JP1584066S - - Google Patents

Info

Publication number
JP1584066S
JP1584066S JPD2017-729F JP2017000729F JP1584066S JP 1584066 S JP1584066 S JP 1584066S JP 2017000729 F JP2017000729 F JP 2017000729F JP 1584066 S JP1584066 S JP 1584066S
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JPD2017-729F
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JPD2017-729F priority Critical patent/JP1584066S/ja
Priority to US29/610,847 priority patent/USD868012S1/en
Priority to TW106304101F priority patent/TWD191015S/zh
Application granted granted Critical
Publication of JP1584066S publication Critical patent/JP1584066S/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JPD2017-729F 2017-01-18 2017-01-18 Active JP1584066S (enrdf_load_stackoverflow)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JPD2017-729F JP1584066S (enrdf_load_stackoverflow) 2017-01-18 2017-01-18
US29/610,847 USD868012S1 (en) 2017-01-18 2017-07-17 Cassette receiving tool for semiconductor manufacturing apparatus
TW106304101F TWD191015S (zh) 2017-01-18 2017-07-18 Compartment for cabin

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2017-729F JP1584066S (enrdf_load_stackoverflow) 2017-01-18 2017-01-18

Publications (1)

Publication Number Publication Date
JP1584066S true JP1584066S (enrdf_load_stackoverflow) 2017-08-21

Family

ID=59593655

Family Applications (1)

Application Number Title Priority Date Filing Date
JPD2017-729F Active JP1584066S (enrdf_load_stackoverflow) 2017-01-18 2017-01-18

Country Status (3)

Country Link
US (1) USD868012S1 (enrdf_load_stackoverflow)
JP (1) JP1584066S (enrdf_load_stackoverflow)
TW (1) TWD191015S (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP1665228S (enrdf_load_stackoverflow) * 2019-11-28 2020-08-03

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10139159A (ja) * 1996-11-13 1998-05-26 Tokyo Electron Ltd カセットチャンバ及びカセット搬入搬出機構
JPH10147432A (ja) * 1996-11-20 1998-06-02 Tokyo Electron Ltd カセットチャンバ
US6152680A (en) * 1997-08-26 2000-11-28 Daitron, Inc. Wafer cassette rotation mechanism
US6270307B1 (en) * 1999-01-25 2001-08-07 Chartered Semiconductor Manufacturing Company Method for aligning wafers in a cassette
US6595841B2 (en) * 2001-12-20 2003-07-22 Taiwan Semiconductor Manufacturing Co., Ltd. Apparatus for holding wafer cassettes in a cassette tub during a chemical mechanical polishing process
USD665759S1 (en) * 2010-12-14 2012-08-21 Tokyo Electron Limited Substrate transfer holder
USD674365S1 (en) * 2011-01-20 2013-01-15 Tokyo Electron Limited Arm for wafer transportation for manufacturing semiconductor
TWM418159U (en) 2011-07-01 2011-12-11 Qun-Jing Kong Improved stopper structure of window
USD701498S1 (en) * 2011-10-20 2014-03-25 Tokyo Electron Limited Arm for wafer transportation for manufacturing semiconductor
USD695240S1 (en) * 2011-10-20 2013-12-10 Tokyo Electron Limited Arm for wafer transportation for manufacturing semiconductor
US8676375B2 (en) * 2012-02-27 2014-03-18 Veeco Instruments Inc. Automated cassette-to-cassette substrate handling system

Also Published As

Publication number Publication date
TWD191015S (zh) 2018-06-11
USD868012S1 (en) 2019-11-26

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