ATE434839T1 - Varactorvorrichtungen und verfahren - Google Patents

Varactorvorrichtungen und verfahren

Info

Publication number
ATE434839T1
ATE434839T1 AT03813447T AT03813447T ATE434839T1 AT E434839 T1 ATE434839 T1 AT E434839T1 AT 03813447 T AT03813447 T AT 03813447T AT 03813447 T AT03813447 T AT 03813447T AT E434839 T1 ATE434839 T1 AT E434839T1
Authority
AT
Austria
Prior art keywords
substrate
methods
electrodes
couple
movable component
Prior art date
Application number
AT03813447T
Other languages
English (en)
Inventor
Francois-Xavier Musalem
Siebe Bouwstra
John Gilbert
Arthur Morris
Randy Richards
Original Assignee
Wispry Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wispry Inc filed Critical Wispry Inc
Application granted granted Critical
Publication of ATE434839T1 publication Critical patent/ATE434839T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/04—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of effective area of electrode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/04—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of effective area of electrode
    • H01G5/06—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of effective area of electrode due to rotation of flat or substantially flat electrodes
    • H01G5/08—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of effective area of electrode due to rotation of flat or substantially flat electrodes becoming active in succession
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/04—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of effective area of electrode
    • H01G5/10—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of effective area of electrode due to rotation of helical electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
    • H01G5/18—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes due to change in inclination, e.g. by flexing, by spiral wrapping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/38—Multiple capacitors, e.g. ganged
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H01P1/10—Auxiliary devices for switching or interrupting
    • H01P1/12—Auxiliary devices for switching or interrupting by mechanical chopper
    • H01P1/127—Strip line switches

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Saccharide Compounds (AREA)
AT03813447T 2002-12-13 2003-12-15 Varactorvorrichtungen und verfahren ATE434839T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US43345402P 2002-12-13 2002-12-13
PCT/US2003/039806 WO2004055935A1 (en) 2002-12-13 2003-12-15 Varactor apparatuses and methods

Publications (1)

Publication Number Publication Date
ATE434839T1 true ATE434839T1 (de) 2009-07-15

Family

ID=32595192

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03813447T ATE434839T1 (de) 2002-12-13 2003-12-15 Varactorvorrichtungen und verfahren

Country Status (6)

Country Link
US (4) US7180145B2 (de)
EP (3) EP2096704B1 (de)
AT (1) ATE434839T1 (de)
AU (1) AU2003300925A1 (de)
DE (1) DE60328131D1 (de)
WO (1) WO2004055935A1 (de)

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ATE434839T1 (de) * 2002-12-13 2009-07-15 Wispry Inc Varactorvorrichtungen und verfahren
US20060065916A1 (en) 2004-09-29 2006-03-30 Xubai Zhang Varactors and methods of manufacture and use
EP1807856B1 (de) * 2004-10-27 2011-12-07 Epcos Ag Federstruktur für mems-vorrichtung
US20080147058A1 (en) * 2005-06-13 2008-06-19 Horrell Robin S Electrocautery system, provided with safe lighting during operational use
FR2889371A1 (fr) * 2005-07-29 2007-02-02 Commissariat Energie Atomique Dispositif de conversion de l'energie mecanique en energie electrique par cycle de charges et de decharges electriques sur les peignes d'un condensateur
JP5399075B2 (ja) * 2005-12-22 2014-01-29 エプコス アクチエンゲゼルシャフト 直列接続されたキャパシタを有するｍｅｍｓデバイス装置
US7489004B2 (en) * 2006-01-24 2009-02-10 Stmicroelectronics S.R.L. Micro-electro-mechanical variable capacitor for radio frequency applications with reduced influence of a surface roughness
US8059385B2 (en) * 2006-12-05 2011-11-15 Wispry, Inc. Substrates with slotted metals and related methods
JP4910679B2 (ja) * 2006-12-21 2012-04-04 株式会社ニコン 可変キャパシタ、可変キャパシタ装置、高周波回路用フィルタ及び高周波回路
US7718458B2 (en) * 2007-09-11 2010-05-18 Xerox Corporation Electric field concentration minimization for MEMS
JP4477051B2 (ja) * 2007-09-12 2010-06-09 株式会社東芝 半導体集積回路及びｍｅｍｓ型可変容量キャパシタの制御方法
US8363380B2 (en) * 2009-05-28 2013-01-29 Qualcomm Incorporated MEMS varactors
US8493138B2 (en) * 2009-08-26 2013-07-23 Hewlett-Packard Development Company, L.P. Memcapacitive devices
US20110148837A1 (en) * 2009-12-18 2011-06-23 Qualcomm Mems Technologies, Inc. Charge control techniques for selectively activating an array of devices
US8218228B2 (en) 2009-12-18 2012-07-10 Qualcomm Mems Technologies, Inc. Two-terminal variable capacitance MEMS device
CN102741958B (zh) * 2010-01-15 2016-09-14 维斯普瑞公司 装有弹簧的mems悬臂可调电容器及方法
DE112011101135B4 (de) * 2010-03-29 2021-02-11 X-Celeprint Limited Elektrisch verbundene Felder von aktiven Bauteilen in Überführungsdrucktechnik
US9161448B2 (en) 2010-03-29 2015-10-13 Semprius, Inc. Laser assisted transfer welding process
US8490495B2 (en) 2010-05-05 2013-07-23 Consensic, Inc. Capacitive pressure sensor with vertical electrical feedthroughs and method to make the same
US8865497B2 (en) 2010-06-25 2014-10-21 International Business Machines Corporation Planar cavity MEMS and related structures, methods of manufacture and design structures
TWI520898B (zh) * 2011-05-23 2016-02-11 深迪半導體（上海）有限公司 感測轉動和加速之微機電系統裝置
KR102005335B1 (ko) * 2011-09-02 2019-07-30 카벤디시 키네틱스, 인크. 향상된 ｒｆ 성능의 ｍｅｍｓ 가변 커패시터
US9412727B2 (en) 2011-09-20 2016-08-09 Semprius, Inc. Printing transferable components using microstructured elastomeric surfaces with pressure modulated reversible adhesion
WO2013166008A2 (en) 2012-04-30 2013-11-07 Wispry, Inc. Mixed-technology combination of programmable elements
EP2898519A4 (de) * 2012-09-20 2016-06-01 Wispry Inc Variable kondensatorvorrichtungen mit einem mikroelektromechanischen system (mems) und entsprechendes verfahren
CN104051385B (zh) * 2013-03-13 2017-06-13 台湾积体电路制造股份有限公司 堆叠式半导体结构及其形成方法
US9474150B2 (en) 2013-12-10 2016-10-18 Tdk Corporation Transmission line filter with tunable capacitor
US9443657B1 (en) 2013-12-10 2016-09-13 Tdk Corporation Piezo controlled variable capacitor
US9424994B2 (en) 2013-12-10 2016-08-23 Tdk Corporation Tunable interdigitated capacitor
WO2015153781A1 (en) * 2014-04-01 2015-10-08 Wispry, Inc. Systems, devices, and methods for reducing surface dielectric charging in a rf mems actuator element
US9576737B2 (en) * 2014-04-14 2017-02-21 Kabushiki Kaisha Toshiba Parallel capacitor and high frequency semiconductor device
TWI659475B (zh) 2014-07-20 2019-05-11 愛爾蘭商艾克斯瑟樂普林特有限公司 用於微轉貼印刷之裝置及方法
US9704821B2 (en) 2015-08-11 2017-07-11 X-Celeprint Limited Stamp with structured posts
US9799279B1 (en) * 2016-09-15 2017-10-24 Essential Products, Inc. Electronic display with a relief
DE102017200111B3 (de) * 2017-01-05 2018-03-15 Robert Bosch Gmbh Mikromechanische Schallwandleranordnung und entsprechendes Herstellungsverfahren
US10748793B1 (en) 2019-02-13 2020-08-18 X Display Company Technology Limited Printing component arrays with different orientations
US11487925B1 (en) * 2021-07-02 2022-11-01 Changxin Memory Technologies, Inc. Simulation method, apparatus, and device, and storage medium

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US6341039B1 (en) * 2000-03-03 2002-01-22 Axsun Technologies, Inc. Flexible membrane for tunable fabry-perot filter
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US6377438B1 (en) * 2000-10-23 2002-04-23 Mcnc Hybrid microelectromechanical system tunable capacitor and associated fabrication methods
US6437965B1 (en) * 2000-11-28 2002-08-20 Harris Corporation Electronic device including multiple capacitance value MEMS capacitor and associated methods
US6418006B1 (en) * 2000-12-20 2002-07-09 The Board Of Trustees Of The University Of Illinois Wide tuning range variable MEMs capacitor
US6426687B1 (en) * 2001-05-22 2002-07-30 The Aerospace Corporation RF MEMS switch
US6717496B2 (en) * 2001-11-13 2004-04-06 The Board Of Trustees Of The University Of Illinois Electromagnetic energy controlled low actuation voltage microelectromechanical switch
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AU2003243546A1 (en) * 2002-06-13 2003-12-31 Wispry, Inc. Micro-electro-mechanical system (mems) variable capacitor apparatuses and related methods
US6933808B2 (en) 2002-07-17 2005-08-23 Qing Ma Microelectromechanical apparatus and methods for surface acoustic wave switching
ATE434839T1 (de) * 2002-12-13 2009-07-15 Wispry Inc Varactorvorrichtungen und verfahren
US6798029B2 (en) * 2003-05-09 2004-09-28 International Business Machines Corporation Method of fabricating micro-electromechanical switches on CMOS compatible substrates

Also Published As

Publication number Publication date
EP1588453A1 (de) 2005-10-26
WO2004055935A9 (en) 2004-09-10
US20060291134A1 (en) 2006-12-28
EP2096704A1 (de) 2009-09-02
EP2096703B1 (de) 2016-05-04
US20040173876A1 (en) 2004-09-09
US20050224916A1 (en) 2005-10-13
EP1588453B1 (de) 2009-06-24
AU2003300925A1 (en) 2004-07-09
US20060291135A1 (en) 2006-12-28
DE60328131D1 (de) 2009-08-06
US7180145B2 (en) 2007-02-20
EP2096704B1 (de) 2017-06-21
EP2096703A1 (de) 2009-09-02
US7388316B2 (en) 2008-06-17
WO2004055935A1 (en) 2004-07-01
US7361962B2 (en) 2008-04-22
US7586164B2 (en) 2009-09-08
EP1588453A4 (de) 2006-08-09

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