TWD209928S - The base of the mask transfer box - Google Patents

The base of the mask transfer box Download PDF

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Publication number
TWD209928S
TWD209928S TW108304631F TW108304631F TWD209928S TW D209928 S TWD209928 S TW D209928S TW 108304631 F TW108304631 F TW 108304631F TW 108304631 F TW108304631 F TW 108304631F TW D209928 S TWD209928 S TW D209928S
Authority
TW
Taiwan
Prior art keywords
base
transfer box
mask transfer
designed
case
Prior art date
Application number
TW108304631F
Other languages
Chinese (zh)
Inventor
莊家和
薛新民
邱銘乾
Original Assignee
家登精密工業股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 家登精密工業股份有限公司 filed Critical 家登精密工業股份有限公司
Priority to TW108304631F priority Critical patent/TWD209928S/en
Priority to US29/711,299 priority patent/USD964950S1/en
Publication of TWD209928S publication Critical patent/TWD209928S/en

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Abstract

【物品用途】;本設計物品係為一種光罩傳送盒之底座，尤其是用於半導體製程中光罩傳送盒之底座，用於保護半導體晶片。;【設計說明】;本案創作光罩傳送盒之底座係為一新穎獨特之設計，藉由獨特地設計的光罩傳送盒之底座，可顯現出先前技藝未曾有過的視覺效果。;圖式所揭露之虛線部分，為本案不主張設計之部分。[Use of article] This designed article is a base for a mask transfer box, especially for the base of a mask transfer box used in semiconductor manufacturing processes to protect semiconductor wafers. ;[Design Description];The base of the mask transfer box created in this case is a novel and unique design. Through the uniquely designed base of the mask transfer box, visual effects that have never been achieved by previous techniques can be displayed. ; The dotted line portion disclosed in the diagram is the portion of the case that is not intended to be designed.

Description

光罩傳送盒之底座The base of the mask transfer box

本設計物品係為一種光罩傳送盒之底座，尤其是用於半導體製程中光罩傳送盒之底座，用於保護半導體晶片。This design item is a base of a photomask transfer box, especially a base for a photomask transfer box in the semiconductor manufacturing process, to protect semiconductor chips.

本案創作光罩傳送盒之底座係為一新穎獨特之設計，藉由獨特地設計的光罩傳送盒之底座，可顯現出先前技藝未曾有過的視覺效果。The base of the mask transfer box created in this case is a novel and unique design. With the uniquely designed base of the mask transfer box, it can show a visual effect that has never been seen in previous techniques.

圖式所揭露之虛線部分，為本案不主張設計之部分。The dotted line exposed in the diagram is a part of this case that does not advocate design.

TW108304631F 2019-08-02 2019-08-02 The base of the mask transfer box TWD209928S (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW108304631F TWD209928S (en) 2019-08-02 2019-08-02 The base of the mask transfer box
US29/711,299 USD964950S1 (en) 2019-08-02 2019-10-30 Base for an ultraviolet light reticle transfer box

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW108304631F TWD209928S (en) 2019-08-02 2019-08-02 The base of the mask transfer box

Publications (1)

Publication Number Publication Date
TWD209928S true TWD209928S (en) 2021-02-21

Family

ID=83356751

Family Applications (1)

Application Number Title Priority Date Filing Date
TW108304631F TWD209928S (en) 2019-08-02 2019-08-02 The base of the mask transfer box

Country Status (2)

Country Link
US (1) USD964950S1 (en)
TW (1) TWD209928S (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD214306S (en) 2021-07-02 2021-09-21 家登精密工業股份有限公司 Support for lower cover of reticle box
TWD214307S (en) 2021-07-02 2021-09-21 家登精密工業股份有限公司 Support for upper cover of reticle box
TWD241611S (en) 2022-09-15 2025-11-21 美商恩特葛瑞斯股份有限公司 (美國) Spacer applied to reticle container

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20250073197A (en) 2022-09-20 2025-05-27 엔테그리스, 아이엔씨. Lead frame for spacing out the reticle pod

Citations (3)

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Publication number Priority date Publication date Assignee Title
TWM555966U (en) 2017-10-31 2018-02-21 中勤實業股份有限公司 Mask box
TW201827919A (en) 2017-01-26 2018-08-01 家登精密工業股份有限公司 Mask box
TWI666510B (en) 2017-01-25 2019-07-21 家登精密工業股份有限公司 Extreme ultraviolet ray container

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US6338409B1 (en) * 2000-04-13 2002-01-15 International Business Machines Corporation Reticle SMIF pod in situ orientation
US6948619B2 (en) * 2002-07-05 2005-09-27 Taiwan Semiconductor Manufacturing Co., Ltd Reticle pod and reticle with cut areas
US7477358B2 (en) * 2004-09-28 2009-01-13 Nikon Corporation EUV reticle handling system and method
JP4710308B2 (en) * 2004-10-29 2011-06-29 株式会社ニコン Reticle conveying apparatus, exposure apparatus, and reticle conveying method
US7607543B2 (en) * 2005-02-27 2009-10-27 Entegris, Inc. Reticle pod with isolation system
CN101321674B (en) * 2005-09-27 2010-10-13 诚实公司 mask box
TWI414464B (en) * 2011-01-11 2013-11-11 家登精密工業股份有限公司 Extreme ultraviolet reticle storage transfer box with fixed structure
TWI501910B (en) * 2011-11-17 2015-10-01 家登精密工業股份有限公司 Extreme ultraviolet ray storage transfer box with drainage structure
USD712364S1 (en) * 2012-05-09 2014-09-02 Gudeng Precision Industrial Co., Ltd. EUV pod
KR20150067375A (en) * 2012-10-19 2015-06-17 인티그리스, 인코포레이티드 Reticle pod with cover to baseplate alignment system
USD732482S1 (en) * 2013-03-01 2015-06-23 Randl Industries, Inc. Plaster ring
USD807303S1 (en) * 2016-09-06 2018-01-09 S.J. Electro Systems, Inc. Panel enclosure

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI666510B (en) 2017-01-25 2019-07-21 家登精密工業股份有限公司 Extreme ultraviolet ray container
TW201827919A (en) 2017-01-26 2018-08-01 家登精密工業股份有限公司 Mask box
TWM555966U (en) 2017-10-31 2018-02-21 中勤實業股份有限公司 Mask box

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD214306S (en) 2021-07-02 2021-09-21 家登精密工業股份有限公司 Support for lower cover of reticle box
TWD214307S (en) 2021-07-02 2021-09-21 家登精密工業股份有限公司 Support for upper cover of reticle box
TWD241611S (en) 2022-09-15 2025-11-21 美商恩特葛瑞斯股份有限公司 (美國) Spacer applied to reticle container

Also Published As

Publication number Publication date
USD964950S1 (en) 2022-09-27

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