstract
The utility model provides a kind of gas supply device.In gas supply device, it is provided with the pipe branch connecting with the first gas source receiving portion and the pipe branch for connecting with the second gas source supply equipment, so that gas supply device can be not only used for supply first gas, to constitute independent gas supply device, and a gas delivery channels are also used as conveying second gas.When the gas supply device in the utility model is applied in semiconductor producing system, it can be directly that production equipment carries out gas switching using gas supply device, it is dismounted again without the gas pipeline to production equipment, the problem of gas pipeline of production equipment is easily contaminated is effectively prevented, and the gas pipeline dismounting spent time can be saved.
Description
Technical field
The utility model relates to manufacturing technology field, in particular to a kind of gas supply device.
Background technique
In the art of semiconductor manufacturing, it needs to carry out the processing and manufacturing of semiconductor product using production equipment, and is holding
During the corresponding technique of row, usually also need to provide corresponding production gas for production equipment.Wherein, institute in semiconductors manufacture
The production gas needed is usually to draw from a gas feed end, and be further delivered in production equipment.And in gas
There are a variety of production gases, to meet in semiconductor production process the needs of to not cogenetic gas gas in feed end.
Based on the production requirement of semiconductor product mass production, for same manufacturing process, more phases are usually utilized
Same production equipment is fabricated, to guarantee the throughput requirements of semiconductor product, at this point, needing for more identical lifes
It produces equipment and identical process gas is provided.Certainly, for different manufacturing process, corresponding production equipment may also be needed
Identical production gas is used, is needed accordingly at this time using gas feed end while being more corresponding different process processing procedures
Production equipment provides identical production gas.
Fig. 1 is a kind of existing structural schematic diagram of semiconductor producing system, as shown in Figure 1, the semiconductor production system
System includes:
Gas feed end 1, for supplying one or more production gases；
It is secondary to match clack box 2, it is connect with gas feed end 1, for receiving production gas and production gas being carried out secondary point
It is assigned in each production equipment；
Production equipment end 3, has a more production equipments, and more production equipments be connected to it is described secondary with clack box 2,
Gas is produced for receiving.
As shown in Figure 1, then a kind of production gas need to correspond to configuration when having a variety of production gases in gas feed end 1
One is matched clack box, such as clack box is matched in the corresponding configuration first of the first production gas, and clack box is matched in the corresponding configuration second of the second production gas
Deng so that various production gases are delivered in each production equipment via corresponding with clack box.
However, being based on existing semiconductor producing system, commented when needing the test gas newly introduced to one kind to carry out test
When estimating, then the setting accordingly in gas feed end 1 is needed to be used to accommodate the receiving component for testing gas, and it also requires corresponding
Addition one is secondary to match clack box, leads to the increase of cost.Meanwhile during the test, it is also necessary to the flue of production equipment
Road carries out pipeline switching, to switch to the secondary with clack box of corresponding test gas, and by pole in the disassembly process of gas pipeline
The gas pipeline for easily leading to production equipment is contaminated, and the disassembly process of gas pipeline also needs to take a substantial amount of time.
Utility model content
The purpose of this utility model is to provide a kind of gas supply devices, flexible with the supply for improving production gas
Property, and can easily switch different production gas.
In order to solve the above technical problems, the utility model provides a kind of gas supply device, including for accommodating the first gas
First gas source receiving portion of body and the gas transmission pipeline for conveying gas；Wherein,
The gas transmission pipeline has multiple pipe branch, comprising:
One first pipe branch connect with the first gas source receiving portion, for drawing the first gas source supply arrangement
In first gas；
One second pipe branch is set for being connected to one second gas source supply arrangement with conveying the second gas source supply
Second gas in standby；And
One third pipe branch, for being connected to a gas receiving device, to convey gas for the gas receiving device；
Wherein, the first pipe branch and the second pipe branch are connected to the third pipe branch, with
It is set in the first gas in the first pipe branch is delivered to the gas reception via the third pipe branch
It is standby；Alternatively, for the second gas in the second pipe branch to be delivered to gas via the third pipe branch
Receiving device.
Optionally, the gas transmission pipeline further include:
Pipe branch is cleaned, for being connected to a clean gas supply unit to provide a clean gas, the gas conveying
Each pipe branch in pipeline is connected to the cleaning pipe branch；When the gas to the gas supply device is defeated
When pipeline being sent to carry out cleaning maintenance, the clean gas enters in each pipe branch via the cleaning pipe branch,
To carry out duct cleaning.
Optionally, it is provided with the first valve member in the first pipe branch, is provided with second in the second pipe branch
Valve member is provided with third valve member on the third pipe branch；Wherein,
When the gas supply device is that the gas receiving device supplies the first gas using the first gas source receiving portion
When body, first valve member and the third valve member are opened so that the first gas of the first gas source receiving portion by
The first pipe branch leads to the third pipe branch, and is delivered to the gas receiving device；And
It is used to supply for the gas receiving device when the gas supply device is connected to the second gas source supply arrangement
When second gas, second valve member and the third valve member are opened, and first valve member is closed, to obstruct first gas
The first gas in the receiving portion of source, and make the second gas of the second gas source supply arrangement by the second pipe
Branch leads to the third pipe branch, and is delivered to the gas receiving device.
Optionally, the gas transmission pipeline further include:
4th pipe branch is connected between the second pipe branch and the third pipe branch, and with described
One pipe branch is crossed jointly to the third pipe branch, for passing through the second gas in the second pipe branch
It is delivered in third pipe branch by the 4th pipe branch.
Optionally, the 4th valve member is provided on the 4th pipe branch；Wherein,
When the gas supply device supplies first gas, the 4th valve member is closed, to obstruct the second gas；
And
When the gas feeding mechanism conveys second gas, second valve member, the third valve member and the 4th valve
Part is opened, so that the second gas of the second gas source supply arrangement is by the second pipe branch via the described 4th
Pipe branch is input in the third pipe branch.
Optionally, the 4th pipe branch is arranged in close to the end of the third pipe branch in the 4th valve member
On.
Optionally, the gas transmission pipeline further include:
Exhaust pipe branch is connected to the second pipe branch, and the exhaust pipe branch is also used to be connected to
One vent gas treatment portion, for by the gas in the second pipe branch via the exhaust pipe multi-branch transport to the tail gas
Processing unit, to carry out vent gas treatment to the residual gas in the second pipe branch.
Optionally, it is additionally provided with an aspiration pump between the exhaust pipe branch and the vent gas treatment portion, for taking out
Take the residual gas in the second pipe branch and the exhaust pipe branch.
Optionally, the 5th valve member is provided in the exhaust pipe branch；Wherein,
When the gas supply device supplies first gas, the 4th valve member is closed, second valve member and described
5th valve member is opened, and the gas in the second pipe branch is introduced in the exhaust pipe branch, carries out tail gas
Processing；And
When the gas supply device conveys second gas, the 5th valve member is closed, to obstruct the second gas
It enters in the vent gas treatment portion.
Optionally, the gas supply device further include:
One pressure gauge is arranged on the gas transmission pipeline, and by opening or closing in the gas transmission pipeline
Each valve member, pressure test is carried out with each pipe branch to the gas transmission pipeline, for each pipe branch
Carry out gas leakage detecting.
The gas supply device further include:
The lower section of the first gas source receiving portion is arranged in one poidometer, for incuding the first gas source receiving portion
Weight.
Optionally, the gas supply device further includes a shell, the first gas source receiving portion and gas conveying
Pipeline is arranged in the internal chamber of the shell, and the second pipe branch and institute in the gas transmission pipeline
It states third pipe branch part and extends the shell, for being respectively connected to the second gas source supply arrangement and the gas
Body receiving device.
Optionally, it is additionally provided with air ventilation passage, the air ventilation passage and the shell on the housing
The internal chamber connection, and it is connected to gas leakage detecting part, it is accommodated for first gas source intracorporal to the shell
Portion and the gas transmission pipeline carry out gas leakage detecting.
Optionally, the gas supply device further includes removable bearing seat, the first gas source receiving portion and the gas
Body conveyance conduit is arranged on the removable bearing seat, for being constituted removable gas supply device.
In gas supply device provided by the utility model, it is not provided only with the pipeline connecting with the first gas source receiving portion
Branch is additionally provided with the pipe branch for connecting with the second gas source supply equipment, to make gas supply device not only can be with
For supplying first gas, to constitute independent gas supply device, and can also be using the gas supply device as one
Gas delivery channels, for conveying second gas.And in the switching conveying for realizing first gas and second gas, also only need
The process of gas switching is enormously simplified by the switching of pipe branch, and advantageously reduce the time of gas switching.
It, on the one hand can be by gas when gas supply device provided by the utility model is applied in semiconductor producing system
Body feeding mechanism can also be on the other hand the independent supply of production equipment using gas supply device as a bailout gas
Different gas.For example, realizing test gas when using gas supply device supply test gas and producing cutting for gas
When changing, it is only necessary to switch over to the pipe branch of gas supply device, be carried out without the gas pipeline to production equipment
Dismounting avoids the problem of gas pipeline of production equipment is easily contaminated, and can save spent by gas pipeline dismounting
Time.
Detailed description of the invention
Fig. 1 is a kind of existing structural schematic diagram of semiconductor producing system；
Fig. 2 is the structural schematic diagram of the gas supply device in the utility model embodiment one；
Fig. 3 a is that the gas supply device in the utility model embodiment one is being that gas connects using the first gas source receiving portion
Receiving unit supplies gas flow schematic diagram when first gas；
Fig. 3 b is that the gas supply device in the utility model embodiment one is connected to the second gas source supply arrangement for being gas
Body receiving device supplies gas flow schematic diagram when second gas；
Fig. 3 c is that its gas transmission pipeline of gas supply device in the utility model embodiment one is carrying out cleaning maintenance
When gas flow schematic diagram；
Fig. 4 is the structural schematic diagram of the semiconductor producing system in the utility model embodiment two；
Fig. 5 is the company of semiconductor producing system its gas supply device and production equipment in the utility model embodiment two
Connect schematic diagram.
Wherein, appended drawing reference is as follows:
1- gas feed end；
2- bis- times with clack box；
3- production equipment end；
100- gas supply device；
11- first pipe branch；12- second pipe branch；
13- third pipe branch；The 4th pipe branch of 14-；
15- exhaust pipe branch；16- cleans pipe branch；
The first valve member of V1-；The second valve member of V2-；
V3- third valve member；The 4th valve member of V4-；
The 5th valve member of V51/V52-；The 6th valve member of V6-；
20- the first gas source receiving portion；
30- pressure gauge；
40- poidometer；
50- shell；
51- air ventilation passage；
60- moves bearing seat；
200- gas feed end；
300- production equipment end；
310- production equipment；
400- bis- times with clack box.
Specific embodiment
Below in conjunction with the drawings and specific embodiments to the utility model proposes gas supply device make further specifically
It is bright.According to following explanation, will be become apparent from feature the advantages of the utility model.Simplify very much it should be noted that attached drawing is all made of
Form and use non-accurate ratio, only to it is convenient, lucidly aid in illustrating the purpose of the utility model embodiment.
Embodiment one
Fig. 2 is the structural schematic diagram of the gas supply device in the utility model embodiment one, as shown in Fig. 2, the gas
Body feeding mechanism 100 includes the first gas source receiving portion 20 for accommodating first gas and the gas conveying for conveying gas
Pipeline.
Wherein, the gas transmission pipeline has multiple pipe branch, comprising:
One first pipe branch 11 connect with the first gas source receiving portion 20, for drawing the first gas source supply
First gas in equipment；
One second pipe branch 12, for being connected to one second gas source supply arrangement, to convey the second gas source supply
Second gas in equipment；And
One third pipe branch 13, for being connected to a gas receiving device, to convey gas for the gas receiving device
Body.
Wherein, the first pipe branch 11 and the second pipe branch 12 are connected to the third pipe branch
13, for the first gas in the first pipe branch 11 to be delivered to gas via the third pipe branch 13
Receiving device；Alternatively, being used for the second gas in the second pipe branch 12 via the third pipe branch 13
It is delivered to gas receiving device.
Specifically, when being that the gas receiving device supplies first gas using the first gas source receiving portion 20,
Then the first pipe branch 11 is activated, so that the first gas is delivered to described via the first pipe branch 11
In three pipe branch 13；And when utilization the second gas source supply arrangement is that the gas receiving device supplies second gas
When, then the second pipe branch 12 is activated, so that the second gas is delivered to institute via the second pipe branch 12
It states in third pipe branch 13.
That is, holding in the gas supply device 100 due to not being provided only with the first gas source of connection in gas transmission pipeline
It receives the first pipe branch 11 in portion 20, is additionally provided with the second pipe branch 12 for connecting the second gas source supply arrangement.So
One, by switching over to different pipe branch, the switching of different production gases can be realized, so as to easily be
Gas receiving device conveys different gas.
It is believed that gas supply device 100 can be independently gas receiving device supply first gas.With it is traditional
Gas supply system is compared, in the present embodiment when gas supply device 100 is that gas receiving device supplies first gas, not
It needs to accommodate component in the additional setting of gas feed end, and then does not also need additionally to configure secondary with clack box, be conducive to save
Cost.In addition, the gas supply device 100 is also used as a gas delivery channels, for gas receiving device conveying the
Two gases, and only need to can be realized the switching of gas with various by the switching of pipe branch, effectively prevent gas recharge
And gas transmission pipeline is adversely affected, and gas transmission pipeline cleanliness can be prevented to be contaminated.Meanwhile carrying out gas
When body switches, the dismounting for carrying out gas pipeline is not needed, the time of gas switching is greatly reduced yet.
With continued reference to shown in Fig. 2, valve member is also respectively provided on each pipe branch of the gas transmission pipeline.Specifically
, the first valve member V1 is provided in the first pipe branch 11, for conveying or obstructing in the first gas source receiving portion 20
First gas.It is provided with the second valve member V2 in the second pipe branch 12, is supplied for conveying or obstructing second gas source
Answer the second gas in equipment.And third valve member V3 is provided on the third pipe branch 13, by opening the third
Valve member V3 can provide gas for gas receiving device.
Therefore, it when gas receiving device needs are switched to second gas by first gas, or needs by second gas
When being switched to first gas, then the switching of gas can be thus achieved by adjusting corresponding valve member.
Fig. 3 a is that the gas supply device in the utility model embodiment one is being that gas connects using the first gas source receiving portion
Receiving unit supplies gas flow schematic diagram when first gas, and Fig. 3 b is the gas supply device in the utility model embodiment one
Be connected to the second gas source supply arrangement for for gas receiving device supply second gas when gas flow schematic diagram.
Referring initially to shown in Fig. 3 a, when the gas supply device 100 is described using the first gas source receiving portion 20
When gas receiving device supplies first gas, then the first valve member V1 and the third valve member V3 are opened, so that described the
The first gas in one gas source receiving portion 20 leads to the third pipe branch 13 by the first pipe branch 11, and
It is delivered to the gas receiving device.
Referring next to shown in Fig. 3 b, when the gas supply device 100 is connected to the second gas source supply arrangement for being
When the gas receiving device conveying second gas, the second valve member V2 and the third valve member V3 are opened, and described first
Valve member V1 is closed, and to obstruct the first gas in the first gas source receiving portion 20, and sets the second gas source supply
The standby second gas leads to the third pipe branch 13 by the second pipe branch 12, and is delivered to the gas
Receiving device.
Further, the first valve member V1 of the first pipe branch 11 is preferably close to the third pipe branch
The first pipe branch 11 is arranged on the end of the third pipe branch 13 in 11 settings, i.e. the first valve member V1.Such as
This one, when gas receiving device needs second gas is switched to by first gas when, the first valve member V1 close, at this time first pipe
In the end being still connected in road branch 11 with third pipe branch 13, the content of remaining first gas is less, is easily handled.
And when gas transmission pipeline be gas receiving device convey second gas when, also can avoid second gas largely pour into
In the first pipe branch 11, it is beneficial to prevent the problem of different gas interferes with each other.
With continued reference to shown in Fig. 2, Fig. 3 a and Fig. 3 b, the gas transmission pipeline further includes the 4th pipe branch 14.It is described
4th pipe branch 14 is connected between the second pipe branch 12 and the third pipe branch 13, and is managed with described first
Road branch 11 is crossed jointly to the third pipe branch 13, for by the second gas in the second pipe branch 12
It is delivered in third pipe branch 13 via the 4th pipe branch 14.
That is, in the present embodiment, when first pipe branch 11 and third pipe branch 13 are interconnected, then for cooperating conveying
First gas and constitute first gas dispatching channel；The second pipe branch 12, the 4th pipe branch 14 and third pipeline point
When branch 13 is interconnected, then second gas dispatching channel is constituted for cooperating conveying second gas.It is to be understood that described
Two pipe branch 12 are connected to the third pipe branch 13 via the 4th pipe branch 14.
In preferred embodiment, it is provided with the 4th valve member V4 on the 4th pipe branch 14, for being connected to or obstructing described
Two pipe branch 12 and the third pipe branch 13.That is, then second pipe branch 12 can be with when the 4th valve member 14 is opened
It is connected to third pipe branch 13, the gas in second pipe branch 12 can at this time be circulated in third pipe branch 13；When
When 4th valve member 14 is closed, then third pipe branch 13 and second pipe branch 12 are mutually separated, at this time second pipe branch 12
In gas can not be circulated in third pipe branch 13.
Specifically, being gas receiving device supply using the first gas source receiving portion 20 with reference to shown in Fig. 3 a
When first gas, the 4th valve member V4 is closed, to obstruct the second gas.And with reference to shown in Fig. 3 b, when the gas
Feeding mechanism 100 be connected to the second gas source supply arrangement for for the gas receiving device conveying second gas when, it is described
Second valve member V2, the third valve member V3 and the 4th valve member V4 are opened, so that the institute of the second gas source supply arrangement
It states second gas and is input to the third pipe branch 13 via the 4th pipe branch 14 by the second pipe branch 12
In.
It is understood that by adjusting on the first valve member V1 and the 4th pipe branch 14 in first pipe branch 11
The second gas in the first gas and the second gas source supply arrangement in the first gas source receiving portion 20 may be implemented in 4th valve member V4
Between switching.
In preferred scheme, the 4th valve member V4 setting is in the 4th pipe branch 14 close to the third pipeline point
On the end of branch 13.As described above, the 4th pipe branch 14 and the first pipe branch 11 are crossed jointly to described
Three pipe branch 13, thus the 4th pipe branch 14 close to the end of third pipe branch 13 also with the first pipe branch 11
Connection is based on this, by being arranged the 4th valve member V4 in the 4th pipe branch 14 close to the third pipe branch
On 13 end, then it can effectively avoid a large amount of recharge of first gas in first pipe branch 11 to the 4th pipe branch
In 14.Specifically, first gas is turned from first pipe branch 11 when providing first gas using the first gas source receiving portion 20
Enter into third pipe branch 13, at this time since only end is connected to third pipe branch 13 in the 4th pipe branch, only
Remain in the 4th pipe branch with a small amount of first gas, subsequent processing procedure can't be impacted.
With continued reference to shown in Fig. 2, Fig. 3 a and Fig. 3 b, the gas transmission pipeline further includes exhaust pipe branch 15.It is described
Exhaust pipe branch 15 is connected to the second pipe branch 12, and the exhaust pipe branch 15 is also used to be connected to a tail
Gas disposal portion, for the gas in the second pipe branch 12 to be transmitted to the tail via the exhaust pipe branch 15
Gas disposal portion, to carry out vent gas treatment to the residual gas in the second pipe branch 12.
Further, the 4th pipe branch 14 is also connected to the exhaust pipe branch 15, i.e., described 4th pipeline
Branch 14 is connected to the exhaust pipe branch 15 in the end close to second pipe branch 12.It is thereby also possible to by described
Gas in four pipe branch 14 is transmitted to the vent gas treatment portion via the exhaust pipe branch 15, to the 4th pipe
Residual gas in road branch 14 carries out vent gas treatment.
It should be noted that carrying out tail gas to second pipe branch 12, the 4th pipe branch 14 and exhaust pipe branch 15
The process of processing is e.g. executed when supplying first gas using the first gas source receiving portion 20, so as to ensure not
When supplying second gas, non-remnants have other gases in second pipe branch 12 and the 4th pipe branch 14, and maintain preferably
Cleannes and vacuum degree.In this way, need to provide gas using second pipe branch 12 and the 4th pipe branch 14 subsequent
When body, it can be ensured that provided gas is not contaminated；And since pipe branch maintains preferable vacuum degree, so as to
Enough realize being switched fast for gas.
In optional scheme, a pumping is also provided between the exhaust pipe branch 15 and the vent gas treatment portion
Pump, to extract the second pipe branch 12, the 4th pipe branch 14 and the exhaust pipe branch 15 using the aspiration pump
The gas of middle remnants, and further keep the vacuum degree of pipe branch.
It should be noted that the total length of second pipe branch 12 and the 4th pipe branch 14 is greater than institute in the present embodiment
State the length of first pipe branch 11.Also, second pipe branch 12 is for connecting the first gas outside gas supply device
Source supply equipment can provide multiple gases in the first gas source supply equipment, i.e. second pipe branch 12 may be to be used for transmission
Different gas, therefore when remnants have gas in second pipe branch 12 and the 4th pipe branch 14, it is easy to cause different gas
Pollution problem between body.
Further, it is provided with the 5th valve member V51/V52 in the exhaust pipe branch 15, it is described for being connected to or obstructing
Second pipe branch 12 and the vent gas treatment portion.
With continued reference to shown in Fig. 3 a, when being gas receiving device supply first using the first gas source receiving portion 20
When gas, the 4th valve member V4 is closed, and the second valve member V2 and the 5th valve member V5 are opened, described second managed
Gas in road branch 12 is introduced in the exhaust pipe branch 15, to carry out vent gas treatment.
When the gas supply device 100 be connected to the second gas source supply arrangement for for the gas receiving device it is defeated
When sending second gas, then the 5th valve member V5 is closed, and is entered in the vent gas treatment portion with obstructing the second gas.
With continued reference to shown in Fig. 2, the gas supply device 100 further includes a pressure gauge 30, and the pressure gauge 30 is arranged
On the gas transmission pipeline, and by opening or closing each valve member in the gas transmission pipeline, to the gas
Each pipe branch of body conveyance conduit carries out pressure test, for carrying out gas leakage detecting to each pipe branch.
Specifically, when carrying out gas leakage detecting, it can be by the first valve member V1, the second valve member V2, third valve member V3 and the
Five valve member V52 are turned off, so that each valve member in gas transmission pipeline for obstructing external module is turned off, and by the 4th valve
Part V4 and the 5th valve member V5 are opened, so that each pipe branch in gas transmission pipeline is homogeneously intercommunicated, to constitute one
Inside communication channel, and the variation of the readings by observing the pressure gauge 30 judges the gas transmission pipeline with the presence or absence of gas
Leakage.
In the present embodiment, pressure gauge 30 is arranged in the exhaust pipe branch 15.And due to exhaust pipe branch 15
Length it is longer, can be in the exhaust pipe point therefore can accurately to judge the leakage situation of exhaust pipe branch 15
The 5th valve member V51 and the 5th valve member V52 is respectively set on two opposite ends of branch 15, so as to by by the 5th valve member
V51 and the 5th valve member V52 are turned off, and judge that the exhaust pipe branch 15 whether there is according to the variation of the readings of pressure gauge 30
Gas leakage.
With continued reference to described in Fig. 2, the gas transmission pipeline further includes cleaning pipe branch 16, for being connected to a cleaning
Gas supply part is to provide a clean gas.Wherein, the clean gas feeding mechanism is, for example, nitrogen supply (NS) device, for mentioning
For nitrogen (N2).When the gas transmission pipeline to the gas supply device 100 carries out cleaning maintenance, can make described
Clean gas enters in each pipe branch via the cleaning pipe branch 16, to carry out duct cleaning.
Further, it is provided with the 6th valve member V6 on the cleaning pipe branch 16, by controlling the 6th valve member V6,
Clean gas can be enable to be circulated in each pipe branch of the gas transmission pipeline.
Fig. 3 c is that its gas transmission pipeline of gas supply device 100 in the utility model embodiment one is carrying out cleaning guarantor
Gas flow schematic diagram when supporting.Emphasis is with reference to Fig. 3 c and as shown in connection with fig. 2, in the present embodiment, the cleaning pipe branch 16
It is connect with the 4th pipe branch 14, and first pipe branch 11, second pipe branch 12, the third pipe branch 13
The cleaning pipe branch 16 is connected to by the 4th pipe branch 14 with the exhaust pipe branch 14.
When the gas transmission pipeline to the gas supply device 100 carries out cleaning maintenance, first valve member
V1, the second valve member V2, the third valve member V3, the 4th valve member V4 and the 5th valve member V51/V52 and described
Six valve member V6 are opened, so that the clean gas in the cleaning pipe branch 16 enters in each pipe branch, with
Carry out duct cleaning.Certainly, the second pipe branch 12 is not connected to the second gas source supply equipment, third pipe at this time
Road branch 13 is also not connected to the gas receiving device, can also remove the first gas source receiving portion 20 at this time, so that the first pipe
Road branch 11 is also not connected to the first gas source receiving portion 20.
With continued reference to shown in Fig. 2, the gas supply device 100 further includes a poidometer 40, and the poidometer 40 is arranged
In the lower section of the first gas source receiving portion 20, for incuding 20 weight of the first gas source receiving portion.By incuding described the
The weight of one gas source receiving portion 20, so as to know the content of first gas in the first gas source receiving portion 20, so as to
Gas source supplement is carried out timely to replace the first gas source receiving portion 20 or the first gas source receiving portion 20.
Further, the gas supply device 100 further includes a shell 50, the first gas source receiving portion 20 and described
Gas transmission pipeline is arranged in the internal chamber of the shell 50, and second pipe in the gas transmission pipeline
The shell 50 is extended in road branch 12 and 13 part of third pipe branch, for being respectively connected to second gas source
Supply arrangement and the gas receiving device.In the present embodiment, the exhaust pipe branch 15 also extends from the shell 50
Out, for being connected to the exhaust gas processing device.
With continued reference to shown in Fig. 2, air ventilation passage 51, the air ventilation passage are additionally provided on the shell 50
51 are connected to the internal chamber of the shell 50, and are connected to gas leakage detecting part, for in the shell 50
The first gas source receiving portion 20 and the gas transmission pipeline carry out gas leakage detecting.That is, when the first gas source receiving portion
20 and/or gas transmission pipeline there are when gas leakage, then there is leakage gas accordingly in the internal chamber of the shell 50
Body, the gas leakage can be detected by air ventilation passage 51 by gas leakage detecting part.
In preferred scheme, the gas supply device 100 further includes removable bearing seat 60, and first gas source accommodates
Portion 20 and the gas transmission pipeline are arranged on the removable bearing seat, so as to constitute removable gas supply dress
It sets, convenient for the removable gas supply device 100 to be directly moved to the gas receiving device for needing to connect, to be connect for gas
Receiving unit provides gas.In the present embodiment, the first gas source receiving portion 20 and the gas transmission pipeline are installed in the shell
In 50, and the shell 50 is arranged on the removable bearing seat 60.
Such as described in Fig. 2, the removable bearing seat 60 in the present embodiment includes pedestal and is mounted below the pedestal
Idler wheel, the shell 50 is placed on the base, to realize the movement of removable gas supply device by idler wheel.
Embodiment two
In the present embodiment, gas supply device as described above is applied in semiconductor producing system.Below to this reality
The semiconductor producing system applied in example is described, to further explain having for the gas supply device in the utility model
Beneficial effect.
Fig. 4 is the structural schematic diagram of the semiconductor producing system in the utility model embodiment two, described as shown in Fig. 4
Semiconductor producing system includes:
Production equipment end 300 has an at least production equipment；The production equipment is, for example, vapor deposition apparatus or quarter
Lose equipment etc.；
Gas feed end 200, for providing at least one production gas；And
Gas supply device 100 as described above, the gas supply device 100 are mounted on the production equipment end 300
Between the gas feed end 100, to convey the first gas in the gas supply device 100 for the production equipment,
Or the production gas supplied by the gas feed end 100 is conveyed for the production equipment.It is understood that the present embodiment
In gas feed end 100 may be considered and constitute the second gas source supply equipment described in embodiment one, and production gas
Body, which may be considered, constitutes second gas described in embodiment one.
In the present embodiment, the production equipment end 300 has more production equipments, including the first production equipment, the second life
Produce equipment and third production equipment.And the gas supply device 100 is only installed in third production equipment.However it should
It recognizes, in other embodiments, the gas supply device 100 can also be mounted in all production equipments.
With continued reference to shown in Fig. 4, the semiconductor producing system further include: it is secondary to match clack box 400, it is connected to the gas
Between feed end 200 and the production equipment end 300, and one of described gas feed end 200 production gas correspondence is matched
Set one it is described secondary with clack box 400, for carrying out secondary distribution to the production gas received and being delivered to more institutes respectively
State production equipment.In the present embodiment, a kind of production gas is only illustrated in gas feed end 200, therefore be correspondingly configured with one
It is a secondary with clack box.
Wherein, it is connected with the production equipment of the gas supply device 100, the secondary clack box 400 of matching passes through the gas
Body feeding mechanism 100 is connected to the production equipment.That is, one end of the gas supply device 100 is connected to described secondary match
Clack box 400, for receiving the production gas supplied by gas feed end 200.
It should be noted that the gas supply device 100 can be used for constituting the spare supply gas source of production equipment, this
First gas in Shi Suoshu gas supply device 100 can be same with the production gas phase of the gas feed end 200.Work as gas
When the production gas of feed end 200 exception occurs or needs to carry out the replacement maintenance of gas source receiving component, then it can enable described
Gas supply device 100 carries out gas supply to production equipment, so as to avoid in for example traditional semiconductor producing system
The a plurality of production equipment being correspondingly connected with caused by when gas feed end 200 stops supply gas is required to the problem of shutting down.
Certainly, the first gas supplied in the gas supply device 100 may also be distinct from that the gas feed end
Production gas in 200.It should be noted that described herein, " first gas in gas supply device is different from gas confession
The production gas of Ying Duanzhong " refers to: the component of first gas is different from the component of production gas；Alternatively, first gas and life
The component for producing gas is identical, but the gas source provided in the art of semiconductor manufacturing for different vendor, it usually needs carries out gas
The test of body performance can be supplied gas to be tested using gas supply device 100 at this time with judging whether to meet the requirements
To production equipment, it can think first gas relative to production gas for test gas.
In traditional semiconductor producing system, when needing to test test gas, then need to supply in gas
200 setting of end and it also requires corresponding configuration one is secondary to match clack box, and will be used for for accommodating the receiving component of test gas
The gas pipeline of the production equipment of test from it is original it is secondary removed with clack box, and install to corresponding the secondary of test gas and match valve
On case.It is easily contaminated however, not only resulting in gas pipeline in the disassembly process of gas pipeline, and dismounts flue
Road can also take considerable time, influence production capacity, while also resulting in the problem of gas with various interferes with each other in gas pipeline.
Compared to traditional semiconductor producing system, test gas is accommodated using gas supply device 100 in the present embodiment
Body accommodates component without being additionally arranged in gas feed end 200, and does not also need to add secondary with clack box.Also,
When realizing the switching of the test gas produced in gas and gas supply device 100 in gas feed end 200, gas can be passed through
The switching of pipe branch in feeding mechanism 100 can be thus achieved, without dismounting to pipeline, so as to avoid pipe
The problem of road is contaminated, and the time of gas switching can be greatlyd save.
Fig. 5 is the company of semiconductor producing system its gas supply device and production equipment in the utility model embodiment two
Connect schematic diagram.As shown in figure 5, the production equipment 510 includes:
One process cavity is delivered the gas in the process cavity using the gas supply device 100；
One aspiration pump is connect with the process cavity, for extracting the gas in the process cavity；
One vent gas treatment portion, connect with the aspiration pump, for handling the gas extracted from the process cavity.
In the present embodiment, the exhaust pipe branch 15 in the gas supply device 100 is connected to the aspiration pump, with benefit
The residual gas in the section of tubing branch of the gas supply device 100 is extracted with the aspiration pump, and utilizes the tail gas
The gas that processing unit processing is extracted from the gas supply device 100.Also, it is filled when supplying gas supply for production equipment
When setting first gas (for example, test gas) in 100, for conveying in gas feed end 200 in gas supply device 100
The pipe branch of gas is produced, then keeps vacuum degree using aspiration pump.In this way, when carrying out gas switching, due to
The pipe branch of production gas in conveying gas feed end 200 has certain vacuum degree, so as to make production equipment
Fast fast reset machine, the time that reduction production equipment is answered a pager's call.
Further, the production equipment 510 a further include: gas leaks detecting part, for the production equipment 510
Carry out gas leakage detecting.Specifically, process cavity in the production equipment and the gas being connect with the process cavity
Body pipeline is arranged in a cabinet body, gas leakage detecting part be used for in cabinet body process cavity and with the technique
The gas pipeline of cavity connection carries out gas leakage detecting.
In the present embodiment, the gas supply device 100 has a shell and the gas being connected to shell circulation logical
Road 17, the air ventilation passage 17 are connected to the gas leakage detecting part, to leak detecting part to institute using the gas
It states gas supply device 100 and carries out gas leakage detecting.
As it can be seen that by the way that aspiration pump, vent gas treatment portion and the gas in production equipment 510 are leaked detecting part and gas supply
Device 100 shares, and without additionally configuration aspiration pump, vent gas treatment portion and gas leak detecting part again, is conducive to save
Cost.
In conclusion gas supply device provided by the utility model, not only can be independently that gas receiving device supplies
First gas is answered, the second gas by supplying in the second gas source supply equipment can also be conveyed using gas supply device.Quite
In on the one hand the gas supply device can be used as independent gas supply device, be on the other hand also used as the second gas
The transfer passage of body.Also, it can directly be greatly simplified by the switching of pipe branch with realizing the switching between gas with various
The handoff procedure of gas is conducive to the time for reducing gas switching.
It, can be directly sharp when being production equipment supply gas or being production equipment transmission gas using gas supply device
It is that production equipment carries out gas switching with gas supply device, dismounts, have again without the gas pipeline to production equipment
Effect avoids the problem of gas pipeline of production equipment is easily contaminated, and can save gas pipeline dismounting it is spent when
Between.
Each embodiment in this specification is described in a progressive manner, the highlights of each of the examples are with other
The difference of embodiment, the same or similar parts in each embodiment may refer to each other.
Foregoing description is only the description to the utility model preferred embodiment, not to any limit of the scope of the utility model
Fixed, any change, the modification that the those of ordinary skill in the utility model field does according to the disclosure above content belong to right and want
Seek the protection scope of book.
Claims (14)
1. a kind of gas supply device, which is characterized in that including the first gas source receiving portion for accommodating first gas and be used for
Convey the gas transmission pipeline of gas；Wherein,
The gas transmission pipeline has multiple pipe branch, comprising:
First pipe branch, for being connect with the first gas source receiving portion, to draw in the first gas source supply arrangement
First gas；
Second pipe branch, for being connected to one second gas source supply arrangement, to convey in the second gas source supply arrangement
Second gas；And
Third pipe branch, for being connected to a gas receiving device, to convey gas for the gas receiving device；
Wherein, the first pipe branch and the second pipe branch are connected to the third pipe branch, for inciting somebody to action
The first gas in the first pipe branch is delivered to the gas receiving device via the third pipe branch；Or
Person sets for the second gas in the second pipe branch to be delivered to gas reception via the third pipe branch
It is standby.
2. gas supply device as described in claim 1, which is characterized in that the gas transmission pipeline further include:
Pipe branch is cleaned, for being connected to a clean gas supply unit to provide a clean gas, the gas transmission pipeline
In each pipe branch be connected to the cleaning pipe branch；When the air shooter to the gas supply device
When road carries out cleaning maintenance, the clean gas via the cleaning pipe branch into each pipe branch, with into
Row duct cleaning.
3. gas supply device as described in claim 1, which is characterized in that be provided with the first valve in the first pipe branch
Part is provided with the second valve member in the second pipe branch, is provided with third valve member on the third pipe branch；Wherein,
When the gas supply device is that the gas receiving device supplies first gas using the first gas source receiving portion,
First valve member and the third valve member are opened, so that the first gas of the first gas source receiving portion is by described
One pipe branch leads to the third pipe branch, and is delivered to the gas receiving device；And
It is used for when the gas supply device is connected to the second gas source supply arrangement as gas receiving device supply second
When gas, second valve member and the third valve member are opened, and first valve member is closed, and are held with obstructing first gas source
The first gas received in portion, and make the second gas of the second gas source supply arrangement by the second pipe branch
The third pipe branch is led to, and is delivered to the gas receiving device.
4. gas supply device as described in claim 1, which is characterized in that the gas transmission pipeline further include:
4th pipe branch is connected between the second pipe branch and the third pipe branch, and is managed with described first
Road branch is crossed jointly to the third pipe branch, for by the second gas in the second pipe branch via institute
The 4th pipe branch is stated to be delivered in third pipe branch.
5. gas supply device as claimed in claim 4, which is characterized in that be provided with the 4th valve on the 4th pipe branch
Part；Wherein,
When the gas supply device supplies first gas, the 4th valve member is closed, to obstruct the second gas；With
And
When the gas supply device conveys second gas, second valve member, the third valve member and the 4th valve member
It opens, so that the second gas of the second gas source supply arrangement is by the second pipe branch via the 4th pipe
Road branch is input in the third pipe branch.
6. gas supply device as claimed in claim 5, which is characterized in that the 4th valve member is arranged in the 4th pipeline
Branch is on the end of the third pipe branch.
7. gas supply device as claimed in claim 5, which is characterized in that the gas transmission pipeline further include:
Exhaust pipe branch is connected to the second pipe branch, and the exhaust pipe branch is also used to be connected to a tail
Gas disposal portion, for by the gas in the second pipe branch via the exhaust pipe multi-branch transport to the vent gas treatment
Portion, to carry out vent gas treatment to the residual gas in the second pipe branch.
8. gas supply device as claimed in claim 7, which is characterized in that in the exhaust pipe branch and the vent gas treatment
An aspiration pump is additionally provided between portion, for extracting the residual gas in the second pipe branch and the exhaust pipe branch
Body.
9. gas supply device as claimed in claim 7, which is characterized in that be provided with the 5th valve in the exhaust pipe branch
Part；Wherein,
When the gas supply device supplies first gas, the 4th valve member is closed, second valve member and the described 5th
Valve member is opened, and the gas in the second pipe branch is introduced in the exhaust pipe branch, carries out vent gas treatment；
And
When the gas supply device conveys second gas, the 5th valve member is closed, and is entered with obstructing the second gas
Into the vent gas treatment portion.
10. gas supply device as claimed in claim 9, which is characterized in that the gas supply device further include:
Pressure gauge is arranged on the gas transmission pipeline, and each in the gas transmission pipeline by opening or closing
Valve member carries out pressure test with each pipe branch to the gas transmission pipeline, for carrying out gas to each pipe branch
Body leakage detecting.
11. gas supply device as described in claim 1, which is characterized in that the gas supply device further include:
The lower section of the first gas source receiving portion is arranged in one poidometer, for incuding the weight of the first gas source receiving portion.
12. gas supply device as described in claim 1, which is characterized in that the gas supply device further includes a shell, institute
It states the first gas source receiving portion and the gas transmission pipeline is arranged in the internal chamber of the shell, and the gas is defeated
The second pipe branch and third pipe branch part in pipeline is sent to extend the shell, for being separately connected
To the second gas source supply arrangement and the gas receiving device.
13. gas supply device as claimed in claim 12, which is characterized in that it is logical to be additionally provided with gas circulation on the housing
Road, the air ventilation passage are connected to the internal chamber of the shell, and are connected to gas leakage detecting part, are used for
The first gas source receiving portion intracorporal to the shell and the gas transmission pipeline carry out gas leakage detecting.
14. such as the described in any item gas supply devices of claim 1~13, which is characterized in that the gas supply device is also
Including moving bearing seat, the first gas source receiving portion and the gas transmission pipeline are arranged at the removable bearing seat
On, for being constituted removable gas supply device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821192419.1U CN208655583U (en) | 2018-07-24 | 2018-07-24 | A kind of gas supply device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821192419.1U CN208655583U (en) | 2018-07-24 | 2018-07-24 | A kind of gas supply device |
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| CN208655583U true CN208655583U (en) | 2019-03-26 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112212209A (en) * | 2019-07-09 | 2021-01-12 | 合肥晶合集成电路股份有限公司 | Gas supply device |
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2018
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112212209A (en) * | 2019-07-09 | 2021-01-12 | 合肥晶合集成电路股份有限公司 | Gas supply device |
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Address after: 230012 No.88, xifeihe Road, comprehensive bonded zone, Xinzhan District, Hefei City, Anhui Province Patentee after: Hefei crystal integrated circuit Co.,Ltd. Address before: 230012 No.88, xifeihe Road, comprehensive bonded zone, Xinzhan District, Hefei City, Anhui Province Patentee before: HEFEI JINGHE INTEGRATED CIRCUIT Co.,Ltd. |
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