TW573454B - Manufacturing method of multi-layered printed circuit and the interlayer conduction structure formed by the same - Google Patents

Manufacturing method of multi-layered printed circuit and the interlayer conduction structure formed by the same Download PDF

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Publication number
TW573454B
TW573454B TW092113772A TW92113772A TW573454B TW 573454 B TW573454 B TW 573454B TW 092113772 A TW092113772 A TW 092113772A TW 92113772 A TW92113772 A TW 92113772A TW 573454 B TW573454 B TW 573454B
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Taiwan
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hole
conductive
layer
board
substrate
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TW092113772A
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Chinese (zh)
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TW200427386A (en
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Yung-Sung Yang
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Compeq Mfg Co Ltd
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Publication of TW200427386A publication Critical patent/TW200427386A/en

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  • Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)

Abstract

The present invention relates to a manufacturing method of multi-layered printed circuit, which comprises forming at least a conductive through hole for conducting each layer of circuit pattern in the substrate, then overlapping at least a build-up board onto the substrate, and forming at least a conductive blind via on the build-up board, wherein the interior of conductive through hole and conductive blind via are filled with insulation material respectively, the bottom of the conductive blind via on the build-up board is overlapped on the hole lid of the conductive through hole of the substrate, and the bottom of the conductive blind via of the n-th build-up board is overlapped on the hole lid of the conductive blind hole of the (n-1)th build-up board. A tested result shows that the interlayer conduction structure of the present invention has reliable conduction quality, and since no costly conductive paste and interlayer alignment equipment are required, it has the effect of greatly reducing the manufacturing cost.

Description

573454 五、發明說明(l) --- 【發明所屬之技術領域】 本發明係關於印刷電路板方面的設計,此尤指一夕 層印刷電路板製造方法及所形成之層間導通結構, = 該層間導通結構係由一導電通孔疊合至少一導、疋 成。 予冤盲孔所構 【先如技藝之敘述】 傳統的多層印刷電路板 緣基板的表面及内部,並利 板厚地導通各層電路圖案。 然而,在一些考量下, ,例如使用導電膏之ALVH製 電鑛填孔技術之s s P製程 鍵貫穿孔的優點,但都必需 服層間對位的問題。再者, 量地使用昂貴的導電膏,導 外,該S S P製程最大的問 穩定’常常會發生無法鍍滿 體層的厚度不均云,在線路 無法咬姓開來,進而影響整 【發明内容】 是將複數層電路圖案形成在絕 用電鍍貫穿孔(P TH )貫穿 亦有不使用電鍍貫穿孔的情形 程及B2it製程,以及使用盲孔 這些製程固然具有不使用電 使用昂貴的層間對位設備以克 於ALVH製程及製程中需大 致整體製造成本居高不下=另 題係在於電鍍填孔的品質並不 盲孔的問題,使得所形成之導 等級達3 / 3時,造成細線路 體製程之良率。 發明之第一目的在提供一種新的層間導通結構供可 地導通多層印刷電路板的各層電路圖案 具體地說 層板疊合而成 該多層.印刷電路板係由—基板及至少—增 戎基板至少具有一導電通孔,該導電通孔573454 V. Description of the invention (l) --- [Technical field to which the invention belongs] The present invention relates to the design of printed circuit boards, especially the manufacturing method of the layered printed circuit board and the formed interlayer conduction structure, which = The interlayer conductive structure is formed by superposing at least one conductive layer through a conductive via. Structured by blind holes [Previously described as a skill] The surface and inside of the edge substrate of a traditional multilayer printed circuit board, and the circuit pattern of each layer is conducted thickly. However, under some considerations, such as the advantages of the s s P process of the ALVH-based electro-ore filling technology using conductive paste, the key penetration hole, it is necessary to deal with the problem of alignment between layers. In addition, the use of expensive conductive paste in a large amount, outside the guide, the SSP process is the biggest problem of stability 'often occur in the thickness of the body layer can not be plated uneven clouds, the line can not bite the name, and then affect the entire [invention] It is a process of forming a plurality of layers of circuit patterns in an absolute plating through-hole (P TH), and there are cases where plating through-holes are not used, and the B2it process, and the use of blind holes. Of course, these processes have expensive inter-level alignment equipment without using electricity. In the ALVH process, the overall manufacturing cost must be high in grams. Another problem is that the quality of the plated hole filling is not a blind hole. When the conductivity level formed is 3/3, the fine line system process is caused. The yield. The first object of the invention is to provide a new interlayer conduction structure for grounding the layers of circuit patterns of a multilayer printed circuit board. Specifically, the layers are laminated to form the multilayer. The printed circuit board is composed of-substrate and at least-Zengrong substrate At least one conductive via, the conductive via

五、發明說明(2) 具有一孔蓋,且其内部係填滿絕緣 具有一導電盲孔’該導電盲孔亦且=。,增層板係至少 :真滿絕緣材料。更特別的是,該增::二:内部亦 #係疊合於該基板之導電通孔的心上::盲孔的底 板之導電盲孔的底部係疊合於第n盍士二:η層增層 礼的孔蓋±。這種層間導通 測“二導電盲 品質,且由於無需使用昂貴的導電罪之導通 備’因而具有大幅降低製造成本之;效:ρ胃、曰間對位設 本發明之第二目的在摞供_ 造方法,…特別=匕;:Γ層印刷電路板製 第-目的所稱之層間導通結構:”路板中形成本發明 【實施方式】 、在隨後的說明中,將舉一棱佳實施例,並佐以@ 進-步况明本發明。然而’任何熟習該項技術人仕者均 知,此僅是為方便說明之用,實際上並不以此為限 請 參閱第 至十圖,係揭示一種利用本發明之多層印 刷電路板的製造方法,其包括下述a至f步驟: a 提供一基板(1 ) 該基板(1 )係如第一圖所示,其具有一頂面及 一底面供分別形成一第一導體層(1 1),且該基板(1 )並具有至少一導電通孔(1 2 )供貫穿該基板(1 )地 導通該兩第一導體層(11)。 b )實施一第一塞孔程序: 具體而言,係先以網版印刷方式將一第一絕緣材V. Description of the invention (2) It has a hole cover, and its inside is filled with insulation. There is a conductive blind hole. The conductive blind hole is also =. , The build-up board is at least: really full of insulating material. More specifically, the increase :: 二: 内 # is superimposed on the center of the conductive via of the substrate :: The bottom of the conductive blind hole on the bottom of the blind hole is superimposed on the nth driver: η Layer by layer of hole cover ±. This interlayer continuity test has "two conductive blind qualities, and because it does not require the use of expensive conductive continuity preparations," it has a significant reduction in manufacturing costs. Effectiveness: The second purpose of the present invention is to provide _ Manufacturing method, ... Specially = dagger ;: Interlayer conduction structure called the first purpose of the Γ-layer printed circuit board system: "The present invention is implemented in a circuit board. [Embodiment] will be implemented in the following description. Example, and clarify the invention with @ 进-步步。 However, 'any person skilled in the art knows that this is only for convenience of explanation, and it is not limited to this. Please refer to Figures 10 to 10, which disclose the manufacture of a multilayer printed circuit board using the present invention. The method includes the following steps a to f: a providing a substrate (1), as shown in the first figure, which has a top surface and a bottom surface for forming a first conductor layer (1 1 ), And the substrate (1) has at least one conductive through hole (12) for conducting the two first conductor layers (11) through the substrate (1). b) Implementing a first plugging procedure: Specifically, a first insulating material is firstly screen-printed.

第5頁 573454 五、發明說明(3) 料(2 )填入該導電通孔(1 2 )内,一如第二圖A所示 。再以抽真空方式抽除存在於該’第一絕緣材料(2 )内之 氣泡(即真空除泡程序)、以及以加熱方式固化該絕緣材 料(2 ),然後,將溢出該導電通孔(1 2 )之第一絕緣 材料(2 )予以刷磨整平,一如第二圖B所示。其中,若 該弟一絕緣材料(2 )填入該導電通孔(1 2 )的過程係 在真空環境中進行,則無需再進行真空除泡程序。 c)以電鍍方式形成兩第二導體層(13)供覆蓋住 該兩第一導體層(1 1)及該導電通孔(1 2)的兩端, 一如第三圖所示。 d )實施一第一電路形成‘程序: 具體而言,係先於該第二導體層(1 3 )上分別 形成一具有第一鏤空圖案(141)之第一電鍍阻絕層( 14),例如貼上一層乾膜,一如第四圖A所示。再於該 第一鏤空圖案(141)内電鍍一第一電路層(15), 一如第四圖B所示。接著於該第一電路層(1 5)上電鍍 一第一姓刻阻絕層(1 6 )(例如電鑛一層鎖錯),一如 第四圖C所示。然後,如第四圖D至F般地依序除去該第Page 5 573454 V. Description of the invention (3) The material (2) is filled in the conductive via (12), as shown in the second figure A. Then, the air bubbles existing in the 'first insulating material (2) (that is, the vacuum defoaming program) are evacuated, and the insulating material (2) is cured by heating, and then the conductive through hole ( 1 2) The first insulating material (2) is brushed and flattened, as shown in the second figure B. Wherein, if the process of filling the conductive via (12) with the first insulating material (2) is performed in a vacuum environment, it is not necessary to perform a vacuum defoaming procedure. c) forming two second conductor layers (13) by plating to cover both ends of the two first conductor layers (1 1) and the conductive via (12), as shown in the third figure. d) implementing a first circuit formation procedure: specifically, first forming a first plating resist layer (14) with a first hollow pattern (141) on the second conductor layer (1 3), for example, Apply a dry film, as shown in the fourth picture A. Then, a first circuit layer (15) is plated in the first hollow pattern (141), as shown in FIG. 4B. Then, a first resist layer (16) is plated on the first circuit layer (15) (e.g., the electric mine is locked in the wrong layer), as shown in the fourth figure C. Then, sequentially remove the first section as in the fourth diagrams D to F.

I 一電鍍阻絕層(1 4 )、實施一第一蝕刻程序、以及除去 該第一蝕刻阻絕層(1 6 )後,即於該基板(1 )之頂面 及底面分別形成一第一電路圖案(1 7 )。其中,該第一 電路圖案(1 7 )對應.該導電通孔(1 2 )之處,並各形I a plating resist layer (1 4), a first etching process is performed, and the first etching resist layer (1 6) is removed, a first circuit pattern is formed on the top surface and the bottom surface of the substrate (1), respectively (1 7). Wherein, the first circuit pattern (1 7) corresponds to the place of the conductive via (1 2) and is shaped

I 成一第一孔蓋(171)供蓋合於該導電通孔(12)。 簡言之,該第一孔蓋(1 7 1 )即如同該導電通孔(1 2I form a first hole cover (171) for covering the conductive through hole (12). In short, the first hole cover (1 7 1) is like the conductive via (1 2

573454 五、發明說明(4) )之孔蓋。 3如C 一 板, 層} 增7 一 1 第C 一 案 合圖3 , 疊路C } 少電板C 至一層 C 以第增R ,之一 C 序}第板 程1該箔 板C ,銅 疊板中脂 一 基其樹 施該。附 實於示一 }蓋所為 e覆圖地 供五般 /-N第示 所片 圖緣 五絕 第 一 如是 以以 可可 }也 時 板 箔 銅 脂 樹 附一 為 係 3 〇 ( 序板 程層 孔增 穿一 一 第 施該 實當 \)/ f C窗 窗銅 銅該 一於 成式 形方 式孔 方穿 刻射 姓雷 以以 先再 需, 示2 所3 A ( 圖孔 六微 第一 如穿 一 貫 緣丨電 絕孔一 一 微第 係該該 穿在 〇〇 普貝係 C上置 板片位 層緣之 增絕} 一該2 第.於3 該接{ 當直孔 。式微 示方該 所孔, B穿何 圖 射 如 六雷論 第以無 如係。 一,) ,時2 } 片 3 案 圖 路 C孔3 蓋微3 孔該丨 一 於孔 第式盲 之方電 }鍍導 7電該 1 以 , 案 圖。 路示 蓋 孔 - 第 之 7 孔電所 盲一圖 電第七 導該第 1在如 。成壓 一 方形疊, 上内係上 β— 立口 r—I 〇〇 底 τ-Η 7 3 之 7 材 緣 絕二 第 1 將 式 方 刷 印 。版 序網 程以 孔先 塞係 二, 言 一 而 施體 實具 \)/ h ο 氣 示之 所内 A ) 圖 4 八C 第料 如材 一緣 ,絕3 二 3第 3該 C於 孔在 盲存 電除 導抽 該式 入方 填空 真 4抽 C以 料再 )4 4 ( C料 料材 材緣 緣絕 絕二 二第 第之 該 化3 固 3 及C 以孔 、 盲 3電 序導 程該 泡出 除溢 空將 真, 即後 C然 泡。 573454 五 明 說 明 , 發予 料 材中 緣境 絕環 二空 第真 該在 若係 ,程 中過 其的 ο) B 3’ 圖3 八C 第孔 如盲 一 電 ,導 平該 整入 5)磨填 /(V 刷 3 以4 住 蓋 覆 供 4 3 (·, 。層示 序體所 程導圖 之三九 泡第第 除一如 空成 一 真形, 行式} 進方3 再鍵3 r--p^6-/\ 無以孔 诗 N 亡目 ,i 電 行 導 Μ 玄 、1=0 第第 該1如 於5 一 先3 , ,C膜 案乾 而圖層 體空 一 具鏤上 。.二貼 序第如 程有例 成具 , 形 一 ? 路成5 電形3 二上C 第層 一 4絕 施3阻 實丨鍍 }層電 j體二 導第 三之 第第 一該 鍍於 電該 内於 }著 1接 5 ο 3示 C所 案B 圖圖 空十 鏤第 二如 第一 該, 於} 再6 〇 3 示C 所層 A路 圖電 十二 6 氣 3鍚 層 層一 路鍍 二如 例圖 C十 }第 7如 3 , C後 層然 絕。 阻示 刻所 钱C 二圖 第十 一第 鍍如 電一 5 7 3 3 Γν 絕絕 阻阻 鍍刻 電# 二二 第第 亥亥 =°=口 去去 除除 序、 依序 地程 般刻 F 姓 至二 D第 一於 施即 實, 、後 成 8 8 形 3 3 面 c C 表案蓋 的圖孔 }路二 3電第C 二一 板第成 層該形 增,係 一 中處 第其之 該。 \ly oo 8 3 3 ( C孔 案盲 圖電 路導 電該 二應 第對 蓋 孔二 第 該。 ,蓋 之孔 ^=D之 簡 〇 3 )3 3 ( 3 孔 C 盲 —0 一 f*、^ 孑 , 盲導 電該 導同 該如 Λ: P 合 蓋1—I 供8 )3573454 V. Description of the invention (4)). 3 If C is a board, the layer is increased by 7 to 1 and the first case is combined with FIG. 3, and the stacked circuit C is reduced from the electric board C to the first layer of C in order to increase R, one of the C order. The copper-laminated sheet is applied on a base-by-base basis. Illustrated in Figure 1} The cover is for e overlays for the general / -N Figure 5 shows the edge of the picture. The first example is to use cocoa} and sometimes the foil copper resin tree is attached as a system. Kong Zeng wears one by one, and should be effective.) / F C windows, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, copper, and copper. It ’s the same as wearing a consistent edge 丨 Electro-holes should be worn one by one through the plate layer on the 00 Cube system C. The edge should be added to the second one. The three should be connected to the three {as a straight hole. Show the hole in the square, B is the best way to shoot through the six thunderbolts. First,), when 2} Piece 3 Case map Road C hole 3 Cover micro 3 hole This is a blind square electric } The plating guide 7 is the same as that in the plan. Road sign cover hole-No. 7 hole electric station blind one picture electricity seventh lead the 1st in. Formed into a square stack, the upper part is attached to the β-standing opening r-I 〇〇 bottom τ-Η 7 3 of 7 material edge must be the first square brush printing. The sequence sequence of the sequence is based on the hole first plugging the system, and the body of the body is shown in the words \) / h ο qi shows the place A) Figure 4 Eight C is the same as the material, and 3 2 3 The 3 C is in the hole In the blind storage of electricity, draw the formula and fill in the blanks. Really 4 pumps, C, and then feed) 4 4 (C materials, materials, and materials must be the second and second ones. The prologue should be true when the bubble is cleared, and then it will be true. 573454 Wu Ming explained that the material should be sent to the material, and the second empty space should be true. If it is in the process, pass it.) B 3 '' Figure 3 The eighth hole of the C is like a blind and an electric, and the leveling should be leveled. 5) Grinding / (V brush 3 with 4 covers to cover 4 3 (·, ..) The first division is as true as the empty one, and the formula is} Enter 3 and then the key 3 r--p ^ 6-/ \ Wu Yikong Poem N is dead, i is conducting M, 1 = 0, the first 1 For example, in the case of 5 and 3, the C film is dry and the layer body is empty. The second order is as shown in the example, the shape is a shape, the road is a 5 shape, the second is on the C layer, and the first layer is 4 Shi 3 resistance 丨 plating} layer of electric body The electroplating is in the case of} with 1 and 5 ο 3 as shown in Figure C. The figure B is empty and the second is as the first one. On the other 6 〇3 shows the layer A of the layer C. Figure 12 6 gas 3 The second layer is plated all the way, as shown in Figure C. The seventh is as 3, and the layer after C is completely cut off. The second figure is the eleventh plated, such as electricity. 5 7 3 3 Γν电 # Twenty-twoth first Haihai = ° = mouth to remove the order of division, in order to engraved F last name to two D first to Shi Jishi, after the 8 8 shape 3 3 face c C table cover Figure hole} Lu Er 3 electricity No. C No. 21 plate No. 1 layer, the shape is increased, which is the first place in the middle. \ Ly oo 8 3 3 (C hole case, the blind circuit is conductive, the second should cover the second hole. The hole of the cover ^ = D of the simple 〇3) 3 3 (3 holes C blind — 0-f *, ^ 孑, blind conductive This guide is the same as Λ: P and cover 1-I for 8) 3

中路且 察電, 觀一通 的第導 F的成 圖上構 十面而 第底} 由及2 面 1 頂 C 3 (8 孔3 盲 C 電案 導圖 的路 應電 對二 所第 由之 圖該3構 之孔藉 }通別 1 電分 C導} 板該7 基由1 該藉彳 悉係案 得}圖 易7路 輕1—電以C 一 可案第 上孔 }通 3 電 C導 板該 層 , 增之一 ^吕 第換 該。 與通 而導 成In the middle of the road, check the electricity, see the map of the first guide F to construct ten faces and the bottom one} and 2 sides 1 top C 3 (8 holes 3 blind C electrical maps the road map should be the first to the second Figure the 3 holes of the structure} Take part in 1 electrical sub-C guide} The 7 bases are obtained by 1 The system is the case} Tuyi 7 Road Light 1—Electricity is the first hole in C.} C guide plate this layer, add one ^ Lu Di for this.

573454 五、發明說明(6) 貫穿板厚地導通一多層 係 / 1 2 )及該導電盲孔(3 P刷板的各層電路圖案。 3 圖例子中,.係在該第二電路圖案( )上形成一第-ί= 板(5)及於該第二增層板(5 需要丄=路圓案(5 η,其所顯示之結構,只 至j步驟即可與Γ不:結構為基礎地重覆執行-次上述e 數愈多,對應开!:之電:固nj步驟重覆執行的次 在第十圖ρίίΠ案的層數就愈高。 面具有導體層之譬面^圖所示的例子中,基板係使用兩 係使用具有^/在第十二圖所示的例子,基板 盔’夕層電路圖案之多層板(6)。 人二响如何’在上述的各個一 5複數層增層板之結構, 仁颁不一基板豐 .路圖案係藉由該導電通孔貫導;基板t之各層電 η層增層板之導電盲孔的底部思以及第 之導電盲孔的孔蓋上。蕤於第η- 1層增層板 導通形成於該基板及各通結構’以確實 本發明之主要訴求所指板上之各層電路圖案者,乃為 2於先前技術所揭示之製 有下列特點: 再令货刊特別具 一、該導電通孔及導電盲孔口古π扭9 ^ 成的導…其孔内則使用絕緣式形 料可以是塞孔樹脂或是非導電性 、 k二絕緣材 ,导览性銅f,而無論使用那種絕 第9頁 573454 ^ 一 五、發明說明(7) 緣材料,都比導電膏便宜許多。.與鋼膏相比, 價格僅約為銅膏的1 / 6〜1 / 8,#導電性銅 僅約為鋼賞的1 / 3〜1 / 4 。 =丄該導電通孔及導電盲孔的孔内完全以絕 二完全沒有孔口凹陷的情形發生.,因此, 拉皿该導電通孔或導電盲孔的部份與其它部份1 曰以確保下一層電路圖案的形成品質。573454 V. Description of the invention (6) A multi-layer system / 1 2) and the conductive blind holes (3 P brush board circuit patterns are conducted through the board. 3) In the example of the figure, the second circuit pattern () A first -ί = plate (5) is formed on the second layered plate (5 requires 丄 = 路 圆 案 (5 η), and the structure shown can be different from Γ only in step j: structure. The number of times that the above e number is repeated repeatedly corresponds to the number of open !: Electricity: The number of times that the step nj is repeatedly performed is higher in the tenth figure ρίίΠ case. For example, the surface has a conductor layer. In the example shown, the substrate system uses two systems using the multilayer substrate (6) with the substrate helmet of the example shown in the twelfth figure (6). The structure of the multilayer build-up board is not limited to the substrate. The road pattern is conducted through the conductive vias; the bottom of each conductive blind hole of each layer of the substrate on the substrate t and the conductive blind hole The hole cover is formed on the η-1 layer build-up board and is formed on the substrate and each pass structure to confirm the main board of the present invention. The layer circuit pattern is the system disclosed in the previous technology. It has the following characteristics: The goods are specially made. The conductive via and the conductive blind hole are twisted by 9 ^. The guide is used in the hole. Insulating materials can be plugged resin or non-conductive, k-two insulating materials, and guide copper f, no matter which kind of insulation is used. Page 9 573454 ^ 15. Description of the invention (7) Edge material is more conductive than The paste is much cheaper .. Compared with the steel paste, the price is only about 1/6 to 1/8 of the copper paste, and #conductive copper is only about 1/3 to 1/4 of the steel reward. = 丄 This conductive via And the hole of the conductive blind hole is completely absent from the hole. Therefore, the part of the conductive via or the conductive blind hole and the other part are pulled to ensure the formation of the next layer of circuit pattern. quality.

二、執行上述a至j步驟的過程中,复声 V門檻較低而無需投資昂貴的層間對位設備:B 條件:不ΐϊ未使用導電膏,因此在叠合增層板 五、這種於導電 至 電通孔及導電盲孔% ^ 等電盲孔 M l- 内部均填實絕緣材料之牲姓ja 構,經熱油及熱衝旅贫^妨由丨$ β T叶之特殊層 1㈣以内,是豆芦4 ^賴度測試後,其電阻變 綜上所述當 1 導通品質顯然相當可靠。 ,且在同類產品中t發明具有產業上之利用性 新穎性,故已符人2未見有相同或類似者揭露在 。 °發明專利之申請要件,爰依法 孔樹脂的 膏的價格 緣材料填 電路圖案 樣平整, 對位的技 時的熱壓 、且該導 間導通結 化率在土 及進步性 先而足具 提出申請2. In the process of performing steps a to j above, the threshold of the complex sound V is low without investing in expensive interlayer alignment equipment: Condition B: No conductive paste is used, so superimposed layers are added. Conductive to electrical vias and conductive blind holes% ^ Isoelectric blind holes M l- The structure of the family is filled with insulating material, and the thermal oil and thermal shock are used to reduce the poverty ^ It may be within 1 $ of the special layer of β T leaf It is the resistance of the bean reed 4 ^ Lai degree test, and its resistance changes as described above. When the 1 conduction quality is obviously quite reliable. In addition, t inventions have industrial applicability and novelty in similar products, so they have not been found to be identical or similar to those disclosed in. ° The application requirements for invention patents are based on the fact that the price of the material of the pore resin paste is filled with the circuit pattern flat, the hot pressing of the alignment technology, and the conduction and junction rate of the interconductivity are sufficiently advanced before the soil and the advancement. Application

573454 圖式簡單說明 第一至十圖,係以斷面示意圖的方式表示本發明方法之步 驟a至j的執行過程。 第十一圖,係本發明之再一較佳實施例的斷面示意圖。 第十二圖,係本發明之另一較佳貪施例的斷面示意圖。 明說號 圖 基第第第第第第微第第第第第多 板 \)/ X)/ 4- Vi \)/ -uu 00 12 τ—- 5 1 NJ 4 3 6 3 X), 1((1(3 ((3(5 c料案c案c}料案c案c 層材圖層圖板2材圖層圖板 體緣空路路層3緣空路路層 導絕鏤電電增C絕鏤電電增 一一一 一一一 孔二二二二二 導電通.孔(1 2 ) 第二導體層(1 3 ) 第一電鍍阻絕層(1 4 ) 第一蝕刻阻絕層(1 6 ) 第一孔蓋(1 7 1 ) 銅窗(3 1 ) 導電盲孔(3 3 ) 第三導體層(3 4 ) 第二電鍍阻絕層(3 5 ) 第二蝕刻阻絕層(3 7 ) 第二孔蓋(3 8 1 ) 第三電路圖案(5 1 ) 6 κίν板 層573454 Schematic illustrations Figures 1 to 10 are diagrams showing the execution of steps a to j of the method of the present invention in a schematic sectional view. Fig. 11 is a schematic sectional view of still another preferred embodiment of the present invention. Figure 12 is a schematic sectional view of another preferred embodiment of the present invention. Mingji Tuqidi No.1, No.3, No.3, No.3, No.3, No.3, and No.6 Multi-Boards \) / X) / 4- Vi \) / -uu 00 12 τ—- 5 1 NJ 4 3 6 3 X), 1 (( 1 (3 ((3 (5 c material case c case) material case c case c layer material layer drawing board 2 material layer drawing board body edge empty road layer 3 edge empty road layer One by one, one by one, two two two two two, two through two holes. Holes (1 2), second conductor layer (1 3), first plating resist layer (1 4), first etching resist layer (1 6), first hole cover (1 7 1) copper window (3 1) conductive blind hole (3 3) third conductor layer (3 4) second plating resist layer (3 5) second etching resist layer (3 7) second hole cover (3 8 1) third circuit pattern (5 1) 6 κίν board layer

第11頁Page 11

Claims (1)

573454 六、申請專利範圍 1 、一種多層印刷電路板製造方法, a )提供一基板,該基板係具有一頂面及一底面供分 別形成一第一導體層,且該基板並具有至少一導電通孔供 貫穿該基板地導通該兩第一導體層.; b )實施一第一塞孔程序,以於該導電通孔内填滿一 第,^絕緣材料, c)以電鍍方式形成兩第二導體層供覆蓋住該兩第一 導體層及該導電通孔的兩端; d )實施一第一電路形成程序,以於該基板之頂面及 底面分別形成一第一電路圖案,且該第一電路圖案對應該 導電通孔之處,並各形成一第一孔蓋供蓋合於該導電通 iL ; e )實施一疊板程序,以至少疊合一第一增層板供覆 蓋於該基板之第一電路圖案; f )實施一穿,孔程序,以於該第一增層板相對該第一 孔蓋之處對應貫穿一微孔; g )以電鍍方式於該微孔内形成一導電盲孔,該導電 盲孔之底部係緊貼於該第一電路圖案之第一孔蓋; h )實施一第二塞孔程序,以於導電盲孔内填滿一第 I 二絕緣材料, i)以電鍍方式形成一第三導體層供覆蓋住該導電盲 iL ; j )實施一第二電路形成程序,以於該第一、二增層 板上形成一第二電路圖案,該第二電路圖案對應該導電盲573454 VI. Scope of patent application 1. A method for manufacturing a multilayer printed circuit board, a) A substrate is provided. The substrate has a top surface and a bottom surface for forming a first conductor layer, and the substrate has at least one conductive path. Holes for conducting the two first conductor layers through the substrate; b) implementing a first plugging procedure to fill the conductive via with a first insulating material, c) forming two second through electroplating The conductor layer is used to cover the two first conductor layers and both ends of the conductive through hole; d) implementing a first circuit forming process to form a first circuit pattern on the top surface and the bottom surface of the substrate, respectively, and the first A circuit pattern corresponding to the conductive via, and each forming a first hole cover for covering the conductive via iL; e) implementing a stacking board procedure to overlap at least a first build-up board for covering the conductive via iL; The first circuit pattern of the substrate; f) performing a through-hole procedure so that a micro-hole is penetrated through the first build-up plate corresponding to the first hole cover; g) forming a micro-hole in the micro-hole by electroplating Conductive blind hole, the bottom of the conductive blind hole is A first hole cover pasted on the first circuit pattern; h) implementing a second plugging procedure to fill a first blind insulating material in the conductive blind hole, i) forming a third conductor layer for electroplating Covering the conductive blind iL; j) implementing a second circuit forming procedure to form a second circuit pattern on the first and second build-up boards, the second circuit pattern corresponding to the conductive blind 第12頁 573454 六、申請專利範圍 孔之處係形成一第二孔蓋供蓋合該導 2、如申請專利範圍第iC孔。 法,其中該b步驟之第-塞孔程序【^ :P刷電路板製造方 以抽真空方式抽除存在於該第-絕緣材料内之 通孔;5 1 )以網版印刷方式將該第-絕緣材料填入該導電 固化該絕緣材料; 將溢出該導電通孔之第 緣材料予以刷磨整 b 2 氣泡; b 3 b 4 平。 3 、如申請專利範圍第丄 法,其中該d步驟之第—電跟=夕層印刷電路板製造方 …於該第二導體程序包括: 層,該第一電鍍阻絕層係具二=形成一第—電鍍阻絕 鏤空圖案係涵蓋該導電通孔;一鏤空圖案,且該第一 d 2 )於该第一鎮空Hi安+ d 3)於該第一带案内電鍍一第一電路層; d 4 )除去兮第”士曰上電鍍一第一蝕刻阻絕層; 4 J除去该第一電鍍p 曰, d 5 )實施一第一铋釗加=曰 面分別形成該第-電路圖案p ’以於該基板之頂面及底 d 6 )除去該第一蝕刻阻絕層。 法,多層印刷電路板製造方 序係以雷射穿孔方式直接形=孔而該f步驟之穿孔程 第13頁 573454 六、申請專利範圍 5 、如申請專利範圍第1項之多層印刷電路板製造方 法,其中該第一增層板係一附樹脂銅箔板(R C C ),而 該f步驟之穿孔程序係先以蝕刻方式形成一銅窗,再以雷 射穿孔方式於該銅窗内形成該微孔。 6 、如申請專利範圍第1項之多層印刷電路板製造方 法,其中該h步驟之第二塞孔程序包括: h 1 )以網版印刷方式將該第二絕緣材料填入該導電 盲孔; h 2 )以抽真空方式抽除存在於該第二絕緣材料内之 氣泡; h 3 )固化該第二絕緣材料,; h 4 )將溢出該導電盲孔之第二絕緣材料予以刷磨整 平。 7、如申請專,利範圍第1項之多層印刷電路板製造方 法,其中該j步驟之第二電路形成程序包括: j 1 )於該第三導體層Λ形成一第二電鍍阻絕層,該 第二電鍍阻絕層係具有一第二鏤空圖案,該第二鏤空圖案 係涵盖該導電盲孔; 1 j 2)於該第二鏤空圖案内電鍍一第二電路層; j 3 )於該第二電路層上電鍍一第二蝕刻阻絕層; j 4 )除去該第二電鍍阻絕層; j 5 )實施一第二蝕刻程序,以於該第一增層板的表 面形成該第二電路圖案。 j 6 )除去該第一#刻阻絕層。Page 12 573454 VI. Scope of patent application The hole is formed with a second hole cover for covering the guide 2. For example, the iC hole in the scope of patent application. Method, in which the b-th hole-plugging procedure of step b [^: P brushes the circuit board manufacturer to evacuate the through-holes existing in the first insulation material; 5 1) screen printing the first -Filling the insulating material with the conductive material to solidify the insulating material; brushing the material of the first edge overflowing the conductive through hole b 2 bubbles; b 3 b 4 is flat. 3. If the first method of the scope of patent application, wherein the first step of step d—electrical follower = the manufacturer of the printed circuit board ... includes in the second conductor program: a layer, the first electroplating barrier layer has two = form one The first-electroplating cut-off hollow pattern covers the conductive via; a hollow pattern, and the first d 2) is plated in the first ballast Hi Ann + d 3) a first circuit layer is plated in the first strip case; d 4) removing a first etching stopper layer on the first semiconductor substrate; 4 removing the first plating layer p on the substrate; d 5) implementing a first bismuth layer; forming the first circuit pattern p ′ on each surface; D 6) on the top surface and bottom of the substrate to remove the first etch stop layer. The method of manufacturing a multilayer printed circuit board is to directly form a hole by laser perforation, and the perforation process of the f step is page 13 573454 6 5. Patent application scope 5. The method for manufacturing a multilayer printed circuit board according to item 1 of the patent application scope, wherein the first build-up board is a resin copper foil board (RCC), and the perforation process of the f step is performed by etching first. Form a copper window, and then laser-perforate the copper window 6. The method for manufacturing a multilayer printed circuit board according to item 1 of the scope of patent application, wherein the second plugging procedure of step h includes: h 1) filling the second insulating material by screen printing. The conductive blind hole; h 2) vacuuming the air bubbles existing in the second insulating material; h 3) curing the second insulating material; h 4) the second insulating material which will overflow the conductive blind hole 7. If the application is special, the method for manufacturing a multilayer printed circuit board according to item 1 of the scope of benefit, wherein the second circuit forming procedure of step j includes: j 1) forming a first layer on the third conductor layer Λ. Two electroplating barrier layers, the second electroplating barrier layer has a second hollow pattern, the second hollow pattern covers the conductive blind hole; 1 j 2) electroplating a second circuit layer in the second hollow pattern; j 3) electroplating a second etching stop layer on the second circuit layer; j 4) removing the second electroplating stop layer; j 5) performing a second etching procedure to form the surface of the first build-up plate Second circuit pattern j 6) removing the first #etched resistance Floor. 第14頁 573454 ___ 一—-一 ^-----—--------- >、申請專利範圍 ’、 8 種多層印刷電路板之層間導通結構,該多層印 刷電路板係由一基板及至少一增層板疊合而成’且該基板 的頂面及底面各具有一第一電路圖案’而該增層板的表面 :目右一第二電路圖案;以及 係具有外 該層間導通結構係包括: 圖案 孔之 孔的 孑I»之 该增 的第 於第 層間 之層 至少 ,且 兩第 處, 至少 内部 一第 處, 層板 一孔 η〜 9、 導通 1 0 間導 一導電通孔, 通孔内 該導電 ~孔蓋 且該第 一導電 係填滿 二孔蓋 且該苐 上之導 蓋上, 1層增 如申請 結構, 、如申 通結構 ,係形 一孑L蓋 盲孑L , 絕緣材 ,係形 二孔蓋 電盲孔 且第η 層板之 專利範 其中該 請專利 ,其中 係貫穿 部係填 成於該 係導通 係形成 料; 成於該 係導通 的底部 層增層 導電盲 圍第8 絕緣材 範圍第 該絕緣 $亥基板地導通該兩第一電路 滿絕緣材料,; 第一電路圖 地蓋合於該 於該增層板 第二電路圖 地蓋合於該 係疊合於該 板之導電盲 孔的第二孔 項所述之多 料包括一塞 8項所述 材料包括 之 案對應該導電通 導電通孔; 内,且該導電盲 案對應該導電盲 導電盲孔;以及 基板之導電通孔 孔的底部係疊合 蓋上。 層印刷電路板之 孔樹脂。 多層印刷電路板 非導電性銅膏。Page 14 573454 ___ a —- a ^ -----—--------- >, scope of patent application ', interlayer conduction structure of 8 kinds of multilayer printed circuit boards, the multilayer printed circuit board system A substrate and at least one build-up board are superimposed, 'the top and bottom surfaces of the base board each have a first circuit pattern', and the surface of the build-up board: a second circuit pattern to the right; and The inter-layer conduction structure includes: the patterned hole 孑 I », the increased layer at least in the second layer, and at least two, at least one in the interior, one hole in the laminate η ~ 9, and conduction in 10 Conduct a conductive through hole, the conductive ~ hole cover in the through hole and the first conductive system fills the two hole cover and the guide cover on the ridge, 1 layer is added as the application structure, as the application structure, the shape is L cover blind 孑 L, insulating material, series of two-hole cover electric blind hole and the patent model of the η layer board. Among them, please apply for a patent, in which the penetrating portion is filled in the conductive material of the system; The bottom layer of the layer increases the conductive blind surrounding the 8th insulating material range The first substrate is grounded on the second circuit, and the second circuit is grounded on the second circuit, and the second circuit is grounded on the second hole of the conductive blind hole superimposed on the board. The material described in item 8 includes a plug of the material included in item 8 corresponding to a conductive via and a conductive via; and the conductive blind case corresponds to a conductive blind via; and the bottom of the conductive via hole of the substrate is Fold the lid on. Hole resin for multilayer printed circuit boards. Multilayer printed circuit board Non-conductive copper paste. $ 15頁$ 15 pages
TW092113772A 2003-05-21 2003-05-21 Manufacturing method of multi-layered printed circuit and the interlayer conduction structure formed by the same TW573454B (en)

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