TWM555966U - Mask box - Google Patents

Abstract

A mask box includes a first box body, a second box body and a locking mechanism. The first and the second box body have a plurality of first positioning portions and a plurality of second positioning portions respectively, and are adapted to open and close relatively to each other along a first direction. The first and the second positioning portions are co-operated to position and support a mask together. The locking mechanism includes a sliding-engaging unit and an engaging-hooking unit disposed on the first box body and the second box body separately. When the second and the first box body are closed to each other, the sliding-engaging unit and the engaging-hooking unit are engaged to each other to secure the box to a closed state, and at least one pair of the first and the second positioning portions block each other along the directions perpendicular to the first direction.

Description

Mask box

The present invention relates to a container, and more particularly to a reticle.

Generally, the reticle box is formed by two detachable cover bodies and a body/seat body to form a space for accommodating the reticle. A locking mechanism is required on the cover body and the body to fix the two boxes relative to each other.

However, there are sometimes gaps in the joint between the cover and the body due to manufacturing errors or wear during use. When these gaps are too large, looseness occurs between the cover body and the body, and unintended relative displacement may occur in the case of the cover, and thus the reticle contained therein cannot be stably stored. In severe cases, the mask may be damaged even by friction, vibration, and the like.

The locking mechanism has a plurality of different structural designs according to different usage requirements. For example, a photomask case disclosed in Taiwan Patent No. M410327 includes a body and a cover body that can be pivotally closed, and a locking mechanism thereof. Two strips spaced apart from each other are disposed on the cover body, and two sets of sliders and buckles respectively corresponding to the two buckles are disposed on the body, and the buckle block is disposed on the slide bar, and can be disposed on the body and the cover When the body is relatively closed, the buckle is buckled on the buckle (the buckle is located at the locking position) to fix the body of the mask case and the cover body. When you want to open the mask box, you need to slide the buckle off the buckle, that is, move to the release position to open the cover. However, there are still some reliability disadvantages in this structural design. For example, when the cover body is to be closed to the main body from the open state, if the operator is negligent or the like, the buckle block is located at the lock position instead of the release position. Then, the buckle will interfere with the buckle, so that the buckle is blocked and cannot pass through the buckle, so that the cover is completely unable to cover or the cover is not correct. Lightly, the foreign matter enters the reticle to contaminate the reticle, which in turn causes damage to the reticle during transport. Therefore, before the cover is closed, it must be confirmed that the buckle is in the release position to cover the cover, and then the buckle is moved to the lock position to securely complete the lock of the mask box, so as to avoid causing the buckle. The accommodating reticle is contaminated or even damaged.

The novel creation provides a reticle cassette that is convenient to use and highly reliable.

The photomask case of the present invention comprises a first box body, a second box body and a locking mechanism. The first case has a plurality of first positioning portions. The second box body can be opened and closed with respect to the first box body in a first direction, and forms an accommodating space together with the first box body when the first box body is closed. The second casing has a plurality of second positioning portions, and the second positioning portions cooperate with the first positioning portions to jointly position and support a reticle. The locking mechanism includes a slider unit disposed in one of the first box body and the second box body, and a hook unit disposed on the other of the first box body and the second box body. When the reticle box is in a closed state in which the second box body and the first box body are oppositely closed, the slider unit and the hook unit can be fastened to each other to fix the hood box in the closed state, and at least one first The positioning portion and the at least one second positioning portion are mutually blocked in a direction perpendicular to the first direction to prevent relative movement of the first case and the second case in a direction perpendicular to the first direction.

In an embodiment of the present invention, the slider unit includes a slide rail fixed to a first box body or a second box body disposed therein and extending in a second direction intersecting the first direction. And at least one block disposed on the slide rail. The block has an operating portion slidably coupled to the slide rail, and a stop portion protruded from the operating portion toward the accommodating space, and the block can be along the slide rail between a latching position and a release position mobile. The hook unit has a body fixed to the first box body or the second box body, and at least one hook extending from the body and cooperating with the corresponding at least one card block, the hook has an acceptable The elastic segment that is pressed and elastically deformed toward the accommodating space, and the end of the elastic segment forms an abutting portion. Wherein, when the block is in the unlocking position, one of the blocking portion of the block and the abutting portion of the hook is not in the path in which the other one moves in the first direction, the second box is opposite to the first a box is opened and closed; and when the block is in the unlocked position and the reticle is closed in a state in which the second case is opposite to the first case, the block can slide along the slide to the lock position The abutting portion of the hook abuts against the blocking portion of the block and is blocked by the blocking portion to fix the photomask case in the closed state. Moreover, when the second box body is not covered by the first box body and the card block is located at the latching position, one of the blocking portion of the block and the abutting portion of the hook moves in the first direction In the path of the second casing, when the second casing is switched to the closed state opposite to the first casing, and the elastic segment of the hook is relatively moved with the stopping portion, the elastic segment is subjected to the passage of the blocking portion. Squeezing and elastically deforming toward the accommodating space and returning to the original shape after passing through the blocking portion, and the abutting portion abuts against the blocking portion and is blocked by the stopping portion to fix the photomask case to the closed state. .

In an embodiment of the present invention, the elastic segment has a guiding surface that is slidable relative to the stopping portion.

In an embodiment of the present invention, the slider of the slider unit is provided with two blocks, and the button unit has two hooks respectively matched with the two blocks.

In an embodiment of the present invention, the elastic segments of each of the hooks have a guiding surface that is slidable relative to the blocking portion of the corresponding block.

In an embodiment of the present invention, each of the hooks further has a second box body provided with a slider unit along the surface of the first box body or the second box body provided by the hook unit. Or a fixed section extending from the first box body, and a connecting section bent away from the accommodating space by the fixing section, the elastic section is bent by the connecting section and the guiding section is inclined away from the fixed section Extend.

In an embodiment of the present invention, the slide rail has a mounting portion connected to the first box body or the second box body provided with the slider unit, and the two self-mounting portions are bent away from the accommodating space. The rail portions extending and spaced apart from each other in the second direction are slidably coupled to the two rail portions.

In an embodiment of the present invention, each of the track portions has a flat plate segment for engaging the operation portion of the corresponding block, and a support portion connecting the plate segment and the mounting portion, and the flat plate segment has the opposite a first surface and a second surface on both sides, the first surface facing the accommodating space and connected to the support section.

In an embodiment of the present invention, the second surface of each of the flat plate segments forms two arcuate protrusions spaced apart from each other in the second direction, and one of the arcuate protrusions positions the corresponding block in the latch Position, and one of the arcuate projections positions the corresponding block in the unlocked position.

In an embodiment of the present invention, each of the two flat plates has a stop block at each end thereof to limit the moving range of the block.

In an embodiment of the present invention, the mounting portion of the slider unit disposed on the second box body or the body between the hooks of the hook unit is further provided with a trigger portion. For the user to force.

In an embodiment of the novel creation, the block has at least one elastic arm that abuts against the slide rail.

In an embodiment of the present invention, the elastic arm has a convex protrusion protruding toward the sliding rail, and the elastic arm is pressed against the sliding rail by the convex point.

In an embodiment of the present invention, the stopping portion has an extending portion. When the block is in the locking position and the mask case is in the closed state, at least a portion of the elastic portion is limited to the extending portion and the operating portion. between.

In an embodiment of the present invention, the first casing has a first base wall having a rectangular shape and a first surrounding wall connected to a periphery of the first base wall, and the second casing has a rectangular shape. a second base wall and a second surrounding wall connected to the periphery of the second base wall, the slide button unit is disposed on one of the first surrounding wall and the second surrounding wall, and the hook unit is disposed on the first surrounding wall and the second surrounding The other of the walls, the photomask case further includes a pivoting mechanism coupled to the first surrounding wall and the second surrounding wall and on the opposite side of the locking mechanism, such that the second casing is relative to the first casing Pivot.

In an embodiment of the present invention, the first positioning portions are protruded from the inner side of the first base wall, and the second positioning portions are protruded from the inner side of the second base wall.

In an embodiment of the present invention, when the photomask case is in the closed state, each of the first positioning portions and the corresponding second positioning portion respectively block each other in a direction perpendicular to the first direction.

In an embodiment of the present invention, each of the first positioning portions includes a first stop surface and a second stop surface, and each of the second positioning portions includes a third stop surface and a fourth stop. a first stop surface and a third stop surface are mutually blocked in a second direction perpendicular to the first direction, and the second stop surface and the fourth stop surface are opposite when the mask case is in the closed state The first direction is blocked along a third direction perpendicular to the first direction and the second direction.

Based on the above, in the case that the second casing is covered by the first casing, the second casing and the first casing can be prevented from being present due to the joint between the first positioning portion and the second positioning portion. The looseness caused by the gap causes an undesired relative displacement so that the reticle can be securely fixed in the reticle housing. Moreover, the design of the elastic section which can be elastically deformed by being squeezed by the hook of the locking mechanism enables the second box to be opened regardless of whether the block is in the unlocking position or the locking position. The state is indeed covered in the first box body, in addition to improving the convenience and reliability during the operation, it is also possible to prevent the foreign matter from entering the mask box due to the inaccurate cover, and the mask is in the process of transporting. In the middle of the damage.

The above described features and advantages of the present invention will become more apparent and understood from the following description.

Referring to FIG. 1 to FIG. 4, an embodiment of the present photomask case includes a first box body 1, a second box body 2, a pivoting mechanism 3, and a latching mechanism 4.

The first casing 1 has a first base wall 11 having a rectangular shape, a first surrounding wall 12 connected to the periphery of the first base wall 11, and a plurality of first positioning portions 13 projecting from the inner side of the first base wall 11. .

The second casing 2 can be opened and closed with respect to the first casing 1 in a first direction D1, and forms an accommodation space 10 together with the first casing 1 when the first casing 1 is closed. The second casing 2 has a second base wall 21 having a rectangular shape, a second surrounding wall 22 connected to the periphery of the second base wall 21, and a plurality of second positioning portions 23 projecting from the inner side of the second base wall 21. . These second positioning portions 23 cooperate with the first positioning portion 13 to collectively position and support a reticle 7.

In this embodiment, the first base wall 11 and the first surrounding wall 12 are integrally made of stainless steel, and the first positioning portions 13 are made of PEEK material, which can reduce particle pollution. Similarly, the second base wall 21 The second surrounding wall 22 is integrally made of stainless steel, and the second positioning portions 23 are made of PEEK material. Of course, the material can be adjusted according to the use requirements, and is not limited to the embodiment.

The pivoting mechanism 3 is coupled to the first surrounding wall 12 and the second surrounding wall 22 and on the opposite side of the locking mechanism 4 to allow the second casing 2 to pivot relative to the first casing 1. Moreover, the pivoting mechanism 3 includes two hinges, and in a variant embodiment, the pivoting mechanism 3 can also be a single longer hinge or other pivoting structure.

Specifically, the second case 2 can be in an open state with respect to the first case 1 (as shown in FIG. 1) and a closed state with respect to the first case 1 (see FIGS. 2 and 3). In the closed state, the second casing 2 and the first casing 1 together form a sealed accommodating space 10.

Referring to FIGS. 2 to 5 , the locking mechanism 4 includes a slider unit 5 disposed on one of the first surrounding wall 12 of the first casing 1 and the second surrounding wall 22 of the second casing 2, and a A hook unit 6 provided on the other of the first surrounding wall 12 of the first casing 1 and the second surrounding wall 22 of the second casing 2. In this embodiment, the sliding unit 5 is disposed on the first surrounding wall 12 and the hook unit 6 is disposed on the second surrounding wall 22 as an example.

When the photomask box provided in this embodiment is in a closed state in which the second box body 2 and the first box body 1 are oppositely closed, the slider unit 5 and the hook unit 6 can be fastened to each other to fix the photomask box. In the closed state, each of the first positioning portions 13 and the corresponding second positioning portion 23 respectively stop in a direction perpendicular to the first direction D1 to block the first case 1 and the second case 2 Relatively moving in a direction perpendicular to the first direction D1.

Specifically, in the embodiment, each of the first positioning portions 13 includes a first blocking surface 13a and a second blocking surface 13b, and each of the second positioning portions 23 includes a third blocking surface 23a and a first Four stop surface 23b. When the second casing 2 is in a closed state opposite to the first casing 1, the first stopper surface 13a and the third stopper surface 23a are mutually blocked in the second direction D2 perpendicular to the first direction D1. The second stop surface 13b and the fourth stop surface 23b are mutually blocked in a third direction D3 perpendicular to the first direction D1 and the second direction D2.

According to this, in the case where the second casing 2 is covered by the first casing 1, the second casing 2 and the first casing can be avoided by the mutual blocking of the first positioning portion 13 and the second positioning portion 23. The looseness of the body 1 due to the presence of a gap at the joint causes an unintended relative displacement, so that the reticle 7 can be securely fixed in the reticle housing.

In other embodiments, the first positioning portion 13 and the second positioning portion 23 may be other structures that are adapted to block each other in the second direction D2 and/or the third direction D3, and the present invention does not limit this.

The slider unit 5 includes a slide rail 51 fixed to the first casing 1 and extending in a second direction D2 intersecting the first direction D1, and at least one block 52 disposed on the slide rail 51. In the present embodiment, two blocks 52 are provided on the slide rail 51 as an example.

Further, the slide rail 51 has a mounting portion 511 that is connected to the first casing 1, and two rail portions 512 that are bent from the mounting portion 511 and that are bent away from the accommodating space 10 and are spaced apart from each other in the second direction D2. Each of the rail portions 512 has a flat plate segment 512a, and a supporting portion 512b connecting the flat plate segment 512a and the mounting portion 511, and the flat plate segment 512a has a first surface 5121 and a second surface 5122 on opposite sides, the first surface The 5121 faces the accommodating space 10 and is connected to the support section 512b.

The two latching blocks 52 are respectively disposed on the two rail portions 512. Each of the latching blocks 52 has an operating portion 521 slidably coupled to the sliding rail 51, and a stopping portion 522 protruding from the operating portion 521 toward the receiving space 10. And each of the blocks 52 is movable along the slide rail 51 between a latching position (as shown in FIG. 3) and a release position (shown in FIG. 2). The latch position corresponds to the end section S of the plate segment 512a.

In this embodiment, the operating portion 521 of each of the blocks 52 forms a sliding slot 523 for receiving the corresponding flat plate segment 512a, so that the operating portion 521 can be sleeved on the corresponding flat plate segment 512a and can be moved on the flat plate segment 512a.

The second surface 5122 of each of the plate segments 512a forms two arcuate protrusions 512c spaced apart from each other in the second direction D2, one of the arcuate protrusions 512c positioning the corresponding block 52 at the latching position, and these arcs The other of the protrusions 512c positions the corresponding block 52 in the unlocked position. This facilitates the user to perceive whether the block 52 has been correctly moved to the position.

The hook unit 6 has a body 61 fixed to the second box body 2, and at least one hook 62 extending from the body 61 and mating with the corresponding at least one block 52. In the present embodiment, the hook unit 6 having two hooks 62 correspondingly corresponding to the two blocks 52 is taken as an example.

Each of the hooks 62 has a fixing portion 621 extending from the surface of the second casing 2 toward the first casing 1 and a connecting portion 622 extending from the fixing portion 621 away from the accommodating space 10, and A resilient section 623 is formed by the connecting section 622 opposite the fixed section 621.

The elastic section 623 can be elastically deformed against the accommodating space 10, and the end of the elastic section 623 forms an abutting portion 623a and has a guide that can slide relative to the blocking portion 522 of the corresponding block 52. Leading surface 623b. The guiding surface 623b extends obliquely from the direction in which the elastic section 623 and the connecting section 622 are engaged away from the fixing section 621.

When the block 52 is in the unlocked position and the second case 2 and the first case 1 are in the closed state of the opposite cover, the block 52 can slide along the slide rail 51 to the lock position so that the hook 62 The abutting portion 623a abuts against the stopper portion 522 of the block 52 and is blocked by the stopper portion 522 to fix the second casing 2 in a closed state in which the second casing 2 is opposed to the first casing 1.

As shown in FIG. 5, when the first case 1 and the second case 2 are in a closed state, and the block 52 is in the latching position, one of the blocking portion 522 and the hook 62 of the block 52 is located therein. One of the paths moving along the first direction D1 causes the abutting portion 623a of the hook 62 to abut against the stopping portion 522, thereby blocking the second casing 2 from pivoting, and the first casing 1 and the first Two box body 2 locks are fixed.

Specifically, in the embodiment, when the first case 1 and the second case 2 are in the closed state, the stopping portion 522 is located above the abutting portion 623a to stop the abutting portion 623a from moving upward. Thereby, the second casing 2 cannot be pivoted upward relative to the first casing 1 to maintain the first casing 1 and the second casing 2 in a closed state.

When the block 52 is in the unlocking position (as shown in FIG. 2), one of the blocking portion 522 and the hook 62 of the block 52 is not in the path in which the other one moves in the first direction D1, and thus the block The stop 522 does not interfere with the hook 62 such that the second case 2 can freely pivot relative to the first case 1. Therefore, in order to switch the second casing 2 from the closed state to the open state, the block 52 must be moved to the unlocking position to release the buckle.

It is particularly noteworthy that the photomask case provided in this embodiment can switch the second casing 2 from the open state to the closed state even when the block 52 is in the latching position. I would like to explain this feature below.

As shown in FIG. 6, when the block 52 is in the latching position, the blocking portion 522 of the block 52 is located on the path of the abutting portion 623a of the hook 62 in the first direction D1, and in the second case 2 When the state is changed from the open state to the closed state, the elastic section 623 of the hook 62 is elastically deformed against the accommodating space 10 by being pressed by the stopper portion 522 during the relative movement with the stopper portion 522, and The guiding surface 623b of the elastic segment 623 is slidable relative to the stopping portion 522, so that the elastic portion 623 of the hook 62 can pass through the stopping portion 522, so that the abutting portion 623a can abut the blocking portion 522 to restrict the hook 62. Move in the opposite direction.

That is, when the hook 62 moves the contact stopper 522 downward, the guiding surface 623b of the elastic section 623 slides relative to the stopper 522 while being pressed by the stopper 522, and the elastic section 623 is abutted toward the fixed section. 621 (the second casing 2) is elastically compressed to pass through the stopping portion 522, and when the elastic portion 623 completely passes through the stopping portion 522, that is, the elastic restoring force returns to the original shape, the abutting portion 623a can abut against the blocking portion Below the portion 522, the stopper portion 522 is blocked, thereby locking and fixing the second casing 2 and the first casing 1 in a closed state in which they are opposed to each other.

In other words, the second casing 2 can be switched from the open state to the closed state regardless of whether the block 52 is in the unlocking position or the locking position. If the block 52 is in the unlocking position, the second casing 2 can be After the switch from the open state to the closed state, the second box 2 can be locked and fixed to the first case 1 by moving the block 52 to the lock position; if the block 52 is at the lock position, the second case 2 It is also possible to switch from the open state to the closed state without difficulty, and to lock and fix the second casing 2 to the first casing 1. Therefore, the user does not need to specifically confirm whether the card block 52 is in the unlocking position, and the second box body 2 can be covered to improve the convenience during work and the reliability of the lock operation. Further, it is avoided that the foreign matter enters the photomask box to contaminate the photomask 7 due to the inaccurate cover, and the photomask 7 is damaged during the conveyance process.

In addition, the mounting portion 511 between the two rail portions 512 of the slider unit 5 on the second box body 2 or the body 61 between the two hooks 62 of the hook unit 6 may further protrude with a triggering portion 63. The moving portion 63 is used for the user to apply force to facilitate the user to pry the second box body 2. As shown in FIG. 1 and FIG. 2, this embodiment is exemplified by the protrusion of the pulling portion 63 on the body 61.

In addition, in the photomask case provided in this embodiment, the hook unit 6 can be an integrated structure. Thus, it is only necessary to lock the second casing 2 with two fasteners 8, such as screws or rivets, so that the hook unit 6 can be easily assembled to the second casing 2. Similarly, the slide rail 51 of the slider unit 5 can also be an integrated structure, so that only the two locks 8 can be used to lock the first case 1 , so that the slide unit 5 can be easily assembled. The first box body 1.

Although in the present embodiment, the slider unit 5 has two blocks 52, and the hook unit 6 has two hooks 62, it can be understood that, in a modified embodiment, the slider unit 5 has only one block. 52, and the hook unit 6 can be implemented only by having one hook 62, which is not limited to the embodiment.

7 is a perspective view of a slider unit and a hook unit of another embodiment of the reticle case of the present invention. Figure 8 is a perspective view of the slider unit and the hook unit of Figure 7 in another perspective. Figure 9 is a perspective view of the slide rail of Figure 7. Figure 10 is a perspective view of the slide rail of Figure 9 from another perspective. Figure 11 is a perspective view of the slider of Figure 7 . Figure 12 is a perspective view of the slider of Figure 7 in another perspective. The difference between this embodiment and the foregoing embodiment will be described below.

As shown in FIG. 7 to FIG. 10, the two ends of the flat plate segment 512a of the embodiment respectively have a stop block B for limiting the range of movement of the block 52, and the block 52 is prevented from being unintentionally Off the plate segment 512a.

As shown in FIGS. 8, 11, and 12, the block 52 has two elastic arms 52a and is abutted against the flat plate portion 512a of the rail portion 512 of the slide rail 51 by the elastic arm 52a. In more detail, each of the elastic arms 52a has a bump P protruding toward the slide rail 51 as shown in FIG. 12, and the elastic arm 52a abuts against the flat plate portion of the rail portion 512 of the slide rail 51 by the bump P. 512a. Thereby, the degree of wear between the block 52 and the slide rail 51 can be reduced, and dust generated by abrasion between the block 52 and the slide rail 51 can be further reduced.

In addition, as shown in FIG. 7 and FIG. 12, the stopping portion 522 has an extending portion 522a. When the blocking block 52 is in the locking position as shown in FIG. 7 and the mask case is in the closed state, the partial elastic portion 623 is limited. The extending portion 522a is located between the extending portion 522a and the operating portion 521 to prevent the elastic segment 623 from being subjected to a large external force and being slid out under the stopping portion 522 due to a user's error/inappropriate operation or accidental impact, etc. An unexpected condition that causes the second casing 2 to be picked up occurs.

Although the present invention has been disclosed in the above embodiments, it is not intended to limit the novel creation, and any person skilled in the art can make some changes without departing from the spirit and scope of the novel creation. Retouching, the scope of protection of this new creation is subject to the definition of the scope of the patent application attached.

1‧‧‧first box
11‧‧‧First base wall
12‧‧‧ first surrounding wall
13‧‧‧First Positioning Department
13a‧‧‧First stop surface
13b‧‧‧second stop surface
2‧‧‧Second box
21‧‧‧ second base wall
22‧‧‧Second surrounding wall
23‧‧‧Second Positioning Department
23a‧‧‧Third stop surface
23b‧‧‧4th stop surface
3‧‧‧ pivoting mechanism
4‧‧‧Locking mechanism
5‧‧‧Sliding button unit
51‧‧‧Slide rails
511‧‧‧Installation Department
512‧‧‧Track Department
512a‧‧‧ flat section
5121‧‧‧ first surface
5122‧‧‧ second surface
512b‧‧‧Support section
512c‧‧‧ arc-shaped protrusion
52‧‧‧ card block
52a‧‧‧Boom arm
521‧‧‧Operation Department
522‧‧‧stops
522a‧‧‧Extension
523‧‧‧Chute
6‧‧‧ buckle unit
61‧‧‧Ontology
62‧‧‧ card hook
621‧‧‧Fixed section
622‧‧‧Connected section
623‧‧‧Flexible section
623a‧‧‧Abutment
623b‧‧‧Guide
63‧‧‧Turning Department
7‧‧‧Photomask
8‧‧‧Locker
10‧‧‧ accommodating space
B‧‧‧stop block
D1‧‧‧ first direction
D2‧‧‧ second direction
D3‧‧‧ third direction
P‧‧‧ bumps
S‧‧‧ end section

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a perspective view of an embodiment of a reticle housing of the present invention in an open state. 2 is a perspective view of the embodiment of FIG. 1 in a closed state, and the clip of the latch mechanism of this embodiment is in a release position. Figure 3 is a view similar to Figure 2 illustrating the block of the latching mechanism of this embodiment in the latched position. Figure 4 is a cross-sectional view of this embodiment taken from Figure 3. Fig. 5 is an enlarged view of a partial area of Fig. 4; Figure 6 is a view similar to Figure 5 illustrating the action of the hook and the block of this embodiment. 7 is a perspective view of a slider unit and a hook unit of another embodiment of the reticle case of the present invention. Figure 8 is a perspective view of the slider unit and the hook unit of Figure 7 in another perspective. Figure 9 is a perspective view of the slide rail of Figure 7. Figure 10 is a perspective view of the slide rail of Figure 9 from another perspective. Figure 11 is a perspective view of the slider of Figure 7 . Figure 12 is a perspective view of the slider of Figure 7 in another perspective.

1‧‧‧first box

12‧‧‧ first surrounding wall

13‧‧‧First Positioning Department

13a‧‧‧First stop surface

13b‧‧‧second stop surface

2‧‧‧Second box

22‧‧‧Second surrounding wall

23‧‧‧Second Positioning Department

23a‧‧‧Third stop surface

23b‧‧‧4th stop surface

3‧‧‧ pivoting mechanism

5‧‧‧Sliding button unit

51‧‧‧Slide rails

52‧‧‧ card block

6‧‧‧ buckle unit

62‧‧‧ card hook

63‧‧‧Turning Department

7‧‧‧Photomask

Claims (18)

A reticle case comprising: a first box body having a plurality of first positioning portions; a second box body openable and closable relative to the first box body in a first direction, and covering the first Forming an accommodating space together with the first box body, wherein the second box body has a plurality of second positioning portions, and the second positioning portions cooperate with the first positioning portions to jointly locate and support And a latching mechanism, comprising a slider unit disposed in one of the first box body and the second box body, and one of the first box body and the second box body The buckle unit of the other, wherein the slider unit and the hook unit are mutually engageable when the mask case is in a closed state in which the second box body and the first box body are oppositely closed Fixing the photomask case in the closed state, and at least one of the first positioning portion and the at least one second positioning portion are mutually blocked in a direction perpendicular to the first direction to block the first box and the The second case is relatively moved in a direction perpendicular to the first direction. The photomask cartridge of claim 1, wherein the slider unit comprises a first box body or the second box body fixed thereto and intersecting the first direction a sliding rail extending in two directions, and at least one clamping block disposed on the sliding rail, the clamping block having an operating portion slidably coupled to the sliding rail, and a protruding portion of the operating portion protruding toward the receiving space a blocking portion, and the clamping block is movable along the sliding rail between a locking position and a release position, the fastening hook unit having a first box or the second box fixed thereto a body of the body, and at least one hook extending from the body and cooperating with the corresponding at least one block, the hook having an elastic segment that is elastically deformable against the receiving space, and The end of the elastic segment forms an abutting portion, wherein when the block is located in the unlocking position, one of the blocking portion of the block and the abutting portion of the hook are not in the other one In the path of moving in the first direction, the second box can be opened and closed with respect to the first box; and when the block is In the unlocked position and the hood is in a closed state in which the second casing is oppositely closed to the first casing, the block can slide along the sliding rail to the latching position to cause the card The abutting portion abuts against the blocking portion of the block and is blocked by the blocking portion to fix the photomask case in the closed state, and when the second casing is not covered And the path of the one of the abutting portion of the block and the abutting portion of the hook in the first direction when the card is in the latching position And in the process of switching the second casing to a closed state opposite to the first casing, and the elastic segment of the hook is relatively moved with the stopping portion, the elastic segment passes through the blocking When the portion is elastically deformed by the pressing portion, it abuts against the accommodating space and returns to the original shape after passing through the blocking portion, so that the abutting portion abuts against the blocking portion and is blocked by the blocking portion. To fix the photomask case in the closed state. The photomask cartridge of claim 2, wherein the elastic segment has a guiding surface that is slidable relative to the stopping portion. The photomask case of claim 2, wherein the slide rail of the slider unit is provided with two blocks, and the hook unit has two hooks respectively matched with the two blocks. The reticle case of claim 4, wherein the elastic section of each of the hooks has a guiding surface slidable relative to the corresponding stop of the block. The reticle case of claim 5, wherein each of the hooks further has a body disposed along the surface of the first box or the second box provided by the hook unit The second box body of the slider unit or the fixed section of the first box body extending, and a connecting section bent away from the receiving space by the fixing section, the elastic section is bent by the connecting section Opposite the fixed section and the guiding surface gradually extends obliquely away from the fixed section. The photomask case of claim 6, wherein the slide rail has a mounting portion connected to the first box body or the second box body provided with the slider unit, and two mountings are provided The rail portions are bent away from the accommodating space and spaced apart from each other in the second direction, and the two blocks are slidably coupled to the rail portions. The photomask case of claim 7, wherein each of the rail portions has a flat plate segment for the corresponding operation portion of the card block, and a support for connecting the flat plate segment and the mounting portion a segment, and the plate segment has a first surface and a second surface on opposite sides, the first surface facing the receiving space and connected to the supporting segment. The photomask cartridge of claim 8, wherein the second surface of each of the flat plate segments forms two arcuate protrusions spaced apart from each other in the second direction, and one of the arcuate protrusions corresponds to The block is positioned at the latch position, and the other of the arcuate protrusions positions the corresponding block in the unlocked position. The photomask case of claim 8, wherein each of the two ends of the flat plate segment has a stop block for restricting the movement range of the block. The photomask case according to claim 7, wherein the mounting portion between the two rail portions of the slider unit disposed on the second box body or the two hooks of the hook unit The body also protrudes with a triggering portion for the user to apply force. The photomask cartridge of claim 2, wherein the cartridge has at least one elastic arm that abuts the slide rail. The photomask case of claim 12, wherein the elastic arm has a convex protrusion protruding toward the sliding rail, and the elastic arm abuts the sliding rail by the convex point. The reticle case of claim 2, wherein the damper has an extension portion, and the elastic segment is at least when the card block is in the shackle position and the hood is in the closed state A portion is limited between the extension and the operating portion. The photomask cartridge according to any one of claims 1 to 14, wherein the first casing has a first base wall having a rectangular shape and a first surrounding wall connected to a periphery of the first base wall. The second box body has a second base wall that is rectangular and a second surrounding wall that is connected to the circumference of the second base wall. The slider unit is disposed in the first surrounding wall and the second surrounding wall. In one case, the buckle unit is disposed on the other of the first surrounding wall and the second surrounding wall, and the light box case further includes a first surrounding wall and the second surrounding wall and is located at the lock a pivoting mechanism on the opposite side of the buckle mechanism to pivot the second casing relative to the first casing. The photomask cartridge of claim 15, wherein the first positioning portions protrude from the inner side of the first base wall, and the second positioning portions protrude from the inner side of the second base wall. The reticle case of claim 1, wherein when the reticle case is in the closed state, each of the first positioning portion and the corresponding second positioning portion are respectively perpendicular to the first The directions of the directions are mutually blocked. The reticle case of claim 1, wherein each of the first positioning portions includes a first stop surface and a second stop surface, each of the second positioning portions including a third stop surface and a fourth stop surface, when the hood is in the closed state, the first stop surface and the third stop surface are mutually blocked in a second direction perpendicular to the first direction, and the The second stop surface and the fourth stop surface are mutually blocked in a third direction perpendicular to the first direction and the second direction.