JPH119927A - Filter checkup device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a filter checkup device capable of easily and efficiently checking up on filters installed side by side in a room intended for cleaning. SOLUTION: The filter checkup device comprises filters 4 for cleaning the air to be supplied to the interior of a room, arranged side by side, with the outlet face of the juxtaposed filter group G provided on the ceiling or lateral wall of a room 2 intended for cleaning. In addition, a traveling frame 10 positioned along the outlet face of the juxtaposed filter group G is freely movable in a direction along the outlet face of the juxtaposed filter group G in a direction perpendicular to the longitudinal direction of the traveling frame 1 and is erected between the internal opposed room walls 6A, 6B of the room 2 at a position to the outlet face side of the room 2. Further, a filter checkup instrument 11 is mounted on the traveling frame 10 in such a manner that the instrument 11 is freely movable in the longitudinal direction of the traveling frame 10.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a filter inspection apparatus, and more particularly, to a filter inspection apparatus, in which a plurality of filters for purifying air supplied to a room are arranged in parallel, and an outlet surface of the juxtaposed filter group is attached to a ceiling surface or a side surface of the room. The present invention relates to a filter inspection apparatus that performs an inspection such as a leak inspection or a blow-off air velocity inspection on these juxtaposed filters in a purifying target chamber.

[0002]

2. Description of the Related Art Conventionally, as this type of filter inspection apparatus, as disclosed in Japanese Patent Publication No. 3-50210, an XY operation type scanner for scanning and moving a filter inspection tool is used.
There is a type in which a filter is mounted on filter support frames on both sides of a filter in a state where the filter is straddled, and in this mounted state, a filter inspection tool is scanned over an outlet surface of the filter in the straddled state.

Further, Japanese Patent Publication No. Hei 5-10605 and Japanese Patent Application Laid-Open
As shown in Japanese Patent Publication No. 3-7820, a trolley for traveling on the floor is equipped with an XY operation type or a movable arm type scanner,
In some cases, the scanner mounted on the carriage causes the filter inspection tool to scan the exit surface of the filter above the carriage.

[0004]

However, in any of the above-mentioned conventional apparatuses, in order to inspect all of the juxtaposed filters in the chamber to be purified, a filter support is provided separately from the scanning movement of the filter inspection tool by the scanner. It is necessary to sequentially move the inspection apparatus itself (in other words, the entire inspection apparatus) to a position corresponding to the filter to be inspected by replacing the scanner with respect to the frame or running the carriage.
There is a problem that the inspection work is complicated and the efficiency of the inspection work is low.

In particular, in a purifying target room where the outlet surface of the juxtaposed filter group has a ceiling surface, replacement work of the scanner with respect to the filter support frame and traveling of the trolley are performed over the entire room. In many cases, evacuation movement is required, which has made the inspection work more complicated and further reduced the efficiency of the inspection work.

[0006] In view of the above circumstances, a main problem of the present invention is to inspect a juxtaposed filter in a chamber to be purified.
By streamlining the moving configuration of the filter inspection tool, the above problem is solved, and the inspection of the juxtaposed filters in the chamber to be purified can be easily and efficiently performed.

[0007]

[Means for Solving the Problems]

[1] In the invention according to claim 1, in the purifying target room where the outlet surface of the juxtaposed filter group is a ceiling surface or a side surface of the room,
The traveling frame in the posture along the exit surface of the juxtaposed filter group,
It is movable in the direction perpendicular to the longitudinal direction along the outlet surface, is erected between opposing chamber walls in the room at a position near the outlet surface in the room, and a filter inspection is performed on the traveling frame. Since the tool is movably mounted in the longitudinal direction of the traveling frame, the outlet of the juxtaposed filter group can be formed only by a combination of the operation of moving the traveling frame installed between the chamber walls and the operation of moving the filter inspection tool with respect to the traveling frame. The filter inspection tool can be easily moved to any point on the surface, and the filter inspection tool can be continuously scanned and moved over the entire exit surface of the juxtaposed filter group.

In other words, this makes it possible to inspect all of the juxtaposed filters in the chamber to be purified without the necessity of sequentially moving the inspection apparatus itself by changing the scanner with respect to the filter support frame or moving the carriage.

Further, since the traveling frame is erected between the chamber walls at a position near the exit surface of the juxtaposed filter group and is moved in the direction along the exit surface, the purifying target chamber having the exit surface of the juxtaposed filter as the ceiling surface. Even in the case of the above, coupled with the fact that it is not necessary to replace the scanner with respect to the filter support frame or to move the carriage as described above, the evacuation movement of the indoor equipment to another place for the movement of the traveling frame is not required, or In addition, it is possible to inspect the juxtaposed filters by greatly reducing the number of indoor equipment requiring evacuation movement, and from these facts, it is possible to greatly facilitate the inspection of the juxtaposed filters in the room to be purified as compared with the conventional apparatus. And the inspection efficiency can be greatly improved.

In addition, a seal portion between frames of adjacent filters (a seal portion between filter frames of adjacent filters)
In the case of a leak test for a conventional filter, the test device itself is sequentially moved to a position corresponding to the filter to be tested. In the conventional device, a leak test for the seal between the frames around the periphery of one filter and the test device are moved to the next position. Leak inspection for the seal between the frames around the periphery of the next filter
There is a part where the leak inspection overlaps, and in order to avoid the overlapping inspection, various changes of the scanning path are required in the scanning movement of the filter inspection tool by the scanner, so that the scanning control becomes difficult. With the described invention, as described above, the inspection apparatus itself does not need to be sequentially moved,
Since the filter inspection tool can be moved to any point on the outlet face of the juxtaposed filter group, the inter-frame seal portion that is linearly continuous across a plurality of filters on the outlet face of the juxtaposed filter group is continuously formed from one end to the other end. Leak testing can also be performed, and the waste of the above-described overlapping leak testing can be easily eliminated. From this point as well, easy and efficient inspection of the juxtaposed filters in the chamber to be purified can be effectively achieved.

[2] In the invention according to claim 2, a driving mechanism for moving the traveling frame and a driving mechanism for moving the filter inspection tool with respect to the traveling frame are provided. There is provided setting means for setting a scanning pattern of the filter inspection tool with respect to the surface, and scanning control means for operating each of the above driving mechanisms so as to scan and move the filter inspection tool in accordance with the scanning pattern set by the setting means. According to the contents of the inspection, only setting a required scanning pattern of the filter inspection tool with respect to the exit surface of the juxtaposed filter group, automatically scanning and moving the filter inspection instrument with the required scanning pattern to inspect the juxtaposed filter. This makes it easier to inspect the juxtaposed filters in the chamber to be purified, and also Efficiency can be further improved.

[3] According to the third aspect of the present invention, each of the chamber walls on which the traveling frame is constructed has a bridging recess extending in the traveling frame moving direction, and a guide mechanism for guiding the traveling frame, and Since the drive mechanism for moving the traveling frame is disposed inside these erection recesses, compared to the case where the above-mentioned guide mechanism and drive mechanism are disposed in the room in an exposed state, it is possible to use the filter for normal use of the chamber to be purified and for the filter. At the time of inspection, it is possible to prevent the clean air blown out from the outlet face of the juxtaposed filter group from being disturbed due to the presence of these guide mechanisms and drive mechanisms in the room. It is possible to maintain a high level of indoor cleanliness by preventing a decrease in indoor cleanliness due to air turbulence. It is possible to perform the inspection.

Further, for structural reasons, the moving range of the filter inspection tool in the longitudinal direction of the traveling frame is restricted to be slightly shorter than the frame length of the traveling frame. Even when the tool cannot be moved, the guide mechanism is arranged inside the erection recess as described above, and the guide to each end in the longitudinal direction of the traveling frame is performed inside the erection recess, so that the movement range of the filter inspection tool can be improved. The moving range of the filter inspection tool in the longitudinal direction of the traveling frame, in a state in which each end in the longitudinal direction of the traveling frame coming off from the inside of the recess for erection,
A range including both ends in the longitudinal direction of the traveling frame on the outlet surface of the juxtaposed filter group can be secured, and both ends of these outlet surfaces can be appropriately inspected.

[4] In the invention according to the fourth aspect, since a lid which can be opened and closed to close the mounting recess is provided, the lid is opened at the time of filter inspection, and the guide mechanism provided inside the mounting recess is provided. During normal use of the chamber to be purified, this lid is closed to allow the movement of the traveling frame under the guidance by the turbulence, and the turbulence of the air flow due to the presence of the recess in the chamber wall and the accumulation of dust in the recess are achieved. Can be prevented,
The cleanliness of the room to be purified during normal use can be maintained even higher.

[5] According to the fifth aspect of the present invention, since the suction means for sucking and discharging air from the inside of the mounting recess is provided, the interior of the recess is provided in the recess when the traveling frame is moved during the filter inspection. Even if dust is generated in the guide mechanism or the drive mechanism, the dust can be prevented from flowing out into the room by the above-described air suction, thereby preventing a decrease in inspection accuracy due to dust flowing out from the mounting recess. Thus, the filter inspection can be performed with higher accuracy.

[6] In the invention according to the sixth aspect, for storing the traveling frame in the chamber wall located at the end in the traveling frame moving direction by extending the traveling frame from a position corresponding to the exit surface of the juxtaposed filter group. Since the concave portion is provided, during normal use of the purifying target chamber, the traveling frame is stored in the storage concave portion, and the juxtaposed filter group due to the existence of the traveling frame is compared with leaving the traveling frame in the erected state on the indoor side. Thus, it is possible to prevent turbulence of the air blown from the air, thereby preventing a decrease in indoor cleanliness due to airflow turbulence, and to maintain high indoor cleanliness during normal use of the room to be purified.

Further, since the traveling frame is stored in the storage recess by the extension movement from the position corresponding to the outlet face of the juxtaposed filter group, the traveling frame is removed during normal use of the chamber to be purified. In comparison, additional work such as clearing after completion of the filter inspection and preparation for performing the filter inspection can be significantly reduced.

[7] In the invention according to the seventh aspect, the drive mechanism for moving the traveling frame is disposed inside the storage recess. During use and filter inspection, it is possible to prevent the air blown from the outlet face of the juxtaposed filter group from being disturbed due to the presence of the drive mechanism in the room. Can prevent the deterioration of the indoor cleanliness more effectively, and can maintain the indoor cleanliness even higher. It can be carried out.

[8] In the invention according to the eighth aspect, since a lid which can be opened and closed to close the storage recess is provided, the lid is closed during normal use of the chamber to be purified. Similarly to the lid of the erection recess in the invention of the invention, it is possible to prevent airflow turbulence due to the presence of the recess in the chamber wall and the accumulation of dust in the recess, thereby reducing the indoor cleanliness during normal use of the room to be purified. It can be kept higher.

[0020]

[9] In the invention according to claim 9, the filter inspection tool is attached to the traveling frame so as to be deviated to the side opposite to the storage recess side with respect to the width center of the traveling frame in the traveling frame moving direction. There is a limit to the range of movement of the traveling frame to the side opposite to the side of the storage recess, and the center of the width of the traveling frame in the traveling frame moving direction is the storage recess of the two end edges of the exit surface of the juxtaposed filter group. Even when the traveling frame cannot be moved to a position corresponding to the edge opposite to the side of the filter inspection tool, the filter inspection tool is attached to the traveling frame in a biased state as described above. As the moving range, it is possible to secure a range including the edge on the opposite side to the side of the storage recess among the both ends of the outlet face of the juxtaposed filter group, and this edge is also appropriately Can 査.

On the side of the storage recess, a part or all of the running frame is inserted into the storage recess by the above-mentioned extended movement by using the storage recess, thereby making the filter as described above. While adopting a structure in which the inspection tool is biased to the opposite side to the storage recess side and attached to the traveling frame, the range of movement of the filter inspection tool due to the movement of the traveling frame is the both end edges of the outlet face of the juxtaposed filter group. Among these, a range including the edge on the side of the storage recess can be secured, and this edge can also be appropriately inspected.

[10] In the invention according to claim 10, the cable-like tool extending from the filter inspection tool is held along the traveling frame while allowing the filter inspection tool to move with respect to the traveling frame. Since the mechanism is provided, the cable-shaped tool extending from the filter testing tool is moved along with the movement of the filter testing tool in a state of being simply hung. Can be effectively prevented.

In the case of a leak test, a tube for transporting the sampling air sucked and collected by the filter test tool is required as a cable-like tool extending from the filter test tool. By holding the tube along the traveling frame by the holding mechanism, it is possible to prevent the tube from being bent excessively, and prevent the trouble of leak inspection from being caused by the pneumatic transportation trouble due to the excessive bending, and from these things. In addition, the inspection of the juxtaposed filter in the chamber to be purified can be further smoothly performed.

[11] According to the eleventh aspect of the present invention, a state in which a cable-like member extending between the traveling frame and a room wall on which the traveling frame is installed is allowed to move along the room wall while allowing the traveling frame to move. Since the cable-like member holding mechanism for holding the cable-like member is provided, the cable-like member to be passed between the traveling frame and the room wall is moved along with the movement of the traveling frame in a state where the cable-like member is simply hung down. In contrast, this cable-like device may get caught in indoor equipment or hinder the work, and in the case of a leak test, the tube as a cable-like device may be bent excessively, which may hinder the leak test due to air transport problems. Can be effectively prevented, and from these, the inspection of the juxtaposed filter in the chamber to be purified can be further smoothly performed.

[12] In the twelfth aspect of the invention, guide rails extending in the traveling frame moving direction are provided on each of the chamber walls on which the traveling frame is installed, and the guide rails move along the respective guide rails. In the guide structure for causing the traveling implement to receive both ends in the longitudinal direction of the traveling frame, relative movement of the traveling frame and the traveling implement in the longitudinal direction of the traveling frame on at least one of the longitudinal ends of the traveling frame. Or, since an accommodating mechanism that allows relative rotation between the traveling frame and the traveling tool is provided, even if a slight displacement occurs between the traveling frame and the guide rail due to aging or an earthquake, the accommodating means is provided. The displacement is absorbed by the relative movement and relative rotation between the traveling frame and the traveling implement, and the traveling frame moves smoothly under the guidance by the guide rails. The can be maintained, excellent durability in this respect, also, can be a maintenance easy filter inspection apparatus.

[0026]

FIG. 1 shows a clean booth provided with an inspection function for an air purification filter for an internal chamber. A lattice-shaped filter support frame 3 is provided on a ceiling of a purification target chamber 2 formed in the booth 1. And a large number of filters 4 are supported by the filter support by the filter support frame 3.
By arranging (for example, a HEPA filter or an ULPA filter) in parallel on the ceiling, the entire surface of the ceiling of the chamber 2 to be purified is made to be a clean air outlet formed by the exit surface of the juxtaposed filter group G.

In the booth 1, the space above the juxtaposed filter group G (in other words, the space above the ceiling) is used as an air supply chamber 5 for supplying air to the chamber 2 to be purified via the juxtaposed filter group G. A return air passage 8 is formed next to the target room 2 using the room wall 6A as a partition, and communicates an exhaust port 7 provided at a lower portion of the room wall 6A with the air supply chamber 5. And a circulation fan 9 for circulating air in the order of the air supply chamber 5, the purification target chamber 2, and the return air passage 8. That is, in this air circulation, the clean air purified by the juxtaposed filter 4 is blown out into the room from the entire exit surface of the juxtaposed filter group G (that is, the entire surface of the ceiling surface) in a downward laminar flow to the inside of the chamber 2 to be purified. The interior of the room is made a high cleanness space suitable for manufacturing chemicals and semiconductor components, for example.

The exhaust port 7 is arranged in a long side direction (FIG. 1) by a series of long openings or a plurality of ports arranged in a row.
In the depth direction of the drawing).
Also, the return air passage 8 has an air path width extending along the entire length of the purification target chamber 2 in the long side direction, and a plurality of circulation fans 9 are arranged in the return air passage 8 side by side along the long side direction of the purification target chamber 2. Thereby, the airflow state in the room to be purified 2 is made uniform in the long side direction of the room 2 to be purified, and the cleanliness of the room is promoted.

Inspection of the juxtaposed filters 4 is carried out at appropriate times to ensure the cleanliness of the room. As an additional configuration for this filter inspection, the booth 1 is formed by the exit surface of the juxtaposed filter group G. The traveling frame 10 extending in the direction of the short side of the chamber 2 to be purified in the attitude along the ceiling surface (the horizontal direction in the drawing in FIG. 1) is moved along the ceiling surface in a direction orthogonal to the longitudinal direction (that is, the chamber to be purified). 2 in the direction of the long side), is installed between the opposing room walls 6A and 6B at a high position near the ceiling, and the filter inspection tool 11 is mounted on the traveling frame 10 by the traveling frame. Attached movably in the longitudinal direction.

That is, the moving operation of the traveling frame 10
In combination with the operation of moving the filter inspection tool 11 with respect to the traveling frame 10, the filter inspection tool 11 can be moved to any position on the exit surface of the juxtaposed filter group G, and all of the juxtaposed filters 4 are moved by this inspection tool movement. Can be inspected efficiently.

As a main filter inspection, a suction tool 11a (secondary suction tool) as a filter inspection tool 11 is attached to the traveling frame 10, and a leak leaks into the air supply chamber 5 while the circulation fan 9 is operating. Powders for inspection (for example, aerosolized dioptyl phthalate (DO)
P) etc., and in this state, a leak test for measuring the amount of particles of the test powder in the sampling air sucked and collected by the suction tool 11a (that is, the amount of leakage of the test powder), As an example of the filter inspection tool 11, there is a blowout wind speed test in which a wind speed sensor 11b is attached to the traveling frame 10 as shown in FIG.

Also, during the leak inspection, an inter-frame seal portion between the filter frames 4a of the adjacent filters 4 (specifically, the filter support frame 3 and the two filter frames 4a).
a) a leak test for the seal portion at the contact portion with the filter member 4a, the filter medium 4b in each filter 4 and the filter frame 4a surrounding the filter medium 4b
And a leak test for each part of the filter material of each filter 4.

Numeral 12 denotes a spraying device for spraying the inspection powder P against the air passing through the return air passage 8 at the time of leak inspection.
Is a plurality of primary side suction tools for suctioning and collecting air in each part in the air supply chamber 5 at the time of a leak test, and 14 is an interior control panel. Of the primary-side suction tool 13 for suctioning and collecting the air in the air supply chamber 5 during the leak inspection (in other words, from which position in the air supply chamber 5 A switching valve device 15 for switching between suction and collection of air) is provided.

Reference numeral 16 denotes a portable computer which is brought into the room at the time of the filter inspection and is connected to the interior control panel 14 via the connector 17 by the connection cord 17a. By controlling the movement of the traveling frame 10 and the movement of the filter inspection tool 11 with respect to the traveling frame 10 via the control unit, the filter inspection tool 11 is automatically set to the exit surface of the juxtaposed filter group G in a set scanning pattern according to the inspection type. Scan and move.

In the case of the blow-off wind speed inspection, the blow-off wind speed inspection is carried out based on wind speed detection information which is sequentially taken into the computer 16 via the interior control panel 14 through the cord 34 from the wind speed sensor 11b which scans and moves as the filter inspection tool 11. The computer 16 is brought in automatically to carry out processing such as organizing, displaying or storing the inspection results.

On the other hand, in the case of a leak test, as the suction tool 11a (secondary suction tool) as the filter test tool 11 is moved by scanning, the primary suction tool 13 corresponding to the position of the suction tool 11a is moved. In accordance with the movement of the suction tool 11a, the carry-in computer 16 controls the interior control panel 14 so as to selectively suction and collect the air in the air supply chamber 5 from the inside.
, The switching valve device 15 is automatically switched.

Then, with the scanning movement of the suction tool 11a,
The secondary sampling air sucked and collected by the suction tool 11a is sequentially taken into the secondary dust measuring device 18A via the interior control panel 14 through the tube 33a, and the inspection powder in the secondary sampling air is taken out. Is measured by the secondary-side dust measuring device 18A and the suction tool 11a
The primary-side sampling air selectively sucked and collected by the primary-side suction tool 13 corresponding to the (secondary-side suction tool) is sequentially taken into the primary-side dust measuring device 18B via the interior control panel 14 through the tube 33b, The primary-side dust measuring device 1 measures the amount of particles of the inspection powder in the primary-side sampling air.
8B, and based on these measurement results, the computer 16 automatically brings in processing such as organizing, displaying, or storing the inspection results for the leak inspection.

The amount of particles of the test powder in the primary sampling air measured by the primary dust meter 18B has a difference in the dispersed concentration of the test powder in each part in the air supply chamber 5. Due to this, the inspection conditions at each inspection point are made uniform for the inspection error that causes a difference in the particle amount of the inspection powder in the secondary sampling air suctioned and collected from each inspection point, and It is used as inspection condition correction data for accurately comparing and determining the magnitude of the particle amount of the inspection powder in the secondary sampling air sucked and collected from the inspection location.

With respect to the scanning pattern of the filter inspection tool 11, in the case of the blow-off wind speed inspection, the wind speed sensor 11b as the filter inspection tool 11 is sequentially positioned at the center of the exit surface of each filter 4 at a set time interval. In the case of a leak test for the inter-frame seal portion (including the outer peripheral seal portion of the juxtaposed filter group G), a suction tool as the filter test tool 11 is employed. By taking advantage of the advantage that the 11a (secondary suction tool) can be continuously moved to any position on the outlet surface of the juxtaposed filter group G, the filter is continuously linearly formed over a plurality of filters 4 as shown in FIG. The suction tool 11a is moved out of the juxtaposed filter group G so that each of the inter-frame seal portions (or the outer peripheral seal portion) is continuously leak-tested from one end to the other end thereof. Employing a scan pattern which moves linearly at a set moving speed from one end face toward the other end.

In the case of a leak test for the filter material surrounding seal portion, as shown in FIG. 2 (b), for each filter 4, the entire circumference of the filter material surrounding seal portion between the filter material 4b and the filter frame 4a surrounding the filter material 4b. A scanning pattern in which the suction tool 11a as the filter testing tool 11 is circularly moved at a set moving speed along the seal portion around the filter medium so as to continuously perform a leak test on the length, and a leak test is performed on each part of the filter medium 4b. In the case of (1), as shown in FIG. 2 (c), the suction tool 11a as the inspection tool 11 is attached to the entire surface of the outlet surface of the filter medium 4b so that the entire surface of the outlet surface of the filter medium 4b is leak-tested for each filter 4. A scanning pattern is used that moves in a meandering manner at a set moving speed. Each of these scanning patterns is stored in the carry-in computer 16 as a set scan pattern by the initial setting operation for the carry-in computer 16.

That is, the carry-in computer 16
Constitutes setting means for setting the scanning pattern of the filter inspection tool 11 with respect to the exit surface of the juxtaposed filter group G. The computer 16 and the control device for automatically moving the inspection tool in the interior control panel 14 include A scanning control unit that operates a driving mechanism for a traveling frame and a driving mechanism for an inspection tool, which will be described later, is configured to scan and move the filter inspection tool 11 according to the set scanning pattern.

As shown in FIGS. 1 and 3 to 7, the guide mechanism for guiding the movement of the traveling frame 10 includes a moving direction of the traveling frame 10 on each of the chamber walls 6A and 6B on which the traveling frame 10 is installed. Are provided, and traveling tools 20 that move along the respective guide rails 19 by the guidance of the guide rails 19 are provided, and the traveling tools 20 receive the respective longitudinal ends of the traveling frame 10. . As a drive mechanism for the traveling frame that moves the traveling frame 10 under the guidance of the guide rails 19, the traveling tool 2 is extended over the side of each of the guide rails 19 in the traveling frame moving direction, and the traveling tool 2
0, an interlocking shaft 23 for interlocking rotation of the drive pulleys 22 of these timing belts 21, and a traveling frame for rotating both drive pulleys 22 by power transmission from one chamber wall 6A side. Motor 24 is provided.

As for the movement of the filter inspection tool 11 with respect to the traveling frame 10, a traveling tool 25 for the inspection tool which moves along the traveling frame 10 with the traveling frame 10 itself as a guide rail is provided. The filter inspection tool 11 is attached to the traveling tool 25 via a jig 26, and a driving mechanism for the inspection tool that moves the filter inspection tool 11 with respect to the traveling frame 10 is a longitudinal mechanism of the traveling frame 10. Over the direction,
A timing belt 27 for moving the inspection tool in which a traveling tool 25 for the inspection tool is connected in the middle thereof, and a driving belt 28 for the timing belt 27 which is located at one longitudinal end of the traveling frame 10 and rotates. The motor 29 is mounted on the traveling frame 10.

That is, the carry-in computer 16
By operating the motor 24 for moving the traveling frame and the motor 29 for moving the inspection tool through the interior control panel 14, the filter inspection tool 11 is moved to the exit surface of the juxtaposed filter group G by the above-described setting scan. Scan and move in a pattern.

In receiving each of the longitudinal ends of the traveling frame 10 with the traveling tool 20, at least one of the longitudinal ends of the traveling frame 10 includes
As shown in FIG. 5, as a means for allowing relative movement of the traveling frame 10 and the traveling tool 20 in the longitudinal direction of the traveling frame and relative rotation of the traveling frame 10 and the traveling tool 20 around the vertical axis Q. The receiving member 30 for the end of the traveling frame 10 is attached to the traveling tool 20 via a bearing 31 so as to be rotatable around the longitudinal axis Q, and the traveling member receives the traveling frame end portion. A roller 32 for guiding the displacement in the longitudinal direction of the frame is provided, so that even if a slight displacement occurs between the traveling frame 10 and the guide rail 19 due to aging or an earthquake, the traveling by the roller 32 is performed. The displacement is caused by the relative movement between the frame 10 and the traveling tool 20 and the relative rotation between the traveling frame 10 and the traveling tool 20 due to the rotation of the receiving member 30 around the longitudinal axis Q. Yield to are also available maintaining smooth movement of the traveling frame 10 under guidance by the guide rail 19.

A cable-like tool extending from the filter inspection tool 11 (ie, the sampling air sucked and collected by the suction tool 11a at the time of leak inspection) is transported to the travel frame 10 as a cable-like tool holding mechanism for the travel frame. Tube 33a and wind speed sensor 11 used in blowout wind speed inspection
b) from the filter inspection tool 11
Cable carrier 35 that holds the vehicle along the traveling frame 10 while allowing the vehicle to move with respect to the traveling frame 10.
In addition, a cable-like tool (a cable-like member (Cable) to be passed between the room wall 6A and the running frame 10 is provided on one chamber wall 6A on which the traveling frame 10 is erected, as a cable-like tool holding mechanism for the chamber wall. That is, a cable for holding the tube 33a and the cord 34 and a connection cable for the inspection tool moving motor 29) along the chamber wall 6A while allowing the traveling frame 10 to move. A bear 36 is provided.

The room walls 6A, 6 on which the traveling frame 10 is installed
B, an erecting recess 37 extending in the traveling frame moving direction is provided, and the traveling frame 10 is provided with the exit surface of the juxtaposed filter group G on the chamber wall 6C located at one end in the traveling frame moving direction. The storage recess 38 is provided for storing by extension movement from a position corresponding to the guide rail 19, the guide rail 19 as the guide mechanism, the timing belt 21 as the drive mechanism for the traveling frame, and the cable carrier 36 on the room wall side. The interlocking shaft 23, the drive pulley 22, and the traveling frame moving motor 24 as a driving mechanism for the traveling frame are disposed inside the mounting recess 37, and the storage recess 38.
It is located inside.

The erection recess 37 and the storage recess 38 described above.
Each of these recesses 37, 38 as shown in FIG.
Lids 39 and 40 that can be freely opened and closed to close the
During normal use of the chamber 2 to be purified, the traveling frame 10 is stored in the storage recess 38 by extension movement thereof, and the lids 39 and 40 close the installation recess 37 and the storage recess 38, so that the interior of the room is closed. A state in which there is no unevenness prevents turbulence in the indoor airflow, thereby maintaining a high degree of indoor cleanliness.

Further, the mounting recess 37 and the storage recess 38 are provided.
Each of the suction means, as suction means, sucks and discharges air from inside the erection recess 37 and the storage recess 38 by the suction force of the circulation fan 9, and discharges the suction air into the suction passage 41.
a, a plurality of suction ports 41 leading to the return air passage 8 are opened, so that when the traveling frame 10 moves at the time of the filter inspection, the interior equipment of the erection recess 37 and the storage recess 38 is provided. (That is, even if dust is generated on the guide rail 19, the traveling frame timing belt 21, the cable wall 36 on the chamber wall side, the interlocking shaft 23, the driving pulley 22, the traveling frame moving motor 24, etc.), The outflow to the indoor side is prevented by the above-described air suction, and a decrease in filter inspection accuracy caused by such generated dust is prevented.

Suction tool 11a as filter inspection tool 11
Alternatively, when attaching the wind speed sensor 11b to the inspection tool traveling tool 25 via the jig 26, the jig 26 includes a dedicated jig 26a for the suction tool 11a and a wind speed sensor 11b as shown in FIG. And a dedicated jig 26b are provided for this purpose, whereby the suction device 11a and the wind speed sensor 11b have different required separation dimensions from the exit surface of the juxtaposed filter group G at the time of inspection. These special jigs 26a and 26b can be easily replaced by replacing them.

The jigs 26a and 26b are provided with a suction tool 11a and a wind speed sensor 11b as the filter inspection tool 11, respectively.
It is structured to be mounted on the traveling frame 10 so as to be deviated in the traveling frame moving direction with respect to the center of the width of the traveling frame 10 to the side opposite to the storage recess 38 side. There is a limit to the range of movement of the traveling frame 10 to the opposite side (for example, a limitation due to contact between the traveling frame 10 and the room wall 6D), and as shown in FIG. Is located at the opposite end of the end face of the outlet face of the juxtaposed filter group G to the side of the storage recess 38 (i.e., in this embodiment, the intersection between the room wall 6D and the ceiling face). Even when the traveling frame 10 cannot be moved to a position corresponding to the above, the moving range of the suction tool 11a and the wind speed sensor 11b due to the movement of the traveling frame 10 includes the edge portion on the side of the chamber wall 6D. It is to be able to ensure.

On the other hand, on the side of the storage recess 38, the running frame 10 is partially or entirely inserted into the storage recess 38 by using the storage recess 38, as shown in FIG. Thus, while adopting a structure in which the filter inspection tool 11 is attached to the traveling frame 10 while being biased to the side opposite to the storage recess 38 as described above, the suction tool 11a and the wind speed sensor 11b due to the movement of the traveling frame 10 are adopted.
Of the end face of the outlet face of the juxtaposed filter group G on the side of the storage recess 38 (i.e., in this embodiment, the intersection of the room wall 6C and the ceiling face). The range is secured.

The range of movement of the filter inspection tool 11 in the longitudinal direction of the traveling frame is slightly shorter than the length of the traveling frame 10 due to structural reasons. Even if the filter inspection tool 11 cannot be moved to each end in the longitudinal direction of the traveling frame 10 due to the restriction, the guide rail 19 is disposed inside the erection recess 37 as described above, and By guiding the end to the inside of the erection recess 37, the end of the running frame that is out of the moving range of the filter inspection tool 11 is set inside the erection recess 37, as shown in FIGS. The suction tool 11 in the running frame longitudinal direction.
The moving ranges of the a and the wind speed sensor 11b include both end portions in the longitudinal direction of the traveling frame on the exit surface of the juxtaposed filter group G (that is, in this embodiment, the intersection between the room wall 6A and the ceiling surface, and the room wall 6B). (Intersection with the ceiling).

[Another Embodiment] Next, another embodiment of the present invention will be described. The exit surface of the juxtaposed filter group G to be inspected is not limited to the one forming the indoor ceiling surface, but may be the one forming the indoor side surface. In this case, the facing room wall on which the traveling frame 10 is installed may be a combination of a ceiling wall and a floor wall, or a combination of facing side walls.

The exit surface of the juxtaposed filter group G to be inspected is not limited to one that forms the whole surface of the indoor ceiling surface or the whole surface of the indoor side wall, but one that forms a part of the indoor ceiling surface or a part of the indoor side wall. It may be.

The movement of the traveling frame 10 and the movement of the filter inspection tool 11 with respect to the traveling frame 10 are not performed by the drive mechanism, but the movement of the traveling frame 10 and the movement of the filter inspection tool 11 with respect to the traveling frame 10 are performed. Both or either one may be performed manually.

When the movement of the traveling frame 10 and the movement of the filter inspection tool 11 with respect to the traveling frame 10 are performed by a driving mechanism, the driving mechanism is not limited to the timing belt type shown in the above-described embodiment, but may be of various types. In addition, the guide mechanism for guiding the movement of the traveling frame 10 and the guide mechanism for guiding the movement of the filter inspection tool 11 with respect to the traveling frame 10 are not limited to the forms shown in the above-described embodiment, but may be various guide forms. Can be adopted.

In the above-described embodiment, the two driving pulleys 22 are interlockedly rotated by the interlocking shaft 23 so that the moving speeds at both ends of the running frame are made to coincide with each other. In a drive structure in which a motor for moving the moving frame and a motor for moving the other end of the running frame 10 are separately provided, the moving speeds of both ends of the running frame may be made to coincide by rotating these motors synchronously.

The filter inspection tool 11 is not limited to the suction tool 11a (secondary suction tool) for leak inspection or the wind speed sensor 11b for blow-off wind speed inspection. Inspection of any content may be performed.

A cable-like member holding mechanism for holding the cable-like members 33a and 34 extending from the filter inspection tool 11 along the traveling frame 10 while allowing the filter inspection tool 11 to move with respect to the traveling frame 10, and a traveling frame. As a cable-like tool holding mechanism for holding the cable-like tools 33a and 34 extending between the base 10 and the room wall 6A where the cable 10 is installed along the room wall 6A while allowing the traveling frame 10 to move. However, the present invention is not limited to the cable carriers 35 and 36 shown in the above-described embodiments, and various holding types can be employed.

A traveling tool 20 that moves along each guide rail 19 by the guidance by the guide rail 19 is attached to the traveling frame 10.
In the guide structure for receiving both ends in the longitudinal direction of the
At least one of the two longitudinal ends of the running frame 10 accommodates the relative movement of the running frame 10 and the running tool 20 in the running frame longitudinal direction or the relative rotation of the running frame 10 and the running tool 20. When providing a mechanism,
The specific structure of the accommodating mechanism is not limited to the structure using the bearings 31 and the rollers 32 as shown in the above-described embodiment, and various structures can be adopted. And the relative rotation of the traveling frame 10 and the traveling implement 20 in the longitudinal direction of the traveling frame, and the relative rotation of the traveling frame 20 and the traveling implement 20 may be allowed.

The purpose of the purifying object room 2 in which the ceiling surface or side surface of the room is formed by the juxtaposed filter group G to be inspected is not limited to a chemical or food manufacturing room or a semiconductor component manufacturing room. Such an application may be used.

[Brief description of the drawings]

FIG. 1 is a front sectional view showing the overall structure of a clean booth.

FIG. 2 is a plan view showing a scanning pattern of the filter inspection tool.

FIG. 3 is a sectional view showing a moving structure.

FIG. 4 is a perspective view showing a moving structure.

FIG. 5 is an exploded perspective view showing a moving structure.

FIG. 6 is a perspective view showing a structure of a mounting recess and a storage recess.

FIG. 7 is a plan view showing an inspection mode for an edge portion of the juxtaposed filter group.

FIG. 8 is a perspective view showing an attached state of a wind speed sensor.

[Explanation of symbols]

 Reference Signs List 4 filter G juxtaposed filter group 2 chamber to be purified 10 traveling frame 6A, 6B, 6C chamber wall 11 filter inspection tool 21, 22, 23, 24 drive mechanism 27, 28, 29 drive mechanism 16 setting means, scan control means 37 for erection Concave portions 19, 20 Guide mechanism 38 Storage concave portions 39, 40 Lids 41, 41a Suction means 33a, 34 Cable-shaped tool 35, 36 Cable-shaped tool holding mechanism 19 Guide rail 20 Running tool 30, 31, 32 Flexible mechanism

Claims (12)

[Claims] 1. A purifying target chamber in which a plurality of filters for purifying air supplied to a room are arranged in parallel, and an outlet surface of the juxtaposed filter group is a ceiling surface or a side surface of the room. The traveling frame in a posture along, the movable in the direction along the outlet surface in a direction perpendicular to the longitudinal direction, and installed between opposing chamber walls in the room at a position near the outlet surface in the room, A filter inspection device in which a filter inspection tool is attached to the traveling frame so as to be movable in the longitudinal direction of the traveling frame. 2. A driving mechanism for moving the traveling frame and a driving mechanism for moving the filter inspection tool relative to the traveling frame, wherein the filter inspection tool with respect to an exit surface of the juxtaposed filter group is provided. 2. The filter according to claim 1, further comprising: setting means for setting a scanning pattern; and scanning control means for operating each of the driving mechanisms so as to scan and move the filter inspection tool in accordance with the scanning pattern set by the setting means. Inspection equipment. 3. A guide mechanism for guiding the traveling frame, and a driving mechanism for moving the traveling frame, wherein a mounting recess extending in the traveling frame moving direction is provided on each of the chamber walls on which the traveling frame is constructed. The filter inspection device according to claim 1, wherein the filter inspection device is disposed inside the mounting recess. 4. The filter inspection apparatus according to claim 3, further comprising a lid that can be freely opened and closed to close the mounting recess. 5. The filter inspection apparatus according to claim 3, further comprising suction means for sucking and discharging air from inside the bridging recess. 6. A storage recess for accommodating the traveling frame by extending from a position corresponding to an outlet surface of the juxtaposed filter group is provided on a chamber wall located at an end in the traveling frame moving direction. The filter inspection device according to any one of claims 1 to 5. 7. The filter inspection apparatus according to claim 6, wherein a drive mechanism for moving the traveling frame is disposed inside the storage recess. 8. The filter inspection device according to claim 6, further comprising a lid that can be opened and closed to close the storage recess. 9. The traveling inspection apparatus according to claim 6, wherein the filter inspection tool is attached to the traveling frame so as to be deviated to a side opposite to the storage recess side with respect to a width center of the traveling frame in a traveling frame moving direction. The filter inspection device according to any one of the above. 10. A cable-like tool holding mechanism for holding a cable-like tool extending from the filter testing tool along the traveling frame while allowing the filter testing tool to move with respect to the traveling frame. Item 10. The filter inspection device according to any one of Items 1 to 9. 11. A cable-like member holding mechanism for holding a cable-like member extending between the traveling frame and a room wall on which the traveling frame is laid along a room wall while allowing the traveling frame to move. The filter inspection device according to any one of claims 1 to 10, further comprising: 12. A guide rail extending in the traveling frame moving direction is provided on each of the chamber walls on which the traveling frame is erected, and a traveling tool that moves along each of the guide rails by the guide rails is provided with the traveling frame. In the guide structure for receiving both ends in the longitudinal direction, at least one side of both ends in the longitudinal direction of the traveling frame, relative movement of the traveling frame and the traveling tool in the traveling frame longitudinal direction, or the traveling frame The filter inspection device according to any one of claims 1 to 11, further comprising an accommodation mechanism that allows relative rotation between the traveling tool and the traveling tool.