TW586339B - Micro electro-mechanical system method - Google Patents

Micro electro-mechanical system method Download PDF

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Publication number
TW586339B
TW586339B TW092107385A TW92107385A TW586339B TW 586339 B TW586339 B TW 586339B TW 092107385 A TW092107385 A TW 092107385A TW 92107385 A TW92107385 A TW 92107385A TW 586339 B TW586339 B TW 586339B
Authority
TW
Taiwan
Prior art keywords
conductive
cantilever beam
cantilever
forming
circuit board
Prior art date
Application number
TW092107385A
Other languages
English (en)
Chinese (zh)
Other versions
TW200308190A (en
Inventor
Manes Eliacin
Keryn Lian
Junhua Liu
Robert B Lempkowski
Original Assignee
Motorola Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Inc filed Critical Motorola Inc
Publication of TW200308190A publication Critical patent/TW200308190A/zh
Application granted granted Critical
Publication of TW586339B publication Critical patent/TW586339B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0073—Solutions for avoiding the use of expensive silicon technologies in micromechanical switches
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0054—Rocking contacts or actuating members

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
TW092107385A 2002-04-26 2003-04-01 Micro electro-mechanical system method TW586339B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/133,913 US6714105B2 (en) 2002-04-26 2002-04-26 Micro electro-mechanical system method

Publications (2)

Publication Number Publication Date
TW200308190A TW200308190A (en) 2003-12-16
TW586339B true TW586339B (en) 2004-05-01

Family

ID=29249098

Family Applications (1)

Application Number Title Priority Date Filing Date
TW092107385A TW586339B (en) 2002-04-26 2003-04-01 Micro electro-mechanical system method

Country Status (7)

Country Link
US (1) US6714105B2 (cg-RX-API-DMAC7.html)
EP (1) EP1502282A4 (cg-RX-API-DMAC7.html)
JP (1) JP2005523823A (cg-RX-API-DMAC7.html)
CN (1) CN1326200C (cg-RX-API-DMAC7.html)
AU (1) AU2003224701A1 (cg-RX-API-DMAC7.html)
TW (1) TW586339B (cg-RX-API-DMAC7.html)
WO (1) WO2003092048A2 (cg-RX-API-DMAC7.html)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030202264A1 (en) * 2002-04-30 2003-10-30 Weber Timothy L. Micro-mirror device
US6972882B2 (en) * 2002-04-30 2005-12-06 Hewlett-Packard Development Company, L.P. Micro-mirror device with light angle amplification
EP1394555B1 (en) * 2002-08-30 2012-04-25 STMicroelectronics S.r.l. Threshold acceleration sensor
ATE434839T1 (de) * 2002-12-13 2009-07-15 Wispry Inc Varactorvorrichtungen und verfahren
KR100513696B1 (ko) * 2003-06-10 2005-09-09 삼성전자주식회사 시이소오형 ｒｆ용 ｍｅｍｓ 스위치 및 그 제조방법
JP2005099678A (ja) * 2003-08-20 2005-04-14 Olympus Corp 光遮断装置および光スイッチ装置
JP4109182B2 (ja) * 2003-11-10 2008-07-02 株式会社日立メディアエレクトロニクス 高周波ｍｅｍｓスイッチ
US20050134141A1 (en) * 2003-12-23 2005-06-23 Jovica Savic Meso-microelectromechanical system having a glass beam and method for its fabrication
EP1585219A1 (en) * 2004-04-06 2005-10-12 Seiko Epson Corporation A micro-flap type nano/micro mechanical device and fabrication method thereof
US8194386B2 (en) * 2005-12-22 2012-06-05 Epcos Ag Arrangement of MEMS devices having series coupled capacitors
US7602261B2 (en) * 2005-12-22 2009-10-13 Intel Corporation Micro-electromechanical system (MEMS) switch
US7463113B2 (en) * 2006-02-28 2008-12-09 Motorla, Inc. Apparatus and methods relating to electrically conductive path interfaces disposed within capacitor plate openings
US7554421B2 (en) * 2006-05-16 2009-06-30 Intel Corporation Micro-electromechanical system (MEMS) trampoline switch/varactor
US7605675B2 (en) * 2006-06-20 2009-10-20 Intel Corporation Electromechanical switch with partially rigidified electrode
US20080029372A1 (en) * 2006-08-01 2008-02-07 Timothy Beerling Microfluidic switching devices having reduced control inputs
JP4247254B2 (ja) * 2006-08-08 2009-04-02 マイクロプレシジョン株式会社 電磁駆動型光偏向素子
US7782594B2 (en) * 2006-08-18 2010-08-24 Imec MEMS variable capacitor and method for producing the same
US7583169B1 (en) 2007-03-22 2009-09-01 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration MEMS switches having non-metallic crossbeams
US7499257B2 (en) * 2007-06-22 2009-03-03 Motorola, Inc. Micro-electro-mechanical system varactor
US7830003B2 (en) * 2007-12-27 2010-11-09 Honeywell International, Inc. Mechanical isolation for MEMS devices
US8338728B2 (en) * 2008-10-01 2012-12-25 Clean Energy Labs, Llc Nanoelectromechanical tunneling current switch systems
JP4816762B2 (ja) * 2009-05-20 2011-11-16 オムロン株式会社 バネの構造および当該バネを用いたアクチュエータ
TWI444323B (zh) 2010-02-03 2014-07-11 Prime View Int Co Ltd 驅動元件及驅動元件陣列排列
US8581679B2 (en) * 2010-02-26 2013-11-12 Stmicroelectronics Asia Pacific Pte. Ltd. Switch with increased magnetic sensitivity
CN102211752A (zh) * 2010-04-08 2011-10-12 元太科技工业股份有限公司 驱动元件、驱动元件阵列模组及其结构
US8635765B2 (en) 2011-06-15 2014-01-28 International Business Machines Corporation Method of forming micro-electrical-mechanical structure (MEMS)
CN102486972B (zh) * 2011-09-01 2014-10-22 中国科学院上海微系统与信息技术研究所 双通道射频mems开关及其制造方法
CN106904565B (zh) * 2015-12-22 2019-06-28 中芯国际集成电路制造(上海)有限公司 一种mems器件及其制备方法、电子装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5619061A (en) * 1993-07-27 1997-04-08 Texas Instruments Incorporated Micromechanical microwave switching
US5638946A (en) * 1996-01-11 1997-06-17 Northeastern University Micromechanical switch with insulated switch contact
JP4089803B2 (ja) * 1998-01-12 2008-05-28 Ｔｄｋ株式会社 静電リレー
US6188301B1 (en) * 1998-11-13 2001-02-13 General Electric Company Switching structure and method of fabrication
JP2000188049A (ja) * 1998-12-22 2000-07-04 Nec Corp マイクロマシンスイッチおよびその製造方法
US6410360B1 (en) * 1999-01-26 2002-06-25 Teledyne Industries, Inc. Laminate-based apparatus and method of fabrication
US6307452B1 (en) * 1999-09-16 2001-10-23 Motorola, Inc. Folded spring based micro electromechanical (MEM) RF switch

Also Published As

Publication number Publication date
WO2003092048A2 (en) 2003-11-06
US20030201852A1 (en) 2003-10-30
CN1326200C (zh) 2007-07-11
CN1656643A (zh) 2005-08-17
AU2003224701A1 (en) 2003-11-10
WO2003092048B1 (en) 2004-10-07
JP2005523823A (ja) 2005-08-11
EP1502282A4 (en) 2007-06-13
US6714105B2 (en) 2004-03-30
TW200308190A (en) 2003-12-16
EP1502282A2 (en) 2005-02-02
AU2003224701A8 (en) 2003-11-10
WO2003092048A3 (en) 2004-01-22

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