TWD193609S - 加熱器組件 - Google Patents
加熱器組件Info
- Publication number
- TWD193609S TWD193609S TW106307266D03F TW106307266D03F TWD193609S TW D193609 S TWD193609 S TW D193609S TW 106307266D03 F TW106307266D03 F TW 106307266D03F TW 106307266D03 F TW106307266D03 F TW 106307266D03F TW D193609 S TWD193609 S TW D193609S
- Authority
- TW
- Taiwan
- Prior art keywords
- design
- left view
- heater block
- view
- refreshing
- Prior art date
Links
- 239000000758 substrate Substances 0.000 abstract description 2
Abstract
【物品用途】;本設計係關於一種加熱器組件,其係一基板支撐裝置。;【設計說明】;圖式所揭露之虛線部分,為本案不主張設計之部分。 左側視圖與右側視圖相同,因此省略左側視圖。 本設計係關於一種新穎且具創意之設計,其不僅可達成所需功能,且亦可提供先前技術中所未見且令觀察者耳目一新之一獨特外觀。
Description
本設計係關於一種加熱器組件,其係一基板支撐裝置。
圖式所揭露之虛線部分,為本案不主張設計之部分。 左側視圖與右側視圖相同,因此省略左側視圖。 本設計係關於一種新穎且具創意之設計,其不僅可達成所需功能,且亦可提供先前技術中所未見且令觀察者耳目一新之一獨特外觀。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US29/607,328 | 2017-06-12 | ||
US29/607,328 USD859484S1 (en) | 2017-06-12 | 2017-06-12 | Heater block |
Publications (1)
Publication Number | Publication Date |
---|---|
TWD193609S true TWD193609S (zh) | 2018-10-21 |
Family
ID=67810246
Family Applications (4)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW106307266F TWD193236S (zh) | 2017-06-12 | 2017-12-12 | 加熱器組件 |
TW106307266D02F TWD193238S (zh) | 2017-06-12 | 2017-12-12 | 加熱器組件 |
TW106307266D03F TWD193609S (zh) | 2017-06-12 | 2017-12-12 | 加熱器組件 |
TW106307266D01F TWD193237S (zh) | 2017-06-12 | 2017-12-12 | 加熱器組件 |
Family Applications Before (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW106307266F TWD193236S (zh) | 2017-06-12 | 2017-12-12 | 加熱器組件 |
TW106307266D02F TWD193238S (zh) | 2017-06-12 | 2017-12-12 | 加熱器組件 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW106307266D01F TWD193237S (zh) | 2017-06-12 | 2017-12-12 | 加熱器組件 |
Country Status (2)
Country | Link |
---|---|
US (1) | USD859484S1 (zh) |
TW (4) | TWD193236S (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWD214069S (zh) | 2019-10-30 | 2021-09-21 | 美商應用材料股份有限公司 | 加熱器基座 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD873782S1 (en) * | 2016-05-17 | 2020-01-28 | Electro Scientific Industries, Inc | Component carrier plate |
USD927575S1 (en) * | 2019-01-18 | 2021-08-10 | Shinkawa Ltd. | Heater block for bonding apparatus |
TWD224468S (zh) | 2021-02-12 | 2023-04-01 | 美商應用材料股份有限公司 | 加熱基座之部分 |
USD1009816S1 (en) * | 2021-08-29 | 2024-01-02 | Applied Materials, Inc. | Collimator for a physical vapor deposition chamber |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN302743219S (zh) | 2014-02-19 |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3116412B2 (ja) * | 1991-05-16 | 2000-12-11 | セイコーエプソン株式会社 | 半導体装置のバンプ電極形成方法、表示装置及び電子印字装置 |
US5531835A (en) | 1994-05-18 | 1996-07-02 | Applied Materials, Inc. | Patterned susceptor to reduce electrostatic force in a CVD chamber |
US5810933A (en) | 1996-02-16 | 1998-09-22 | Novellus Systems, Inc. | Wafer cooling device |
JPH10284360A (ja) * | 1997-04-02 | 1998-10-23 | Hitachi Ltd | 基板温度制御装置及び方法 |
JP2002134484A (ja) | 2000-10-19 | 2002-05-10 | Asm Japan Kk | 半導体基板保持装置 |
US6634882B2 (en) * | 2000-12-22 | 2003-10-21 | Asm America, Inc. | Susceptor pocket profile to improve process performance |
US6709267B1 (en) * | 2002-12-27 | 2004-03-23 | Asm America, Inc. | Substrate holder with deep annular groove to prevent edge heat loss |
US7378616B2 (en) * | 2004-06-10 | 2008-05-27 | Asm Technology Singapore Pte. Ltd. | Heating apparatus and method for semiconductor devices |
KR100614648B1 (ko) * | 2004-07-15 | 2006-08-23 | 삼성전자주식회사 | 반도체 소자 제조에 사용되는 기판 처리 장치 |
USD529057S1 (en) * | 2004-08-16 | 2006-09-26 | Williams Advanced Materials, Inc. | Sputtering target |
US7993462B2 (en) * | 2008-03-19 | 2011-08-09 | Asm Japan K.K. | Substrate-supporting device having continuous concavity |
USD643055S1 (en) * | 2008-09-11 | 2011-08-09 | Asm Japan K.K. | Heater block for use in a semiconductor processing tool |
USD724196S1 (en) * | 2013-12-17 | 2015-03-10 | Stingray Group, Llc | Heater block for pressure digestion vessels |
USD726884S1 (en) * | 2014-02-04 | 2015-04-14 | Asm Ip Holding B.V. | Heater block |
USD725168S1 (en) * | 2014-02-04 | 2015-03-24 | Asm Ip Holding B.V. | Heater block |
US9469912B2 (en) | 2014-04-21 | 2016-10-18 | Lam Research Corporation | Pretreatment method for photoresist wafer processing |
USD807921S1 (en) * | 2015-03-05 | 2018-01-16 | Jaroslaw Grzesiak | Fuel heater block |
US10087525B2 (en) * | 2015-08-04 | 2018-10-02 | Asm Ip Holding B.V. | Variable gap hard stop design |
USD799646S1 (en) * | 2016-08-30 | 2017-10-10 | Asm Ip Holding B.V. | Heater block |
USD830981S1 (en) * | 2017-04-07 | 2018-10-16 | Asm Ip Holding B.V. | Susceptor for semiconductor substrate processing apparatus |
-
2017
- 2017-06-12 US US29/607,328 patent/USD859484S1/en active Active
- 2017-12-12 TW TW106307266F patent/TWD193236S/zh unknown
- 2017-12-12 TW TW106307266D02F patent/TWD193238S/zh unknown
- 2017-12-12 TW TW106307266D03F patent/TWD193609S/zh unknown
- 2017-12-12 TW TW106307266D01F patent/TWD193237S/zh unknown
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN302743219S (zh) | 2014-02-19 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWD214069S (zh) | 2019-10-30 | 2021-09-21 | 美商應用材料股份有限公司 | 加熱器基座 |
Also Published As
Publication number | Publication date |
---|---|
TWD193236S (zh) | 2018-10-01 |
TWD193237S (zh) | 2018-10-01 |
USD859484S1 (en) | 2019-09-10 |
TWD193238S (zh) | 2018-10-01 |
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