TWI270429B - Method of joining members, method of joining metallic members, radiation member, process for manufacturing the same, jig for the manufacturing and heat sink - Google Patents

Abstract

A method of joining two metallic members of different melting points piled on each other, which enables obtaining stable joined part quality and enables junction of large metallic members of complex configuration. Two or more metallic members (aluminum member (101) and copper member (102)) are joined to each other through a process comprising arranging two or more metallic members (aluminum member (101) and copper member (102)) so that these are piled on each other in the order of highness of melting point and moving the circumferential face of tool main body (103a) of disk-shaped junction tool (103) capable of rotating in the circumferential direction, while in the piling portion pressing the same in the surface (102a) of metallic member (copper member (102)) having the highest melting point among those of the metallic members, along the surface (102a) of metallic member (copper member (102)).

Description

1270429 IX. Description of the Invention: [Technical Field of the Invention] The first group of the present invention relates to a method of recombining and joining metal members having dissimilar melting points, and a heat dissipating member having excellent joint strength. And a method of manufacturing a heat dissipating component having excellent bonding efficiency. A second group of the present invention relates to a method of re-bonding and bonding a plurality of sheets having a certain interval to each other to a surface of a substrate, and the method is also used for manufacturing using the above-described bonding method. A heat dissipating element, a heat dissipating element for a pel tier device, a heat dissipating element for a motor, a heat dissipating element for a heat radiating element for electronic control parts, and a method for manufacturing the same, and a heat dissipating element used in the above manufacturing method A third group of the present invention relates to a heat sink for cooling various electronic components such as semiconductor elements. The fourth group of the present invention relates to a method for re-engaging and joining metal components. Further, a method of bonding a plurality of metal plate members to one surface of a substrate, and further relates to a heat dissipating component for an IC to which the bonding method is applied, a heat dissipating component for a peltier device, a heat dissipating component for a motor, and A method of manufacturing a heat dissipating component such as a heat dissipating component for electronically controlling a component. The fifth group of the present invention relates to a method in which metal components are rejoined and joined to each other. Further, the present invention relates to a heat dissipating component for an IC for applying the above-described bonding method, a heat dissipating component for a peltier device, a heat dissipating component for a motor, a heat dissipating component for an electronic control component, and the like. The sixth group is about 1 (: using a radiator, Pittier cooling 2036-5808B-PF 5 1270429, electronic control, using a heat sink for the peltier device, heat dissipation for the motor A heat dissipating component such as a device and a method of manufacturing the same, and a heat sink for a heat dissipating component. [Prior Art] A method in which two metal members having different melting points are joined and joined to each other is usually welded or detonated.

After a long period of time, the joining is completed during the cooling along with the molten solder material. In the welding, the molten glow joining material flows into the joint portion, and the capillary phenomenon of the liquid phase welding material which can be melted or reacted and diffused by the "wetting" and "flowing" bonding method with the base material will be Interfacial gap embedding, no longer, the so-called explosion connection, is the use of high-energy in the occurrence of gunpowder explosion and a short time to join the metal, in which the appropriate spacing between the metal components, in - The metal element on the side carries the gunpowder, and the detonator is detonated at the end of the gunpowder, and the two metal elements are struck at a high speed, and the metal surface is excluded by a significant flow phenomenon (metal jet; metai jet) at the impact point. The contaminated layer is simultaneously bonded under high pressure. However, when welding is used, the quality of the joint portion is unstable, so that the type of metal that can be used for joining is limited. In addition, when explosive pressure bonding is used, there are disadvantages such as high cost and inability to join large metal components and metal components having complicated shapes. In view of the fact that the first group of the present invention provides a bonding method, when two metal elements having mutually different melting points are joined and joined to each other, an

2036-5808B-PF 1270429 The quality of the joint can also be achieved between the large and complex metal. Further, the present invention also provides a heat dissipating member manufactured by the above method and a method of manufacturing the same. Further, a method of manufacturing a heat dissipating member in which a plurality of fins having a certain interval therebetween are erected on a surface of a substrate has been disclosed, for example, in a step of extruding a heat dissipating 7G member of a king body. One-piece molding (please refer to the shogunate special opening 2001-3841 6). Further, a plurality of rod-shaped ridge portions and fins erected on the rod-shaped portion are arranged side by side, and each of the rod-shaped portions is welded to manufacture a heat dissipating member made of aluminum; wherein the rod-shaped portion and the fin are formed The film is made of extruded type, and has a constituent element of an inlaid political element with an L-shaped or concave type (please refer to Japanese Patent Laid-Open No. 6-177289A). Further, in order to improve the heat dissipation performance, copper having high thermal conductivity is used, and a plurality of inlaid fins are joined to the surface of a copper substrate in a fresh manner. However, there is a process limitation in the stencil type 牯1 south/interval ratio. The higher the height/space ratio of the fins, the higher the heat dissipation performance of the heat dissipating components, and the height/space ratio of the fins that can be obtained by the step of the extrusion type cannot exceed 20, and the heat dissipating components are also produced. The heat dissipation performance is again affected. When welding is used, it is a necessary step to add 敎, blame, and field in a heating device such as a vacuum furnace, and there is a problem of high manufacturing cost. In the manufacturing method of the above-mentioned conventional technology, a plurality of green sheets of mutually different green heat dissipating elements are erected.

2036-5808B-PF 1270429, when faced on a surface of a substrate, is also widely faced with the same problem. There is a clock in which the second group of the present invention first provides a component bonding method which allows a plurality of thin and high sheets to be simply erected and joined to a surface of a substrate at short intervals. Furthermore, the present invention provides a heat dissipation element manufacturing method capable of manufacturing a heat dissipation element having a south degree/space ratio at a low cost; the present invention further provides a heat dissipation element having high heat dissipation performance manufactured by the above method, and the above method The heat sink used in the manufacture of fixtures. _ In addition, it is installed in various devices such as personal computers, electronic components such as electric and electronic devices, and other electronic components such as semiconductor components, and it is necessary to avoid heat generation to a certain extent in practical use. The high power and high integration of electronic components has become an extremely important technical issue. Now, the cooling means described above, for example, is to make the heat-generating portion of the electronic component in thermal contact with a heat-dissipating component, and to transfer the heat generated by the heat-generating portion of the electronic component to the fin of the heat-dissipating component, and use a fan to do Forced cooling to drain heat to the outside heat sink. In the case of a thin notebook computer, when it is difficult to make a structure in which heat is discharged to the vicinity of the heat generating portion, a heat pipe is used to connect the heat generating portion and the heat dissipating member, and the heat dissipating member and the fan are used. The heat sink is located away from the heat generating portion on the side of the box-shaped container, and is disposed on the heat sink portion of the panel side. The heat dissipating component used in the above heat sink is characterized in that a plurality of fins made of copper or aluminum are directly erected and joined to a base of copper, and the crucible type has a plurality of fins erected thereon. After integrally forming, 2036-5808B-PF 8 1270429 was superposed and bonded to a substrate made of copper. Among them, the bonding between the copper substrate of the former and the plurality of Korean copper ills is performed by soldering, and the bonding of the latter copper substrate to the substrate is by soldering or explosion bonding. In the case of welding, the molten solder material is poured into the joint portion, and the interface is formed by the "full wet" #"flow" bonding method of the base material, and the interface is melted or the liquid material of the liquid material to be diffused is used. The gap is buried, and soon after, the bonding is completed in the process of solidification through the molten solder material.

In addition, explosive pressure bonding is a method of joining metals in the event of a gunpowder explosion and a high-time energy of a short-time household, in which a metal powder is placed between the metal components at appropriate intervals. At the end of the gunpowder, the thunder B is detonated, and the two metal components are struck at a high speed, by causing a significant flow phenomenon at the impact point (metal jet, he"(4), eliminating the contaminated layer of the metal surface' and at the same time In the case of welding, the necessary steps are added to the heating device such as a vacuum furnace, and the temperature is constant, and there is a problem of high manufacturing cost, and there is also a problem that the quality of the joint is unstable. When using the Puping crimping, there are disadvantages such as the cost of the bodhisattva, the inability to join the large-sized components and the metal components with complicated shapes. In this case, the purpose of the second group of the present invention is Provides a high-profile heat sink with a heat-dissipating component that can be reliably joined to a copper fin, aluminum fin, or a substrate at a low cost. 0015 to 0018 and Figures 2, 3, and 5 Zhibaizhi Method of manufacturing hot stamping parts,

2036-5808Β-PF 9 1270429 As shown in Fig. 66A, a surface 462a of a substrate 462 composed of a copper alloy is provided with a thin plate made of an aluminum alloy bent to form a base end portion 464a and a heat dissipating surface 464b. a fin 464 having a continuous concave-convex cross-sectional shape of the front end portion 464c, wherein each base end portion 464a is in surface contact with the surface 462a; and as shown in Figs. 66B and 66C, a circular plate-shaped joint treatment is performed. The circumferential surface of the jig body 463a having the 463 is pressed into the surface of the base end portion 464a of the fin 464 and moved along the surface of the base end portion 464a to bond the ore piece 464 to the substrate 462. The above bonding method is called friction acoustic bonding. The joining jig used for the frictional vibration joining as shown below can be used: a joining jig 463 having a flat circumferential surface of the jig body 463a (refer to Fig. 6A); on the circumferential surface of the jig body 463a a joining jig 463B having a plurality of thin strips 463b parallel to the thickness direction of the circumferential surface of the jig body 463a (refer to FIG. 67B); and a diameter protruding from the jig body 463a on the circumferential surface of the jig body 463a a joining jig 463C of a plurality of quadrangular hammer-shaped projections 463c arranged in an island shape (refer to FIG. 6C); and a radial direction protruding from the jig body 463a on the circumferential surface of the jig body 463a, The bonding jig 463D of a plurality of arc-shaped protrusions 463d arranged in an island shape (refer to Fig. 67D). Among them, the joint jigs 463b, 463c, and 463d of Figs. 67B to 67D have a larger contact area with the base end portion 464a of the fin 464 than the joint jig 463 of Fig. 67A, and are subjected to frictional vibration bonding. The fins 464 and the substrate 462 have better efficiency. However, the above-described conventional method for manufacturing a diffusing element has the following problems of 2036-5808B-PF 10 1270429. (1) Since the bonding jig 463 is pressed into the side of the fin 464 formed of the aluminum alloy to be frictional vibration bonding, and the melting point of the aluminum alloy is lower than that of the copper alloy constituting the substrate 462, the substrate 462 and the fin are Before the interface of 464 reaches the temperature necessary for the junction (the eutectic temperature of 548. 〇), the base end portion 464a of the fin 464 is lowered in its deformation resistance due to the high temperature. Therefore, the compressive stress from the joint/cooker 463 cannot be sufficiently transmitted to the interface between the substrate and the base end portion 464a of the fin 464, and the door 4 which is poorly joined or unreachable is more the 'fin sheet 464. When the thickness of the base end portion 464a is thin (for example, when the thickness is 5 mm or less), there is a disadvantage that the base end portion 464 & (2) The mouth is a joining jig 463 which is pressed into the side of the stagger 464. The base end portion 464a of the composition of the fin 464 cannot be omitted, and the shape and configuration of the heat dissipating member are limited. (3) Since the bonding jig 463 is pressed into the side of the fin 464, the base end portion 464a directly under the heat dissipating surface 464b and the substrate 462 remain unjoined portions, resulting in insufficient heat dissipation performance and bonding strength of the heat dissipating member. . (4) It is necessary to pay attention to the depth of the joining jig 463 which is rotated at a high speed, between the heat radiating faces 464b of the respective small fins 464, otherwise the joining jig 463 is moved in contact with the respective heat radiating faces 464b, and It is complicated and difficult to make the joining work. In the above case, in particular, in order to improve the heat dissipation performance of the heat dissipating member, the height/space ratio of the fins is increased (the interval between the heat dissipating surfaces 464b is reduced, and/or the heat dissipating is performed.) 2036- 5808B-PF 11 1270429 The above problem is not only caused by the manufacturing method of the heat dissipating component, but also when the plurality of metal plates are erected on one surface of a metal substrate, the same problem is widely faced. Moreover, when the metal elements are generally rejoined and joined to each other, the problems of the above items (1) to (3) are also faced. In view of this, the fourth group of the present invention first provides a bonding method which can be easily and surely The metal elements are rejoined and joined to each other. The present invention further provides a bonding method for easily and surely joining a plurality of metal sheets to a metal substrate; and further applying the above method to provide a simple heat dissipating element manufacturing In the method, a plurality of fins are firmly erected and joined to a substrate. Further, a substrate made of a copper alloy is superposed on a thin plate made of an aluminum alloy, and a rotating circle is formed. Conventional metal component bonding methods for pressing a bonding tool on an aluminum alloy sheet having a melting point lower than that of a copper alloy have been known to the world (please refer to paragraphs 0015 to GG18 and Fig. 69 of the Japan Patent (4) 2G03_14 short bulletin _ 3) In the above bonding method, the rotating disk-shaped bonding jig is brought into contact with the above-mentioned alloy thin plate to generate frictional heat, and the interface between the thin plate and the substrate is plasticized by the frictional heat (fluidization) Therefore, the above-mentioned plasticized (fluidized) ingot. After the gold and the copper alloy are cooled, the thin plate and the substrate are joined together. By the above bonding method, fewer steps can be The metal components are joined in a short time.

β However, in the above-described metal element bonding method, since the bonding jig is pressed into the side of the aluminum alloy sheet, the overlapping portion (interface) of the substrate and the sheet is 2036-5808Β-PF 12 1270429, and the aluminum σ gold and The necessary eutectic temperature for the bonding of the copper alloy, and the deformation resistance of the thin plate, that is, the thin plate, becomes smaller. Therefore, in the above-described metal element bonding method, the compressive stress from the bonding jig cannot be sufficiently transmitted to the overlapping portion of the substrate and the thin plate, and the bonding between the substrate and the thin plate cannot form a high-strength bonding. In view of the above, the present invention provides a bonding method of a metal component, which can reduce the number of steps and join the metal components in a short time, and can be used

The metal 7C member has high joint strength; and a manufacturing method for providing a heat radiating member to which the above method is applied' and provides a bulk material manufactured by the above method. Japanese Laid-Open Patent Publication No. Hei 9-203595 (paragraphs 〇〇1 to 〇〇16 and 4) discloses a heat dissipating element using a gap joint ((10) iUng joint), an adhesive, or a solder joint. The above-mentioned heat dissipating component focuses on the characteristics of copper which is heavy in weight and extremely high in thermal conductivity, and the thermal conductivity is smaller than that of copper, and the weight is lighter than that of copper. The substrate and the fin are made of various suitable dissimilar metals. The composition can meet the requirements of improving heat dissipation performance and light weight in two aspects. However, in order to improve the performance of the above-mentioned heat dissipating components, it is necessary to increase the thickness of the plate or reduce the spacing of the fins (increasing the number of fins 1), thus increasing the weight of the entire heat dissipating component. It runs counter to the requirements of lightweighting. In other words, there is a limit to the process of making the heat dissipating component lighter in the case of not reducing the heat dissipation performance. In view of this, the sixth group of the present invention achieves the problem of weight reduction without prejudice to heat dissipation performance. Before the above is reached, 2036-5808B-PF 13 1270429. The present invention provides a manufacturing method of a one-piece and a heat sink using the above-described heat dissipating unit. SUMMARY OF THE INVENTION The first group of the present invention is a method for joining metal-containing metal parts, which comprises a circular plate-shaped joint treatment in which the melting point of the package is superimposed in a low order. #在 η sf in the overlapping portion of the above-mentioned metal member, so that the surface of the metal element having the highest melting point in the last two circumferential members is moved, Engage each other. - The present invention further provides a metal component bonding method comprising: providing a metal component phase having a different melting point

Mia is arranged, and a circumferential surface of the disc-shaped joint jig along the circumference (four) is placed on the overlap of the metal elements, so that the circumferential surface of the joint jig is a metal element in which the melting point of the metal element is relatively thin. The surface and the upper surface of the upper surface of the element are moved along the surface of the element having a higher melting point, and the metal elements are joined to each other. In the above metal element bonding method, the gap of the metal element overlapping portion is eliminated by the bonding stress of the bonding tool, and the vibration is generated by the contact of the metal element, and the metal element is present. The oxide film splitting and destroying on the kneading surface, together with the frictional heat generated, causes the superposed portion to become high-temperature and plastically deformed, and increases the contact area and diffusion rate between the metal elements, thereby joining the overlapping portions. The above method is called rubbing engagement. ' 14

2036-5808B-PF 1270429 In particular, when a plurality of metal elements are arranged one above another in accordance with the order of their heights, and the joining jig is joined to the side of the metal having the highest melting point, the bonding is performed in each gold > When the temperature of the coincident portion is added to the necessary degree of joining, the metal component on the side adjacent to the joint fixture can still maintain high deformation strength, and the M stress of the joint fixture can be efficiently conveyed to the weight.

The face is joined to form a seamless joint with a high joint between the metal members. X _ The invention further provides a metal component joining method, comprising: providing - a copper component and an aluminum component are arranged in a mutually coincident arrangement; and placing a circumferential surface of a circumferentially rotating disk-shaped joint fixture on the copper component and The overlapping portion of the aluminum member is pressed against the surface of the copper member by the circumferential surface of the bonding jig, and the circumferential surface is moved along the surface of the copper metal member to bond the copper member and the aluminum member to each other. To form a CuA12 layer between the copper component and the aluminum component, and after the frictional vibration bonding, the bonding surface of the two components must reach _ to the eutectic temperature (548 °C) or more. However, if the bonding jig is pressed into the side of the aluminum element having a melting point lower than that of the copper component and is frictional vibration bonding, since the overlapping faces of the two components reach a eutectic temperature or higher, the deformation resistance of the aluminum component becomes small. The compressive stress from the joining jig cannot be sufficiently transmitted to the overlapping surface, and the problem of poor joining is likely to occur. However, if the bonding fixture is pressed into the side of the copper component having a higher melting point than the aluminum component and is subjected to frictional vibration bonding, since the overlapping surface of the two components reaches a eutectic temperature or higher, the deformation resistance of the steel component is large, and the compressive stress is large. It can be fully conveyed to the coincident surface and can be reliably joined. In the above-described metal element bonding method of 2036-5808B-PF 15 1270429, the rotation speed of the joining jig at the time of joining is preferably determined by the following formula (1): 250 ^ 2000 . .. ... When the circumferential speed of the joint fixture rotation is less than 250ro/min., the heat generated by the frictional contact between the interface and the copper 7G piece is too small, and the overlap of the copper and the component is low. On the other hand, the problem of joint failure occurs. When the circumferential speed of the joint jig is greater than 2J) 00 m/min· when joining, the thermal contact generated by the frictional contact between the joint fixture and the copper component is greater than the necessary heat. & In addition to increasing the energy loss when driving the jig, the temperature of the copper element in contact with the jig is locally too large to plastically deform the part, thus resulting from the jig from the jig. The house stress cannot be fully conveyed to the coincident surface... there is a possibility of a gap between the two elements. The heat generated by the frictional contact between the bonding jig and the copper member is a value of #, and can be performed well when the circumferential speed of the joining jig is 25 Gm/min. to 2 mm/min. Engage. Further, in the above-described metal element bonding method, the amount of pressing of the bonding jig on the surface of the copper element during bonding is preferably determined by the following formula (B): 0. 03xt^ α ^ 3xt... (b) where t is the thickness (^) of the copper element in the overlapping portion. The bonding jig is pressed on the surface of the copper member less than 〇. 〇3 At 7 o'clock, the overlapping surface of the copper component and the aluminum component may leave a gap and cause poor bonding; on the other hand, the amount of pressing is greater than 〇·3t_;" although the overlapping surface of the copper component does not leave a gap, but in the copper component The surface will be damaged due to the excessive amount of 2036-5808B-PF 16 J27〇429 and the residual m is retained. Therefore, the contact of the jig on the surface of the copper component is pressed. The stress is suitable for ~* 纟U3 Bu 0.3t, the value of the jointed human face is not 4 (four) field, but can also reduce the concave surface of the copper component under the condition of the copper component and the trace. ^ ^ r When the splicing jig is moved along the surface of the member, the traveling material (—η.) is obtained by the following formula (6) 〇 1 ^ R/(5. Oxl 〇 7xt2)... ...(c) where R is connected The circumferential rate (m/_) of the joining fixture is the thickness (m) of the copper member in the overlapping portion. Because the circumferential rate of the joining fixture increases as the joint is joined, the bonding is combined with copper. The heat generated by the frictional contact of the component also increases, and when the traveling speed V of the bonding jig increases, the temperature of the overlapping portion can be maintained above a certain value. However, because when the thickness of the copper component increases, It is more time-consuming to bring the overlapping surface to a constant temperature or higher. If the traveling speed V of the joining jig is too large, the joining jig has passed before the joining surface reaches a certain temperature or higher, and the joint failure occurs. Performing a good frictional vibration engagement, the adjustment of the traveling speed v of the joining jig, the circumferential rate R, and the thickness t of the copper π piece is necessary; and the inventors' experimental results 'confirmed that Vs R/( 5· 〇xl 〇7xt2), it is possible to have a good joint. Also, the 'catch of the jig of the jig is too small, and it will be a bad idea.' The inventors confirmed the satisfaction of the experiment. 2036 -5808B-PF 17 1270429 ^V" can have good bonding efficiency. The present invention further provides a heat dissipating component comprising: a heat sink having a substrate and standing on the substrate a heat dissipating fin on a surface; and a copper heat conducting plate on the other surface of the substrate, which is overlapped with the substrate and bonded to the substrate, wherein the method of bonding the steel heat conducting plate to the substrate is as described above In the above-described heat dissipating member, the circumferential surface of a disk-shaped joining jig that rotates circumferentially is pressed into the side of the copper heat-conducting plate, and frictional vibration bonding is performed to become the substrate and the above-mentioned heat conduction. The heat dissipating component of the board has no gap and has a south joint strength. Further, in the above heat dissipating member, the heat sink material is preferably formed by extrusion using aluminum. Among the above heat dissipating members, since the heat sink material is preferably formed by using an aluminum extrusion type, the heat sink material has high processing precision. The invention further provides a method for manufacturing a heat dissipating component, comprising: providing an aluminum heat sink material, having a substrate, a heat dissipating fin standing on a surface of the substrate, and a copper heat conducting plate; Cooperating with the other surface of the substrate; and bonding the substrate and the copper heat conductive plate using the metal element bonding method described above. In the above method for manufacturing a heat dissipating member, the circumferential surface of a disk-shaped joining jig that rotates circumferentially is pressed into the side of the copper heat-conducting plate whose melting point is higher than that of the aluminum element, and frictional vibration bonding p and bonding are performed. The copper component with contact is not easily melted and maintains high deformation strength at high temperatures. Since 2036-5808B-PF 18 1270429, the joining condition (rotation tree of the jig, the traveling speed, etc.) is large, and the joining efficiency is good. Further, it is allowed to locally increase the temperature of the overlapping surface, and the heat dissipating member is not excessively loaded as in the case of explosive pressure bonding, so that deformation of the heat radiating fin can be prevented, and a heat dissipating member having good heat dissipating efficiency can be provided. Further, the second group of the present invention provides a component bonding method for erecting and bonding a plurality of sheets having a certain interval therebetween to a surface of a substrate, comprising: a component arrangement step, arranged in Between each of the plurality of sheets having a predetermined interval therebetween, a spacer is disposed, and the sheet is erected on a surface of one of the substrates; and a frictional vibration bonding step is performed to rotate a circle along the circumference The circumferential surface of the plate-shaped bonding fixture is pressed into the other surface of the substrate and moved along the other surface of the substrate to bond the plate to the substrate; and the spacer is removed to remove the spacer . The above-described component bonding method, first in the component configuration step,

The plate, the substrate, and the spacer are set to a predetermined position. The above elements are not particularly limited, and each of the sheets, the spacers, and the sheets and the spacers may be of the same material or may be of a plurality of different materials. The shape of the spacer is not particularly limited, and it is preferred that the spacers are connected to each other. At this time, between the plates, w ^ U knife ~ placed a spacer, can accurately maintain the spacing of the plates, and simply recognize ~ *

In the daytime, the position is determined early; plus J can be hunted by the interval, the material is reinforced, and the thickness of the plate can be made very thin. In addition, it is only necessary to change the thickness of the spacer, and the plate can be arbitrarily changed.

2〇36-58〇8B-PF 1270429 is spaced apart; moreover, it is also possible to change the height of the sheet together, so that a plurality of sheets of thin sheet thickness and high sheet height are erected at short intervals and joined to the substrate. The surface becomes feasible. In this step, each of the sheets is erected and disposed on a surface of the substrate, although each spacer may not be in direct contact with the surface of the sheet; and if the compressive stress from the joint jig in the next step is considered The sheet is subjected to bending stress, and in order to improve the reinforcing effect of the spacer on the sheet, it is preferred that each spacer directly contacts the surface of the substrate. Further, in the subsequent frictional vibration bonding step, the bonding jig is pressed to the other surface of the substrate so that the respective plates and the substrate are joined by frictional vibration. In this way, it is not necessary to heat and maintain in a vacuum crucible for a predetermined period of time, which can reduce the joint cost. In order to improve the bonding strength between the substrate and the board, it is preferred that the movement of the bonding jig on the other surface of the substrate can be integrated throughout the base end faces of the respective plates, so that the plates can be completely joined to the substrate; When the reduction is more important, it is also possible to move the jig and only cover a part of the base end face of each plate. Further, when the substrate and the respective plates are friction-vibrated, the spacers may be bonded to the substrate; and if the next step of removing the spacers is considered, it is preferable that the bonding jigs are not in accordance with the substrate and the spacers. The trajectory of the object is moved. Further, in the above element bonding method, the constituent material of the spacer is a material having a higher melting point than the plate material and the substrate. In the above-described component bonding method, when the repair point of the bone spacer ♦ is higher than the melting point of the sheet material and the substrate, the number of rotations of the joint jig and the traveling speed are set within a range of 2036-5808B-PF 20 1270429, The spacer is bonded to the substrate and the plate, and the bonding of the plate to the plate is also relatively simple. At this time, at the stage of completion of the frictional vibration bonding, since the spacer is not bonded to the substrate and the sheet, the spacer can be removed without trouble in the final spacer detachment step. For example, when the plate and the spacer are facing downward and the substrate is moved upward and upward, only the spacer is left and only the plate and the substrate are moved upward integrally, and the spacer can be simply removed, and the plurality of plates can be erected. And bonded to a state of a surface of the substrate. Further, in the above-described element bonding method, the constituent material of the substrate is preferably a material which is located on the plate material. In the above-described component bonding method, since the substrate can maintain high deformation resistance strength when the temperature at the interface between the plate material and the substrate is raised to the temperature necessary for bonding, the compressive stress of the bonding jig can be efficiently transmitted to the interface, and Forming a high-strength joint without gaps between the sheet and the substrate.

The invention further provides a method for manufacturing a heat dissipating component, which is suitable for bonding and bonding a plurality of metal t fins having a predetermined interval therebetween to a surface of a metal substrate, comprising: - component arrangement steps, arranged Between the plurality of fins having a spacing therebetween, a spacer is placed and the Korean piece is erected on a surface of a substrate; a frictional vibration bonding step 'will be along the circumference a circumferential surface of the rotating disc-shaped joining jig pressing the other surface of the substrate and moving along the other surface of the substrate to engage the fin to the substrate; and a spacer separating step In the method of manufacturing the spacer to remove the heat dissipating component described above, the board, the substrate, and the spacer are first set to a predetermined position in the component disposing step 2036-5808B-PF 21 1270429. The material of the above components is not particularly limited. At this time, a spacer is placed between each of the plates, so that the plates can be properly spaced from each other and the position thereof can be easily determined. In addition, the thickness of the plate can be changed by reinforcing the plate by the spacer. very thin. Further, it is only necessary to change the thickness of the spacer, and it is possible to change the arrangement interval of the sheet material. Further, the height of the sheet material can be changed together, so that the heat dissipating member having a high height/space ratio can be easily manufactured in particular. feasible. In this step, in the state in which the respective sheets are erected and disposed on the surface of the substrate, although the spacers may not directly contact the surface of the sheet; and if the compressive stress from the joining jig in the next step is taken into consideration The sheet material is subjected to bending stress, and in order to improve the reinforcing effect of the spacer on the sheet material, it is preferred that each spacer directly contacts the surface of the substrate. Further, in the subsequent frictional vibration bonding step, the bonding jig is pressed to the other surface of the substrate so that the respective plate members and the substrate are joined by frictional vibration. In this way, it is not necessary to heat and maintain in a vacuum furnace for a predetermined period of time, as in the case of welding, and the joint cost can be reduced. In order to improve the bonding strength between the substrate and the board, it is preferred that the movement of the bonding jig on the other surface of the substrate can be integrated throughout the base end faces of the respective plates, so that the plates can be completely joined to the substrate; When the reduction is more important, it can also be used to move the fixture, but only a part of the base end of each sheet. Further, when the substrate and the respective plates are friction-vibrated, the spacers may be bonded to the substrate; and in consideration of the next step of removing the spacers, it is preferable to make the bonding fixtures not to be spaced apart from each other. The object is engaged by 2036-5808B-PF 22 1270429. The invention further provides a method for manufacturing a heat dissipating component, which is suitable for erecting and bonding a plurality of metal tabs having a certain interval therebetween to one surface of a metal substrate, comprising: a fin arrangement step, Between the plurality of Korean sheets arranged at a certain interval from each other, a spacer is placed in each of them, wherein the base end faces of the spacers are respectively below the base end surface of the continuous sheet, and the spacers are a base end surface respectively lower than a height difference of the base end surface of the piece is not more than a thickness of the spacer; a substrate climbing step, the base end of the base end surface of the spacer protruding from the spacer Bending 'the fins are erected on a surface of one of the substrates; a frictional vibration bonding step of pressing the circumferential surface of the circumferentially rotating disc-shaped bonding jig into the other surface of the substrate and along The other surface of the substrate moves 'to make the base end portion of the fin bonded to the substrate; and a spacer removing step to remove the spacer. The above-described method of manufacturing the heat dissipating component is roughly the same as the method of fabricating the heat dissipating component of the former, and the difference between the steps of disposing the fins (and the spacers) and the step of disposing the substrate. First, in the fin arrangement step, the base end faces of the spacers are respectively submerged under the base end faces of the respective fins (the surface of the substrate side) (the base end faces of the fins protrude from the base end faces of the spacers); In the substrate arrangement step, the substrate is pressed against the fin, and the base end portion of the fin (the portion where the spacer spacer protrudes) is folded. However, since the length at which the base end portion of the fin protrudes is within the thickness of the spacer, the base end portions of the fins are bent and do not overlap each other. When the thickness of the sheet is relatively thin, the base end portion of the fin is in contact with the substrate 2036-5808B-PF 23 1270429, thereby expanding the contact area between the fin and the substrate so that the two can be surely joined. The constituent material of the spacer is also a material having a higher melting point than the fin and the substrate. Since the melting point of the spacer is high, in the method of manufacturing the heat dissipating element described above, the number of rotations of the bonding jig and the traveling speed are set to a predetermined value (4) at the melting points of the fin and the substrate, and the spacer is not bonded to the Han. On the sheet and the substrate, the bonding of the substrate and the fins also becomes simpler. At this time, at the stage of completing the frictional vibration joint, because of the spacer

Without being bonded to the fins and the substrate, the spacers can be removed without difficulty when the spacers are removed from the final door. For example, when % vs. μ month and the spacer are facing downward and the substrate is moved upwards and upwards, only the τ spacer is left and only the fin and the substrate are moved up to the body', and the spacer can be simply removed. The manufacture of heat dissipating components. Further, in the above method for manufacturing a heat dissipating member, the constituent material φ of the substrate is preferably a material having a higher melting point than the fin. ▲. In the above method for manufacturing a heat dissipating member, since the temperature at the interface between the fin and the substrate is raised to a temperature necessary for bonding, the substrate can maintain high deformation strength, and the compressive stress of the bonding jig can be efficiently transmitted. To the interface, and can form a high-strength joint without gaps between the tab and the substrate. The aluminum alloy is preferred, and the constituent material of the substrate is preferably copper. According to the above-described method for manufacturing a heat dissipating member, it is possible to manufacture a heat dissipating member having heat dissipation performance by utilizing the high thermal conductivity of copper. 2036-5808B-PF 24 1270429 This volume also provides a method for manufacturing a heat dissipating member, which is suitable for arranging and joining a plurality of metal slab members having a certain interval therebetween, and erecting and joining the metal substrate. a surface comprising: a component arrangement step of providing a plurality of fin constituent materials arranged at a certain interval from each other, wherein each fin constituent material comprises a pair of fins arranged side by side, and a pair of fins 2 at the ends thereof The portion connected to each other is a base end portion, and the fin constituent material having a concave shape in a cross section is formed, and a spacer is placed between the splicing constituent materials and the cymbal sheet ( Spacer) 'and the base end portion of the above-mentioned fin constituent material is in contact with one surface of a substrate, so that the above-mentioned Korean sheet constituent material is recognized on one surface of the substrate; a frictional vibration bonding step, a circle rotating in the circumference a circumferential surface of the plate-shaped bonding fixture is pressed into the other surface of the substrate and moved along the other surface of the substrate to bond the base end portion of the tab member to the substrate; and a spacer disengagement step ,will The above spacers are removed. The above-described method of manufacturing the heat dissipating member is roughly the same as the method of manufacturing the heat dissipating member of the former, and the fin structure is replaced with a fin-shaped fin. Of course, spacers of the same type or different types may be placed between the fin constituent members and the left and right fins of the fin constituent material. In this way, when the thickness of the right and left fins of the fin constituent material is very thin, the base end portion of the fin constituent material is in contact with the substrate, and the fin can be surely coupled to the fin. Substrate. The rain fin constituent material can be simply fabricated as follows: a spacer is placed in the center of a thin metal plate. In the case of p ', the thin metal plate is folded, and the spacer is sandwiched between the spacers to form a fin-shaped fin structure. 2036-5808B-PF 25 1270429 / Further, in the method of manufacturing a heat sink element, the constituent material of the spacer is a material having a higher melting point than the fin constituent material and the substrate. In the above method for manufacturing a heat dissipating member, since the melting point of the spacer is higher than the fin structure and the melting point of the substrate, and the number of rotations of the bonding material and the traveling speed are set within a predetermined range, the spacer is not bonded to the spacer. On the wrong component/material, the bonding between the substrate and the fin constituent material is also relatively simple. At this time, at the stage of completion of the frictional vibration bonding, since the spacers are bonded to the fin constituent material and the substrate, the spacer can be removed without trouble in the final spacer detachment step. For example, when the fin constituent material and the spacer are facing downward and the substrate is moved upward and upward, only the spacer is left and only the fin constituent material and the substrate-body are moved upward, and the spacer can be simply removed. The fabrication of the heat dissipating component is completed. Further, in the above method for manufacturing a heat dissipating member, the constituent material of the substrate is preferably a material having a higher melting point than the fin constituent material. In the method for manufacturing a heat dissipating element described above, when the temperature at the interface between the tab constituent material and the substrate is raised to the temperature necessary for bonding, the substrate can maintain high deformation strength, and the compressive stress of the bonding jig can be efficiently transmitted. To the parent interface 'and can form a high-strength joint without a gap between the fin constituent material and the substrate. Further, in the above-described method for producing a heat dissipating member, the fin material is preferably a niobium alloy, and the material of the substrate is preferably copper. According to the above-described method for manufacturing a heat dissipating member, it is possible to produce a heat-dissipating heat-resistant rabbit piece by utilizing the high thermal conductivity of copper. The present invention further provides a heat dissipating member made of 2036-5808B-PF 26 1270429 manufactured by the above heat dissipating member manufacturing method. The heat radiating element described above is manufactured by the above-described heat radiating element manufacturing method, and has high heat dissipation performance and can be manufactured at low cost.

The present invention further provides a jig for manufacturing a heat dissipating component, comprising: a fin fixing portion 'under a fin or a fin forming material and a spacer having a weight S. And the substrate constituent material and the spacer; and the substrate fixing portion, the surface of one of the substrates is brought into contact with the base end portion of the fin or the sheet constituent material to assist the substrate. The above-described jig for manufacturing a heat dissipating member is particularly suitable for the method which has been described so far, and it is possible to securely fix the fin or fin constituent material, the spacer, and the substrate at the time of frictional vibration bonding. Moreover, the third group of the present invention provides a heat sink comprising a heat dissipating component and a fan, and has the following features: the heat dissipating component has a copper substrate and a plurality of copper fins or aluminum fins, i /, γ The steel substrate is thermally connected to a heat generating body, and the steel fins are at a certain interval from each other and are erected on the surface of the substrate; and a slab-like shape that rotates circumferentially The circumferential surface of the bonding fixture is pressed into the other surface of the steel substrate, and moves along the other surface of the copper substrate and the surface of the copper substrate, and is connected to the copper substrate by friction vibration 5 The above-mentioned copper Korean film or Shaoguan film. The above-mentioned heat sink has the functions of heat dissipation element one, and two functions of the fan. The above-mentioned political heating element is erected on the surface of the substrate, and is bonded to a plurality of fins having a certain interval therebetween. The substrate is formed by copper having excellent thermal conductivity, and the heat-dissipating film is formed. It consists of yttrium or aluminum with a thermal conductivity slightly smaller than copper. The above substrate lining is joined by frictional vibration bonding 2036-5808B-PF 27 1270429. Here, the friction-vibration bonding method is a type in the interface method between the metal and the member, and the gap of the joint portion between the metal members is eliminated by the compressive stress of the bonding jig, and is rotated by the connection. The vibration generated by the contact between the I fixture and the metal component causes the oxide film existing on the overlapping surface of the metal component to split and break, and the frictional heat generated causes the joint portion to be heated and plastically deformed, and the joint portion is increased. The contact area and diffusion rate, and the method of joining the metal elements together.

The heat dissipating component of the heat sink is such that the gap between the substrate and the fin butt is eliminated by the compressive stress of the bonding jig, and the vibration generated by the contact of the rotating jig and the substrate is caused by the vibration. The oxide film existing in the butting portion is split and broken, and the friction heat generated by the ± is heated to cause the butt portion to be heated and plastically deformed, thereby increasing the contact area and the diffusion rate of the butting portion, and the substrate and the fin. The pieces are joined together. Thus, the substrate and the fin are joined by frictional vibration bonding, and a heat dissipating member having a high bonding strength between the substrate and the fin can be manufactured at a low cost in comparison with a conventional solder joint. In particular, when the fin is copper, although it can be directly bonded to the substrate; and a metal such as aluminum or aluminum alloy having a lower melting point than copper is interposed between the substrate and the copper fin, it can be completed at a lower bonding temperature. Friction and vibration bonding is economical for equipment and electricity. X, when the fins are composed of a melting point lower than that of copper, the erect fins are erected and disposed on one surface of the copper substrate, and the other surface of the copper substrate is bonded using the bonding jig for bonding. When the temperature of the abutting portion of the copper substrate and the slab is increased, the temperature of the joint (the eutectic temperature: 548t) is reached, and when the CuA12 layer is formed at the butt portion, the steel substrate 2036-5808B-PF 28 1270429 has high deformation strength. Since the compressive stress of the joining jig can be effectively transmitted to the abutting portion ', it is possible to form a heat dissipating member in which the abutting portion has no gap and the two are joined with higher strength. The invention further provides a heat sink comprising a heat dissipating component and a fan, and having the following features: The heat dissipating component has a copper substrate, an aluminum substrate, and a plurality of aluminum fins, wherein the copper substrate is thermally connected The aluminum substrate is superimposed on one surface of the copper substrate, and the indicia sheets are disposed at a predetermined interval between the aluminum substrate and the copper substrate; The aluminum substrate and the aluminum fin are integrally formed by extrusion; and a circumferential surface of a circumferentially rotating disc-shaped bonding fixture is pressed into the other surface of the copper substrate, and The other surface of the copper substrate is moved, and the copper substrate and the aluminum substrate are joined by frictional vibration bonding. The above heat sink is also a high-performance heat sink with a heat dissipating component and a fan as the heat sink of the previous item; the only difference is that the heat dissipating component is not erected and the θ piece is directly erected and bonded to the copper substrate. The aluminum element is formed on the substrate by a one-piece fin that has been integrally formed by extrusion, and the substrate of the aluminum element is bonded and bonded to the copper substrate. The heat dissipating component of the heat sink is bonded. The compressive stress causes the gap between the copper substrate and the aluminum substrate to disappear, and the vibration generated by the contact of the rotating bonding jig with the substrate causes the oxide film existing in the overlapping portion to be split and destroyed, and then added. The frictional heat generated on the upper surface causes the superposed portion to be heated and plastically deformed, and the contact area and the taste of the overlapping portion are increased, and the copper substrate is bonded together by the catching rate. Thus, the copper substrate and the aluminum substrate are joined by frictional vibration. 2036-5808B-PF 29 1270429 bonding, which can produce a high bonding strength between a copper substrate and an aluminum substrate at a low cost compared with conventional soldering and explosion bonding. Of course, when the aluminum substrate is placed on one surface of the copper substrate and the other surface of the copper substrate is bonded using the bonding jig, the temperature of the overlapping portion is raised to the temperature necessary for bonding (eutectic). Temperature · · 548 ° C) When the CuA1 2 layer is formed in the overlapping portion, the copper substrate retains high deformation strength, because the compressive stress of the bonding fixture can be effectively transmitted to the overlapping portion, and the overlapping portion can be formed without gaps. Further, in the heat sink described above, the heat generating body and the copper substrate are preferably connected by a heat pipe. In the heat sink described above, the heat generating body and the steel substrate are The heat-dissipating pipe connection can dispose the heat-dissipating component and the fan at a position far from the heat-generating body, and the thin-type notebook computer can use the above-mentioned structure when it is difficult to make a structure in which heat is discharged to the vicinity of the heat-generating part. Further, the fourth group of the present invention provides a metal component bonding method, comprising: providing a plurality of metal components, which coincide with each other according to the order of the melting points And the surface side of the metal element having the highest melting point in the metal element, and heating and adding the overlapping portion of the metal element to bond the metal elements to each other. The metal element shirts are arranged to overlap each other. By adding and holding one of the outermost metal members of the overlapping portion, the gap of the overlapping portion is eliminated, and the oxide film existing in the overlapping portion is broken and broken, and the overlapping portion is heated by heating. 2036-5808B-PF 30 1270429 plastic deformation occurs, and the contact metal elements of the overlapping portion are joined together. The area and the diffusion rate are such that each of the plurality of metal elements is arranged in the order of the melting point. The side of the metal element with the highest melting point is heated and pressurized, and the temperature of the overlapping portion of each metal element is raised to the extent necessary for bonding: : The metal element heated and added still retains high deformation strength, The compressive stress can be effectively transmitted to the interface, and a gapless and high-strength joint between the elements of the Jinlu 4 can be formed. For example, when the copper element and the element are overlapped, the overlapping portion is pressurized and heated on the side of the copper element. The above method of pressurizing and heating is not particularly limited, and any jig can be used in contact with the surface of the metal element having the highest melting point, and any frictional heat and compressive stress can be transmitted to the surface by using the above jig. The contact mode of the coincidence portion can also be used in a non-contact manner such as electromagnetic induction. The invention further provides a metal component bonding method, which is suitable for erecting and bonding a plurality of metal plate materials having a certain interval therebetween to one surface of a metal substrate having a melting point higher than a melting point of the plates. a 7L arrangement step, wherein spacers are disposed between the metal sheets arranged at a certain interval from each other, and the sheets are erected on one surface of the substrate; a bonding step of heating and pressurizing the interface between the substrate and the plate by the other surface of the substrate to bond the plate to the substrate; and a spacer removing the spacer . In the above-mentioned metal element joining method, the method is to first set the sheet, the substrate, and the spacer to a predetermined position. The above-mentioned plate 2036-5808B-PF 31 1270429 is made of metal and the substrate is made higher than the melting point of the plate. The spacing of the material is subject to special restrictions. The shape of the spacer is also not particularly limited, and it is preferred that the spacers are connected to each other. At this time, a spacer is placed between each of the plates, so that the plates can be correctly spaced (4) and the position of the plates can be easily determined; and the plate can be reinforced by the spacers, and the thickness of the plate can be changed. very thin. In addition, it is only necessary to change the thickness of the spacer, and the spacing between the plates can be arbitrarily changed. Alternatively, the height of the plate can be changed together, so that the plurality of plates having a thin plate thickness and a south plate height are particularly short-circuited. It is feasible to erect and bond to the surface of the substrate. In this step, in the state in which the sheets are erected and disposed on one surface of the substrate, although the spacers may not directly contact the surface of the sheet; and if the pressure from the joining jig in the next step is taken into consideration The stress causes the sheet to be subjected to bending stress. In order to improve the reinforcing effect of the spacer on the sheet, it is preferred that each spacer directly contacts the surface of the substrate. • In the subsequent bonding step, the interface between the substrate and each of the sheets is heated and pressurized by the other surface of the substrate, and the substrate is bonded to each of the sheets. The joining principle here is the same as the joining method of the metal element of the previous item. In order to achieve the bonding strength between the substrate and the sheet, it is preferred that the base end of each sheet can be completely bonded to the substrate; and when the reduction of the joint cost is important, only a part of the base end of each sheet and the substrate can be used. Engage. Further, when the substrate is bonded to each of the sheets, the spacers may be attached to the substrate, and if the lower portion of the spacer is removed, it is preferably < Engaged with each spacer. 2036-5808B-PF 32 1270429 The present invention further provides a method for manufacturing a heat dissipating component, which is suitable for forming a plurality of metal fin constituent materials having a certain interval from each other, and is erected and joined to a melting point higher than the fins. a surface of a metal substrate having a melting point of the material, comprising: a component disposing step in which the fin constituent materials are arranged at a certain interval from each other, each fin constituent material comprising a pair of fins arranged side by side a fin, the pair of fins having their ends connected to each other as a base end portion, and forming the fin constituent material having a concave shape in a cross section, and between the fin constituent materials and the pair of fins Between each spacer, a base end portion of the fin constituent material is brought into contact with a surface of the substrate, and the fin constituent material is erected on one surface of the substrate, and a bonding step Heating and pressurizing the interface between the substrate and the fin constituent material on the other surface of the substrate, and bonding the fin constituent material to the substrate; and a spacer removing step to divide the interval Removed. In the above method for manufacturing a heat dissipating member, the above-described metal element joining method is employed, and the cross-sectional concave type sheet member is used as a sheet material. Of course, spacers of the same type or different types may be placed between the respective constituent members of the binder and the left and right sheets of the constituent members of the sheet. As a result, in the case where the thickness of the left and right fins of the fin constituent material is very thin, the fin constitutes the base end of the material. P is in contact with the substrate in the case of being overlapped with the substrate, and the die can be surely bonded to the substrate. The principle of bonding the fin constituent material to the substrate has been explained. The fin constituent material can be simply fabricated as follows: a spacer is placed in front of a thin metal plate in the middle of the temple, and the thin metal plate is folded, and the spacer is sandwiched to form a section. Concave-shaped Korean structure

2036-5808B-PF 33 ^70429 成材. And the above-mentioned metal element is connected to the human face, and the above-mentioned heating and pressurization is performed, and the circumferential surface of the circular-plate-shaped joint jig of the circumferential rotation is pressed to the base moving surface' and the circumferential surface is On the other surface of the substrate, and in the circumferential rotation of the bonding jig, it is preferable to form a groove which is slightly inclined and continuous with respect to the moving direction. In the method of joining 70 pieces of metal, the above-mentioned heating and pressurization is to form a circumferentially rotating disc-shaped joint and the other surface of the plate, and move the circumferential surface along the upper:| to the base And on the circumferential surface of the above-mentioned joint jig, the other surface of the dry plate is slightly inclined in the direction of rotation, and the continuous groove/乂 is formed to be formed with respect to the pressure, in the manufacturing method of the above-mentioned member, The heating and the addition of the circumferential surface along the circumferential surface of the substrate to the second substrate are preferably formed with a slightly inclined and continuous groove with respect to the direction of rotation. The joining method of the two elements is to "circumferentially rotate the circular plate: the circumferential surface of the two into the metal element 1 having the highest melting point, the above-mentioned 0-circumferential surface moves along the surface of the metal element, and the heavy man Qiujia ...and pressurization', it is expected that a reliable joint will outperform a simple device. Here, since the circumferential surface H of the jig, the contact surface of the jig and the contact surface of the metal member = groove - the frictional heat is generated efficiently. The scales are more efficient, and the concave surfaces on the circumferential surface of the jig are joined; the pieces are joined to each other. The stomach system is slightly inclined and continuous with respect to the rotating side 2036~~5808B-Pf 34 1270429, the person and the side 'The circumference of the rotating shaft along the joint fixture is accompanied by the spiral shape of the jig. The plasticized metal will follow the joint::; The surface of the metal element after the bonding can be eliminated, so that the recessed enthalpy of the genus is suppressed to a minimum. The foregoing is also the same in the method of bonding the metal element described above and the method of manufacturing the above-mentioned galvanic element. Moreover, the above metal component is connected In the method, the width of the plane portion between the grooves is the width of the groove of $w2 (following), and preferably meets the following conditions: 仏(4), k3, and 〇._wl/w2 $5.00. In the above-described metal element bonding method, the width of the plane portion between the grooves is wl (mm), and the width of the groove is w2 (mm), and it is preferable that the core 5 is satisfied and 匕(1), Further, in the above method for manufacturing a heat dissipating member, the width of the flat portion between the grooves is w1 (mm), and the width of the groove is w2 ( Min), and preferably meets the following conditions: lSwlg5, and 〇·67$ wl/w2^ 5. 00 〇 Regarding the above-described metal member joining method, the width of the width of the flat portion between the grooves of the joining jig The ratio of wl to the width w2 of the groove is the result of repeated experiments by the inventors: when wl/w2 is too small, the surface condition of the metal component will be similar to the friction heat generated by the cutting fixture of the joining fixture. The amount is 35

2036-5808B-PF 1270429 will be larger, and the amount of depression remaining on the surface of the metal element will be large after joining; on the other hand, when Wl/w2 is too large, the car will be similar to the circumference of the flat surface. The surface of the joint fixture is used for the condition of the joint, and the amount of friction heat generated by the joint 就会 is small, and it is necessary to increase the mechanical load of the surface. Will increase; and w1$5, and l$w2S3, and 〇R7< 1 / 1 each = Wl/w2g5.00, it can not only inhibit the pressing of the bonding fixture into the surface of the metal element. The amount of friction heat generated by the fixture is the joint of the yield. In the metal element joining method described above, it is preferable that the angle at which the concave portion is inclined with respect to the rotation direction of the joining jig is 〇 ". At least one of the grooves is formed in the entire circumferential surface of the joint jig, and in the above-described method of joining the metal members, it is preferable that the angle at which the rotation direction of the joint jig is inclined is the above-mentioned joint treatment. In the entire circumferential surface of the tool, at least two of the grooves are formed. In the method of manufacturing the heat dissipating member, it is preferable that the angle of the concave portion is inclined with respect to the rotation direction of the bonding jig. Further, at least two of the grooves are formed in the entire circumferential surface of the joint jig. With regard to the above-described metal element joining method, when the angle of inclination of the groove on the circumferential surface of the joint jig is less than 〇·5, the plasticized metal in the groove of the Jqj is hard to be smashed. , along the direction of the Kuanhiko & $ /, 叼 度 接合 接合 接合 接合 接合 接合 依 接合 接合 接合 接合 依 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 凹槽 凹槽 凹槽 凹槽 凹槽 凹槽 凹槽2036-5808B-PF 36 1270429 The oblique angle is greater than 2.0. When the amount of cut powder is increased, not only will the dents remaining on the surface of the metal component become larger," the mechanical load is increased: while the inclination angle of the groove is 0.5 to 2.0, it is noticeable In view of the width of the joining jig, 'the entire circumferential surface of the joining jig' is preferably formed with at least two grooves. The foregoing describes the joining of the above metal members. The method of the above-described metal element bonding method, wherein the recessed portion has a depth of less than 0.30~1. 2mm. Further, in the above method for manufacturing a heat dissipating member, the depth of the groove is preferably from 0.30 to 1.2 mm. The metal element joining method described above is a joint jig circumference. The depth of the groove on the surface is repeated by the inventors: when the depth of the groove is less than 0.30 mm, the plasticized metal will accumulate inside the groove, so that the amount of friction heat generated by the jig is reduced. and It is impossible to make a full access. In other respects, when the depth of the groove is larger than the "Coffee", since the surface condition of the metal (4) is similar to the cutting by the jig, the amount of friction heat generated by the jig is higher. Large, the amount of recess remaining on the surface of the metal component after bonding will become larger; and the depth of the groove is 〇. 34~1. 2_ Brick M will not have the above disadvantages. ^ ^ ^ ® ^ ^ ^ ^ ^ ^ ^ ^ # # ^ ^ ^ ^ The same is true for the manufacturing method of the heat dissipating component.

2036-5808B-PF 37 1270429 Further, a fifth group of the present invention provides a metal component bonding method comprising: a first step, a -metal element, and a melting point higher than the first metal component a second metal component of the melting point is superposed; and a first step 'pressing and heating the first metal member to the first metal member to bond the first metal member and the second metal member In the metal element bonding method described above, the first and second metal elements are placed one on another, and one side of the second metal element is heated and pressurized to eliminate the gap of the overlapping portion and to cause oxidation in the overlapping portion. The film splitting and breaking is combined with the high temperature and plastic deformation of the overlapping portion by heating to increase the contact area and the diffusion rate of the overlapping portion, thereby joining the metal members together. In particular, the metal element bonding method described above is a method in which a two-metal element having a different melting point, a first metal element, and a second metal element having a melting point higher than a melting point of the first metal element are arranged in a coincident manner, and is in a melting point. The side of the higher second metal member is pressed and heated in the direction of the first metal member. In such a metal element bonding method, when the temperature of the overlapping portion of the first metal element and the second metal element is raised to a temperature necessary for bonding, the second metal element having a higher melting point retains high deformation strength, from The compressive stress of the two metal components can be effectively communicated to the interface. Therefore, the first and second metal members can be joined with high strength by the above-described slit and high-strength bonding. The above method of adding and heating is not particularly limited, and may be used at 2036-5808B-PF 38 1270429, and the surface of the second metal component which can be used in combination may be contacted with any jig, and any friction heat may be used. Non-contact methods such as electromagnetic induction can also be used to convey the stress to the heavy-touch mode.

Further, in the above-described metal element bonding method, in the second step, it is preferable that a plate surface of the disk-shaped bonding jig that rotates is pressed against the second metal element, and the plate surface is along the second surface. The surface of the metal component moves. The metal element joining method described above is to press a rotating disk-shaped joining plate surface (a plane intersecting the rotating shaft of the joining jig) against the second metal member, and the plate surface is along the second metal. The surface of the element is heated and added to the weight s. Therefore, by the metal element bonding method, it is expected that the simple bonding can be performed using a simple device. Further, in the metal element bonding method, since the plate surface of the bonding jig is in contact with the surface of the second metal member, the larger the diameter of the bonding jig, the wider the range of heating and pressurization. The invention further provides a method for manufacturing a heat dissipating component, comprising: a step of: superposing a first metal component with a second metal component having a melting point higher than a melting point of the first metal component; The second metal member pressurizes and heats the first metal member to bond the third metal member and the second metal member to each other; and a third step 'forging the first metal member, and A plurality of heat dissipation fins are vertically disposed on the second metal component. The invention further provides a method for manufacturing a heat dissipating component, comprising: a first step of 'coinciding a first metal component with a second metal component of a melting point, a source of the earth, and a melting point of the gold component; a second step of pressurizing and heating the first metal component by the second metal component of the 2036-5808B-PF 39 1270429, and the first metal component and the second metal component are coupled to each other; and - the first step The first metal component is subjected to a cutting process to form a plurality of slits on the first metal component, and a plurality of heat dissipation fins are vertically disposed on the second metal component. The first step and the second step in the method of manufacturing the heat dissipating member of the first two items are the same as the first step and the second step of the metal element joining method of the preceding item. In the above method for manufacturing a heat dissipating component, the first metal component is subjected to forging or cutting processing through the first and second metal members joined by the first step and the second step, respectively, thereby forming a heat dissipating fin . Therefore, the borrowing method of the heat-dissipating component (fourth) and the invention of (4) can not only reliably join the first and second metal components by the device of the simple #, but also use a simple addition such as forging and cutting. : The method forms heat sink fins. Further, the heat dissipating component of the present invention is a plurality of heat dissipating fins, which are formed by a section of a glyph, and a substrate which is made of a second metal and belongs to The melting point of the first metal, the upper point of the second metal, the melting point of the second metal, the bonding method of the metal element described above, and the substrate, the heat dissipating component of the present invention, and a substrate, the material thereof Is a second metal, and the above, the genus, the melting point of the first metal; the melting point of the / metal

2036-5808B-PF 40 1270429 Further, the heat dissipating component of the invention comprises: a Korean film whose material is a first metal and a second metal, and the melting point of the genus asas is higher than the first metal The melting point, wherein the heat dissipating fins are bonded to the substrate, the metal element bonding method described above is used. Further, the present invention includes a plurality of heat dissipating columns, the material of which is a first metal, and a megan substrate which is made of a second metal and has a high melting point of the second metal. In the melting point of the first metal, the metal element bonding method described above is used for bonding the heat-dissipating film to the substrate. In the above heat dissipating component, the heat sinking fin, the wave fin, and the heat dissipating column body are used as the first metal component, and the substrate is used as the second metal component respectively. Engage. On the other hand, the substrate is joined to the bonding piece or the like by heating and pressurizing. Therefore, the above-described heat dissipation 70 pieces can be surely joined to the substrate by a simple device as in the above-described invention. In addition, in the case of the heat transfer and pressurization, the Korean film or the like is bonded to the substrate by the substrate side, and even a heat-dissipating Korean film having a complicated shape and structure can be easily used. The device is manufactured. Therefore, the heat dissipating fins having a large heat dissipating area and having a complicated shape and structure can be prepared on the substrate by these heat dissipating members. The heat dissipating component of the sixth group of the present invention comprises: 1 surface is connected to the heat generating body, and the other surface is erected and joined with a plurality of fins and a ridge on the other surface of the substrate Fins 0 41

2036-5808B-PF 1270429 The substrate "connected to the heating element" is intended to achieve the function of transferring the heat of the heating element to the respective sheets. In general, the thicker the substrate, the higher the heat dissipation performance of the heat dissipating element. However, the thicker the substrate, the greater the weight of the heat dissipating component. Therefore, in the present invention, the thickness of the substrate is not an increase in the overall thickness, and the thickness of the portion of the substrate is increased only for the portion where the heat of the heating element is transmitted to each substrate, and the thickness of the portion is reduced for the portion having a small contribution; When the weight of the entire substrate is not changed, the heat of the heating element is efficiently transmitted to the fins. Specifically, the ridges connecting the fins are formed on the substrate. The heat dissipation of the heat dissipation poem can be improved without increasing the weight. Here, the ridges can be connected to each other in units of a plurality of fins. When all the fins are continuously connected in a continuous manner, the heat of the hairpin can be reliably transmitted to the fins at the end to improve the heat dissipation performance, and the formation of the ridges is relatively easy, thereby suppressing manufacturing cost. Moreover, although the ridges can be formed in a direction oblique to each of the Korean sheets, and the protrusions are formed in a direction orthogonal to the fins, the formation of the ridges is better than that of the ribs and the substrate. The joint portion of the sheet has a relatively simple structure, so that the manufacturing cost can be suppressed. In addition, the ridged Korean film and the key pieces are in a direction perpendicular to each other, and the total length of the ridges can be reduced, and the film can be improved in heat dissipation performance. I, the largest area of the area: base = body. This is the case - especially with the fan to reduce the pressure loss. τ Further, the cross-sectional shape of the ridge is preferably kept constant along the length direction. can

2036-5808B-PF 42 1270429 It is possible to easily form the ridges and the shape of the joints of the simple ridges and the respective Korean sheets, so that the manufacturing cost can be suppressed. In this case, the contour ratio of the cross-sectional area of the Λ怂ratin 7 rib is (aspect rat10) (the ratio of the width/thickness is 5 to 30 in the a sub-segment of the sag, and the thickness of the ridge/disintegration In the case of a better ratio, the ratio of 鬲π, ·~0·3 can be increased by the implementation described later, when the thickness of the ridge is relatively large, the pressure loss is increased, and the heat dissipation performance is reversed; the thickness of the ridge is relative to the time In the case where the thickness is increased as a whole, the cross-sectional area of the ridge can be set to be in contact with the heat generating body, and the thickness of the rib can be gradually reduced in the longitudinal direction of the ridge. The farther and farther away from the heating element, the smaller the sectional area of the ridges is appropriate according to the heat distribution. 'The heat dissipation element with higher heat dissipation efficiency can be formed. The substrate is preferably copper (including copper alloy), and the fin The sheet is preferably aluminum (including the alloy). Because the thermal conductivity of copper is very high, the heat of the heating element can be efficiently transmitted to the respective sheets, and (4) the heat conduction rate is relatively small, which is lightweight and processed. Easy advantage. Also, fins are more Preferably, the two fins of each pair are connected by being parallel to the base end portion of the substrate. The two pairs of fins and the base end portion connecting the two are formed to be approximately concave. When the cross-section of the font is used, it is relatively easy to reduce the labor cost of joining the substrate and the fins, and the heat dissipating component having a high height/space ratio can be easily manufactured. The base end of a fin is used. The sequel and the base end portion can be continuously connected in a bellows shape to form a corrugated slit. 2036-5808B-PF 43 1270429 Moreover, such a fin can be used in a natural air-cooling type. The heat sink can be used for a forced air-cooled heat sink (with a fan and the heat of the fins taken away by the fan). In the above heat sink, the fan can be arbitrarily determined. The angle of the fan relative to the heat dissipating component, and if the fan is configured to supply air, the source of the wind is relative to the side of the fin, and a particularly high heat dissipation month b' can be obtained, and the height and size can be adjusted without Will be subject to Further, the method for manufacturing the heat dissipating member may be arbitrarily determined, and preferably includes: providing a copper substrate having a ridge formed on a surface of the copper substrate on the surface on which the ridge is formed to cross a plurality of aluminum fins erected and disposed in the manner of the ridges; and the other surface of the copper substrate is heated and pressurized to the interface between the copper substrate and the aluminum fins to bond the aluminum fins In the above copper substrate, the fins and the ridges are not troublesome during heating and pressurization, and the fin spacing and height/space ratio can be freely set. Further, the substrate and the fins The system is made of copper and aluminum, and is heated and pressurized on the side of the copper substrate having a melting point higher than aluminum, so that the applied compressive stress can be efficiently transmitted to the interface between the substrate and the fin. The two are indeed joined. Here, the method of heating and pressurizing may be arbitrarily determined, and a non-contact type such as electromagnetic induction may be used: in the case of a rubbing method, and it is preferable to use a disc-shaped jig in a circumferential direction. To the other surface of the steel substrate, and along the other surface of the copper substrate, move. The above method is called frictional vibration bonding, and the substrate can be surely joined to the fins using a simple device 2036-5808B-PF 44 1270429. [Embodiment] The embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the description, the same elements are denoted by the same reference numerals, and the repeated description will be omitted. The first embodiment of the present invention will be described. Fig. 1B is a front cross-sectional view showing each step of the embodiment of the metal element joining method of the present invention, and Fig. 1C is a side view of Fig. 1B. This is a method of connecting the components to the 5, first as shown in the figure, the aluminum component I. It is placed in contact with the matte MS in a face-to-face manner, and is fixed by a jig that is not shown on the drawing. Next, as shown in the 1st-figure diagram, the circumferential surface of the joint body 103a of the joining jig I" which is rotated at a high speed in the circumferential direction around the rotating shaft 103b is vertically pressed into the surface of the copper member 1? L〇2a; as shown in the figure ic, by moving the bonding fixture 1〇3 along the surface l〇2a of the copper component 1〇2 at a traveling rate v(m/min), the aluminum component ι〇ι and The copper τ 件 1 〇 重 重 。 。 。 。 。 。 。 。 。 。 。 。 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合The steel is formed to rotate along the periphery of the rotating shaft 103b with respect to the direction of the traveling side ^^# Φ 1G 3 a # ^^ ^ when the surface 102a of the steel element ι 2 is pressed. As shown in Fig. 2A , the fixture body 1〇3a price book ^ a (m) is pressed into the surface of the copper member 102 in the state of 1〇2a at a high speed, and moves along the surface ma of the 2036-5808B-PF 45 port 7〇429 steel member 1G2. By the pressing of the surface of the copper element 102, the gap between the aluminum element 1〇1 and the copper element 1〇2 disappears; and by the high-speed rotation The vibration generated by the contact between the body 1〇3a and the copper element 102 splits and breaks the oxide film of the overlapping surface of the aluminum element ι〇ι and the copper element 102; and as shown in the figure “图图系系” and the fixture body 1 The predetermined area of the copper element i〇2 that is in contact with 0 3 a

The adjacent area, and the predetermined area of the aluminum component ι〇ι adjacent to the above-mentioned area, are heated by the heat generated by the frictional contact between the jig body 103a and the copper element i 〇 2 to present plasticized (fluidized) Solid state. The above result causes the copper member 102 and the aluminum member 1〇1 to flow and diffuse at the mutual interface and plastically deform from the original surface. The passing trajectory of the jig body 1〇3a of the jig 103 is formed as a pair of '#' by the compressive stress of the jig 1() 3a as shown in the % figure, and a pair is formed on the surface l〇2a of the copper element ι 2 In the shallow section 1 〇 2, the aluminum component i〇i and the copper component 102 overlap the 'plastically deformed element ι〇ι and the copper element, and the surface is spliced to form a joint surface s The joint surface S described above is interposed between the copper element 1 () 2 and the element m, and the two are indeed (four) 0. Here, considering that the joint jig 103 is pressed by the side of the aluminum element 1〇1, the aluminum The melting point of the element is lower than the melting point of the copper element, and the deformation resistance of the workpiece 1〇1 necessary for the bonding of the aluminum element 1〇1 and the copper element 1〇2 becomes smaller, and the deformation resistance of the element 1 〇1 becomes smaller. The pressure of 103 is not sufficiently transmitted to the overlapping faces of the side faces of the aluminum member and the copper member 丨〇2. On the other hand, when the joining jig 1〇3 is scrapped into the side of the steel element 102 having a melting point higher than that of the inscription element 2036-5808B-PF 46 Ϊ 270429, the joining surface of the aluminum element 101 and the copper element 1〇2 is joined. When the necessary eutectic temperature is higher than or equal to the eutectic temperature, the copper element 1〇2 can maintain a relatively large deformation strength, and the pressure from the bonding process I 1〇3 can be sufficiently transmitted to the overlapping surface of the inscription element m and the copper element 1G2. The gap between the two elements disappears, and a high-strength joint can be performed.

The metal element joining method is not limited to the case where the aluminum member and the copper member are rejoined and joined, and can be widely applied to the overlap and joint between the metal members. Further, the shape of the above-mentioned metal member can be made to press the bonding jig after being superposed on each other. Further, the number of metal elements to be overlapped is not limited to two, and three or more may be used. ^ For example, another embodiment of the metal element bonding method as shown in FIG. 3 is a three-metal element (a 5-inch aluminum element 1 〇, a 1 〇〇〇-based ing element 101, The copper elements 102) are placed one on top of the other, and the bonding tool 1103a of the jig 1〇3 is joined to the side of the copper element 2 having the most melting point among the three metal elements, and is friction-vibrating. Here, in consideration of the influence of the metal element of the metal element at the time of bonding, the resistance I of the metal element is transmitted to the bonding efficiency of each metal element, and the compressive stress from the bonding and the metallurgy is transmitted to the metal element. It is preferable that the three metal elements are arranged in the order of the melting point (the order is copper element #1〇2, the type of the aluminum element 101 of the aluminum element 1015000 series), and the bonding is performed. The jig body 103a of the jig 1〇3 is on the side of the piece (here, the copper piece 1Q2), and is friction-vibration joint. Others, when a metal component is copper, aluminum or magnesium, it is more coincident with the order of the identifiable component, the chain component, and the sinter component. ‘The friction of the bonding fixture is pressed into the side of the steel component.

2036-5808B-PF 47 1270429 Vibration engagement.

Fig. 4 is a perspective view showing an embodiment of the heat dissipating member of the present invention. The heat dissipating member 1 〇 4 shown in the drawing is composed of a heat sink plate 1 〇 6 composed of a bulk material, a material m and a copper element. The heat sink material 105 is composed of a plurality of sheets 1G5b which are erected on one surface (surface in the figure) of the substrate 105a. The heat transfer plate (10) is one heavy; the other surface (the upper surface in the figure) of the soil plate 105a is joined to the heat transfer plate 1A by the above-described frictional vibration bonding method. The heat dissipating member 104' is formed by frictionally joining the bonding jig into the side of the pass (4) (10) formed by the copper element having a higher melting point than the aluminum member, so that the overlapping portion of the substrate 105a and the heat transfer plate 1〇6 is formed. The seamless gap becomes a high-strength joint. It is better to make the frictional vibration joint of the substrate 1〇 with the overlapping surface of the heat transfer plate 1〇6. Although only a part of the frictional vibration joint can be used, the joint strength can be improved when the frictional vibration joint is comprehensive. With thermal performance. The heat dissipating element of the present invention is not limited thereto, and the heat sink material 105 including the aluminum element having the substrate 105a and the heat dissipating fins 1〇5 standing on one surface thereof, and the bonding method by the metal element described above The frictional engagement is combined with the copper component of the other surface of the substrate 1〇5a; the heat transfer plate 1〇6 is configured to be freely changeable. For example, the heat dissipating elements 1 〇 4 shown in FIGS. 5A to 5C are designed to increase the heat dissipation performance as much as possible, and the heat dissipating fins l 〇 5b are wavy extending in the longitudinal direction; FIG. 5b In the heat-dissipating fins 105b, the heat-dissipating fins 1〇5b are bent in the height direction (relative to the width direction of the heat transfer 'plate 〇6 2036-5808B-PF 48 1270429) The cross-sectional shape or the left and right unsymmetrical cross-sectional shape can be). 6A and 6B are a series of front cross-sectional views showing the steps of the method for manufacturing the heat dissipating member 104 shown in Fig. 4 of an embodiment of the method for manufacturing a heat dissipating member of the present invention, and Fig. 6c It is a sectional view of Fig. 6B. First, as shown in Fig. 6A, the heat sink fins 5, 5, which are formed by the heat sink fins i 〇 5b down the TIT 元件 element, are fixed to the joint work table 1〇7. Then, the heat transfer plates 1〇6 composed of the copper elements are placed on the upper surface of the substrate i〇5a of the heat exchanger 1〇5 in such a manner as to face each other, and the jigs shown in FIG. fixed. Next, as shown in FIG. 6B, the stable circumferential surface of the jig body 1〇3 of the joining jig 1〇3 which is centered on the rotating shaft 1〇3b and rotates at a high speed in the circumferential direction is vertically pressed into the heat transfer plate 1 The surface 1〇6a of the crucible 6; and as shown in Fig. 6c, by moving the bonding jig 103 along the surface 106a of the heat transfer plate 106, the substrate 1〇5& with the heat sink material 105 and the heat transfer plate 1〇 6 heavy combined joints. For the direction of travel when the surface of the heat transfer plate 1 () 6 is pressed into the surface 1G6a, the jig is sent to the rear direction, and t is connected along the periphery of the rotating shaft 103b, and the movement of the jig 103 is moved. Although the area can be applied to the full or the other side of the heat transfer plate m, when the entire area of the heat transfer plate 106 is moved, the joint strength and the heat dissipation performance can be made high. # 1〇4 〇^, When the dent of the jig body 103 is on the dent of the surface ma of the heat transfer plate 1G6, the heat transfer plate 1 can be shrunk to a predetermined thickness to obtain a beautiful appearance. Element 1〇4. 2036-5808B-PF 49 1270429 Moreover, when the width of the heat radiating fins l〇5b is small, as shown in Fig. 7A, the cross-sectional shape of the heat sinking fins 05b will be separated::: Supporting device 108 It is fixed to the jig table 107, and then the heat-dissipating film 105 is inserted into the heat-dissipating film support device 1〇8. When the joint is engaged, the deformation of the fins mb can be reliably prevented. . Further, as shown in Fig. 7C, it is also possible to use a joining jig 103 in which a plurality of jig bodies 103a are fixed at a predetermined interval around the periphery of the rotating shaft 1 instead of the joining process 1〇3. At this time, the frictional vibration engagement can be applied to a plurality of regions at the same time, and the time required for the engagement can be shortened, thereby further improving the efficiency. The above description of the preferred embodiments of the present invention is not intended to limit the scope of the present invention, and may be modified and modified in the spirit and scope of the present invention. Experiment 1: As shown in Figures 1A to 1C and Figures 2A to 2C, when the aluminum component and the steel component are combined on the side of the copper component for frictional vibration bonding, the experiment of ten is used to check the fixture. An appropriate range of the circumferential rate R of the engaging body. A copper member having a thickness of 0.001 m and an aluminum member having a thickness of 〇 lm were used as experimental materials. Moreover, the diameter of the body of the jig is 0. 08m ^ 〇. 005m ^ ^ 0 ^ ^ ^ ^ # The amount of pressing on the surface of the copper component is set to 0.0003m. The results are shown in Table 1. The term "material stripping" as used herein refers to the occurrence of two components on the coincident surface.

2036-5808B-PF 50 1270429

Off means that the joint is not completely joined or not. Further, the breaking of the material joint portion means that the element other than the overlapping surface of the joint portion is broken, indicating that the joining is complete. Table 1 material: 1050-0, Cu thickness: A Bu 0_ 001m, Cu-0· 001m Fixture shape: 0 0. 08m, 0. 005m thick fixture indentation α=0· 0003m _ test piece number rotation number circumference Rate (R) Travel Rate (V) Cycle Rate / Travel Rate (R/V) σΒ Joint Width Bond Strength Reference rpra in/min in/inin Ν ra(xl〇·3) N/m2(xl06) 1 -1 1000 251.32 1.0 251 1764 22.05 80.00 Material stripping 1-2 1000 251.32 3.0 84 1754 22.04 79. 58 Material stripping 1-3 2000 502. 64 2.0 251 2056 20.18 101.88 Material joint breaking 1-4 2000 502. 64 3.0 168 2356 24.13 97. 64 Material joint break 1-5 3000 753. 96 0.50 1508 2071 22.22 93.20 Material joint break 1 -6 3000 753. 96 1.0 754 2076 20. 65 100.53 Material joint break 1-7 3000 753. 96 2.0 377 2171 19.84 109.43 Material joint break 1-8 3000 753. 96 3.0 251 2246 20.75 108.24 Material joint break 1 -9 3000 753. 96 4.0 188 2310 21.00 110.00 Material joint break 1-10 6000 1507.92 3.0 503 2302 22.17 103.83 The joint of the material is broken as shown in Table 1. When the jig is rotated at a peripheral speed of 25 0 to 20 0 Om/m in , the heat generated by the frictional contact between the bonding jig and the copper member is just right, and a good bonding can be performed. Further, it can be understood that the joining jig at the time of joining is rotated at a circular peripheral speed of 500 to 200 Om/min, and a good joining can be performed. Experiment 2: The same experiment as in Experiment 1 was carried out by changing the thickness t(m) of the copper component of Experiment 1 and the fixture body of the bonding fixture in the amount of pressing of the copper component a (m). The results are shown in Table 2. 2036-5808B-PF 51 1270429

Table 2 Materials·· 1050-0, Cu A1 Thickness: 0.001m Joint fixture shape: 0〇.〇8m, 0.005m thick test piece No. Number of revolutions Peripheral rate (R) Travel rate (V) Cu thickness (1) Press-in amount (4) Joint strength evaluation reference rpm ffl/min m/min m(xl0"3) m(xl(T3) N/m2(xl06) ratio -1 700 175.924 1.00 1.0 0.30 0 X ratio -2 700 175. 924 1.00 3.0 0 30 0 X to -3 850 213.622 1.00 1.0 0. 30 0 X to -4 850 213.622 1.00 3.0 0.30 0 X 2-1 1000 251.320 0.25 5.0 0.50 65 Δ Material stripping 2-2 1000 251.320 0. 50 5.0 0. 50 65 Δ Material peeling 2-3 1000 251.320 1.00 1.0 0.30 80 △ Material peeling 2-4 1000 251.320 1.00 3.0 0.30 65 △ Material peeling 2-5 1000 251.320 3. 00 1.0 0. 30 80 △ Material peeling 2-6 1000 251.320 3 00 3.0 0.30 78 △ Material peeling 2-7 2000 502. 640 2.00 1.0 0.30 102 〇 Material joint break 2-8 2000 502. 640 3.00 1.0 0.30 98 , 〇 material joint break 2-9 3000 753. 960 5. 00 1.0 0.30 95 〇 Material joint break 2-10 3000 753. 960 1.00 1.0 0.30 100 〇 Material joint break 2-11 3000 753. 960 2.00 1.0 0.30 109 接合 material joint break 2-12 3000 753. 960 3. 00 1.0 0. 30 108 〇 material joint break 2-13 3000 753. 960 4. 00 1.0 0.30 110 〇 material joint broken Broken 2-14 3000 753. 960 3.00 1.0 0.10 90 〇 material joint break 2-15 3000 753.960 0.50 1.0 0.20 95 〇 material joint break 2-16 3000 753. 960 0. 50 3.0 0.20 91 〇 material joint Breaking 2-17 6000 1507.920 3.00 1.0 0.30 104 破 The joint of the material is broken as shown in Table 2. When the circumferential speed of the joining fixture is less than 25Om/min, the heat generated by the frictional contact between the bonding fixture and the copper component is broken. If it is too small, the temperature of the overlapping surface of the copper component and the inscription element is too low, resulting in poor bonding (-1 to ～4). On the other hand, although not shown in Table 2, when the circumferential speed of the joining jig at the time of joining is greater than 20 0 Om/min, the heat generated by the frictional contact between the joining jig and the copper member is greater than necessary, and the bonding is performed. The temperature of the copper component in contact with the fixture is locally too high, causing plastic deformation of the portion, and the compressive stress of the joint fixture is not sufficiently transmitted to the weight 2036-5808B-PF 52 1270429. The joint surface causes a gap between the two components. . Further, at this time, the driving energy loss of the joining jig is increased, and the joining efficiency is deteriorated. Therefore, it can be understood that when the joining jig is rotated at a peripheral speed of 250 to 2000 m/m in the joining, the heat generated by the frictional contact between the jig and the copper member is just appropriate, and good joining can be performed. (2-1~2-17) Experiment 3: The same experiment as in Experiment 2 was carried out to verify the relationship between the pressing amount α (Π1) of the copper member and the thickness ΐ (Π〇 of the copper member) of the fixture fixture. The results are shown in Table 3. Table 3 Materials: 1050-0, Cu A1 Thickness: 0. 001m Joint fixture shape: 0〇.〇8m, 0.005m thick test piece number rotation number circumferential rate (8) travel rate (V) Cu thickness (t) Indentation amount (4) Joint strength evaluation reference rpm ra/min m/min ra(xl0'3) m(xl0~3) N/m2(xl06) ratio -5 3000 753. 96 2.0 1.0 0.05 0 X -6 3000 753. 96 2.0 3.0 0.10 0 X -7 3000 753. 96 3.0 3.0 0.15 0 X -8 3000 753. 96 0.5 5.0 0.30 0 X 3-1 2000 502. 64 2.0 3.0 0.30 101 〇Material bonding Partial break 3-2 2000 502. 64 3.0 3.0 0.30 92 〇 material joint break 3-3 3000 753. 96 0.5 3.0 0.30 94 〇 material joint break 3-4 3000 753. 96 1.0 3.0 0.30 98 〇 material Broken joint 3-5 3000 753. 96 2.0 3.0 0.30 110 〇 Material joint break 3-6 3000 753. 96 3.0 3.0 0.30 103 〇 Material joint break 3-7 3000 753. 96 4.0 3.0 0.30 105 〇Material joint break 3-8 6000 1507.92 3.0 3.0 0.30 100 〇Material joint break 3-9 2000 502. 64 0.5 5.0 0. 50 89 〇Material joint break 3-10 2000 502. 64 0.5 5.0 0.50 188 〇 material joint broken

As shown in Table 3, when the pressing amount α of the copper element is less than 0.11, the copper element overlaps with the silver element and the v of the crucible, and the surface 1 is left with a gap to cause a poor joint ( Than -5~ than -8). On the other hand, although Table 3 2036-5808B-PF 53 1270429 is not shown, the bonding fixture Γ _ Λ 〇 ^ when the body is joined, when the pressing amount α of the copper component is greater than 0.3t, although the copper component is in the case of ^^^ There is no residual seam in the coincident surface. The excessively large bonding jig is pressed in. The m is increased by L. The lining has a significant residual on the surface of the copper piece.

The dents that cause the fingers of the component.阳lL -^ . . , mouth, the joint of the fixture when joining the fixture is in the amount of the copper component, / π υ · above, 〇 · 3t or less, the compressive stress of the 3 fixture is just right Each of the values of the lamp Zhoutian can be understood to be able to complete the bonding without any gap between the copper component and the aluminum component, and to dent the surface of the copper component. However, in this experiment, the circumferential surface of the jig body of the jig is flat: when the groove is formed on the circumferential surface of the joint body, 'because of the increase: the contact area of the original circumferential surface of the body with the copper member, and It may be possible to reduce the amount of pressing of the fixture body on the surface of the steel component. When the groove is formed on the circumferential surface of the actual interface body of the inventor, the engagement jig at the time of joining is suitable when the pressing amount α of the copper member is 〇.031: or more, 〇.3t or less. Experiment 4: Experiment 4 performed the same experiment as Experiment 2, and verified the appropriate range of the entanglement rate of the body with the onset rate v (m/min). The thickness of the steel element was set to G.GG5m, and the thickness of the fixture body of the joint jig was set to 0.01 m. The results are shown in Table 4. Table 4 Materials·· 1050-0, Cu Thickness: Al-0. 001m, Cu-0· 〇〇5mf=杓Jig fixture shape: 0 〇. 〇gm, 〇〇/S=R/(5.0xl07xt2) each

2036-5808B-PF 54 1270429 Test piece No. Number of revolutions Peripheral rate (R) Travel rate (V) β Press-in amount (α) Joint strength evaluation reference rpm m/min m/min m/min mCxlO-3) N/m2 (xl06) -9 700 175.924 0. 25 0.140 0. 50 0 X than -10 850 213.622 0.25 0.170 0.50 0 X -11 3000 753.960 0. 75 0. 603 0. 50 0 X -12 3000 753.960 1.00 0.603 0.50 0 X than -13 3000 753. 960 2. 00 0.603 0.10 0 X Ratio -14 6000 1507.920 2.00 1.206 0. 50 0 X Ratio -15 3000 753.960 3. 00 0.603 0.20 0 X 4-1 3000 753. 960 0. 25 0.603 0. 50 86 〇 Material joint break 4-2 2000 502. 640 0.25 0.402 0.50 71 〇 Material joint break 4-3 3000 753.960 0.50 0.603 0.50 83 〇 Material joint break 4-4 6000 1507.920 1.00 1.206 0. 50 80 破 Material joint breakage As can be seen from Table 4, the travel rate V of the jig body of the jig when joining is engaged, and the circumferential speed of the joint jig at the time of joining is R (m/min), coincidence When the thickness of the copper element is t (m), it is preferably in the range of VSR / (5.0 x 107 x t2). For this reason, for example, when the circumferential rate of the joining jig at the time of joining becomes large, the heat generated by the frictional contact between the joining jig and the copper member is also increased, and the joining portion is moved at a high speed, and the overlapping portion is made. When the thickness of the copper component is increased, it takes time to reach the temperature of the overlapping portion. If the traveling speed of the bonding fixture is too large, the temperature of the overlapping portion reaches a certain temperature or higher. If the jig is passed, it will cause a problem of poor joint. When a good frictional vibration engagement is performed, the traveling speed V of the joining jig, the peripheral speed R, and the thickness t of the copper member must be adjusted to each other. As a result of the inventors' experiments, it was confirmed that a good bonding was obtained when V$R/(5.0xl07xt2) was satisfied. Therefore, it can be understood that the joining speed at the time of joining is preferably a traveling rate V (m/min·) obtained by the following formula (C), as it moves along the surface of the copper metal member, 55

2036-5808B-PF 1270429 can have good friction and vibration joints. 0. R/(5. 0xl07xt2) (6) where R is the circumferential velocity (m/min.) of the joining jig when engaged; t is the overlapping portion The thickness (m) of the copper component. Experiment 5: The heat dissipating member having the shape shown in Fig. 4 was actually produced by the method shown in Figs. 6A to 6C. The heat sink material is an aluminum push type material, the thickness of the substrate is 0.005 m, the width is 〇·〇6πι, the length is 〇·2ιη; the heat dissipation _ the width of the fin is 〇., and the arrangement interval is 〇·0〇2m The height is 0.015m. The thickness of the heat transfer plate is 〇·〇〇 5m, and the width and length are the same as those of the heat sink material. In the joint jig used for frictional vibration joining, the diameter of the second/port/body is 0.08 m, and the thickness is (KOim, the joining condition is set such that the number of rotations of the main body is 3000 RPM, and the traveling speed is (K25 m/min, The amount of pressing in the heat transfer plate is 〇.〇〇〇5m. Further, after friction and vibration bonding, the surface of the heat transfer plate is machined to cut the depth of 〇·〇〇1 m. φ By the above conditions, It is possible to efficiently manufacture a heat dissipating member having excellent thermal conductivity. Next, an embodiment of the second group of the present invention will be described. First, the basic structure of the frictional vibration joining of the metal member will be described before cutting into the subject. The so-called frictional vibration joint of the metal component is caused by the compressive stress of the twisting fixture, the gap of the metal component overlapping portion is eliminated, and the vibration of the agricultural component is broken and broken by the contact of the rotating joint jig and the metal component. The oxide film on the surface of the metal element overlaps, and the superposed portion is heated by frictional heat to 2018-5808B-PF 56 1270429, which is plastically deformed, increasing the contact area and increasing the contact area of each member. A method of joining the coincident portions while expanding the rate of the economy.

In particular, a plurality of metal elements are arranged in a mutually overlapping manner according to the order of melting points. When the joining jig is pressed to the side of the metal element having the highest melting point and joined, the overlapping portion of each metal element rises to the joint. At the necessary temperature, the metal member adjacent to the side of the jig can maintain high deformation strength, and the compressive stress of the bonding jig can be efficiently transmitted to the coincident surface, thereby completing the high strength without gap between the metal members. Engagement. Here, a steel element having a high melting point and a high melting point is exemplified as an example of a metal element. 8A to _ show the order of frictional vibration engagement', wherein 8A and 8B are front cross-sectional views, and 帛% is a side view of (10). In the frictional vibration engagement, first, as shown in Fig. 8a, the inscription _201 and the copper member 2〇2 are placed in surface contact with each other, and are fixed by a jig not shown in the drawing. Next, as shown in Figs. 8B and 8C, the circumferential surface of the jig body 203 of the joining jig 2〇3 which is rotated at a high speed in the circumferential direction at the peripheral speed R in the circumferential direction is vertically pressed to the copper member 2〇. The surface of 2 is 2〇2 and the joining fixture 2G3 is moved along the surface 2G2a of the copper member 2〇2 at a traveling rate V to re-engage the aluminum member 201 and the copper member 202. The jig 203 is fixed to the tip end portion of the rotating shaft 2〇3b by the disc-shaped jig 2, 3a, and the jig main body 2〇3a is made of tool steel such as JIS: SKD61. The body 203a is sent to the rear direction with respect to the traveling direction when the surface 202a of the steel element 202 is pressed, and rotates around the moving shaft Ub. 2036-5808B-PF 57 1270429 As shown in Fig. 9A, the circumferential surface of the jig body 203a is rotated at a high speed in the circumferential direction with a certain amount of a (m) pressed into the surface 202a of the copper member 202, and along the copper Surface 202a of element 202 moves. By the pressing of the jig body 203a on the surface 202a of the copper member 202, the gap of the overlapping surface of the member 201 and the copper member 202 disappears; and the contact between the jig body 203a and the copper member 202 by the high-speed rotation is achieved. The generated vibration splits and breaks the oxide film of the overlapping surface of the aluminum member 201 and the copper member 202; and as shown in FIG. 9B, the predetermined region of the copper member 2〇2 in contact with the fixture body 203a and its adjacent region, Further, a predetermined region of the aluminum member 201 adjacent to the above region is heated by the heat generated by the frictional contact between the jig body 2〇3a and the copper member 2〇2, and exhibits a plasticized (fluidized) solid phase sorrow. . As a result of the above, the copper member 2 〇 2 and the aluminum member 2 〇 1 flow and diffuse at the mutual interface, and plastic deformation starts from the original surface.

The passage path of the jig body 203a of the jig 203, as shown in Fig. 9C, forms a pair of shallow segments 2〇2b on the surface 202a of the copper member 2〇2 by the compressive stress of the jig body 203a. Further, in the overlapping surface of the aluminum element 2〇1 and the copper element 202, the plastic element 3〇1 and the copper element 2〇2 which have been plastically deformed are engaged with each other, and are solidified into a joint surface s having a cross-sectional uneven shape, and the above-mentioned joint surface S is interposed between the copper member 202 and the aluminum member 2〇1 to positively bond the two. Here, considering that the bonding jig 2〇3 is pressed by the side of the lead member 201, the melting point of the aluminum member 201 is lower than The melting point of the copper element 2〇2, the overlapping surface of the aluminum element 2〇1 and the copper element 202 is as good as the joint eutectic temperature (4) generation, and the deformation resistance of the aluminum element 201 becomes smaller. Then, 2036-5808B-PF 58 1270429 self-bonding 纟 203 # pressure cannot be sufficiently transmitted to the overlapping surface of the member 2 ι and the copper member 202, and joint failure is likely to occur. On the other hand, when the bonding jig 203 is pressed into the side of the copper element 2〇2 whose melting point is higher than that of the aluminum element 2〇1, the surface of the steel element 202 is at the eutectic temperature necessary for bonding. When the copper element 202 can maintain a relatively large deformation strength, the pressure from the bonding fixture 203 can be sufficiently transmitted to the overlapping surface of the aluminum element 201 and the copper element 202, so that the gap between the two elements disappears, and the line can be eliminated. High strength joints. When the aluminum element 201 and the copper element 2〇2 are overlapped by the above-described method and frictionally vibrated, it is preferable to determine the circumferential speed at which the joining jig 2〇3 (the jig body 203a) is rotated by the following formula (A). R(m/min·): 250 ^R^ 2000............(a) When the circumferential speed of the joint jig 203 at the time of joining is less than 25 〇m/min, the joint treatment The heat generated by the frictional contact between the member 203 and the copper member 202 is too small, and the temperature at the overlapping surface of the copper member 202 and the aluminum member 201 is too low, resulting in poor bonding. On the other hand, when the circumferential speed of the joining jig 203 at the time of joining is more than 2000 m/min, the heat generated by the frictional contact between the joining jig 2〇3 and the copper member 2〇2 is greater than necessary, not only The driving energy loss of the joining jig 203 is increased, and the temperature of the copper piece 202 in contact with the joining jig 2〇3 is locally too high, causing the part to be plastically deformed, and the joining jig 2 0 3 The inability to adequately transfer the compressive stress to the coincident surface results in a gap between the two elements. Therefore, it can be understood that when the joining jig 203 is rotated at a round kitchen rate of 250 to 2000 m/min, the heat generated by the frictional contact between the jig 203 and the copper member 202 is just right, 2036-5808B-PF 59 1270429 and can do a good joint. Further, the inscription element 201 and the copper element 202 are superposed on each other to be friction-vibration-bonded: when bonding, the bonding jig 2G3 (the jig body 2Q3a) is pressed in the copper element and the surface (in) is preferably from the following formula (B) Find: 〇· a $ 〇· ..................(Β) where t is the thickness (m) of the copper component in the overlap. When the joining amount of the joining jig 203 on the surface of the copper member 202 is less than U3t, a gap remains in the overlapping surface of the copper member 2〇2 and the Shaoyuan 2()1, resulting in poor bonding. On the other hand, when the amount of press-fitting is "greater than 〇·3 ,, although no gap remains in the overlapping surface of the copper member 202 and the aluminum member 201, the amount of pressing of the excessive bonding jig 203 may be in the copper member 2〇2. A significant indentation on the surface causes a loss of the component. Therefore, when the bonding amount θ of the bonding jig 203 on the surface of the copper member 202 is 〇〇37 or more and 0^2, the compressive stress of the bonding process is 203. For just the appropriate value, it can be understood that the bonding can be completed without the gap between the copper component 202 and the overlapping portion of the component 2〇1, and the dent of the surface of the copper component 2G2 can be reduced. When the crucible 1 is overlapped with the copper member 2〇2 and frictionally vibrated, when the joint is engaged, the joining jig 2〇3 (the traveling speed v(m/min) of the jig body 2〇3〇 along the surface of the copper member 202 is higher. It is preferable to obtain the following formula ((7): 〇·l^FSR/(5· 〇xl〇7xti)..................(c) where R is the circumferential velocity of the jig when joining, and t is the coincident portion The thickness of the copper element of _ is in the center of the core, and when the circumferential rate of the joining jig 203 is increased at the time of joining, the connection is 2036-5808B-PF 60 1270. 429 The heat generated by the frictional contact between the fixture 203 and the copper member 202 is also increased, and when the traveling speed v of the bonding fixture 203 is high, the overlapping portion can maintain a constant temperature; and the copper member 2〇 When the thickness of 2 becomes large, it takes time and time for the overlapping portion to reach a predetermined temperature or higher. If the joining fixture is at this time, when the feed rate is too large, 'the joining fixture is before the temperature of the overlapping portion reaches a certain temperature or higher. When 203 has passed, it will cause a problem of poor joint. When a good frictional vibration joint is applied, the traveling rate of the joining jig 2〇3, the circumferential rate R, and the thickness of the copper member must be adjusted to each other. When it is confirmed that (5)/(5· 〇χ1 〇7χΐ2) is satisfied, it is possible to have a good connection. On the other hand, when the traveling rate v of the bonding treatment 4 2〇3 is too small, the bonding efficiency is lowered, and the experimental results are When the full ^ is confirmed, better bonding efficiency can be obtained. The frictional vibration bonding of the metal component is not limited to the case where the inscribed component and the copper component are combined and joined together' can be widely applied to the recombination between the metal components. Joint Further, the shape of the metal element may be such that the bonding jig can be pressed after being overlapped with each other. Further, the number of overlapping metal elements is not limited to two, and three or more may be used. For example, in the first In the figure, three metal components (5 铭 铭 铭 、 、 、 、 2 2 2 2 、 、 、 、 、 2 2 2 2 2 2 2 2 2 2 2 2 2 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合Among the metal elements, the side of the copper element 202 having the highest melting point is the frictional vibration joint. Considering the influence of the metal element to a predetermined temperature or more at the time of bonding, and the communication efficiency of the joint surface of each metal element is compared, Fortunately, the order of the three 2036-5808B-PF 61 1270429 is the copper component 202,

Vibration joint. The basic structure of the frictional vibration joint of the metal component has been described in the order of the melting point of the metal component in the order of the melting point of the metal component (here, the 1 000-series element 201', the 50 00 system and the bonding jig 203 are pressed to three or more y. FIG. 11A to FIG. 11B and FIGS. 12A to 12B are diagrams for explaining the first embodiment of the method for manufacturing the heat dissipation member of the present invention. The n-picture diagram shows a front cross-sectional view of the component arrangement step, the 12th aspect shows a front cross-sectional view of the friction-vibration bonding step, and the second 2β-pattern shows a front cross-sectional view of the spacer disengagement step. Further, FIG. 13 is an exploded view. In the oblique view, one embodiment of the jig for manufacturing a heat dissipating member of the present invention is shown. In the present embodiment, first, as shown in FIG. 11A, the baffle 204 of the plate member made of aluminum is made of iron. The spacers 205 of the plate-like elements are alternately arranged in parallel with each other and disposed in the element setting unit 212 of the jig 21 for heat dissipation element manufacturing. The jig 210 for heat dissipating element manufacturing is opened as shown in FIG. Box fixture The body 211 is formed by a platen 213 that can be slidably placed in the element setting unit 212, and a closed-loop detection substrate surface order closing bolt 216. The element setting unit 212 is formed in the jig 2036-5808B-PF 62 1270429 body. The concave portion inside the 211, the tightening bolt 214 is inserted into the wall of the jig body 211 in a direction orthogonal to the pressing plate 213, and the front end portion thereof is fixed to the back surface of the pressing plate 213, and the head portion is located at the jig body 211. The outer side of the wall body; the substrate fixing plate 215 is mounted on the upper part of the wall body of the jig body 211 in a direction parallel to the pressure plate 213; the closing bolt 216 is used to fix the two sides of the substrate fixing plate 215 The end is fixed to the upper portion of the wall of the jig body 211. Here, each of the fins 204 and the spacers 205 are arranged side by side in the component setting portion 212 to lock the tight bolt 214. The fixing plate 213 is fixed such that the fins m and the spacers 2 are fixed in close contact with each other. At this time, since the fins 2〇4 and the spacers 205 are all equal, The upper surface (base end surface) of each fin 2〇4 and the upper surface of each spacer 205 (base end) Then, as shown in FIG. 11 , the substrate 206 of the copper plate-shaped element and the substrate above it are mounted on the upper surface of each of the fins 204 and the spacers 205 disposed on the element setting portion 212. The fixing plate 215 is fixed, and the upper portion (base end portion) of each of the fins 204 and each of the spacers 205 is fitted into the recess 215a formed on the lower surface of the substrate fixing plate 215, and the fins 2〇4 and the spacers 205 are fixed. 'It cannot be moved in the longitudinal direction (the direction perpendicular to the paper surface). Further, in this state, the screw holes 215b at both ends of the substrate fixing plate 215 are directed toward the screw holes 2 π on the wall of the jig body 211. a. The tightening bolt 216 is tightened to fix the substrate 2〇6 to the fin 204 and the upper portion of the crucible. Further, although not shown in the drawings, it is necessary to fix the substrate 2〇6 so as not to be migrating in the width direction (left-right direction of the paper surface). Here, the fin 204 and the spacer 2〇5 are completed by directly contacting the base end surface of the fin 204 and the spacer 2〇5 with the lower surface of the substrate 206 (a surface of 2036-5808B-PF 63 1270429). The step of being disposed on the substrate 206. The component configuration steps as shown in Figures 1 and 11B are not necessary.

In the end, the fins 204 and the spacers 205 are arranged at a predetermined position as shown in Fig. 11B, and the order is not limited. Therefore, for example, the fins 2〇4 (or the spacers 205) having a space therebetween may be disposed, after the substrate 2〇6 is fixed to the base end surface thereof, and finally at the fins 2〇4 ( Spacers 205 (or fins 204) are inserted between spacers 205), respectively. Next, as shown in FIG. 12A, the circumferential surface of the jig body 2〇3a of the joining jig 203 which is rotated at a high speed in the circumferential direction around the rotating shaft 2〇3b is vertically pressed to the other surface 206a of the substrate 206, The bonding fixture 203 is moved along the other surface 206a of the substrate 206 to bond the fin 204 to the substrate 206. At this time, since the melting point of the copper constituting the substrate 206 is higher than the aluminum constituting the fin 204 φ, the fin 204 When the temperature at the interface with the substrate 206 rises to the temperature necessary for bonding (eutectic temperature: 548 ° C), the substrate 206 can maintain high deformation strength, so that the compressive stress of the bonding jig 203 can be efficiently A high-strength joint that communicates to the 乂 interface' and has no gaps between the fins 1024 and the substrate 205. Further, since the melting point of the iron constituting the spacer 205 is higher than the aluminum of the fins 2〇4 and the steel constituting the substrate 206, the circumferential rate and the traveling rate of the bonding jig 203 are set within a predetermined range, and the spacer 1OF The substrate 204 and the fins 204 can be easily bonded only without being bonded to the Korean wafer 204 and the substrate 206. 2036-5808B-PF 64 1270429 Finally, the closing bolt 21 6 of the jig for manufacturing the heat dissipating member is loosened, and the substrate fixing plate 215 is removed from the jig main body 211, and the closing bolt 214 is loosened and released. The fixing of the fins 213 to the fins 204 and the spacers 205, as shown in Fig. 12B, moves the substrate 206 upward. As a result, only the fins 204 bonded to the substrate 206 are moved upward, and the spacers 205 are left in the component setting portion 212 of the jig 21 for heat dissipation element manufacturing. Thus, the spacers 205 can be simply removed in the spacer detachment step, and the heat dissipating component 250 as shown in FIG. 11 can be fabricated, wherein the heat dissipating component 250 is formed by a plurality of aluminum fins 2 〇4 spaced apart from each other. It is bonded to one surface of the copper substrate 206. According to the above-described method for manufacturing a heat dissipating member, since the spacers 205 are respectively disposed between the fins 204, the fins 204 can be accurately spaced from each other and the fins can be determined to be spaced apart from each other at a predetermined interval. The parallel position of 204. Further, the spacers 205 reinforce the fins 2〇4, and no bending stress acts on the fins 2〇4 during the frictional vibration bonding step, and the thickness of the fins 2〇4 can be made very thin. Further, if the thickness of the spacers 2〇5 is changed, the arrangement interval of the fins 204 can be arbitrarily changed, and when the height of the fins 204 is changed more than once, the slits having a thin plate thickness and a high plate height are particularly used. The sheet 204 is erected to the surface of one of the substrates 206 at short intervals, so that the heat dissipating member 250 having a high height/space ratio (for example, a height/space ratio exceeding 20) can be manufactured. Of course, the spacer 205 is not limited to a metal. When considering factors such as strength and workability, ceramics or any other material may be used. Alternatively, the fins may be disposed in the step of configuring the object. When the surface of the substrate 206 is disposed on a surface 2036-5808B-PF 65 1270429, the base end surface of each spacer 205 may not be in contact with the surface of the substrate 2〇6, and the friction and vibration bonding step is taken from the bonding fixture. When the house stress of 2〇3 is the bending stress of the bonding piece 204, in order to improve the reinforcing effect of the spacer 205 on the Korean piece 204, it is preferable to prepare the spacers 205 of the same height as in the above-described embodiment. The Korean film 2〇4 is placed such that the base end faces of the spacers 205 are in contact with the surface of the substrate 2〇6.

Further, by the above method for manufacturing a heat dissipating member, since it is not necessary to heat and maintain the vacuum in a vacuum furnace for a predetermined period of time, the Korean wafer 204 can be bonded to the substrate, whereby the manufacturing cost can be reduced. However, while the bonding strength between the substrate 206 and each of the fins m is increased, and the heat dissipation performance of the heat dissipating member 250 is also improved, as shown in the mth diagram, it is preferable that the bonding jig 203 is on the inside of the substrate 206 ( The movement of the other surface of the substrate 2〇6 can extend over the entire surface end faces of the fins 2〇4 so that the respective tabs can be completely joined to the substrate 2〇6. (15A to the area indicated by oblique lines in the figure indicates the movement trajectory of the joining jig 2〇3) On the other hand, when the weighting of the joining cost is emphasized, for example, as shown in FIG. 15B, the joint can also be moved. The jig 203 does not extend over the entire surface of the base end faces of the fins 2〇4, only over a portion of the base end faces of the fins 204. Further, when the substrate 2〇6 is frictionally and frictionally bonded to each of the Korean sheets 2〇4, and when the substrate 2Q6 is joined to the spacers 2〇5, the spacers can be separated by any method. The object 205 is removed from the substrate 2Ό6 and each of the fins 204. When the width of the jig body 203a of the bonding jig 203 is smaller than the thickness of the fin 204, as shown in FIG. 15C, it is preferable to use the substrate. Intervening object 2〇5. This 'construction of the joint (in the figure is the area directly above each fin 2〇4), to move 2036-5808B-PF 66 1270429 joint fixture 203; The fins 2〇4 are in contact with the substrate 2〇6, and the arrangement in which the spacers 205 are not in contact with the substrate 206 may be used; or, as in the above-described embodiment, the melting point is higher than the fins 2〇4 and When the spacer 205 of the melting point of the substrate 2〇6 is independent of the movement trajectory of the bonding jig 2〇3, each spacer 205 is not bonded to the substrate 2〇6 and the fin month 2〇4, even after frictional vibration bonding. The spacers 2〇5 are also not bonded to the substrate 2〇6 and the fins 204, and the procedure for removing the spacers from the step can be omitted, and Reduce manufacturing costs. When X' remains a large indentation on the other surface 206a of the substrate 206 due to the compressive stress of the bonding jig 2〇3, the surface 206a of the substrate 2〇6 can be cut to a predetermined thickness, and a beautiful appearance can be obtained. Heat sink element 250. Further, in order to simplify the frictional vibration joining step, as shown in Fig. 16, a joining jig 203 in which a plurality of jig bodies 203a are fixed at a predetermined interval around the rotating shaft 203b may be used instead of the jig 2〇. 3. At this time, the frictional vibration joint can be applied to a plurality of regions at the same time, and the time required for the joint can be shortened, thereby improving the efficiency. When the front end faces of the fins 2〇4 of the heat dissipating component 25A manufactured by the above method are further joined to the other substrate 206, as shown in FIG. 17, the fins 2 which are spaced apart from each other can also be manufactured. The crucible 4 is frictionally coupled to the heat dissipating elements 250' of the substrates 206, 206, respectively. The first stage of the manufacturing sequence of the heat dissipating member 250 shown in FIG. 17 is as shown in FIG. 18A, and the spacers 205 are interposed between the fins 2 and 4, and the spacers are respectively placed in the respective spacers 205. The substrates 206 and 206 are respectively arranged, and the bonding jigs 203 and 203 are pressed 2036-5808B-PF 67 1270429 to the back surface of the substrate 206 (top surface in the drawing) J) and the back surface of the substrate 206 (pattern). In the middle of the middle), at the same time, the thick snow "shock joint" is used as the bottom of the snow. At the end, each spacer 205 is taken out from the side (the direction of the vertical paper). The second form of the manufacturing sequence of the heat dissipating member 250 is as follows. As shown in the figure, the spacers 204 are spaced apart from each other, and the substrates 206, 206' are disposed on both ends of the ... 204 (upper and lower ends in the drawing). The fixture 2〇3 is pressed down to the substrate

The back side (the upper part in the drawing) is used for frictional vibration engagement. After that, the arrangement relationship of the respective elements is kept 'the fins 2〇4, the spacers m, the substrate m, and the substrate 2〇6' are reversed up and down, as shown in FIG. 18C, and the other _(four) bonding jigs 2〇3 direction The back surface (the upper surface in the drawing) of the substrate 2 () 6 is pressed down to perform frictional vibration bonding. At the end, each spacer 2〇5 is taken out from the side (the direction of the vertical paper). The third state of the manufacturing sequence of the heat dissipating 7G member 250' is as shown in FIG. 19A, and the fins 2〇4 spaced apart from each other are placed in the spacers 2〇5, respectively, in only the fins 204. The substrate 2〇6 is disposed at one end (upper end in the drawing), and the bonding jig 2〇3 is pressed down to the back surface (upper surface in the drawing) of the substrate 2〇6 on one side to perform frictional vibration bonding. Thereafter, the arrangement relationship of the respective elements is maintained, and the fins 204, the spacers 205, and the substrate 206 are vertically inverted. As shown in FIG. 19B, the substrate is disposed at the other end of each of the fins 2〇4 (the upper end in the drawing). 20 6 , as shown in Fig. 19C, on the other side, the bonding jig 2〇3 is pressed down to the back surface of the substrate 206 (the upper surface in the drawing) for frictional vibration bonding. At the end, the spacers 5 are solid side 'm, straight out. 2036-5808B-PF 68 1270429 The fourth state of the manufacturing sequence of the heat-dissipating π-piece 250' is as shown in the igD diagram, and the spacers 2〇4 spaced apart from each other are placed in the spacers 2〇5, respectively. Only at one end of each of the Korean sheets 204 (the upper end in the drawing), the substrate 206' is disposed on one side of the bonding jig 2〇3 to the surface of the substrate 2〇6 (four) (the upper surface in the drawing) for frictional vibration bonding. . Next, if the image is not moved, the substrate 206 and the fins 204 are moved upward, and the substrate 2〇5 is taken out, and the heat dissipating element 250 is completed first. Thereafter, the heat dissipating member 25 is reversed up and down, as shown in FIG. 19F, and each spacer 2〇5 is placed between each fin 2〇4, at the other end of each fin #2G4 (in the drawing) The upper end) is configured with the substrate 2〇6'. Further, as shown in Fig. 19G, the bonding treatment|2〇3 is pressed down on the other side to the back surface of the substrate 206' (the upper side in the drawing) for frictional vibration bonding. At the end, each spacer 2〇5 is taken out from the side (direction of the vertical paper). & Next, a second embodiment of the method for manufacturing a heat dissipating member of the present invention will be described. This embodiment is approximately the same as the first embodiment described above, except that the heat dissipating member 21G is not used, and the spacer jig 22() is used instead. As shown in Fig. 20A, the spacer jig 220' is a jig having a comb shape in which the tip end portions (lower end portions in the drawings) of the spacers 205 are connected to each other. In the component arrangement step, after the spacers 205 of the spacers are placed up and fixed, as shown in the figure _, respectively, ^ 2〇4 # A # m # 205 ^ ^ f 2〇C ® ^ ^, the upper surface (base end surface) of each fin 204 and the lower surface (one surface) of the substrate 2〇6 (one surface) 206 ® ^ ° ^, after the substrate 206 is fixed on the upper surface of the spacer jig 22, and then by the side 2036- 5808B-PF 69 1270429 (in the direction perpendicular to the paper), each spacer 205 is inserted. As shown in Fig. 20D, in the subsequent frictional vibration bonding step, the bonding jig 203 is pressed onto the upper surface (other surface) of the substrate 206, and the substrate 206 is frictionally and vibrationally bonded to the respective fins 204. As shown in Fig. 20E, in the final spacer detachment step, the substrate 206 and the fins 204 bonded thereto are moved upward to remove the spacer jig 220. When the spacer jig 220 is used in the present embodiment, it is not necessary to use the jig 210 for heat dissipating component manufacturing, which is advantageous in that the procedure of disposing the spacer 205 can be omitted. Next, a third embodiment of the method of manufacturing the heat dissipating member of the present invention will be described. This embodiment is approximately the same as the above-described first embodiment, and differs in the fin configuration step in the 70-part configuration step and the subsequent substrate configuration step. In the first fin arrangement step, as shown in FIG. 21A, each of the fins 204 is alternately arranged with each of the spacers 205, and the element setting portion 212 disposed in the jig 210 for heat dissipation element mounting is erected. The base end faces of the 2〇5 are respectively below the base end faces of the fins 2〇4, and the base end faces of the spacers 2〇5 are respectively lower than the base end faces of the fins 204, and the height difference is not more than each spacer. The thickness of 205. In other words, the height of each fin 2〇4 is higher than the height of each spacer 205, and the range is within the thickness of the spacer 20 5 , and the base end faces of the fins 204 are respectively larger than the spacers 2 . The base end face of 5 is out of the range, and the range is in the substrate arrangement step of the spacer width 2, and as shown in FIG. 21B, the standing unit 2036-5808B-PF 70 1270429 is disposed in the component setting portion 212. Each of the fins is on the substrate 2'6. Then, as shown in Figs. 21C and 2U), the base end portion 2〇4a of each fin #204 is protruded by the downward compressive stress toward the fin 2() 4 (more than the spacer 2〇5) Part) · Bending and fixing in a state of an L-shaped cross section. At this time, since the height of the base end portion of the fin 204 is within the thickness range of the spacer 2〇5, the base end portions 204a of the bent fins #204 do not overlap each other, but are formed parallel to and against the substrate. Surface 0 of one surface (lower surface in the drawing) of the following: Next, as shown in Fig. 22A, the jig of the jig 2 () 3 which is rotated at a high speed in the circumferential direction centering on the rotation axis 2 〇 The circumferential surface of the body m is directly pressed into the other surface 2〇6a of the substrate 206, and the bonding fixture 2〇3 is moved to the surface 206a of the substrate 206, and the base end portion 204a of each of the sheets m is bonded to the substrate. 206. The base end portion of the fin 2〇4 which is folded at right angles forms a surface along the surface of the base 2G6, and compared with the first embodiment, the area of the substrate 206 and the fin m(4) is increased, so that both can be Ground joint. According to the present invention, even if the thickness of the fins #2〇4 is very thin, it is possible to produce a loose element 250 in which the substrate 206 and the respective fins m are surely erected. Finally, as shown in FIG. 22B, the substrate is as shown in FIG. 22B. 2〇6 moves up, only 6 # ^ ^ 206 ^ , 2〇4 ^ ^ ^ ^ # % ^ ^

The spacers are left in the element setting portion 212 of the heat dissipating element manufacturing m2i0, and the sub-cavity portion 2 (four) which is bent, and the heat dissipating element 250 on the surface. 2036-5808B-PF 1270429 Next, a fourth embodiment of the manufacturing method of the invention t heat element will be described. This embodiment is roughly the same as the above-described first embodiment, except that the fin-shaped fin member 23 is replaced with the fin-shaped fin 23〇. In the first 70 steps, first, as shown in Fig. 23, the central portion of the thin plate 231 made of -Ming alloy is placed orthogonally to a spacer 2〇5, so that the two become inverted τ-shaped, such as As shown in Fig. 23B, in the groove at the center of the cross-sectional concave fin constituent material manufacturing jig 240, the plate member 231 is bent, and the center portion is press-fitted into the spacer 2〇5, On the other hand, as shown in Fig. 23C, a fin-shaped fin structure 230 in which the spacer 2〇5 is cooled in the middle is formed in the groove in the center portion. The fin constituent material 23 is formed by a pair of right and left fins and a base end portion 204a that connects the pair of left and right fins 2〇4 to form a cross-sectional concave shape. Further, a plurality of fin constituent members 230 in which the spacers 205 are placed between the pair of left and right fins 2〇4 as described above are prepared, and the fin constituent members 230 are alternately arranged with the spacers 205'. As shown in FIG. 23D, the element setting unit 212 disposed in the jig 210 for heat radiation element manufacturing is erected. The fin constituent material 230 at this time is in a state in which the spacer 205 is placed between the pair of right and left fins 2〇4, and the base end portion 204a is in the upward state. Further, the spacers 2〇5 placed between the respective fin constituent members 230 are higher in height than the spacers placed between the pair of right and left fins 204, and are preferably both. The base end portion 204a of the height member 230 and the base end portion of the spacer 205 form a horizontal upper surface. Then, as shown in Fig. 23E, the substrate 206 is mounted on the upper surface of each of the fin constituent members 230 and the spacers 20 5' disposed on the element setting portions 212 2036-5808B-PF 72 1270429, and is fixed. Here, when the base end portion 204a of the bonding sheet member 230 and the spacer 205' are brought into contact with one surface (the lower surface in the drawing) of the substrate 206, the component disposing step is completed. The component arrangement steps shown in FIGS. 23A to 23B are not necessarily limited as long as the substrate constituent members 230, the spacers 205, and the spacers 205 are finally disposed at a predetermined position as shown in FIG. 23E. The order is not limited. Therefore, for example, the scale constituent members 230 having the cross-sectional concave shape formed in advance are arranged at intervals; and the spacers 2〇5 are respectively inserted between the pair of right and left fins 204 of the respective fin constituent members 230, and respectively Each of the spacers 205 is inserted between the respective fin constituent members 230, and the step of arranging the substrate 206 is also possible. Or, the fin constituents 230 having the pre-formed concave shape are arranged at intervals; and then the substrate 2〇6 is disposed; and finally, the spacers 2 0 5 are respectively inserted into the respective constituents of the cymbal sheet 2300. The steps of inserting the spacers 2 to 5 between the pair of fins 204 and inserting the respective fins 230 into each other may be performed. In the subsequent frictional vibration joining step, as shown in Fig. 24A, the circumferential surface of the jig body 203a of the joining jig 2〇3 which is rotated at a high speed in the circumferential direction around the rotating shaft 203b is vertically pressed to the substrate 2〇6. The surface 2〇6a of the other surface is joined, and the bonding fixture 203 is moved along the surface 2〇6a of the substrate 206 to bond the base end portion 2〇4a of each fin constituent material 2 to the substrate 206. Because of the fin configuration, the fc base end portion 2〇4a of the material 1 forms a surface along the surface of the substrate 206. Compared with the first embodiment, the substrate 2036-5808B-PF 73 1270429 206 and the fin are added. The contact area of 204 allows the two to be reliably joined. According to this embodiment, even if the thickness of the fin 204 is extremely thin, the heat dissipating member 25A in which the substrate 206 and the fins 204 are surely erected can be manufactured. Finally, as shown in Fig. 24B, when the substrate 2〇6 is moved upward, only the upward movement is performed together, and each of the fin constituent members 230 joined to the substrate 206 is provided.

By leaving the spacers 205 and 205' in the π-piece setting portion 212 of the heat-radiating element manufacturing jig 21, it is possible to manufacture the base end portion 204 having the fin constituent material 23〇 to be erected and bonded to one surface of the substrate 206. The heat dissipating component 25〇. The above description is directed to a method of manufacturing a heat dissipating member, a heat dissipating member manufactured by the method, and an embodiment of a jig for manufacturing a heat dissipating member used in the method, but is not intended to limit the present invention, and any skilled in the art. It is possible to make some changes and refinements without departing from the spirit and scope of the invention. For example, as for the heat dissipating member, a plurality of fins 2〇4 having a height reduction in the central portion in the longitudinal direction may be arranged as shown in Fig. 25, and a plurality of fins 204 having no such case may be spaced apart from each other and erected. The heat dissipating element 251 of the substrate 206 may have a plurality of comb-shaped H-pieces 2〇4' having a concavo-convex shape along the length thereof as shown in the figure, which are arranged at intervals and are erected and bonded to the substrate m. Heat sink element 252. In particular, compared with the heat dissipating component (4) shown in Fig. 14, the surface area of the heat dissipating member 252 is particularly large, and the heat dissipating performance is improved. = in Fig. 26, 'a thin cylindrical fin having a plurality of different diameters is arranged in a concentric circle and erected < a heat dissipating element 253 attached to a surface of the '2〇6-8; Is as shown in the figure _

2036-5808B-PF 74 1270429 A plurality of planar waveform fins 204B are spaced apart from each other and erected to a heat dissipating element 254 bonded to one surface of the substrate 206. Further, the substrate of the heat dissipating element is not limited to a flat plate shape, and as shown in FIG. 26C, the outer peripheral surface of the semi-cylindrical substrate (10) having an arc shape in a vertical cross section may be vertically connected to each other at a plurality of intervals. The heat dissipating elements 255 of the fins 2〇4 are of course manufactured by the above-described heat dissipating element manufacturing method. In the method of manufacturing a heat dissipating member described above, the friction welding of the metal member is applied, and the joining target is not limited to the 70 joining method of the metal fitting. For example, when one or both of the fins 2〇4 and the substrate 206 in the heat dissipating component are made of a non-metal such as ceramic, the present invention is to vertically bond a plurality of sheets spaced apart from each other to a substrate. A component bonding method of a surface. [Embodiment] The structure of the joint portion of the fin 204 and the substrate 206 after the manufacturing method of the heat radiating element shown in Figs. 21 to 21C and Figs. 22 to 22 is actually observed. The fins 204 used herein are A1〇 having a plate thickness imm (= 10xl (r3mm), a height of 26mm (= 2·6xl〇-2mm), a length of 60mm (=6· 〇><1〇-2111111). 5〇 lead alloy; spacer 2 is still soft steel of plate rhinoceros SSmnKd.SxlO-2·), length 57mm (= 5 7xl〇-2mm); and substrate 206 is plate thickness 2_f =2·余 If3 is resistant to 57mm ( = 5.7xl 〇 - 2mm), length 60mm ( = 6 〇 xl (r2mm) 2 oxygen-free copper. This 2036-5808B-PF 75 1270429 when the fin 204 height / spacing ratio is 26. Also, friction and vibration when engaged The jig body 203a of the jig 203 is set to have a diameter of 80 mm (= 8.0 x 10 mm), a width of 5 mm (= 5 〇 xl 〇 - 3 mm), a number of revolutions of 300 0 RPM, and a travel rate V of 4 〇. 〇〇mm/min (= 4· Om/min), the amount of pressing α on the surface 206a of the substrate 206 is 〇3 mm (= 3· 〇 xl 〇 -4 mm). After the frictional vibration is joined, the spacers 2 〇 5 are moved. Except for observing the structure of the joint portion of the fin 2〇4 and the substrate 206. As shown in Fig. 27A, it can be seen that the base φ plate 206 has a certain deformation, and the fin 204 has a deformation such as a bend and a bend. 4 and the substrate 206 is a reaction formed by CuA12 2〇7 is joined. The 27A is enlarged and as shown in Fig. 27B, most of the reaction layer 2〇7 is swept out by the action of the compressive stress of the bonding fixture when it is subjected to frictional vibration bonding, and is placed on the outer fin. The thickness of the reaction layer 2〇7 in the base end region of 204 is 30/zm (= 3.〇xl (T5m) or less, and cracks, cracks, and the like are not observed. The reaction layer 207 is hindered from the substrate 2〇. 6 to the heat conduction of the fins 2〇4, and having a very thin reaction layer 207, is a heat dissipating element having high heat dissipation performance. • Next, an embodiment of the third group of the present invention will be described. Before cutting into the theme, the basic structure of the frictional vibration joint of the metal component is premised on the premise. The so-called frictional vibration joint of the metal component is a gap relief tool for the metal component overlap by the pressure of the joint fixture. The vibration generated by the contact with the metal component splits and destroys the oxide film which exists on the coincident surface of the metal component, and borrows the weight of the τ section and deforms the plastic enamel, increasing the contact area of each metal component and increasing Large expansion 2036-5808B-PF 76 1270429 The method of joining the overlapping portions while dispersing the velocity, in particular, arranging the plurality of metal components in accordance with the fusion mutual arrangement to melt the bonding fixture to the side of the highest metal component: for bonding, in the metal component When the coincident portion rises to the degree necessary for the joint, the metal member adjacent to the side of the joint jig can maintain high deformation strength, and the compressive stress of the joint jig can be efficiently transmitted to the coincident surface, thereby completing the metal member. High-strength joint without gaps. The aluminum element and the copper element having a higher melting point are more specifically described as an example of the metal element. The 28A to 28C drawings show the order of the frictional vibration joints, in which the 28th, 8th, and 8β are front cross-sectional views, and the 28Cth is a side view of the first. In the frictional vibration engagement, first, the member 3G1 and the steel member 3〇2 are placed in surface contact with each other as shown in Fig. 28, and are fixed by a jig not shown in the drawing. Next, as shown in Figs. 28B and 28C, the circumferential surface of the jig body 303 of the jig that rotates at a high speed in the circumferential direction at the peripheral speed R around the rotation axis 3〇3b is vertically pressed to the copper member 3. The surface 〇 2a of the crucible 2 moves the interface tool 3〇3 along the surface % of the copper member at a traveling rate v, and the inscribed element 3〇1 is re-engaged with the copper member 3〇2. Pick up. /α /, 303 is a fixed shape of the disc-shaped jig body 303a at the front end portion of the rotating shaft 3〇3b, and the jig body 3〇3a is formed by a tool steel such as a steel tool. In the direction of the element 3 0 2 , the jig body 303a is rotated in the direction of the rear direction along the rotation axis 3〇3b. As shown in Fig. 29A, the circumferential surface of the fixture body 3〇3a is a certain amount

2036-5808B-PF 77 1270429 a(m) is pressed at a high speed in the circumferential direction while being pressed into the surface 302a of the copper member 302, and moves along the surface 302a of the copper member 302. By the pressing of the jig body 303a on the surface 302a of the copper member 302, the gap of the overlapping surface of the inscription element 301 and the copper member 302 disappears; and the contact of the jig body 303a with the copper member 302 by the high-speed rotation is achieved. The generated vibration splits and breaks the oxide film of the overlapping surface of the aluminum member 301 and the copper member 302; and as shown in Fig. 29B, the predetermined region of the steel member 302 in contact with the jig body 3〇3a and its adjacent region, Further, a predetermined region of the aluminum-element 301 adjacent to the above region is heated by the heat generated by the frictional contact between the jig main body 303a and the copper member 302, and exhibits a plasticized (fluidized) solid phase state. As a result of the above, the copper member 3〇2 and the aluminum member 3〇1 flow and diffuse at the mutual interface, and plastic deformation starts from the original surface. The passage path of the jig body 303a of the jig 303 is formed as a pair of shallow segments 3 on the surface 302a of the copper member 3〇2 by the compressive stress of the jig body 303a as shown in FIG. Further, in the overlapping surface of the aluminum member 301 and the copper member 302, the plastically deformed aluminum member 301 and the copper member 3〇2 are engaged with each other, and are solidified into a joint surface s having a concave-convex shape, and the above-mentioned joint surface S is interposed between the copper element 302 and the aluminum element 301 to positively bond the two.

Here, in consideration of the fact that the bonding jig 303 is pressed by the side of the aluminum element 3〇1, the melting point of the aluminum element 301 is low, and the overlapping surface of the copper element 302 reaches the eutectic temperature necessary for bonding (548. The deformation resistance of the component 3〇1 is changed to be smaller than the pressure of the self-joining fixture 303, which cannot be sufficiently transmitted to the overlapping surface of the aluminum component 3〇1 and the copper 2036-5808B-PF 78 1270429 element 302. 'And it is prone to poor joint. On the other hand, when it is connected to the side of the copper component with 3 G 3 [human melting point on the boat component 3 Q}, the component 3〇1 and the copper 亓 Du, %疋When the coincident surface of 仵3 0 2 reaches the eutectic temperature necessary for bonding, the copper turns on Q n. The illusion element 302 can maintain a relatively large deformation strength, which can be obtained from the joint treatment \ > mouth /, 3 0 The pressure of 3 is sufficiently transmitted to the heavy members of the aluminum member 301 and the copper member 302, and the gap between the two members is eliminated from the 0-side and the gap between the two members, and the high-strength joint can be performed.

When the element 3〇1 and the copper element 302 are overlapped by the above-described method and the frictional vibration is joined, it is preferable to determine the circumferential rate R of the rotation of the joint jig 3〇3 (the jig body 303a) at the time of joining by the following formula (1). m/min. ) ·· 250 $ RS 2000 .................. When the circumferential speed of the joining jig 3〇3 at the time of joining is less than 250 m/min, the jig 303 is joined. The heat generated by the frictional contact with the copper member 3〇2 is too small', and the temperature of the overlapping surface of the copper member 302 and the aluminum member 301 is too low, resulting in poor bonding. On the other hand, when the circumferential speed of the joining jig 3〇3 at the time of joining is more than 2000 m/min, the heat generated by the frictional contact between the joining jig 3〇3 and the copper member 3〇2 is greater than necessary, not only The driving energy loss of the bonding jig 303 is increased, and the temperature of the copper member 302 in contact with the bonding jig 3〇3 is locally too high, causing plastic deformation of the portion, and the pressure of the bonding jig 303 is caused. The stress cannot be sufficiently transmitted to the coincident surface, which may cause a gap between the two components. Therefore, r can be understood that when the joint jig 303 is rotated at a peripheral speed of 25 〇 2 〇〇〇 m/min at the time of joining, the jig is attached. The friction between the 303 and the copper member 302 is well-suited for proper production, and good bonding is possible. 2036-5808B-PF 79 1270429 Further, when the element 301 and the copper element 302 are overlapped and frictionally vibrated, the bonding jig 303 (the jig body 3〇3a) is pressed on the surface of the copper element 2〇2 at the time of bonding. a(m) is preferably obtained from the following formula (β)········································ The thickness of the copper component (m). When the pressing amount α of the bonding jig 303 on the surface of the copper element 2〇2 is less than 0.03t, a gap remains in the overlapping surface of the copper element 302 and the aluminum element 2〇1, resulting in poor bonding. On the other hand, the amount of press-in α is larger than 〇·3", although no gap remains in the overlapping faces of the copper member 302 and the member 301, and the amount of pressing of the oversized jig 303 is in the copper member 3〇2 Significant dents remain on the surface, resulting in loss of components. Therefore, when the pressing amount α of the joining jig 3 on the surface of the copper member 302 is 〇〇3t or more and 〇3t 2 at the time of joining, the compressive stress of the joining jig 303 is just an appropriate value, and it can be understood that it can be in copper. The bonding of the element 302 and the overlapping portion of the charm element 3〇1 is completed without causing a gap, and the indentation on the surface of the copper element 3Q2 can also be reduced. When the member 301 is overlapped with the copper member 3〇2 and frictionally vibrated, the joining fixture 3〇3 (the traveling speed of the jig body 3. 3 along the surface of the copper member 3G2 is v. (m/min.) is preferably obtained by the following formula (c): 0. 1^ R/(5. 〇xl〇7xt2)...............(c) Where R is the circumferential velocity of the joint at the time of joining (m/mtt is the thickness (m) of the copper component in the overlap. Among them, the joint fixture (4) is 3% round when joining. When the kitchen catch rate becomes large, the joint cure The heat generated by the frictional contact between the 303 and the copper component 302 also becomes 2036-5808B-PF 80 1270429 large', and the traveling speed v of the bonding fixture 303 is higher _, the overlapping portion can still maintain a certain temperature; When the thickness of the element 3〇2 is increased, it takes time and time for the overlapping portion to reach a predetermined temperature or higher. If the traveling rate of the bonding jig 3〇3 is excessively large at this time, the bonding is performed before the temperature of the overlapping portion reaches a certain temperature or higher. If the jig 303 has passed, it will cause a problem of poor joint.

When a good frictional vibration engagement is performed, the traveling speed V of the joining jig 3, the peripheral speed R, and the thickness of the copper member need to be adjusted with each other. On the other hand, it was confirmed that when VS (5.0xl (rxt2) is satisfied, there is a good connection. On the other hand, from the viewpoint that the traveling speed v of the joining jig 303 is too small, = the joining efficiency is lowered, the experiment As a result, it was confirmed that when the 〇·(4) is satisfied, a good joining efficiency can be obtained. _ The frictional vibration joining of the metal member is not limited to the case where the inscribed element and the steel member are combined and joined, and can be widely applied to each metal. The shape of the metal element can be joined by pressing the bonding jig after overlapping each other. Further, the number of overlapping metal elements is not limited to two or three or more. For example, in the 30th, three metal elements (the sigma-like member 30, the 3,000-series syllabic element 3〇1, and the steel element _ are placed one on another) are attached to the jig body 3 of the jig 3G3. The coffee is pressed into the side of the steel element 302 having the highest melting point among the three metal components, and is frictional vibration joint. Here, in consideration of the resistance of each metal component to the two predetermined ones at the time of joining, the deformation strength of the metal component is from the joint. Jig The compressive stress conveys the order of the melting point of the metal element (the order here is the copper element 3〇2, 2036-5808B-PF 81 1270429 1000 series aluminum element 301, the 5000 season button nibble Qni, υ乐The aluminum 301 301) is arranged in a superposed manner, and the bonding fixture 3G3 is pressed to the side of the metal element having the highest melting point among the three metal elements (here, the copper element 302), and is frictionally vibrated. The other three metal components are In the case of copper, aluminum, and magnesium, the light and the 乂妤 are overlapped in the order of the copper enamel, the aluminum element, and the sinter element, and the joint is pressed and pressed into the side of the gong to perform the frictional vibration joint. 'The heat dissipating element Φ The basic structure of the frictional vibration joint of the metal component has been described, and the heat radiating element to which the above frictional vibration joint is applied will be described next. Fig. 1 is a perspective view showing an embodiment of the heat radiating element of the present invention. The heat dissipating member 350 is formed on the surface of the copper substrate 3〇5, and is erected and joined to a plurality of mutually spaced aluminum fins. The spacer/sigma 306' is as shown in the figure 32. Connecting the lower ends of the spacers 3〇6a to each other The jig having a comb shape is the same. The height of each spacer is equal to the heat radiating fins 3〇4 of the heat dissipating member 35A. • First, as shown in Fig. 32B, the fins 304 are inserted into the spacers 3, respectively. Between 0 6 a. At this time, each key η q π u ^ valley, the upper surface of the sheet 304 forms a horizontal plane with the upper surface of each spacer 306a. Next, as shown in Fig. 32C, the fins 3〇4 The upper surface is in contact with a surface of the substrate 305 (the lower surface in the drawing) to fix the substrate 3〇5. The Dina, 32e®-#^* 305®^ can also be used to fix the upper surface of the 3D6. The respective sheets 304 are inserted (in the direction perpendicular to the paper surface). : Next, as shown in Fig. 32D, the bonding jig 3〇3 is pressed to the substrate 3〇5

The other surface of the 2036-5808B-PF 82 1270429 (the upper surface in the drawing) frictionally vibrates the fins 304 to the substrate 3 0 5 ° at this time, because the melting point of the copper constituting the substrate 3 〇 5 is higher than the composition - When the temperature at the interface between the 吕' fin 304 and the substrate 305 of the cymbal 304 rises to a temperature (eutectic temperature··548 〇c) necessary for the bonding of the both, the substrate 3〇5 can maintain high resistance. The deformation strength enables the compressive stress month b of the bonding jig 3〇3 to be efficiently transmitted to the interface, and the high-strength joint between the fins 3〇4 and the substrate without gaps can be performed. Further, since the melting point of the iron constituting the spacer 306a is higher than the aluminum constituting the fin 304 and the copper constituting the substrate 3〇5, the circumferential rate and the entanglement rate of the bonding jig 3〇3 are set within a predetermined range, and the spacer 3〇6a does not bond with the fin and the substrate 305, but can easily bond only the substrate gw fish fillet 304 曰... Finally, as shown in Fig. 32E, the substrate 3〇5 and the fins bonded thereto The 304 moves upward, and the spacer jigs 3〇6 are removed, and the manufacture of the heat sink element 350 is completed. ", Hunting by the above steps, because the spacer fixture 3〇6 3_ into each .... 4, can correctly maintain each two: mutual spacing 'and can determine each other separated by the interval The parallel position of 304. Further, for the bending stress acting on the fin 304 in the frictional vibration bonding step, the fins 3063 are reinforced by the spacers 306a, ® ^ ^ 3^4 ^ M ° ^ - spacers With the thickness and arrangement interval of the spacers 3〇6a of the 306, the arrangement of the fins 304 can be arbitrarily adjusted. _ Freshness, more _ = height of the Korean wafer 304, in particular, thin plate thickness and high plate height Each of the 2036-5808B-PF 83 1270429 fins 304 is erected to the surface of one of the substrates 3〇5 at short intervals, so that the heat dissipating member 350 having a high height/space ratio (for example, a height/interval ratio exceeding 2 〇) can be manufactured. Of course, the spacer jig 3〇6 (spacer 3〇6a) is not limited to metal, and ceramics or any other material may be used in consideration of factors such as strength and workability, and spacers may be used. The height of each spacer 306a of the jig 3〇6 is smaller than the height of the fins 3〇4, and the friction is caused. When the movable bonding is performed, each of the spacers 306a does not contact a surface of the substrate 305; in consideration of the frictional vibration bonding, when the fin 304 is subjected to the bending stress by the compressive stress of the bonding jig 303, the spacer 306a is raised. For the reinforcing effect of the fins 3〇4, it is preferable to prepare the spacers 306a and the fins 304 of the same height as in the above-described embodiment. Further, by the above manufacturing method, since it is not necessary to be soldered as usual By heating and maintaining in a vacuum furnace for a predetermined period of time, the fins 3〇4 can be bonded to the substrate 305, which can reduce the manufacturing cost. While the bonding strength between the substrate 305 and the fins 304 is _ The heat dissipation performance of the heat dissipating member 350 is also improved. As shown in FIG. 33A, it is preferable that the movement of the bonding jig 303 on the inside of the substrate 305 (the other surface of the substrate 3〇5) can be spread over the fins 304. The overall end of the base end (the upper part in the drawing) enables each wrong month 300 to be completely bonded to the substrate 30 5 ° (the area indicated by the slanted line in the 3 3 A to 3 3 C diagram represents the bonding process and 303 movement track) another < as shown in Figure 33B As shown, the jig 303 can also be moved without extending the entire end surface of each of the fins 304, and only a portion of each of the fins 304 is stretched. When the substrate 305 is frictionally joined to each of the fins 304, 2036- 5808B-PF 84 1270429 When the substrate 305 is also joined to each of the spacers 3〇6a, in the spacer detaching step, although the spacers 3〇6a can be removed from the substrate 305 and the respective fins 304 by any method. When the width of the jig body 3〇3a of the jig 3〇3 is smaller than the thickness of the fin 304, as shown in FIG. 33C, it is preferable that the substrate 305 and the spacers 3063 do not engage with each other ( In the figure, the area directly above each fin 304) is moved to the bonding fixture 3〇3; again, only the fins 304 are brought into contact with the substrate 305, so that the spacers 3〇6a are not associated with the φ substrate 305. The configuration of the contact may be; or, as in the above-described embodiment, when the spacer 3〇h having a melting point higher than the melting point of the fin 304 and the substrate 3〇5 is used, it is independent of the movement trajectory of the bonding jig 303. When the spacers 3〇6& are not bonded to the substrate 305 and the fins 304, even after frictional vibration bonding, The spacers 306a are not bonded to the substrate 3〇5 and the fins 3〇4, and the procedure for separating the spacers can be omitted, and the manufacturing process can be reduced. Further, when a large indentation remains on the other surface of the substrate 3〇5 due to the compressive stress of the bonding jig 303, the surface of the substrate 305 can be cut to a predetermined thickness, and a heat-receiving member having a beautiful appearance can be obtained. 350. Further, in order to simplify the frictional vibration joining step, it is also possible to use a joining jig (not shown) in which a plurality of jig bodies are fixed at a predetermined interval around the rotating shaft 303b. At this time, frictional vibration engagement can be applied to a plurality of regions at the same time, and the time required for the engagement can be reduced, thereby improving the efficiency. - .............'........................................ Figure 34 is a perspective view showing the heat dissipating component of the present invention. Another embodiment. The real heat element shown in Fig. 10 is bonded to the surface of the copper substrate by frictional vibration. The heat sink portion 2036-5808B-PF 85 1270429 is an aluminum substrate 3〇7a which is placed on one surface of the substrate 305, and fins 3 which are spaced apart from each other and are erected on the opposite side of the substrate 305. 7b, formed by extrusion molding. The method of manufacturing the heat dissipating member 360 is the same as the method of manufacturing the heat dissipating member 350, and the spoon is slightly the same. The spacer jigs of the cross-sectional shape shown in Fig. 35A are fixed to the joint work table; as shown in Fig. 35B, the fins are respectively embedded between the spacers 306a of the spacer jig. The sheet 307b is placed with the aluminum heat dissipation φ portion 307. Further, on the opposite side (the upper surface in the drawing) of the fins 3' to 71b of the substrate 307a of the aluminum heat dissipating portion 307, a surface (the lower surface in the drawing) of the fixed substrate is overlapped. As shown in Fig. 35C, the other surface of the substrate 305 (the upper surface in the drawing) is rubbed and vibrated by the bonding jig 303. Finally, as shown in Fig. 35E, after the spacer jig 3 is removed, The manufacture of the heat dissipating component 360 is completed. The other parts are the same as the heat sink element 35〇. Radiator # Next, an embodiment of the heat sink of the present invention will be described. 36A to 36B are views showing a first embodiment of the heat sink of the present invention, wherein Fig. 36A is an exploded perspective view, and Fig. 3 is an oblique view after assembly. 37A is a top view of the heat sink of the 36A to 36B; the first and third sides of the heat sink of the 364th to 36th are the side view and the side view of the heat sink. ....................... The heat exchanger 31 〇A is a political heater with a high temperature of the heat dissipating component 350 and the fan 320. Heat dissipating component 3 5, Weng and ^

The heat pipe is used as a thermally conductive connection. 2036-5808B-PF 86 1270429 The heat dissipating member 350, as described above, is a friction stir welding joint in a state in which a plurality of fins 304 made of aluminum are spaced apart from each other and erected on a surface of a substrate 3〇5 made of copper. to make. Here, protrusions 305a are formed on both side faces of the substrate 3〇5. Further, on the lower surface of the substrate 3?5, a fitting groove 3?5b fitted to the end portion of the heat transfer pipe 330 is formed. The fan 320 forcibly cools the heat dissipating member 35, and is attached to the heat dissipating member 35A via the fan mounting member 321, and the heat of the heat dissipating member 35 is released upward. The fan 320 is connected to a motor that is not green as shown in the drawing. The fan mounting member 321 is composed of an upper plate portion 321a and side plate portions 321b and 321b, and is formed with a sectional gate shape that can include the fins 3〇4 of the heat dissipating member 35〇. The central portion of the upper plate portion 321a is provided with an air hole 321c designed to correspond to the position and size of the fan 32'', and a small screw hole 321d is formed at four corners of the upper plate portion 321a. The side plate portion 321b is provided with a mounting hole 321 e at a corresponding position of the protrusion 305a of the substrate 305. After the dog 305a is inserted into the mounting hole 321e, the fan mounting member 321 is attached to the heat dissipating member 35A by bending the projection 305a. Further, the small screw 321f is locked into the small screw hole 321d' by the upper side of the fan 320, and the fan 320 is attached to the fan mounting member 321. The heat pipe 330 conveys the heat generated by the CPU 340 of the heating element to the heat dissipating component 35, one end of which is disposed on the heat dissipating component 350, and the other end of which is connected to the elbow 11 3 4 0. The state of the heat conduction f is fitted to the fitting groove 3〇5b of the substrate 3〇5 of the heat dissipation element 350, and the upper surface of the fork heat element 341 on the metal mounting element 31 and the small screw is fixed to the heat dissipation element 350. 2036-5808B-PF 87 1270429 of the substrate 305. The fitting groove 341a is also formed in the same manner, and the other end of the heat transfer pipe 330 is fitted to the fitting groove 3 41 a in a pressed state, and is mounted in metal. The element 342 and the small screw are fixed to the heat receiving element 341. The heat receiving element 341 is a metal material (e.g., copper) having a high thermal conductivity. Below the CPU 340, a socket 343 of a circuit board is disposed. A projection 343a is formed on a side surface of the slot 343. The upper side of the slot 343 coincides with the CPU 340, and more coincides with the heat receiving element 341 on the CPU 340. A gate-shaped mounting clip (cl ip) 344 having a mounting hole 344a at both ends thereof is overlaid on the slot 343, the CPU 340, and the heat receiving element 341, and the protrusion 343a is inserted into the mounting hole 344a. The socket 343, the CPU 340, and the heat receiving element 341 are integrally fixed to each other in a state of being pressed into contact with each other by bending the projection 343a. The heat sink 31 0A has a heat dissipating component 350 and a fan 320, and the heat generated by the CPU 340 of the heating element is sequentially sent to the heat dissipating component 350 via the heat receiving element 341 and the heat pipe 330, and is forcibly discharged by the fan 320. To the outside world, and has high heat dissipation performance. Moreover, since the CPU 340 and the heat dissipating component 350 are connected by the heat pipe 330, the heat dissipating component 350 and the fan 320 can be disposed at a position away from the CPU 340, so that, for example, a thin notebook computer or the like is to be provided with a heat dissipating structure in the vicinity of the CPU 340. In the case of difficulties in space, there is a solution that can be used. Moreover, since the heat dissipating member 350 of the heat sink 310A is in a state in which a plurality of fins 304 are spaced apart from each other and erected on one surface of the substrate 305, friction and vibration are joined, which is conventionally combined with soldering. : Compared with ', the substrate and the fin can achieve higher strength bonding and lower manufacturing cost. Special 2036-5808B-PF 88 1270429 In other words, since the fin 304 is made of aluminum having a lower melting point than copper, the steel substrate 305 can efficiently transmit the compressive stress of the bonding jig 303 to the joint portion during frictional vibration bonding. There is no gap in the joint, so that the two form a stronger joint. Figure 38 is a perspective view showing an assembled second embodiment of the heat sink of the present invention. Here, the heat dissipating member 3B is the same as the heat sink 31 0A of the first embodiment except for the configuration of the heat dissipating member. The heat dissipating member 360 of the heat sink 31 0B, as explained above, frictionally bonds the aluminum heat dissipating portion 307 to one surface of the copper substrate 305. The aluminum heat dissipating portion 307 is formed by superposing the aluminum substrate 3〇7a disposed on one surface of the substrate 305 and the fins 3〇7b which are spaced apart from each other and disposed on the opposite side of the substrate 305. Made. Since the heat dissipating member 360 of the heat sink 310B is formed by frictionally and vibrating the steel substrate 305 and the aluminum substrate 307a, the substrate 3〇5 and 3〇7a are compared with the conventional case of soldering and explosive crimp bonding. A higher strength of the joint can be obtained, and a lower manufacturing cost. Further, the frictional vibration bonding portion is a portion where the substrate 205 and the substrate 307a overlap each other, and because of the large bonding area, it is easier to manufacture than the heat dissipating member 35 of the heat sink 310A of the first embodiment. 39A to 39B are views showing a third embodiment of the heat sink of the present invention, wherein Fig. 39A is an exploded perspective view, and Fig. 39β is an assembled oblique view. Further, the first touch diagram is the third M^« v 40C diagram showing the side view of the heat sink in the 39A to 39B and the side view in the γ direction. Here, the heat dissipating member 310C is the same as the heat sink 31 0A of the first embodiment of 2036-5808B-PF 89 1270429 except for the configuration of the tab. The fan 322 of the heat dissipating element 31 0C is directly mounted on the heat dissipating element 350 in a state of being disposed on one side of the heat dissipating element 35 。. The fan 322 is disposed on the side of each of the fins 4 toward the side end surface of each of the fins 304 of the heat dissipating member 350, and discharges the heat of the heat dissipating member 250 upward. The fan 322 is a fan case type 322& which has a sectional gate shape which can include each fin 304. A mounting hole 322b is formed in a lower portion of the fan case 322a and a position opposite to the projection 3?5a of the substrate 305. After the projection 305a is inserted into the mounting hole 322b >, the fan 322 is attached to the heat dissipating member 350 by bending the projection 305a. The heat sink 31 0C has a heat dissipating component 35 〇 and a fan 32 〇 , and the heat generated by the CPU 340 of the heating element is sequentially sent to the heat dissipating component 350 via the heat receiving component and the heat pipe 330 , and is forcibly discharged by the fan 322 . To the outside world, and has high heat dissipation performance. Moreover, since the cpu and the heat dissipating component 350 are connected to the heat pipe 330, the heat dissipating component 35 and the fan 322 may be disposed away from the CPU 34A, and since the fan 22 is disposed on one side of the heat dissipating component 350, The overall height of the heat dissipating component 31c can be smaller than that of the first embodiment of the heat sink 31A, and is more suitable for, for example, a thin notebook computer, etc., having difficulty in installing a heat dissipating structure in the vicinity of the CPU 34A. The situation. It is the same as the other recipes and the cost of the radiator 310A. Figure 41 is a perspective view of an assembled oblique view of the fourth embodiment. Here, the heat dissipating member 310D is the same as the heat sink 31 0C of the third embodiment except for the configuration of the heat dissipating member 2036-5808B-PF 90 1270429. The heat dissipating member 360 of the heat sink 31 OD, as explained above, frictionally bonds the aluminum heat dissipating portion 307 to a surface of the copper substrate 305. The aluminum heat dissipating portion 307 is formed by superposing an aluminum substrate 30 7a disposed on one surface of the substrate 305 and fins 3〇7b spaced apart from each other and standing on the opposite side of the substrate 350, so as to be integrated Formed. 42A to 42B are views showing a fifth embodiment of the heat sink of the present invention, wherein Fig. 42A is an exploded perspective view, and Fig. 42B is a perspective view after assembly. Further, Fig. 43A is a plan view of the heat sink of Figs. 42A to 42B; Figs. 43B and 43C are respectively a side view of the heat sink and a side view of the γ direction of the heat sink of Figs. 42A to 42B. Here, the heat sink 31 is substantially the same as the heat sink 310 of the first embodiment, and is a heat sink having a heat dissipating member 35A and a high performance of the fan 32. The heat dissipating member 350 is directly connected to the CPU 340 in a thermally conductive state without passing through the heat transfer pipe 33. The 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 . On the other hand, the heat dissipating component is placed on the surface of the copper substrate 3G5, and two rows of the inlaid chip 1 are placed to separate the groove 304a, and then joined by friction and vibration. ,合;:^ ^ -- Fan of the heat of 31 0E, installed with a shocked piece ’丨u d machi w board section 32ϊ: The lower central part is formed with a clamping groove for fitting clip 344

2036-5808B-PF 91 1270429 The assembly sequence of the heat sink 31 0E is first superposed on the slot 343 in the order of the substrate 34 of the CPU 34 and the heat sink 350; the mounting clip 344 is inserted into the heat dissipating component 350'. The groove 3〇4a is further inserted into the mounting hole 344a of the mounting clip 344, and the socket 343, cp[J 34〇, heat dissipation is performed by bending the protrusion 343a. The element 350' is integrally fixed in a state of being in pressure contact with each other, and the heat generating body 340 and the heat radiating element 350 are thermally connected. Next, the mounting clip 344 is inserted into the grooving 32ig, and the fan is mounted on the component 321 to be covered on the heat dissipating component 35, and the protrusion 3〇5& is inserted into the mounting hole 321e, and The projections 3〇5a are fixed by bending, and the fan mounting member 321 is mounted on the heat dissipating member 35A. Finally, the small screw 321f is locked into the small screw hole 321d from the upper side of the fan 320, and the fan 320 is attached to the fan mounting member 321, so that the assembly of the heat sink 321E is completed. The heat sink 321E has a heat dissipating component 35 〇, and the heat generated by the CPU 340 is directly transmitted to the heat dissipating component 35 5 without the fan _ 320 ′ passing through the heat pipe 330 , and is forced by the fan. Sexual discharge to the outside, with a particularly high heat dissipation performance. The other configurations and functions are the same as those of the heat sink 31 0 A of the first embodiment. Fig. 4 is a perspective view of the cylinder after mounting, showing a sixth embodiment of the heat sink of the present invention. The heat dissipating component 310F herein is the same as the heat dissipating component 360 of the fifth embodiment except for the configuration of the heat dissipating component, and is the same as the heat sink 31〇b of the second embodiment, 2036-5808B- PF 92 1270429 frictionally and vibrates the aluminum heat dissipating portion 30 7 to one surface of the copper substrate 3〇5. The aluminum heat dissipating portion 307 is formed by superposing an aluminum substrate 30 7a disposed on one surface of the substrate 3〇5 and fins 307b spaced apart from each other and standing on the opposite side of the substrate 3〇5. Formed. Further, each of the fins 3?7b is formed with a groove similar to that of the fifth embodiment and not shown in the drawings. 45A to 45B are views showing a seventh embodiment of the heat sink of the present invention, wherein Fig. 45A is an exploded perspective view, and Fig. 45B is a perspective view after assembly. Further, Fig. 46A is a plan view of the heat sink of the 45A to 45B; the 46th and 46C are respectively a side view of the heat sink of the 45th to 45th planes and a side view of the γ direction. Here, the heat sink 310G is roughly the same as the heat sink 310 of the fifth embodiment, and is a high-performance heat exchanger having a heat dissipating member 35A and a fan 32. The heat dissipating member 35 0 is directly connected to the CPU 340 in a thermally conductive state without passing through the heat transfer tube 33 . In the heat sink 310G, the fan 320 is mounted on one side of the heat dissipating member 35, and the heat of the heat dissipating member 350' is discharged to one side. Therefore, the air hole 321c and the small screw hole 321d of the fan mounting member 321, ’ of the heat sink 31〇G are formed on one side. The heat sink 321G has a heat dissipating element 35 〇, and the fan 320 directly transmits the heat generated by the cp ϋ 34o to the outside without going through the heat transfer pipe 330, and has a particularly high heat dissipation. performance. Moreover, since the fan 320 is disposed on the heat dissipating component 35α, the * side of the heat dissipating component 31 can be reduced to the overall height of the heat dissipating component 31, and is particularly suitable for, for example, a thin notebook computer.

2036-5808B-PF 1270429 There is a spatial difficulty in installing the heat dissipation structure in the vicinity of the CPU 340. The other configurations and functions are the same as those of the heat sink 31 0 E of the fifth embodiment. Fig. 47 is an oblique perspective view showing the eighth embodiment of the heat sink of the present invention. Here, the heat dissipating member 3丨〇H is the same as the heat sink 310G of the seventh embodiment except for the configuration of the heat dissipating member. The heat dissipating member 360 of the heat dissipating member 310H is the same as the heat dissipating member 360' of the heat sink 31 of the sixth embodiment. ♦ ❻ Specific dimensions - examples, as shown below. · (Thickness of υ copper substrate X width x depth · 2mmx72mmx55mm 铭 - 的 的 & 深度 深度 深度 深度 3 3. 3mmx54mmxi 〇mm fin spacing · · 1. 5mm~1. 6mm Number of fins: 42

Maximum heat dissipation: 42~43W (2) Thickness of copper substrate x Width χ Depth: 2mmx72mmx55mm • Thickness of aluminum fins x Depth x Height: 〇.3mmx58mmxl2.5mm Fin spacing·· 1. 5mm~1. 6mm

Number of fins: 42 Maximum heat dissipation capacity: 58 to 59 W Next, an embodiment of the fourth group of the present invention will be described. Metal-component joining method -1-.........-..............----------the metal component of the present invention The first embodiment of the bonding method is to frictionally and vibrate the metal elements by overlapping them. The frictional vibration bonding of the so-called metal components is the coincidence of the metal components by the compressive stress of the bonding fixture.

2036-5808B-PF 1270429 ;: the gap disappears 'and the contact with the metal element by the rotating joint fixture: the pound: the vibration split breaks the oxide skin present on the coincident surface of the metal component, and the overlap is caused by the friction heat A method of bonding by increasing the contact area of each metal element and increasing the diffusion rate by high temperature. 5 In particular, a plurality of metal elements are placed in a stacking order in accordance with the order of the melting points. When the joining jig is pressed to the side of the metal element having the highest melting point and joined, the joining portion of each metal element rises to the joint. At the necessary temperature, the metal component adjacent to the side of the jig can maintain high deformation strength, so that the compressive stress of the bonding jig can be efficiently transmitted to the heavy human face, thereby enabling high-strength bonding without gaps between the metal components. . Here, an example of a metal element having a higher melting point and a copper element having a higher melting point is exemplified. The 48th 侃 侃 系 显示 显示 显示 显示 摩擦 摩擦 摩擦 摩擦 摩擦 摩擦 摩擦 摩擦 摩擦 摩擦 摩擦 摩擦 摩擦 摩擦 摩擦 摩擦 摩擦 摩擦 摩擦 摩擦 摩擦 摩擦 摩擦 摩擦 摩擦 摩擦 摩擦 摩擦In the present embodiment, first, as shown in the figure, the element 401 and the copper element 4〇2 are pulled in a face-to-face manner, and the other parts of the 4U2 are placed in surface contact with each other in a plane contact manner, which is not shown in the drawing. The fixture is fixed. Next, as shown in Figs. 48B and 48C, the circumferential surface of the jig body 403 of the joining jig 4〇3 which is rotated at a peripheral speed R in the circumferential direction centering on the rotating shaft (four) is vertically pressed to the copper component right. The surface of the surface #4〇3^4〇^- is as handsome as the traveling rate V, and the element 4G1 is re-engaged with the copper element 4G2. The joint jig 403 fixes the kitchen plate-shaped arranging body 403a at the solid end portion when rotating the egg, and the jig body 4〇3a is the surface 402a of the tool steel 2036-5808B-PF 95 1270429 such as JIs:skd6i. The direction of the traveling direction is formed along the rotating shaft 4〇3b. The tool body 403a is rotated toward the periphery of the rear side with respect to the press-fitting copper member 4 0 2 . As shown in Fig. 49A, the circumferential surface of the jig body 4〇3a is rotated in the circumferential direction = speed along the surface of the surface 4〇2a of the copper member 402 by the amount α (π〇), and along the copper member 402 The surface 402a moves, and by the pressing of the upper 2 fixture body 403a on the surface 402a of the copper member 402, the gap between the aluminum element 401 and the copper element 4〇2 overlaps (intersection) disappears; The high-speed rotating jig body 403 & contact with the copper element 4 〇 2 generates vibration, and the oxide film of the overlapping surface of the aluminum element 401 and the copper element 402 is cracked, and as shown in Fig. 49B, The predetermined region of the steel member 402 having the body 4〇3a contact with the adjacent region and the predetermined region of the aluminum member 401 adjacent to the region is generated by the frictional contact between the fixture body 4〇3& and the copper member 4〇2. The heat is high and the solid phase state is plasticized (fluidized). As a result, the copper element 4〇2 and the aluminum element 4〇1 flow and diffuse at the mutual interface, and the plasticity starts from the original surface. Deformation. The passing of the jig body 403a of the jig 403 As shown in Fig. 49c, a pair of shallow segments 402b are formed on the surface 402a of the copper member 4A by the compressive stress of the jig body 403a. Further, the aluminum member 401 and the copper member #4 0 2 ^ i # ^ ® ) t ^ « The shape of the I component 4 pin and the steel component 402 are engaged with each other and solidified into a joint surface s of a profiled concave-convex type, and the above-mentioned joint surface S is interposed between the copper component 4 and the " Which of the first I's back will actually engage the two. 2036-5808B-PF 96 1270429 When considering that the bonding jig 403 is scrapped from the side of the component 4〇, the melting point of the inscription element 401 is lower than that of the copper component 4〇2, and the component element and the copper component are The coincident surface (interface) of 402 reaches the temperature necessary for the joint (a total of DAY/day 548 C) with _L _, and the deformation resistance of several pieces of 4 〇 1 becomes smaller, and the joint deformation becomes smaller. The pressure of 1 Λ Q ^ /, 403 is not sufficiently transmitted to the aluminum component 4 (the interface of the Π and the copper component (interface), and the joint failure is likely to occur. On the other hand, the bonding fixture 403 is dusted. The melting point is higher than the side 眸 of the copper element 402 of the title element 401, a plus -μ, J f when the overlapping surface (intersection) of the aluminum element 401 and the copper element 402 reaches the temperature (eutectic temperature) necessary for bonding 'The copper element 402 can maintain a relatively large deformation strength, so that the pressure from the next 403 can be fully conveyed to the elemental component and the copper component: the coincident surface (intersection)', and the gap between the two components disappears. And the joint of the strength of the row can be achieved. As shown in Fig. 50A, the circumferential surface of the body strip of the jig of the joint fixture 4〇3 The groove is formed approximately in the direction of rotation. Therefore, the contact area of the circumferential surface of the bonding jig 4. 3 with the copper member 4〇2 is increased, friction heat can be efficiently generated, and efficiency can be efficiently obtained. Steel and aluminum element 401. ^ The groove 403c is slightly inclined with respect to the direction of rotation, and the continuous groove 'is the body around the axis of rotation of the joint fixture - the circumference of the fixture ^ the fixture body 4转动3a rotation and movement, the inside of the groove is stored, so the amount of recession remaining on the surface of the copper element after the joint can be segmented (segment =

2036-5808B-PF 97 1270429 4 0 2 b South (s) is suppressed to a minimum. Here, the width w1 (mm) of the flat portion 403d between the groove 403c of the circumferential surface of the jig body 403a of the jig 403, and the width w2Um of the groove 4〇3〇 are set to satisfy the following conditions. :, and w2S3, and 0.67$wl/w2S5.00. When the flat portion 403d and the recess 4〇3c are set as described above, it is possible to suppress not only the jig body 4〇3& which presses the jig 4〇3, but also the amount of press-fitting of the surface of the copper member 402, and the treatment of the jig 4〇3 The amount of frictional heat generated by the body 403a is also large, and efficient bonding can be performed. Further, the groove 403c of the circumferential surface of the jig body 403a of the jig 403 is formed to be inclined in the rotational direction of the jig body 4〇3a, and the inclination angle Θ is set to 〇·5 to 2·0. . In Fig. 50A, the lanthanide line shows a line parallel to the direction of rotation. At least two grooves 403c are formed in the width direction of the entire circumferential surface of the jig body 403a. When the inclination angle 0 and the number of the grooves 403c are set as described above, the plasticized metal accumulated inside the groove 403c is considerably continuous along the rotation and movement of the jig body 4〇3a φ of the joining jig 403. The width direction of the jig body 403a is sequentially sent out, and after the jig body 403a passes, almost no burr and dents remain on the surface of the copper member 402, and the mechanical load is also reduced. Further, when the groove 4 〇3 c ^ ^ & d ^ ^ 2 mm 〇Μ η ^ ^ ^ d of the circumferential surface of the jig body 403a of the jig 403 is joined, the plasticized copper member 402 is not The inner portion of the groove 4〇3C that is accumulated in the groove 4〇3C is smaller than the ▼ remaining on the surface of the copper member 402, so that efficient bonding can be performed. 2036-5808B-PF 98 1270429 In the above-described method, when the element 4 (n is overlapped with the copper element 4G2 and joined by frictional vibration), it is preferable to determine the rotation of the joint jig 403 (the jig body 403a) at the time of joining by the following formula (1). Circumferential rate R (m/min.): 250 $ 2000...(A) When the circumferential speed of the joining jig 403 is less than 25 〇m/n]in at the time of joining The heat generated by the frictional contact between the bonding fixture 403 and the copper component 4〇2 is too small, and the temperature of the overlapping surface (interface) of the copper component 402 and the component 401 is too low, resulting in poor bonding. When the circumferential speed of the joining fixture 4〇3 is greater than SGGGn^in, the heat generated by the frictional contact between the bonding fixture and the copper member 4〇2 is greater than necessary, not only for the bonding fixture. The driving energy loss of 403 becomes large, and the temperature of the copper element 402 in contact with the bonding jig is locally too high, causing plastic deformation of the portion, and the compressive stress of the bonding jig 403 is not sufficiently transmitted to coincidence. The surface (interface) causes a gap between the two components. Therefore, it can be understood that the joint jig 4 is engaged. 03 is rotated at a peripheral speed of 25 〇 to 2 〇〇〇 m/min, and the heat generated by the frictional contact between the bonding fixture 403 and the copper member 402 is just right, and the bonding can be performed well. 4〇1 coincides with the copper element 402 and the frictional vibration is engaged. When joining, the pressing force α (m) of the bonding fixture 403 (the fixture body 4 shirt) on the copper element 4〇2 is preferably of the following formula ( B) Find: 〇. 0 3 X t ^ a ^ 〇. 3 χ1τ·^ ·νν ·νν^ ^ f ___________ \ y —. One—.1..... where t is the thickness of the copper component in the overlap (m) When joining the jig 403 in the copper element 402, when the surface pressing amount 々 is less than 〇.〇3t, the overlapping surface (interface) of the copper element 402 and the aluminum element 401 2036-5808B-PF 99 1270429 The middle (3) residual gap causes poor joint. On the other hand, when the press-in amount α is larger than 〇·3ΐ, although the gap is not left in the overlapping surface (interface) between the copper element 402 and the aluminum element 401, the excessive joint jig is excessive. The amount of indentation of 403 will leave significant dents on the surface of the copper component 402, resulting in loss of components. Therefore, the interface 403 is in the copper component. The amount of pressing of the surface of the 402 is 〇: when 〇.〇3t or more and 0. 3ΐ or less, the compressive stress of the bonding fixture 4〇3 is just the value of the field. It can be understood that the copper element 402 and the aluminum element 401 can be When the φ coincidence portion (parent interface) is joined without a gap, the dent of the surface of the steel member 402 can be reduced. Further, when the aluminum tl member 401 and the copper member 402 are overlapped and frictionally vibrated, when joined, the joint is engaged. The traveling speed v (m/min) of the jig 4〇3 (the jig body 4〇3a) moving along the surface of the copper member 402 is preferably determined by the following formula (◦): °* 1 - V- K/ (5. 0xl07xt2)...............(where R is the circumferential velocity of the jig when joining (m/min.); t is the thickness of the copper component in the overlap (m). In the case where the circumferential rate of the joining jig 4〇3 at the time of joining becomes large, the heat generated by the frictional contact between the joining jig 403 and the copper member is also increased, and the traveling speed v of the joining jig 403 is high. At the same time, the coincidence portion can still maintain the temperature of - ^; and when the thickness of the steel member 4 () 2 becomes large, the 4 joint surface (cross. If the joint treatment is 罝. 403: when the traveling rate is too large, the temperature at the overlapping portion Reaching - the fixed temperature: 刖 s 'mouth 4 (10) has been smashed 'will lead to the ridge of the ridge. And when a good friction and vibration joint, the joint fixture 4 () 3 travel 2036-5808B-PF 100 1270429 Rate V, circumferential rate R, copper 侔 危 ^ ; ; ;; degree t must be adjusted to each other. And the experimental results confirm that R / hn 7 - κ / U · 0x10 xt) can be good Engagement. On the other hand, when the traveling rate V of the bonding process is too small, the bonding efficiency is lowered. The experimental results show that when the value of 01 $ V is satisfied, a good bonding efficiency can be obtained. When the main body 430a is fixed to the front end portion of the rotating shaft 4〇3b, it is a cantilever type joint jig 4〇3, and the width of the jig body 430a is set to 5 to 25 mm; When the width of the jig body 4 is greater than 25 mm, it is preferable that the jig body 43 is fixed to the intermediate portion of the rotating shaft 403b, and is a joint jig 4〇3 which is fixed on both sides. When the width of the jig body 43 is increased, the pressure acting on the jig 4〇3 causes damage to the rotating shaft 403b, which makes it difficult to press the circumferential surface of the jig body 43〇a vertically into the copper member 402. The problem of the surface 402a. The frictional vibration bonding of the metal member is not limited to the case where the aluminum member and the copper member are overlapped and joined, and can be widely applied to the re-engagement bonding between the metal members. After the mutual overlap, the joining jig can be pressed in. Further, the number of the overlapping metal members is not limited to two, and three or more. For example, in Fig. 51, three metal members are used ( The aluminum element 401 of the lanthanum system, the aluminum element 401 of the 1 000 series, and the copper element 402) are placed one on another, and the jig body 403a of the bonding jig 403 is pressed into the copper element 4 having the highest melting point among the three metal elements. On the side of 0 2, it is a frictional vibration joint. Here, in consideration of the fact that each metal component of the joint is to be set to a predetermined temperature, the deformation resistance of each metal component is transmitted to the compressive stress from the joint fixture. 2 036-5808B-PF 101 1270429 To the weight of 70 people of each metal, the influence of the communication efficiency of the face (parent interface) is better than the order of the two metal components according to the point of refining (here, The inscription of the reward system, please arrange the 5 yuan of the Shaoyuan, and press the jig to the metal part of the three metal parts (here the side of the steel element (4), and the frictional vibration joint. When the three metal components are copper, in the case of Lu and magnesium, it is preferable to overlap the steel component, the inscription component, and the town component, and the bonding fixture is dusted into the side of the copper component.

The line is frictionally joined. Metal Element Bonding Method 1 In the second embodiment of the metal element joining method of the present invention, a plurality of metal plates are vertically joined to a metal substrate to form a heat dissipating member for frictional vibration bonding. The 52nd to 52th drawings and the 53rd to 53th drawings are a series of front cross-sectional views showing the manufacturing method of the second embodiment of the metal component bonding method of the present invention, wherein the 52nd to 52th drawings show the component arrangement steps, The _53Α diagram shows the frictional vibration bonding step, and the 53rd diagram shows the spacer detachment step. Further, Fig. 54 is an exploded perspective view showing an embodiment of the jig for manufacturing a heat dissipating member of the present invention. In the present embodiment, first, as shown in FIG. 5, the fins 404 of the aluminum plate-shaped element are alternately arranged with the spacers 405 of the plate-like elements made of iron and are vertically disposed on the heat dissipating component. The fixture setting unit 412 for manufacturing the jig 41 is disposed on the component setting unit 412 by the box-shaped fixture main body 411 which is open from the top, as shown in Fig. 1 (5). The 2036-5808B-PF 102 1270429 is composed of a sliding platen 413, a closing bolt 414, a substrate fixing plate 4i5, and a spot tightening bolt 416. The component setting portion 412 is formed in a recessed portion inside the jig body 411; the closing screw 414 is a wall body that is perpendicular to the pressing plate 413, and the front end portion is fastened to the pressing plate 413. The lunar surface is located on the outer side of the wall of the fixture body 41丨; the substrate fixing plate 415 is mounted on the upper portion of the wall body of the jig body 411 in a direction parallel to the pressing plate 413; The inspection 416 is for fixing both ends of the base plate fixing plate 415 to the upper portion of the wall of the jig body 411. Here, each of the fins 404 and the spacers 405 are arranged side by side in the element setting portion 412, and the closing bolts 414 # are tightly held by the fixing of the pressure plate 413 to make the respective fins The sheet 4〇4 and the spacers 4〇5 are fixed to each other in close contact with each other. At this time, since the fins 4〇4 and the spacers 405 are all equal in height, the upper surface (base end surface) of each fin 4〇4 and the upper surface (base end surface) of each spacer 405 form a horizontal plane. Then, as shown in FIG. 52B, the substrate 406 of the plate-shaped element made of copper and the substrate fixing plate 415 above it are mounted on the upper surface of each of the fins 404 and the spacers 405 of the element setting unit 412. The fins 4〇4 and the upper portion (base end portion) of each of the spacers 405 are fitted into the recesses 415a formed on the lower surface of the substrate fixing plate 415, and the fins 404 and the spacers 405 are fixed so as not to be opposed thereto. The length direction (the direction perpendicular to the paper surface) moves. Furthermore, in this state, the screw holes 415b at both ends of the substrate fixing plate 415 are screwed toward the screw holes 41 la on the wall of the fixture body 411, and the fastening bolts 416 are tightened to fix the substrate 406 to the fins. 4 and spacer "upper. Again, although not shown in the drawings, it is necessary to fix the substrate 406 so that it does not move 2036-5808B-PF 103 1270429 in its width direction (left and right direction of the paper). The base end surface of the fin 404 and the spacer 405 is in direct contact with the lower surface (one surface) of the substrate 406, and the step of arranging the fin 404 and the spacer 405 on the substrate 406 is completed. The component arrangement step shown in FIG. 52B is not necessarily limited, and as long as the fins 4〇4 and the spacers 4〇5 are disposed at a predetermined position as shown in the figure, the order is not limited. Alternatively, for example, the fins 404 (or the spacers 4〇5) having a space therebetween may be disposed, after the substrate 4〇6 is fixed to the base end surface thereof, and finally at a 404 (or interval) A spacer 4〇5 (or fin 404) is inserted between the objects 405). As shown in Fig. 53A, the circumferential surface of the jig body 4〇3a of the joining jig 4〇3 which is rotated at a high speed in the circumferential direction about the rotation axis 4 is vertically pressed to the other surface 206a of the substrate 406, and The bonding fixture 4〇3 is moved along the other surface 406a of the substrate 406 to bond the fins 4〇4 to the substrate 406. The circumferential surface of the jig body 403a is formed with the same groove as the first embodiment. 403c. This %, because the melting point of copper constituting the substrate 406 is higher than that of the fins 4〇4, the temperature at the interface between the fin 404 and the substrate 406 rises to the temperature necessary for bonding (eutectic temperature: 5 muscles). At the time of the substrate 4〇6, the high deformation strength can be maintained, so that the compressive stress of the bonding jig can be efficiently transmitted to the interface and the high-strength bonding without gap between the Korean film 4G4 and the substrate can be performed. _ 'Because the melting point of the iron constituting the spacer 405 is higher than the aluminum constituting the fins 4〇4 2036-5808B-PF 104 1270429 and the copper constituting the substrate 406, the circumferential rate and the traveling rate of the bonding jig 403 are set at an established value. In the range, the spacer 4〇5 does not overlap with the fin 4〇4 and the substrate 406 In combination, the substrate 4〇6 and the fins 4〇4 can be easily joined. Finally, the closing bolts 216 of the jig 410 for heat dissipation element manufacturing are loosened, and the substrate fixing plate 41 5 is removed from the jig body 411. And the locking bolt 414 is loosened, and the fixing of the fin 413 and the spacer 405 is released. As shown in FIG. 53B, the substrate 406 is moved upward. Thus, only _ is bonded to the substrate 406. The fins 404 are moved upward, and the spacers 405 are left in the element setting portion 412 of the jig 41 for heat dissipation element manufacturing. Thus, the spacers 405 can be simply removed in the spacer removing step, and the heat dissipating member 45A as shown in FIG. 55 can be manufactured, wherein the heat dissipating member 450 is composed of a plurality of aluminum fins 4 spaced apart from each other. 4 is erected to one surface of the copper substrate 406. According to the above method, since the spacers 405 are respectively disposed between the fins 404, the fins 4〇4 can be properly spaced from each other, and the fins 4 which are mutually spaced apart at a predetermined interval can be determined. The collocation position of 〇4. Further, the spacers 405 reinforce the fins 4〇4, and the frictional stress bonding step does not cause bending stress to act on the fins 4〇4, and the thickness of the fins 4〇4 can be made very thin. Moreover, if the thickness of the spacers 4〇5 is changed, the arrangement interval of the fins 404 can be arbitrarily changed, and when the height of the fins 4〇4 is changed more than once, the thickness of the thin plate and the height of the plate are particularly high. Each fin month 4〇4 is erected to a surface of one of the substrates 406 at a short interval, and can be manufactured with a high height/space ratio (for example, height/interval, over, step 450. Of course, the spacer 405 is not limited to Metal, considering the strength, 2036-5808B-PF 105 1270429 processability and other factors, you can also use ceramic pot or any other material; can also be suitable to determine the shape of the spacer 4〇5. When the respective slabs 404 are disposed on one surface of the substrate 4〇6, the base end faces of the spacers 4〇5 may not be in contact with the surface of the substrate 406, and the frictional vibration bonding step is considered. When the compressive stress from the joining fixture 4〇3 acts as the _-curvature stress of the 'II piece 4G4, in order to improve the reinforcement of the fin 404 by the spacer 4〇5, & ^, the car is better as this embodiment Generally, the 405 and the fins of the same door are prepared. 4〇4, the base end faces of the spacers 4〇5 are brought into contact with the surface of the substrate 406. While the bonding strength between the substrate 406 and the fins 4〇4 is improved, the heat dissipation performance of the heat dissipating component 450 is also improved. In the case, as shown in Fig. 56A: 'The rut is so that the movement of the bonding fixture 4〇3 (the fixture body 4〇3a) on the inside of the substrate 4〇6 (the other surface of the substrate 406) can be spread over the fins. The hologram of the base end face of the slab can be completely joined to the substrate 4 〇 6 from the slab fins 404. (The areas indicated by oblique lines in the 56th to 56Cth drawings indicate the bonding jig 403 In the other way, when the reduction of the joint cost is emphasized, for example, as shown in Fig. 56, the joint jig 4〇3 can be moved, and the base end faces of the fins 4G4 are not spread over the entire range. Further, when the substrate 406 is frictionally and frictionally bonded to each of the Korean sheets 404, and when the substrate 406 is joined to the spacers 4Q5, the spacers are detached from the step, although the spacers may be used in any manner. The property right is removed from the substrate 406 and the fins 404; the treatment of the bonding fixture 4〇3 When the width of the main body 4〇3a is smaller than the thickness of the wrong piece 404, as shown in Fig. 5, it is preferable that the trajectory of the substrate 406 and the spacers 405 are not joined (in the figure, each 2036-5808B- PF 106 1270429 is a region directly above the fin 404) to move the bonding jig 4〇3, and only the fins 404 are in contact with the substrate 406, and the spacers 4〇5 are not in contact with the substrate 406. Alternatively, as in the above-described embodiment, when the spacer 4〇5 having a melting point higher than the melting point of the fin 404 and the substrate 4〇6 is used, it is independent of the movement of the bonding jig 403, and the intervals are When the object 4〇5 is not bonded to the substrate 406 and the fin 404, even after the bonding, the spacers 405 are not bonded to the substrate 406 and the fins 404, and the procedure for removing the spacers may be omitted. And it can reduce manufacturing costs. Further, when the other surface 4〇6& of the substrate 4〇6 remains large indentation due to the compressive stress of the bonding jig 403, the surface 406a of the substrate 406 can be cut to a predetermined thickness, and a beautiful appearance can be obtained. The heat dissipating component 45〇. Further, in order to simplify the frictional vibration joining step, as shown in Fig. 57, a joining jig 403 in which a plurality of jig bodies 403a are fixed at a predetermined interval around the rotating shaft 403b may be used instead of the jig 4? . At this time, the frictional vibration joint can be applied to a plurality of regions at the same time, and the time required for the joint can be shortened, thereby improving the efficiency. When the front end surface of each of the fins 404 of the heat dissipating component 450 manufactured by the above method is further joined to the other substrate 406', as shown in Fig. 58, the fins 4 which are spaced apart from each other can also be formed. 4 frictional vibrations are respectively bonded to the heat dissipating elements 450 of the substrates 406, 406'. The heat dissipating element 45A shown in Fig. 58 has the same manufacturing sequence as shown in Fig. 59A, and the spacers 4〇4 which are spaced apart from each other are placed between the spacers 4 0 5 ' The both ends f of each of the fins 4 are arranged with the substrates 4G6 and 4G6, respectively, and the bonding jig is biased, 4〇3 pressure 2036-5808B-PF 107 1270429 to the back surface of the substrate 406 (the upper side in the drawing), and The back surface of the substrate 4〇6 (the lower side in the drawing) is simultaneously subjected to frictional vibration bonding. At the end, each of the spacers 405 is taken out from the side (the direction of the vertical paper). The second aspect of the manufacturing sequence of the heat dissipating component 450' is as shown in FIG. 59B. The fins 404 spaced apart from each other are placed in the spacers 405, respectively, and then at the ends of the fins 404 (in the drawing) The upper and lower ends of the substrate 406, 406' are respectively disposed on one side of the bonding jig 403 to the back surface of the substrate 406 (the upper surface in the drawing) for frictional vibration bonding. After that, the arrangement relationship of the respective elements is maintained, and the fins 404, the spacers 405, the substrate 4〇6, and the substrate 406' are reversed upside down. As shown in FIG. 59C, the bonding jig 403 is pressed down on the other side to On the back surface of the substrate 406 (the upper surface in the drawing), the frictional morning connection a is made, and finally, the spacers 405 are taken out from the side surface (the direction perpendicular to the paper surface). Heat dissipation τ yak 450, (5) Manufacturing sequence (4) Three states 6 〇 A diagram, each of the mutually spaced fins 404 is placed between each spacer 4 〇 5, at only one end of each fin 404 ( The upper end of the drawing) is disposed on the substrate 406' on the side to press the bonding jig 4{) 3 down to the back surface of the substrate (the upper surface in the drawing) for frictional vibration bonding. After that, the arrangement relationship of the components is maintained, and the fins 404, the spacers 405, and the substrate 4〇6 are vertically inverted. As shown in the hidden diagram, the other ends of the fins 404 (the upper end of the figure t) are disposed. The substrate 406, as shown in Fig. 60C, is pressed on the other side to the back surface of the substrate 4G6, w (the upper surface in the drawing) for frictional vibration bonding. In the end, the 4th order of each spacer is taken out by the side.

2036-5808B-PF 108 1270429 Political element 4 5 0; Ρ · · 川 皮 皮 α α α α α α α α α α α α α α α α α α α α α α α α α α α α α α α α α α α α α α α α α α α α α α α α α α α α α α α α α α α α α α α α α α α α α α α α α α α α α α Each of the spacers 4〇5 is placed in between, and the substrate side is disposed only at one end of each of the fins 404 (the upper end of the drawing), and the bonding jig is turned down to the substrate on one side. The back side (the upper part in the drawing) is used for frictional vibration bonding. Next, as shown in Fig. 60, the substrate 406 and the fin 404 are privately moved to the Bumeng door, and the substrate 405 is taken out.

The heat dissipating component 450 is completed first. After that, the spleen and the L & silly heat sink element 450 are reversed up and down, as shown in the figure 60F, the spacer 405 is placed between the respective sheets 404 at the long key η, and the spacers 405 are respectively placed on the fins 404. The other bucket, the mountain force ^ (the upper end in the drawing) is arranged with the substrate 406'. Further, as shown in Fig. 6g, the force H y α jin does not press the bonding jig 403 down to the back side of the substrate 406' (the upper side in the cymbal type) on the other side for frictional vibration bonding. At the end, each spacer 4〇5j is cut out from the side (the direction of the vertical paper). Metal Element Bonding Method-3 The metal component of the present invention is joined to the side of the MU _ _ a _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ Instead of using the heat dissipating element 410, a spacer jig 420 is used instead. As shown in Fig. 61A, the spacer jig 420' is a jig having a comb shape in which the tip end portions (lower end portions in the drawings) of the spacers 405 are connected to each other. In the component arrangement step, after the spacers 405 of the spacers are placed upside down and fixed, as shown in FIG. 61β, the respective fins >} 404 are inserted between the spacers 4〇5, respectively. Further, as shown in the figure, the upper surface (one surface) of the upper (base end) side of each fin 404 is contacted to fix the substrate 406. The order of Figures 61B and 61C can also be reversed, 109

2036-5808B-PF 1270429 After the substrate 406 is fixed to the upper surface of the spacer jig 42, the spacers 4〇5 are inserted from the side surface (the direction perpendicular to the paper surface). As shown in Fig. 61D, in the subsequent frictional vibration bonding step, the bonding jig 403 is pressed onto the upper surface (the other surface) of the substrate 406, and the substrate 406 is frictionally and vibrationally bonded to the respective fins 4〇4. As shown in Fig. 61, in the final spacer detachment step, the spacer 420 is removed by moving the substrate 406 and the fins 4〇4 bonded thereto upward. When the spacer jig 420 is used in the present embodiment, it is not necessary to use the heat dissipating member manufacturing process I 410, which is advantageous in that the procedure of disposing the spacer 405 can be omitted. Metal Element Bonding Method - 4 The fourth embodiment of the metal element bonding method of the present invention is approximately the same as the above-described second embodiment, except for the fin arrangement step in the element arrangement step and the subsequent substrate arrangement step. In the first fin arrangement step, as shown in FIG. 62A, each of the fins 404 is alternately arranged with each of the spacers & 4G5, and the component setting portion 412 disposed in the heat dissipating component manufacturing fixture 410 is erected. The base end faces of the gaps 16 are respectively below the base end faces of the fins 404, and the height difference between the base end faces of the spacers 405 and the base end faces of the fins 151 is not greater than the thickness of each spacer 405. . In other words, the heights of the respective pieces 4〇4 are respectively higher than the height of each spacer 405, and the range thereof is within the thickness range of the spacers 4〇5; the base end faces of the respective rotating pieces 404 are respectively protruded from the surface of the goods. And its range is within the thickness range of the spacer 405. 2036-5808B-PF 110 1270429 In the subsequent substrate arrangement step, as shown in Fig. 62B, the substrate 4 is placed on each of the fins 404 of the 70-piece setting portion 412. Then, as shown in FIGS. 62C and 62D, the base end portion 404a of each fin 404 (the portion protruding from each spacer 405) is bent and fixed by the action of the downward compressive stress toward the fin 404. The state of the L-shaped section. At this time, since the height of the base end portion 404a of the continuation 404 is within the thickness range of the spacer 405, the base end portions 404a of the bent fins 404 do not overlap each other, and are formed parallel to and against the substrate. Surface 0 of one surface (lower surface in the drawing) of 406 Next, as shown in Fig. 63A, the jig body 4 of the joining jig 4〇3 which is rotated at a high speed in the circumferential direction around the rotating shaft 403b The circumferential surface of 3 is pressed vertically to the other surface 406a of the substrate 406, and the bonding jig 403 is moved along the surface 406a of the substrate 406, and the base end portion 4A4a of each fin 404 is bonded to the substrate 4Q6. This is because the base end portion 404a of the fin 404 which is bent at right angles is formed into a surface of the surface of the substrate 406, and the contact between the substrate 406 and the fin 404 is increased as compared with the second embodiment. The area allows the two to be reliably joined. According to the present invention, even if the thickness of the fins 4〇4 is very thin, the heat dissipating member 450 in which the substrate 406 and the fins 404 are surely erected can be manufactured. Finally, as shown in Fig. 63β, the substrate 4 is folded. 6 moving upwards, only the fins 404 that have been bonded to the substrate 406 are moved upwards, and the spacers 405 are left in the manufacturing of the heat dissipating component to make the base end portion 4〇4 with bending. A heat dissipating member 450 bonded to a surface of the substrate 4〇6, 2036-5808Β-PF 111 1270429 is erected. An embodiment of a method of manufacturing a method of manufacturing a heat dissipating component. The second embodiment of the method is similar to the pre-formed fin constituent material 430. Next, the heat dissipating member of the present invention will be described. This embodiment is identical to the above-described metal member bonding, except that the cross-sectional recessed fin 404 is used.

In the first component arrangement step, first, as shown in Fig. 64a, the central portion of the thin plate (4) made of the alloy is arranged orthogonally to a spacer 4〇5 to make the two become inverted T-shaped as shown in Fig. 64B. In the groove of the central portion of the cross-sectional concave fin constituent material manufacturing fixture 440 #, the plate member 431 is bent, and the center portion is pressed while being inserted into the space M 4 () 5, as in the first As shown in Fig. 64C, a cross-sectional concave type Korean composition #43G in which the spacer 4〇5 is sandwiched is formed in the groove in the center portion. The Korean component is formed by a pair of right and left fins 404 and a base end portion 404a that connects the left and right pairs of the pieces 4 to 4 to form a cross-sectional concave shape.

And a plurality of spacers and 405 (four) sheets are placed between the pair of left and right fins 4〇4 as described above, and the fin members 430 are alternately arranged with the spacers 405', and As shown in Fig. 64d, the component setting unit 412 disposed on the jig 410 for heat radiation element manufacturing is erected. The fin constituent material 430 at this time is in a state in which the spacer 405 is placed between the pair of left and right fins 4〇4, and the base end portion 404a is in an upward state. Further, the spacers 4〇5 placed between the fin constituent members 430 are higher in height than the fins placed in the left ancient pair, and the height difference between the two is only the base end portion. The thickness of 4〇4a is such that the base end portion 404a of the constituent member 430 of the fin 2036-5808B-PF 112 1270429 forms a horizontal upper surface with the base end portion of the spacer 405'. Then, as shown in FIG. 64E, the substrate 4〇6 is mounted on the upper surface of each of the fin constituent members 430 and the spacers 405 which are disposed on the element setting unit 412, and is fixed. Here, when the base end portion 4 of the fin constituent member 43A and the spacer 405 are brought into contact with one surface of the substrate 406 (the lower surface in the drawing), the component arrangement step is completed. The component arrangement steps shown in Figs. 64A to 64B are not necessarily limited, as long as each of the substrate constituent members 430, the spacers 405, and the spacers 4〇5 are finally disposed at a predetermined position as shown in Fig. 64. Therefore, for example, the fin constituent members 430 having the cross-sectional concave shape formed in advance are arranged at intervals; and the spacers 4〇5 are respectively inserted into the pair of fins of the respective fin constituent members 430. Between the sheets 4〇4, each spacer 405' is inserted into each of the fin constituent members 43〇 at the same time; the step of arranging the substrate 406 may be performed at the same time, or the fin having the concave shape of the cross-section may be formed in advance. The sheet structure and the material 430 are arranged at intervals; next, the substrate is arranged; and finally, the spacers 405 are respectively inserted between the pair of fins 404 of the respective fin constituent members 43, and the spacers 4 are respectively disposed. 〇5' inserted into each fin structure 4 3 0 mutual In the subsequent joining step, as shown in Fig. 65, the circumferential surface of the jig body 403a of the joining jig 4〇3 which is rotated at a high speed in the circumferential direction around the rotating shaft 403b is vertically pressed to the substrate. The surface 406a' of the other surface of the crucible 6 is joined to the substrate 4〇6 by the bonding fixture 403 along the surface of the substrate, so that the base end portion 4〇4a of each fin constituent member 430 is bonded to the substrate 4〇6. -5808B-PF 113 1270429 At this time, since the base end portion 4〇4a of the fin constituent member 430 forms a face along one surface of the substrate 406, the substrate 406 and the fin 404 are added as compared with the first embodiment. With the contact area, the two can be surely joined. With this embodiment, even if the thickness of the fin 404 is very thin, the heat dissipating member 45A in which the substrate 406 and the fins 404 have been reliably erected can be manufactured. As shown in FIG. 65B, when the substrate 406 is moved upward, only the fin constituent members 430 bonded to the substrate 406 are moved upward, and φ is left for the heat dissipating members. The component setting unit 412 of the jig 41 can be manufactured to have a fin structure The base end portion 404 of the material 43 is erected to the heat dissipating member 45A bonded to one surface of the substrate 406. In the above embodiment, the so-called frictional vibration joint using the bonding jig 4〇3 is taken as an example. Although the invention is not limited thereto, for example, the method of heating and pressurizing is not limited to pressing the rotating joining jig 403 onto the side of the metal element having a higher melting point, and the resulting friction is generated. It is said that the rubbing heat and the compressive stress are transmitted to the interface of the metal element and the like, and the non-contact such as electromagnetic induction, the side of the metal element having a higher melting point, and the heating and pressurization of the interface between the metal elements can also be used. the way. The examples are shown below. As shown in Figs. 48A to 48C and Figs. 49A to 49C, the frictional vibration bonding is actually carried out, and the copper plate (copper plate) and the aluminum alloy (A1 〇5〇) plate (aluminum plate) are superposed and rotated at a high speed. The circumferential surface of the joining jig is pressed against the surface of the copper plate and moved. The thickness of the copper plate is '4mm, .. wide and the length is 100mm, the thickness of the aluminum plate is 〇·5ιμι, the width is 7〇_, and the length is 1〇〇匪. 2036-5808B-PF 114 1270429 The jig has a diameter of 120 coffee and a width of 24_'. The number of rotations of the jig is 2〇〇〇RPM (circum rate is about 15〇7m/min), and the travel rate is 〇·75m. /min 〇Example 1 Set the width w1 (mm) of the flat portion of the circumferential surface of the joint jig, the groove width w2 (mm), the width of the flat portion / the groove width ratio, and the 'joint quality' appearance, The experimental results of the mechanical load are shown in Table 5. Table 5 Plane width wl (mm) Groove width w2 (mm) wl / w2 Embodiment 1 - 1 1 1 1 Example - 1-2 2 1 2 Example 1-3 3 1 3 Example 1 - 4 5 1 5 Example 1 -5 Γ 2 Γ 3 0. 67 Example 1 -6 3 3 1 Example 1-7 4 3 1.33 Comparative Example 1-1 7 1 7 _Comparative Example 1 -2 1 3 0.33 0.5 &lt; Appearance: ◎: Good / △: Multi-cutting powder / χ: More burrs <joint quality> ◎: Small load / 〇 · · Motor specified conditions below △ • Motor specified conditions or more X · · Motor stop due to continuous use Groove depth (mm) Bonding quality Appearance mechanical load ◎ △ ◎ ◎ ◎ ◎ ◎ ◎ 〇 ◎ ◎ ◎ ◎ - * ----- ◎ ◎ ◎ ◎ ◎ ◎ ◎ ◎ XX L3ZI X ◎ From Table 5, δ W1 /W2 is too small (Comparative Example 丨_2), because the surface condition of the copper plate is similar to that of the joint fixture, the friction heat generated by the joint fixture is large, the mechanical load is small, and after the joint The amount of depression remaining on the surface of the copper plate becomes large and the appearance is poor, and the joint is made. The mouth is also poor. On the other hand, when wl/w2 is too large (comparative example U, because έ is similar to the case of using a joint jig with a flat surface. The amount of production will be small, 2 2036-5808 Β-PF 115 1270429 The pressing force of the press-fitted copper plate surface is good, the mechanical load will be too large. It must be increased to make the appearance not

The groove is opposite to the direction of rotation, and the condition of the mechanical load is 2 - 2

Groove depth (mm) Number of grooves ——~~.___ Joint quality D_ _ Appearance Mechanical load 8 LIP~ —--- ◎ —3 1 ~@~ ◎ 2 ◎ ◎ △ ◎ 1 X X cum ^xj isH

b, and 1 Q (Embodiment Bub 7), very clear:, and uw &quot; heart 5.0. The amount of the intrusion into the surface of the copper plate is: not only. It can suppress the dust of the joint fixture and the mechanical load will be smaller. In the second embodiment, the joint is efficient. After setting the inclination angles and the number of grooves of the circumferential surfaces of the different jigs, the joint quality test results are shown in Table 6. Only the width of the comparative fixture is set to l〇mm. Table 6 Groove Tilt Angle - θ (.) Example Inter-Examples Example 2-3 j Γ 2 Comparative Example 2-1 3, ϋ ϋ only, μ. 艮野/入•不〈 <Noisy, 〉◎・Good/△ ··Cleaning powder/χ················································································ The stop is shown in Table 6, when the inclination angle of the groove is less than 0 5 . At the time (Comparative Example 2-2), the mechanical load is small, and the plasticized metal accumulated inside the groove cannot be sequentially sent out along the width direction of the joining jig, and the burr remains on the surface of the copper plate after the jig is passed ( bUrr), which makes the appearance poor, on the other hand, when the inclination angle of the groove is larger than ^0. At the time of the comparative example, the discharge 1 becomes large and the appearance is poor, and the dents remaining on the surface of the metal member 2036-5808B-PF 116 1270429 are increased, and the mechanical load is increased. IG· 5~2· 〇° (The disadvantages of the embodiment can be obtained well at an inclination angle of 2 -1 to 2 - 3 in the groove), and it is obvious that there is no upper joint. Considering the width of the joint jig, the joint engagement is considered. In the entire circumferential surface of the jig, at least two grooves are formed. In the case of the dice, the number of the grooves is 0, which indicates that there is no π 锝 向 接合The groove is inclined in the direction. Embodiment 3 After setting the depth of the groove of the circumferential surface of the different jig, the experimental results of the joint quality, appearance, and mechanical load are shown in Table 7. Table 7 眚 You I VI ~ concave Groove depth (mm) Π ^ _ Plane width wl (mm) w2 (mm) 0 (°) (mm) [¥¥ Quality appearance "Mechanical shellfish JL Example 3-2 U. 0 0.4 Ml·«月◎ Δ Μ ΛΌ ◎ Example 3-3 0.8 〇 0.1 ～ 0.2 ◎ ◎ ◎ Example 3_4 1.2 2 1 0.5 ◎ ◎ 〇 Comparative Example 3-1 0.2 ◎ Δ Comparative Example 3_2 2 ◎ XX Comparative Example 3-3 0. 3-0. 5 <joint quality> ◎ &amp; good / χ "bad -------- ----~--, _ « XX ◎ 〈 外观 外观 外观 外观 外观 外观 外观 外观 外观 外观 外观 外观 外观 外观 外观 外观 外观 外观 外观 外观 外观 外观 外观 外观 外观 外观 外观 外观 外观 外观 外观 外观 外观 外观 外观 外观 外观 外观The use of the motor to stop is shown in Table 7. When the depth of the groove is less than 〇3〇mm (Comparative Example 3-1), the plasticized metal accumulates inside the groove, causing the friction heat generated by the joint fixture to occur. The amount is reduced, and the joint is not sufficient; on the other hand, when the depth of the groove is larger than 1.2 mm (Comparative Example 2-3), the surface condition of the copper plate will be similar to the amount of friction heat generated by the joint. Large and mechanical load is small, the 2036-5808B-PF 117 1270429 of the jig has become larger, and the result is poor, and the result is poor. 3-3), because the amount of frictional heat generated by the puller/mouth is small, the joint σ must be increased, The amount of dust on the surface of the copper plate makes the appearance poor, and the mechanical load is too large. The depth of the groove is 〇, 30~〗 1 / 2 mm a, obviously there will be no such defects, you can get Good bonding. Next, an implementation form of the meteorite enemy group of the present invention will be described. Metal component bonding method

First, a first embodiment of the metal element bonding method of the present invention will be described. Here, the joining of the inscription element as the first metal element and the copper element as the second metal element will be described as an example. Here, as an example of the first metal element and a copper element as an example of the second metal element, the first embodiment of the metal element connection method of the present invention will be described first. 68A, C is a view showing the order of frictional engagement of the metal element joining method of the first embodiment, wherein the sixth through the 68th is a front cross-sectional view and the 68th is a side view of the 68th. The 69A to 69C drawings are a series of sectional views showing the process of plastic deformation of the overlapping portion of the aluminum 7L member and the copper member in Figs. 68a to 68c. The figure is a partial enlarged view showing the jig of the 68B and 68C drawings. In the metal element bonding method, first, as shown in Fig. 68A, the Ilu element 501 and the copper element 502 are placed in surface contact with each other, and are fixed by a jig not shown in the drawing. Next, as shown in the kitchen of the 68B 18C, the joint jig 5〇3 2036-5808B-PF 118 1270429 /, which is rotated at a high speed in the circumferential direction at the circumferential speed R, is perpendicular to the circumferential surface of the body 5〇3a. Pressing the surface of the copper element 5〇2 to the core of the copper element 5〇2 and moving the bonding fixture 503 along the surface 5G2aj of the copper element 502 to re-engage the bonding element 501 and the copper element 5Q2: The front end portion of the shaft 5〇3b is formed by fixing the disc-shaped jig body 5〇3a and the jig body 5G3a system &amp; : SKD 61 and the like, and the table φ 5 压 with respect to the press-in copper member 5G2 The direction of travel 'the fixture body 503a is sent to the rear direction along the rotating vehicle 5

The circumference of the rotation. As shown in Fig. 69A, the circumferential surface of the jig body 5〇3a is rotated at a high speed in the circumferential direction with a certain amount α(Π1) pressed into the surface 502a of the copper member 502, and along the surface 5 of the copper member 502. 〇 2a moves. By the pressing of the jig body 503a on the surface 502a of the copper member 502, the gap between the overlapping portion of the aluminum member 501 and the copper member 5〇2 disappears; and the jig body 5〇3a and copper are rotated by high speed. The vibration generated by the contact of the element 502 splits and breaks the oxide film of the overlapping surface of the aluminum π piece 501 and the copper element 5〇2; and as shown in Fig. 69B, the predetermined condition of the copper element 502 in contact with the jig body 503a The region and its adjacent region, and the predetermined region of the aluminum member 501 adjacent to the region, are heated by the heat generated by the frictional contact between the jig body 5〇3a and the copper member 502, and exhibit a plasticized (fluidized) solid. Phase state. As a result of the above, the copper member 502 and the aluminum member 501 flow and diffuse at the mutual interface, and plastic deformation starts from the original surface. After the jig body 503a of the jig 503 is passed, it is cooled. As shown in Fig. 69C, the 'Ming element 5 () 1 and the valve element 5 are loosely engaged with each other and the 4 joint body: [〇2036-5808B- PF 119 1270429 on the surface 502a of the copper member 502 of the joint body J, as shown in Fig. 69c, the body 503a is used to load the surface 502a under compressive stress and

Further, in the joint body j, among the overlapping faces of the aluminum member 5〇1 and the copper member 5〇2, the plastically deformed aluminum member 5〇1 and the copper member 5〇2 are undulated and occluded to each other, and solidified. A joint surface S having a concave-convex shape. In the above-described joint J, the copper member 502 and the aluminum member 5〇1 are surely joined by the joint surface s. The segment 5 〇 2b formed on the surface 502 a of the copper member 5 〇 2 by the compressive stress of the bonding tool 503 is preferably the copper member 5 after the bonding between the aluminum member 5 〇 and the copper member 502. The surface 5〇2&amp; of 2 cuts off a certain thickness and smoothes it. Here, considering that the bonding jig 5〇3 is pressed in from the side of the aluminum member 5〇1, the melting point of the aluminum member 501 is lower than the melting point of the copper member 5〇2, and the aluminum member 5〇1 and the copper member 5 0 2 When the coincident surface is more than C) necessary for bonding, the deformation strength of the aluminum component 5〇1 is derived from the pressure of the bonding fixture 503. The right-handed push temperature (eutectic temperature 5 4 8)

2036-5808B-PF 120 1270429 Bonding of strength. The joint jig 5 03 ' used in the metal element joining method of the present embodiment is not shown in Fig. 70. The circumferential surface of the jig body 5〇3a is formed with a groove 503c approximately in the rotational direction. By using the metal member bonding method of the bonding jig, the contact area of the circumferential surface of the bonding process and the surface 5023 of the copper member 502 is increased, the frictional heat can be efficiently generated, and the heat can be efficiently and efficiently The copper element 5〇2 is bonded to the aluminum element.

In the joint jig 503, the groove 503c is a slightly inclined and continuous groove with respect to the rotational direction, that is, at the periphery of the rotational axis 5_ of the jig 5 () 3 along the circumferential surface of the jig 5G3. The contour is formed by a spiral trajectory. By the use of the metal member joining method of the joining jig, the groove 5〇3 is accompanied by the rotation and movement of the joining jig 503. The plasticized metal accumulated in the inside is sequentially sent in the width direction of the bonding jig 5〇3, so that the amount of recessed (the height of the segment portion 402b) remaining on the surface 5G2a of the joined copper member 5〇2 can be suppressed. To a minimum. Here, in the groove 503c of the circumferential surface of the jig body 5〇3a of the jig 503, the width of the plane portion _ between the grooves 503c and the width W2(_)' of the groove 503c are preferably set. To meet the following conditions: 1SW1S5, and 1$W2$3, and 〇.67swl/w2g5 〇〇. When the flat portion 503d and the recess 503c are set in this manner, it is possible to suppress the pressing of the jig main body 503a of the joining jig 5〇3 into the surface 5〇2a of the copper member 5〇2, and the jig of the jig 503. The amount of frictional heat generated by the body 503a is also large, and the groove of the circumferential surface can be joined to the jig 503, and the jig body 503a 2036-5808B-PF 121 1270429 (10) c' is formed in the direction of rotation of the inclined material body 5G3a, and the inclination angle Θ#乂好 K is 0 5~2 (). The width of the entire circumferential surface of the household coffee bean a is also joined in the tool (10). In the direction, it is preferable that at least two grooves are formed in the mouth. When the inclination angle θ and the number of the grooves 503c are set as described above, the rotation and movement of the jig body 5〇3a of the joint jig 503 are accompanied by the groove 敝The plasticized metal accumulated in the interior is sent in a continuous manner along the width direction of the center of the body 5 of the treatment body. 'The fixture body 5〇3a passes, and then there are no burrs (b town) and dents remain in the hands. The surface of the copper member 5〇2 also reduces the mechanical load. Moreover, the fixture body 5 of the bonding fixture 503 The depth d of the groove 5〇3c of the circumferential surface of 03a is set to 〇. 3〇]· 2_. When the depth d of the groove 5〇3c is set as such, the plasticized copper component 5Q2 does not accumulate the core groove (10) The inside of the copper element 5. After the bonding, the amount of depression of the surface 5〇2a of the copper member 5 becomes smaller, and efficient bonding can be performed. In the above method, the element 5〇1舆 copper element 5〇 When the two are joined together and the vibration is engaged, it is preferable to determine the circumferential speed at which the joining jig 503 (the jig body 503a) is rotated by the following formula (1). ·· 250 $ RS .......... .........(A) When the circumferential speed of the joint/portion 5 03 at the interface is less than 25〇m/min, the frictional contact between the joint fixture 503 and the copper element 5 D ^ The heat is too small, and the temperature of the overlapping portion of the copper member 502 and the inscription element 5〇1 is too low, and the V-to-interface is poor. In the other aspect, 'the circumferential speed of the joining jig 5〇3 when joining is greater than 2 mm/min' The heat generated by the joint treatment will be greater than necessary, not only to make the drive energy of the joint 2036-5808B-PF 122 1270429 fixture 503, and the loss will become larger. Make The temperature of the copper member 502 which is in contact with the jig 5〇3 is locally too high, causing the portion to be plastically k-shaped, and the compressive stress of the bonding jig 5〇3 is not sufficiently transmitted to the overlapping portion, resulting in a gap between the two members. There may be a gap. Therefore, it can be understood that when the joining jig 503 is rotated at a peripheral speed of 25 〇 to 2 〇〇〇 m/min, the heat generated by the frictional contact between the joining jig 503 and the steel member 5Q2 is just right. 'And can do a good joint. φ and 'when the element 501 and the copper element 502 are overlapped with each other and frictionally vibrated, the pressing amount α (m) of the bonding jig 503 (the jig main body 5〇3a) on the surface 502a of the copper element 5〇2 is engaged at the time of joining. Preferably, it is obtained by the following formula (B): 〇. 〇3xt^ a ^ 〇. 3xt...............(B) where t is the copper component in the overlap Thickness (m). When the joining jig 503 is less than 0· 〇 3t in the press-fitting of the surface 502a of the copper member 502, a gap remains in the overlapping portion of the copper member 502 and the aluminum member 501, resulting in poor bonding. On the other hand, when the press-in amount α is larger than I 〇·3t, the gap between the copper element 5〇2 and the aluminum element 5〇1 does not remain in the overlapping portion, and the excessively large bonding jig 503 is pressed in the copper. Significant dents remain on the surface of element 502, resulting in loss of components. Therefore, when the pressing amount α of the joining jig 503 at the surface 502a of the copper member 502 is 〇.〇3t or more and 0 3t or less, the compressive stress of the joining jig 5〇3 is just an appropriate value, and it can be understood The bonding can be completed without a gap between the overlapping portions of the copper member 5〇2 and the aluminum member 501, and the indentation of the surface 5〇2a of the copper member 502 can be reduced. Moreover, the aluminum component 501 and the copper component 502 are overlapped and the frictional vibration is connected to 2036-5808B-PF 123 1270429. When the δ is adhered, the bonding fixture 5 0 3 (the fixture body 5 0 3 a ) is along the copper component 502. The traveling speed of the surface movement is preferably as follows (◦: CC) 〇. 1 ^ R/(5. Oxl 〇7xt2) where R is the circumferential velocity (m/min.) of the jig when joining; t It is the thickness of the copper component in the overlap.

/ When the circumferential rate of the joining jig 503 is increased, the heat generated by the frictional contact between the jig 503 and the copper member 502 is also increased, and the traveling speed of the jig 5G3 is increased. If the thickness of the copper component 5〇2 becomes larger, it is more time-consuming to reach a certain temperature above the overlapped portion. If the 2-inlet rate of the bonding fixture is too large, it is coincident. If the temperature of the part reaches a certain temperature or higher, the 'joining jig 503 has passed' will cause a problem of poor bonding. When a good (four) rubbing engagement is performed, the traveling rate of the joining jig 5 () 3, the circumferential rate R, and the thickness t of the copper piece must be adjusted to each other. On the other hand, when the experiment is completed, it is possible to have a good connection. When the traveling rate v of the bonding jig 503 is too small, the bonding efficiency is lowered. As a result, it was confirmed that a good bonding efficiency was obtained when the full ^ (4) was obtained. ▲ Next, a second embodiment of the metal element bonding method of the present invention will be described. 71A to 71C are diagrams showing a joint jig used in the metal element joining method of the second embodiment, wherein the 帛71A is a perspective view, and the 71B, the claw is a second embodiment of the metal element joined to the nozzle. The bottom view of the ^. The 72nd to 7th is a series of oblique views showing other examples of the bonding jig used in the metal element bonding method of the second embodiment. 2036-5808B-PF 124 1270429. f 73A to 73B are sectional views of the series, showing the step of frictional engagement of the metal element joining method of the second embodiment. This metal 7G piece joining method is first the same as the metal element interface method of the first embodiment, and will be! The 70 pieces of 501 and the plate-shaped copper elements 5〇2 are placed in surface contact with each other (refer to the mth figure). In this metal element: bonding method, the following bonding fixture is used instead of the first implementation.

The bonding jig 5〇3 used in the bonding method of the metal element of the type (refer to Figs. 68B and 68C). As shown in Fig. 71A, the joint jig 504 used in the present metal element joining method has a disc-shaped jig body 5〇4a and a rotating shaft 5〇4b, and the rotating shaft 504b is fixed to the jig body 5上4&amp; upper surface (10). On the lower surface DS of the jig body 504a, a plurality of protrusions b are formed. The b-type of the Mastiff can be composed of abrasive particles such as diamond-1 ike carb〇n; dlc fixed to the lower surface. Further, the jig body 504a of the joint jig 504 may have a narrow groove in which the protrusion b is replaced. The fine groove G may be radially extended by a center of rotation on the lower surface DS as shown in Fig. 7A; or may be extended in a lattice shape on the lower surface DS as shown in Fig. 71C.

Further, the narrow groove G may be curved. For example, it may be formed as a scroll on the lower surface as shown in FIG. 72A, or may be arranged in a concentric shape as shown in FIG. 72B. A plurality of annular narrow grooves G 〇 and 'which are not shown in the drawing, the jig body 2036-5808B-PF 125 1270429 of the joint jig 5〇4 may also have the above-mentioned protrusions on the lower surface Ds. Curved rib (μ) (1) This rib may be formed as a wrap on the lower surface DS (refer to Fig. 71A): (SCro (1), or may be formed into a concentric shape. This second embodiment of the metal element joint In the method, as shown in FIGS. 73A and 73B, the lower surface of the cooker body 5〇4a of the joint _504 which is rotated at a high speed centering on the rotating shaft 5〇4b is pressed to the surface 2a of the copper member and joined. The jig 503 is moved along the surface 502a of the copper member • at the aforementioned travel rate V, and the aluminum member 501 is re-engaged with the copper member 502. ^ The fixture body 504a at this time, as shown in Fig. 73A, The surface Ds is pressed into the surface 5〇2&amp; of the copper member 5〇2 only by a certain amount α (m). The lower jaw rotates and moves along the surface 5〇2a of the copper member 5〇2, and the aluminum member 501 and the copper member 5〇2 are pressed by the surface 502a of the copper member 502 by the above-mentioned jig body 504a. The gap of the overlapping portion disappears; and the vibration generated by the contact between the fixture body 50 and the copper member 5〇2 rotating at a high speed _ splits the oxide film of the overlapping portion of the member 501 and the copper member 502; And as shown in Fig. 73B, the predetermined region of the copper member 502 in contact with the jig body 5〇4a and its adjacent region, and the predetermined region of the aluminum member 501 adjacent to the region, due to the jig body 504a and the copper member 502 The friction generated by the frictional contact is heated to a high temperature, exhibiting a plasticized (fluidized) solid phase state. As a result, the copper member 5〇2 and the aluminum member 5〇1 are plastically flowed on each other at the parent interface, and The original surface begins to be plastically deformed. The passing of the jig body 504a of the joining jig 504 is the same as that of the metal element of the first embodiment, and the pressure of the jig body 4〇4&amp; 2036-5808B-PF 126 1270429 :: Table of 5° 2 in copper components... On the top, a pair of shallow segments are formed (see 帛69C). In addition, the coincident face towel of the element component training and the copper component fertilizer is the same as the metal component joining method of the first embodiment, and is plastically deformed. The aluminum member 501 and the copper member 5〇2 are bonded to each other to be solidified into a joint of the cross-sectional concave-convex type, and the copper member 5〇2 is caused by the joint surface S between the copper member and the member 501. The aluminum component 5〇1 is surely joined (refer to Figure 69C).

Heat Dissipating Element and Method of Manufacturing the Same Next, a joint body J composed of an aluminum element 5〇1 (first metal element) and a copper element 5〇2 (second metal element) obtained by the above metal element manufacturing method will be described (please refer to 69C) The heat dissipating component manufactured. The figure is a perspective view of a heat dissipating component; the 74B to 74c and the 75th to 7th redundancy diagrams, and the manufacturing steps of the heat dissipating component shown in the drawing of the drawing. ° The heat dissipating component is used, for example, in a heat dissipating component for an IC, a heat dissipating component for a Peltier device, a heat dissipating component for a motor, a heat dissipating component for controlling a component, and the like, as shown in Fig. 7 The heat dissipating component _ has a heat dissipating component 508 in addition to the substrate 207 and the plurality of heat dissipating fins 5 8 8a; wherein the heat dissipating component 508 is arranged and erected on the substrate 507 by the heat dissipating fins 5 〇 8 &amp; The substrate 507 of the heat dissipating component 506 is made of a portion corresponding to the copper component 5〇2 of the bonding body J (please refer to FIG. 69C), and is formed by bonding on one surface of the substrate 5〇7. The portion of the aluminum member 5〇1 of the aforementioned joint body J is formed in the following order. Next, the manufacture of the heat dissipating element 506 will be described. In the private method, the aluminum member 5〇1 of the joint body J is forged. Processing, and a plurality of heat dissipating fins 508a are erected on the copper member 502 of 2036-5808B-PF 127 1270429. The forging die used in the forging process, for example, as shown in Fig. 74B, is exemplified by the lower forging die 509 and The upper forging die 51〇 is composed of The forging die 509 has an inner space 5〇9b, the opening shape of the inner space 509b is the same as the planar shape of the joined body j, and extends the shape to the flat bottom portion 509a; and the upper forging die 51 has the same forging with the lower portion The inner space 509b of the mold 509 is approximately the same shape, and a concave portion 51 having a shape formed according to the outer shape of the heat dissipation fin 508a is formed on the side of the lower portion 509a of the lower forging die 509. In the manufacturing method, first, as shown in Fig. 74B, the joined body j is disposed in the bottom portion 509a of the lower forging die 509. At this time, the joined body j is disposed such that the aluminum member 5〇1 faces the upper forging die. Then, the upper forging die 510 is pressed down to the inner space 5〇9b by the opening 5〇9c of the lower forging die 5〇9, as shown in the seventh figure, the aluminum element 510 is plastically deformed and enters the upper portion. Forging the concave portion 510a of the mold. Then, the upper forging die 51〇 is moved upward, so that the concave portion 51〇a of the upper forging die 510 is separated from the joined body; and the heat dissipation as shown in Fig. 74A is produced. Further, the manufacturing method of the heat dissipating member 506 is not limited to the above-described forging processing, and the cutting processing described below may be used. The manufacturing method is to cut the above-described joined body. A plurality of slits (SHt) are formed, and a plurality of fins 508a are erected on the steel member 502. The cutter body used in the processing is not exemplified by the support shaft 51 lb and a plurality of them arranged at equal intervals

2036-5808B-PF 128 1270429 The tool (CUtter) 511a. Each of the cutters 511a has a round cup shape, and its circumferential surface is respectively _ 刀 仏 仏 into a hard number of saw teeth not shown in the figure; and the support shaft 511b is used for supporting曰 曰 各 each tool 511 a, and > set the axial rotation.

In the manufacturing method of the heat dissipating member 5.6, first, as shown in Fig. 75a, the bonding body J with the upward direction of the Ming #5〇1 is horizontally carried on the support table not shown in the drawing, and is joined. A cutting tool 511 having a support shaft 5ub in a horizontal state is disposed above the body j. Next, the cutting tool 5 is pressed in the direction of the human body, and as shown in Fig. 75B, each of the cutters 5 is formed in a plurality of slits 5〇2c which are disposed at a plurality of intervals in the aluminum member 501 of the joined body. The heat dissipating member 5G5a is formed by dividing the inscription element 5〇1 by the plurality of slits 502c, thereby producing the heat dissipating member 506 as shown in Fig. 74A. In the above-described method of manufacturing the heat dissipating member 506, the aluminum element 501 is subjected to the forging process or the cutting process, and the above-described steps of arranging the plurality of heat dissipating fins 508a on the steel element 5〇2 are It is equivalent to the "third step" in the scope of patent application. Although the above description explains that the heat dissipating member 5 〇 6 having the fins 5 〇 8 a and the manufacturing method thereof are formed by forging or cutting the aluminum member 5 〇 1 of the bonded body, the heat dissipating member of the present invention is not limited thereto. Alternatively, as will be described later, the heat dissipating fin as the first metal element and the substrate as the second metal element may be frictionally bonded (the first-stage second embodiment of the metal element bonding method) ) Other heat dissipating components that are joined to each other. 2036-5808B-PF 129 1270429 Other heat dissipating elements and manufacturing method thereof Hereinafter, other heat dissipating elements and manufacturing methods thereof will be described. Here, the heat dissipating elements joined by the metal element joining method of the first embodiment described above and the manufacturing thereof are manufactured. The method is illustrated as an example. Figure 76 is a cross-sectional view showing other heat dissipating components. Figure 77 is a perspective view showing the heat sink tab in the heat element configuration shown in Figure 76. Fig. 78 is a perspective view showing the support jig used in the manufacture of the heat dissipating member of Fig. 76. No. ~

The figure is a sectional view of the system, showing the manufacturing steps of the heat dissipating component shown in Fig. 76. f 8GA to 8GD is a cross-sectional view and a perspective view of u, and shows a modification of the heat dissipating member shown in Fig. 76. As shown in FIG. 76, the heat dissipating member 512 described herein is a heat dissipating Korean chip 512a (first metal member) composed of a nameplate and a substrate 512b made of copper (the second metal component is in the heat dissipating member 512, A plurality of heat dissipation fins 512a are disposed on a surface of the substrate (10) and have a plurality of heat dissipation fins 512a arranged at a predetermined interval. The heat dissipation fins 512a disposed on the outermost ends of the substrate have a heat dissipation fin 512a. - The offset of the predetermined length (nine). The height of each of the heat radiating fins 512a is preferably set appropriately within the range of 8 to 22, and the length of the offset 〇s is generally -. The fins 512a can be more clearly seen with reference to Fig. 77. The IS material is extruded and formed into a L-shaped plate. The 512a can also be a flat plate. The material is formed by the bending of the L-shape, and the thickness (plate, thickness) of the one piece 512a is higher than that of the ridges, and the width w5 of the heat-dissipating piece 51 contacting the substrate 512b (please 2036-5808B-PF 130 1270429 refer to Figure 76) The wider the width, the more it can be lifted with the substrate 5 The bonding force, on the other hand, reduces the number of holes of the heat dissipation fins 51 that are erected on the substrate 512a, and reduces the heat dissipation area of the heat dissipation element 512. Therefore, in order to secure the bonding force of the heat dissipation fins 512a on the substrate 5i2b, The heat dissipation area can satisfy both of the above widths w5 and is preferably set within a range of 2 to 2 mm. Next, a method of manufacturing the heat dissipation element 512 will be described. First, a plurality of heat dissipation fins 512a are supported to respectively a given interval juxtaposed.

The method of holding each of the heat radiation fins 512a is not particularly limited, and the above-described support device is used as a support device for maintaining a plurality of heat dissipation elements at a predetermined interval, and the series is, for example, as shown in FIG. 78. a support member 51 3 formed by a plurality of slits (s1 i) which are inserted into the heat dissipation fins 512a at a predetermined interval and arranged in a direction, respectively, in the support device 513 After the slit 513a is placed in each of the heat radiating fins 512a, the support device 5 is fixed to a predetermined jig for heat dissipating element manufacturing. As shown in Fig. 79A, the jig 514 for heat dissipating element manufacturing has The open box jig body 51" and the closing bolt 514b. The closing bolt 514b is for fixing the holder 4 513 housed in the box jig body 5 j", and is screwed to the forming box The jig of the heat-fixing element manufacturing fixture is such that one side of the curved edge portion 512c of the heat-dissipating Korean piece 512a faces the upper side of the jig body 514, and the holder is: With '5 looking for a metaphor in the body The locking bolts 514b are locked, and the plurality of 2036-5808B-PF 131 1270429 heat radiating fins 512a in the fixture body 5 4a are fixed. Next, as shown in FIG. 79B, the substrate 512b is superposed on the orientation. The edge portion 512c of the upper heat dissipation fin 512a opened by the fixture body 514a. The substrate substrate 51 2b is fixed to the edge portion 512c of the heat dissipation fin 512a by a fixing jig not shown in the drawing. After the substrate 512b is overlapped with the remaining heat dissipation fins 512a, the heat dissipation fins 512a and 512b are joined by the metal φ piece bonding method of the first embodiment described above, and as shown in FIG. 79C, the rotation axis 5 is used. The circumferential surface of the jig body 5〇3a, which is rotated at a high speed in the circumferential direction, is vertically pressed to the surface of the substrate 512b, and the jig body 5〇3a is moved along the surface of the substrate 51 so that the fins 512a and At this time, since the melting point of the copper constituting the substrate 51 2b is higher than the aluminum constituting the heat dissipation fin 512a, the temperature of the overlapping surface of each of the heat dissipation fins 512a and 512b rises to the temperature necessary for the joining of the two ( When the eutectic temperature is 548^), the substrate 512b can still be protected. As a result, in the manufacturing method of the heat dissipating member 512, the compressive stress of the bonding jig 5〇3 can be efficiently transmitted to the overlapping portion of each of the heat radiating fins 512a and 512b, and The gap between each of the heat dissipation fins 512a and the substrate 512b is formed without gaps, and the heat dissipation fins 512a and 512b are joined to each other with high strength. Here, the metal element bonding method of the first embodiment is used, of course. The metal element bonding method of the second embodiment described above can also be used. After the heat dissipating fins 512a and the substrate 512b are joined as described above, the supporting device 513 is manufactured by the heat dissipating component. If you do not have any heat, the film 51 2 a and the substrate 512 b are pulled out of the supporting jig 513 by 2036. -5808B-PF 132 1270429 The manufacturing steps of the heat dissipating component 512 are completed.

In view of the above, the metal element bonding method of the present embodiment described above is used to bond the fixtures 5 〇 3, 5 0 4, 5 〇 5 by a plate-shaped copper element having a high sleek point (refer to pages 68B to 68C). Fig. 71A to 71C and 72A to 72B) are heated and pressurized, and the degree of coincidence of the ingrown element 5 01 and the copper element § 〇2 rises to the temperature necessary for bonding (eutectic temperature) At the time of 5 4 8 ° C, the copper member 502 can maintain its high deformation strength, and the compressive stress φ can be efficiently transmitted to the overlapping portion. Therefore, by the metal element bonding method, it is possible to easily form a high-strength joint without gaps between the aluminum element 5〇1 and the copper element 502. Further, in the method of manufacturing a heat dissipating element of the present embodiment, a bonded body J in which the aluminum element 501 and the copper element 502 (substrate) are joined by the above-described metal element bonding method is formed (refer to Fig. 69C); A portion corresponding to the aluminum element 501 of the bonded body is processed to form the heat dissipation fins 5 8 8a, or the heat dissipation fins 512 a made of aluminum and the substrate 5 i 2 b made of copper are bonded to each other to form a heat dissipation method. Element 512. Therefore, by the method of manufacturing the heat dissipating member 512, the device can be easily assembled as in the above-described metal element bonding method, and can be a high-strength joint without gaps between the heat dissipating fin 512a and the substrate 512b. Moreover, with the manufacturing method of the heat dissipating element, since it is not necessary to heat and maintain a vacuum in a vacuum furnace for a predetermined time, the fins 508a and 512a and the substrates 507 and 51 2b can be replaced (refer to FIG. 74A and FIG. Figure 76) Bonding can reduce manufacturing costs. Further, in the method of manufacturing the heat dissipating element 512 in which the heat dissipating fin 512a and the substrate 512b are joined by the above-described metal element 2036-5808B-PF 133 1270429, the dispersing method and the substrate (4) are overlapped each other to support the treatment. A plurality of heat sink fins 512a are supported by 513 (please = figure 78). Therefore, by the method of manufacturing the heat dissipating member 512, not only can the heat dissipating fins be accurately held, but also the positions of the heat dissipating fins can be determined to be separated from each other by a predetermined interval. In the manufacturing method, when the heat radiating fin 512a and the substrate 512b are joined by the above-described metal element bonding method, the heat radiating fins 512a are subjected to bending stress, and the heat radiating fins 512 &amp; are supported by the Iss 513. With the manufacturing method of the heat dissipating member 512, the thickness of the heat dissipating fin 512a can be considerably thinned. Further, in the manufacturing method of the heat dissipating member 512, the heat dissipating fin 512a and the substrate 512b are bonded by the metal element. At the time of joining, since the heat radiating fin 512a is reinforced by the supporting means 5 j 3 , the degree h5 of the heat radiating fins $ j 2a can be made larger. Therefore, the manufacturing method of the heat radiating element 5i2 can be manufactured. The heat dissipating component 512 having a high height/space ratio (for example, a height/interval of more than 20) is provided. The heat dissipating component 512 of this embodiment is heated and pressurized by the side of the hole of the substrate 51. The heat dissipating fins 512a and the substrate 512b are joined together. Instead of being heated as a general object, the side of the heat dissipating fins 512 &amp; is joined by heating and pressurization. Even in the case of a heat-dissipating Korean chip 512a having a complicated shape and structure, it can be easily fabricated and formed into a heat-dissipating element 512. As a result, the heat-dissipating element 512 can be disposed on the substrate 51. Has a large heat dissipation surface

2036-5808B-PF 134 1270429 A heat sink fin 5i2a having a complicated shape and configuration. The present invention has been described in terms of two or more embodiments, and the present invention is not limited to the above-described embodiments, and can be implemented in various forms. For example, in the present embodiment, when the steel element 5〇2 (the second metal element) is heated and pressurized, the joint jig 5〇3, 5. 4, _ reference 68B to 68C is used. Fig. 71A to 7ir, the 71A71C picture, and the 72A to 72B picture) are pressed to the copper element 502. In the mouth type, the metal element joining method of the present invention is not limited to the above-described contact method, and a non-contact method such as electromagnetic induction twisting may be used instead of the above contact method. Further, in the present embodiment, the τ is an example in which the aluminum element is used as the first metal element, and the copper element 5〇2 is used as the second metal element. However, the method for manufacturing the metal element joint-side heat dissipating member of the present invention and the monthly heat 7L member are not limited to the use of the material used for the melting of the MA '&quot;, and the metal elements having different explosion points can be widely used. . Further, the metal element of the first embodiment is joined to the meniscus of the jig body 503a, and the method of using the groove 5〇3c on the πΐϋ circumferential surface is taken as an example, and the °*503 of the present invention The 接合 接合 目 亦 亦 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 接合 。 。 503 。 503 503 503 503 503 503 503 503 503 503 503 503 503 /, in place of the above-described connection method of the metal element, the metal element bonding method is formed in the lower surface of the jig main body 504a, and the user/the lower surface DS is formed with the protrusion b and the fineness a &gt; The method of γ r · ^, , ', and the contact of the G can be used with the lower surface Ds A early, the 蜀兀 接合 接合 , , , , , , , , , , , 本体

2036-5808B-PF 135 1270429 Fixture, in place of the joint fixture 504 ° used in the joining method of the metal component, and the heat dissipating component of the present embodiment is a fin having a sectional shape of a l-shape. The film is exemplified, and the present invention is not limited thereto, and for example, a heat sink fin 512a having a cross-sectional shape as shown in Fig. 80A may be used. Further, in the heat dissipating member of the present invention, as shown in Figs. 80B and 80C, the heat dissipating member 512a may be a corrugate fin formed of a corrugated sheet material. Further, the waveform of the plate material is not particularly limited, and may be a triangular wave as shown in Fig. 8B, or may be a rectangular wave as shown in Fig. 8 (also shown as a heat wave fin 512a and a substrate). The joint portion of the 512b is an entire portion in contact with the substrate 512b by the hot fin 512a, and both ends of the corrugated fin are used as an example, or may be a part of the contact portion. Further, as shown in Figs. 80B and 80C. In the heat dissipation fin 512a, the heat dissipation fins 512a composed of one plate material are taken as an example, and the heat dissipation fins used for heat dissipation of the present invention are not limited thereto, and the eighth 〇β and 80C are formed. In the waveform shown in the figure, a plurality of bent sheets may be arranged side by side on the substrate, and the heat-dissipating fins not shown in the drawings may be combined with the respective sheets, and as shown in Fig. 8 In the heat dissipation fin 512a, the width W5 is preferably set within a range of 丨.2 to 2· 〇mni, and the surface roughness h5 of the heat dissipation fin 512a is preferably in the range of 8 to 16 mm. Further, in the heat dissipation fin 512a shown in FIG. 80B, the fin width p is preferably set to be 1· 5~2· 的mm range. Also, such as: _e, ^^'s film width p is better set in the range of j · 5~j. 8mni. Again, 2036-5808B-PF 136 1270429 The heat sink fins 51 2a of Takahashi h ς &amp;&amp; $ &amp; η Lee father is suitably set in the range of 8~1 6mm. This is a thin type of heat dissipation element, with fins 508a 512a (please refer to FIG. 74A and FIG. 3) as an example, and the heat dissipation of the present invention is not limited thereto, and may be as shown in FIG. 81D, and is used as a base of the first metal element. The 512|} is connected with a plurality of heat-dissipating columns as the first metal element |f5l2d. The cross-sectional shape of the heat-dissipating column is not limited, and the column and the corner column are all. The height of the heat-dissipating column 512d is preferably In the range of 20 to 40 mm, the arrangement interval P of the heat dissipation columnar body 512d on the substrate 51 is preferably in the range of h8 to 2·0_. Further, when the heat dissipation columnar body 512d is a cylinder, the diameter thereof is preferably large. 2_. Next, an embodiment of the sixth group of the present invention will be described. Figs. 81A to 81B are diagrams showing the first embodiment of the heat dissipating component of the present invention, wherein 81A picture shows a perspective view of 81β picture shows an exploded perspective view. Also,

Fig. 82A is a cross-sectional view taken along line AA of Fig. 81A, Fig. 82B is a cross-sectional view taken along line BB of Fig. 81A, and Fig. 82C is a bottom view of Fig. 81a. As shown in the above figures, the heat dissipating member 601A is composed of a substrate 602 and fins 603.基板 The substrate 602 is made of copper, and its width, length, and thickness are W6, L, and t, respectively. One surface 602a of the substrate 602 is thermally contacted with a heat sink (easp) 6〇4, and is thermally contacted with a cpu 6〇5 as a heat generating body. Further, the other surface 6〇2b of the substrate 602 is formed with a ridge 6〇2e having a thickness “, a width Ws, and a length Ls. The ridge attach is substantially the same as the width of the heat sink 604. Further, the ridge 6 〇 Length 2036-5808B-PF 137 1270429

Here, Ls is equal to the length L of the substrate 602' Ls < L. Each of the slabs 603 is made of a name, and is vertically erected to be bonded to the surface 6Q2bJ1 of the substrate 6G2. The two-paired tabs 6Q3 are interconnected at the base end portion 603a to form the fin constituents 6〇6. The fin constituent material _ a concave portion 6Q6a' having a shape corresponding to the ridges 6〇2c of the substrate 6〇2 is formed at a substantially central portion in the width direction of the bottom portion of the crucible, and when the fins are erected to the surface 6G2b of the substrate 602. Preferably, the rib 6 is completely connected to each of the fins 6〇3. In the heat sink element 601A, the heat generated by the CPU 605 is first transmitted to the substrate 602 via the heat spreader heat sink 604, and then flows to all the heat sinks 6 in all directions indicated by the arrows of the first figure. 〇3, and finally it is diverged into the air by natural cooling or forced cooling by a fan or the like. Therefore, the larger the thickness of the substrate 602, the easier it is to transfer the heat of the cpu6〇5 to the fins 603, and in this case, the weight of the substrate 6〇2 is also increased. Therefore, in the heat dissipating member 6〇u, the thickness book of the substrate 6〇2 is not increased in the body, and the aspect is increased only for the portion where the contribution of the (10) heat to the fins 603 is large. The thickness of the portion of the substrate 6〇2 is reduced, and the thickness of the portion of the substrate 602 is reduced, and the total weight of the substrate 602 is not changed, and the heat of the cpu 6〇5 is efficiently transmitted to the respective sheets 603. By forming the ridges 6〇2c on the substrate 6〇2, the heat flow in the arrow X direction in Fig. 82c is much larger than the heat flow in the direction of the arrow y, and the heat generated by the CPU 605 is efficient. The ground is passed to each fin month 6〇3. On the other hand, the entire weight of the substrate 602 is not double and the performance of the nozzle can be lifted, which means that the weight can be reduced without deteriorating the heat dissipation performance. 2036-5808B-PF 138 1270429 The point of view is that the ratio of the width to dryness tS (the aspect ratio) is preferably 5 to 3 〇 in the cross-sectional shape of the rib 6 〇 2 c; The height of the strip 602c + ts / the full height h6 of the heat dissipating component in which it is located is preferably 〇 1 丄 • u • · and it can be understood from the embodiment described later that when the thickness of the convex "c is relatively large, When the pressure loss is increased, the thickness of the rib 602c is relatively small, which is similar to the case where the thickness of the substrate is increased as a whole, and the meaning of forming 6. becomes smaller. An example of a method of manufacturing the heat dissipating element 601A will be described. First, a spacer/port/6 G 7 composed of a substance having a melting point higher than that of copper and aluminum is prepared. As shown in Fig. 8 3 A, the spacer jig is provided. In (10), the spacers 6〇7a are formed in a plurality of equal heights, and are arranged at equal intervals. The width of the gap 607b of each of the spacers (10) is approximately equal to the thickness of the fins 6G3. Each of the spacers 607a is formed with The ridges 6〇2c of the substrate 6〇2 are substantially the same in the shape of the recesses 6〇7C. A flat plate-shaped aluminum plate having a rectangular opening is formed into a concave shape in a cross-sectional shape, and a green sheet member 6 6 is formed. Next, in a manner of surrounding the spacer portion 6〇7a of the spacer jig 607, The side edges of the spacer jig 607 are inserted into the fin constituents 6〇6, that is, the fins 603 and 603 are respectively directed to the gaps 60 7b and 607b on both sides of the partition portion 6〇7a, and the base end portion 6〇 is 3a is located at the upper surface of the partition portion 6〇7a, and the fin constituent material 6〇6 is inserted by the side of the spacer jig 607. Similarly, the fin constituent members 6〇6 are sequentially inserted into the spacer jig. 607 'The other gaps 607b are respectively embedded in the fins &amp; 〇3. Thus, by the recess 606a of the fin constituent material 606 and the recess 3673 of the spacer jig 607, 2036-5808B-PF 139 1270429 A groove into which the ridges 6〇2c of the substrate 602 are fitted is formed. Then, the substrate 602 is covered by the spacer jigs 6 〇7 of the respective fins 6 〇β. In this state, the substrate 6〇 The surface 6〇2b of 2 (the lower surface in the drawing) is in contact with the base end portion of the fin constituent β〇β, but not The spacer 607a of the spacer jig 607 is in contact. Similarly, the lower surface of the rib 602c of the substrate (10) 2 is in contact with the fins β 〇 3 of the recess 606a of the fin constituent member 6 〇 6 without the spacer The spacer _ 607a of the jig 6 is in contact with each other. However, the width of the rib 602c of the substrate 602, the width of the concave portion 606a of the fin constituent material 606, and the width of the concave portion 6〇7c of the spacer jig 6〇7 are mutually The two are substantially equal, so the ridges of the substrate 6〇2 are Μ. The function of the position determining unit that accurately determines the relative position of the substrate 602 and the fin constituent material 6〇6 in the width direction, and even the position of the width of the fin constituent material (10)6 between the two sides is determined. Next, as shown in Fig. 83B, the circumferential surface of the joint body of the joint jig 6〇8 which is rotated in the circumferential direction and at a high speed by the yoke of the rotating shaft 6 is vertically pressed to the surface 6 of the substrate 602. 2a, and by frictionally engaging the fin constituents 606 with the substrate 602 by moving the bonding fixture 603 along a surface 602a of the substrate 602 at a predetermined rate of travel. The 608 is fixed to the front end portion of the rotating shaft 608b by a disc-shaped jig body Mg, and the jig main body 608a is composed of Jis: SKD61 and the like. The traveling side J'/the table piece I# 608a when the surface 6〇2a of the substrate 602 is press-fitted is rotated in the direction of the rearward direction, and is rotated along the periphery of the rotating shaft (9). As shown in Fig. 84B, the state of the surface of the surface 602a of the substrate 602 is rapidly rotated at a high speed, and the surface 602a of the substrate 602 is 2036-5808B-PF 140 1270429. mobile. By pressing the substrate body 6〇8a on the substrate 602, the gap between the base end portion 6〇3 a of the fin constituent material β 〇6 and the substrate 602 disappears; and by high speed rotation The vibration generated by the contact between the jig body 6 08a and the substrate 602 splits and breaks the oxide film at the interface between the base end portion 603a of the fin constituent material 6〇6 and the substrate 602, and is in contact with the jig body 608a. The predetermined area of the substrate 602 and its adjacent area, and the predetermined area of the base end portion 6〇3a adjacent to the above-mentioned area, are heated by the heat generated by the frictional contact between the jig body 60 8a and the substrate 602, and the substrate is made high. 602 (copper) and a portion of the base end portion 6〇3a (aluminum) connected thereto are eutectic melted. The above result results in the formation of a eutectic layer 609 between the substrate 6〇2 and the base end portion 603a. Then, the bonding body 608a of the bonding jig 6〇8 is cooled by the rear, and the base end portion 6 0 3a of the fin constituent member 6〇6 and the substrate 602 are joined by the eutectic layer 6〇9. In the surface 602a of the substrate 602, the jig body 6〇3a exerts a compressive stress on the surface 6〇2a and passes through the remaining traces, preferably through the cutting of the post-process to form a smooth surface. In this way, the substrate 602 and the fin constituents 6〇6 are respectively made of copper and the like. “Because the bonding fixture 608 is connected to the side of the copper substrate 6〇2 whose melting point is higher than that of the copper substrate 6〇2, the tab constituent material 606 When the overlapping portion of the base end portion 603a and the substrate 602 reaches a temperature necessary for bonding (the eutectic temperature of copper to aluminum is 5" or more), the substrate 602 can maintain a relatively large deformation strength, and can be obtained from the bonding fixture. The pressure of _ is fully conveyed to the interface, and when the two are positively connected to the substrate 2, the ridges 6〇2c do not cause trouble, and the height/space ratio of the Korean 603 is made. And ribs

The shape and the like of 2036-5808B-PF 141 1270429 602c can be freely set. Finally, as shown in Fig. 85, only the substrate 602 is moved upward by the spacer jig, and the heat dissipating member 601A which has been erected to the respective fin members 606 on the substrate 602 can be taken out. Next, another example of the method of manufacturing the heat dissipating element 610A will be described. First, as shown in Fig. 86A, a thin plate made of aluminum alloy is 6〇3,

The central portion is disposed orthogonally to a spacer 610, so that the two are inverted τ-shaped, as shown in Fig. 86B, in the groove at the central portion of the cross-sectional concave fin constituent material manufacturing jig 611, The plate member 603 is bent, and the spacer 610 is inserted while being pressed in the center portion thereof, and as shown in Fig. 86C, a cross-sectional concave type in which the spacer 610 is sandwiched is formed in the groove at the center portion. Fresh piece 606. The fin constituent material 606 has a pair of fins 6〇3 and a base end portion 603a that connects the fins 603 to form a cross-sectional concave shape. And a plurality of fin constituents 606 in which the spacers 610 are placed between the pair of fins 6〇3 as described above, and the fin constituents are alternately arranged with the spacers 610', and are As shown in Fig. 86D, the element setting unit β丨2a disposed on the jig 61 2 for heat dissipation element mounting is erected. At this time, the fin constituent material 606 is in a state in which the pair of fins 6〇3 are in a state of coma and the base end portion β 〇 3 a is upward. Further, the height of each of the spacers 61 置 between the fin members 606 is a spacer 61 置 placed between the pair of fins 603, and preferably: The height difference is only the thickness ' of the base end portion 6〇3a', and the base end portion 603a of the rotor constituting material and the base portion of the spacer. 2036-5808B-PF 142 1270429 After that, as shown in Fig. 86E, the substrate 6〇2 and the port are mounted on the upper surface of each of the individual component members 606 and the spacers 610 disposed in the component setting unit 612a. The tool 613 fixes it. Here, the base 4 603a of the fin constituent material and the spacer 6丨〇' are brought into contact with the surface 6〇2b of the substrate 602. Next, as shown in Fig. 87A, 'the circumferential surface _ of the jig body 608a of the jig 608 which is rotated at the same speed in the circumferential direction around the rotating shaft 608b is pressed perpendicularly to the surface 602a of the substrate 602, and the jig is attached. 6〇8 moves along the surface 602a of the substrate 602, and the base end portion 603a of each fin constituent member 6〇6 is frictionally and vibrated to the substrate 406. Finally, as shown in FIG. 87B, when the substrate β〇2 is moved upward, only the fin constituents 6〇6 that have been bonded to the substrate 6〇2 move upward together, and the spacers 610 and 61 are turned, The heat dissipating component 61 can be removed from the component setting portion 612a of the heat dissipating component manufacturing jig 612. The heat dissipating component 610 is configured to pass a plurality of fins 6〇3 through the fin base material. The portion 603 is erected to the surface 6〇2b of the substrate 6〇2. Next, other embodiments of the heat dissipating member of the present invention will be described. As shown in Fig. 88A, in the second embodiment of the heat dissipating member 6??, the rib 602c of the substrate 602 is divided in the longitudinal direction, and the others are the same as in the first embodiment. When the rib 602c is divided in the longitudinal direction as described above, the CPU 6G5 communicates that the path in the heat is cut off before reaching the fin at the end, and the heat release performance is longer than the ridge 6〇2〇 in the longitudinal direction. The 5L heart rate has a higher exothermic performance v than the no-bump # component.

2036-5808B-PF 143 1270429 As shown in Fig. 88B, in the heat dissipating element 6〇ic of the third embodiment, the ridges 〇2c of the substrate 602 are formed in a direction oblique to the fins 6〇3. Others are the same as the first embodiment. When the direction of the rib 602c is oblique to each of the Korean 603 pieces, the cross-sectional area of the rib 602c is reduced while maintaining the original weight of the substrate 〇2, and the heat dissipation performance is higher than that of the ridges. The first implementation type which is orthogonal to each Korean 6G3 is inferior, but its heat dissipation performance is still higher than that of the conventional heat dissipation element without the rib 602c. The heat dissipating element 6 〇 id of the fourth embodiment shown in FIG. 89A, the heat dissipating element 6 〇 1E of the fifth embodiment shown in FIG. 8 , and the heat dissipating element of the embodiment type shown in FIG. 89 c In _, the sectional shape of the ridge _ is not trapezoidal, square, and dome-shaped (d_), and the smaller the ridge of the three is from the body of the substrate 602, the smaller the width is.

In the case where the cross-sectional shape is a rectangular shape, especially when the direction of the front side of the ^m/6〇2C is forcibly cooled by the side fan, the pressure loss is small. In the heat dissipating component of the seventh embodiment shown by the plate j9°Affl, the thickness of the ridges 〇2c of the substrate 602 and the soil m+ degree are maintained constant, and the width of the ribs 602c is formed by盥 CPU 605 technology _ k the relative position of the long-sounding party 6 contact begins, toward the convexity of the rib 602c, the farther the distance is, the convexity is equal to the first one &amp; the width of the other 4% 〇 2C is gradually reduced; Le Qian is the same type. The 散热 的 〇 〇 〇 〇 第八 第八 第八 第八 第八 第八 第八 第八 第八 第八 第八 第八 第八 第八 第八 第八 602 602 602 602 602 602 602 602 602 602 602 602 602 602 602 602 602 602 602 602 602 602 602 602 602 602 602 602 602 602 602 602 The thickness of ^^9^f^^^ 602^ and the thickness of ^^ and 2C are gradually reduced; the other J and the brothers are the same. -^

2036-5808B-PP 144 1270429 The heat dissipating element 6 011 of the first and second β 焉 焉 第 第 , , , , , , , , , , , 602 602 602 602 602 602 602 602 602 602 602 602 602 602 602 602 602 602 602 602 602 602 602 602 602 602 602 602 602 602 602 Starting from the relative position of contact with the CPU 6〇5, to m π , the length direction of the beam 602c, the farther the distance is, the width and thickness of the spur 602c are gradually reduced, and the rib 602c is formed into a circle. Top shape; other, he is the same as the first embodiment. Since the transfer to the substrate 6 〇 2 is broken 4 ^ i ..., the distance from the CPU 605 is smaller than I, and the heat distribution is based on the heat distribution, 』, 曰八' reduction convex strip 6〇2c Break area in theory

The upper 疋 i 因此 因此 因此 i i i i i i i 因此 因此 — — 上述 上述 601 601 601 601 601 601 601 601 601 601 601 601 601 601 601 601 601 601 601 601 601 601 601 Further, in the heat dissipation element 601J of the tenth embodiment shown in FIG. 9U, the fins 6〇3 are directly erected and bonded to the substrate 602 without using the fin constituents 606, and the other is the first embodiment. The state is the same. Further, in the eleventh embodiment of the eleventh embodiment, the fins 603 are respectively divided into three in the width direction and are erected and bonded to the substrate 602, and the others are the same as the first embodiment. . Of course, it is also possible to divide each of the erroneous pieces and the constituent materials in the width direction thereof. Further, the heat dissipating member of the present invention and the method of manufacturing the same are not limited to those described above, and of course, it can be appropriately modified and implemented. For example, the ribs 6〇2c may have not only one column but also a plurality of columns. Further, the ridges 6〇2 are not integrally formed with the body of the substrate 602, and may be separately formed and then fixed to the body of the substrate 602. The material of the substrate 602 and the fins 603 may be changed to materials other than copper and aluminum. The presence or absence of the heat sink, its size, and shape may be arbitrarily changed. Alternatively, the CPU 605 and the substrate 602 of the heat generating body may be connected to each other. 2036-5808B-PF 145 1270429 Moreover, in the joining and squeezing engagement of the substrate 602 and the fin 603, the aligning condition of the splicing treatment I 6. 8 can be arbitrarily determined, and the joining method is surrounded by the material direction. The equal joint jig is pressed into the metal side with a higher melting point. No: the frictional stress to be transmitted is transmitted to the metal component:: cross: the resulting formula, or the electromagnetic induction by the higher melting point = side of the interface heating between the contact metal components and the non-contact parts of the house

For example, if the base and the fin are copper, it is preferably =; the interface is placed. Alternatively, the gap splicing =: joint), the adhesive, or the solder joint may be used. The method comprises: mounting the fan 602 on the heat dissipation raft of the substrate 602 and the frame ===, and arranging, for example, the heat sink 6m as shown in FIG. 92, and sending the wind to the heat dissipation fins above the fan 614 heat dissipation member 6G1A. 603; The heat sink 62 is also shown in the figure θ, and the fan 614 is sent to the heat sink fins 6〇3 by the side of the heat sink: 601Α. The installation method of :=614 is not limited to the direction of the wind, and the heat sink scooping angle is preferably set according to factors such as the installation space. Embodiment 1 Variation of the heat dissipation element of the strip with the presence or absence of the simulation resistance)

The way to test the heat dissipation performance of the heat sink is how the ribs are. Specifically, it is prepared that the heat dissipating elements having no ridges and the convex portions are respectively obtained, and the area of the individual substrates is equal to each other. 2036-5808B-pp 146 1270429 with ribs In the heat dissipating component, the ribs are continuous along the longitudinal direction of the substrate, and the broken area of the ribs is maintained constant along the length direction. The substrate is made of copper and the fins are made of aluminum. The fins are erected to the substrate one by one in accordance with the pattern shown in Fig. 91A. The cross-sectional shape of each sample is shown in Figs. 93A and 93B, and the bar graph showing the simulation results is shown in Fig. 93C. Also, the experimental data is listed in Table VIII. Table 8: Difference in thermal resistance due to presence or absence of ridges (natural convection) Substrate fin height (mm) Southern temperature (°C) Thermal resistance (°C/W) Body width W (mm) Body length L (mm) Body thickness t (mm) Bar width Ws (mm) Bar length Ls (mm) Bar thickness ts (ram) Area (mm2) Interval (mm) Quantity 1-1 No rib 50 50 2.00 — — — 100 1.3 30 11.5 449 5.90 1-2 with ribs 1.10 15 50 3 420 5.49 It can be seen from the bar graph of Fig. 93C that under natural convection, samples with ribs 1 - 2. Compared with the sample 1-1 without the ridges, the thermal resistance was greatly reduced although the same substrate sectional area was obtained. That is, the weight of the heat dissipating member is constant, and the heat dissipating performance can be improved. In other words, it can be understood that the weight reduction can be achieved without deteriorating the heat dissipation performance. [Embodiment 2] As in Embodiment 1, the heat dissipation performance of the heat dissipating member was tested in an analog manner, and it was changed depending on the presence or absence of the ridge. However, Embodiment 1 is a simulation performed under natural convection; in Embodiment 2, a fan is used to blow a wind of 3 m/s from the upper side (from the direction of the fin to the substrate) to strongly cool the fin. The index of heat dissipation performance of the heat dissipating component is not only thermal resistance but also pressure loss. Others are the same as in the first embodiment. A bar graph showing the simulation results is shown in Figures 94A and 94B. also. The number of matches is shown in Table 9. Table 9 shows the difference in heat dissipation performance due to the presence or absence of ridges (forced cooling from above) 2036-5808B-PF 147 1270429

Sfe -- Full height of the wire (mm) Southern temperature (°C) Thermal resistance (°C/W) Pressure loss (Pa) Body width W (mm) Body length L (mm) Body thickness t (mm) Bar width Ffs(mm) rib length Ls (mm) rib thickness ts (mm) sectional area (mm2) interval (mm) number 2-1 without ridges 50 107 2. 00 — — — 100 1.3 78 11.5 52.0 10. 38 31 2-2 with ribs 1.10 15 107~ 3 50.1 0.35 33 From the bar graph of Figure 9 4 A, it can be seen that in the case of forced cooling of the fan from above, samples 2-2 with ribs, and none The sample 2-1 of the ribs has a lower thermal resistance despite the same substrate cross-sectional area. Further, as can be seen from the bar graph of Fig. 94B, the pressure loss of the sample 2-2 having the ridges was approximately the same as the pressure loss of the sample 2-1 having no ridges. Therefore, by the formation of the ridges, the weight of the heat dissipating member can be made constant, and the heat dissipation can be improved, and it can be understood that the heat dissipation performance is reduced without reducing the heat dissipation performance. Embodiment 3 As in Embodiment 2, the heat dissipation performance of the heat dissipating member was tested in an analog manner, and how it was changed due to the presence or absence of the ridges. However, in Embodiment 2, the fan is blown by the wind from above (in the direction from the fin to the substrate) to forcibly cool the fins; and in Embodiment 3, the fan is used from the side (by the fins) In the width direction, 3 m/s of wind is blown to forcibly cool the fins. Others are the same as in the second embodiment. The cross-sectional shape of each sample (sampie) is shown in Figs. 95a to 95c, and the bar graph showing the simulation results is shown in Figs. 95D and 95E. Also, the inspection data is listed in Table 10. ^Because of the presence or absence of the ribs, the heat dissipation performance is different (forced cooling by the side). Substrate error height (mm) Maximum temperature (°C) Thermal resistance (°C/W) Pressure loss (Pa) Body width W (mm) Body length L (mm) Body thickness t (mm) Bar width Ws (mni> rib length Ls (mm) ridge thickness break area (mm2) Interval (mm) Quantity 3~&quot;l|No rib 50 107 2.00 — a 100 1.3 78 11.5 54.8 0. 41 67 2036-5808B-PF 148 1270429 (trapezoidal)

53. βΙ 〇. 40 91 1 1 53.1 〇. 39 84 Bu y, labor, in the case where the wind is made by the side of the strong u wide: the sample with the ribs 3~, and the no convex strip j! convex: Although it has the same substrate cross-sectional area, its thermal resistance is lower. :: : The cross-sectional shape of the trapezoid is... the thermal resistance is smaller than the sample 2-3 of the rectangular shape of the rib. 3 2 From the long bar graph of Fig. 2, it can be understood that the differential loss of the sample with the ridges is larger than that of the sample without the ridges 3-! : The cross-sectional shape of the sample 3_3 in which the cross-sectional shape of the ridge is trapezoidal is reduced. The cross-sectional shape of the ridge is a rectangular sample 3-2. From the above results, it can be understood that in the case where the ridges are formed, when the side is cooled, the '(4) is large and the heat resistance is small. Therefore, the appropriate =: week = the performance of the fan, etc., when the heat loss of the heat-dissipating component is less than the heat resistance of the heat-transfer element, the heat-dissipating element can be improved by the formation of the ridges; in other words, Understand the light weight in the case of lowering the thermal performance. In this case, it is better to know that the cross-sectional shape of the ridge is better, and the smaller the width from the substrate, the smaller the width (please refer to the 89A). ~89C picture). Embodiment 4 In the case of testing a rib with a two-simulation method, the heat dissipation of the heat dissipating member changes depending on the shape and size of the ridge. Using a heat dissipating member having the shape shown in Figs. 95 and 95B, respectively,

Example 3 is the same. The fold line (I) of the simulation results of I be shown in Fig. 9 is shown in Fig. 9 6 and 9] Fig. 2 2036-58 08B-PF 149 1270429 Further, the experimental data is shown in Table 11. "The difference in shape depends on the heat dissipation performance (forced cooling by the side) 4-1 Body width W (mm) Body length L (mm) Body thickness t (mm) Bar width Ws (mm) Q 基板 Substrate convex Strip length j Ls (mm) rib thickness ts (mm) rib profile area (mm2) fin spacing (mm) number of sheets total 13⁄4 (mm) maximum temperature (° 〇 heat resistance (°C / W) pressure loss (Pa) 1 1 4-2 y· uu 11.25 5.0 4. 0 1.8 2. 8 53.93 0.402 125 4-3 Rfi 107 1 1 π 15.00^ 3. 〇 5. 0 53. 46 p- π λ 0. 395 105 4-4 JU 1. 1 U 22. 50 107 2. 〇11 3 100 1.3 78 11.5 53. 64 394 91 4-5 37.50^ 1.2 31. 3 53. 62 0.397 79 4-6 45.00 1.0 45.0 54.16 55. 02 0. 405 0.417 77 79 According to the line drawing of Fig. 97, it can be understood that when the rim ratio of the ridge is set at 5 3 0 or the thickness of the ridge is 1 · 1 5 mm~3 · 4 5 mm, the heat resistance is small, The pressure loss is also not significantly increased. That is, it can be known that the contour of the ridge is set to 5 to 30, or the ratio of the thickness of the rib/the total height of the heat dissipating component is set to 0. 1~0·3 when Better balanced heat dissipation Finally, an application example of the above-described frictional vibration bonding method will be described. In the following applications, the so-called "copper" and "aluminum" are respectively intended to be "copper or copper alloy", "aluminum or aluminum alloy"; “Foil” or “sheet” made of aluminum or aluminum alloy. The first application example shown in Fig. 98 is to sandwich the aluminum foil 7〇3 between the two copper plates 701 and 702 and completely overlap. The joining jig 7〇4 is pressed to the outer side surface of the copper plate 7〇. That is, the circumferential surface of the jig body 704a which is rotated at a high speed in the circumferential direction around the rotating shaft 7〇41) is vertically pressed to the steel plate 7〇1 The surface of the jig 704a is moved along the surface of the copper plate 701 at a predetermined traveling rate. The copper plate 701 is heated by the frictional contact heat with the jig body 704a, so that contact with the copper plate, m should be After cooling, a eutectic layer is obtained between the copper plate 7〇1 and the copper plate 7〇2 and the 2036-5808B-PF 150 1270429 is joined. In the second application example shown in Fig. 99, the second copper plate 702 is disposed approximately orthogonally with respect to the first copper plate 701, and the bonding jig 7〇4 is pressed to the outer side surface of the copper plate 701. At this time, since the foil 703 is interposed between the copper plate 7〇1 and the copper plate 7〇2, the copper plate 70丨 can be joined to the copper plate 702. In the third application example shown in Fig. 100, a part of the copper plate 7 is overlapped with a part of the plate 705, and the bonding tool 7〇4 is applied to the side of the copper plate 7 〇1 having a higher melting point. To the overlapping portion of the two, a eutectic layer is formed in the overlapping portion, and the copper plate 071 is joined to the aluminum plate 7 〇5. The fourth application example shown in Fig. 101 is the same as the third application example in the case where the aluminum plate 7〇5 is disposed orthogonally to the copper plate 701'. In the fifth application example shown in Figs. 102A and 102B, the copper plate 7〇1 and the plate 705 are formed as one sheet. In the second embodiment, a fitting convex portion 701a and a fitting concave portion 701b are formed at the end portion of the copper plate 7〇1, and a fitting convex portion 705a and a fitting concave portion 705b are formed at the end portion of the aluminum plate 705. The fitting convex portion 701a is dropped into the funnel recessed portion 705b, and the fitting convex portion 7〇5a is fitted into the fitting recessed portion 701b. That is, the copper plate 701 and the aluminum plate 7〇5 are fitted to each other in the form of a slot joint to form a single plate. Then, the copper plate 701 and the aluminum plate 705 are joined by the joint jig 704 from the side of the fitting convex portion 7〇1 of the copper plate 7〇1 having a relatively high melting point to the fitting portion of the joint. Further, in Fig. 102B, the end faces of the copper plate 7〇1 and the end faces of the aluminum plates 7〇5 are inclined surfaces which are opposite to each other. That is, the end face of the copper plate 7〇1 is a downward slope, and the end face of the plate 7〇5 is an upward slope. Thereafter, after the inclined surface is placed in contact, the bonding tool 704 is applied to the inclined surface portion by the side of the copper plate 701 2036-5808B-PF 151 1270429 having a relatively high melting point, and the sheet material is plated. The bonding copper plate 701 and the aluminum plate 7 〇 5 constitute a sixth application example shown in Figs. 103A and 103B, which is a copper plate 7 〇 1 and

Board 7 0 2 . The seventh application example of FIG. 104 is such that the aluminum plate 705 and the aluminum plate 706 are disposed adjacent to each other, and the upper and lower portions of the adjacent portions are sandwiched between the copper plate 7〇1 and the copper plate 7〇2 to form the copper plate 701 and the aluminum plate 705. The overlapping portion of 7〇6 and the overlapping portion of the copper plate 7〇2 and the aluminum plates 7〇5 and 706 are joined to the overlapping portion by the bonding jigs 7〇4 from the sides of the copper plates 701 and 702 having a higher melting point, and the copper plates are joined. 7 〇 702 with aluminum plates 705, 706. In the eighth application example shown in Figs. 105A and 105B, the aluminum plate 705 is also disposed adjacent to the aluminum plate 706. In Fig. 105A, the end piece surface of the aluminum plate 7〇5 is formed with a fitting recess 7b5b on the side, and the end face side of the aluminum plate 706 is formed with a fitting recess 706b. The fitting recesses 705b, 706b form a recessed groove d. The copper plate 701 corresponding to the recessed groove is slid into the recessed groove, and the copper plate is joined by the action of the jig 704 on the copper plate 701. 701 and nameplate 705, 706. The figure shown in Fig. 10B is substantially the same as that shown in Fig. 10 5A, and the copper plates 7 01 and 7 0 2 are respectively embedded on both sides of the end portions of the name plates 7 0 5 and 7 〇 6 . When the jig 704 is attached to the copper plates 7 01 and 7 〇 2, it may be carried out in sequence or simultaneously. In the ninth application example shown in Figs. 1 0 6 A and 1 0 6 B, the copper plate 7 01 and the 2036-5808B-PF 152 1270429 copper plate 702 are joined in the same shape as the eighth application example. In the second diagram, the end surface side of the copper plate 701 is formed with a fitting recess 7 〇 1 匕, and the end surface side of the copper plate 702 is formed with a fitting recess 7 〇 2b. The fitting recesses 701b, 702b form a fitting recess, so that the aluminum foil 7〇3 is conformally formed on the folding recess, and the copper plate 7〇7 of the fitting recess is embedded in the fitting recess. The groove bonds the copper plate 707 and the copper plates 701 and 702 by joining the jigs 7 to 4 on the copper plate 7〇7. Similarly to the 10th 6th φ diagram, the first steel plate 707 and the 708 are respectively fitted to the end faces of the copper plates 701 and 702, respectively. The tenth application example of the Fig. 07 is that the ends of the cylindrical or cylindrical aluminum rods 709 and 710 are respectively joined and inserted into the inside of the copper ring 7丨1 to be adjacent to each other by being joined. The jig 704 acts on the outer peripheral surface of the copper ring 711 to bond the copper ring 711 to the aluminum bars 709, 710. The eleventh application example shown in FIG. 18 is substantially the same as the tenth application example, and the end portions of the aluminum rods 709 and 710 are respectively formed with cylindrical or cylindrically shaped fitting convex portions 709a and 710a. And they are respectively joined and inserted into the inside of the copper ring 711 to be adjacent to each other. In this state, the outer circumferential surface of the copper ring 71A coincides with the outer circumferential surfaces of the aluminum rods 709 and 710. Others are the same as the tenth application example. In the twelfth application example shown in FIG. 109, the copper plate 7〇2 is overlapped with the aluminum mesh body 2, and the bonding tool 704 is applied to the overlapping portion from the side of the copper plate 7〇1 having a higher melting point, and the copper plate is bonded. 7 〇 1 is bonded to the aluminum mesh body 71 2 . In the thirteenth application example shown in Fig. 10, the hollow or solid aluminum rod 709 is disposed in the standing state on the copper plate 70T, and the joint jig 7〇4' acts on the side of the copper plate 701 having a higher melting point. To the contact portions of the two, the copper plates 2036-5808B-PF 153 1270429 701 are joined to the aluminum bars 709. In the fourteenth application example shown in FIG. 111, the hollow or solid copper rod 713 is placed on the copper plate 7〇1 in an upright state, and the two are sandwiched between the two. Having a function of 7〇4 on the side of the copper plate 7〇丨, the aluminum foil 7〇3 in contact with the copper plate 701 is eutectic and melted, and after cooling, a eutectic layer is obtained between the copper plate 7 01 and the copper rod 713. Engage.

In the fifteenth application example shown in Fig. 12, the cylindrical copper rod 7 J 4 and the cylindrical aluminum rod 715 are formed into a single rod. The end portion of the copper rod 714 is formed with an annular fitting convex portion 714a and a fitting concave portion 714b located at the inner circumference of the fitting convex portion 714a. Further, an end portion of the aluminum rod 715 is formed with an annular fitting convex portion 715a and a fitting concave portion 715b located on the outer circumference of the fitting convex portion 715a. The coupling convex portion 714a is fitted into the fitting concave portion 715b, and the fitting convex portion is fitted into the fitting concave portion 714b. Thereafter, the copper rod 714 is joined to the aluminum rod 715 by the joining fixture 7〇4 being applied to the fitting portion by the side of the fitting convex portion 71 of the copper rod 714 having a higher melting point than the rod 715. The sixteenth application example shown is that a cylindrical copper rod is joined to a round-shaped copper rod 7]β,1; Yifei Chuanding^m cattle in the same shape as the application of the fifteenth application. The aluminum foil 703 is interposed between the fitting portions to join the copper rods 714 and 716. 'The general end face of the fifteenth application example is the same as the seventeenth application example shown in Fig. 114, and the end face of the copper rod 714 and The aluminum rod 715 has a reverse slope. That is, the end surface of the copper rod 714 is a so-called material-like inclined surface which is deeped from the outer side toward the hollow portion, and the end surface of the inner rod 715 is a sloped surface which protrudes from the outer side toward the hollow portion. After each oblique touch configuration, the Qinhe fixture 7G4 is applied to the side of the copper rod 714 with a higher point, and the 2036-5808B-PF 154 1270429 is joined with the copper rod 714 and the aluminum rod 715 to form a single rod. The eighteenth application example shown in Fig. 15 is a cylindrical copper rod 7 i 4 〃 cylindrical copper rod 7 丨 6 to the seventeenth The same shape is used for bonding. The aluminum foil 703 is sandwiched between the inclined surfaces to bond the copper rods 714 and 716. The nineteenth application example shown in Fig. 116 relates to a method of manufacturing a semiconductor heat sink. That is, a plurality of recessed grooves 717a are formed on the side surface of the heat radiating plate 7 made of aluminum, and the cover plate 718 made of copper is superposed on the surface of the side of each of the recessed grooves 717a of the heat radiating plate 7 by the bonding jig 704. The side of the higher copper cover plate 718 acts on the overlapping portion of the heat dissipation plate γη and the copper cover 718, and the heat dissipation plate 717 and the cover plate 718 are joined, and the respective grooves 717 &amp; sealed by the cover plate 718 become water-cooled holes. According to the above method, since the bonding material is not melted by a method such as welding, the amount of heat generated is small, and a highly precise product can be manufactured at low cost.

The twentieth application example, which is not shown in Fig. 117, is substantially the same as the nineteenth application example, and the heat sink is interchanged with the material f of the cover plate in different places. That is, a plurality of concave grooves 719a are formed on the side surface of the sheet of the hot plate 719 of the copper garment, and the aluminum cover plate 720 is superposed on the surface of the side of each of the concave grooves 7 of the heat dissipation plate 719 by the joint jig. 704 is applied to the overlapping portion of the heat dissipation plate 719 and the cover plate 720 by the side of the heat dissipation plate 719 having a high melting point, and the heat dissipation plate 719 and the cover plate 72G are joined, and the respective grooves 719a sealed by the cover plate 720 are formed. Water-cooled holes. The other parts are the same as the nineteenth application example. The twenty-first one shown in Figure 118 should be the same as the nineteenth

The application examples are generally the same. The difference between the heat sink and the cover is 2036-5808B-PF 155 1270429 copper. That is, a plurality of grooves 719a are formed on the sheet side surface of the heat-dissipating plate 719 made of copper, and a cover plate 718 made of copper is superposed on the surface of the side of each of the grooves of the heat-dissipating plate 719. At this time, in the overlapping portion between the heat radiating plate 719 and the cover plate 718, the aluminum foil 703 is interposed therebetween. Then, the heat sink 719 and the cover 718 are joined by the joint 704 from the side of the sill plate 718 or the heat sink 719, and the recesses 71 9a sealed by the cover 718 become water-cooled holes. . The other parts are the same as the nineteenth and twentyth application examples. Φ The twenty-second application example shown in Fig. 11 shows that the bottom surface of the container 7 21 is joined to the stainless steel plate 722 to form an electromagnetic conditioner. The joint jig can be used as described above, and the upper surface of the jig body 723a (the surface orthogonal to the rotating shaft 723b) which is rotated at a high speed in the circumferential direction around the rotating shaft 垂直 is vertically pressed to The surface of the stainless steel plate 22 and the fixture body 723a are privately moved along the surface of the stainless steel plate 722 at a predetermined travel rate, and the heat is prevented by the frictional contact with the fixture body. The vessel 721 which is in contact with the unrecorded steel plate 722 is partially eutectic and melted, and after cooling, a eutectic layer is obtained between the unrecorded steel plate 722 and the aluminum container 721 to join the two. In the twenty-third application example shown by the 帛120®, a tubular storage unit (basket eeU) is manufactured by combining and joining the inscription profiles 724 and 725 of the substantially mad type cross section in a pair of right and left. The inside of the storage tank unit stores the used nuclear fuel rods, and collects the storage tank units to form a storage basket, and the storage tanks are for the delivery, and the storage and the shovel are all contained in the aluminum 724 and 725. Twenty percent by weight (2% by weight) of 2036-5808B-PF 156 1270429 carbon carbide shed (boron carbide). The end of the aluminum profile 724 is formed with a fitting convex portion 724a and an enemy concave portion 724b. ^ End portion formation = fitting convex portion 725a and funneling concave portion 725b. The commemorative convex portion is embedded in the concave portion (four), and the sinus convex portion 7 is blocked into the funnel portion 724b. The commissure convex portion 724a is outside the enemy convex portion 725a. In addition, the aluminum alloy pig 7〇3 was sandwiched in the fitting portion of the 725. Then, the joint jig 704 is provided from the outer side of the fitting projections...&amp;, and the inscription profile is joined. At this time, the downward pressing stress of the jig 704 causes the fitting portion to be bent downward, and the joint is poor in order to prevent the metal from leaking under the joint during the joining. Here, the trolley-type internal component is disposed in the hollow portion of the cylindrical body. (10) and internal broadcast board 727. The inner baffle 727 is a long plate disposed along the lower surface of the joint. Further, the trolley type internal component 726 is a jack ((10)) 726b that is expandable and contractable in the downward direction, and the inner disc 727 is placed under the joint to the lower surface of the joint portion, and the hollow portion of the tubular body is made by a roller (r〇ller) 726a. Moves synchronously with the joint fixture 7〇4. Therefore, the lower surface of the joint portion from the upper (four) force of the joint jig 704 is occupied by the inner plate 4 by the plate 727, so that the joint portion is hardly bent and metal is not leaked. The twenty-fourth application life shown in Figure 121 is roughly the same as the twentieth case. The difference is that the enemy department is like you. shape. That is, the end face of the aluminum profile 724 is a downward slope, and the end face of the profile #725 is an upward slope. In the middle, the 7G3 is sandwiched so that the inclined surface of the profiled material 724 is in contact with the inclined surface of the profile 725, and the bonding fixture 7〇4 is applied to the inclined surface from the outside, and the saturated profile 724 and the inscription profile 725 are joined. The other departments are all the same. 2036-5808B-PF 157 1270429 The twenty-fifth application example shown in Fig. 122 is a method in which the aluminum profiles 728 and 729 of the cross-section are combined into one sub-piece 5 to produce a cylindrical crucible. The fitting portion having a substantially L-shaped cross section can be disposed directly under the joint jig 7.4. The "T-Bare" does not require the trolley-type internal component of the second application. An application example ^ other (four) points all (four) twenty-three. The twenty-sixth application example shown in Figure 123 is roughly the same as the twenty-fifth shore use case, and the difference is in the shape of the fitting application ΛΛ ^ ^ ^. That is, the aluminum profile 728 = the face of the downward slope of the facet (4) 729 is end faced and will be sandwiched in the middle so that the slope of the profile 728 is in contact with the slope of the profiled profile, and the joint fixture 7〇4 acts from the outside. On the bevel, Ming profile 728 and 1 Lu profile 729. The other parts are all the same as the twentieth use case. The twenty-seventh application example of the 124th figure 124β is a combination of four aluminum 730, 731, 732, and 733 to produce a cylindrical shape (basket ce (1). The L-shaped section is embedded. The joint portion may be located at any corner portion. As shown in the figure, the outer side of the end portion of the 'fourth material 73G is formed with an embedded convex portion (10), and the upper portion of the end portion of the (four) material 733 is formed with support from 7 (10). The fitting portion 703 is inserted into the fitting portion. Thereafter, by the action of the jig body 7〇4a of the joint jig 〇4 from the outer side of the rearward convex portion 730a of the sizing material 73〇, the pair of (4) 7〇 3 heating and pressurization, but the joint profiles (4), 733 joint. Because the downward compressive stress from the joint treatment $ m is 730 ^ 733;, with 734 absorbed '· fittings will not spread, also It does not bend downwards. The fitting portion of the four 2036-5808B-PF 158 1270429 is symmetrical with respect to the mandrel of the cylindrical body. The other parts are the same as the first fifteenth application example. 125A~125R 闰&amp; - The twenty-eighth application example shown in the figure is substantially the same as the second seven application example, and the phase/phase is The shape of the rear joint portion, that is, the end face of the pontoon to aluminum profile 730, the ad's profile 730 is a downward slope, and the end face of the profile 733 is an upward slope. The name box 703 is sandwiched in the middle to make the name The inclined surface of the lining material 730 is in contact with the inclined surface of the inscription profile 733, and the bonding fixture 704 is applied to the ancestor by the outer side for the inclined surface, and the aluminum profile 73 () is bonded to the aluminum type 733. In the same manner. Jiang will rotate the aluminum profiles in sequence, and all the four-part bevel contact parts will be connected. Gan ^ a , ° /, his 邛 are all the same as the twenty-seventh application. Although the invention has been activated; The invention is not disclosed to limit the scope of the present invention, and the invention may be modified and retouched without departing from the spirit and scope of the invention. The scope of the sigh is subject to the definition of the patent application scope attached to the following. #Industrial usability invention, the weight of each metal component is 'adjacent to the side of the jig' Pressure can form copper between the metal components As described above, the metal component can still be efficiently conveyed to the coincident surface by the rise of the first group of joints to the temperature necessary for the joint, and the seamless joint can be joined to the joint strength. And 'because the friction tool is pressed into the solution side to make the frictional vibration joint, even when the surface is combined with the two elements, when the eutectic temperature is above, the anti-% strength of the copper element is relatively λ, which can be from the pressure. 159

2036-5808B-PF 1270429 is fully conveyed to the coincident surface and can be reliably joined. Further, when the heat generated by the frictional contact between the bonding jig and the copper member is just a suitable value, good bonding can be performed. Further, when the compressive stress of the joining jig is just an appropriate value, the overlapping surface of the copper member and the aluminum 7L member can be joined without causing a gap, and the dent of the surface of the copper member can be made small. Further, when the relationship between the traveling speed of the joining jig, the circumferential speed, and the thickness of the copper member is just right, the frictional vibration joining with high joint strength can be efficiently performed. Further, there is no gap between the substrate and the heat transfer plate, and a heat dissipating member joined at a higher strength can be formed. Further, since the heat sink material is formed by an aluminum extrusion type, the heat sink material has high processing precision. Further, since the copper member that is in contact with the bonding jig is less likely to be melted and maintains high deformation strength at a high temperature, the allowable range of the bonding condition (the number of rotations of the bonding jig, the running speed, etc.) is large, and the joining efficiency is good. Moreover, according to the invention of the second group, regardless of the material of the component, a plurality of mutually spaced sheets can be easily joined to one surface of the substrate, and in particular, the sheet having a thickness of 溥 and a south can be arranged at a short interval. Firmly erected and bonded to the substrate. Further, by the method for manufacturing a heat dissipating member of the present invention, it is possible to easily manufacture a heat dissipating member in which a plurality of fins which are spaced apart from each other are erected and bonded to one surface of the substrate at a low cost; in particular, it can be made low. This system. A heat dissipating component with high heat dissipation performance with high height/space ratio. At this time, if the jig of the invention of 2036-5808B-PF 160 1270429 is used, the sheet or the fin constituent material, the spacer, and the substrate can be surely fixed at the time of frictional vibration bonding. ~ Moreover, the heat dissipating component of the present invention has high heat dissipation performance, and the manufacturing cost is good and the invention of the third group is because the heat dissipating component is made of a copper substrate: steel sheet, web, or (4) plate friction. It is made by vibration and can be reliably manufactured at a lower cost than conventional items. • Also, it has a high heat dissipation performance because it has a structure in which the heat of the heat dissipating member is forcibly cooled by the fan. Furthermore, when the hot body and the copper substrate are connected by a heat transfer tube, the heat generating element and the fan can be disposed at a position away from the heat generating body, so that, for example, a thin notebook computer or the like is provided with a heat dissipating structure in the vicinity of the heat generating body. In the case of difficulties, there is a solution that can be used. - In addition, by the invention of the fourth group, each of the gold and female components can be easily and surely joined and joined to each other; and a plurality of constituting sheets can be easily and surely erected and joined to the metal substrate. . Further, according to the present invention, the method of manufacturing the device, it is possible to easily manufacture a plurality of heat dissipating members which are firmly erected and bonded to the substrate. By the invention of the fifth group, the metal elements can be joined in a small number of steps and in a short time, and the metal elements can be joined with high strength. Further, the heat dissipating member obtained by the method for manufacturing a heat dissipating member using the metal element bonding method is capable of more reliably bonding a heat dissipating film or the like to a substrate with a high strength in a small step and in a short time. (4) 2036-5808B-PF 161 1270429 Moreover, by the invention of the sixth group, the connection is formed on the substrate. Each of the ridges of the Korean film can more efficiently transfer the heat of the heat generating body, and the a sheet can improve the heat dissipation performance. Therefore, the heat dissipating component can be made lighter without reducing heat dissipation. Further, with the heat sink of the present invention, the heat dissipation performance can be improved further. Further, according to the method for manufacturing a heat dissipating member of the present invention, the ridges and the ribs are not troubled. The substrate and the slab can be simply and reliably bonded, and the interval and height/space ratio of the fins can be freely set. A simple description of the L-pattern shows that the U-1C diagram shows the steps of one embodiment of the metal component bonding method of the present invention, wherein the first u/, 1B is a front cross-sectional view, and the first c-figure is a 1B map. Side view. Figs. 2A to 2C are a series of sectional views showing the process of plastic deformation of the overlapping portion of the steel element of the figure. '-Part:: is: a front sectional view showing another embodiment of the metal component interface of the present invention. Figure 4 is a perspective view showing one of the heat dissipating elements of the present invention and the configuration. The top view of the tenth is shown in Fig. 5A to 5C as a series of bottom views and another embodiment of the heat dissipating component of the invention. The fifth figure and the fifth figure are the 5th and 5th views. Figure. The brothers bA~6C are one of the manufacturing methods of a series of cross-section components.

In the present invention, the heat dissipation of the 6th A, the 6B diagram 2036-5808B-pp 162 1270429 is a front sectional view, and the 6Cth is a sectional view of the 6B. Fig. 7A is a cross-sectional view showing a series of other embodiments of the method for manufacturing a heat dissipating member of the present invention. Figs. 8A to 8C show the order of frictional vibration engagement, in which the 8a, 8B are front cross-sectional views, and the 8Cth is a side view of the 8th. Figs. 9A to 9C are a series of sectional views showing the process of plastic deformation of the overlapping portion of the aluminum member and the copper member in Figs. 8A to 8c. Figure 10 is a front cross-sectional view showing another example of frictional vibration engagement of a metal component. 11A to 11B are front cross-sectional views of the series, showing a first embodiment of the method of manufacturing the heat dissipating member of the present invention. Figs. 12A to 12B are a series of front cross-sectional views showing the steps following Fig. 11A to 11B, in which the mth figure shows the frictional vibration joining step, and the 12th second figure shows the spacer separating step. Fig. 13 is an exploded perspective view showing an embodiment of the heat-dissipating member of the present invention. Fig. 14 is a perspective view showing the embodiment of the heat dissipating member of the present invention. Figs. 15A to 15C are oblique views of the series, showing an example of the movement of the joint jig of the rubbing engagement step shown in the mth figure. Figure 16 is a front cross-sectional view showing the friction shown in Figure 12A.

Another example of a vibration bonding step. T π is a front cross-sectional view showing another embodiment of the heat dissipating component of the present invention. 2036-5808B-PF 163 1270429 The first 8A~1 8C is a front cross-sectional view of the series, showing the manufacturing sequence of the heat-dissipating components of the first drawing, wherein the Figure 8A is the first state, The 18B and 18C pictures are in the second form. The manufacturing sequence of the heat-dissipating 7L piece is not shown in the figure 19A to 19C. The figure is the fourth state.

20A 20E is a series of front cross-sectional views showing a second embodiment of the method for manufacturing a heat dissipating 7G member of the present invention, wherein the second 〇A to 2〇c diagram shows the component bonding step, and the second GD image system The frictional vibration bonding step is shown, and the 20E is a spacer separation step. 21A to 21D are views showing a third embodiment of the method for manufacturing a heat dissipating member of the present invention, wherein FIG. 21A is a front sectional view showing a step of disposing the fins. FIGS. 21B and 21C are diagrams showing the front side of the substrate disposing step. Fig. 20D is a partial enlarged view of Fig. 21c. Surfaces m to 22B are front cross-sectional views of the series, showing the steps of the second graph, in which the 22A is a step = 2 and the 22B is a spacer. 5th 23A to 23E is a series of front cross-sectional views of the series (four) manufacturing method of the fourth embodiment of the component joint step: Mingdi 24A ~ 24B picture is a series of frontal sectional view, showing the 23A ~ The steps of the current drawing, wherein the 24A figure shows the step of the vibration, and the 24B shows the step of the spacer separation. The picture of the 25A~25B is the series of the oblique. The view is the other embodiment of the thermal element. Rule of law

2036-5808B-PF 164 1270429 Brother 2 6 A~2 6 C is a perspective view of a column showing other embodiments of the heat radiating element of the present invention. The brothers 27A to 2B show the joint portion of the fin and the substrate of the heat-dissipating member which is manufactured continuously, and Fig. 27A is a partially enlarged cross-sectional view, and Fig. 27β is a partially enlarged view of the 27th. Figs. 28A to 28C show the order of frictional vibration engagement, in which the 28A, 28B are front cross-sectional views and the 28Cth is the side view of Fig. 28B. Figs. 29A to 29C are a series of sectional views showing the process of plastic deformation of the overlapping portion of the element and the copper element in Figs. 28a to 28C. Figure 30 is a front cross-sectional view showing another example of frictional vibration engagement of a metal member. Fig. 31 is a perspective view showing an embodiment of the heat dissipating member of the present invention. The brothers 32A to 32E are a series of positive and vertical 丨 而 而 而 而 ^ & & & & & & 止 止 止 止 止 止 止 止 止 止 止 止 止 止 止 止 止 止 止 止 止 止 止苐33A to 33C are a series of oblique full I [51, total # — &amp; ding &lt; pin view, showing an example of the movement of the jig of the jig shown in Fig. 32D. Figure 34 is a perspective view showing another embodiment of the heat dissipating member of the present invention. 34. Figures 35A to 35D are a series of front cross-sectional views showing the method of manufacturing the first heat dissipating member. 36A to 36B are views showing a first embodiment of the heat sink of the present invention, wherein the figure is an exploded perspective view, and the third embodiment of the heat sink is shown in Fig. 37A to Fig. 36A to Fig. 36B. 2036-5808B-PF 165 1270429 3rd 7B 3 7C are the χ direction of the heat sink of the 36A~36B, respectively. Side view and side view of the Υ direction. Figure 38 is a perspective view showing an assembled second embodiment of the heat sink of the present invention. The 39th to 39th drawings show a third embodiment of the heat sink of the present invention, wherein the 39th drawing is an exploded perspective view, and the 3rd drawing is an assembled oblique view. Figure 40 is a top view of the heat sink of the 39th to 39th figure. φ The 4th, 4th, 4th and 4th Cth views are the χ direction of the radiator of the 39th to 39th , the side view and the side view of the Υ direction. Fig. 41 is a perspective view showing the assembled embodiment of the heat sink of the present invention. The fourth embodiment of the heat sink of the present invention is shown in Figs. 42 to 42, wherein the 42nd drawing is an exploded perspective view, and the fourth drawing is an assembled oblique view. Figure 43 is a top view of the radiator of the 42nd to 42nd drawings. Page 43 Β 43C is the χ direction of the radiator of the 42nd Α 42 42 • • 侧视图 side view and side view of the Υ direction. Fig. 4 is a perspective view of an assembled view showing a sixth embodiment of the heat sink of the present invention. The 45th to 45th drawings show the seventh embodiment of the heat sink of the present invention, wherein the 45th drawing is an exploded oblique view, and the f 45β drawing is an assembled oblique view. Figure 46 is a top view of the radiator of the 45th to 45th drawings. The 46th and 46thth views are the direction of the radiator of the 45th to 45th, respectively, and the side view and the side view of the Υ direction. Figure 47 is an assembled perspective view showing the eighth embodiment of the heat sink 2036-5808B-PF 166 1270429 of the present invention. 48A to 48C are views showing the sequence of the first embodiment of the metal element bonding method of the present invention, wherein the 48A, 48B are front cross-sectional views, and the 48Cth is a side view of the 48B. Figs. 49A to 49C are a series of sectional views showing the process of plastic deformation of the overlapping portion of the inscription element and the copper member in Figs. 48A to 48C. Fig. 50A is a partially enlarged view showing the jig of the 48A to 48C. The 50B to 50D drawings show other examples of the grooves of the circumferential faces of the jigs of Figs. 48A to 48C. Fig. 51 is a front sectional view showing another example of frictional vibration engagement of a metal member. The second embodiment of the metal element joining method of a series of front cross-sectional views is shown in Fig. 53A 53B as a series of front cross-sectional views showing the steps following the steps 52A to 52B, wherein Fig. 53A A frictional vibration engagement step is shown 'Fig. 53B showing the spacer detachment step. Fig. 54 is an exploded perspective view showing one embodiment of the jig for the heat dissipating member of the present invention. Fig. 55 is a perspective view showing the mode of the heat dissipating member of the present invention. Ά 56th ~ 56C Figure; 4 - ^ -c* ... slanted view of the , column, showing an example of the movement trajectory of the frictional vibration joint step of Fig. 53. Figure 57 is a Π: ; &quot; face °lJ surface, showing the friction shown in Figure 53

2036-5808B-PF 167 1270429 Another example of the vibration bonding step is shown in Fig. 58 which is a front cross-sectional view of another embodiment of the heat dissipating member of the present invention. In the cross-sectional view, FIG. 59A shows the first state, and FIGS. 59A to 59C show the manufacturing sequence of the heat dissipating component shown in the έr 糸 column, and the 5th 5th and 5th 9th are The second kind of bear. Figure 60A~60G is a front cross-sectional view of a preparation μ, showing Figure 58

The manufacturing of the heat dissipating component shown is '^^, the order, wherein the 60th to 6th C is the third state', and the 60th to 60th is the fourth bear. The 61st to 61th drawings are a front cross-sectional view of the &&gt; 糸 , , , , , , 金属 金属 金属 金属 金属 金属 金属 金属 金属 金属 金属 金属 金属 金属 金属 金属 金属 金属 金属 金属 金属 金属 金属 金属 金属 金属 金属 金属 金属 金属 金属 金属 金属 金属 金属 金属 金属In the step, the 筮β η η θ ^ brother 61D system shows no bonding step, and the 61st image shows the spacer detachment step. Figures 62 to 62D show a fourth embodiment of the metal component bonding method of the present invention, wherein the 62nd drawing shows a front sectional view of the bonding step, and the 62nd, 62C shows a front sectional view of the substrate configuration step. The '苐62D image shows a partial enlarged view of Fig. 62C. Sections 63 to 63 are a series of front cross-sectional views showing the steps following Fig. 62 to 62D, wherein Fig. 63 shows the frictional vibration engagement step. Fig. 63 shows the spacer detachment step. The drawings are a series of front cross-sectional views showing the element bonding step of the first embodiment of the method for manufacturing the heat dissipating member of the present invention. The 65th to 65th drawings are a series of front-facing kitchens, which are the steps of the 64A-64E diagram, wherein the 65A diagram shows the frictional vibration joint 2036-5808B-PF 168 1270429. The spacer separation step is displayed. The drawings of Figs. 66A to 66C show the order of the frictional vibration engagement disclosed in Patent Document 1, wherein the 66A and 66B are front sectional views, and the 66C is a side view of the 66B. Figures 67A-67D are a series of oblique views showing the joint fixture disclosed in the franchise document. Figs. 68A to 68C show the order of the frictional engagement of the metal element joining method of the first embodiment, wherein the 68A, 68B is a front cross section ^, and the 68C is a side view of the 68B drawing. Figures 69A to 69C are a series of sectional views showing the process of plastic deformation of the overlapping portions of the elements and the copper elements of Figs. 68A to 68. Fig. 70 shows the part of the bonding fixture of Fig. 68. Fig. 71A to Fig. 71C show the joint jig used in the metal element joining method of the second embodiment, wherein Fig. 71A is a perspective view, and Figs. 71B and 71C are bottom views of other examples. • 72A~ 72B is a series of oblique views showing other examples of the joining jig used in the joining method of the 70th metal of the second embodiment. Figs. 73A to 73B are a series of sectional views showing the second embodiment. The step of frictional engagement of the sorrowful metal component joining method. Fig. 74A is a perspective view showing a heat dissipating component. Figs. 74B to 74C are a series of sectional views showing the heat dissipating component shown in Fig. 74. Manufacturing steps. Figures 75A to 75B are a series of cut goods, and 1 shows the manufacturing steps of the heat dissipating component. 2036-5808B-PF 169 1270429 The 7th graph is a cross-sectional view showing another example of the heat dissipating component. Figure 77 is an oblique view showing Fig. 78 is a perspective view showing a support jig used in the manufacture of the heat dissipating member of Fig. 76. Figs. 79A to 79C are a series of sectional views, The manufacturing steps of the heat dissipating member shown in Fig. 76 are shown. φ Fig. 8A to Fig. 80D are a series of sectional views and oblique views showing a modification of the heat dissipating member shown in Fig. 76. 81B shows a first embodiment L of the heat dissipating member of the present invention, wherein FIG. 81A is a perspective view, and FIG. 81β is an exploded perspective view. FIG. 82A is a cross-sectional view taken along line AA of FIG. 81A. Fig. 81A is a cross-sectional view taken along line Β. Fig. 82C is a bottom view of Fig. 81A. Figs. 83A to 83B are a series of sectional views showing an example of a method of manufacturing the heat dissipating member of Figs. 81A to 81B. Figures 84A to 84B show the steps following the 83A to 83β map, wherein the j4A picture is a side view, and the 帛84B picture is an enlarged view of the main part. The brother 85 picture is a perspective view, which is shown in the following section 84A~ Steps of the 84B diagram. The system displays the 81A~81B, and the Xu display reads the 8th. 6A~86E is a cross-sectional view of the series. Another example of the manufacturing method of the heat dissipating component of the figure. The &quot;A~87B is a series of sectional views.

Steps of the 86A~86E diagram. 2036-5808B-PF 170 1270429 The drawings of Figs. 88A to 88B are oblique views of a row of materials, and the heat dissipation elements of the present invention are respectively shown in the second embodiment of the third embodiment and the third embodiment. Figs. 89A to 89C are oblique views of a diagonal line of the Lie column, showing the fourth to sixth embodiments of the heat dissipating member of the present invention, respectively. The 90th to 90thth views are oblique views of a material of the Lie column, showing the seventh embodiment to the ninth embodiment of the heat dissipating member of the present invention, respectively. Figs. 91A to 91B are oblique views of a season and an empire, showing a tenth embodiment and an eleventh embodiment of the heat dissipating member of the present invention, respectively. Fig. 92H2B is a series of oblique views showing the first embodiment and the second embodiment of the heat sink of the present invention, respectively. Figures 93A-93B are a series of cross-sectional views showing the cross-sectional shapes and dimensions of the samples of Example ^. Fig. 93C is a histogram showing the simulation results of Example 1. The pictures 94A to 94B are a histogram of the series, showing the results of the example verification. Figs. 95A to 95C are a series of sectional views showing the sectional shape and size of each sample of Example 3. Figures 95D to 95E are a series of histograms showing the simulation results of Example 3. Fig. 9 is a line diagram. Fig. 97 is a line diagram. Fig. 98 is a section diagram. Figure 99 is a cross-sectional view showing the simulation results of Example 4. The simulation results of Example 4 are shown. The first method of the frictional vibration bonding method is shown.

2036-5808B-PF 171 1270429 Application example. Fig. 100 is a cross-sectional view showing a third application example of the frictional vibration joining method. Fig. 1 01 is a cross-sectional view showing a fourth application example of the frictional vibration joining method. Figs. 102A to 102B are a series of sectional views showing a fifth application example of the frictional vibration bonding method. Figs. 103A to 103B are a series of sectional views showing a sixth application example of the frictional vibration joining method. Fig. 1 04 is a cross-sectional view showing a seventh application example of the frictional vibration joining method. Figs. 105A to 105B are a series of sectional views showing an eighth application example of the frictional vibration joining method. The first 0 6 A to 1 0 6 B is a series of sectional views showing a ninth application example of the frictional vibration bonding method. • Fig. 107 is a cross-sectional view showing a tenth application example of the frictional vibration joining method. Fig. 1 08 is a cross-sectional view showing an eleventh application example of the frictional vibration joining method. Fig. 09 is a cross-sectional view showing the twelfth application example of the frictional vibration joining method. Fig. 10 is a cross-sectional view showing a thirteenth application example of the frictional vibration joining method. Figure 111 is a cross-sectional view showing the application example of the frictional vibration joining method of 2036-5808B-PF 172 1270429. Fig. 11 is a cross-sectional view showing a fifteenth application example of the frictional vibration joining method. Fig. 13 is a cross-sectional view showing a sixteenth application example of the frictional vibration joining method. Fig. 114 is a cross-sectional view showing the seventeenth application example of the frictional vibration joining method. Fig. 15 is a cross-sectional view showing the application example of the vibration vibration joining method. Fig. 11 is a cross-sectional view showing the nineteenth application example of the frictional vibration joining method. Fig. 11 is a cross-sectional view showing a twentieth application example of the frictional vibration joining method. Figure 118 is a cross-sectional view showing the second application example of the frictional vibration joining method. Fig. 119 is a cross-sectional view showing the twenty-second application example of the frictional vibration joining method. Fig. 120 is a cross-sectional view showing the twenty-third application example of the frictional vibration joining method. Fig. 121 is a cross-sectional view showing the twenty-fourth application example of the frictional vibration joining method. Fig. 122 is a cross-sectional view showing the twenty-fifth application example of the frictional vibration joining method. Figure 123 is a cross-sectional view showing the twenty-sixth application example of the frictional vibration bonding method of 2036-5808B-PF 173 1270429. Figs. 124A to 124B are cross-sectional views showing a twenty-seventh application example of the frictional vibration joining method. Figs. 125A to 125B are a cross-sectional view showing a twenty-eighth application example of the frictional vibration joining method. [Main component symbol description] 101~aluminum component; 102~copper component; 102b~section; 103'~joint fixture; 1 0 3 b~rotation axis; 105~heat sink material; 105b~ heat sink fin; 106a~ Surface; 108~ heat sink fin support 201'~aluminum component; 202a~surface; 203~joint fixture; 203b~rotation axis; 204'~fin; 2 0 4 a~base end; 204B~planar waveform Fin 205'~ spacer; 101, ~ aluminum element; 102a~ surface; 103~ joint fixture; 103a~ fixture body; 104~ heat dissipation element; 1 0 5 a~ substrate; 106~ heat transfer plate; Bonding fixture table; 201~aluminum component; 202~copper component; 202b~section; 203a~ fixture body; 204~fin; 204''-comb fin; 204A~cylindrical fin; 205~ spacer; 206~substrate; 2036-5808B-PF 174 1270429

206'~substrate; 206B~semi-cylindrical substrate; 21-box type jig body; 211a~蜾 wire hole; 213~ platen; 215~substrate fixing plate; 215b~screw hole; 220~spacer fixture; 2 5 0 ~ heat sink component; 2 51 ~ heat sink component; 253 ~ heat sink component; 2 5 5 ~ heat sink component; 30 Γ ~ aluminum component; 302a ~ surface; 303 ~ joint fixture; 303b ~ rotating shaft; 305a~protrusion; 306a~spacer; 307a~aluminum substrate; 310A~heat sink; 310C~ heat dissipating component; 310E~heat sink; 310G~heat sink; 206A~substrate; 207~reactive layer; Fixture; 212~component setting section; 214~tight bolt; 21 5 a~groove; 216~tight bolt; 23 aluminum alloy thin plate; 2 5 0 '~ heat dissipating component; 252~ heat dissipating component; 2 5 4~ heat dissipating component; 301~aluminum component; 302~copper component; 302b~container; 303a~ fixture body; 304~ aluminum fin; 3 0 5~ copper substrate; 306~ spacer jig; 307~ aluminum heat sink; 307b~ fin; 310B~ heat sink; 31 0D~ heat dissipating component; 310 F~ heat sink; 310H~ heat dissipating component;

2036-5808B-PF 175 1270429

3 2 0~fan; 321'~fan mounting component; 3 21 a~ upper plate section; 3 21 c~ air hole; 321e~ mounting hole; 321g~ grooving; 322a~fan box type; 330~ heat conduction Tube; 340~CPU; 341a~fitting groove; 3 4 3~slot; 344~gate-shaped mounting clip; 3 5 0~ heat dissipating component; 360~ heat dissipating component; 401~aluminum component; 402a~surface; Bonding fixture; 403a~ fixture body; 403c~groove; 404a~base end; 405'~ spacer; 406'~substrate; 411~ box fixture body; 41 la~ screw hole; 321~fan Set the components; 321' 'fan assembly components; 321b ~ side plate parts; 32Id ~ small screw holes; 321f ~ small screws; 3 2 2 ~ fan; 322b ~ mounting holes; 331 ~ base; 3 41 ~ heating elements ; 342~ metal mounting component; 343a~protrusion; 344a~ mounting hole; 3 5 0 '~ heat dissipating component; 360'~ heat dissipating component; 402~copper component; 402b~section; 403'~joint fixture; ~ rotating shaft; 404 ~ fin; 405 ~ spacer; 4 0 6 ~ substrate; 406a ~ another surface; 4 ΊΌ ~ scattered Component manufacturing, manufacturing, fixture 412 to component setting section; 2036-5808B-PF 17 6 1270429 41 3~ pressure plate; 415~ substrate fixing plate; 41 5b~ screw hole; 420~ spacer jig; 450~ heat dissipating component 4 5 0 '~heat dissipating component; 4 6 2a~surface; ^ 463a~ fixture body; 4 6 3 b~ strip; 4 6 3 c~protrusion; 463d~protrusion; 464a~ base end; 464c~ front end ; 502 ~ copper element; 502b ~ section; • 503~ joint fixture; 503b~ rotation axis; 504~ joint fixture; 504b~ rotation axis; 507~ substrate; 508a~ heat sink fin; 509a~ bottom; 509c~ Opening; 510a~recess; 414~tight bolt; 415a~groove; 41 6~tight bolt; 4 3 0~fin sheet, 4 31~ thin alloy plate; 4 6 2~substrate; 463 ~ joint fixture; 4 6 3 B ~ joint fixture; 463C ~ joint fixture; 463D ~ joint fixture; 464 ~ fin; 464b ~ heat sink; 501 ~ aluminum components; 502a ~ surface; 5 0 2 c~ Slit; 503a~ fixture body; 503c~groove; 504a~ fixture body; 5 0 6~ heat dissipation component; 5 0 8~ Thermal element; 509~lower forging die; 509b~internal space; 5Τα~upper forging die; 511~cutting tool; 2036-5808B-PF 177 1270429 511a~tool; 512~heating element; 512b~substrate; 513~supporting device; 514a ~ box type fixture body; 514b ~ tight bolt; 601B ~ heat sink component; 0 6 01D ~ heat sink component; 601F ~ heat sink component; 601H ~ heat sink component; 601J ~ heat sink component; 6 0 2 ~ substrate; 602 b~ Surface; 603~fin; 603a~base end; • 605-CPU; 606a~recess; 607a~spacer; 608~joint fixture; 6 0 8 b~rotation axis; 610~ spacer; 61 2a~ component Setting section; 613~ fixing tool; 620A~ heat sink;

2036-5808B-PF 511b~ support shaft; 512a~ heat sink fin; 512c~edge; 51 3 a~slit; 514~ heat sink manufacturing fixture; 601A~ heat sink component; 601C~ heat sink component; 601E~ heat sink Component; 601G~ heat dissipating component; 6011~ heat dissipating component; 601K~ heat dissipating component; 6 0 2 a~ surface; 602c~ rib; 6 0 3 '~ thin alloy plate; 6 0 4~ heat sink; 6~Blocking material; 607~ spacer jig; 607b~gap; 608a~joining body; 609~ eutectic layer; 610'~ spacer; 612~heating element manufacturing arranging; 614^风翁; 620B ~ radiator; 178 1270429

701~ copper plate; 701b~concave recess; 703~aluminum foil; 7〇4a~ fixture body; 7 0 5~ aluminum plate; 705b~ fitting recess; 706b~ fitting recess; 7 0 8~ copper plate; 709a~ Projection; 710a~fitting protrusion; 71 2~aluminum mesh; 714~copper rod; 714b~fitting recess; 715a~fitting protrusion; 716~copper rod; 717a~glot; 719~ copper heat sink Plate; 720~Ming cover; 722~stainless steel plate; 723a~ fixture body; 724~aluminum profile; 724b~fitting recess; 725a~fitting projection; 726~trailer internal component; 701a~ Projection; 702~copper plate; 704~joining fixture; 704b~rotating shaft; 705a~posting convex portion; 706~aluminum plate; 707~copper plate; 7 0 9~aluminum rod; 71 0~aluminum rod; 711~copper ring 71 3 ~ copper rod; 714a ~ fitting convex; 71 5 ~ aluminum rod; 715b ~ fitting recess; 717 ~ aluminum heat sink; 718 ~ copper cover; 71 9 a ~ groove; Aluminum container; 723~joint fixture; 723b~rotation shaft; 724a~fitting projection; 725~aluminum profile; 7251~fitting recess^726a~roller; 203 6-5808B-PF 179 1270429

726b~jack; 728~aluminum profile; 730~aluminum profile; 732~aluminum profile; 734~expanding fixture; b~protrusion; G~fine groove; 0S~ offset length; V~ travel rate; Cross-section concave fin 440 ~ cross-section concave fin 611 ~ cross-section concave fin 727 ~ inner baffle; 729 ~ aluminum profile; 731 ~ aluminum profile; 733 ~ aluminum profile; Αχ ~ rotation center DS~lower surface; J~joined body; R~circular velocity; US~upper surface; constituent material manufacturing jig component manufacturing jig manufacturing material manufacturing fixture

2036-5808B-PF 180

Claims (1)

1270429 X. Patent application scope · 1 · A metal component bonding method, comprising: providing a plurality of metal components, which are arranged one another in accordance with the order of the melting point; and one side of the metal component having the highest melting point among the metal components, The overlapping portions of the metal members are heated and pressurized to bond the metal members to each other. Φ 2· A metal component bonding method comprising: a first step of superposing a first metal component with a second metal component having a melting point higher than a melting point of the first metal component; and a second step by the first The two metal elements pressurize the first metal element subheat, and the first metal element and the second metal element are joined to each other. 3 · A heat dissipating component, comprising: a plurality of heat dissipating fins, the plate is made of a U-shaped plate, the material is a first metal; and the P substrate is made of a second metal, and the melting point of the second metal (10) The bonding of the scattered (four) sheets to the substrate in (10) #, and the method of joining the metal elements described in the second aspect of the patent. 4· A heat dissipating component comprising: a plurality of heat dissipating scales, wherein the material is a first metal; and the substrate is made of a second metal; The melting point of the second metal is 181 2036-5808B-PF 1270429 at the melting point of the first metal; wherein the heat sink fins and the substrate are connected to each other, and the sigma is used. The metal element bonding method described. 5. A heat dissipating component comprising: a plurality of (four) (wgate) fins, wherein the material f is a first metal; and a genus, and the second metal has a melting point higher than a substrate, and the material is the second first The melting point of the metal; wherein the heat dissipating fins are bonded to the substrate, the metal element bonding method described in claim 2 is used. 6. A heat dissipating component comprising: a plurality of heat dissipating columnar bodies, the material of which is a first metal, and the crucible substrate 'the material of which is a second metal' and the melting point of the second metal is higher than the first metal In the melting point; the bonding of the heat dissipating fins to the substrate in the &amp; 2 is the metal element bonding method described in claim 2 of the patent application. 7. A heat sink comprising: a heat dissipating component and a fan, and having the following features: π 广幻 The heat dissipating component has a right substrate having a copper substrate and a plurality of copper fins or aluminum fins, wherein the copper substrate is guided by ...the twins are connected to a heating element, and the copper fins or fins are star-to-right between each other. ~I. There is a spacing between the two sides of the substrate and the mine back. The circumferential surface of the disc-shaped bonding fixture is pressed into the other surface of the copper substrate and moved along the other surface of the copper substrate, and the copper substrate is bonded by friction vibration bonding by 2036-5808B-PF 182 1270429 With these pieces of steel Korean or Ming Rotary. 8) A heat sink comprising a heat dissipating component and a fan, and having the following features: /, the component has a copper substrate, an aluminum substrate, and a plurality of aluminum fins, wherein the copper substrate is thermally coupled to a heating element, the aluminum substrate is disposed on a surface of the copper substrate, and the aluminum fins are spaced apart from each other and are erected on the surface of the aluminum substrate opposite to the copper substrate; The aluminum substrate and the aluminum fins are integrally formed by extrusion; and a circumferential surface of a circumferentially rotating disk-shaped bonding fixture is pressed into the other surface of the copper substrate, and The copper substrate and the aluminum substrate are bonded by the frictional vibration bonding method along the other surface of the copper substrate. The heat sink according to claim 7 or 8, wherein the heat sink is thermally conductive. a heat pipe, wherein the heat generating body is thermally connected to the copper substrate. 10 - A method for manufacturing a heat dissipating component, comprising: providing a copper substrate, a copper strip is formed on a surface thereof, and is formed Surface with the rib And erecting and arranging a plurality of aluminum fins across the ridges; and heating and pressurizing the interface between the copper substrate and the slabs by the other surface of the copper substrate The aluminum fins are bonded to the copper substrate. 11 · The food processing method described in the first aspect of the patent, wherein the interface between the copper substrate and the aluminum fins is heated and pressurized 2036-5808B-PF 183 1270429, the circumferential surface of a circumferentially rotating disc-shaped joining jig is pressed into the other surface of the copper substrate, and the circumferential surface is moved along the other surface of the substrate. 骞 2036-5808B-PF 184