TWI230140B - A method of eliminating Brownian noise in micromachined varactors - Google Patents
A method of eliminating Brownian noise in micromachined varactors Download PDFInfo
- Publication number
- TWI230140B TWI230140B TW091110676A TW91110676A TWI230140B TW I230140 B TWI230140 B TW I230140B TW 091110676 A TW091110676 A TW 091110676A TW 91110676 A TW91110676 A TW 91110676A TW I230140 B TWI230140 B TW I230140B
- Authority
- TW
- Taiwan
- Prior art keywords
- varactor
- fixed
- variable
- deflection
- scope
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims description 8
- 238000004806 packaging method and process Methods 0.000 claims abstract description 4
- 239000000758 substrate Substances 0.000 claims description 11
- 239000003989 dielectric material Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000007789 sealing Methods 0.000 claims 1
- 239000003990 capacitor Substances 0.000 description 5
- 230000001788 irregular Effects 0.000 description 5
- 230000005653 Brownian motion process Effects 0.000 description 3
- 238000005537 brownian motion Methods 0.000 description 3
- 230000033001 locomotion Effects 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 239000012811 non-conductive material Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 238000000137 annealing Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 210000004508 polar body Anatomy 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
- H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
- H01G5/18—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes due to change in inclination, e.g. by flexing, by spiral wrapping
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Micromachines (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/004,035 US20040031912A1 (en) | 2001-10-31 | 2001-10-31 | Method of eliminating brownian noise in micromachined varactors |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TWI230140B true TWI230140B (en) | 2005-04-01 |
Family
ID=21708807
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW091110676A TWI230140B (en) | 2001-10-31 | 2002-05-21 | A method of eliminating Brownian noise in micromachined varactors |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US20040031912A1 (OSRAM) |
| JP (1) | JP2003209027A (OSRAM) |
| DE (1) | DE10233638A1 (OSRAM) |
| GB (1) | GB2384622B (OSRAM) |
| TW (1) | TWI230140B (OSRAM) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100464383C (zh) * | 2004-09-10 | 2009-02-25 | 东南大学 | T形梁平行板微机械可变电容及其制造工艺 |
| US7319580B2 (en) * | 2005-03-29 | 2008-01-15 | Intel Corporation | Collapsing zipper varactor with inter-digit actuation electrodes for tunable filters |
| JP4893112B2 (ja) * | 2006-06-03 | 2012-03-07 | 株式会社ニコン | 高周波回路コンポーネント |
| JP4910679B2 (ja) * | 2006-12-21 | 2012-04-04 | 株式会社ニコン | 可変キャパシタ、可変キャパシタ装置、高周波回路用フィルタ及び高周波回路 |
| WO2011152192A1 (ja) * | 2010-05-31 | 2011-12-08 | 株式会社村田製作所 | 可変容量素子 |
| US9321630B2 (en) * | 2013-02-20 | 2016-04-26 | Pgs Geophysical As | Sensor with vacuum-sealed cavity |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3139339B2 (ja) * | 1995-09-13 | 2001-02-26 | 株式会社村田製作所 | 真空封止デバイスおよびその製造方法 |
| US5638946A (en) * | 1996-01-11 | 1997-06-17 | Northeastern University | Micromechanical switch with insulated switch contact |
| JP3045089B2 (ja) * | 1996-12-19 | 2000-05-22 | 株式会社村田製作所 | 素子のパッケージ構造およびその製造方法 |
| EP0951069A1 (en) * | 1998-04-17 | 1999-10-20 | Interuniversitair Microelektronica Centrum Vzw | Method of fabrication of a microstructure having an inside cavity |
| US6522217B1 (en) * | 1999-12-01 | 2003-02-18 | E. I. Du Pont De Nemours And Company | Tunable high temperature superconducting filter |
| US6229684B1 (en) * | 1999-12-15 | 2001-05-08 | Jds Uniphase Inc. | Variable capacitor and associated fabrication method |
| WO2002073673A1 (en) * | 2001-03-13 | 2002-09-19 | Rochester Institute Of Technology | A micro-electro-mechanical switch and a method of using and making thereof |
| US6597560B2 (en) * | 2001-03-13 | 2003-07-22 | Rochester Institute Of Technology | Micro-electro-mechanical varactor and a method of making and using thereof |
-
2001
- 2001-10-31 US US10/004,035 patent/US20040031912A1/en not_active Abandoned
-
2002
- 2002-05-21 TW TW091110676A patent/TWI230140B/zh not_active IP Right Cessation
- 2002-07-24 DE DE10233638A patent/DE10233638A1/de not_active Withdrawn
- 2002-10-08 GB GB0223352A patent/GB2384622B/en not_active Expired - Fee Related
- 2002-10-18 JP JP2002304591A patent/JP2003209027A/ja not_active Withdrawn
-
2004
- 2004-10-12 US US10/963,198 patent/US20050057885A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| DE10233638A1 (de) | 2003-07-03 |
| JP2003209027A (ja) | 2003-07-25 |
| GB2384622B (en) | 2005-07-20 |
| US20050057885A1 (en) | 2005-03-17 |
| GB2384622A (en) | 2003-07-30 |
| GB0223352D0 (en) | 2002-11-13 |
| US20040031912A1 (en) | 2004-02-19 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |