TWI239027B - Electrode set for dielectric plasma discharging system - Google Patents

Abstract

The present invention is related to the electrode set for dielectric plasma discharging system. High-voltage electric field, which is formed by connecting AC intermediate-frequency power supply and high-voltage transformer, is used to excite the processing gas, which is introduced into the electric field, to form the working plasma. Two parallel electrodes are used to form the electrode set. One of the electrodes is the flat electrode, which is provided with the conducting electrode pin, or the round tube, cylindrical electrode having no electrode pin. The other electrode is the flat electrode or the round tube, cylindrical electrode formed by the combination of dielectric and metal for connecting and passing the slab-shape work piece inside. Or, the electrode set is the tubular electrode formed by the combination of dielectric and metal for directly passing the linear work piece inside; and the linear work piece is used as the other electrode. Thus, it is capable of locally introducing the processing gas to perform plasma-discharging treatment for the continuous and automatic plasma treatment process.

Description

1239027 Description of the invention: [Technical field to which the invention belongs] The present invention relates to an electrode group for a dielectric plasma discharge system, and particularly to a dielectric plasma discharge system designed for continuous automated processing processes. The private pole group enables it to be equipped with concentrated plasma energy in a specific area to quickly complete the scheduled plasma processing worker. [Previous technology] In recent years, the use of gas free (plasma) principle to remove pollutants by gaseous oxidation has been continuously researched and developed; such as the Electron Beam method, corona discharge method, Microwave method (Micrwave) 'Radio Frequency (RF), Dielectric Barrier Discharge (DBD), etc., have been proven to have a radon treatment effect. Among them, the dielectric discharge method can be effectively discharged under normal pressure and has a low cost. It is one of the current mainstream researches on the removal of pollutants by non-thermoplasma, and the dielectric plasma discharge method has been widely used. In plastic film printing processing, ore electrostatic screening separator, ozone generator, surface modification, surface cleaning, radioactive waste, exhaust gas treatment, etc. The dielectric plasma discharge system used in category S is composed of a set of AC intermediate frequency power supply and a set of high voltage transformers connected to a set of electrode groups. The electrode group includes two parallel plates. The first electrode is a metal electrode, and the second electrode is an electrode composed of a dielectric such as ceramic and a metal, and the second electrode faces the first electrode with a ceramic surface, whereby the first and second electrodes are respectively After the transformer is connected, even if a high-voltage 1239027 electric field is formed in the electrode group, at this time, when the current + h + Tian pair provincial electrode group space is introduced with a high-pressure process gas, even if the process gas is affected by the high-voltage electric field, Dissociation produces electropolymerization for work. Although the front-disc dielectric electrical equipment discharge system can provide an item of plasma treatment system for the surface treatment of articles, however, because the system used in this system adopts the design of two flat plates, it is impossible to make the plasma on the electrode. The group presents the effect of concentrating plasma energy in a specific area. Therefore, if the dielectric surface electrode system is used in the process of a continuous automated production system, the time in the moving electrode group of the workpiece will be short, and the electrode The energy cannot be completely concentrated, and the effect of the electropolymerization treatment on the workpiece is inferior. The plasma discharge system is biased towards the static energy treatment. ^^; ^^ The electricity in the shell group for a predetermined time; ;;, that is, the work input. The operating mode of electrode surplus and output is not suitable for the continuous processing mode of dynamic conveyance. "Automated processing of the manufacturing process, and this static; type will lengthen the process operation time, and there is a problem of poor process efficiency. [Summary of the invention] The main purpose of r is to provide-items that are different from the conventional dielectric plasma discharge thunder%, which is also used for 7) 1 ¾ dielectric dielectric ~ r dielectric dielectric plasma discharge treatment & Q uot; ... The electrode group used in the slurry discharge system can be applied to the automated continuous process. "In order to achieve the purpose of the previous disclosure, the technical electrode group proposed by the present invention has two electrodes arranged in parallel. The first is to guide the case by making the electrode, and the other is a composite of dielectric and metal; plate = = Flat plate electrode, to provide the flat plate workpiece to be processed to pass through 53 or cylindrical

Claims (1)

1239027 The scope of patent application: • The exchange of a type of dielectric plasma discharge system is composed of 4 groups, the brother pole group, which is connected to the voltage and current to form a source of ff for f and a local voltage transformer for The introduction of the high body produces the required ° package If% 'For the process gas electrode introduced into the space of the electrode group, the Γ is used as a plasma. The electrode group mainly includes two sides of two electrodes arranged in parallel: the electrode is a flat conductive electrode 'The first electrode faces the second electrode through a number of equally spaced linearly arranged electrode needles, and the first substance faces the: = composite electrode formed by combining with a conductive metal, and the dielectric is electrified to form electricity :. And keep a predetermined distance from the tip of the conductive electrode needle, use the electrode group 2 / medium ° = the first range of the patent range of the dielectric plasma discharge system d " brother-the electrode is a flat conductive electrode, the dielectric f 嗖On the plate facing the brother-electrode. " Dian Bei-Yu Ji Group 3 Li 1 \ Shen! The scope of the first item of patent is the electricity of the dielectric polymerized discharge system. The electrode is a circular tube-shaped conductive electrode, and the dielectric covers the outer surface of the electrode. 4 The electric charge of the dielectric plasma discharge system in the first item of the scope of the patent application 1; the first electrode is a cylindrical conductive electrode. The dielectric is coated on the outer surface of the first electrode. . For example, the electrode group of the dielectric electric discharge system for the items 1, 2, 3 or 4 in the scope of patent application, wherein the dielectric is ceramic. For example, the electrode group of the dielectric polymerized discharge system of the item 1, 2, 3 or 4 of the scope of patent application, wherein the dielectric is glass. 7 · If the scope of the patent application is No. 2, 3, or 4 for the dielectric electrode pad of the 1239027 discharge system, the dielectric material is quartz. 8 · —A kind of dielectric electrode, electrode set for tester and water discharge system, which is connected to the first and middle current power supply for mine + +, C, and high voltage Transformer used to introduce high electric current to form high voltage thunder ^ ^ Jiadou% ten electricity each 'for the working gas required to produce the process gas introduced into the space of the electrode group continued, #, s external weight 7 This electrode group mainly It consists of two parallel electrodes, one of which is a long strip of conductive electrode with round and thunder wounds, and the second tail electrode is made of dielectric and conductive gold facing the first genus and & Composite electrode, the dielectric of which is energized to form an electric field. A predetermined distance is reserved at the end of the pole needles', such as the patent of Shenjing Wei Jfl for wearing the 0 pole group, in which the electric power of the eighth dielectric plasma discharge system is a circular tube-shaped conductive electrode. For example, the electrode range of the flute electrode group applied in the patent, and the "I / Erhdi" electrode of the plasma plasma discharge system in Langzhong is a cylindrical conductive electrode. The patent application scope is q, the electrode group of the system, and the medium > > or 10 dielectric plasma discharges are present. V-shaped electrode, on the side of the dielectric 2P electrode. For example, for the electrode group of the system under the scope of the patent application, the dielectric electrode plasma discharge medium in item i or 10 is the second electrode: the surface two electrodes are circular tube-shaped conductive electrodes, and the dielectric electrode is equal to the ninth or "The dielectric plasma discharge substance is covered on the outer surface of the second electrode. The conductive electrode of the cassia shape, dielectric ★ The scope of the patent application 9 戋 1 system electrode group, it is 0 members, I plasma discharge /, Γ, and ceramics are ceramics. 14 1239027 1 5 · As for the electrode group of the dielectric plasma discharge system in the 9th or 10th of the scope of patent application, the dielectric is glass. 1 6 · The scope of patent application The electrode group of the dielectric plasma discharge system of item 9 or 10, wherein the dielectric is quartz. 1 7 · —An electrode group of a dielectric plasma discharge system, which is an AC intermediate frequency power supply connected to the system A supplier and a high-voltage transformer for introducing a south-voltage current to form a south-voltage electric field ^ A working plasma required for generating a process gas introduced into the space of the electrode group, the electrode group mainly has a hollow electrode tube, and the electrode tube is a The outer surface of the dielectric tube is made of conductive metal, and The metal workpiece that enters the electrode tube is directly used as another electrode to form an electric field. 1 8 · As the electrode group of the dielectric plasma discharge system of item 17 of the patent application scope, the conductive metal of the electrode tube is sleeved on The metal tube on the outside of the dielectric tube. 1 9 · As for the electrode group of the dielectric plasma discharge system in item 17 of the scope of patent application, the conductive metal of the electrode tube is a metal with a plurality of intervals surrounding the outside of the dielectric tube. Loops. 2 0 · The electrode group of a dielectric plasma discharge system according to item 17 of the scope of patent application, wherein the conductive metal of the electrode tube is a metal body spirally wound on the outside of the dielectric tube. 2 1 · For example, the electrode group of the dielectric plasma discharge system with the range of 17, 18, 19 or 20 of the patent application scope, wherein the electrode tube is covered with an insulating layer on the outside of the conductive metal. 2 2 1 7, 18, 19, or 20 electrode groups of dielectric plasma discharge system, in which the dielectric tube is a ceramic tube. 15 1239027 2 3 · If the scope of patent application is No. 17, 18, 19 Or electrode group of 20 dielectric plasma discharge systems, in which the dielectric tube is a glass tube 2 4 · If the scope of the patent application is No. 17, 18, 19, or 20, the electrode group of the dielectric plasma discharge system, wherein the dielectric tube is a quartz tube. 2 5 · If the scope of the patent application is No. 2 1 The electrode group of the dielectric plasma discharge system, in which the dielectric tube is a ceramic tube. 2 6 · For example, the electrode group of the dielectric plasma discharge system in item 21 of the patent application scope, in which the dielectric tube is glass 2 7 · If you apply for the electrode group of the dielectric plasma discharge system No. 21 in the scope of the patent application, the dielectric tube is a quartz tube.