TWI256834B - Inspection device for substrate - Google Patents

Inspection device for substrate

Info

Publication number
TWI256834B
TWI256834B TW094108960A TW94108960A TWI256834B TW I256834 B TWI256834 B TW I256834B TW 094108960 A TW094108960 A TW 094108960A TW 94108960 A TW94108960 A TW 94108960A TW I256834 B TWI256834 B TW I256834B
Authority
TW
Taiwan
Prior art keywords
illumination means
substrate
lights emitted
inspection device
projected
Prior art date
Application number
TW094108960A
Other languages
English (en)
Other versions
TW200607330A (en
Inventor
Yasuo Mizuta
Norihiro Wakita
Original Assignee
Dainippon Screen Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Mfg filed Critical Dainippon Screen Mfg
Publication of TW200607330A publication Critical patent/TW200607330A/zh
Application granted granted Critical
Publication of TWI256834B publication Critical patent/TWI256834B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28C—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA COME INTO DIRECT CONTACT WITHOUT CHEMICAL INTERACTION
    • F28C1/00—Direct-contact trickle coolers, e.g. cooling towers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/04—Shafts or bearings, or assemblies thereof
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F25/00—Component parts of trickle coolers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F27/00—Control arrangements or safety devices specially adapted for heat-exchange or heat-transfer apparatus
    • F28F27/003—Control arrangements or safety devices specially adapted for heat-exchange or heat-transfer apparatus specially adapted for cooling towers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Facsimile Scanning Arrangements (AREA)
TW094108960A 2004-05-28 2005-03-23 Inspection device for substrate TWI256834B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004159065A JP2005337957A (ja) 2004-05-28 2004-05-28 基板検査装置

Publications (2)

Publication Number Publication Date
TW200607330A TW200607330A (en) 2006-02-16
TWI256834B true TWI256834B (en) 2006-06-11

Family

ID=35491695

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094108960A TWI256834B (en) 2004-05-28 2005-03-23 Inspection device for substrate

Country Status (4)

Country Link
JP (1) JP2005337957A (zh)
KR (1) KR100671766B1 (zh)
CN (1) CN100345434C (zh)
TW (1) TWI256834B (zh)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20070099398A (ko) * 2006-04-03 2007-10-09 삼성전자주식회사 기판검사장치와 이를 이용한 기판검사방법
JP2007310674A (ja) * 2006-05-18 2007-11-29 Oki Electric Ind Co Ltd 読み取り装置
JP5481012B2 (ja) * 2006-06-05 2014-04-23 吉郎 山田 表面検査装置
JP4943237B2 (ja) * 2007-06-07 2012-05-30 新日本製鐵株式会社 疵検査装置及び疵検査方法
JP4968138B2 (ja) * 2008-03-31 2012-07-04 ウシオ電機株式会社 照明用光源およびそれを用いたパターン検査装置
JP5395369B2 (ja) * 2008-06-05 2014-01-22 大日本スクリーン製造株式会社 基板検査装置
JP5299037B2 (ja) * 2009-04-04 2013-09-25 日本電産リード株式会社 検査用プローブ
KR101306289B1 (ko) 2011-09-15 2013-09-09 (주) 인텍플러스 평판 패널 검사방법
KR101501129B1 (ko) * 2013-08-23 2015-03-12 주식회사 고영테크놀러지 기판 검사 장치
EP3237837B1 (en) 2014-12-22 2020-02-19 Pirelli Tyre S.p.A. Method and apparatus for checking tyres in a production line
WO2016103110A1 (en) 2014-12-22 2016-06-30 Pirelli Tyre S.P.A. Apparatus for controlling tyres in a production line
JP7364302B1 (ja) * 2023-05-24 2023-10-18 株式会社ロビット 撮像ユニット及び検査システム

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10142101A (ja) * 1996-11-11 1998-05-29 Dainippon Printing Co Ltd 着色膜の検査方法
JPH1114549A (ja) * 1997-04-28 1999-01-22 Hitachi Electron Eng Co Ltd 基板の欠陥検査方法および検査装置
JP2003302356A (ja) * 2002-04-12 2003-10-24 Nikon Corp 欠陥検査装置および欠陥検査方法
JP4005881B2 (ja) * 2002-08-30 2007-11-14 株式会社東芝 露光装置の検査方法

Also Published As

Publication number Publication date
KR100671766B1 (ko) 2007-01-19
CN100345434C (zh) 2007-10-24
KR20060047215A (ko) 2006-05-18
JP2005337957A (ja) 2005-12-08
TW200607330A (en) 2006-02-16
CN1703071A (zh) 2005-11-30

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