TWI274616B - Method and system for removing thin metal film - Google Patents

Method and system for removing thin metal film Download PDF

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Publication number
TWI274616B
TWI274616B TW092127919A TW92127919A TWI274616B TW I274616 B TWI274616 B TW I274616B TW 092127919 A TW092127919 A TW 092127919A TW 92127919 A TW92127919 A TW 92127919A TW I274616 B TWI274616 B TW I274616B
Authority
TW
Taiwan
Prior art keywords
electrode
metal
electrolyte
thin film
metal plate
Prior art date
Application number
TW092127919A
Other languages
English (en)
Chinese (zh)
Other versions
TW200405838A (en
Inventor
Hiroyuki Daiku
Hidehiko Maehata
Masanori Tsukahara
Shogo Hamada
Tetsuya Inoue
Original Assignee
Hitachi Shipbuilding Eng Co
Hitz Hi Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Shipbuilding Eng Co, Hitz Hi Technology Corp filed Critical Hitachi Shipbuilding Eng Co
Publication of TW200405838A publication Critical patent/TW200405838A/zh
Application granted granted Critical
Publication of TWI274616B publication Critical patent/TWI274616B/zh

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F5/00—Electrolytic stripping of metallic layers or coatings
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00—Electrolytic etching or polishing
    • C25F3/02—Etching
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F7/00—Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects; Servicing or operating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Electrochemistry (AREA)
  • Metallurgy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Electrolytic Production Of Metals (AREA)
TW092127919A 2002-10-11 2003-10-08 Method and system for removing thin metal film TWI274616B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002298947 2002-10-11
JP2002336838A JP4157753B2 (ja) 2002-10-11 2002-11-20 金属薄膜の除去方法及び装置

Publications (2)

Publication Number Publication Date
TW200405838A TW200405838A (en) 2004-04-16
TWI274616B true TWI274616B (en) 2007-03-01

Family

ID=32095441

Family Applications (1)

Application Number Title Priority Date Filing Date
TW092127919A TWI274616B (en) 2002-10-11 2003-10-08 Method and system for removing thin metal film

Country Status (4)

Country Link
JP (1) JP4157753B2 (ja)
KR (1) KR101015427B1 (ja)
TW (1) TWI274616B (ja)
WO (1) WO2004033384A1 (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0621184D0 (en) 2006-10-25 2006-12-06 Rolls Royce Plc Method for treating a component of a gas turbine engine
GB0701397D0 (en) 2007-01-25 2007-03-07 Rolls Royce Plc Apparatus and method for calibrating a laser deposition system
GB2449862B (en) 2007-06-05 2009-09-16 Rolls Royce Plc Method for producing abrasive tips for gas turbine blades
KR101769612B1 (ko) 2010-12-10 2017-08-21 삼성디스플레이 주식회사 기판 평탄화 방법
TWI587962B (zh) * 2015-06-03 2017-06-21 遠東科技大學 振動型光碟鍍膜去除裝置
TWI587963B (zh) * 2015-06-03 2017-06-21 遠東科技大學 具斜角之直立式光碟鍍膜去除裝置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5150247A (ja) * 1974-10-28 1976-05-01 Inoue Japax Res Denkaikensakukakohoho
JPS59193859U (ja) * 1983-06-06 1984-12-22 株式会社　山田メツキ工業所 エツチング装置
JPS62290900A (ja) * 1986-06-11 1987-12-17 Oki Electric Ind Co Ltd 透明導電膜のエツチング方法およびその装置
JP3353075B2 (ja) * 1994-01-18 2002-12-03 西山ステンレスケミカル株式会社 ガラス板の再生方法及びその装置
US6153535A (en) * 1996-10-23 2000-11-28 Asahi Glass Company Ltd. Method for removing a thin film for a window glass
US6334942B1 (en) * 1999-02-09 2002-01-01 Tessera, Inc. Selective removal of dielectric materials and plating process using same
US6723224B2 (en) * 2001-08-01 2004-04-20 Applied Materials Inc. Electro-chemical polishing apparatus

Also Published As

Publication number Publication date
JP2004182998A (ja) 2004-07-02
KR101015427B1 (ko) 2011-02-22
TW200405838A (en) 2004-04-16
KR20050057615A (ko) 2005-06-16
JP4157753B2 (ja) 2008-10-01
WO2004033384A1 (ja) 2004-04-22

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MM4A Annulment or lapse of patent due to non-payment of fees