12870911287091
曰修(更)正本 九、發明說明： 【發明所屬之技術領域】 測試顯示器面板相似的平板式顯示裝置通電 【先前技術】 積體電路、液晶顯示器面板等平板式顯示裝置的檢杳一 用探針卡或探查設備等探針設備進行。我們知道的液5 ^的基板通電α測試中使用的探查設備的實例是日本公開" 此類型的探查設備與圖1所示，包括探針板（Π6)、 S3ί 3 118「)、連接支?板(118)的連接板(120)、 捲f式承載封裝體（Tape Carrier Package ; TCP)杯fi”、立壯 連接板的平板式探針基底（124)。 饥女裝 另外，探針板（116)與圖1所示，由導電性材料製作 個探針刀片（126)在探針器(128)的下面，以前後方向伴持間 疒對縫〒(_按_滅祕方㉝|^裝 此，列的複數個探針刀片（126)中貫穿前後方向有間距的一掛許 (H)iD2)，讓兩侧擺動杆（132)被一對侧蓋(143)組裝在探針露 献把裂片⑽)上形成的複數個縫隙 f片中I人異物4兩個刀片之間造成通電引查不良的問 方;備的探針刀片（126)與圖2所*，如果前 (ίί Λ現ii^=i(i26b)被磨損的話被檢查體的配電線 不能完成檢查設備的功能，因此 【發明内容】 1夕2卩3^是^決過去探查設備的缺點。除探針部之外的 其匕部位塗上裱乳，讓刀片保持一定的間距。並保持探針片相互 1287091曰修(更)本本本9, invention description: [Technical field of invention] Test panel panel similar to flat panel display device power supply [Prior Art] Inspection of flat panel display devices such as integrated circuit and liquid crystal display panel Probe devices such as needle cards or probe devices are used. We know that the liquid 5 ^ substrate is used in the alpha test. The example of the probe device used in Japan is disclosed in Japan. This type of probe device is shown in Figure 1, including the probe card (Π6), S3ί 3 118"), and the connection branch. The connecting plate (120) of the board (118), the Tape Carrier Package (TCP) cup fi", and the flat probe base (124) of the strong connecting board. In addition, the probe card (116) and the probe plate (116) are made of a conductive material, and a probe blade (126) is formed under the probe device (128) in the front and rear directions. _ Press _ 秘 方 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 33 (143) assembling a plurality of slits in the plurality of slits formed on the probe (10)), causing a poor power supply between the two blades of the foreign body 4; the prepared probe blade (126) and the figure 2*, if the front (ίί Λ ii ^ = i (i26b) is worn out, the distribution line of the inspected body cannot complete the function of the inspection device, so [invention] 1 卩 2卩 3^ is the past investigation equipment Disadvantages: In addition to the probe part, the sputum part is coated with sputum, so that the blade maintains a certain distance. And keep the probe pieces mutually 1287891
戌年ι月修(更)正本 備防止探針片之’人異物的查檢平板式顯GF 被檢查▲以裝童率 JKSJi!卿針 氧 ίίί i?i又=§ί2ί探針刀片之間填滿環氧絕緣體会 ί!ί良Ss塵4異物也可防止探針刀片相互接觸引起的 s4=:越S忠=二 =s鎰 :SFS:2=Si，延 Si 【實施方式】 八#ΐ 3是本發明的檢查平板式顯示裝置的板式探查設備的部分 土的側盍(15)相結合的一對非導電性固定棒(16)，隨探針器(u)寬 1287091 月4日修(更)正本 度方向(X)按一定的間距固定安裝。 —、上述複數個探針刀片（13)以60 //m間距排列能擁有437針而固 疋或女裝在固定棒(16) ’或者以50 //m的間距排列擁有772針而固 定或安裝。 、 另外，複數個探針刀片（13)上部只露出前後方探針部 (13>13c)，剩餘的部分被覆蓋積層環氧層(18)硬化，連接的探針刀 片因上述環氧層(18)相互絕緣。這樣可在灰塵等外部環境中保護探 針刀片’並讓探針刀片保持一定的間距而固定。即，上述璟氣'声°π8) 針刀片（13)之間形成的空間由環氧填充一直到探<針义片 的底面。 探針片（13)與圖5所示，一侧先端具有與被檢查體 ^ f f^(13a)向下曲折的前方探針部(13b)。相1先 ^ 捲T式自動接合(Tape Automated Bonding ; TAB)積體電路 (ic)的電極相接觸，從機體(13a)向上曲折的後方探針部、(13幻。 n、與圖6所示，由越接近機體先端高度階段性 成：即，機體(i3a)中的突出高度⑻最高的最 至if的電極接觸，然後因持續反覆的檢查 Ϊ的、後續探針部(b)的被檢查體的電極接觸完i檢查i 。运樣别方的探針部按順序被磨損後由後續探針部進行探針。 声、5亡探針設備具有被複數個探針片的上部積 #因接觸的探針片相互之間保持絕緣狀態，能保 I口接觸不良&成的對探針片的影響，可延長探查設備壽命的效 距不H本iff有在探針片上部形_氧層，使探針片的間 性的效果事先獅關距魏引起的接觸不良提升檢查信賴 之間的筇針片上部形成環氧層，事先預防探針片 誤動作的情倚除去因異物造成探針片錯 吏探針片的間距變為極細微的間距，因此可 對應電極間距逐漸極細微化的被檢查體的檢查，特別是無需使用 ^87091 . ' · 供 w - 一〜-一· · · 螬W·.»,叫 {(弁/月q日m更)正本j 向價的陶瓷裂片可節減成本。 〜_^_ 時高ίί低ίίΞίί探部佈置從先端向後端移動 【SL;】備的詩及更換週期節減成本。 圖1是過去探查設備結合截面圖。 圖2是過去構成探查設備的探針片正面圖。 面斜=是本拥檢查報式騎裝置喊料賴部分分解底 圖4是在_ 3驗態下積層魏的底面斜視圖。 針片成本發查平板式顯稀置的板式探針設備的探 圖6是擴大顯示圖5的”A”部的部分擴大圖。 【主要元件符號說明】 ” 116......探針板 118......支撐板 120......連接板 122......捲帶式承载封裝體板 124......平板式探針基底 126......探針刀片 126a......前方探針部 126b......後方探針部 128......探針器 130......縫隙裂片 132......擺動杆 143......側蓋 10......探針設備 1287091戌 ι ι ι ι ι ι ι ι ι ι ι 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针 探针The epoxy insulator will be ί! ί s S dust 4 foreign matter can also prevent the probe blades from contacting each other caused by s4 =: the more S loyalty = two = s 镒: SFS: 2 = Si, extended Si [Embodiment] Eight #ΐ 3 It is a pair of non-conductive fixing rods (16) combined with a side sill (15) of a part of the soil of the plate type detecting device of the inspecting flat display device of the present invention, which is repaired with the width of the probe device (u) of 1287091 (4) In addition, the positive direction (X) is fixedly installed at a certain pitch. - The above plurality of probe blades (13) are arranged at a pitch of 60 // m and can have 437 needles for solid or women's wear on the fixed rod (16) ' or at a spacing of 50 // m with 772 stitches fixed or installation. Further, the upper part of the plurality of probe blades (13) exposes only the front and rear probe portions (13 > 13c), and the remaining portion is hardened by the laminated epoxy layer (18), and the connected probe blades are adhered to the epoxy layer ( 18) Insulate each other. This protects the probe blade ' in an external environment such as dust and keeps the probe blades at a certain distance. That is, the space formed between the above-described xenon 'sounds π8) needle blades (13) is filled with epoxy until the bottom surface of the probe piece. As shown in Fig. 5, the probe piece (13) has a front probe portion (13b) which is bent downwardly with respect to the object to be inspected, f f (13a). Phase 1 first T-Automatic Bonding (TAB) integrated circuit (ic) electrodes are in contact with each other, and the rear probe portion is bent upward from the body (13a), (13 illus. n, and Figure 6 It is shown that the closer to the height of the apex of the body, the higher the protrusion height (8) in the body (i3a) is the most up to the if-electrode contact, and then the continuation of the inspection, the subsequent probe part (b) The electrode of the test body is in contact with i. i. The probe portion of the sample is worn in sequence and then probed by the subsequent probe portion. The sound and 5 dead probe devices have the upper part of the plurality of probe pieces. Because the contact probe pieces are kept insulated from each other, the contact of the I port can be kept poor & the effect on the probe piece can extend the life of the probe device. H is not in the upper part of the probe piece. Oxygen layer, the effect of the interfering effect of the probe piece is improved by the contact failure caused by the lion's distance from the lion. The epoxy layer is formed on the upper part of the licking needle, and the erroneous action of the probe piece is prevented in advance to remove the foreign matter. The pitch of the erroneous probe piece becomes a very fine pitch, so it can correspond Inspection of the object to be inspected with extremely fine electrode spacing, especially without using ^87091. ' · For w - one ~ - one · · · · 螬W ·.», called {(弁/月q日 m更)本本The price of the ceramic lobes can reduce the cost. ~_^_ Hour ίίίίίί ί ί ί ί ί ί ί ί ί ί ί ί ί ί ί ί ί ί ί ί ί ί ί ί ί ί ί ί ί ί ί ί ί ί ί ί ί ί ί ί ί ί ί ί ί Fig. 2 is a front view of the probe piece constituting the probe device in the past. The face slant = the partial inspection of the escrow device, and the bottom view is a bottom view of the laminated layer in the _ 3 test state. The probe 6 of the flat-panel-type thin-plate probe device is a partially enlarged view showing an enlarged portion of the "A" portion of Fig. 5. [Explanation of main component symbols] 116] Probe board 118. ..... support plate 120 ... connection plate 122 ... tape-type carrier package plate 124 ... flat probe substrate 126 ... probe Needle blade 126a ... front probe portion 126b ... rear probe portion 128 ... probe device 130 ... slit slit 132 ... Swing lever 143... side cover 10... probe device 1287091
11......探針器 13......探針刀片 13a......機體 13b ······前方探針部 13c......後方探針部 15 ......側蓋 16 ......固定棒 18......環氧層11...probe device 13...probe blade 13a...body 13b····· front probe portion 13c...rear probe portion 15 ... side cover 16 ... fixing rod 18 ... epoxy layer