JP2007015849A - Plate glass transfer device - Google Patents

Plate glass transfer device Download PDF

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JP2007015849A
JP2007015849A JP2005224029A JP2005224029A JP2007015849A JP 2007015849 A JP2007015849 A JP 2007015849A JP 2005224029 A JP2005224029 A JP 2005224029A JP 2005224029 A JP2005224029 A JP 2005224029A JP 2007015849 A JP2007015849 A JP 2007015849A
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plate
plate glass
hole
air
filter holder
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JP4166770B2 (en
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Hyo Jae Jung
孝才 鄭
Yokuki Lee
沃基 李
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TAESUNG ENGINEERING CORP
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TAESUNG ENGINEERING CORP
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • B65G49/069Means for avoiding damage to stacked plate glass, e.g. by interposing paper or powder spacers in the stack
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B35/00Transporting of glass products during their manufacture, e.g. hot glass lenses, prisms
    • C03B35/005Transporting hot solid glass products other than sheets or rods, e.g. lenses, prisms, by suction or floatation
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303Apparatus specially adapted to the manufacture of LCDs
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2203/00Indexing code relating to control or detection of the articles or the load carriers during conveying
    • B65G2203/02Control or detection
    • B65G2203/0208Control or detection relating to the transported articles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2207/00Indexing codes relating to constructional details, configuration and additional features of a handling device, e.g. Conveyors
    • B65G2207/40Safety features of loads, equipment or persons
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02Controlled or contamination-free environments or clean space conditions

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Manufacturing Optical Record Carriers (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a plate glass transfer device capable of keeping an air layer on a template in a uniform condition by exhausting air through an air layer relieving part in a lower part of the template smoothly. <P>SOLUTION: This plate glass transfer device is composed of a fan housing provided with a discharge fan 21a in its inside, an air chamber 22 arranged in an upper part of the fan housing and opening its upper face, a base plate 23 attached by adhering closely to an opened upper part of the air chamber 22 and forming a plurality of through holes, and a template part arranged on an upper face of the base plate 23. The template part is provided with a filter holder 52 arranged on each through hole of the base plate 23 and forming a through hole communicating with the through holes of the base plate 23 at the center, a filter 54 arranged in the through hole of the filter holder 52, and the plurality of templates 56 covering an upper face of the filter holder 52, forming an air discharge hole 56a corresponding to the through hole of the filter holder 52, and arranged separated from each other. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、板ガラス移送装置に関し、より詳しくは、片板の下部の空気層緩和部を通してエアを円滑に排出させることにより、片板上の空気層を均一に保てる板ガラス移送装置に関する。   The present invention relates to a plate glass transfer device, and more particularly, to a plate glass transfer device that can uniformly maintain an air layer on a single plate by smoothly discharging air through an air layer relaxation portion below the single plate.

一般に、LCD、PDPなどに使用される薄板型の板ガラスの不良の存否を検査するための検査装備において、板ガラスを検査部側に移動させるための移動装置としては、回転軸上に板ガラスの底面を支持し、移動させるための複数のフリーローラが軸着され、このような回転軸が長さ方向に沿って全体として設けられた移動装置が使用されている。   In general, in the inspection equipment for inspecting the existence of defects in thin plate glass used for LCDs, PDPs, etc., as a moving device for moving the plate glass to the inspection section side, the bottom surface of the plate glass is placed on the rotating shaft. A moving device is used in which a plurality of free rollers for supporting and moving are axially mounted, and such a rotating shaft is provided as a whole along the length direction.

しかし、このようなフリーローラを用いた板ガラス移送装置は、基本として板ガラスとフリーローラの外周面とが互いに接触した後、板ガラスの移動が行われることから、接触摩擦による震えや振動などの微小な揺動現象は完全に排除できず、このような揺動により板ガラスの検査の際に不良率を正確に測定することができなくなり、検査精度が低下するなどの問題点があった。   However, the plate glass transfer device using such a free roller basically moves the plate glass after the plate glass and the outer peripheral surface of the free roller come into contact with each other. The rocking phenomenon cannot be completely eliminated, and such a rocking makes it impossible to accurately measure the defect rate during the inspection of the plate glass, resulting in a problem that the inspection accuracy is lowered.

このような問題点を解決するために、本出願人により先に出願された板ガラス移送装置の移送部20は、図1及び図2に示すように、エアチャンバー22の上端部に複数の通孔23aを有するベース板23が設けられ、このベース板23の上にフィルタ24が配置され、再びこのフィルタ24を覆わせると共にベース板23の通孔23aと対応するエア吐出孔25aを有する複数の片板25がそれぞれ所定の間隔だけ離れるようにして配列される構成からなっている。   In order to solve such a problem, the transfer unit 20 of the sheet glass transfer apparatus previously filed by the present applicant has a plurality of through holes at the upper end of the air chamber 22 as shown in FIGS. A base plate 23 having a base 23 a is provided, and a filter 24 is disposed on the base plate 23. The filter 24 is covered again, and a plurality of pieces having air discharge holes 25 a corresponding to the through holes 23 a of the base plate 23. The plates 25 are arranged so as to be separated from each other by a predetermined interval.

このように構成された従来の技術は、前記片板25のエア吐出孔25aを通して排出された空気が片板25の上で空気層を形成して、板ガラス40をエア浮上させ、継続的なエア排出により空気層を形成する空気を除いた残余の空気は、片板25の間の通路26を通じて移送部20の外部に排出されるようになっている。   In the conventional technology configured as described above, the air discharged through the air discharge holes 25a of the piece plate 25 forms an air layer on the piece plate 25, and the plate glass 40 is floated on the air. The remaining air excluding the air forming the air layer by the discharge is discharged to the outside of the transfer unit 20 through the passage 26 between the pieces 25.

しかし、このような従来の技術による板ガラス移送装置は、各片板25の間の狭い通路26を通してのみエアを外部に排出させていたので、エア排出量に限界が生じ、円滑なエア排出が行われず、その結果、片板25の上に形成されている空気層が全体として、あるいは、部分的にエア量が多くなり、板ガラス40の膨れ上がり現象が発生し、これもやはり板ガラスの検査の際に不良率を正確に測定できなくなる要因となり、検査精度を低下するなどの問題点があった。   However, since the plate glass transfer device according to the conventional technology discharges air to the outside only through the narrow passage 26 between the individual plates 25, the air discharge amount is limited, and smooth air discharge is performed. As a result, the air layer formed on the piece plate 25 as a whole or partially increases in the amount of air, and the phenomenon of the swell of the plate glass 40 occurs, which is also inspecting the plate glass. In other words, there is a problem that the defect rate cannot be measured accurately and the inspection accuracy is lowered.

本発明は、上記問題点に鑑みなされたものであり、片板の下部の空気層緩和部を通してエアを円滑に排出させることにより、片板上の空気層が均一に保たれ、板ガラスの膨れ上がり現象を防止することにより、板ガラスの検査の際に不良率を正確に測定することが可能となり、これにより、検査精度を向上させ得る板ガラス移送装置を提供することを目的とする。   The present invention has been made in view of the above problems, and by smoothly discharging air through the air layer relaxation portion at the lower part of the single plate, the air layer on the single plate is kept uniform, and the plate glass swells up. By preventing the phenomenon, it is possible to accurately measure the defect rate at the time of inspection of the plate glass, and an object of the present invention is to provide a plate glass transfer device that can improve the inspection accuracy.

上記の目的を達成するため、本発明による板ガラス移送装置は、作業台10の上面に移送部20が設けられ、この移送部20の一側部に移送部20の上に移された板ガラス40を移動させる移送機30を含み、前記移送部は、内部に吐出ファンを備えたファンハウジングと、このファンハウジングの上部に配置され、上面が開放されたエアチャンバーと、このエアチャンバーの開放された上部を覆わらせて密着して取り付けられ、その表面には上下方向に貫通している複数の通孔が形成されたベース板と、このベース板の上面に配置される片板部とからなる板ガラス移送装置において、前記片板部は、前記ベース板の各通孔上に配置されて取り付けられ、中央にベース板の通孔と連通している貫通孔が形成されたフィルタホルダと、前記フィルタホルダの貫通孔内に配置されるフィルタと、前記フィルタホルダの上面を覆わらせ、このフィルタホルダの貫通孔と対応するエア吐出孔が形成され、互いに離れて配置される複数の片板とから構成されることを特徴する。   In order to achieve the above object, the sheet glass transfer device according to the present invention is provided with a transfer unit 20 on the upper surface of the workbench 10, and the plate glass 40 transferred onto the transfer unit 20 on one side of the transfer unit 20. The transfer unit includes a fan 30 having a discharge fan therein, an air chamber disposed at an upper portion of the fan housing and having an open upper surface, and an open upper portion of the air chamber. A glass plate comprising a base plate having a plurality of through holes penetrating in the vertical direction on the surface and a single plate portion disposed on the upper surface of the base plate In the transfer device, the piece plate portion is disposed and attached on each through hole of the base plate, and a filter holder in which a through hole communicating with the through hole of the base plate is formed in the center; A filter disposed in the through-hole of the data holder, and a plurality of pieces disposed on the filter holder so as to cover the upper surface of the filter holder and to form an air discharge hole corresponding to the through-hole of the filter holder and disposed apart from each other Characterized by being composed.

また、本発明による板ガラス移送装置において、前記フィルタホルダの貫通孔の内周面には、フィルタを安置するための安置段が形成されたことが好ましい。   Moreover, in the plate glass transfer apparatus according to the present invention, it is preferable that an erection step for locating the filter is formed on the inner peripheral surface of the through hole of the filter holder.

また、本発明による板ガラス移送装置において、前記各片板は、横方向に配置された他の各片板と板ガラスの進行方向に対して、その先・後端部がジグザグに交互に配置されたことが好ましい。   Further, in the sheet glass transfer device according to the present invention, each piece plate is alternately arranged in a zigzag manner with respect to the traveling direction of the other piece plates arranged in the lateral direction and the plate glass. It is preferable.

また、本発明による板ガラス移送装置において、前記片板のうち、板ガラスが進入及び排出される先・後端部と、作業台の中央の所定の間隔だけ離れて対向する端部に配置された片板上の各エア吐出孔が密に形成されたことが好ましい。   Further, in the sheet glass transfer device according to the present invention, of the pieces, the pieces arranged at the front and rear end portions where the plate glass enters and exits and the end portions facing each other at a predetermined distance in the center of the work table. It is preferable that the air discharge holes on the plate are formed densely.

また、本発明による板ガラス移送装置において、前記密に形成された各エア吐出孔の底面に配置される各フィルタホルダの外周面には、相互間に直線通路を形成させる直面部がそれぞれ設けられたことが好ましい。   Further, in the plate glass transfer device according to the present invention, the outer peripheral surface of each filter holder disposed on the bottom surface of each of the densely formed air discharge holes is provided with a facing portion for forming a straight passage between each other. It is preferable.

このような本発明による板ガラス移送装置によれば、片板の下部の空気層緩和部を通してエアを円滑に排出させることにより、片板上の空気層が均一に保たれ、膨れ上がり現象を防止できるようにして板ガラスの検査の際に不良率を正確に測定することが可能となり、これにより、検査精度を向上させ得るなどの効果を有する。   According to such a plate glass transfer device according to the present invention, the air layer on the one plate can be kept uniform and the swelling phenomenon can be prevented by smoothly discharging the air through the air layer relaxation portion below the one plate. In this way, it becomes possible to accurately measure the defect rate during the inspection of the plate glass, thereby having the effect of improving the inspection accuracy.

以下、本発明の好ましい実施の形態を、添付図面に基づいて詳しく説明する。図3乃至図5に示すように、本発明による板ガラス移送装置は、上面の中央に検査部11が設けられた作業台10と、この作業台10の前・後部の全体にわたって配置され、互いに対称をなす移送部20と、この移送部20の一側に隣接している作業台10の上に設けられる移送機30とを備えている。   Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. As shown in FIG. 3 to FIG. 5, the plate glass transfer device according to the present invention is disposed over the work table 10 provided with the inspection unit 11 in the center of the upper surface and the front and rear parts of the work table 10, and symmetrical to each other. And a transfer machine 30 provided on the work table 10 adjacent to one side of the transfer unit 20.

前記作業台10は、台型の四角のテーブル状であり、この作業台10の上面から所定の高さだけ離れた上方には、横方向の全体にわたって光源11aと、カメラ装備11bとを備える検査部11が設けられている。   The work table 10 has a trapezoidal square table shape, and is provided with a light source 11a and a camera equipment 11b over the entire horizontal direction above the work table 10 at a predetermined height. Part 11 is provided.

前記移送部20は、作業台10の中央部を基準として所定の間隔だけ離れており、板ガラス40を検査部11の下方に通過させるために、作業台10の前・後部の全体にわたって配置され、互いに対称をなす長方形の板材状からなっている。   The transfer unit 20 is separated from the central part of the work table 10 by a predetermined distance, and is disposed over the entire front and rear parts of the work table 10 in order to pass the plate glass 40 below the inspection unit 11. It consists of rectangular plates that are symmetrical to each other.

前記移送機30は、移送部20の一側面と隣接している作業台10の上に長さ方向に沿って摺動可能に設けられ、移送部20の上に移された板ガラス40の一側面を取り付けて移送部20の所定の高さの上方に浮き上がった状態で検査部11の下方を通過するように案内している。   The transfer machine 30 is provided on the work table 10 adjacent to one side surface of the transfer unit 20 so as to be slidable along the length direction, and one side surface of the plate glass 40 transferred onto the transfer unit 20. And is guided so as to pass under the inspection unit 11 in a state where it floats above a predetermined height of the transfer unit 20.

ここで、前記作業台10と、検査部11と、移送機30とは、公知の技術をそのまま適用したので、その詳細を省略し、以下に、本願発明の移送部20に対して詳しく説明すると次のようになる。   Here, since the work table 10, the inspection unit 11, and the transfer machine 30 apply known techniques as they are, the details thereof will be omitted, and the transfer unit 20 of the present invention will be described in detail below. It becomes as follows.

前記移送部20は、吐出ファン21aを備えたファンハウジング21と、このファンハウジング21の上面に載置されるエアチャンバー22と、このエアチャンバー22の上部を覆わせるベース板23と、このベース板23の上面の該当部位にそれぞれ取り付けられる複数の片板部50とから構成されている。   The transfer unit 20 includes a fan housing 21 including a discharge fan 21a, an air chamber 22 placed on the upper surface of the fan housing 21, a base plate 23 covering the upper portion of the air chamber 22, and the base plate. 23 and a plurality of single-plate portions 50 respectively attached to corresponding portions on the upper surface of 23.

前記ファンハウジング21は、開放された上面にクリーンフィルタ21dが覆われており、内部に上方にエアを吐出させる吐出ファン21aを備えた四角のボックス状からなっている。   The fan housing 21 is formed in a square box shape with a clean filter 21d covered on the open upper surface and a discharge fan 21a for discharging air upward.

そして、前記ファンハウジング21の側面や底面などには、開放された上方のクリーンフィルタ21dを通してエアを円滑に排出させるための通孔21bと、吐出ファン21aに電源を供給するための電源ケーブル21cなどを通過させるようにする通孔21bとが形成されている。   Further, on the side surface and bottom surface of the fan housing 21, there are provided a through hole 21b for smoothly discharging air through an open upper clean filter 21d, a power cable 21c for supplying power to the discharge fan 21a, and the like. A through hole 21b is formed so as to pass through.

また、前記ファンハウジング21のクリーンフィルタ21dは、吐出ファン21aから吐出されるエアが直接エアチャンバー22内に流入されず、一次的にエア中に含まれている微細塵埃などの不純物を篩い分けるエア洗浄機能と共にエアの吐出圧を緩和させるための機能を有する。   Further, the clean filter 21d of the fan housing 21 does not allow the air discharged from the discharge fan 21a to flow directly into the air chamber 22, and air cleaning that sifts out impurities such as fine dust contained in the air temporarily. It has a function for relaxing the discharge pressure of air together with the function.

前記エアチャンバー22は、吐出ファン21aにより吐出されたエアを充填させると共に、ベース板23の全ての通孔23aを通してエアを排出させるようにする空間が中央部に形成され、その底面中央と上面の全体が開放された四角のボックス状であり、ファンハウジング21の上面に載置される底面の中央には、ファンハウジング21の開放された上部と連通される通孔22aが形成され、その内部に空間部22bが設けられ、その開放された上面の全体にベース板23が密着して取り付けられる。   The air chamber 22 is formed with a space at the center for filling the air discharged by the discharge fan 21a and discharging the air through all the through holes 23a of the base plate 23. It is a square box shape that is open as a whole, and a through hole 22a that communicates with the open upper portion of the fan housing 21 is formed in the center of the bottom surface that is placed on the upper surface of the fan housing 21. A space 22b is provided, and the base plate 23 is attached in close contact with the entire opened upper surface.

すなわち、前記吐出ファン21aにより吐出されたエアがエアチャンバー22の内にて一次的に充填された後、継続して吐出ファン21aを通してエアチャンバー22の内に流入されるエアによりこのエアチャンバー22の内部のエアが上方に押し出され、ベース板23の通孔23aに排出されるようになっている。   That is, after the air discharged by the discharge fan 21a is primarily filled in the air chamber 22, the air continuously flows into the air chamber 22 through the discharge fan 21a. The internal air is pushed upward and discharged into the through hole 23 a of the base plate 23.

前記ベース板23は、エアチャンバー22の開放された上部を被せて密着して取り付けられる長方形の板材状であり、その表面には、上・下方に貫通している複数の通孔23aが形成されている。   The base plate 23 is a rectangular plate that is attached in close contact with the open upper portion of the air chamber 22. A plurality of through holes 23 a penetrating upward and downward are formed on the surface of the base plate 23. ing.

また、前記ベース板23の上面には、均一なエア層を形成させるための片板部50が配置されている。   A single plate portion 50 for forming a uniform air layer is disposed on the upper surface of the base plate 23.

前記片板部50は、ベース板23の各通孔23aの上に配置され取り付けられるフィルタホルダ52と、このフィルタホルダ52の貫通孔52aの内に配置されるフィルタ54と、前記フィルタホルダ52の上面を覆わせる複数の片板56とを備える。   The single plate portion 50 includes a filter holder 52 disposed and attached on each through hole 23 a of the base plate 23, a filter 54 disposed in the through hole 52 a of the filter holder 52, and the filter holder 52. And a plurality of single plates 56 covering the upper surface.

前記フィルタホルダ52は、前記ベース板23の全ての通孔23aに対応して配置され、スクリューなどの締付具によりベース板23の上に締め付けられるものであり、その中央部には、ベース板23の通孔23aと同じ直径を有して連通している貫通孔52aが形成されており、この貫通孔52aの内周面には、フィルタ54を安置するための安置段52bが設けられている。   The filter holder 52 is disposed corresponding to all the through holes 23a of the base plate 23, and is tightened on the base plate 23 by a fastening tool such as a screw. A through hole 52a having the same diameter as that of the through hole 23a and communicating with the through hole 23a is formed. On the inner peripheral surface of the through hole 52a, an erection stage 52b for locating the filter 54 is provided. Yes.

ここで、前記フィルタホルダ52の貫通孔52aは、上部にフィルタ54が安置されるように、フィルタ54と同じ直径及び高さに形成されたた大直径部と、この大直径部から直ちに下方につながる小直径部とからなる二段の貫通孔状からなっている。   Here, the through hole 52a of the filter holder 52 has a large diameter portion formed at the same diameter and height as the filter 54 so that the filter 54 is placed on the upper portion, and immediately below the large diameter portion. It has a two-stage through-hole shape consisting of connected small diameter portions.

すなわち、前記大直径部と小直径部との境界部分がフィルタ54を安置させるための安置段52bとなる。   That is, the boundary portion between the large diameter portion and the small diameter portion serves as a resting stage 52b for resting the filter 54.

一方、前記各フィルタホルダ52のうち、密に形成された各エア吐出孔57aを有する片板57の底面に配置される各フィルタホルダ52の外周面には、互いに当接せずに、所定の間隔だけ離れて直線通路を形成させるための直面部52cがそれぞれ設けられている。   On the other hand, among the filter holders 52, the outer peripheral surfaces of the filter holders 52 disposed on the bottom surface of the single plate 57 having the air discharge holes 57a formed densely do not contact each other, Facing portions 52c for forming straight passages spaced apart from each other are provided.

前記フィルタ54は、フィルタホルダ52の貫通孔52aの内に着脱可能に配置され、その表面がフィルタホルダ52の上面と同じ平面を有するようにする円板状であり、前記フィルタ54は、ベース板23の各通孔23aの上でエアチャンバー22内のエアをベース板23の通孔23aに直ちに排出せず、排出圧がある程度緩和されるようにし、エアがこのフィルタ54を通して漏れ出す程度に排出させるためのものであり、主に焼結フィルタを使用することが好ましい。   The filter 54 is detachably disposed in the through hole 52a of the filter holder 52, and has a disk shape with a surface having the same plane as the upper surface of the filter holder 52. The filter 54 is a base plate. The air in the air chamber 22 is not immediately discharged to the through hole 23a of the base plate 23 on each through hole 23a of the base plate 23, so that the discharge pressure is relieved to some extent, and is discharged to the extent that the air leaks through the filter 54. It is preferable to use a sintered filter mainly.

前記片板56は、フィルタホルダ52の上面に被せられ、スクリューなどの締付具でこのフィルタホルダ52に締め付けて固定され、このフィルタホルダ52の貫通孔52aと対応するエア吐出孔56aが形成され、相互間にそれぞれ所定の間隔だけ離れて配置される複数のものからなっている。   The piece plate 56 is placed on the upper surface of the filter holder 52 and is fastened and fixed to the filter holder 52 with a tightening tool such as a screw. An air discharge hole 56a corresponding to the through hole 52a of the filter holder 52 is formed. , Each of which is arranged with a predetermined distance between each other.

ここで、前記エア吐出孔56aは、フィルタ54の直径よりも小さく形成され、フィルタ54がこのエア吐出孔56aを通して外部に外れないようにすることが好ましい。   Here, it is preferable that the air discharge hole 56a is formed smaller than the diameter of the filter 54 so that the filter 54 does not come outside through the air discharge hole 56a.

そして、前記各片板56は、横方向に配置された他の各片板56と板ガラス40の進行方向に対し、その先・後端部がジグザグに交互に配置されている。すなわち、横方向に隣り合う各エア吐出孔56aが互いに並んで配列されず、ジグザグに配列されている。   And each said piece board 56 is alternately arrange | positioned by the zigzag at the front-and-rear end part with respect to the advancing direction of each other piece board 56 and the plate glass 40 arrange | positioned in the horizontal direction. That is, the air discharge holes 56a adjacent in the horizontal direction are not arranged side by side but are arranged in a zigzag manner.

また、前記片板56のうち、板ガラス40が進入及び排出される移送部20の先・後端部と作業台10の中央の所定の間隔だけ離れて対向する移送部20の端部に配置された片板56の上の各エア吐出孔56aは、板ガラス40に向けてエア吐出量を増加させるために互いに密に形成されている。   Further, of the single plates 56, the front and rear end portions of the transfer portion 20 into which the plate glass 40 enters and is discharged are disposed at the end portions of the transfer portion 20 facing each other at a predetermined distance in the center of the work table 10. The air discharge holes 56 a on the piece plate 56 are formed densely with each other in order to increase the air discharge amount toward the plate glass 40.

このような構成からなる本発明による板ガラス移送装置は、吐出ファン21aの回転によりエアが上方に吐出され、一次的にエアチャンバー22に充填されると共に継続的な吐出ファン21aのエア吐出によりエアチャンバー22内のエアが上方に押し出され、エアチャンバー22の上面に取り付けられているベース板23の通孔23aを通して上方に排出される。このとき、このベース板23の通孔23aを通して上方に排出されるエアは、フィルタホルダ52のフィルタ54により排出速度が緩和され、フィルタ54を通して漏れ出すように片板56のエア吐出孔56aに排出され、最終に片板56の上で一種の空気層を形成する。   In the plate glass transfer device according to the present invention having such a configuration, air is discharged upward by the rotation of the discharge fan 21a, is temporarily filled in the air chamber 22, and the air chamber is continuously discharged by the discharge fan 21a. The air in 22 is pushed upward and discharged upward through a through hole 23 a of a base plate 23 attached to the upper surface of the air chamber 22. At this time, the air discharged upward through the through hole 23 a of the base plate 23 has its discharge speed reduced by the filter 54 of the filter holder 52, and is discharged to the air discharge hole 56 a of the single plate 56 so as to leak through the filter 54. Finally, a kind of air layer is formed on the piece plate 56.

すなわち、板ガラス40と片板56との間に形成された空気層に継続的なエアの補充(流れ)が行われ、空気層が継続的に保たれる。   That is, the air layer formed between the plate glass 40 and the piece plate 56 is continuously replenished (flowed) with air, and the air layer is continuously maintained.

つまり、前記片板56の上に形成された空気層は、片板56の上に載置される板ガラス40を支持すると共に、継続してこれらの片板56の上部及び片板56の下部の各フィルタホルダ52の間に設けられた空気層緩和部58を通してエアが移送部20の外部に排出される過程を繰り返しながら、板ガラス40を片板56、57の上で所定の高さだけ離れた状態で浮き上がらせる。   That is, the air layer formed on the piece plate 56 supports the plate glass 40 placed on the piece plate 56, and continues to the upper part of the piece plate 56 and the lower part of the piece plate 56. While repeating the process in which air is discharged to the outside of the transfer section 20 through the air layer relaxation section 58 provided between the filter holders 52, the plate glass 40 is separated by a predetermined height on the single plates 56 and 57. Lift up in state.

そして、前記空気層緩和部58は、片板56の上の全体の空気層のボリュームを下方に低くし、ある程度緩和させると共に移送部20の外部に排出される空気層のエアの流れを円滑にすることにより、板ガラス40の中央部が膨れ上がる膨れ上がり現象を防止している。   The air layer relaxation portion 58 lowers the volume of the entire air layer on the piece plate 56 downward, relaxes the air layer to some extent, and smoothes the flow of air in the air layer discharged to the outside of the transfer portion 20. By doing so, the swelling phenomenon that the center part of the plate glass 40 swells is prevented.

これは、例えば、空気層緩和部58の無い平らな平板で空気層を形成させる場合、平板の中央部の空気よりも枠側の空気が外部に迅速に通り抜けるために、全般的に板ガラス40の中央部が上方に膨れ上がる膨れ上がり現象が発生するが、このとき、本発明のように、空気層緩和部58を設けて空気層のエアをこれらの空気層緩和部58を通して外部に円滑に排出させることにより、空気層のボリュームを一部緩和し、板ガラス40の膨れ上がり現象を防止することが可能となる。   This is because, for example, when the air layer is formed by a flat flat plate without the air layer relaxing portion 58, the air on the frame side passes through the outside more quickly than the air at the center of the flat plate. A swelling phenomenon occurs in which the central portion swells upward. At this time, as in the present invention, an air layer relaxation portion 58 is provided, and air in the air layer is smoothly discharged outside through the air layer relaxation portion 58. As a result, the volume of the air layer is partially relaxed, and the phenomenon of the plate glass 40 being swollen can be prevented.

このように片板25の上に空気層が形成された状態で、検査対象の板ガラス40が作業台10の上の移送部20に移されると、このときから板ガラス40は、空気層により所定の高さだけ上方に浮き上がった状態となり、このとき、作業台10の移送機30が板ガラス40の一側面を真空吸着して検査部11の側に摺動移動させながら板ガラス40の不良検査が行われると共に、この検査部11を経た板ガラス40は、移動し続けられてその次の段階に案内される。   When the plate glass 40 to be inspected is transferred to the transfer unit 20 on the work table 10 in the state in which the air layer is formed on the piece plate 25 in this way, from this time, the plate glass 40 is separated from the predetermined layer by the air layer. The plate 30 is inspected for defects while the transfer machine 30 of the work table 10 vacuum-adsorbs one side of the plate glass 40 and slides it to the inspection unit 11 side. At the same time, the plate glass 40 that has passed through the inspection unit 11 continues to move and is guided to the next stage.

このように、板ガラス40は、不良検査が行われる間、移送部20と当接せずに、エア浮上された状態で移動されるので、接触摩擦などの何らかの揺動もなく精度よく検査が行われる。   As described above, the plate glass 40 is moved in a state of air levitation without being in contact with the transfer unit 20 during the defect inspection. Therefore, the plate glass 40 is accurately inspected without any fluctuation such as contact friction. Is called.

さらに、本発明の板ガラス移送装置は、板ガラスの検査装備の他にもその他の物流や他の用途でも使用することができる。   Furthermore, the plate glass transfer device of the present invention can be used for other physical distribution and other applications besides plate glass inspection equipment.

以上のように、前記実施例を参照して詳細に説明されたが、本発明は、これに限定されるものでなく、このような本発明の基本的な技術的思想を逸脱しない範囲内で、当業界の通常の知識を有する者にとっては、他の多くの変更が可能であろう。また、本発明は、添付の特許請求の範囲により解釈されるべきであることは言うまでもない。   As described above, the present invention has been described in detail with reference to the above-described embodiments. However, the present invention is not limited to this, and the scope of the present invention does not depart from the basic technical idea of the present invention. Many other modifications will be possible for those having ordinary knowledge in the art. Needless to say, the present invention should be construed in accordance with the appended claims.

従来の技術による板ガラス移送装置を示す概略斜視図である。It is a schematic perspective view which shows the plate glass transfer apparatus by a prior art. 図1の要部概略断面図である。It is a principal part schematic sectional drawing of FIG. 本発明による板ガラス移送装置を示す概略斜視図である。It is a schematic perspective view which shows the plate glass transfer apparatus by this invention. 図3の要部分解斜視図である。It is a principal part disassembled perspective view of FIG. 図3の要部概略断面図である。It is a principal part schematic sectional drawing of FIG.

符号の説明Explanation of symbols

10 作業台
11 検査部
11a 光源
11b カメラ装備
20 移送部
21 ファンハウジング
21a 吐出ファン
21b 通孔
21c 電源ケーブル
21d クリーンフィルタ
22 エアチャンバー
22a 通孔23 ベース板
23a 通孔
24 フィルタ
25 片板
25a エア吐出孔
26 通路
30 移送機
40 板ガラス
50 片板部
52 フィルタホルダ
52a 貫通孔
52b 安置段
52c 直面部
54 フィルタ
56 片板
56a エア吐出孔
58 空気層緩和部
DESCRIPTION OF SYMBOLS 10 Working table 11 Inspection part 11a Light source 11b Camera equipment 20 Transfer part 21 Fan housing 21a Discharge fan 21b Through hole 21c Power supply cable 21d Clean filter 22 Air chamber 22a Through hole 23 Base plate 23a Through hole 24 Filter 25 Single plate 25a Air discharge hole 26 Passage 30 Transfer machine 40 Sheet glass 50 Single plate part 52 Filter holder 52a Through hole 52b Resting stage 52c Confronting part 54 Filter 56 Single plate 56a Air discharge hole 58 Air layer relaxation part

Claims (5)

作業台10の上面に移送部20が設けられ、この移送部20の一側部に移送部20の上に移された板ガラス40を移送させる移送機30を含み、
前記移送部20は、内部に吐出ファン21aを備えたファンハウジング21と、このファンハウジング21の上部に配置され、上面が開放されたエアチャンバー22と、このエアチャンバー22の開放された上部を覆わらせて密着して取り付けられ、その表面には、上下方向に貫通している複数の通孔23aが形成されたベース板23と、このベース板23の上面に配置される片板部50とからなる板ガラス移送装置において、
前記片板部50は、
前記ベース板23の各通孔23aの上に配置されて取り付けられ、中央にベース板23の通孔23aと連通している貫通孔52aが形成されたフィルタホルダ52と、
前記フィルタホルダ52の貫通孔52a内に配置されるフィルタ54と、
前記フィルタホルダ52の上面を覆わらせ、このフィルタホルダ52の貫通孔52aと対応するエア吐出孔56aが形成され、互いに離れて配置される複数の片板56とを備えることを特徴とする板ガラス移送装置。
A transfer unit 20 is provided on the upper surface of the work table 10, and includes a transfer machine 30 that transfers the plate glass 40 transferred onto the transfer unit 20 to one side of the transfer unit 20,
The transfer unit 20 includes a fan housing 21 having a discharge fan 21a therein, an air chamber 22 disposed on the top of the fan housing 21 and having an open upper surface, and an open upper portion of the air chamber 22. A base plate 23 having a plurality of through holes 23a penetrating in the vertical direction is formed on the surface thereof, and a single plate portion 50 disposed on the upper surface of the base plate 23. In a plate glass transfer device comprising:
The one-plate portion 50 is
A filter holder 52 which is disposed and attached on each through hole 23a of the base plate 23 and has a through hole 52a communicating with the through hole 23a of the base plate 23 at the center;
A filter 54 disposed in the through hole 52a of the filter holder 52;
A plate glass characterized in that the upper surface of the filter holder 52 is covered, and a plurality of pieces 56 are arranged apart from each other in which air holes 56a corresponding to the through holes 52a of the filter holder 52 are formed. Transfer device.
前記フィルタホルダ52の貫通孔52aの内周面には、フィルタ54を安置させるための安置段52bが形成されていることを特徴とする請求項1に記載の板ガラス移送装置。   The plate glass transfer device according to claim 1, wherein the inner peripheral surface of the through hole 52 a of the filter holder 52 is formed with an erection step 52 b for urging the filter 54. 前記各片板56は、横方向に配置された他の各片板56と板ガラス40の進行方向に対し、その先・後端部がジグザグに交互に配置されていることを特徴とする請求項1に記載の板ガラス移送装置。   Each said piece board 56 is arrange | positioned by the zigzag alternately by the front-and-rear end part with respect to the advancing direction of each other piece board 56 and plate glass 40 arrange | positioned in the horizontal direction. The plate glass transfer apparatus according to 1. 前記片板56のうち、板ガラス40が進入及び排出される先・後端部と作業台10の中央の所定の間隔だけ離れて対向する端部に配置された片板56上の各エア吐出孔56aが密に形成されたことを特徴とする請求項1に記載の板ガラス移送装置。   Each air discharge hole on the piece plate 56 arranged at the end portion of the piece plate 56 facing the front and rear end portions where the plate glass 40 enters and exits and a predetermined distance in the center of the work table 10. 56. The plate glass transfer device according to claim 1, wherein 56a is formed densely. 前記密に形成された各エア吐出孔56aの底面に配置される各フィルタホルダ52の外周面には、相互間に直線通路を形成させるための直面部52cがそれぞれ形成されていることを特徴とする請求項4に記載の板ガラス移送装置。   The outer peripheral surface of each filter holder 52 disposed on the bottom surface of each of the densely formed air discharge holes 56a is provided with a facing portion 52c for forming a linear passage between them. The plate glass transfer apparatus according to claim 4.
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JP2009023797A (en) * 2007-07-20 2009-02-05 Ihi Corp Levitation conveying system
CN110381657A (en) * 2019-07-22 2019-10-25 深圳市华星光电技术有限公司 The equipment for eliminating electrostatic

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JP4166770B2 (en) 2008-10-15
CN1891647B (en) 2010-06-16
KR100713815B1 (en) 2007-05-02

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