CN212779286U

CN212779286U - Detection equipment and detection system

Info

Publication number: CN212779286U
Application number: CN202021776424.4U
Authority: CN
Inventors: 张龙; 黄有为; 陈鲁
Original assignee: Shenzhen Zhongke Feice Technology Co Ltd
Current assignee: Skyverse Ltd; Shenzhen Zhongke Feice Technology Co Ltd
Priority date: 2020-08-21
Filing date: 2020-08-21
Publication date: 2021-03-23
Anticipated expiration: 2030-08-21

Abstract

The utility model relates to a detection device and a detection system, wherein, the detection device comprises a detection chamber, a motion part and an air supply system, an optical element for optically detecting an object to be detected is arranged in the detection chamber, and a bearing device for bearing the object to be detected is arranged in the motion part; and the detection chamber and the motion part are respectively communicated with the air supply system in a ventilation way. The gas in detection chamber and the motion portion fills alone respectively, does not have the condition of mutual ventilation between the two, can avoid the pollutant to cause the pollution to optical element, guarantees to detect the precision and avoids damaging optical element.

Description

Detection equipment and detection system

Technical Field

The utility model relates to an optical detection technical field, concretely relates to check out test set and detecting system.

Background

With the development of semiconductor technology, semiconductor optical detection technology has been operated, and optical detection technology has the advantages of high detection speed, high detection precision, capability of realizing non-contact detection and the like.

The optical detection equipment comprises a detection chamber, wherein the detection chamber is provided with an optical element for performing optical detection on an object to be detected, and gas flows in the detection chamber all the time to ensure the cleanliness in the detection chamber and avoid the pollution of pollutants on the optical element to influence the detection precision or damage the optical element.

Therefore, in the process of detecting the object to be detected, how to avoid the contamination to the optical element, ensure the detection accuracy, and avoid damaging the optical element is a technical problem that needs to be solved by those skilled in the art.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing a check out test set and detecting system can avoid the pollutant to cause the pollution to optical element, guarantees to detect the precision and avoids damaging optical element.

In order to solve the above technical problem, the present invention provides a detection apparatus, which includes a detection chamber, a movement portion and an air supply system, wherein an optical element for performing optical detection on an object to be detected is disposed in the detection chamber, and a bearing device for bearing the object to be detected is disposed in the movement portion; and the detection chamber and the motion part are respectively communicated with the air supply system in a ventilation way.

The detection chamber and the movement part are filled with gas, the gas in the detection chamber and the gas in the movement part are respectively filled through a gas supply system, the gas supply system and the movement part independently supply gas, mutual ventilation does not exist between the gas supply system and the movement part, the gas in each internal space is ensured to be clean, the situation that pollution is caused to an optical element by pollutants generated in the movement process of the bearing device in the movement part is avoided, the detection precision is ensured, and the optical element is prevented from being damaged.

Optionally, a partition board is disposed between the detection chamber and the moving portion, the partition board is provided with a detection window, and the optical element can perform optical detection on the object to be detected placed on the carrying device through the detection window.

Optionally, the detection chamber includes a first chamber and a second chamber, and the optical element includes a detection device and a lens assembly disposed in the first chamber and a light source device disposed in the second chamber.

Optionally, an optical element cavity is disposed in the first cavity, and the lens assembly is disposed in the optical element cavity.

Optionally, the gas supply system includes a gas supply portion, and the gas supply portion is used for providing gas for the first chamber and the motion portion, and is respectively in ventilation communication with the first chamber and the motion portion.

Optionally, the gas supply system further comprises a gas supply device in ventilation communication with the second chamber for providing gas to the second chamber; or the gas supply part is communicated with the second chamber and is used for supplying gas to the second chamber.

Optionally, the portable electronic device further comprises a cabinet body, wherein the air supply system, the detection chamber and the motion part are arranged in the cabinet body.

Optionally, the side wall of the moving part is provided with an air outlet, and the position of the air outlet is lower than or flush with the bearing surface of the bearing device.

Optionally, the moving part further includes a sample injection window disposed on a sidewall of the moving part, and the object to be measured enters the moving part through the sample injection window and is placed on the carrying device.

Optionally, the moving part further comprises an observation window arranged on the side wall of the moving part, and the observation window is provided with a side wall opposite to the sample introduction window.

Additionally, the utility model also provides a detecting system, it includes transmission device and last check out test set, transmission device can with the await measuring object transmission extremely check out test set's the device that bears.

The technical effect of the detection system with the detection device is similar to that of the detection device, and is not repeated herein for saving space.

Drawings

Fig. 1 is a schematic structural diagram of a detection apparatus provided in an embodiment of the present invention;

FIG. 2 is a schematic view of the structure of the moving part and the partition;

FIG. 3 is a schematic view of the structure of the motion part;

fig. 4 is an enlarged view of a in fig. 3.

In the accompanying fig. 1-4, the reference numerals are illustrated as follows:

1-detection chamber, 11-first chamber, 12-second chamber;

2-a moving part, 21-a bearing device, 22-a blowing device, 23-an air plate, 24-a blowing hole, 25-an air inlet and 26-an air outlet;

3-partition, 31-detection window;

4-an air supply part;

5-pumping and draining part.

Detailed Description

In order to make those skilled in the art better understand the technical solution of the present invention, the present invention will be further described in detail with reference to the accompanying drawings and specific embodiments.

Referring to fig. 1-4, fig. 1 is a schematic structural diagram of a detection apparatus according to an embodiment of the present invention; FIG. 2 is a schematic view of the structure of the moving part and the partition; FIG. 3 is a schematic view of the structure of the motion part; fig. 4 is an enlarged view of a in fig. 3.

The embodiment of the utility model provides a check out test set and detecting system, wherein, this check out test set is including detecting cavity 1, motion portion 2 and gas supply system, wherein, be equipped with in the detection cavity 1 and be used for carrying out the optical detection's optical element to the determinand (like wafer etc.), be equipped with the bearing device 21 that is used for bearing the determinand in motion portion 2, during the detection, place the determinand on bearing device 21, drive the determinand by bearing device 21 and carry out mechanical motion, then detect it by optical element. Specifically, the detection chamber 1 and the moving portion 2 are respectively communicated with an air supply system.

That is to say, the detection chamber 1 and the moving part 2 are filled with gas, and the gas in the detection chamber 1 and the gas in the moving part 2 are respectively filled separately through the gas supply system, and both independently supply gas and do not have the condition of mutual ventilation between the two, thereby ensuring the cleanness of the gas in the respective internal spaces, avoiding the occurrence of the condition that the optical element is polluted by the pollutants generated in the moving process of the bearing device 21 in the moving part 2, ensuring the detection precision and avoiding the damage of the optical element.

In the above embodiment, as shown in fig. 2, a partition plate 3 is disposed between the detection chamber 1 and the moving part 2, the partition plate 3 can form a barrier between the two, so as to ensure that the detection chamber 1 and the moving part 2 are independent spaces, meanwhile, the partition plate 3 is provided with a detection window 31 communicated between the detection chamber 1 and the moving part 2, and the optical element can optically detect the object to be detected placed on the moving platform through the detection window 31. The setting of this baffle 3 can reduce the intercommunication area between detection cavity 1 and the motion part 2, further guarantees that the pollutant in the motion part 2 can not get into in the detection cavity 1 or the pollutant in the detection cavity 1 can not fall on the object surface that awaits measuring.

In the above embodiment, as shown in fig. 1, the detection chamber 1 is provided with a first chamber 11 and a second chamber 12, and the optical element includes a detection device, a lens assembly and a light source device, wherein the detection device and the lens assembly are disposed in the first chamber 11, and the light source device is disposed in the second chamber 12.

Further, an optical element chamber is arranged in the first chamber 11, and the lens assembly is arranged in the optical element chamber. That is to say, the lens subassembly is through detecting three-layer gas protection in chamber 1, first chamber 11 and the optical element cavity, further protects it, avoids it to be contaminated, guarantees to detect precision and life.

In the above embodiment, the gas supply system includes the gas supply portion 4, and the gas supply portion 4 is configured to supply gas to the detection chamber 1, the first chamber 11, and the moving portion 2, and is in ventilation communication with the detection chamber 1, the first chamber 11, and the moving portion 2, respectively. The gas supply system further comprises a gas supply device, which is in ventilation communication with the second chamber 12 and is used for supplying gas to the second chamber 12; or the gas supply part 4 may communicate with the second chamber 12 and supply gas to the second chamber 12.

The second chamber 12 is provided with a light source device, which has a high requirement on the cleanliness of gas, so that the second chamber can be supplied with gas by a separately arranged gas supply device, or can be supplied with gas by the gas supply part 4, and the cleanliness of the gas supplied by the gas supply part 4 can be improved, or the second chamber 12 is provided with a filter device to ensure the cleanliness of the gas entering the second chamber 12.

The detection apparatus further includes an evacuation portion 5, wherein the evacuation portion 5 is configured to evacuate gas from the detection chamber 1, the first chamber 11, and the moving portion 2, and is in ventilation communication with the detection chamber 1, the first chamber 11, and the moving portion 2. Of course, in this embodiment, the gas supply portion 4 may also be communicated with the second chamber 12 and introduce gas into the second chamber 12, the pumping portion 5 may also be communicated with the second chamber 12 and exhaust the gas in the second chamber 12, or may be communicated with the second chamber 12 through a separately arranged pumping device to exhaust the gas in the second chamber 12.

Further, this check out test set still includes the cabinet body, above-mentioned air feed system, detect cavity 1, this internal is located from top to bottom in proper order to motion portion 2 and pump drainage portion 5, of course, in this embodiment, do not do the specific requirement to the position that sets up between each part, if still can set up detection cavity 1 in motion portion 2's top, and set up air feed portion 4 and pump drainage portion 5 in the side all can, and can reduce the occupation of land space of each part when setting gradually from top to bottom, the field layout of being convenient for.

In the above embodiment, the side wall of the moving part 2 has the air outlet 26, and the position of the air outlet 26 is lower than or flush with the carrying surface of the carrying device 21, by the above arrangement, the pollutant generated in the moving part 2 can be pumped out of the moving part 2 from the lower part of the object to be measured, so as to prevent the pollutant from falling on the surface of the object to be measured to pollute the object to be measured.

Specifically, the moving part 2 further includes an air inlet 25, and as shown in fig. 3, a distance from the air inlet 25 to the main chamber is smaller than a distance from the air outlet 26 to the main chamber, and the air outlet 26 is configured to discharge the gas in the moving part 2 to the outside of the detection apparatus, so that the gas entering the moving part 2 can be discharged from the air outlet 26 after the object to be detected is cleaned. In this embodiment, the specific positions of the air inlet 25 and the air outlet 26 are not limited, for example, the air inlet 25 may be disposed above the carrying device 21, and the air outlet 26 is located below the carrying device 21, and the air entering the moving portion 2 is discharged from the air outlet 26 located below the carrying device 21, so that the pollutant mixed in the air cannot stay at the upper position, thereby preventing the pollutant from polluting the object to be detected, and meanwhile, the air can be prevented from entraining the pollutant and diffusing upwards into the detection chamber 1, thereby providing protection for the optical element and preventing the pollutant from polluting the optical element.

In the above embodiment, the moving part 2 further includes a sample injection window disposed on a side wall of the moving part 2, and the object to be measured enters the moving part 2 through the sample injection window and is placed on the carrying device 21. The motion part 2 further comprises an observation window arranged on the side wall of the motion part 2, the observation window is arranged on the side wall opposite to the sample introduction window, the state of the bearing device 21 in the motion part 2 can be observed through the observation window, and the bearing device 21 can be adjusted in time.

The detection system comprises a transfer device and the detection equipment, wherein the transfer device can transfer the object to be detected from the sample introduction window to the bearing device 21 of the detection equipment.

In the above embodiment, at least one purging device 22 is further disposed in the moving portion 2, and is configured to provide a purging gas to the object to be tested supported by the supporting device 21, and the purging device 22 can purge the surface of the object to be tested and the space above the surface of the object to be tested, so as to ensure the cleanliness of the surface of the object to be tested, avoid contamination of the object to be tested by contaminants, and thus ensure the product quality of chips prepared from the object to be tested.

As shown in fig. 4, the purging device 22 includes a wind plate 23, the wind plate 23 includes a strip-shaped wind blowing surface, the wind blowing holes 24 are located on the wind blowing surface and are uniformly distributed along the extending direction of the wind blowing surface, specifically, the wind plate 23 may be disposed along the side of the preset movement path of the carrying device 21, and the wind plate 23 penetrates through the moving portion 2 along the extending direction of the wind blowing surface, so that the purging gas blown out by the wind blowing holes 24 of the wind plate 23 can cover the movement range of the carrying device 21, in this embodiment, the air outlet direction of the plurality of wind blowing holes 24 is parallel to the carrying surface of the carrying device 21, and the purging device 22 purges the object to be tested carried by the carrying device 21.

Further, the number of the purging devices 22 is multiple, and the purging devices 22 are respectively arranged outside the movement range of the carrying device 21; the plurality of blowing devices 22 include two mirror-symmetric first blowing devices 22, the two blowing devices 22 are both located outside the movement range of the carrying device 21 and do not interfere with the movement of the carrying device 21, and the two blowing devices 22 are respectively located at two sides of the carrying device 21, and the first mirror-symmetric planes of the two first blowing devices 22 are perpendicular to the carrying surface of the carrying device 22, in this embodiment, the two first blowing devices 22 may be arranged in parallel (specifically, the two wind plates 23 are arranged in parallel), as shown in fig. 3; or the two first purging devices 22 may be disposed to intersect each other.

The sweep gas of sweeping device 21 can form the air curtain between motion part 2 and detection cavity 1, can the separation motion part 2 and detect the intercommunication of the interior gas of cavity 1 to block because can produce in the mechanical motion of load-carrying device 21 pollutant such as piece gets into and detects cavity 1, prevent that the pollutant in motion part 2 from getting into and causing the pollution to optical element in detecting cavity 1, thereby can avoid damaging optical element, and guarantee to carry out optical detection's detection precision to the object to be measured through this optical element.

The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of improvements and decorations can be made without departing from the principle of the present invention, and these improvements and decorations should also be regarded as the protection scope of the present invention.

Claims

1. The detection equipment is characterized by comprising a detection chamber (1), a movement part (2) and an air supply system, wherein an optical element for optically detecting an object to be detected is arranged in the detection chamber (1), and a bearing device (21) for bearing the object to be detected is arranged in the movement part (2);

and the detection chamber (1) and the motion part (2) are respectively communicated with the air supply system in a ventilation way.

2. The apparatus according to claim 1, wherein a partition is provided between the detection chamber and the moving part (2), the partition (3) is provided with a detection window (31), and the optical element is capable of optically detecting the object to be detected placed on the carrier (21) through the detection window (31).

3. Detection apparatus according to claim 1, wherein the detection chamber (1) comprises a first chamber (11) and a second chamber (12), the optical elements comprising a detection device and lens assembly provided in the first chamber (11) and a light source device provided in the second chamber (12).

4. A testing device according to claim 3, wherein an optical element chamber is provided in the first chamber (11), the lens arrangement being provided in the optical element chamber.

5. A testing device according to claim 3, wherein the gas supply system comprises a gas supply portion (4), the gas supply portion (4) being adapted to supply gas to the first chamber (11) and to the moving portion (2) and being in ventilating communication with the first chamber (11) and with the moving portion (2), respectively.

6. The detection apparatus according to claim 5, wherein the gas supply system further comprises a gas supply apparatus in venting communication with the second chamber (12) for providing gas to the second chamber (12);

alternatively, the gas supply (4) is in communication with the second chamber (12) and is adapted to provide gas to the second chamber (12).

7. The detection apparatus according to claim 1, further comprising a cabinet, the air supply system, the detection chamber (1) and the moving part (2) being provided inside the cabinet.

8. The testing apparatus according to any of the claims 1-7, characterized in that the side wall of the moving part (2) has an air outlet (26), and the air outlet (26) is positioned below or flush with the carrying surface of the carrying device.

9. The detection apparatus according to any one of claims 1 to 7, wherein the moving part (2) further comprises a sample inlet window disposed on a side wall of the moving part (2), and the object to be detected enters the moving part (2) through the sample inlet window and is placed on the carrier (21).

10. The detection apparatus according to claim 9, wherein the moving part (2) further comprises an observation window disposed on a side wall of the moving part (2), the observation window being disposed on a side wall opposite to the sample introduction window.

11. A testing system, characterized in that it comprises a transfer device and a testing apparatus according to any one of claims 1-10, said transfer device being capable of transferring an object to be tested to a carrying device (21) of said testing apparatus.