TWD182751S - Reaction tubes for semiconductor manufacturing equipment - Google Patents
Reaction tubes for semiconductor manufacturing equipmentInfo
- Publication number
- TWD182751S TWD182751S TW105305510F TW105305510F TWD182751S TW D182751 S TWD182751 S TW D182751S TW 105305510 F TW105305510 F TW 105305510F TW 105305510 F TW105305510 F TW 105305510F TW D182751 S TWD182751 S TW D182751S
- Authority
- TW
- Taiwan
- Prior art keywords
- design
- gas
- article
- product
- film
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 238000000034 method Methods 0.000 abstract 1
Abstract
【物品用途】;本設計之物品係一種在半導體製造之成膜過程中,如顯示使用狀態之參考截面圖所示般設置於成膜裝置內之用以使得製品晶圓與氣體進行反應之管。具體而言,於本物品內,在製品晶圓處於積層狀態下流入氣體而於製品晶圓表面成膜,此時,必須使得本物品內之上下部分的氣體濃度成為均勻。做為欲取得部分設計專利之部分為用以將流入的氣體加以排氣之氣體引出口,其形狀設置成為大致倒三角形,藉此,可讓本物品之內部全體的氣體濃度成為均勻。此外,欲取得設計專利之部分如實線部分之部分放大參考圖所顯示般,係由上下方向區分為A至F之符號的6個區段所構成,個別區段的內壁係以本物品之內部整體成為最均勻氣體濃度的方式成為直線狀,此外,整體之氣體引出口的形狀呈現大致倒三角形狀。;【設計說明】;本設計以實線所表示之部分係做為部分設計欲取得設計專利之部分,包含X-X線放大截面圖係特定欲做為部分設計取得設計專利的部分。此外,圖式中以虛線表示之部分為本設計所不主張之部分。[Use of article]; The article of this design is a tube that is installed in the film-forming device as shown in the reference cross-sectional view showing the use state during the film-forming process of semiconductor manufacturing to allow the product wafer to react with the gas. . Specifically, in this article, when the product wafer is in a stacked state, the gas flows in to form a film on the surface of the product wafer. At this time, the gas concentration in the upper and lower parts of the article must be made uniform. The part for which a partial design patent is to be obtained is a gas outlet for exhausting the incoming gas. Its shape is set in a roughly inverted triangle, thereby making the gas concentration uniform throughout the interior of the product. In addition, the part for which a design patent is to be obtained is composed of six sections marked with symbols A to F in the up and down direction, as shown in the partially enlarged reference drawing of the solid line part. The inner wall of each section is made of the product. The entire interior is linear in order to achieve the most uniform gas concentration, and the overall shape of the gas outlet is approximately an inverted triangle. ;[Design description];The parts of this design represented by solid lines are intended to be part of the design and are subject to a design patent. The X-X line enlarged cross-sectional view is specifically intended to be a part of the design to obtain a design patent. In addition, the parts indicated by dotted lines in the drawings are not recommended by this design.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPD2016-6969F JP1563524S (en) | 2016-03-30 | 2016-03-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
TWD182751S true TWD182751S (en) | 2017-05-01 |
Family
ID=57321692
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW105305510F TWD182751S (en) | 2016-03-30 | 2016-09-19 | Reaction tubes for semiconductor manufacturing equipment |
Country Status (3)
Country | Link |
---|---|
US (1) | USD800080S1 (en) |
JP (1) | JP1563524S (en) |
TW (1) | TWD182751S (en) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP1605460S (en) * | 2017-08-09 | 2021-05-31 | ||
JP1605462S (en) * | 2017-08-10 | 2021-05-31 | ||
JP1605461S (en) * | 2017-08-10 | 2021-05-31 | ||
JP1605982S (en) * | 2017-12-27 | 2021-05-31 | ||
USD908660S1 (en) * | 2019-01-04 | 2021-01-26 | Baidu Online Network Technology (Beijing) Co., Ltd. | Smart speaker |
JP1644260S (en) * | 2019-03-20 | 2019-10-28 | ||
JP1678335S (en) | 2020-05-29 | 2021-02-01 | ||
JP1678336S (en) | 2020-05-29 | 2021-02-01 | ||
JP1678334S (en) | 2020-05-29 | 2021-02-01 | ||
JP1731673S (en) | 2022-05-30 | 2022-12-08 | ||
JP1731674S (en) | 2022-05-30 | 2022-12-08 | ||
JP1731675S (en) | 2022-05-30 | 2022-12-08 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1995204A (en) * | 1930-07-07 | 1935-03-19 | Ford William Walter | Drafting instrument |
US2532329A (en) * | 1947-03-28 | 1950-12-05 | Owen D Premo | Angle layout and checking instrument |
USD340874S (en) * | 1992-04-22 | 1993-11-02 | Michael Nicholson | Universal gauging tool |
USD367926S (en) * | 1995-03-03 | 1996-03-12 | Patrick Lin | Fireplace screen |
AU138249S (en) * | 1999-01-13 | 1999-08-17 | W & G Australia Pty Ltd | A template |
KR20080046722A (en) * | 2005-10-03 | 2008-05-27 | 투베마스터 인코포레이티드 | Device for loading chemical reactor tubes |
CA118733S (en) * | 2006-12-22 | 2008-02-21 | Peak Innovations Inc | Trellis with diamond pattern |
USD621526S1 (en) * | 2009-02-27 | 2010-08-10 | Robert Falligant | Collapsible garden trellis |
AU337531S (en) * | 2010-12-17 | 2011-07-08 | Mathematics stencil | |
TWD167987S (en) * | 2013-06-28 | 2015-05-21 | 日立國際電氣股份有限公司 | part of reaction tube |
-
2016
- 2016-03-30 JP JPD2016-6969F patent/JP1563524S/ja active Active
- 2016-09-19 TW TW105305510F patent/TWD182751S/en unknown
- 2016-09-20 US US29/578,225 patent/USD800080S1/en active Active
Also Published As
Publication number | Publication date |
---|---|
JP1563524S (en) | 2016-11-21 |
USD800080S1 (en) | 2017-10-17 |
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