TWI263865B - Highly plasma etch-resistant photoresist composition containing a photosensitive polymeric titania precursor - Google Patents
Highly plasma etch-resistant photoresist composition containing a photosensitive polymeric titania precursorInfo
- Publication number
- TWI263865B TWI263865B TW089102927A TW89102927A TWI263865B TW I263865 B TWI263865 B TW I263865B TW 089102927 A TW089102927 A TW 089102927A TW 89102927 A TW89102927 A TW 89102927A TW I263865 B TWI263865 B TW I263865B
- Authority
- TW
- Taiwan
- Prior art keywords
- composition containing
- photoresist composition
- plasma etch
- metal oxide
- titania precursor
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G79/00—Macromolecular compounds obtained by reactions forming a linkage containing atoms other than silicon, sulfur, nitrogen, oxygen, and carbon with or without the latter elements in the main chain of the macromolecule
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0042—Photosensitive materials with inorganic or organometallic light-sensitive compounds not otherwise provided for, e.g. inorganic resists
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
- G03F7/0388—Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the side chains of the photopolymer
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Organic Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Materials For Photolithography (AREA)
- Drying Of Semiconductors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/259,229 US6303270B1 (en) | 1999-03-01 | 1999-03-01 | Highly plasma etch-resistant photoresist composition containing a photosensitive polymeric titania precursor |
Publications (1)
Publication Number | Publication Date |
---|---|
TWI263865B true TWI263865B (en) | 2006-10-11 |
Family
ID=22984091
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW089102927A TWI263865B (en) | 1999-03-01 | 2000-02-21 | Highly plasma etch-resistant photoresist composition containing a photosensitive polymeric titania precursor |
Country Status (3)
Country | Link |
---|---|
US (1) | US6303270B1 (zh) |
TW (1) | TWI263865B (zh) |
WO (1) | WO2000052531A1 (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI576663B (zh) * | 2014-10-28 | 2017-04-01 | 三星Sdi 股份有限公司 | 光固化性組成物以及含有該組成物的封裝裝置 |
TWI581329B (zh) * | 2015-04-23 | 2017-05-01 | 東芝股份有限公司 | 圖案形成方法 |
Families Citing this family (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1231511B1 (en) * | 2001-02-09 | 2014-04-02 | Dai Nippon Printing Co., Ltd. | Photosensitive composition for volume hologram recording and photosensitive medium for volume hologram recording |
US6664023B2 (en) * | 2001-03-13 | 2003-12-16 | International Business Machines Corporation | Controlled aging of photoresists for faster photospeed |
US6740469B2 (en) * | 2002-06-25 | 2004-05-25 | Brewer Science Inc. | Developer-soluble metal alkoxide coatings for microelectronic applications |
US7189204B2 (en) | 2002-12-04 | 2007-03-13 | Cardiac Pacemakers, Inc. | Sleep detection using an adjustable threshold |
US20040171743A1 (en) * | 2003-01-21 | 2004-09-02 | Terry Brewer, Ph.D. | Hybrid organic-inorganic polymer coatings with high refractive indices |
US7979122B2 (en) | 2003-04-11 | 2011-07-12 | Cardiac Pacemakers, Inc. | Implantable sudden cardiac death prevention device with reduced programmable feature set |
US20040230229A1 (en) * | 2003-04-11 | 2004-11-18 | Lovett Eric G. | Hybrid transthoracic/intrathoracic cardiac stimulation devices and methods |
US7302294B2 (en) | 2003-04-11 | 2007-11-27 | Cardiac Pacemakers, Inc. | Subcutaneous cardiac sensing and stimulation system employing blood sensor |
US7570997B2 (en) * | 2003-04-11 | 2009-08-04 | Cardiac Pacemakers, Inc. | Subcutaneous cardiac rhythm management with asystole prevention therapy |
US8002553B2 (en) | 2003-08-18 | 2011-08-23 | Cardiac Pacemakers, Inc. | Sleep quality data collection and evaluation |
US7787946B2 (en) | 2003-08-18 | 2010-08-31 | Cardiac Pacemakers, Inc. | Patient monitoring, diagnosis, and/or therapy systems and methods |
US7510531B2 (en) | 2003-09-18 | 2009-03-31 | Cardiac Pacemakers, Inc. | System and method for discrimination of central and obstructive disordered breathing events |
US7887493B2 (en) | 2003-09-18 | 2011-02-15 | Cardiac Pacemakers, Inc. | Implantable device employing movement sensing for detecting sleep-related disorders |
US7396333B2 (en) | 2003-08-18 | 2008-07-08 | Cardiac Pacemakers, Inc. | Prediction of disordered breathing |
US8606356B2 (en) | 2003-09-18 | 2013-12-10 | Cardiac Pacemakers, Inc. | Autonomic arousal detection system and method |
US7656768B2 (en) * | 2004-01-27 | 2010-02-02 | Micron Technology, Inc. | Phase masks for use in holographic data storage |
US7680534B2 (en) | 2005-02-28 | 2010-03-16 | Cardiac Pacemakers, Inc. | Implantable cardiac device with dyspnea measurement |
US7479114B2 (en) * | 2005-12-01 | 2009-01-20 | Cardiac Pacemakers, Inc. | Determining blood gas saturation based on measured parameter of respiration |
US7767926B2 (en) * | 2006-03-29 | 2010-08-03 | Tokyo Electron Limited | Method and system for dry development of a multi-layer mask using sidewall passivation and mask passivation |
WO2007127758A2 (en) * | 2006-04-24 | 2007-11-08 | Displaytech, Inc | Spatial light modulators with changeable phase masks for use in holographic data storage |
US9087739B2 (en) * | 2009-10-19 | 2015-07-21 | International Business Machines Corporation | Pattern improvement in multiprocess patterning |
TWI412459B (zh) * | 2009-12-08 | 2013-10-21 | Univ Nat Taiwan | The method of forming a roller for embossing |
US8647809B2 (en) | 2011-07-07 | 2014-02-11 | Brewer Science Inc. | Metal-oxide films from small molecules for lithographic applications |
US9070548B2 (en) | 2012-03-06 | 2015-06-30 | Rohm And Haas Electronic Materials Llc | Metal hardmask compositions |
US8795774B2 (en) * | 2012-09-23 | 2014-08-05 | Rohm And Haas Electronic Materials Llc | Hardmask |
US9171720B2 (en) | 2013-01-19 | 2015-10-27 | Rohm And Haas Electronic Materials Llc | Hardmask surface treatment |
US9136123B2 (en) | 2013-01-19 | 2015-09-15 | Rohm And Haas Electronic Materials Llc | Hardmask surface treatment |
GB201405335D0 (en) | 2014-03-25 | 2014-05-07 | Univ Manchester | Resist composition |
JP2015199916A (ja) * | 2014-04-02 | 2015-11-12 | Jsr株式会社 | 膜形成用組成物及びパターン形成方法 |
US9515272B2 (en) | 2014-11-12 | 2016-12-06 | Rohm And Haas Electronic Materials Llc | Display device manufacture using a sacrificial layer interposed between a carrier and a display device substrate |
EP3486290A1 (en) * | 2017-11-21 | 2019-05-22 | Allnex Belgium, S.A. | Adhesion promoting compounds for apolar substrates |
JP7059070B2 (ja) * | 2018-03-29 | 2022-04-25 | 大阪瓦斯株式会社 | 樹脂組成物及びその製造方法 |
CN114527630B (zh) * | 2022-04-21 | 2022-08-05 | 之江实验室 | 一种二氧化锆微纳图案的飞秒激光直写方法 |
CN114755884B (zh) * | 2022-06-14 | 2022-09-16 | 之江实验室 | 一种有机无机杂化飞秒激光直写光刻胶 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5254638A (en) * | 1991-03-25 | 1993-10-19 | The Reagents Of The University Of California | Composite materials of interpenetrating inorganic and organic polymer networks |
US5250395A (en) | 1991-07-25 | 1993-10-05 | International Business Machines Corporation | Process for imaging of photoresist including treatment of the photoresist with an organometallic compound |
US5627013A (en) * | 1991-11-14 | 1997-05-06 | Rohm Co., Ltd. | Method of forming a fine pattern of ferroelectric film |
US5328975A (en) * | 1993-04-02 | 1994-07-12 | Ppg Industries, Inc. | Ultraviolet radiation absorbing coating |
JP3899546B2 (ja) * | 1996-03-11 | 2007-03-28 | 株式会社豊田中央研究所 | 層状有機チタノシリケートおよび層状有機チタノシリケートの成形体 |
-
1999
- 1999-03-01 US US09/259,229 patent/US6303270B1/en not_active Expired - Lifetime
-
2000
- 2000-02-21 TW TW089102927A patent/TWI263865B/zh not_active IP Right Cessation
- 2000-02-25 WO PCT/US2000/004869 patent/WO2000052531A1/en active Application Filing
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI576663B (zh) * | 2014-10-28 | 2017-04-01 | 三星Sdi 股份有限公司 | 光固化性組成物以及含有該組成物的封裝裝置 |
TWI581329B (zh) * | 2015-04-23 | 2017-05-01 | 東芝股份有限公司 | 圖案形成方法 |
Also Published As
Publication number | Publication date |
---|---|
WO2000052531A1 (en) | 2000-09-08 |
US6303270B1 (en) | 2001-10-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |