TWD209117S - Top cover of reticle transfer box - Google Patents

Top cover of reticle transfer box Download PDF

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Publication number
TWD209117S
TWD209117S TW108304630F TW108304630F TWD209117S TW D209117 S TWD209117 S TW D209117S TW 108304630 F TW108304630 F TW 108304630F TW 108304630 F TW108304630 F TW 108304630F TW D209117 S TWD209117 S TW D209117S
Authority
TW
Taiwan
Prior art keywords
transfer box
top cover
reticle transfer
reticle
upper cover
Prior art date
Application number
TW108304630F
Other languages
Chinese (zh)
Inventor
莊家和
林書弘
邱銘乾
Original Assignee
家登精密工業股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 家登精密工業股份有限公司 filed Critical 家登精密工業股份有限公司
Priority to TW108304630F priority Critical patent/TWD209117S/en
Priority to US29/711,298 priority patent/USD964949S1/en
Priority to JPD2019-25162F priority patent/JP1685304S/ja
Publication of TWD209117S publication Critical patent/TWD209117S/en

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Description

光罩傳送盒之上蓋Top cover of reticle transfer box

本設計物品係為一種光罩傳送盒之上蓋，尤其是用於半導體製程中光罩傳送盒之上蓋，用於保護半導體晶片。This design article is a kind of upper cover of the photomask transfer box, especially used for the upper cover of the photomask transfer box in the semiconductor manufacturing process, for protecting semiconductor wafers.

本案創作光罩傳送盒之上蓋係為一新穎獨特之設計，藉由獨特地設計的光罩傳送盒之上蓋，可顯現出先前技藝未曾有過的視覺效果。The upper cover of the mask transfer box created in this case is a novel and unique design. With the uniquely designed upper cover of the mask transfer box, it can show visual effects that have never been seen before.

圖式所揭露之虛線部分，為本案不主張設計之部分。The dotted line exposed in the diagram is a part of this case that does not advocate design.

TW108304630F 2019-08-02 2019-08-02 Top cover of reticle transfer box TWD209117S (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
TW108304630F TWD209117S (en) 2019-08-02 2019-08-02 Top cover of reticle transfer box
US29/711,298 USD964949S1 (en) 2019-08-02 2019-10-30 Upper cover for an ultraviolet light reticle transfer box
JPD2019-25162F JP1685304S (en) 2019-08-02 2019-11-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW108304630F TWD209117S (en) 2019-08-02 2019-08-02 Top cover of reticle transfer box

Publications (1)

Publication Number Publication Date
TWD209117S true TWD209117S (en) 2021-01-01

Family

ID=75900377

Family Applications (1)

Application Number Title Priority Date Filing Date
TW108304630F TWD209117S (en) 2019-08-02 2019-08-02 Top cover of reticle transfer box

Country Status (3)

Country Link
US (1) USD964949S1 (en)
JP (1) JP1685304S (en)
TW (1) TWD209117S (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201523126A (en) 2013-10-31 2015-06-16 Entegris Inc A modular reticle pod system

Family Cites Families (21)

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Publication number Priority date Publication date Assignee Title
US6906783B2 (en) * 2002-02-22 2005-06-14 Asml Holding N.V. System for using a two part cover for protecting a reticle
USD473523S1 (en) * 2002-06-25 2003-04-22 Lyall Assemblies, Inc. Convoluted tubing with an overmolded end cap
USD499330S1 (en) * 2004-03-01 2004-12-07 Patelesio Peato Cord connector
US7477358B2 (en) * 2004-09-28 2009-01-13 Nikon Corporation EUV reticle handling system and method
JP4710308B2 (en) * 2004-10-29 2011-06-29 株式会社ニコン Reticle conveying apparatus, exposure apparatus, and reticle conveying method
US7607543B2 (en) * 2005-02-27 2009-10-27 Entegris, Inc. Reticle pod with isolation system
TWI391304B (en) * 2005-09-27 2013-04-01 Entegris Inc Reticle pod
TWI411563B (en) * 2009-09-25 2013-10-11 Gudeng Prec Industral Co Ltd Reticle pod
USD712364S1 (en) * 2012-05-09 2014-09-02 Gudeng Precision Industrial Co., Ltd. EUV pod
USD732482S1 (en) * 2013-03-01 2015-06-23 Randl Industries, Inc. Plaster ring
USD782418S1 (en) * 2015-03-27 2017-03-28 Robert Bosch Gmbh Housing for electric and electronic components
USD771574S1 (en) * 2015-09-01 2016-11-15 Chief Enterprises, Inc. Cover for a power distribution module
USD807303S1 (en) * 2016-09-06 2018-01-09 S.J. Electro Systems, Inc. Panel enclosure
TWI579215B (en) * 2016-10-07 2017-04-21 家登精密工業股份有限公司 Vertical Fixing Transmission Box and Transmission Method Using the Same
US11249392B2 (en) * 2017-01-25 2022-02-15 Gudeng Precision Industrial Co., Ltd EUV reticle pod
USD917402S1 (en) * 2017-08-22 2021-04-27 Foxconn Interconnect Technology Limited Protective cap
TWI690771B (en) * 2018-01-11 2020-04-11 家登精密工業股份有限公司 Reticle pressing unit and euv reticle pod using same
TWI693671B (en) * 2019-04-16 2020-05-11 家登精密工業股份有限公司 Reticle pod and gripping unit thereof
CN112289718A (en) * 2019-07-13 2021-01-29 家登精密工业股份有限公司 Substrate carrier and gas diffusion module thereof
TWI705522B (en) * 2019-07-30 2020-09-21 家登精密工業股份有限公司 Apparatus for containing a substrate and method of manufacturing the apparatus
US11442370B2 (en) * 2019-10-16 2022-09-13 Gudeng Precision Industrial Co., Ltd Reticle retaining system

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201523126A (en) 2013-10-31 2015-06-16 Entegris Inc A modular reticle pod system

Also Published As

Publication number Publication date
JP1685304S (en) 2021-05-17
USD964949S1 (en) 2022-09-27

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