TW200515459A - Electrode set used for dielectric plasma discharge system - Google Patents

Electrode set used for dielectric plasma discharge system

Info

Publication number
TW200515459A
TW200515459A TW092129980A TW92129980A TW200515459A TW 200515459 A TW200515459 A TW 200515459A TW 092129980 A TW092129980 A TW 092129980A TW 92129980 A TW92129980 A TW 92129980A TW 200515459 A TW200515459 A TW 200515459A
Authority
TW
Taiwan
Prior art keywords
electrode
electrode set
plasma discharge
rod
workpiece
Prior art date
Application number
TW092129980A
Other languages
Chinese (zh)
Other versions
TWI239027B (en
Inventor
Yue-Yun Guo
Original Assignee
Yue-Yun Guo
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yue-Yun Guo filed Critical Yue-Yun Guo
Priority to TW92129980A priority Critical patent/TWI239027B/en
Publication of TW200515459A publication Critical patent/TW200515459A/en
Application granted granted Critical
Publication of TWI239027B publication Critical patent/TWI239027B/en

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  • Plasma Technology (AREA)
  • Elimination Of Static Electricity (AREA)

Abstract

The present invention provides an electrode set used for a dielectric plasma discharge system. An a.c. intermediate frequency power supply and a high voltage transformer are used to form a high voltage electric field in order to excite an introduced gas in manufacturing process to form a working plasma. The electrode set has two electrodes mounted in parallel, in which one is a flat electrode with conductive pole needle or a rod/cylindrical electrode without pole needle, and the other is a flat/rod/cylindrical electrode laminated by a dielectric material and a metal, for a panel workpiece to be connected therethrough. Alternatively, the electrode set is a rod electrode laminated by a dielectric material and a metal, for directly providing a conductive string-like workpiece to go into the interior part thereof and using the string-like workpiece as another electrode. Thus, a gas in manufacturing process can be locally introduced to perform a plasma discharge processing, so as to be applied to a continuous automatic plasma processing process.
TW92129980A 2003-10-29 2003-10-29 Electrode set for dielectric plasma discharging system TWI239027B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW92129980A TWI239027B (en) 2003-10-29 2003-10-29 Electrode set for dielectric plasma discharging system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW92129980A TWI239027B (en) 2003-10-29 2003-10-29 Electrode set for dielectric plasma discharging system

Publications (2)

Publication Number Publication Date
TW200515459A true TW200515459A (en) 2005-05-01
TWI239027B TWI239027B (en) 2005-09-01

Family

ID=37001166

Family Applications (1)

Application Number Title Priority Date Filing Date
TW92129980A TWI239027B (en) 2003-10-29 2003-10-29 Electrode set for dielectric plasma discharging system

Country Status (1)

Country Link
TW (1) TWI239027B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI392403B (en) * 2007-03-30 2013-04-01 Yueh Yun Kuo Plasma jet electrode device and system thereof
TWI728569B (en) * 2019-11-25 2021-05-21 馗鼎奈米科技股份有限公司 Discharge polarization apparatus

Also Published As

Publication number Publication date
TWI239027B (en) 2005-09-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees