TWI247106B - Defect inspection apparatus - Google Patents

Defect inspection apparatus Download PDF

Info

Publication number
TWI247106B
TWI247106B TW093121102A TW93121102A TWI247106B TW I247106 B TWI247106 B TW I247106B TW 093121102 A TW093121102 A TW 093121102A TW 93121102 A TW93121102 A TW 93121102A TW I247106 B TWI247106 B TW I247106B
Authority
TW
Taiwan
Prior art keywords
defect
camera
mark
luminance
inspection device
Prior art date
Application number
TW093121102A
Other languages
English (en)
Chinese (zh)
Other versions
TW200517644A (en
Inventor
Masahiro Ishibashi
Naomichi Chida
Norihide Fujiki
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Publication of TW200517644A publication Critical patent/TW200517644A/zh
Application granted granted Critical
Publication of TWI247106B publication Critical patent/TWI247106B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/0278—Detecting defects of the object to be tested, e.g. scratches or dust

Landscapes

  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Geometry (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
TW093121102A 2003-11-27 2004-07-15 Defect inspection apparatus TWI247106B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003396703A JP4411588B2 (ja) 2003-11-27 2003-11-27 欠陥検査装置

Publications (2)

Publication Number Publication Date
TW200517644A TW200517644A (en) 2005-06-01
TWI247106B true TWI247106B (en) 2006-01-11

Family

ID=34722064

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093121102A TWI247106B (en) 2003-11-27 2004-07-15 Defect inspection apparatus

Country Status (3)

Country Link
JP (1) JP4411588B2 (ja)
KR (1) KR20050051535A (ja)
TW (1) TWI247106B (ja)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005249946A (ja) * 2004-03-02 2005-09-15 Inter Action Corp 表示装置の欠陥検査装置
JP4884828B2 (ja) * 2006-05-01 2012-02-29 株式会社日本マイクロニクス 表示用パネルの処理装置
KR100766946B1 (ko) * 2006-07-14 2007-10-17 삼성에스디아이 주식회사 유기 발광셀의 검사장치 및 그 방법
JP4791928B2 (ja) * 2006-09-28 2011-10-12 株式会社東芝 画像処理装置および画像処理方法
JP4893938B2 (ja) * 2006-10-03 2012-03-07 横河電機株式会社 欠陥検査装置
JP2008096302A (ja) * 2006-10-12 2008-04-24 Yokogawa Electric Corp 欠陥検査装置
WO2009100114A1 (en) 2008-02-04 2009-08-13 Diamond Systems, Inc. Vision system with software control for detecting dirt and other imperfections on egg surfaces
KR101012633B1 (ko) 2008-10-09 2011-02-09 (주) 인텍플러스 듀얼 카메라 비전검사 장치
KR100952703B1 (ko) 2008-12-29 2010-04-13 에이티아이 주식회사 듀얼 카메라를 이용한 기판 검사장치
JP5995165B2 (ja) * 2012-05-31 2016-09-21 株式会社Ｊｏｌｅｄ 表示装置の検査方法、検査装置及び製造方法
KR20150051437A (ko) 2013-11-04 2015-05-13 삼성디스플레이 주식회사 휘도 보정 시스템 및 방법
KR101649424B1 (ko) * 2014-12-31 2016-08-30 한국산업기술대학교산학협력단 위치 제어 시스템 및 방법
CN107024476A (zh) * 2016-03-10 2017-08-08 上海帆声图像科技有限公司 显示面板检测系统及其检测装置与检测方法
DE102017219153B4 (de) * 2017-10-25 2020-03-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V. Vorrichtung und Verfahren zur optischen Überwachung bewegter Bauteile
CN107966275B (zh) * 2017-11-24 2020-01-07 中山依瓦塔光学有限公司 可模拟多姿态检测的镜头检测设备
JP7331311B2 (ja) * 2019-07-16 2023-08-23 株式会社竹中工務店 画像検査装置及び画像検査プログラム
CN114298254B (zh) * 2021-12-27 2024-03-15 亮风台（上海）信息科技有限公司 一种获取光学设备的显示参数测试信息的方法与设备
KR102474125B1 (ko) * 2022-04-11 2022-12-05 주식회사 머신앤비전 퀀텀닷 디스플레이용 휘도 얼룩 고속검사장치
DE102022129464B3 (de) 2022-11-08 2024-01-11 Göpel electronic GmbH Vorrichtung und Verfahren zum Prüfen zwei- oder dreidimensionaler Objekte

Also Published As

Publication number Publication date
JP2005156396A (ja) 2005-06-16
JP4411588B2 (ja) 2010-02-10
KR20050051535A (ko) 2005-06-01
TW200517644A (en) 2005-06-01

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MM4A Annulment or lapse of patent due to non-payment of fees