TWD169004S - part of reaction tube - Google Patents
part of reaction tubeInfo
- Publication number
- TWD169004S TWD169004S TW103305359F TW103305359F TWD169004S TW D169004 S TWD169004 S TW D169004S TW 103305359 F TW103305359 F TW 103305359F TW 103305359 F TW103305359 F TW 103305359F TW D169004 S TWD169004 S TW D169004S
- Authority
- TW
- Taiwan
- Prior art keywords
- design
- case
- article
- gas supply
- reaction tube
- Prior art date
Links
- 239000000758 substrate Substances 0.000 abstract 4
Abstract
【物品用途】;本設計的物品是反應管，為一種在將基板排列成複數段來進行處理的基板處理裝置中，用來將基板收容在本物品的內部的反應管。;【設計說明】;在本物品的內側，設置具有複數個氣體供給口的氣體供給部，將從氣體供給口所導入的氣體，形成對於基板呈水平，且從上部至下部均勻的流動，並從氣體排氣口被排出；再者，外管上部的外壁，是保有比側壁更厚實的膨凸形狀和構造強度。;圖式所揭露之實線部分，為本案主張設計之部分；圖式所揭露之虛線部分，為本案不主張設計之部分；圖式中一點鏈線所圍繞者，係界定本案所欲主張之範圍，該一點鏈線本身為本案不主張設計之部分。本物品全體為透明。[Use of the article] The article of this design is a reaction tube, which is a reaction tube used to accommodate the substrate inside the article in a substrate processing apparatus that arranges the substrates into a plurality of stages for processing. ;[Design Description];A gas supply part with a plurality of gas supply ports is provided inside this product, and the gas introduced from the gas supply port forms a horizontal flow with respect to the substrate and a uniform flow from top to bottom, and It is discharged from the gas exhaust port; furthermore, the outer wall at the upper part of the outer tube retains a thicker convex shape and structural strength than the side wall. ; The solid line part disclosed in the drawing is the part of the proposed design of this case; the dotted line part disclosed in the drawing is the part of this case not advocated for design; the area surrounded by a dotted chain line in the drawing defines the intended claim of this case Within the scope, the one-point chain line itself is a part of the design that is not claimed in this case. This item is entirely transparent.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014005210 | 2014-03-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TWD169004S true TWD169004S (en) | 2015-07-11 |
Family
ID=54353105
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW103305359F TWD169004S (en) | 2014-03-12 | 2014-09-12 | part of reaction tube |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | USD742339S1 (en) |
| TW (1) | TWD169004S (en) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP1534829S (en) * | 2015-02-23 | 2015-10-13 | ||
| JP1546345S (en) * | 2015-09-04 | 2016-03-22 | ||
| USD813181S1 (en) * | 2016-07-26 | 2018-03-20 | Hitachi Kokusai Electric Inc. | Cover of seal cap for reaction chamber of semiconductor |
| USD820086S1 (en) * | 2017-02-13 | 2018-06-12 | Partners in Packaging, LLC | Container cover |
| USD851488S1 (en) * | 2017-02-21 | 2019-06-18 | Closure Systems International Inc. | Closure |
| USD838173S1 (en) * | 2017-02-21 | 2019-01-15 | Closure Systems International Inc. | Closure |
| USD838172S1 (en) * | 2017-02-21 | 2019-01-15 | Closure Systems International Inc. | Closure |
| JP1620194S (en) * | 2018-01-22 | 2018-12-10 | ||
| USD893246S1 (en) * | 2019-01-23 | 2020-08-18 | Tervis Tumbler Company | Lid for bottle tumbler |
| JP1713188S (en) | 2021-09-15 | 2022-04-21 | ||
| JP1731877S (en) | 2022-03-01 | 2022-12-09 | ||
| JP1731789S (en) | 2022-03-01 | 2022-12-09 | ||
| JP1731878S (en) | 2022-03-01 | 2022-12-09 |
Family Cites Families (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD268394S (en) * | 1979-08-03 | 1983-03-29 | Phillips Petroleum Company | Combined cap and extruding plunger for dispensing container |
| KR890008922A (en) * | 1987-11-21 | 1989-07-13 | 후세 노보루 | Heat treatment device |
| JP3024449B2 (en) * | 1993-07-24 | 2000-03-21 | ヤマハ株式会社 | Vertical heat treatment furnace and heat treatment method |
| JP3218164B2 (en) * | 1995-05-31 | 2001-10-15 | 東京エレクトロン株式会社 | Support boat for object to be processed, heat treatment apparatus and heat treatment method |
| USD405429S (en) * | 1997-01-31 | 1999-02-09 | Tokyo Electron Limited | Processing tube for use in a semiconductor wafer heat processing apparatus |
| USD423463S (en) * | 1997-01-31 | 2000-04-25 | Tokyo Electron Limited | Quartz process tube |
| USD417438S (en) * | 1997-01-31 | 1999-12-07 | Tokyo Electron Limited | Quartz outer tube |
| USD406113S (en) * | 1997-01-31 | 1999-02-23 | Tokyo Electron Limited | Processing tube for use in a semiconductor wafer heat processing apparatus |
| USD424024S (en) * | 1997-01-31 | 2000-05-02 | Tokyo Electron Limited | Quartz process tube |
| USD404368S (en) * | 1997-08-20 | 1999-01-19 | Tokyo Electron Limited | Outer tube for use in a semiconductor wafer heat processing apparatus |
| USD405431S (en) * | 1997-08-20 | 1999-02-09 | Tokyo Electron Ltd. | Tube for use in a semiconductor wafer heat processing apparatus |
| USD405062S (en) * | 1997-08-20 | 1999-02-02 | Tokyo Electron Ltd. | Processing tube for use in a semiconductor wafer heat processing apparatus |
| JP2000243747A (en) * | 1999-02-18 | 2000-09-08 | Kokusai Electric Co Ltd | Substrate preparing apparatus |
| USD443040S1 (en) * | 2000-04-04 | 2001-05-29 | American Standard International Inc. | Cap |
| US20020102187A1 (en) * | 2001-01-26 | 2002-08-01 | Bellenger Denise Dicharry | Sectioned fragrance candle |
| JP3985899B2 (en) * | 2002-03-28 | 2007-10-03 | 株式会社日立国際電気 | Substrate processing equipment |
| USD536614S1 (en) * | 2005-12-01 | 2007-02-13 | J.L. Clark, Inc. | Container lid |
| USD600659S1 (en) * | 2006-09-12 | 2009-09-22 | Tokyo Electron Limited | Process tube for manufacturing semiconductor wafers |
| USD586768S1 (en) * | 2006-10-12 | 2009-02-17 | Tokyo Electron Limited | Process tube for manufacturing semiconductor wafers |
| USD619630S1 (en) * | 2007-05-08 | 2010-07-13 | Tokyo Electron Limited | Process tube for manufacturing semiconductor wafers |
| USD564879S1 (en) * | 2007-07-17 | 2008-03-25 | Rieke Corporation | Plastic plug with overcap |
| USD611013S1 (en) * | 2008-03-28 | 2010-03-02 | Tokyo Electron Limited | Process tube for manufacturing semiconductor wafers |
| USD618638S1 (en) * | 2008-05-09 | 2010-06-29 | Hitachi Kokusai Electric, Inc. | Reaction tube |
| USD610559S1 (en) * | 2008-05-30 | 2010-02-23 | Hitachi Kokusai Electric, Inc. | Reaction tube |
| USD597840S1 (en) * | 2008-12-24 | 2009-08-11 | Drug Plastics & Glass Company, Inc. | Bottle cap |
| USD657675S1 (en) * | 2011-04-07 | 2012-04-17 | Averill Walter J | Reusable resilient bottle capsule |
| USD720309S1 (en) * | 2011-11-18 | 2014-12-30 | Tokyo Electron Limited | Inner tube for process tube for manufacturing semiconductor wafers |
| USD720308S1 (en) * | 2011-11-18 | 2014-12-30 | Tokyo Electron Limited | Inner tube for process tube for manufacturing semiconductor wafers |
| USD710196S1 (en) * | 2012-09-11 | 2014-08-05 | Becton Dickinson and Company Limited | Soft cap for a connector |
| TWD168774S (en) * | 2013-06-28 | 2015-07-01 | 日立國際電氣股份有限公司 | part of reaction tube |
| TWD167987S (en) * | 2013-06-28 | 2015-05-21 | 日立國際電氣股份有限公司 | part of reaction tube |
-
2014
- 2014-09-10 US US29/501,920 patent/USD742339S1/en active Active
- 2014-09-12 TW TW103305359F patent/TWD169004S/en unknown
Also Published As
| Publication number | Publication date |
|---|---|
| USD742339S1 (en) | 2015-11-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWD169004S (en) | part of reaction tube | |
| TWD169005S (en) | part of reaction tube | |
| TWD174640S (en) | Retaining nut/ring | |
| JP2015183224A5 (en) | ||
| TWD181154S (en) | Portion of a controller | |
| TWD167987S (en) | part of reaction tube | |
| TWD200073S (en) | reaction tube | |
| TWD182751S (en) | Reaction tubes for semiconductor manufacturing equipment | |
| TWD178930S (en) | Air purifier | |
| TWD176127S (en) | part of reaction tube | |
| USD758937S1 (en) | Exhaust pipe set for a minivan | |
| TWD174924S (en) | reaction tube | |
| TWD174341S (en) | Inner cylinder for exhaust gas treatment device | |
| TWD193049S (en) | Part of the reaction tube | |
| TWD171078S (en) | Part of the gas supply nozzle for substrate processing equipment | |
| MX2016015719A (en) | Multistage steam-cooking device. | |
| PT3007816T (en) | Polymerisation process with reduced deposit formation in the reaction chamber | |
| MX2019006219A (en) | Passive gravity filter cell and methods of use thereof. | |
| RU2011142853A (en) | DEVICE FOR COATING AN EXTENDED PRODUCT | |
| MY187650A (en) | High pressure reactor for the synthesis of melamine | |
| UA98188U (en) | The device for thermal processing of hydrocarbon-containing material | |
| ZA201901777B (en) | Device for the energy-optimised production of fluid eddies in a reaction chamber | |
| CN302131882S (en) | wine bottle(1) | |
| TH176885A (en) | Machines and methods for calcination of gypsum. | |
| CN302276422S (en) | Wine bottle (six courses) |