JP3280280B2 - Filter leak inspection device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a filter leak inspection apparatus for clean room equipment, and more particularly, to a filter for cleaning, in which a plurality of filters are arranged in parallel on a ceiling surface or a side surface of a room to be purified, and on a rear surface side of the juxtaposed filter group. In a clean room facility provided with an air supply chamber for supplying air to a chamber to be purified via the juxtaposed filter group, mixing means for mixing a powdery material for filter leak inspection into air passing through an air supply air passage to the air supply chamber. And a downstream-side measuring means for sucking and collecting air from each inspection point on the outlet surface of the juxtaposed filter group with a downstream-side suction tool and measuring the amount of powdery particles in the collected air. Related to the device.

[0002]

2. Description of the Related Art Conventionally, in this type of filter leak inspection apparatus, a mixing means for mixing a powdery substance for filter leak inspection into air passing through an air supply air passage to an air supply chamber is, for example, a liquid under air supply. Aerosolization of dioptyl phthalate (DOP) to generate a powder in a generator in a state of being dispersed in the generating gas under supply of the generating gas, and generating the generated powder It simply flows from the generator together with the working gas to one location in the air supply air path to the air supply chamber (see Japanese Patent Publication No. 3-50210).

[0003]

However, in the above-mentioned conventional apparatus, the diffusion of the mixed powdery material in the passing air in the air supply air path to the air supply chamber does not proceed so much, and the diffusion from the air supply air path exits the air supply air path. Since the air flows into the air supply chamber in a state where the concentration of the powdery material varies in the direction of the outlet surface, the concentration of the powdery material also varies within the air supply chamber. Air is sucked and collected from each inspection point on the outlet surface of the filter group by the downstream suction tool, and the amount of powder particles in the collected air (in other words, the amount of powder leak to the indoor side) In a filter leak test in which the filter is measured by the downstream measuring means, there is a problem that an error occurs due to a variation in the concentration of the powdery material inside the air supply chamber, and the test accuracy of the filter leak test is reduced.

[0004] In particular, when the length of the air supply air path to the air supply chamber is restricted to be short for the purpose of, for example, saving the space of a clean room facility, powder mixed in the air passing through the air supply air path is reduced. A flat wide cross-sectional shape with a width dimension similar to that of the air supply chamber for the purpose of further shortening the time for diffusing the body and for the purpose of uniformly supplying air to the chamber to be purified, etc. In this case, since the variation in the concentration of the powdery material at the outlet of the air supply air passage becomes larger in the longitudinal direction in the flat cross-sectional shape of the air supply air passage,
In particular, the above-mentioned problem has been remarkable.

[0005] In view of the above circumstances, the main problem of the present invention is to prevent the inspection error caused by the variation in the concentration of the powdery material inside the air supply chamber as described above and to improve the inspection accuracy of the filter leak inspection. It is in.

[0006]

[Means for Solving the Problems]

[1] According to the first aspect of the invention, the mixing means for mixing the powdery material for the filter leak inspection into the air passing through the air supply air path to the air supply chamber supplies the gas for generation from the first air supply means. Receiving means for generating a powdery substance dispersed in the generating gas, and a powdery substance delivered together with the generating gas from the generating means for dilution supplied from the second air supply means. A diluting means for joining and diluting with the gas, and a spraying means for sprinkling the powder to be delivered together with the generating gas and the diluting gas from the diluting means to the air passing through the air supply air path; In comparison with the conventional device which just flows the powder generated in
Dilution of the powder using the dilution gas by the dilution means can effectively promote the diffusion of the powder mixed in the air passing through the air supply air passage after the spraying. Variations in the concentration of the powdery material inside can be prevented, and the concentration of the powdery material inside the air supply chamber can be effectively made uniform.

[0007] With this, air is sucked and collected by the downstream suction tool from each inspection point on the outlet face of the juxtaposed filter group on the indoor side of the chamber to be purified, and the powdery material in the collected air is collected. In the filter leak test, in which the amount of particles (the amount of powdered material leak) is measured by the downstream measuring means, it is possible to prevent an inspection error caused by the variation in the concentration of the powdery material inside the air supply chamber. In addition, the inspection accuracy of the filter leak inspection can be effectively improved.

Further, in the above-mentioned conventional apparatus, in order to avoid as much as possible an inspection error caused by a variation in the concentration of the powdery material inside the air supply chamber, the powdery material naturally diffuses inside the air supply chamber. It is necessary to wait for the concentration of the powdery substance in the air supply chamber to be as uniform as possible, and this requires a considerable waiting time. Since the concentration of the powdery substance in the chamber can be effectively made uniform, such a waiting time can be shortened, whereby the inspection efficiency of the filter leak inspection can be increased.

[2] In the invention according to claim 2, the diluting means causes the generating gas sent out together with the powdery substance from the generating means and the diluting gas supplied from the second air sending means to flow. A stirring vessel is provided, and when the gas for generation and the gas for dilution enter the stirring vessel, the inside of the stirring vessel is placed in a state in which both or one of the gas for generation and the gas for dilution is along the inner peripheral surface of the vessel. By injecting into
A swirling airflow is generated inside the stirring vessel, and the swirling airflow dilutes the powdery material flowing into the stirring vessel together with the gas for generation by stirring and diluting with the gas for dilution. The powdery material can be more uniformly and efficiently diluted as compared to simply combining the dilution air with the generation gas sent out together with the body through a merging conduit or the like. Improving the inspection accuracy of filter leak inspection by promoting the diffusion of mixed powder in the air passing through the air passage and making the powder concentration uniform inside the air supply chamber by promoting the diffusion more effectively. Can be realized more effectively.

[3] In the invention according to the third aspect, the first aspect
A dual-purpose air-supplying unit serving both as an air-supplying unit and the second air-supplying unit is provided, the gas sent from the dual-purpose air-supplying unit is diverted, and one of the divided gases is supplied to the generation unit as generation air. And, since the other divided gas is supplied to the diluting means as the diluting gas, the first gas supply means for supplying the gas for generation and the second gas supplying means for supplying the gas for dilution,
Compared with the case where each device is dedicated and provided separately, the device structure can be simplified, the device cost can be reduced, and the device can be easily maintained.

[4] In the invention according to claim 4, a flow rate control valve for generation for adjusting the supply flow rate of the gas for generation to the generation means, and a dilution valve for adjusting the flow rate of supply of the gas for dilution to the dilution means. The flow control valve is provided to adjust the supply flow rate of the generating gas to the generating means by the generating flow control valve, thereby adjusting the amount of the powdery material generated by the generating means according to the inspection conditions and the like. Thus, the concentration of the powdery material inside the air supply chamber can be adjusted. Also, by adjusting the supply flow rate of the diluting gas to the diluting means by the diluting flow rate adjusting valve and adjusting the degree of dilution of the powdery substance by the diluting means, it is possible to reduce the amount of generated powdery substance more than necessary. It is possible to reliably obtain the desired effect of promoting the diffusion of the mixed powdery material in the air passing through the air supply air passage while eliminating waste of supplying the working gas.

[5] In the invention according to the fifth aspect, the spraying means is provided in the air supply air path with a plurality of jet ports arranged dispersedly in a longitudinal direction of a cross section of the air path,
Since the powdery substance sent out together with the gas for generation and the gas for dilution from the diluting means is distributed to a plurality of ejection ports and ejected from these ejection ports, the air supply air path as in the conventional apparatus is provided. Diffusion of the mixed powder in the air passing through the air supply air passage is more effectively promoted by a synergistic effect with the dilution of the powder by the diluting means, as compared with the case where the powder is simply introduced into one place. As a result, the inspection accuracy can be more effectively improved by making the concentration of the powdery substance in the air supply chamber uniform.

[0013] Further, since the plurality of jet ports are dispersedly arranged in the longitudinal direction of the cross-sectional shape of the air supply air passage, it is possible to particularly effectively promote the diffusion of the powdery material in the longitudinal direction of the cross-sectional shape of the air passage. This point is particularly effective when the air supply air passage has a flat wide cross-sectional shape having a width approximately equal to that of the air supply chamber for the purpose of uniformly supplying air to the purifying target chamber.

[6] In the invention as set forth in claim 6, in the air supply air path, the powder dust from the spraying means collides with the powdery means from the spraying means at a position downstream of the powdery spraying position of the spraying means. Since the collision member for dispersing in the passage is provided, the dispersion by the collision can diffuse the mixed powder in the air passing through the air supply air passage and uniformize the concentration of the powder inside the air supply chamber. It can be more effectively promoted.

[7] In the invention according to claim 7, the plurality of upstream suction tools for sucking and collecting the air in each part in the chamber in the air supply chamber are spread over the entire area inside the chamber in the filter juxtaposition direction of the juxtaposition filter group. Switching means for selecting which of the plurality of upstream suction tools to suction and collect air, and suction and collection of air by the upstream suction tool selected by the switching means. Then, the amount of particles of the powder in the collected air, information for correcting the amount of particles measured by the downstream measuring means, or information for adjusting the amount of powder mixed by the mixing means Since the upstream measuring means is provided for the measurement, even if the concentration of the powdery substance in the air supply chamber varies, the measurement by the downstream measuring means is performed based on the amount of particles measured by the upstream measuring means. A state in which the concentration of the powdery substance in the air supply chamber is uniform by correcting the particle amount or adjusting the mixing amount of the powdery substance mixed by the mixing means based on the particle amount measured by the upstream measuring means. In this case, it is possible to obtain the same inspection accuracy as that of performing the filter leak inspection, and in this regard, the inspection accuracy of the filter leak inspection can be effectively increased as compared with the conventional device.

That is, in the case of the above correction, air is suctioned and collected from each inspection point on the outlet face of the juxtaposed filter group by the downstream suction tool, and the amount of powdery particles in the collected air is reduced on the downstream side. In correspondence with the measurement by the measuring means, among the plurality of upstream suction tools, the one positioned corresponding to the air suction point of the downstream suction tool is sequentially selected by the switching means, and the selected upstream suction tool is used. The amount of the powdery particles in the air collected by suction is measured by the upstream measuring means. And
For each inspection point, based on the amount of particles measured by the upstream measuring unit, the amount of particles measured by the downstream measuring unit is converted and corrected to the amount of particles when the concentration of the powdery substance inside the air supply chamber is a predetermined concentration. As a result, regardless of the actual variation in the concentration of the powdery substance inside the air supply chamber, it is possible to obtain high inspection accuracy equivalent to that when the filter leak test is performed in a state where the concentration of the powdery substance inside the air supply chamber is uniform. it can.

In addition, in the case of the correction of the mixing amount, air is suctioned and collected from each inspection point on the outlet face of the juxtaposed filter group by the downstream suction tool, and the amount of particles of the powdery material in the collected air is reduced. In correspondence with the measurement by the downstream measuring means, one of the plurality of upstream suction tools which is located at the air suction point of the downstream suction tool is sequentially selected by the switching means, and the selected upstream suction tool is selected. The amount of the powdery particles in the air collected by suction is measured by the upstream measuring means. Then, for each inspection point, based on the measurement result of the upstream measuring means, the measured particle amount of the upstream measuring means becomes a required constant value (in other words, a required constant powdery substance concentration),
By adjusting the amount of powder mixed by the mixing means, regardless of the actual variation of the powder concentration inside the air supply chamber, filter leak inspection is performed in a state where the powder concentration inside the air supply chamber is uniform Can be obtained as high as the inspection accuracy.

[8] According to the invention described in claim 8, according to claim 1,
In the practice of the invention described in any one of the above-described embodiments, a plurality of upstream suction tools for suctioning and collecting air in each part in the air supply chamber are provided over the entire area inside the chamber in the filter juxtaposition direction of the juxtaposition filter group. A switching means for selecting which of the plurality of upstream suction tools to suction and collect air, and a suction and collection of air by the upstream suction tool selected by the switching means. The particle amount of the powder in the trapped air is used as information for correcting the amount of particles measured by the downstream measuring unit or information for adjusting the mixing amount of the powder mixed by the mixing unit. Since the upstream measuring means for measuring is provided, the effect of the invention described in claim 1 and the effect of the invention described in claim 7 are combined to improve the inspection accuracy of the filter leak inspection. It can be effectively realized.

In other words, according to the first aspect of the present invention, the inspection accuracy is improved by promoting the diffusion of the mixed powdery material in the air passing through the air supply air passage and making the concentration of the powdery material inside the air supply chamber uniform. In addition to the fact that even if the concentration in the chamber is made uniform due to the promotion of diffusion, some variation in the concentration remains, the present invention according to claim 7 implements the invention based on the measurement result of the upstream measuring means. By performing the correction and the adjustment of the mixing amount, an extremely high inspection accuracy can be obtained as a whole.

[0020]

FIG. 1 shows a clean booth provided with an inspection function for an air purification filter for an internal chamber. A lattice-shaped filter support frame 3 is provided on a ceiling of a purification target chamber 2 formed in the booth 1. And a large number of filters 4 are supported by the filter support by the filter support frame 3.
By arranging (for example, a HEPA filter or an ULPA filter) in parallel on the ceiling, the entire surface of the ceiling of the chamber 2 to be purified is made to be a clean air outlet formed by the exit surface of the juxtaposed filter group G.

In the booth 1, the space above the juxtaposed filter group G (in other words, the space above the ceiling) is used as an air supply chamber 5 for supplying air to the purifying target chamber 2 through the juxtaposed filter group G. A return air passage 8 is formed next to the target room 2 using the room wall 6A as a partition, and communicates an exhaust port 7 provided at a lower portion of the room wall 6A with the air supply chamber 5. And a circulation fan 9 for circulating air in the order of the air supply chamber 5, the purification target chamber 2, and the return air passage 8. That is, in this air circulation, the clean air purified by the juxtaposed filter 4 is blown out into the room from the entire exit surface of the juxtaposed filter group G (that is, the entire surface of the ceiling surface) in a downward laminar flow to the inside of the chamber 2 to be purified. The interior of the room is made a high cleanness space suitable for manufacturing chemicals and semiconductor components, for example.

The exhaust port 7 is formed in a long side direction (FIG. 1) by a series of long openings or a plurality of ports arranged in a row.
In the depth direction of the drawing).
Further, the return air passage 8 is also provided with an air passage width extending over the entire length of the purification target chamber 2 in the long side direction. Further, a plurality of circulation fans 9 are arranged in the return air passage 8 side by side along the long side direction of the purification target chamber 2, Thereby, the airflow state in the room to be purified 2 is made uniform in the long side direction of the room 2 to be purified, and the cleanliness of the room is promoted.

Inspection of the juxtaposed filters 4 is carried out at appropriate times to guarantee the cleanliness of the room. As an auxiliary structure for the filter inspection, the booth 1 is formed by the exit surface of the juxtaposed filter group G. The traveling frame 10 extending in the direction of the short side of the chamber 2 to be purified in the attitude along the ceiling surface (the horizontal direction in the drawing in FIG. 1) is moved along the ceiling surface in a direction orthogonal to the longitudinal direction (that is, the chamber to be purified). 2 in the direction of the long side), is installed between the opposing room walls 6A and 6B at a high position near the ceiling, and the filter inspection tool 11 is mounted on the traveling frame 10 by the traveling frame. Attached movably in the longitudinal direction.

That is, the moving operation of the traveling frame 10
In combination with the operation of moving the filter inspection tool 11 with respect to the traveling frame 10, the filter inspection tool 11 can be moved to any position on the exit surface of the juxtaposed filter group G, and all of the juxtaposed filters 4 are moved by this inspection tool movement. Can be inspected efficiently.

As the main filter inspection, a suction tool 11a (downstream suction tool) as a filter inspection tool 11 is attached to the traveling frame 10, and a filter leak inspection is performed in the air supply chamber 5 under the operation of the circulation fan 9. (For example, aerosolized dioptyl phthalate (DOP)) is filled in a smoky dispersion state, and in this state, the amount of particles of the powdery substance in the sampling air sucked and collected by the suction tool 11a. (I.e., a leak test for measuring the amount of the test powder leaking into the room) or a wind speed sensor 11b attached to the traveling frame 10 as a filter test tool 11 as shown in FIG. In this case, there is a blow-out wind speed test for measuring the blow-out speed of air from each filter 4.

Also, during the leak inspection, an inter-frame seal portion between the filter frames 4a of the adjacent filters 4 (specifically, the filter support frame 3 and the two filter frames 4a).
a) a leak test for the seal portion at the contact portion with the filter member 4a, the filter medium 4b in each filter 4 and the filter frame 4a
And a leak test for each part of the filter material of each filter 4.

Reference numeral 12 denotes a powder mixing device for mixing the powder P for filter leak inspection into the air passing through the return air passage 8 at the time of leak inspection, and 13 denotes an air supply chamber 5 at the time of leak inspection.
As shown in FIG. 2, a plurality of upstream suction tools 14 are distributed and arranged in the filter juxtaposition direction of the juxtaposition filter group G so as to selectively suction and collect the air in each section in the air supply chamber. Is an interior control panel.
4 is equipped with a control device for automatic movement of the filter inspection tool 11 and also has an upstream suction tool 1 for leak inspection.
3, a switching valve device 15 for switching which one of the air supply chambers 5 to suction and collect the air in the air supply chamber 5 (in other words, which part of the air supply chamber 5 to suction and collect the air). Equipped.

Reference numeral 16 denotes a portable computer which is brought into the room at the time of the filter inspection and is connected to the interior control panel 14 via the connector 17 by the connection cord 17a. By controlling the movement of the traveling frame 10 and the movement of the filter inspection tool 11 with respect to the traveling frame 10 via the control unit, the filter inspection tool 11 is automatically set to the exit surface of the juxtaposed filter group G in a set scanning pattern according to the inspection type. Scan and move.

In the case of the blow-off wind speed inspection, the blow-off wind speed inspection is carried out based on wind speed detection information which is sequentially taken into the computer 16 through the interior control panel 14 through the cord 34 from the wind speed sensor 11b which scans and moves as the filter inspection tool 11. The computer 16 automatically carries out processing such as organizing, displaying or storing the inspection results.

On the other hand, in the case of the leak inspection, as the suction tool 11a (downstream suction tool) as the filter inspection tool 11 is scanned and moved, the upstream suction tool 13 corresponding to the moving position of the suction tool 11a is moved. In accordance with the movement of the suction tool 11a, the carry-in computer 16 controls the interior control panel 14 so as to selectively suck and collect the air in the air supply chamber 5.
, The switching valve device 15 is automatically switched.

Then, with the scanning movement of the suction tool 11a,
The downstream sampling air sucked and collected by the suction tool 11a is sequentially taken into the downstream dust measuring device 18A through the interior control panel 14 through the tube 33a, and the amount of the powdery particles in the downstream sampling air is reduced to the downstream side. The upstream sampling air measured by the dust measuring device 18A and selectively suctioned and collected by the upstream suction tool 13 corresponding to the suction tool 11a (downstream suction tool) is passed through the interior control panel 14 through the tube 33b. The dust particles in the upstream sampling air are measured by the upstream dust measuring device 18B, and the results of the leak inspection are arranged based on the measurement results. The computer 16 automatically carries out processing such as display or storage.

The amount of particulate matter in the upstream sampling air measured by the upstream dust measuring device 18B is
Inspection errors that cause differences in the amount of powder particles in the downstream sampling air suctioned and collected from each inspection point due to variations in the concentration of powder in each part The inspection conditions are made uniform and used for inspection condition correction data for accurately comparing and judging the amount of powdery particles in the downstream sampling air suctioned and collected from each inspection point. In the above-mentioned inspection result arrangement, the downstream-side dust measuring device 1 is used for each inspection location based on the amount of particles measured by the upstream-side dust measuring device 18B.
The number of particles measured by 8A is automatically converted and corrected to the amount of particles when the concentration of the powdery substance inside the air supply chamber 5 is a predetermined concentration.

As shown in FIGS. 1 and 3, the powder mixing device 12 receives the supply of the generating air A1 from the compressor 12A, and converts the powder P dispersed in the generating air A1. A generator 12B that generates (for example, aerosol is generated from dioptyl phthalate (DOP) stored in a liquid state) and a powder material P that is sent from the generator 12B together with the generating air A1 are combined with the compressor 12A.
12C that combines and dilutes with the dilution air A2 supplied by another route from the diluent, and the powder P that is sent out from the dilutor 12C together with the generation air A1 and the dilution air A2
And a spray pipe 12 </ b> D that sprays air passing through the return air passage 8, which is an air supply air passage for the air supply chamber 5. In the present embodiment, the delivery air from the compressor 12A is diverted, and one of the diverted air is generated as the generation air A.
1 is supplied to the generator 12B, and the other divided air is supplied to the dilutor 12C as dilution air A2.

That is, in the leak inspection, basically, the powdered material P generated in the generator 12B is diluted with the dilution air A2 by the powdered material mixing device 12, and then the diluted air P2 is supplied to the return air passage 8. By dispersing the powder P in the passing air, the diffusion of the powder P in the passing air is promoted, and the concentration of the powder inside the air supply chamber 5 is made uniform. Prevent leak test errors due to variations in body concentration. Then, even if the concentration in the chamber is made uniform by the promotion of the diffusion, a slight variation in the concentration remains in the air supply chamber, but the above-described conversion correction based on the amount of particles measured by the downstream dust measuring device 18A copes with the above. As a whole, extremely high leak inspection accuracy is obtained.

The diluter 12C separates the powder P sent from the generator 12B together with the generation air A1 into the dilution air A2.
More specifically, a generating air A1 sent out from the generator 12B together with the powdered material P, and a diluting air A2 supplied from the compressor 12A through another path are provided. Are injected into the container along the arc-shaped inner peripheral surface of the cylindrical container to generate a swirling airflow S inside the container, and the swirling airflow S generates the generating air A1. At the same time, the powdery substance P flowing into the container is efficiently stirred and mixed with the dilution air A2 to be uniformly diluted.

The spray pipe 12D has a structure in which a plurality of jet ports X are formed at equal intervals in the pipe longitudinal direction, and extends in the longitudinal direction of the sectional shape of the return air passage 8 (that is, in the long side direction of the chamber 2 to be purified). And in the return airway 8 scatter pipes 12D
A plate-like collision member 12E that collides the powder P ejected from each ejection port X of the spray pipe 12D and disperses the powder P in the return air passage 8 is provided on the downstream side of the powder dispersion position by The dispersion and ejection of the powder P from the plurality of outlets X and the dispersion of the powder P due to the collision with the collision member 12E further effectively diffuse the powder P in the air passing through the return air passage 8. Facilitate.

V1 is the generating air A for the generator 12B.
1 is a flow control valve for generation for adjusting the supply flow rate, V2 is a flow control valve for dilution for adjusting the supply flow rate of the dilution air A2 to the dilutor 12C, and the generation air control valve V1 is used for the generation air A1. By adjusting the supply flow rate of the powder, the amount of the powder generated in the generator 12B (in other words, the amount of the powder mixed with the air passing through the return air passage 8) is adjusted, and the powder in the air supply chamber 5 is adjusted. The body concentration is adjusted, and the supply flow rate of the dilution air A2 is adjusted by the dilution flow adjustment valve V2, thereby adjusting the degree of dilution of the powdery substance in the diluter 12C. V3 is the supply flow rate of the generation air A1 and the dilution air A2.
This is an exhaust adjustment valve that adjusts the supply flow rate of the exhaust gas in synchronization with the supply flow rate.

In short, in the leak inspection, the powder mixing device 12 mixes the powder P for filter leak inspection into the air passing through the return air passage 8 as the air supply air passage to the air supply chamber 5. The downstream side dust measuring device 18A sucks and collects air from each inspection point on the outlet surface of the juxtaposed filter group G by the downstream side suction tool 11a, and forms the powder P in the collected air. It constitutes a downstream measuring means for measuring the amount of particles.

With respect to the configuration of the mixing means 12, the generator 12B receives the supply of the generation gas A1 from the compressor 12A as the first air supply means and disperses the powder in the generation gas A1. The dilutor 12C constitutes a generating means for generating the powder P, and the diluter 12C converts the powder P delivered together with the generating gas A1 from the generating means 12B into the second gas.
A diluting unit configured to join and dilute with the diluting gas A2 supplied from the compressor 12A as an air sending unit,
The squirting tube 12D is supplied with the gas A
1 and the powder P delivered together with the dilution gas A2,
The spraying means is configured to spray the air passing through the air supply air passage to the air supply chamber 5.

The compressor 12A comprises a first air supply means for supplying the generation gas A1 to the generation means 12B,
A dual-purpose air supply unit that also serves as a second air supply unit that supplies the dilution gas A2 to the dilution unit 12C is configured.

Further, regarding the leak inspection, the switching valve device 1
Reference numeral 5 designates a switching means for selecting which one of a plurality of upstream suction tools 13 dispersedly arranged in the air supply chamber 5 over the entire area thereof to suction and collect air. The dust measurement device 18B sucks and collects air by the upstream suction tool 13 selected by the switching means 15, and determines the amount of particles of the powdery material P in the collected air by the measurement particles by the downstream measurement means 18A. An upstream measuring means for measuring as information for correcting the amount is constituted.

With respect to the scanning pattern of the filter inspection tool 11, in the case of the blowout wind speed inspection, the wind speed sensor 11b as the filter inspection tool 11 is sequentially positioned at the center of the exit surface of each filter 4 at a set time interval. In the case of a leak test for the inter-frame seal portion (including the outer peripheral seal portion of the juxtaposed filter group G), a suction tool as the filter test tool 11 is employed. By taking advantage of the advantage that the 11a (downstream suction device) can be continuously moved to any position on the exit surface of the juxtaposed filter group G, a frame that is linearly continuous over a plurality of filters 4 as shown in FIG. The suction tool 11a is moved out of the juxtaposed filter group G so that each of the inter-seal portions (or the outer-peripheral seal portions) is continuously inspected for leakage from one end to the other end. Employing a scan pattern which moves linearly at a set moving speed from one end face toward the other end.

Also, in the case of a leak test for the filter material peripheral seal portion, as shown in FIG. 4B, the entire circumference of the filter material peripheral seal portion between the filter material 4b and the filter frame 4a surrounding it for each filter 4. A scanning pattern in which the suction tool 11a as the filter testing tool 11 is circularly moved at a set moving speed along the seal portion around the filter medium so as to continuously perform a leak test on the length, and a leak test is performed on each part of the filter medium 4b. In the case of (3), as shown in FIG. 4 (c), the suction tool 11a as the inspection tool 11 is attached to the entire surface of the outlet surface of the filter medium 4b so that the entire surface of the outlet surface of the filter medium 4b is leak-tested for each filter 4. A scanning pattern is used that moves in a meandering manner at a set moving speed. Each of these scanning patterns is stored in the carry-in computer 16 as a set scan pattern by the initial setting operation for the carry-in computer 16.

As shown in FIGS. 1 and 5 to 9, the guide mechanism for guiding the movement of the traveling frame 10 includes a moving direction of the traveling frame 10 on each of the chamber walls 6 A and 6 B on which the traveling frame 10 is installed. Are provided, and traveling tools 20 that move along the respective guide rails 19 by the guidance of the guide rails 19 are provided, and the traveling tools 20 receive the respective longitudinal ends of the traveling frame 10. . As a drive mechanism for the traveling frame that moves the traveling frame 10 under the guidance of the guide rails 19, the traveling tool 2 is extended over the side of each of the guide rails 19 in the traveling frame moving direction, and the traveling tool 2
0, an interlocking shaft 23 for interlocking rotation of the drive pulleys 22 of these timing belts 21, and a traveling frame for rotating both drive pulleys 22 by power transmission from one chamber wall 6A side. Motor 24 is provided.

As for the movement of the filter inspection tool 11 with respect to the traveling frame 10, an inspection tool traveling tool 25 that moves along the traveling frame 10 with the traveling frame 10 itself as a guide rail is provided. 25
The filter inspection tool 11 is attached to the traveling frame 10 via a jig 26, and a driving mechanism for the inspection tool for moving the filter inspection tool 11 with respect to the traveling frame 10 is a device for hanging the filter inspection tool 11 in the longitudinal direction of the traveling frame 10. Inspection in which the inspection tool moving timing belt 27 with the inspection tool traveling tool 25 connected to the middle part thereof and the drive pulley 28 of the timing belt 27 are positioned at one longitudinal end of the traveling frame 10 and rotated. The traveling frame 10 is equipped with a tool moving motor 29.

That is, the carry-in computer 16
By operating the motor 24 for moving the traveling frame and the motor 29 for moving the inspection tool through the interior control panel 14, the filter inspection tool 11 is moved to the exit surface of the juxtaposed filter group G by the above-described setting scan. Scan and move in a pattern.

In receiving the longitudinal ends of the traveling frame 10 with the traveling tool 20, at least one of the longitudinal ends of the traveling frame 10 is
As shown in FIG. 7, as a flexible means for allowing relative movement of the traveling frame 10 and the traveling tool 20 in the longitudinal direction of the traveling frame and relative rotation of the traveling frame 10 and the traveling tool 20 around the longitudinal axis Q. The receiving member 30 for the end of the traveling frame 10 is attached to the traveling tool 20 via a bearing 31 so as to be rotatable around the longitudinal axis Q, and the traveling member receives the traveling frame end portion. A roller 32 for guiding the displacement in the longitudinal direction of the frame is provided, so that even if a slight displacement occurs between the traveling frame 10 and the guide rail 19 due to aging or an earthquake, the traveling by the roller 32 is performed. The displacement is caused by the relative movement between the frame 10 and the traveling tool 20 and the relative rotation between the traveling frame 10 and the traveling tool 20 due to the rotation of the receiving member 30 around the longitudinal axis Q. Yield to are also available maintaining smooth movement of the traveling frame 10 under guidance by the guide rail 19.

A cable-like tool extending from the filter inspection tool 11 (ie, the sampling air sucked and collected by the suction tool 11a at the time of leak inspection) is transported to the travel frame 10 as a cable-like tool holding mechanism for the travel frame. Tube 33a and wind speed sensor 11 used in blowout wind speed inspection
b) from the filter inspection tool 11
Cable carrier 35 that holds the vehicle along the traveling frame 10 while allowing the vehicle to move with respect to the traveling frame 10.
In addition, a cable-like tool (a cable-like member (Cable) to be passed between the room wall 6A and the running frame 10 is provided on one chamber wall 6A on which the traveling frame 10 is erected, as a cable-like tool holding mechanism for the chamber wall. That is, a cable for holding the tube 33a and the cord 34 and a connection cable for the inspection tool moving motor 29) along the chamber wall 6A while allowing the traveling frame 10 to move. A bear 36 is provided.

The chamber walls 6A, 6 on which the traveling frame 10 is mounted
B, an erecting recess 37 extending in the traveling frame moving direction is provided, and the traveling frame 10 is provided with the exit surface of the juxtaposed filter group G on the chamber wall 6C located at one end in the traveling frame moving direction. The storage recess 38 is provided for storing by extension movement from a position corresponding to the guide rail 19, the guide rail 19 as the guide mechanism, the timing belt 21 as the drive mechanism for the traveling frame, and the cable carrier 36 on the room wall side. The interlocking shaft 23, the drive pulley 22, and the traveling frame moving motor 24 as a driving mechanism for the traveling frame are disposed inside the mounting recess 37, and the storage recess 38.
It is located inside.

The erection recess 37 and the storage recess 38 described above.
Each of these recesses 37 and 38 has
Lids 39 and 40 that can be freely opened and closed to close the
During normal use of the chamber 2 to be purified, the traveling frame 10 is stored in the storage recess 38 by extension movement thereof, and the lids 39 and 40 close the installation recess 37 and the storage recess 38, so that the interior of the room is closed. A state in which there is no unevenness prevents turbulence in the indoor airflow, thereby maintaining a high degree of indoor cleanliness.

Further, the recess 37 for erection and the recess 38 for storage are provided.
Each of the suction means, as suction means, sucks and discharges air from inside the erection recess 37 and the storage recess 38 by the suction force of the circulation fan 9, and discharges the suction air into the suction passage 41.
a, a plurality of suction ports 41 leading to the return air passage 8 are opened, so that when the traveling frame 10 moves at the time of the filter inspection, the interior equipment of the erection recess 37 and the storage recess 38 is provided. (That is, even if dust is generated on the guide rail 19, the traveling frame timing belt 21, the cable wall 36 on the chamber wall side, the interlocking shaft 23, the driving pulley 22, the traveling frame moving motor 24, etc.), The outflow to the indoor side is prevented by the above-described air suction, and a decrease in filter inspection accuracy caused by such generated dust is prevented.

Suction tool 11a as filter test tool 11
Alternatively, when attaching the wind speed sensor 11b to the inspection tool traveling tool 25 via the jig 26, the jig 26 includes a dedicated jig 26a for the suction tool 11a and a wind speed sensor 11b as shown in FIG. And a dedicated jig 26b are provided for this purpose, whereby the suction device 11a and the wind speed sensor 11b have different required separation dimensions from the exit surface of the juxtaposed filter group G at the time of inspection. These special jigs 26a and 26b can be easily replaced by replacing them.

The jigs 26a and 26b are provided with a suction tool 11a and a wind speed sensor 11b as the filter inspection tool 11, respectively.
It is structured to be mounted on the traveling frame 10 so as to be deviated in the traveling frame moving direction with respect to the center of the width of the traveling frame 10 to the side opposite to the storage recess 38 side. There is a limit to the range of movement of the traveling frame 10 to the opposite side (for example, a limitation due to the contact between the traveling frame 10 and the room wall 6D), and as shown in FIG. Is located at the opposite end of the end face of the outlet face of the juxtaposed filter group G to the side of the storage recess 38 (i.e., in this embodiment, the intersection between the room wall 6D and the ceiling face). Even when the traveling frame 10 cannot be moved to a position corresponding to the above, the moving range of the suction tool 11a and the wind speed sensor 11b due to the movement of the traveling frame 10 includes the edge portion on the side of the chamber wall 6D. It is to be able to ensure.

On the other hand, on the side of the storage recess 38, the running frame 10 is partially or entirely inserted into the storage recess 38 as shown in FIG. Thus, while adopting a structure in which the filter inspection tool 11 is attached to the traveling frame 10 while being biased to the side opposite to the storage recess 38 as described above, the suction tool 11a and the wind speed sensor 11b due to the movement of the traveling frame 10 are adopted.
Of the end face of the outlet face of the juxtaposed filter group G on the side of the storage recess 38 (i.e., in this embodiment, the intersection of the room wall 6C and the ceiling face). The range is secured.

The range of movement of the filter inspection tool 11 in the longitudinal direction of the traveling frame is slightly shorter than the length of the traveling frame 10 due to structural reasons. Even if the filter inspection tool 11 cannot be moved to each end in the longitudinal direction of the traveling frame 10 due to the restriction, the guide rail 19 is disposed inside the erection recess 37 as described above, and By guiding the end to the inside of the erection recess 37, the end of the traveling frame that is out of the moving range of the filter inspection tool 11 is set inside the erection recess 37, as shown in FIGS. The suction tool 11 in the running frame longitudinal direction.
The moving ranges of the a and the wind speed sensor 11b include both end portions in the longitudinal direction of the traveling frame on the exit surface of the juxtaposed filter group G (that is, in this embodiment, the intersection between the room wall 6A and the ceiling surface, and the room wall 6B). (Intersection with the ceiling).

[Another Embodiment] Next, another embodiment of the present invention will be listed. In the above-described embodiment, the case where the plurality of filters 4 arranged in parallel on the ceiling surface of the chamber 2 to be purified are to be inspected, but the plurality of filters 4 to be inspected are arranged in parallel on the side surface of the chamber 2 to be purified. It may be.

The air supply air path to the air supply chamber 5 is
The air path structure is not limited to the air path structure such as the return air path 8, and may have any air path structure.

The powder P for the filter leak inspection is not limited to aerosolized dioptyl phthalate (DOP), and various other substances can be applied.

The generation gas A1 and the dilution gas A2 include:
Gases different from each other may be used, and gases other than air, such as nitrogen gas, may be used.

The first gas supply means for supplying the generation gas A1 and the second gas supply means for supplying the dilution gas A2 may be constituted by separate dedicated gas supply devices.

The generating means 12B which receives the supply of the generating gas A1 from the first air supply means 12A and generates the powdery substance P dispersed in the generating gas A1 is used for generating the powder P in the liquid raw material. Powdered substance P dispersed by bubbling of gas A1
, Or a method of heating the raw material to evaporate the powder P into the generation gas A1.

The diluting means 1 for mixing and diluting the powdery substance P sent out from the generating means 12B together with the generating gas A1 with the diluting gas A2 supplied from the second air feeding means 12A.
2C is not limited to a method in which the powder P is stirred and mixed with the diluent gas A2 by forming the swirling airflow S as in the above-described embodiment. A method of stirring and mixing with A2, a method of colliding the generating gas A1 with the powder P with the gas A2 for dilution,
In some cases, various systems such as a system in which the diluting gas A2 simply joins the generating gas A1 with the powdered material P from the merging pipe or the like can be adopted.

In the case of employing a method of stirring and mixing by the swirling air flow S, both the generating gas A1 and the diluting gas A2 are injected into the stirring container along the inner peripheral surface of the container, and the swirling air flow S Instead, the swirling airflow S may be formed by injecting only one of the generating gas A1 and the diluting gas A2 into the stirring container along the inner peripheral surface of the container.

The dispersing means 12D for dispersing the powdered substance P sent out from the diluting means 12C together with the generation gas A1 and the diluting gas A2 into the air passing through the air supply air passage 8 for the air supply chamber 5 includes The present invention is not limited to the scatter pipe in which the plurality of ejection ports X are formed in a dispersed manner as in the embodiment. For example, the powdered material P is distributed to the plurality of ejection nozzles dispersedly arranged in the air supply air path via the distribution pipe. Various distribution structures, such as a distribution supply type, can be adopted.

In the above embodiment, the upstream measuring means 18
Although the example in which the measured particle amount by B is used as information for correcting the measured particle amount by the downstream-side measuring unit 18A has been described, the measured particle amount by the upstream-side measuring unit 18B may be replaced by the powder by the mixing unit 12. It is used as information for adjusting the mixing amount of the state body mixing, and for each inspection location, based on the measurement result of the upstream measuring unit 18B, the measured particle amount of the upstream measuring unit 18B becomes a required constant value. Alternatively, a method of adjusting the mixing amount of the powdered material mixed by the mixing means 12 may be adopted.

In the above embodiment, the generating means 12
After the generated powder P in B is diluted by the diluting means 12C,
By dispersing the powder P in the air passing through the air supply air passage 8 to the air supply chamber 5, the diffusion of the powder P in the passing air is promoted, and the concentration of the powder in the air supply chamber is made uniform. To prevent a leak inspection error caused by a variation in the concentration of powdery substances in the chamber (that is, the invention according to claim 1), and a plurality of upstream suction tools 1
The upstream-side measuring means 18B measures the amount of the powdery particles in the suction-collected air from the one selected by the switching means 15 among the three.
And the measured particle amount is measured by the downstream measuring means 18A.
To use as information for correcting the amount of particles measured by the method or information for adjusting the amount of powder mixed by the mixing means 12 (that is, the invention according to claim 7) is performed in parallel ( That is, the invention according to claim 8)
However, one of these may be omitted and only the other may be implemented.

The application of the chamber 2 to be purified is not limited to the manufacturing room for medicines and foods or the manufacturing room for semiconductor parts, but may be any application.

[Brief description of the drawings]

FIG. 1 is a front sectional view showing the entire structure of a clean booth.

FIG. 2 is a front sectional view of an air supply chamber showing an arrangement of an upstream suction tool.

FIG. 3 is a configuration diagram of a powder mixing device;

FIG. 4 is a plan view showing a scanning pattern of the filter inspection tool.

FIG. 5 is a sectional view showing a moving structure.

FIG. 6 is a perspective view showing a moving structure.

FIG. 7 is an exploded perspective view showing a moving structure.

FIG. 8 is a perspective view showing a structure of a mounting recess and a storage recess.

FIG. 9 is a plan view showing an inspection mode for an edge portion of the juxtaposed filter group.

FIG. 10 is a perspective view showing an attached state of a wind speed sensor.

[Explanation of symbols]

 2 Purification target chamber 4 Filter G Side-by-side filter group 5 Air supply chamber 8 Air supply air path P Powder 12 Mixing means 11a Downstream suction tool 18A Downstream measurement means 12A First air supply means, second air supply means A1 Gas 12B generating means A2 diluting gas 12C diluting means 12D spraying means S swirling airflow V1 generating flow regulating valve V2 diluting flow regulating valve X jet port 12E collision member 13 upstream suction tool 15 switching means 18B upstream measuring means

──────────────────────────────────────────────────続 き Continued on the front page (58) Fields investigated (Int. Cl. ⁷ , DB name) G01N 15/08 B01D 46/42 G01D 21/00

Claims (8)

(57) [Claims] 1. A plurality of filters are arranged in parallel on a ceiling surface or a side surface of a purifying target chamber, and air is supplied to the purifying target chamber via the juxtaposed filter group on the back side of the juxtaposed filter group. In a clean room facility provided with a chamber, mixing means for mixing a powdery substance for filter leak inspection into air passing through an air supply air path to the air supply chamber; and downstream suction from each inspection point on an outlet surface of the juxtaposed filter group. And a downstream-side measuring means for measuring the amount of particles of the powdery material in the collected air by suctioning and collecting air with a tool. Generating means for receiving the supply of the generating gas from the means and generating the powder in a state of being dispersed in the generating gas; and sending out the powdery substance from the generating means together with the generating gas. A diluting unit that joins and dilutes the powder with a diluting gas supplied from a second air supply unit; and dilutes the powder that is sent from the diluting unit together with the generating gas and the diluting gas. And a spraying means for spraying the air passing through the air supply air passage. 2. The stirring device according to claim 2, wherein the diluting unit includes a stirring vessel into which the generating gas sent out together with the powdery substance from the generating unit and the diluting gas supplied from the second air sending unit flow. When the gas for generation and the gas for dilution enter the stirring vessel, both or one of the gas for generation and the gas for dilution is injected into the inside of the stirring vessel along the inner peripheral surface of the vessel. In this way, a swirling airflow is generated inside the stirring container, and the swirling airflow is used to stir and mix the powdery material flowing into the stirring container together with the generation gas with the dilution gas to dilute the powdery material. The filter leak inspection device according to claim 1, wherein: 3. A dual-purpose air-supplying unit, which also serves as the first and second air-supplying units, divides a gas sent from the dual-purpose air-supplying unit, and separates one of the divided gases into the gas. 3. A configuration in which the gas is supplied to the generation means as a gas for generation, and the other divided gas is supplied to the dilution means as the gas for dilution.
The filter leak inspection device according to the above. 4. A generation flow control valve for adjusting a supply flow rate of the generation gas to the generation means, and a dilution flow control valve for adjusting a supply flow rate of the dilution gas to the dilution means are provided. Any one of claims 1 to 3,
The filter leak inspection device according to the paragraph. 5. The air supply air passage, wherein the air supply air passage includes a plurality of jet ports arranged in a longitudinal direction of a cross section of the air supply air passage. The filter leak inspection device according to any one of claims 1 to 4, wherein the powdery material delivered together with the gas is distributed to the plurality of ejection ports and ejected from the ejection ports. 6. In the air supply air path, a collision member is provided downstream of the powder material distribution position of the spraying means so as to collide with the powder powder from the spray means and disperse it in the air path. The filter leak inspection device according to any one of claims 1 to 5, wherein 7. An air supply system in which a plurality of filters are arranged in parallel on a ceiling surface or a side surface of a purifying target chamber, and air is supplied to the purifying target chamber via the juxtaposed filter group on the back side of the juxtaposed filter group. In a clean room facility provided with a chamber, mixing means for mixing a powdery substance for filter leak inspection into air passing through an air supply air path to the air supply chamber; and downstream suction from each inspection point on an outlet surface of the juxtaposed filter group. And a downstream-side measuring means for measuring the amount of particles of the powdery material in the collected air by suctioning and collecting air with a tool. A plurality of upstream suction tools for sucking and collecting air are distributed and arranged in the filter juxtaposition direction of the juxtaposed filter group over the entire area inside the chamber. Switching means for selecting which of the upstream suction tools to suction and collect air; and suctioning and collecting air by the upstream suction tool selected by the switching means. The particle amount of the powdery material in the upstream side, which is measured as information for correcting the amount of particles measured by the downstream measurement means, or as information for adjusting the mixing amount of the powdery material mixture by the mixing means. A filter leak inspection device provided with a measuring means. 8. The filter leak inspection device according to claim 1, wherein a plurality of upstream suction tools for sucking and collecting air in each part in the air supply chamber are provided. Switching means for distributing and distributing the filter in the juxtaposed filter group in the filter juxtaposition direction over the entire area inside the chamber, and selecting which of the plurality of upstream suction tools to suction and collect air; The air is suctioned and collected by the selected upstream suction tool, and the amount of particles of the powdery material in the collected air is information for correcting the amount of particles measured by the downstream measurement means, or A filter leak inspection device provided with upstream measuring means for measuring as information for adjusting the amount of powder mixed by the mixing means.