TWI297168B - - Google Patents

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Publication number
TWI297168B
TWI297168B TW94132469A TW94132469A TWI297168B TW I297168 B TWI297168 B TW I297168B TW 94132469 A TW94132469 A TW 94132469A TW 94132469 A TW94132469 A TW 94132469A TW I297168 B TWI297168 B TW I297168B
Authority
TW
Taiwan
Prior art keywords
gas
wafer mounting
wafer
rotating body
wall surface
Prior art date
Application number
TW94132469A
Other languages
English (en)
Chinese (zh)
Other versions
TW200713388A (ja
Inventor
Yoshihiro Sohtome
Original Assignee
Sharp Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Kk filed Critical Sharp Kk
Priority to TW94132469A priority Critical patent/TWI297168B/zh
Publication of TW200713388A publication Critical patent/TW200713388A/zh
Application granted granted Critical
Publication of TWI297168B publication Critical patent/TWI297168B/zh

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Landscapes

  • Physical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW94132469A 2005-09-20 2005-09-20 TWI297168B (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW94132469A TWI297168B (ja) 2005-09-20 2005-09-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW94132469A TWI297168B (ja) 2005-09-20 2005-09-20

Publications (2)

Publication Number Publication Date
TW200713388A TW200713388A (ja) 2007-04-01
TWI297168B true TWI297168B (ja) 2008-05-21

Family

ID=45069000

Family Applications (1)

Application Number Title Priority Date Filing Date
TW94132469A TWI297168B (ja) 2005-09-20 2005-09-20

Country Status (1)

Country Link
TW (1) TWI297168B (ja)

Also Published As

Publication number Publication date
TW200713388A (ja) 2007-04-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees