TWD208387S - Inner tube of reaction tube for semiconductor manufacturing equipment - Google Patents

Inner tube of reaction tube for semiconductor manufacturing equipment Download PDF

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Publication number
TWD208387S
TWD208387S TW108305507F TW108305507F TWD208387S TW D208387 S TWD208387 S TW D208387S TW 108305507 F TW108305507 F TW 108305507F TW 108305507 F TW108305507 F TW 108305507F TW D208387 S TWD208387 S TW D208387S
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TW
Taiwan
Prior art keywords
semiconductor manufacturing
manufacturing equipment
inner tube
reaction tube
tube
Prior art date
Application number
TW108305507F
Other languages
Chinese (zh)
Inventor
加賀谷徹
梅川純史
Original Assignee
日商國際電氣股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商國際電氣股份有限公司 filed Critical 日商國際電氣股份有限公司
Publication of TWD208387S publication Critical patent/TWD208387S/en

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Abstract

【物品用途】;本物品係安裝於反應管之內側而被使用的內管，而該反應管係被使用於半導體製造裝置。;【設計說明】;本創作係有關於一種半導體製造裝置用反應管之內管之新穎設計。;本創作之半導體製造裝置用反應管之內管如附圖所示，其整體外形設計新穎美觀，為根據使用機能所作之最佳與最合理之設計，於申請前未見於刊物亦未公開使用，符合設計專利要件。;本物品係整體以透明體所形成。[Use of article]: This article is an inner tube installed inside a reaction tube used in semiconductor manufacturing equipment. ;[Design Description];This creation is about a novel design of the inner tube of a reaction tube for semiconductor manufacturing equipment. ;The inner tube of the reaction tube for semiconductor manufacturing equipment of this invention is as shown in the attached figure. Its overall appearance design is novel and beautiful. It is the best and most reasonable design based on the use function. It has not been seen in publications and has not been used publicly before the application. , meets the design patent requirements. ;This product is made entirely of a transparent body.

Description

半導體製造裝置用反應管之內管Inner tube of reaction tube for semiconductor manufacturing equipment

本物品係安裝於反應管之內側而被使用的內管，而該反應管係被使用於半導體製造裝置。This article is an inner tube used by being installed on the inside of a reaction tube, and the reaction tube is used in a semiconductor manufacturing device.

本創作係有關於一種半導體製造裝置用反應管之內管之新穎設計。This creation is about a novel design of the inner tube of a reaction tube used in semiconductor manufacturing equipment.

本創作之半導體製造裝置用反應管之內管如附圖所示，其整體外形設計新穎美觀，為根據使用機能所作之最佳與最合理之設計，於申請前未見於刊物亦未公開使用，符合設計專利要件。The inner tube of the reaction tube used in the semiconductor manufacturing device of this creation is shown in the attached drawings. Its overall shape design is novel and beautiful. It is the best and most reasonable design based on the use function. It has not been seen in the publication or used before the application. Meet the design patent requirements.

本物品係整體以透明體所形成。This article is formed by a transparent body as a whole.

TW108305507F 2019-03-20 2019-09-11 Inner tube of reaction tube for semiconductor manufacturing equipment TWD208387S (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019005924F JP1644260S (en) 2019-03-20 2019-03-20
JP2019-005924 2019-03-20

Publications (1)

Publication Number Publication Date
TWD208387S true TWD208387S (en) 2020-11-21

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
TW108305507F TWD208387S (en) 2019-03-20 2019-09-11 Inner tube of reaction tube for semiconductor manufacturing equipment

Country Status (3)

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US (1) USD901406S1 (en)
JP (1) JP1644260S (en)
TW (1) TWD208387S (en)

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JP1731672S (en) * 2022-03-15 2025-12-15 Furnace for substrate processing equipment
JP1731671S (en) * 2022-03-15 2025-12-15 Furnace for substrate processing equipment
JP1731674S (en) 2022-05-30 2025-12-15 Inner tubes for reaction tubes in semiconductor manufacturing equipment
JP1731675S (en) 2022-05-30 2025-12-15 Inner tubes for reaction tubes in semiconductor manufacturing equipment
JP1731673S (en) 2022-05-30 2025-12-15 Inner tubes for reaction tubes in semiconductor manufacturing equipment

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Publication number Publication date
USD901406S1 (en) 2020-11-10
JP1644260S (en) 2019-10-28

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