TWI246380B - Fabrication method of a printed circuit board - Google Patents
Fabrication method of a printed circuit board Download PDFInfo
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- TWI246380B TWI246380B TW93116839A TW93116839A TWI246380B TW I246380 B TWI246380 B TW I246380B TW 93116839 A TW93116839 A TW 93116839A TW 93116839 A TW93116839 A TW 93116839A TW I246380 B TWI246380 B TW I246380B
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1246380 五、發明說明(1) 發明所屬之技術,域 七本發明係有關 有關一種製造印刷♦ 17刷電路板的製造方法,特別俜 先前技術 ~路板時,電鍍鎳/金層的方法。 印刷電路板例如 裝所用的封裝基板\ τ陣列(baU grid array ; BGA)封 以和一外部元件連接糸具有裸露的銲墊及/或導電指,用 請參考第1圖,為一 基板的一印刷電跋’、、 f視圖,係顯示習知作為BGA封裝 刷電路板的正面上反=部分代表性區域。其中,在上述印 周圍;導電跡線15{1’白導#電指140係分布於晶片安裝區120的 背面的導線170 ,泰電指14〇延伸至導通孔160,經由 180係分布於述印二政:妾2面的銲墊13〇 ;電鍍匯流線 導電跡線1 5 0、導平^/ n反达緣,經由分支電鍍線1 8 1與 上述銲墊no、導;::m面的銲墊130電性連接。 180、盘分支^=140、導電跡線150、電鍍匯流線 電指線181的材質通常為銅,而鲜塾130與導 繪示;於外界’用以分別與不同的外部元件(未 生氧化、,巧口此,為防止暴露的銲墊13G與導電指140發 件連接,助暴露的銲墊130與導電指140與上述外部元 18〇盥八W在一電鍍程序中使一電流經由電鍍匯流線 /、刀支電鍍線181傳送至各銲墊130與導電指14〇,而在 /、上電鍍一鎳/金層(未繪示)。 々、通常在半導體封裝後段製程會有一成形的步驟,將已 兀成封I的封裝體自上述印刷電路板的其他部分分離,並1246380 V. Description of the invention (1) The technology to which the invention belongs, domain 7. The present invention relates to a manufacturing method for manufacturing printed circuit boards, especially 俜 the prior art ~ the method of electroplating nickel / gold layer in the circuit board. The printed circuit board is mounted on a package substrate such as a baU grid array (BGA) package, which is connected to an external component. It has exposed pads and / or conductive fingers. Please refer to Figure 1 for an example of a substrate. The printed electric post ', and f views are shown on the front side of a conventional brushed circuit board as a BGA package = part of the representative area. Among them, around the above-mentioned marks; conductive traces 15 {1 '白 导 # electrically finger 140 is a wire 170 distributed on the back of the chip mounting area 120, and the Thai electric finger 14 extends to the via 160 and is distributed through the 180 series. Imprint two: pads 13 on the two sides; conductive traces of the plating bus line 150, flattening ^ / n, and the edge, through the branch plating line 1 8 1 and the above pads no, guide;: m The bonding pads 130 on the top surface are electrically connected. 180, plate branch ^ = 140, conductive trace 150, electroplated bus line electrical finger line 181 are usually made of copper, and fresh 塾 130 and guide are shown; used outside 'to distinguish from different external components (not oxidized) In order to prevent the exposed pad 13G from being connected to the conductive finger 140, the exposed pad 130 and the conductive finger 140 are connected to the above-mentioned external element 180. In a plating process, a current is passed through the plating. The bus line / and knife-plating line 181 are transferred to each pad 130 and the conductive finger 14 and a nickel / gold layer (not shown) is plated on /. 々 Generally, there will be a forming process in the back-end process of the semiconductor package. Step, separating the packaged body I from the other parts of the printed circuit board, and
0646-A20407TWF(N1);ASEK865;dwwang.ptd 第5頁0646-A20407TWF (N1); ASEK865; dwwang.ptd Page 5
ί46380 五、發明說明(2) 同守切听各$電跡線1 5 0與電鍍匯流線1 8 0的連接。但是, 仍會留下分支電鍍線1 8 1。 、、:、、;而 卩返著市場上對電子產品要輕、薄、短、小的需· f ^在印刷電路板的設計上,必須在有限面積中,放入更 =密度的電路走線,使上述殘留的分支電鍍線181的分布 密度也隨著增加,會導致鄰近的分支電鍍線1 8 1之間會產 生感應電感(mutual inductance)及感應電容(mutual capacitor)而發生串音效應(cr〇sstalk effect),不但會 〜#電路Λ號品質及系統穩定度,更會影響到導電跡線 150的特性阻抗(character impedance),而對使用上述 刷電路板的電子產品的電性造成不良影響。 發明内容 有鑑於此,本發明的主要目的係提供一種印刷電路 的製造方法,減少殘留電鍍線的密度與長度,以提升 上述印刷電路板的電子產品的電性表現。 為達成本發明之上述目的,本發明係提供一種 路板的製造方&,包含:提供一基板,上述基板的 分隔為一周邊區與一線路佈局區;形成一線路層於上 面上,其包括··一電鍍匯流線(pUtlng bus)於上述周屬、 區·; 一接地/電源線(ground/p〇wer Une)於上述線路义 區,一電鍍線,電性連接上述電鍍匯流線與上述接 ° 源線;及一連接線,延伸自上述接地/電源線,具 1 點與一接點,上述接點位於上述接地/電源線與上述俨= 之間;形成-圖案化的防銲層覆蓋上述基板與上述線而: 0646 - A20407TWF( N1); ASEK865; dwwang. p t ci 第6頁 12461a — 五、發明說明(3) 層,並分別暴嗄 連接線、與丄^技述接地/電源線與上述接點之間的上述 接線,但未覆^點,形成一罩幕層,覆蓋暴露的上述連 於上述接點现述接點;以電鍍的方式,形成一金屬層· 接線。 夕除上述罩幕層;以及移除暴露的上述連 本發明的特Μ ».ί 46380 V. Description of the invention (2) Tong Shou listens to the connection between each electric track line 150 and the plating bus line 180. However, branch plating lines 1 8 1 remain. 、,: ,,; and the need for electronic products on the market to be light, thin, short, and small · f ^ In the design of printed circuit boards, you must put more = density circuits in a limited area Line, so that the distribution density of the residual branch plating lines 181 also increases, which will cause mutual inductance and mutual capacitor between adjacent branch plating lines 1 8 1 and cause crosstalk effects. (Cr〇sstalk effect), will not only affect the quality of ## Λ and system stability, but also affect the characteristic impedance of the conductive trace 150, and cause the electrical properties of the electronic products using the above-mentioned brushed circuit boards. Adverse effects. SUMMARY OF THE INVENTION In view of this, the main object of the present invention is to provide a method for manufacturing a printed circuit, which reduces the density and length of the residual plating lines, so as to improve the electrical performance of the electronic products of the printed circuit board. In order to achieve the above object of the present invention, the present invention provides a method for manufacturing a board & comprising: providing a substrate, the substrate is separated into a peripheral area and a circuit layout area; and a circuit layer is formed on the substrate, including: ·· A plating bus (pUtlng bus) in the above-mentioned districts and districts; · A ground / power line (ground / power une) in the above-mentioned circuit definition area, a plating line, electrically connecting the plating bus and the above Connect to the source line; and a connecting line extending from the ground / power line with 1 point and a contact, the contact is located between the ground / power line and 俨 =; forming a patterned solder mask Cover the above substrate and the above lines: 0646-A20407TWF (N1); ASEK865; dwwang. Pt ci Page 6 12461a — V. Description of the invention (3) layer, and separately expose the connection line, and grounding / power supply The above-mentioned connection between the wire and the above-mentioned contact, but without covering the point, forms a cover layer, covering the exposed above-mentioned contact connected to the above-mentioned contact; a metal layer · connection is formed by electroplating. In addition to the above-mentioned cover layer; and remove the above-mentioned features of the present invention ».
Une)與連接沒V ,在於利用接地/電源線(gr〇und/p0we 述接地/電;;II生少只需要一條電鑛線連接上 述電鍍線與接地/5 J::線,纟電鍍時,電流可經由上 接點鍍上—全屬 Λ、、在到達連接線上的接點,而在上述 切斷上述連金層。而後,再以㈣的方Ϊ 最少只殘留一條電鍍:接地/電源線的電性連接。最後, 板的】子產品的電。成使用所製造的印刷電, 端點可:導為導電指(finger)或銲墊;而上, 為了讓本發明之μ 明顯易懂,下文特舉—°二他目的、特徵、和優點能| 詳細說明如下: 較佺貫施例,並配合所附圖示,f 實施方式Une) and the connection without V, is to use the ground / power line (ground, power, ground; electricity); II students need only one electric mine line to connect the above plating line and ground / 5 J :: line, when plating , The current can be plated through the upper contact-all belong to Λ, the contacts that reach the connection line, and the above-mentioned gold layer is cut off. Then, only one piece of electroplating is left in the following way: ground / power The electrical connection of the wires. Finally, the electricity of the sub-products of the board. The printed electricity manufactured is used, and the endpoints can be: conductive fingers or pads; and in order to make the μ of the present invention significantly easier Understood, the following are enumerated-° other goals, characteristics, and advantages can be explained in detail as follows: more consistent examples, and in conjunction with the accompanying drawings, f
睛麥考第2A 丨尔絲貝不Eyes on McCaw 2A
明較佳實施例之印刷’’’、一糸列之俯視圖,々 請參考第2A圖;:板:製造方法的流程。 + AA e 无 k供一基板2 Ο 0。欲制、生 電路的印刷電路板時, ^ 奴衣造 ,,..,λ ^ 基板2 〇 〇為一介電質例如乎妒 (Ρ〇1 y 1 m 1 d e )等;欲絮、生々 私貝W如ι 5脸 衣义夕層電路的印刷電路板時,The printed embodiment of the preferred embodiment is illustrated as a top view of a row. Please refer to FIG. 2A; + AA e no k for a substrate 2 0 0. When you want to make and produce printed circuit boards, ^ slave clothes made ,, .., λ ^ substrate 2000 is a dielectric such as jealousy (PO1 y 1 m 1 de), etc .; Private shells such as 5 face Yiyi layer circuit when printed circuit board,
0可為一核〜(c 〇 r e )基板例如可由陶瓷材料、有機材 ^纖維強化有機材料(Fiber-reinforced)或顆粒強化有 榔材貝(Particle〜reinf〇rced)等所構成,例如:環氧樹. 月i(Ep〇Xy resin)、聚乙醯胺(p〇lyimide)、順雙丁醯二酸 5皿亞 fe / 二氮阱樹脂(Bismaleimide triazine —based, 虱酯(Cyanate ester)等,亦可以為表面覆上一層積 "電層的已完成核心電路佈局的核心基板。 基板2 0 0的一表面,特別是用以黏著一外部元件的表 面,具有一周邊區2 0 1與一線路佈局區2 〇 3 ;當欲製造用於 G A封I基板的印刷電路板時,線路佈局區2 〇 3内更可包含 一晶片黏著區2 〇 2。 以下的圖式第2B〜21圖僅取基板2 〇〇的一部分具代表性 的區,來說明本發明的實施步驟,均為簡化之圖式,其僅 j不意方式顯示出與本發明有關之結構單元,而上述結構 早兀不一定是以具體實施時的實際數目、形狀、及尺 例而繪製。 線路層2 1 0 接下來’在基板2〇〇的上述表面上形成 分別示於第2B〜2C圖中。0 can be a core ~ (c ore) substrate, for example, can be composed of ceramic materials, organic materials ^ fiber-reinforced organic materials (Fiber-reinforced) or particle-reinforced shellfish (Particle ~ reinfrced), etc. Oxygen tree. Epoxy resin, polyimide, bis-succinic acid, 5 fe-fe / diazine-based resin, Cyanate ester, etc. It can also be a core substrate whose surface has been covered with a layer of "electrical layer" to complete the core circuit layout. A surface of the substrate 200, especially a surface for adhering an external component, has a peripheral region 201 and a Circuit layout area 2 03; When a printed circuit board for a GA-sealed I substrate is to be manufactured, the circuit layout area 2 03 may further include a wafer adhesion area 2 02. The following diagrams 2B to 21 only show A representative area of the substrate 2000 is taken to illustrate the implementation steps of the present invention, which are simplified diagrams, which only show the structural units related to the present invention in an unintended manner, and the above structure may not necessarily be early. Is the actual number and shape of the specific implementation , Foot and plotted embodiment. Next circuit layer 210 'are formed are shown in FIG 2B~2C on the surface of the substrate 2〇〇.
在第2 B圖中,係用以形成一單層的印刷電路板,例 為軟式印刷電路板或用於薄型BGA封裝的封裝基板,此曰: ::用的基板2 0 0 (繪示於第2aei)的材質通常為聚醯亞序 m質。第2B圖所示者’係用以形成用於薄型bga封身 勺封衣基板,其線路佈局區2〇3更包含一晶片黏著區2〇2 線路層210的形成,係在基板2〇〇(繪示於第2八圖)上In Figure 2B, it is a printed circuit board used to form a single layer, such as a flexible printed circuit board or a packaging substrate for a thin BGA package. This is: :: Used substrate 2 0 0 (shown in The material of 2aei) is usually polymethylene. The one shown in FIG. 2B is used to form a coating substrate for a thin bga body spoon, and its circuit layout area 203 further includes a wafer adhesion area 200, and the formation of the circuit layer 210 is on the substrate 200. (Shown in Figure 28)
1246380 五、發明說明(5) 鋪上一層金屬層例如銅層之後,再將上述銅層圖形化成為 線路層2 1 0 ;或是直接在基板2 〇 〇上直接依照一既定圖形以 物理氣相沈積例如濺鍍或金屬化學氣相沈積的方式,形成 、、泉路層2 1 0。在線路層2 1 〇中,電鍍匯流線(p 1 a u n g bus)21 1係位於基板2 0 0的周邊區2i 1上(請一併參考第2八 圖)’接地/電源線(g r 〇 u n d / p 0 w e r π n e ) 2 1 2係位於線路佈 局區2 0 3上;電鍍線213於電鍍匯流線211與接地/電源線 2 1 2之間形成電性連接;連接線2丨4,具有一第一端點 214a、第二端點214b、與接點214c,第一端點214a電性連 接於接地/電源線212,而使連接線214自接地/電源線2 12 延伸至第二端點214b,接點2 14c位於接地/電源線212與第 二端點2 14b之間。 接地/電源線212通常設置在緊鄰晶片黏著區2〇2之外 侧’可完全或僅部分圍繞晶片黏著區20 2。而第2B圖所績 不的第二端點214b為一銲墊,在後製程中會在電鍍金屬層 之鈾在本俯視圖未繪示的另一表面對基板2 〇 〇作圖案化的 處理,以在上述的另一表面暴露第二端點214|3的另一表 面,以在後續的電鍍製程中,在第二端點2丨4b的另一表面 與接點214c上鍍上金屬層。而第2B圖所繪示的接點以“則 為一導電指(finger)。 在第2 C圖中,係用以形成多層的印刷電路板,用於 BGA封裝體的封裝基板。線路層2 1 〇的形成、各元件及其連 結關係可參考第2B圖之敘述,在此便不加重複。惟此處的 第一端點2 1 4 b為一導通孔、而接點2 1 4 c為一導電指,而使1246380 V. Description of the invention (5) After laying a metal layer such as a copper layer, the above copper layer is patterned into a circuit layer 2 10; or directly on the substrate 2000 in a physical vapor phase in accordance with a predetermined pattern Deposition, such as sputtering or metal chemical vapor deposition, forms the spring layer 2 1 0. In the circuit layer 2 1 〇, the plating bus (p 1 aung bus) 21 1 is located on the peripheral area 2i 1 of the substrate 2 0 (please refer to FIG. 28 together) 'ground / power line (gr und / p 0 wer π ne) 2 1 2 is located on the line layout area 2 0 3; the plating line 213 forms an electrical connection between the plating bus line 211 and the ground / power line 2 1 2; the connecting line 2 丨 4 has A first terminal 214a, a second terminal 214b, and a contact 214c. The first terminal 214a is electrically connected to the ground / power line 212, and the connecting line 214 extends from the ground / power line 2 12 to the second end. The point 214b, the contact 2 14c is located between the ground / power line 212 and the second terminal 2 14b. The ground / power line 212 is usually disposed immediately outside the wafer adhesion area 202, and may completely or only partially surround the wafer adhesion area 202. The second end point 214b shown in FIG. 2B is a solder pad. In a later process, the substrate 2000 is patterned on the uranium plating metal layer on another surface not shown in the plan view. The other surface of the second end point 214 | 3 is exposed on the other surface, so that in the subsequent electroplating process, a metal layer is plated on the other surface of the second end point 2b and the contact point 214c. The contact shown in FIG. 2B is “a finger”. In FIG. 2C, it is used to form a multi-layer printed circuit board and a packaging substrate for a BGA package. Circuit layer 2 The formation of 10, the components and their connection can be referred to the description in Figure 2B, and will not be repeated here. However, the first end point 2 1 4 b here is a via, and the contact point 2 1 4 c As a conductive finger
0646-A20407TWF(N1);ASEK86 5;dwwang.p t d 第9頁 S Ϊ連接至基板2°。(繪示於第2A圖)另-表面上 a " 〇人杯墊261。但連接線2 6 0與銲墊261非相Μ 士 發明之特徵,故後續的圖式均略去不繪二墊261非相關本 孰染=,i2D〜21圖所緣示的步驟’係接續於第2c圖。 =心=技藝者亦可以將相同的步驟接續在第26 者,=此將其省略不重複敘述。 曰下 晴茶考第2D圖’形成-圖案化的防銲層(s〇lder mask)230覆芸美把主姿上 现土板2 0 0 (印麥考弟2A圖)與線路層210(請參 ^弟D,圖…),防銲層23〇較好為具有第一開口231與第二開 1開口 231暴露位於接地/電源線212(請參考第 Z C圖)與接點2 1 4 C之Psl的i車旅綠9 1 /1 卜卜 (間的連接線214,第二開口 2 3 2則暴露 Ϊ:二' ,熟悉此技藝者亦可以視需要形成另-圖 覆蓋於第%圖所示的連接線2 60上,並暴露 麵"塾」b 1 〇 94n,接^來甘請參考第冗圖,於第一㈤口231形成一罩幕層 i盍,、内暴露的連接線21 4(請參考第2d圖)。罩幕屌 ΙΓΛ好為不溶於水或是防水的物f,以在後續的電鍍的g 衣t ,防止電鍍液接觸到第一開口2以内的連接線2U。 :J弟- P肩口 231内的連接線214因接觸到電鍍液而鍍上金 屬層例如鎳/金層時’因為特別是上述鎳/金層中的金為具 化學鈍性的元素,會妨礙後續蝕刻第—開口231内的連接 線2 1 4的步驟。 、接下來請參考第2F圖,在電鍍液中,使電流自電鍍匯 流線2 11,經由電鍍線2 1 3、接地/電源線2丨2,到達暴露的0646-A20407TWF (N1); ASEK86 5; dwwang.p t d p.9 S Ϊ is connected to the substrate 2 °. (Shown in Figure 2A) another-on the surface a " 〇 coaster 261. However, the connecting wire 2 60 is not related to the characteristics of the invention of the solder pad 261, so the subsequent drawings omit the non-relationship of the second pad 261, and the steps shown in the figure from i2D to 21 are continuations. In Figure 2c. = 心 = The artist can also continue the same steps to the 26th person, which is omitted here and will not be repeated. The 2D picture of the next clear tea test 'formation-patterned solder mask 230 overlays the main position on the soil plate 2 0 0 (India Cordia 2A picture) and the circuit layer 210 ( Please refer to D, figure ...), the solder resist 23 preferably has a first opening 231 and a second opening 1 231 exposed on the ground / power line 212 (please refer to Figure ZC) and the contact 2 1 4 C's Psl's i-Car Travel Green 9 1/1 Bubu (the connection line 214, the second opening 2 3 2 is exposed Ϊ: 二 ', those who are familiar with this skill can also form another-as required. The connection line 2 60 shown in the figure, and the exposed surface " 塾 "b 1 〇94n, then please refer to the first redundant figure, forming a cover layer i 盍 on the first port 231, the exposed inside Connection line 21 4 (please refer to Figure 2d). The cover 屌 ΙΓΛ is preferably insoluble in water or water-proof material f, in order to prevent the plating solution from contacting the connection within the first opening 2 in the subsequent plating g. Wire 2U .: J-P-The connecting wire 214 in the shoulder 231 is plated with a metal layer such as a nickel / gold layer due to contact with the plating solution, because in particular, the gold in the above nickel / gold layer is a chemically inert element Will hinder Continue the steps of etching the connection line 2 1 4 in the opening 231. Please refer to FIG. 2F next. In the plating solution, make the current flow from the plating bus line 2 11 through the plating line 2 1 3. Ground / power line 2 丨 2, reach the exposed
1246380___… 五、發明說明(7) 接點214c,而在其上鍍上一金屬層2 5 0例如為鎳/金層。而 · 更可以同時或分別在第2C圖所示的銲墊261上,亦鍍上上 述金屬層2 5 0。 · · 接下來請參考第2G圖,移除第一開口 231内的罩幕層- 240 〇 最後,請參考第2 Η圖,以例如蝕刻的方式,移除第一 開口 2 3 1内暴露的連接線2 1 4。第2 I圖則是將防銲層2 3 0視 為透明,顯示出其下的線路層2 1 〇。由於第一開口 2 3 1内的 連接線214已被移除,切斷了連接線214與接地/電源線212 之間的電性連接。而接地/電源線2 1 2與電鍍匯流線2 1 1之 間的電性連接’可藉由後續的成形製程中切除基板2 〇 〇的 0 周邊區2 1 1時’同時切除電鍍匯流線2 11而被切斷。 如上所述,本發明利用接地/電源線2 1 2與連接線2工4 電性連接,最少只需要一條電鍍線2 1 3連接接地/電源線 2 1 2與電鍍匯流線2 1 1,在電鍍時,電流可經由電鍍線2丄3 與接地/電源線212到達連接線214上的接點214c,而在接 點2 1 4 c鍍上鎳/金層2 5 0。而後,再以蝕刻的方式切斷連接 線2 1 4與接地/電源線2 1 2的電性連接。最後,最少只殘留 一條電鍍線2 1 3,而不致對使用所製造的印刷電路^的電 子產品的電性造成不良影響,係達成上述本發明之主要目 的。 , 然本發明已以較佳實施例揭露如上’然苴並 限定本發明,任何熟習此技藝者,在不脫離本發 和範圍内,當可作些許之更動與潤飾,因此本發明之=1246380 ___... V. Description of the invention (7) The contact 214c is plated with a metal layer 2 50 such as a nickel / gold layer. Furthermore, the metal layer 2 50 may be plated on the pads 261 shown in FIG. 2C at the same time or separately. · · Please refer to Figure 2G next, remove the mask layer in the first opening 231-240 〇 Finally, please refer to Figure 2 Η, and remove the exposed part of the first opening 2 3 1 by, for example, etching. Connection line 2 1 4. In Fig. 2I, the solder resist layer 2 30 is regarded as transparent, and the wiring layer 2 10 below it is shown. Since the connection line 214 in the first opening 2 31 has been removed, the electrical connection between the connection line 214 and the ground / power line 212 is cut off. The electrical connection between the ground / power line 2 1 2 and the plating bus line 2 1 1 'can be used to cut off the substrate 2 in the subsequent forming process. 0 0 peripheral area 2 1 1' simultaneously cut off the plating bus line 2 11 and was cut off. As mentioned above, the present invention uses the ground / power line 2 1 2 and the connection line 2 to be electrically connected. At least one electroplated line 2 1 3 is required to connect the ground / power line 2 1 2 to the electroplated bus line 2 1 1. During electroplating, the current can reach the contact 214c on the connection line 214 through the plating line 2 丄 3 and the ground / power line 212, and the contact 2 1 4 c is plated with a nickel / gold layer 2 50. Then, the electrical connection between the connection line 2 1 4 and the ground / power line 2 1 2 is cut by etching. Finally, at least one plating line 2 1 3 remains, without adversely affecting the electrical properties of the electronic product using the printed circuit ^ manufactured, which achieves the above-mentioned main object of the present invention. However, the present invention has been disclosed in the preferred embodiment as above, and the present invention is limited. Anyone skilled in this art can make some changes and retouch without departing from the scope and scope of the present invention. Therefore, the present invention =
0646-A20407TWF(N1);ASEK865;dwwa ng.p t d0646-A20407TWF (N1); ASEK865; dwwa ng.p t d
12463801246380
0646-A20407TWF(N1);ASEK865;dwwang.p td 1246380_— 圖式簡單說明 第1圖為一俯視圖,係顯示一習知的印刷電路板。 第2 A〜2 I圖為一系列之俯視圖,係顯示本發明較佳實 施例之印刷電路板的製造方法的流程。 ^ 符號說明 1 2 0〜晶片安裝區 1 3 0〜焊塾 1 4 0〜導電指 1 5 0〜導電跡線 1 6 0〜導通孔 1 7 0〜導線 1 8 0〜電鍍匯流線 1 8 1〜分支電鍍線 2 0 0〜基板 201〜周邊區 2 0 2〜晶片黏著區 2 0 3〜線路佈局區 2 1 0〜線路層 2 1 1〜電鍍匯流線 2 1 2〜接地/電源線 2 1 3〜電鍍線 2 1 4〜連接線 2 1 4 a〜第一端點 2 1 4 b〜第二端點 2 1 4 c〜接點0646-A20407TWF (N1); ASEK865; dwwang.p td 1246380_— A brief description of the drawing Figure 1 is a top view showing a conventional printed circuit board. Figures 2A to 2I are a series of top views showing the flow of a method for manufacturing a printed circuit board according to a preferred embodiment of the present invention. ^ Explanation of symbols 1 2 0 ~ Wafer mounting area 1 3 0 ~ Solder pad 1 4 0 ~ Conductive finger 1 5 0 ~ Conductive trace 1 6 0 ~ Via hole 1 7 0 ~ Conductor 1 8 0 ~ Plating bus line 1 8 1 ~ Branch plating line 2 0 0 ~ Substrate 201 ~ Peripheral area 2 0 2 ~ Wafer adhesion area 2 0 3 ~ Line layout area 2 1 0 ~ Line layer 2 1 1 ~ Plating bus line 2 1 2 ~ Ground / power line 2 1 3 ~ plated wire 2 1 4 ~ connecting wire 2 1 4 a ~ first terminal 2 1 4 b ~ second terminal 2 1 4 c ~ contact
0646-A20407TWF(N1); ASEK865; dwvvang. ptd 第13頁 12463800646-A20407TWF (N1); ASEK865; dwvvang. Ptd Page 13 1246380
0646-A20407TWF(N1);ASEK86 5;dwwang.p t d 第14頁0646-A20407TWF (N1); ASEK86 5; dwwang.p t d p. 14
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TW93116839A TWI246380B (en) | 2004-06-11 | 2004-06-11 | Fabrication method of a printed circuit board |
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CN103165560B (en) * | 2013-02-06 | 2016-12-28 | 日月光半导体制造股份有限公司 | Substrate and apply its semiconductor structure |
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CN104427789B (en) * | 2013-08-22 | 2017-09-12 | 鹏鼎控股(深圳)股份有限公司 | Multilayer circuit board and preparation method thereof |
CN111063619B (en) * | 2019-12-31 | 2021-12-24 | 中国电子科技集团公司第十三研究所 | Electroplating method |
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CN103165560B (en) * | 2013-02-06 | 2016-12-28 | 日月光半导体制造股份有限公司 | Substrate and apply its semiconductor structure |
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