TWI271785B - Optical-mechanical feature fabrication during manufacture of semiconductors and other micro-devices and nano-devices that include micron and sub-micron features - Google Patents

Optical-mechanical feature fabrication during manufacture of semiconductors and other micro-devices and nano-devices that include micron and sub-micron features Download PDF

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Publication number
TWI271785B
TWI271785B TW091134361A TW91134361A TWI271785B TW I271785 B TWI271785 B TW I271785B TW 091134361 A TW091134361 A TW 091134361A TW 91134361 A TW91134361 A TW 91134361A TW I271785 B TWI271785 B TW I271785B
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TW
Taiwan
Prior art keywords
polymer
mask
pattern
layer
optomechanical
Prior art date
Application number
TW091134361A
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English (en)
Chinese (zh)
Other versions
TW200302506A (en
Inventor
Ping Mei
Carl P Taussig
Albert H Jeans
Original Assignee
Hewlett Packard Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Co filed Critical Hewlett Packard Co
Publication of TW200302506A publication Critical patent/TW200302506A/zh
Application granted granted Critical
Publication of TWI271785B publication Critical patent/TWI271785B/zh

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
    • B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/6704—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device
    • H10D30/6713—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device characterised by the properties of the source or drain regions, e.g. compositions or sectional shapes
    • H10D30/6715—Thin-film transistors [TFT] having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device characterised by the properties of the source or drain regions, e.g. compositions or sectional shapes characterised by the doping profiles, e.g. having lightly-doped source or drain extensions

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Nanotechnology (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Theoretical Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Thin Film Transistor (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
TW091134361A 2002-01-23 2002-11-26 Optical-mechanical feature fabrication during manufacture of semiconductors and other micro-devices and nano-devices that include micron and sub-micron features TWI271785B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/058,744 US6653030B2 (en) 2002-01-23 2002-01-23 Optical-mechanical feature fabrication during manufacture of semiconductors and other micro-devices and nano-devices that include micron and sub-micron features

Publications (2)

Publication Number Publication Date
TW200302506A TW200302506A (en) 2003-08-01
TWI271785B true TWI271785B (en) 2007-01-21

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
TW091134361A TWI271785B (en) 2002-01-23 2002-11-26 Optical-mechanical feature fabrication during manufacture of semiconductors and other micro-devices and nano-devices that include micron and sub-micron features

Country Status (7)

Country Link
US (1) US6653030B2 (enExample)
EP (1) EP1331516B1 (enExample)
JP (1) JP4242145B2 (enExample)
KR (1) KR20030080183A (enExample)
CN (1) CN1434349A (enExample)
DE (1) DE60310460T2 (enExample)
TW (1) TWI271785B (enExample)

Families Citing this family (97)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999067641A2 (en) 1998-06-24 1999-12-29 Illumina, Inc. Decoding of array sensors with microspheres
US6852454B2 (en) * 2002-06-18 2005-02-08 Freescale Semiconductor, Inc. Multi-tiered lithographic template and method of formation and use
US7083880B2 (en) * 2002-08-15 2006-08-01 Freescale Semiconductor, Inc. Lithographic template and method of formation and use
WO2004027472A1 (ja) * 2002-09-20 2004-04-01 Toppan Printing Co., Ltd. 光導波路及びその製造方法
AU2003281923A1 (en) * 2002-10-02 2004-04-23 Leonhard Kurz Gmbh And Co. Kg Film comprising organic semiconductors
CN1260616C (zh) * 2002-12-13 2006-06-21 国际商业机器公司 制造微结构的方法
JP4036820B2 (ja) * 2002-12-18 2008-01-23 インターナショナル・ビジネス・マシーンズ・コーポレーション サブ波長構造体の製造
JP4586021B2 (ja) 2003-09-23 2010-11-24 ザ ユニバーシティ オブ ノース カロライナ アット チャペル ヒル マイクロ流体装置の新規な材料として使用するための光硬化性ペルフルオロポリエーテル
KR101281775B1 (ko) 2003-12-19 2013-07-15 더 유니버시티 오브 노쓰 캐롤라이나 엣 채플 힐 소프트 또는 임프린트 리소그래피를 이용하여 분리된마이크로- 및 나노- 구조를 제작하는 방법
US9040090B2 (en) 2003-12-19 2015-05-26 The University Of North Carolina At Chapel Hill Isolated and fixed micro and nano structures and methods thereof
KR101050292B1 (ko) * 2003-12-27 2011-07-19 엘지디스플레이 주식회사 박막트랜지스터 어레이 기판의 제조방법
KR101016960B1 (ko) * 2003-12-30 2011-02-28 엘지디스플레이 주식회사 액정표시장치용 어레이 기판의 제조 방법
EP1730591B1 (en) * 2004-01-12 2011-08-03 Regents of the University of California Nanoscale electric lithography
US7056834B2 (en) * 2004-02-10 2006-06-06 Hewlett-Packard Development Company, L.P. Forming a plurality of thin-film devices using imprint lithography
WO2007021762A2 (en) 2005-08-09 2007-02-22 The University Of North Carolina At Chapel Hill Methods and materials for fabricating microfluidic devices
US7208401B2 (en) * 2004-03-12 2007-04-24 Hewlett-Packard Development Company, L.P. Method for forming a thin film
JP4481698B2 (ja) * 2004-03-29 2010-06-16 キヤノン株式会社 加工装置
US20080055581A1 (en) * 2004-04-27 2008-03-06 Rogers John A Devices and methods for pattern generation by ink lithography
GB0411348D0 (en) * 2004-05-21 2004-06-23 Univ Cranfield Fabrication of polymeric structures using laser initiated polymerisation
JP4954498B2 (ja) * 2004-06-01 2012-06-13 株式会社半導体エネルギー研究所 半導体装置の作製方法
TWI366218B (en) * 2004-06-01 2012-06-11 Semiconductor Energy Lab Method for manufacturing semiconductor device
US7799699B2 (en) 2004-06-04 2010-09-21 The Board Of Trustees Of The University Of Illinois Printable semiconductor structures and related methods of making and assembling
CN101120433B (zh) 2004-06-04 2010-12-08 伊利诺伊大学评议会 用于制造并组装可印刷半导体元件的方法
US8268538B2 (en) * 2004-08-31 2012-09-18 Taiwan Tft Lcd Association Method for producing a thin film transistor
US7259106B2 (en) * 2004-09-10 2007-08-21 Versatilis Llc Method of making a microelectronic and/or optoelectronic circuitry sheet
US20060105550A1 (en) * 2004-11-17 2006-05-18 Manish Sharma Method of depositing material on a substrate for a device
JP4506460B2 (ja) * 2004-12-28 2010-07-21 セイコーエプソン株式会社 有機エレクトロルミネッセンス装置の製造方法及び電子機器
KR101137845B1 (ko) * 2005-06-24 2012-04-20 엘지디스플레이 주식회사 소프트 몰드의 제조방법
US20090304992A1 (en) * 2005-08-08 2009-12-10 Desimone Joseph M Micro and Nano-Structure Metrology
US8011916B2 (en) * 2005-09-06 2011-09-06 Canon Kabushiki Kaisha Mold, imprint apparatus, and process for producing structure
US20070138699A1 (en) * 2005-12-21 2007-06-21 Asml Netherlands B.V. Imprint lithography
GB0614992D0 (en) * 2006-07-28 2006-09-06 Univ Cranfield Polymeric coatings in evanescent field
JP5110924B2 (ja) * 2007-03-14 2012-12-26 キヤノン株式会社 モールド、モールドの製造方法、加工装置及び加工方法
KR20080105524A (ko) * 2007-05-31 2008-12-04 삼성전자주식회사 마스크 몰드 및 그 제작방법과 제작된 마스크 몰드를이용한 대면적 미세패턴 성형방법
KR101381252B1 (ko) * 2007-06-05 2014-04-04 삼성디스플레이 주식회사 임프린트 장치, 이의 제조 방법 및 이를 이용한 박막패터닝 방법
JP5274128B2 (ja) * 2007-08-03 2013-08-28 キヤノン株式会社 インプリント方法および基板の加工方法
FR2922330A1 (fr) * 2007-10-15 2009-04-17 Commissariat Energie Atomique Procede de fabrication d'un masque pour la lithographie haute resolution
KR20090056004A (ko) * 2007-11-29 2009-06-03 삼성전자주식회사 이미지형성체 제조방법, 상기 방법에 의해 제조된이미지형성체 및 이를 구비하는 이미지형성장치
US8361371B2 (en) 2008-02-08 2013-01-29 Molecular Imprints, Inc. Extrusion reduction in imprint lithography
KR101492071B1 (ko) * 2008-09-19 2015-02-10 삼성전자 주식회사 나노 임프린트를 이용한 패턴 성형방법과 패턴 성형을 위한몰드 제작방법
US8886334B2 (en) 2008-10-07 2014-11-11 Mc10, Inc. Systems, methods, and devices using stretchable or flexible electronics for medical applications
US8389862B2 (en) 2008-10-07 2013-03-05 Mc10, Inc. Extremely stretchable electronics
EP2349440B1 (en) 2008-10-07 2019-08-21 Mc10, Inc. Catheter balloon having stretchable integrated circuitry and sensor array
US8372726B2 (en) 2008-10-07 2013-02-12 Mc10, Inc. Methods and applications of non-planar imaging arrays
US8097926B2 (en) 2008-10-07 2012-01-17 Mc10, Inc. Systems, methods, and devices having stretchable integrated circuitry for sensing and delivering therapy
JP5100609B2 (ja) * 2008-10-27 2012-12-19 株式会社東芝 半導体装置の製造方法
KR101555230B1 (ko) * 2009-01-29 2015-09-24 삼성전자주식회사 나노임프린트 리소그래피를 이용한 미세 패턴의 형성 방법
US8436324B2 (en) * 2009-02-22 2013-05-07 Mapper Lithography Ip B.V. Preparation unit for lithography machine
JP5381259B2 (ja) * 2009-04-10 2014-01-08 大日本印刷株式会社 光インプリント用モールド
US9337100B2 (en) * 2009-06-03 2016-05-10 Qualcomm Incorporated Apparatus and method to fabricate an electronic device
KR100965904B1 (ko) * 2009-09-02 2010-06-24 한국기계연구원 나노임프린트를 이용한 금속 산화박막 패턴 형성방법 및 ｌｅｄ 소자의 제조방법
US9723122B2 (en) 2009-10-01 2017-08-01 Mc10, Inc. Protective cases with integrated electronics
DE102010043059A1 (de) * 2009-11-06 2011-05-12 Technische Universität Dresden Imprinttemplate, Nanoimprintvorrichtung und Nanostrukturierungsverfahren
US9936574B2 (en) 2009-12-16 2018-04-03 The Board Of Trustees Of The University Of Illinois Waterproof stretchable optoelectronics
EP2513953B1 (en) 2009-12-16 2017-10-18 The Board of Trustees of the University of Illionis Electrophysiology using conformal electronics
US10441185B2 (en) 2009-12-16 2019-10-15 The Board Of Trustees Of The University Of Illinois Flexible and stretchable electronic systems for epidermal electronics
JP5563319B2 (ja) * 2010-01-19 2014-07-30 キヤノン株式会社 インプリント装置、および物品の製造方法
JP2011159850A (ja) * 2010-02-02 2011-08-18 Toshiba Corp テンプレート、テンプレートの製造方法およびパターン形成方法
EP2547258B1 (en) 2010-03-17 2015-08-05 The Board of Trustees of the University of Illionis Implantable biomedical devices on bioresorbable substrates
EP2609467A4 (en) * 2010-08-23 2014-07-30 Rolith Inc MASK FOR NEAR FIELD LITHOGRAPHY AND ITS MANUFACTURE
WO2012025316A1 (en) * 2010-08-26 2012-03-01 Asml Netherlands B.V. Imprint lithography method and imprintable medium
WO2012037343A1 (en) * 2010-09-15 2012-03-22 Ascentia Imaging, Inc. Imaging, fabrication, and measurement systems and methods
US10132925B2 (en) 2010-09-15 2018-11-20 Ascentia Imaging, Inc. Imaging, fabrication and measurement systems and methods
US8877531B2 (en) 2010-09-27 2014-11-04 Applied Materials, Inc. Electronic apparatus
WO2012158709A1 (en) 2011-05-16 2012-11-22 The Board Of Trustees Of The University Of Illinois Thermally managed led arrays assembled by printing
US9159635B2 (en) 2011-05-27 2015-10-13 Mc10, Inc. Flexible electronic structure
WO2012167096A2 (en) 2011-06-03 2012-12-06 The Board Of Trustees Of The University Of Illinois Conformable actively multiplexed high-density surface electrode array for brain interfacing
JP5535164B2 (ja) * 2011-09-22 2014-07-02 株式会社東芝 インプリント方法およびインプリント装置
WO2013089867A2 (en) 2011-12-01 2013-06-20 The Board Of Trustees Of The University Of Illinois Transient devices designed to undergo programmable transformations
CN107861102B (zh) 2012-01-03 2021-08-20 阿森蒂亚影像有限公司 编码定位系统、方法和装置
US9739864B2 (en) 2012-01-03 2017-08-22 Ascentia Imaging, Inc. Optical guidance systems and methods using mutually distinct signal-modifying
EP2830492B1 (en) 2012-03-30 2021-05-19 The Board of Trustees of the University of Illinois Appendage mountable electronic devices conformable to surfaces and method of making the same
US9171794B2 (en) 2012-10-09 2015-10-27 Mc10, Inc. Embedding thin chips in polymer
KR20140076357A (ko) * 2012-12-12 2014-06-20 삼성전자주식회사 고대비 정렬 마크를 가진 나노임프린트 스탬프 및 그 제조방법
WO2014113617A1 (en) 2013-01-21 2014-07-24 Innovative Finishes LLC Refurbished component, electronic device including the same, and method of refurbishing a component of an electronic device
JP6060796B2 (ja) * 2013-04-22 2017-01-18 大日本印刷株式会社 インプリントモールド及びダミーパターン設計方法
JP5821909B2 (ja) * 2013-07-30 2015-11-24 大日本印刷株式会社 光インプリント用モールドおよびその製造方法
JP6569189B2 (ja) * 2014-04-01 2019-09-04 大日本印刷株式会社 インプリントモールド用基板及びその製造方法、インプリント方法、インプリントモールド及びその再生方法
TWI662591B (zh) * 2014-07-08 2019-06-11 日商綜研化學股份有限公司 使用分步重複用壓印用模具的分步重複壓印方法、及分步重複用壓印用模具之製造方法
TWI663472B (zh) * 2014-07-25 2019-06-21 日商綜研化學股份有限公司 Manufacturing method of fine structure
US10126114B2 (en) 2015-05-21 2018-11-13 Ascentia Imaging, Inc. Angular localization system, associated repositionable mechanical structure, and associated method
CN107923988A (zh) 2015-06-01 2018-04-17 伊利诺伊大学评议会 Uv感测的替代方法
KR20180033468A (ko) 2015-06-01 2018-04-03 더 보드 오브 트러스티즈 오브 더 유니버시티 오브 일리노이 무선 전력 및 근거리 통신기능을 갖는 소형화된 전자 시스템
EP3136446A1 (en) 2015-08-28 2017-03-01 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Tft device and manufacturing method
US10925543B2 (en) 2015-11-11 2021-02-23 The Board Of Trustees Of The University Of Illinois Bioresorbable silicon electronics for transient implants
JP6725097B2 (ja) * 2016-01-27 2020-07-15 エルジー・ケム・リミテッド フィルムマスク、その製造方法、これを用いたパターンの形成方法およびこれを用いて形成されたパターン
KR102138960B1 (ko) 2016-01-27 2020-07-28 주식회사 엘지화학 필름 마스크, 이의 제조방법, 이를 이용한 패턴 형성 방법 및 이를 이용하여 형성된 패턴
KR102288981B1 (ko) * 2017-04-17 2021-08-13 에스케이하이닉스 주식회사 임프린트 템플레이트 및 임프린트 패턴 형성 방법
JP7027099B2 (ja) 2017-09-29 2022-03-01 キヤノン株式会社 インプリント装置及び物品の製造方法
US10663869B2 (en) 2017-12-11 2020-05-26 Canon Kabushiki Kaisha Imprint system and imprinting process with spatially non-uniform illumination
US10948818B2 (en) 2018-03-19 2021-03-16 Applied Materials, Inc. Methods and apparatus for creating a large area imprint without a seam
US20200278605A1 (en) * 2019-03-01 2020-09-03 Applied Materials, Inc. Method and apparatus for stamp generation and curing
US11181819B2 (en) 2019-05-31 2021-11-23 Canon Kabushiki Kaisha Frame curing method for extrusion control
CN111522206B (zh) * 2020-04-29 2021-09-21 中国科学院光电技术研究所 一种基于反射式光场增强的微纳光印制造方法
US11747731B2 (en) 2020-11-20 2023-09-05 Canon Kabishiki Kaisha Curing a shaped film using multiple images of a spatial light modulator
KR102552654B1 (ko) * 2022-10-12 2023-07-06 주식회사 기가레인 디몰더 장치 및 이를 이용한 디몰딩 방법
EP4468079A1 (en) * 2023-05-22 2024-11-27 Nederlandse Organisatie voor toegepast-natuurwetenschappelijk Onderzoek TNO A stamp for use in imprint lithography, a method of manufacturing thereof, and a method for imprint lithography

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0580530A (ja) * 1991-09-24 1993-04-02 Hitachi Ltd 薄膜パターン製造方法
KR100413906B1 (ko) * 1997-09-19 2004-01-07 인터내셔널 비지네스 머신즈 코포레이션 광 결합 구조, 광 결합 구조 제조 방법 및 서브-파장 구조의 형성 방법
EP1001311A1 (en) * 1998-11-16 2000-05-17 International Business Machines Corporation Patterning device
US6296991B1 (en) * 1999-12-22 2001-10-02 United Microelectronics Corp. Bi-focus exposure process
US6696220B2 (en) * 2000-10-12 2004-02-24 Board Of Regents, The University Of Texas System Template for room temperature, low pressure micro-and nano-imprint lithography

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CN1434349A (zh) 2003-08-06
DE60310460T2 (de) 2007-12-13
US6653030B2 (en) 2003-11-25
JP2003249444A (ja) 2003-09-05
EP1331516A3 (en) 2003-10-15
US20030138704A1 (en) 2003-07-24
JP4242145B2 (ja) 2009-03-18
EP1331516B1 (en) 2006-12-20
TW200302506A (en) 2003-08-01
EP1331516A2 (en) 2003-07-30
KR20030080183A (ko) 2003-10-11

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