TWD193609S - 加熱器組件 - Google Patents

加熱器組件

Info

Publication number
TWD193609S
TWD193609S TW106307266D03F TW106307266D03F TWD193609S TW D193609 S TWD193609 S TW D193609S TW 106307266D03 F TW106307266D03 F TW 106307266D03F TW 106307266D03 F TW106307266D03 F TW 106307266D03F TW D193609 S TWD193609 S TW D193609S
Authority
TW
Taiwan
Prior art keywords
design
left view
heater block
view
refreshing
Prior art date
Application number
TW106307266D03F
Other languages
English (en)
Inventor
近藤裕志
Original Assignee
荷蘭商Asm Ip控股公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 荷蘭商Asm Ip控股公司 filed Critical 荷蘭商Asm Ip控股公司
Publication of TWD193609S publication Critical patent/TWD193609S/zh

Links

Abstract

【物品用途】;本設計係關於一種加熱器組件,其係一基板支撐裝置。;【設計說明】;圖式所揭露之虛線部分,為本案不主張設計之部分。 左側視圖與右側視圖相同,因此省略左側視圖。 本設計係關於一種新穎且具創意之設計,其不僅可達成所需功能,且亦可提供先前技術中所未見且令觀察者耳目一新之一獨特外觀。

Description

加熱器組件
本設計係關於一種加熱器組件,其係一基板支撐裝置。
圖式所揭露之虛線部分,為本案不主張設計之部分。 左側視圖與右側視圖相同,因此省略左側視圖。 本設計係關於一種新穎且具創意之設計,其不僅可達成所需功能,且亦可提供先前技術中所未見且令觀察者耳目一新之一獨特外觀。
TW106307266D03F 2017-06-12 2017-12-12 加熱器組件 TWD193609S (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US29/607,328 USD859484S1 (en) 2017-06-12 2017-06-12 Heater block
US29/607,328 2017-06-12

Publications (1)

Publication Number Publication Date
TWD193609S true TWD193609S (zh) 2018-10-21

Family

ID=67810246

Family Applications (4)

Application Number Title Priority Date Filing Date
TW106307266F TWD193236S (zh) 2017-06-12 2017-12-12 加熱器組件
TW106307266D01F TWD193237S (zh) 2017-06-12 2017-12-12 加熱器組件
TW106307266D02F TWD193238S (zh) 2017-06-12 2017-12-12 加熱器組件
TW106307266D03F TWD193609S (zh) 2017-06-12 2017-12-12 加熱器組件

Family Applications Before (3)

Application Number Title Priority Date Filing Date
TW106307266F TWD193236S (zh) 2017-06-12 2017-12-12 加熱器組件
TW106307266D01F TWD193237S (zh) 2017-06-12 2017-12-12 加熱器組件
TW106307266D02F TWD193238S (zh) 2017-06-12 2017-12-12 加熱器組件

Country Status (2)

Country Link
US (1) USD859484S1 (zh)
TW (4) TWD193236S (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD214069S (zh) 2019-10-30 2021-09-21 美商應用材料股份有限公司 加熱器基座

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD873782S1 (en) * 2016-05-17 2020-01-28 Electro Scientific Industries, Inc Component carrier plate
USD927575S1 (en) * 2019-01-18 2021-08-10 Shinkawa Ltd. Heater block for bonding apparatus
TWD224468S (zh) 2021-02-12 2023-04-01 美商應用材料股份有限公司 加熱基座之部分
USD1009816S1 (en) * 2021-08-29 2024-01-02 Applied Materials, Inc. Collimator for a physical vapor deposition chamber

Citations (1)

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Publication number Priority date Publication date Assignee Title
CN302743219S (zh) 2014-02-19

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JP3116412B2 (ja) * 1991-05-16 2000-12-11 セイコーエプソン株式会社 半導体装置のバンプ電極形成方法、表示装置及び電子印字装置
US5531835A (en) 1994-05-18 1996-07-02 Applied Materials, Inc. Patterned susceptor to reduce electrostatic force in a CVD chamber
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JPH10284360A (ja) * 1997-04-02 1998-10-23 Hitachi Ltd 基板温度制御装置及び方法
JP2002134484A (ja) 2000-10-19 2002-05-10 Asm Japan Kk 半導体基板保持装置
US6634882B2 (en) * 2000-12-22 2003-10-21 Asm America, Inc. Susceptor pocket profile to improve process performance
US6709267B1 (en) * 2002-12-27 2004-03-23 Asm America, Inc. Substrate holder with deep annular groove to prevent edge heat loss
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KR100614648B1 (ko) * 2004-07-15 2006-08-23 삼성전자주식회사 반도체 소자 제조에 사용되는 기판 처리 장치
USD529057S1 (en) * 2004-08-16 2006-09-26 Williams Advanced Materials, Inc. Sputtering target
US7993462B2 (en) * 2008-03-19 2011-08-09 Asm Japan K.K. Substrate-supporting device having continuous concavity
USD643055S1 (en) * 2008-09-11 2011-08-09 Asm Japan K.K. Heater block for use in a semiconductor processing tool
USD724196S1 (en) * 2013-12-17 2015-03-10 Stingray Group, Llc Heater block for pressure digestion vessels
USD725168S1 (en) * 2014-02-04 2015-03-24 Asm Ip Holding B.V. Heater block
USD726884S1 (en) * 2014-02-04 2015-04-14 Asm Ip Holding B.V. Heater block
US9469912B2 (en) 2014-04-21 2016-10-18 Lam Research Corporation Pretreatment method for photoresist wafer processing
USD807921S1 (en) * 2015-03-05 2018-01-16 Jaroslaw Grzesiak Fuel heater block
US10087525B2 (en) * 2015-08-04 2018-10-02 Asm Ip Holding B.V. Variable gap hard stop design
USD799646S1 (en) * 2016-08-30 2017-10-10 Asm Ip Holding B.V. Heater block
USD830981S1 (en) * 2017-04-07 2018-10-16 Asm Ip Holding B.V. Susceptor for semiconductor substrate processing apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN302743219S (zh) 2014-02-19

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD214069S (zh) 2019-10-30 2021-09-21 美商應用材料股份有限公司 加熱器基座

Also Published As

Publication number Publication date
TWD193238S (zh) 2018-10-01
TWD193237S (zh) 2018-10-01
TWD193236S (zh) 2018-10-01
USD859484S1 (en) 2019-09-10

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