TWI240323B - A precise wafer etching method - Google Patents
A precise wafer etching method Download PDFInfo
- Publication number
- TWI240323B TWI240323B TW93131076A TW93131076A TWI240323B TW I240323 B TWI240323 B TW I240323B TW 93131076 A TW93131076 A TW 93131076A TW 93131076 A TW93131076 A TW 93131076A TW I240323 B TWI240323 B TW I240323B
- Authority
- TW
- Taiwan
- Prior art keywords
- wafer
- etching
- nozzle
- wafers
- precise
- Prior art date
Links
Landscapes
- Weting (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW93131076A TWI240323B (en) | 2004-10-14 | 2004-10-14 | A precise wafer etching method |
JP2005298610A JP2006121075A (ja) | 2004-10-14 | 2005-10-13 | ウエハの高精度エッチング方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW93131076A TWI240323B (en) | 2004-10-14 | 2004-10-14 | A precise wafer etching method |
Publications (2)
Publication Number | Publication Date |
---|---|
TWI240323B true TWI240323B (en) | 2005-09-21 |
TW200612486A TW200612486A (en) | 2006-04-16 |
Family
ID=36538609
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW93131076A TWI240323B (en) | 2004-10-14 | 2004-10-14 | A precise wafer etching method |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP2006121075A (ja) |
TW (1) | TWI240323B (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI564952B (zh) * | 2015-01-30 | 2017-01-01 | Ventilation process equipment |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10529543B2 (en) * | 2017-11-15 | 2020-01-07 | Taiwan Semiconductor Manufacturing Co., Ltd. | Etch process with rotatable shower head |
CN111554610A (zh) * | 2020-04-16 | 2020-08-18 | 清华大学 | 微腔刻蚀基底盛放装置及微腔刻蚀系统 |
-
2004
- 2004-10-14 TW TW93131076A patent/TWI240323B/zh active
-
2005
- 2005-10-13 JP JP2005298610A patent/JP2006121075A/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI564952B (zh) * | 2015-01-30 | 2017-01-01 | Ventilation process equipment |
Also Published As
Publication number | Publication date |
---|---|
JP2006121075A (ja) | 2006-05-11 |
TW200612486A (en) | 2006-04-16 |
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