TWD191015S - Compartment for cabin - Google Patents

Compartment for cabin

Info

Publication number
TWD191015S
TWD191015S TW106304101F TW106304101F TWD191015S TW D191015 S TWD191015 S TW D191015S TW 106304101 F TW106304101 F TW 106304101F TW 106304101 F TW106304101 F TW 106304101F TW D191015 S TWD191015 S TW D191015S
Authority
TW
Taiwan
Prior art keywords
cabin
cassette
prevent
item
compartment
Prior art date
Application number
TW106304101F
Other languages
English (en)
Chinese (zh)
Inventor
唐澤端是
Original Assignee
日立國際電氣股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立國際電氣股份有限公司 filed Critical 日立國際電氣股份有限公司
Publication of TWD191015S publication Critical patent/TWD191015S/zh

Links

TW106304101F 2017-01-18 2017-07-18 Compartment for cabin TWD191015S (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPD2017-729F JP1584066S (enrdf_load_stackoverflow) 2017-01-18 2017-01-18
JP2017-000729 2017-01-18

Publications (1)

Publication Number Publication Date
TWD191015S true TWD191015S (zh) 2018-06-11

Family

ID=59593655

Family Applications (1)

Application Number Title Priority Date Filing Date
TW106304101F TWD191015S (zh) 2017-01-18 2017-07-18 Compartment for cabin

Country Status (3)

Country Link
US (1) USD868012S1 (enrdf_load_stackoverflow)
JP (1) JP1584066S (enrdf_load_stackoverflow)
TW (1) TWD191015S (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP1665228S (enrdf_load_stackoverflow) * 2019-11-28 2020-08-03

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWM418159U (en) 2011-07-01 2011-12-11 Qun-Jing Kong Improved stopper structure of window

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10139159A (ja) * 1996-11-13 1998-05-26 Tokyo Electron Ltd カセットチャンバ及びカセット搬入搬出機構
JPH10147432A (ja) * 1996-11-20 1998-06-02 Tokyo Electron Ltd カセットチャンバ
US6152680A (en) * 1997-08-26 2000-11-28 Daitron, Inc. Wafer cassette rotation mechanism
US6270307B1 (en) * 1999-01-25 2001-08-07 Chartered Semiconductor Manufacturing Company Method for aligning wafers in a cassette
US6595841B2 (en) * 2001-12-20 2003-07-22 Taiwan Semiconductor Manufacturing Co., Ltd. Apparatus for holding wafer cassettes in a cassette tub during a chemical mechanical polishing process
USD665759S1 (en) * 2010-12-14 2012-08-21 Tokyo Electron Limited Substrate transfer holder
USD674365S1 (en) * 2011-01-20 2013-01-15 Tokyo Electron Limited Arm for wafer transportation for manufacturing semiconductor
USD701498S1 (en) * 2011-10-20 2014-03-25 Tokyo Electron Limited Arm for wafer transportation for manufacturing semiconductor
USD695240S1 (en) * 2011-10-20 2013-12-10 Tokyo Electron Limited Arm for wafer transportation for manufacturing semiconductor
US8676375B2 (en) * 2012-02-27 2014-03-18 Veeco Instruments Inc. Automated cassette-to-cassette substrate handling system

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWM418159U (en) 2011-07-01 2011-12-11 Qun-Jing Kong Improved stopper structure of window

Also Published As

Publication number Publication date
USD868012S1 (en) 2019-11-26
JP1584066S (enrdf_load_stackoverflow) 2017-08-21

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