CN212963399U - Detection equipment and detection system - Google Patents
Detection equipment and detection system Download PDFInfo
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- CN212963399U CN212963399U CN202021775274.5U CN202021775274U CN212963399U CN 212963399 U CN212963399 U CN 212963399U CN 202021775274 U CN202021775274 U CN 202021775274U CN 212963399 U CN212963399 U CN 212963399U
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Abstract
The utility model relates to a detection device and a detection system, wherein, the detection device comprises a detection part and a detection cavity arranged in the detection part, and the detection cavity comprises an optical element for optically detecting an object to be detected; the detection part is filled with first gas, the detection chamber is filled with second gas, and the cleanliness of the first gas is equal to or lower than that of the second gas. Through the arrangement, the optical element can be prevented from being polluted by pollutants, the detection precision is ensured, and the optical element is prevented from being damaged.
Description
Technical Field
The utility model relates to an optical detection technical field, concretely relates to check out test set and detecting system.
Background
With the development of semiconductor technology, semiconductor optical detection technology has been operated, and optical detection technology has the advantages of high detection speed, high detection precision, capability of realizing non-contact detection and the like.
The optical detection equipment comprises a detection part, wherein the detection part is provided with an optical element for performing optical detection on an object to be detected, and gas flows in the detection part all the time to ensure the cleanliness in the detection part and avoid the pollution of pollutants on the optical element to influence the detection precision or damage the optical element.
Therefore, in the process of detecting the object to be detected, how to avoid the contamination to the optical element, ensure the detection accuracy, and avoid damaging the optical element is a technical problem that needs to be solved by those skilled in the art.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a check out test set and detecting system can avoid the pollutant to cause the pollution to optical element, guarantees to detect the precision and avoids damaging optical element.
In order to solve the above technical problem, the present invention provides a detection apparatus, which includes a detection portion and a detection chamber disposed in the detection portion, wherein the detection chamber includes an optical element for optically detecting an object to be detected; the detection part is filled with first gas, the detection chamber is filled with second gas, and the cleanliness of the first gas is equal to or lower than that of the second gas.
The detection cavity is located the detection portion, and the detection portion intussuseption is filled with first gas, and the detection cavity intussuseption is filled with the second gas, and that is to say that the optical element who is located the detection cavity can receive the two-layer gas protection of first gas and second gas, and the reliability is higher. In addition, the cleanliness of the second gas in this embodiment is not lower than that of the first gas, so that the cleanliness of the optical element located in the detection chamber can be further ensured, the optical element is prevented from being polluted by pollutants, the detection accuracy is ensured, and the optical element is prevented from being damaged.
Optionally, the detection chamber includes a first chamber and a second chamber, and the optical element includes a detection device and a lens assembly disposed in the first chamber and a light source device disposed in the second chamber.
Optionally, an optical element cavity is disposed in the first cavity, the lens assembly is disposed in the optical element cavity, and the optical element cavity is filled with the second gas.
Optionally, the device further comprises a moving part located below the detection part, a bearing device and a moving device are arranged in the moving part, the bearing device is used for bearing an object to be detected and driving the object to be detected to move, and the moving device is used for driving the bearing device to move.
Optionally, the detection apparatus further includes a gas supply portion and a pumping portion, the detection chamber includes a first chamber, and the optical element includes a detection device and a lens assembly disposed in the first chamber; the gas supply part is used for supplying gas to the detection part, the first chamber and the movement part and is respectively communicated with the detection part, the first chamber and the movement part in a ventilation way; the pumping part is used for exhausting the gas of the detection part, the first chamber and the movement part and is communicated with the detection part, the first chamber and the movement part in a ventilation mode.
Optionally, the gas supply part comprises a first gas supply part and a second gas supply part, the first gas supply part is used for providing the first gas for the detection part, the first gas supply part is provided with a first filtering device, and the first filtering device is used for generating the first gas; the second gas supply part is used for supplying the second gas to the first chamber and the movement part, and is provided with a second filtering device which is used for generating the second gas; the first filtering means has a filtering grade equal to or lower than the filtering grade of the second filtering means.
Optionally, the detection chamber further includes a second chamber, the optical element includes a light source device disposed in the second chamber, the detection apparatus further includes a gas supply device communicated with the second chamber, the gas supply device is configured to provide a third gas to the second chamber, and cleanliness of the third gas is higher than or equal to cleanliness of the second gas;
or the second chamber is in ventilation communication with the second gas supply part, and the second gas supply part is used for supplying the second gas to the second chamber;
the gas-liquid separator further comprises an exhaust device, and the exhaust device is used for exhausting gas in the second chamber.
Optionally, the moving part further includes a sample injection window disposed on a sidewall of the moving part, and the object to be measured enters the moving part through the sample injection window and is placed on the carrying device.
Optionally, the first chamber and the moving part are both provided with an air inlet and an air outlet, and the air inlet is communicated with the air supply part through an air duct; and the gas in the first chamber and the moving part is discharged through the gas outlet.
Optionally, still include the cabinet body, the air feed portion the detection portion with the motion portion is located from top to bottom in proper order the cabinet is internal.
In addition, this application still has a detecting system, and it includes transmission device and check out test set as above, transmission device can with the measured object transmit to check out test set's load-bearing device.
The technical effect of the detection system with the detection device is similar to that of the detection device, and is not repeated herein for saving space.
Drawings
Fig. 1 is a schematic structural diagram of a detection apparatus provided in an embodiment of the present invention;
FIG. 2 is a schematic view of the structure of the moving part and the partition;
FIG. 3 is a schematic view of the structure of the motion part;
fig. 4 is an enlarged view of a in fig. 3.
In the accompanying fig. 1-4, the reference numerals are illustrated as follows:
1-detection part, 11-first chamber, 12-second chamber;
2-a moving part, 21-a bearing device, 22-a blowing device, 23-an air plate, 24-a blowing hole, 25-an air inlet and 26-an air outlet;
3-partition, 31-detection window;
4-an air supply part;
5-pumping and draining part.
Detailed Description
In order to make those skilled in the art better understand the technical solution of the present invention, the present invention will be further described in detail with reference to the accompanying drawings and specific embodiments.
Referring to fig. 1-4, fig. 1 is a schematic structural diagram of a detection apparatus according to an embodiment of the present invention; FIG. 2 is a schematic view of the structure of the moving part and the partition; FIG. 3 is a schematic view of the structure of the motion part; fig. 4 is an enlarged view of a in fig. 3.
The embodiment of the utility model provides a check out test set and detecting system, wherein, this check out test set includes detection portion 1 and the detection cavity that is located this detection portion 1, including being used for carrying out optical detection's optical element to the object of awaiting measuring (like wafer etc.) in the detection cavity, and 1 intussuseption of detection portion is filled with first gas, and it has the second gas to detect the intussuseption of cavity, and the cleanliness of first gas equals or is less than the gaseous cleanliness of second.
In detail, the detection chamber is located in the detection part 1, the detection part 1 is filled with the first gas, the detection chamber is filled with the second gas, that is to say, the optical element located in the detection chamber can be protected by two layers of gas of the first gas and the second gas, and the reliability is higher. In addition, the cleanliness of the second gas in this embodiment is not lower than that of the first gas, so that the cleanliness of the optical element located in the detection chamber can be further ensured, the optical element is prevented from being polluted by pollutants, the detection accuracy is ensured, and the optical element is prevented from being damaged.
In the above embodiment, the detection chamber includes the first chamber 11 and the second chamber 12, and the optical element includes the lens assembly and the detection device disposed in the first chamber 11 and the light source device disposed in the second chamber 12. Because the light energy emitted by the light source is high, if impurities such as dust exist, the light irradiates on the impurities and then irradiates on other elements to cause damage, and therefore, the requirement on the cleanliness of the gas in the second chamber 12 is high, and the service life of the light source device is ensured. Therefore, in the detection chamber, the light source device, the lens assembly and the detection device are separately arranged, and the gas cleanliness of the space where the light source device is located is further ensured.
Further, an optical element cavity is arranged in the first cavity 11, the lens assembly is arranged in the optical element cavity, the detection device is located in the first cavity 11, the optical element cavity is filled with second gas, and the lens assembly is further arranged in the optical element cavity in order to protect the lens assembly and the surface of the object to be detected from being polluted.
In this embodiment, the detection apparatus further includes a moving portion 2 located below the main chamber, a carrying device 21 and a moving device are disposed in the moving portion, the carrying device 21 is configured to carry an object to be detected and drive the object to be detected to move, the moving device is configured to drive the carrying device 21 to perform translational motion and rotational motion, and the optical element is capable of performing optical detection on the object to be detected located on the carrying device 21.
The moving part 2 is also internally provided with at least one purging device 22 for providing purging gas for the object to be tested borne by the bearing device 21, the purging device 22 can purge the surface of the object to be tested and the space above the surface of the object to be tested, so that the surface cleanliness of the object to be tested is ensured, the pollution of pollutants on the object to be tested is avoided, and the product quality of a chip prepared by the object to be tested is ensured.
In the above embodiment, as shown in fig. 4, the purging device 22 includes the wind plate 23, the wind plate 23 includes a strip-shaped wind blowing surface, the wind blowing holes 24 are located on the wind blowing surface and are uniformly distributed along the extending direction of the wind blowing surface, specifically, the wind plate 23 may be disposed along the side of the preset movement path of the carrying device 21, and the wind plate 23 penetrates through the moving portion 2 along the extending direction of the wind blowing surface, so that the purging gas blown out by the wind blowing holes 24 of the wind plate 23 can cover the movement range of the carrying device 21, in this embodiment, the air outlet directions of the plurality of wind blowing holes 24 are parallel to the carrying surface of the carrying device 21, and the purging device 22 purges the object to be tested carried by the carrying device 21.
Further, the number of the purging devices 22 is multiple, and the purging devices 22 are respectively arranged outside the movement range of the carrying device 21; the plurality of blowing devices 22 include two mirror-symmetric first blowing devices 22, the two blowing devices 22 are both located outside the movement range of the carrying device 21 and do not interfere with the movement of the carrying device 21, and the two blowing devices 22 are respectively located at two sides of the carrying device 21, and the first mirror-symmetric planes of the two first blowing devices 22 are perpendicular to the carrying surface of the carrying device 22, in this embodiment, the two first blowing devices 22 may be arranged in parallel (specifically, the two wind plates 23 are arranged in parallel), as shown in fig. 3; or the two first purging devices 22 may be disposed to intersect each other.
The sweep gas of sweeping device 21 can form the air curtain between motion portion 2 and detection portion 1, can the separation motion portion 2 and the intercommunication of the gas in the detection portion 1 to block because can produce in the pollutant such as piece gets into detection portion 1 when carrying device 21 is mechanical motion, prevent that the pollutant in motion portion 2 from getting into and causing the pollution to optical element in the detection portion 1, thereby can avoid damaging optical element, and guarantee to carry out optical detection's detection precision to the object to be measured through this optical element.
Further, as shown in fig. 2, a partition plate 3 is disposed between the detecting portion 1 and the moving portion 2, that is, the partition plate 3 is disposed between the first chamber 1 and the moving portion 2, the partition plate 3 can form a partition between the detecting portion 1 and the moving portion 2, so as to ensure that the detecting portion 1 and the moving portion 2 are both independent spaces, and that the first chamber 11 and the moving portion are both independent spaces, meanwhile, the partition plate 3 is provided with a detecting window 31 communicated between the main chamber and the moving portion 2, and the optical element can optically detect the object to be detected placed on the moving platform through the detecting window 31. The air curtain is arranged at the detection window 31 to form a barrier at the detection window 31, and meanwhile, the detection window 31 is also used for enabling part of the gas in the moving part 2 to enter the sub-chamber, namely the detection chamber (specifically, an optical element chamber in the detection chamber) or the optical element chamber, so that the detection chamber or the optical element chamber is filled with the second gas. The setting of this baffle 3 can reduce the area of intercommunication between detection portion 1 and the motion portion 2, further guarantees that the pollutant in the motion portion 2 can not get into in detection portion 1 or the pollutant in detection portion 1 can not fall on the object surface that awaits measuring.
In the above embodiment, the detection apparatus further includes a gas supply portion 4 and a pumping portion 5, wherein the gas supply portion 4 is configured to supply gas to the detection portion 1, the first chamber 11, and the moving portion 2 and is in ventilation communication with the detection portion 1, the first chamber 11, and the moving portion 2, respectively, and the pumping portion 5 is configured to discharge gas from the detection portion 1, the first chamber 11, and the moving portion 2 and is in ventilation communication with the detection portion 1, the first chamber 11, and the moving portion 2.
Further, the gas supply unit 4 includes a first gas supply unit for supplying the first gas to the detection unit 1, and a second gas supply unit for supplying the second gas to the first chamber and the movement unit, and the cleanliness of the second gas is equal to or higher than the cleanliness of the first gas.
In another embodiment, it is also possible that the first chamber 11 is provided with second filtering means for varying the cleanliness of the gas entering the first chamber 11; the moving part 2 is provided with a second filtering device for changing the cleanliness of the gas entering the moving part 2; the detection part 1 is provided with a first filtering device which is used for changing the cleanliness of the gas entering the detection part 1; the filtering grade of the second filtering device is equal to or higher than that of the first filtering device. That is, the cleanliness of the gas entering the first chamber 11 and the cleanliness of the gas entering the moving part 2 are higher than those of the gas entering the detecting part 1, so as to ensure the cleaning effect on the object to be measured and the cleanliness of the optical components located in the first chamber 11.
Further, because the light source device is placed in the second chamber 12, the cleanliness of the gas in the second chamber 12 is high, so that the service life of the light source device is ensured. In this embodiment, to ensure the cleanliness of the gas in the second chamber 12, there are mainly the following two methods: one method is by providing a gas supply means in communication with the second chamber 12 for supplying a third gas separately to the second chamber 12, the cleanliness of the third gas being equal to or higher than the cleanliness of the second gas to ensure the cleanliness of the gas in the second chamber; another method is that the second chamber 12 is in air communication with a second gas supply, that the second chamber 12 is supplied with a second gas, and that the detection device further comprises pumping means for separately evacuating the gas from the second chamber 12.
In the above embodiment, the moving part 2 further includes a sample injection window disposed on a side wall of the moving part 2, and the object to be measured enters the moving part 2 through the sample injection window and is placed on the carrying device. The transfer device can transfer the object to be detected from the sample introduction window to the bearing device 21 of the detection equipment.
The moving part 2 comprises a gas inlet 25 and a gas outlet 26, the gas inlet 25 is in ventilation communication with the purging device 22, the cleaning gas enters from the gas inlet 25 and is blown out of the moving part 2 by the purging device 22, the gas outlet 26 is positioned below or flush with the bearing surface of the bearing device, namely, as shown in fig. 3, the distance from the gas inlet 25 to the main chamber is smaller than that from the gas outlet 26 to the main chamber, and the gas outlet 26 is configured to discharge the purging gas in the moving part 2 to the outside of the detection equipment, so that the purging gas can be discharged from the gas outlet 26 after the object to be detected is cleaned. In this embodiment, specific positions of the gas inlet 25 and the gas outlet 26 are not limited, for example, the gas inlet 25 may be disposed above the carrying device 21, and the gas outlet 26 is located below the carrying device 21, the purge gas is provided to the object to be detected carried by the carrying device 21 by the purge device 22, and the purge gas is discharged from the gas outlet 26 located below the carrying device 21 after purging the object to be detected, so that the pollutant mixed in the purge gas does not stay at an upper position, thereby preventing the pollutant from polluting the object to be detected, and simultaneously preventing the pollutant from being entrained by the gas and diffusing upwards into the detection portion 1, thereby providing protection for the optical element and preventing the pollutant from polluting the optical element.
In the present embodiment, the side wall of the moving part 2 includes at least one set of air outlets 26, each set of air outlets 26 includes at least one air outlet, the air outlets 26 may be disposed on any side wall of the moving part 2, and in the present embodiment, the air outlets 26 are preferably disposed on the side wall perpendicular to or intersecting the extending direction of the air plate 3.
Alternatively, the exhaust portion 5 may be used only for exhausting the gas in the detecting portion 1, and in this case, the detecting device further includes an air exhausting device for exhausting the gas in the moving portion 2 through the air outlet 26.
Further, this check out test set still includes the cabinet body, above-mentioned air feed portion 4, the detection portion 1, the portion of moving 2 and pump drainage portion 5 are located this cabinet is internal from top to bottom in proper order, of course, in this embodiment, do not do the specific requirement to the position that sets up between each part, if still can set up the top at the portion of moving 2 with the detection portion 1 to it is all enough to set up air feed portion 4 and pump drainage portion 5 in the side, and can reduce the occupation of land space of each part when setting gradually from top to bottom, the field layout of being convenient for.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of improvements and decorations can be made without departing from the principle of the present invention, and these improvements and decorations should also be regarded as the protection scope of the present invention.
Claims (11)
1. The detection equipment is characterized by comprising a detection part (1) and a detection chamber arranged in the detection part (1), wherein the detection chamber comprises an optical element for optically detecting an object to be detected;
the detection part (1) is filled with a first gas, the detection chamber is filled with a second gas, and the cleanliness of the first gas is equal to or lower than that of the second gas.
2. A test device according to claim 1, wherein the test chamber comprises a first chamber (11) and a second chamber (12), and the optical element comprises a probe and lens assembly provided in the first chamber (11) and a light source device provided in the second chamber (12).
3. The detection apparatus according to claim 2, wherein an optical element chamber is provided in the first chamber (11), the lens assembly being disposed in the optical element chamber, the optical element chamber being filled with the second gas.
4. The detection apparatus according to claim 1, further comprising a moving portion (2) located below the detection portion (1), wherein a carrying device (21) and a moving device are disposed in the moving portion (2), the carrying device (21) is configured to carry an object to be detected and drive the object to be detected to move, and the moving device is configured to drive the carrying device (21) to move.
5. A test device according to claim 4, further comprising a gas supply (4) and a pump (5), the test chamber comprising a first chamber (11), the optical element comprising a detection means and a lens assembly provided in the first chamber (11);
the gas supply part (4) is used for supplying gas to the detection part (1), the first chamber (11) and the movement part (2), and is respectively communicated with the detection part (1), the first chamber (11) and the movement part (2) in a ventilation way;
the pumping and exhausting part (5) is used for exhausting the gas of the detection part (1), the first chamber (11) and the movement part (2) and is communicated with the detection part (1), the first chamber (11) and the movement part (2) in a ventilation mode.
6. The detection apparatus according to claim 5, wherein the gas supply portion comprises a first gas supply portion for supplying the detection portion (1) with the first gas and a second gas supply portion provided with a first filtering means for generating the first gas;
the second gas supply part is used for supplying the second gas to the first chamber (11) and the moving part (2), and is provided with a second filtering device which is used for generating the second gas;
the first filtering means has a filtering grade equal to or lower than the filtering grade of the second filtering means.
7. The detection apparatus according to claim 6, wherein the detection chamber further comprises a second chamber (12), the optical element comprises a light source device disposed in the second chamber (12), the detection apparatus further comprises a gas supply device in communication with the second chamber (12), the gas supply device being configured to supply a third gas to the second chamber (12), the cleanliness of the third gas being higher than or equal to the cleanliness of the second gas;
or, the second chamber (12) is in ventilation communication with the second gas supply for providing the second gas to the second chamber (12);
further comprising an evacuation device for evacuating gas from the second chamber (12).
8. The detection apparatus according to any one of claims 4 to 7, wherein the moving part (2) further comprises a sample inlet window disposed on a side wall of the moving part (2), and the object to be detected enters the moving part (2) through the sample inlet window and is placed on the carrier (21).
9. The detection apparatus according to any one of claims 5 to 7, wherein the first chamber (11) and the moving portion (2) are each provided with an air inlet (25) and an air outlet (26), the air inlet (25) communicating with the air supply portion (4) through an air duct; the gas in the first chamber (11) and the moving part (2) is discharged through the gas outlet (26).
10. The detection device according to any one of claims 5 to 7, further comprising a cabinet body, wherein the air supply part (4), the detection part (1) and the movement part (2) are sequentially arranged in the cabinet body from top to bottom.
11. A testing system, characterized in that it comprises a transfer device and a testing apparatus according to any one of claims 1-10, said transfer device being capable of transferring an object to be tested to a carrying device (21) of said testing apparatus.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021775274.5U CN212963399U (en) | 2020-08-21 | 2020-08-21 | Detection equipment and detection system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021775274.5U CN212963399U (en) | 2020-08-21 | 2020-08-21 | Detection equipment and detection system |
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| Publication Number | Publication Date |
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| CN212963399U true CN212963399U (en) | 2021-04-13 |
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| CN202021775274.5U Active CN212963399U (en) | 2020-08-21 | 2020-08-21 | Detection equipment and detection system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114486205A (en) * | 2022-02-21 | 2022-05-13 | 上海天马微电子有限公司 | Optical testing device and method |
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- 2020-08-21 CN CN202021775274.5U patent/CN212963399U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114486205A (en) * | 2022-02-21 | 2022-05-13 | 上海天马微电子有限公司 | Optical testing device and method |
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