TW200427386A - Manufacturing method of multi-layered printed circuit and the interlayer conduction structure formed by the same - Google Patents
Manufacturing method of multi-layered printed circuit and the interlayer conduction structure formed by the same Download PDFInfo
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- TW200427386A TW200427386A TW92113772A TW92113772A TW200427386A TW 200427386 A TW200427386 A TW 200427386A TW 92113772 A TW92113772 A TW 92113772A TW 92113772 A TW92113772 A TW 92113772A TW 200427386 A TW200427386 A TW 200427386A
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200427386 五、發明說明(1) 【發明所屬之技術領域】 本發明係關於印刷電路板方面的設計’此尤指一種多 層印刷電路板製造方法及所形成之層間導通結構,特別是 該層間導通結構係由一導電通孔疊合至少一導電盲孔所構 成。 【先前技藝之敘述】 傳統的多層印刷電路板是將,複數層電路圖案形成在絕 緣基板的表面及内部’並利用電鑛貫穿孔(PTH)貫穿 板厚地導通各層電路圖案。 · 然而,在一些|考量下,亦有不使用電鍍貫穿孔的情形 ,例如使用導電膏之ALVH製程及B2 i t製程,以及使用盲孔 電鍵填孔技術之S S P製程。這些製程固然具有不使用電 鍍貫穿孔的優點,但都必需使用昂貴的層間對位設備以克 服層間對位的問題。再者’於A l V Η製程及B2 i t製程中需大 量地使用昂貴的導電膏,導致整體製造成本居高不下。另 外’該S S P製程最大的問題係在於電鍍填孔的品質並不 穩定’常常會發生無法鍍滿盲孔的問題,使得所形成之導 體層的厚度不均云,在線路等級達3 / 3時,造成細線路 無法咬蝕開來,進而影響整體製程之良率。 【發明内容】 ^ 本發明之第一目的在提供一種新的層間導通結構供可 #地導通多層印刷電路板的各層電路圖案。 具體地說’該多層印刷電路板係由一基板及至少一增 層板疊合而成。該基板至少具有一導電通孔,該導電通孔200427386 V. Description of the invention (1) [Technical field to which the invention belongs] The present invention relates to the design of printed circuit boards. This particularly refers to a method for manufacturing a multilayer printed circuit board and the formed interlayer conduction structure, especially the interlayer conduction structure. It is composed of a conductive through hole and at least one conductive blind hole. [Description of the prior art] In the conventional multilayer printed circuit board, a plurality of layers of circuit patterns are formed on the surface and the inside of the insulating substrate ', and each layer of the circuit patterns is electrically connected through the plate by using a power ore through hole (PTH). · However, under some considerations, there are also cases where plated through-holes are not used, such as the ALVH process and B2 it process using conductive paste, and the S S P process using blind hole keypad filling technology. Although these processes have the advantage of not using plated through holes, they all need to use expensive inter-level alignment equipment to overcome the problem of inter-level alignment. Furthermore, a large amount of expensive conductive paste is required in the A l V Η process and the B 2 i t process, resulting in a high overall manufacturing cost. In addition, 'the biggest problem of this SSP process is that the quality of the plated and filled holes is not stable'. The problem that the blind holes cannot be plated often occurs, which makes the thickness of the conductor layer formed uneven. When the line level reaches 3/3 As a result, fine lines cannot be etched away, which affects the overall process yield. [Summary of the Invention] ^ A first object of the present invention is to provide a new interlayer conduction structure for electrically conducting the circuit patterns of each layer of a multilayer printed circuit board. Specifically, the multilayer printed circuit board is formed by stacking a substrate and at least one build-up board. The substrate has at least one conductive via, and the conductive via
第4頁 五、發明說明(2) 具有-導電盲1:=係填滿絕緣材料。該增層板係至少 填滿絕緣材料。2電盲孔亦具有一孔蓋,且其内部亦 部係疊合於該基板之導:u增層板上之導電盲孔的底 板之導電盲孔的底部;==孔蓋上,以及“層增層 孔的孔盍上。這種層門 i η 1層增層板之導電盲 品質’且由於無需‘ 2 r構經測試係具有可靠之導通 備,因而具有大幅降::::ί電膏及昂貴的層間對位設 本發明之第-低衣k成本之實效。 造方法’該方法特 t在提種新的多層印刷電路板製 第一目的所稱之屑;夕層印刷電路板中形成本發明 【實施方式】“導通結構。 在隨後的說明中兴一 進一步說明本發明。妙牛較佳實施例,並佐以圖式地 知,此僅是為方便^ 2田任何熟習該項技術人仕者均 往A間狀更况月之用,實際上並不以此為限。 叫彡閱弟一至十圖,係揭示广 刷電路板的製造方法,1~ 禋扪本發月之夕層印 Λ L *其包括下述a至f步驟: a)提供一基板(1): 忒基板(1 )係如第~圖所示,其具有一頂面 一底面供分別形成一第一導體 ^貝甶及 、廿呈古石丨^ ¥體層(11),且該基板(;[ )並具有至少一導電通孔(1 . I 丄 導通該兩第一導體層(工工)。/、貝^ 土板(1 )地 b )實施一第一塞孔程序: 具體而言’係先以網版印刷方式將一第一絕緣材Page 4 V. Description of the invention (2) With-conductive blind 1: = is filled with insulating material. The build-up board is at least filled with insulating material. 2 The electric blind hole also has a hole cover, and the inner part is also superposed on the substrate: the bottom of the conductive blind hole on the bottom plate of the conductive blind hole on the u build-up board; == on the hole cover, and " On the hole 盍 of the build-up hole. The conductive blind quality of this build-up door η 1-layer build-up board 'and because it does not need the' 2 r structured test system, it has a reliable conduction preparation, so it has a significant drop: ::: ί The electric paste and the expensive inter-layer alignment are set to the effect of the first-low cost of the present invention. The manufacturing method 'This method is used to produce new multi-layer printed circuit boards for the purpose of the first purpose; [Embodiment] "conducting structure" of the present invention is formed in the board. Xingyi will further explain the present invention in the following description. The best example of Miao Niu, and it is known graphically, this is only for convenience ^ Anyone who is familiar with this technology can use it for A month, but it is not limited to this. . It is called 彡 Reader 1 to 10, which reveals the manufacturing method of the wide-brush circuit board. 1 ~ 禋 扪 The present day of the month, the layering Λ L * It includes the following steps a to f: a) Provide a substrate (1): The 忒 substrate (1) is as shown in Fig. ~, And it has a top surface and a bottom surface for forming a first conductor ^ 贝 甶 and 廿 成 古 石 丨 ^ ¥ body layer (11), and the substrate (; [) And has at least one conductive via (1. I 丄 conducts the two first conductor layers (workers). /, ^ Earth plate (1) ground b) implement a first plug hole procedure: specifically 'Department first A first insulating material by screen printing
200427386 五、發明說明(3) 料(2 )填入該導電通孔(1 2,)内,一如第二圖A所示 。再以抽真空方式抽除存在於該第一絕緣材料(2 )内之 氣泡(即真空除泡程序)、以及以加熱方式固化該絕緣材 料(2 ),然後,將溢出該導電通孔(1 2 )之第一絕緣 材料(2 )予以刷磨整平,一如第二圖B所示。其中,若 該第一絕緣材料(2 )填入該導電通孔(1 2 )的過程係 在真空環境中進行,則無需再進行真空除泡程序。 c)以電鍍方式形成兩第二導體層(1 3)供覆蓋住 該兩第一導體層(1 1)及該導電通孔(1 2)的兩端, 一如第三圖所示。 d )實施一第一電路形,成程序: 具體而言,係先於該第二導體層(1 3 )上分別 形成一具有第一鏤空圖案(1 4 1 )之第一電鍍阻絕層( 14),例如貼上一層乾膜,一如第四圖A所示。再於該 第一鏤空圖案(141)内電鍍一第一電路層(15), 一如第四圖B所示。接著於該第一電路層(1 5)上電鑛 一第一 li刻阻絕層(1 6 )(例如電鍍一層鍚錯),一如 第四圖C所示。然後,如第四圖D至F般地依序除去該第 一電鍍阻絕層(1 4 )、實施一第一蝕刻程序、以及除去 該第一蝕刻阻絕層(1 6 )後,即於該基板(1 )之頂面 及底面分別形成一第一電路圖案(17)。其中,該第一 電路圖案(1 7)對應該導電通孔(1 2)之處,並各形 成一第一孔蓋(1 7 1 )供蓋合於該導電通孔(1 2 )。 簡言之,該第一孔蓋(1 7 1 )即如同該導電通孔(1 2200427386 V. Description of the invention (3) The material (2) is filled in the conductive via (12,), as shown in the second figure A. Then, the air bubbles existing in the first insulating material (2) (that is, the vacuum defoaming process) are evacuated, and the insulating material (2) is cured by heating, and then the conductive via (1) will overflow. 2) The first insulating material (2) is brushed and flattened, as shown in the second figure B. Wherein, if the process of filling the conductive via (12) with the first insulating material (2) is performed in a vacuum environment, it is not necessary to perform a vacuum defoaming process. c) forming two second conductor layers (1 3) by plating to cover both ends of the two first conductor layers (1 1) and the conductive via (12), as shown in the third figure. d) Implementing a first circuit shape to form a procedure: Specifically, a first plating resist layer (14) having a first hollow pattern (1 4 1) is formed on the second conductor layer (1 3), respectively. ), Such as sticking a dry film, as shown in the fourth figure A. Then, a first circuit layer (15) is plated in the first hollow pattern (141), as shown in FIG. 4B. Next, the first circuit layer (15) is powered with a first etched resist layer (16) (e.g., an electroplated layer), as shown in the fourth figure C. Then, as shown in the fourth figures D to F, the first plating resist layer (1 4) is sequentially removed, a first etching process is performed, and the first etching resist layer (16) is removed, and then on the substrate. (1) The top surface and the bottom surface respectively form a first circuit pattern (17). Wherein, the first circuit pattern (1 7) corresponds to the conductive through hole (12), and a first hole cover (1 7 1) is formed for covering the conductive through hole (1 2). In short, the first hole cover (1 7 1) is like the conductive via (1 2
200427386 明蓋 說孔 I之 五} 3 /ν' 板 層 增 1 第 - 合 疊 少 至 以 序 程 板 疊 1 施 實 \)/ e 如所片 一圖緣 ,五絕 第一 7如是 T—^以以 彳可可 案也 圖3 , 路C } 電板C 一 層 C 第增R 之一 C 第板 1該箔 C,銅 板中脂 基其樹 該。附 於示一 蓋所為 覆圖地 供五般 N第示 ,示 時所 板A 箔圖 銅六 脂第 樹如 附一 1 ! 為 係1. )3 3 ( 〇 C窗 序板銅 程層一 孔增成 穿一形 一 第式 施該方 實當刻 ) 姓 f 以 先 需 2緣 3絕C 一 孔係 微} 一 3 穿C 貫板 }層 1 增 3 一 C第 窗該 銅當 該。 於示 式所 方B 孔圖 穿六 射第 雷如 以一 再, C電 孔一 微第 亥亥 =°=0 穿在 貫係 上置 片位 緣之 絕} 該2 於3 接C 直孔 式微 方該 孔, 穿何 ί α 身士 雷論 以無 係 。 1. 時2 片 3 案 b0 3案 圖 3圖 路 彳路 孔電所 盲一圖 電第七 導該第 一在如 。成壓 一 方形疊, 上内係上 β, Nl/it口 /^N r—I 〇〇 底 Η '7 3 1()1 c 孔 3 c 蓋微 3蓋 孔該彳孔 一 於孔一 第式盲第 之方電之 }鍍導} 7電該7 1—< 以 .200427386 Ming Gai said hole I 5} 3 / ν 'The plate is increased by 1st-the stacking is as small as the sequence of the plate stack 1) \ e / As shown in the picture, the first five of the five must be T— ^ Taking the cocoa case as shown in Figure 3, the circuit C} electric board C, the first layer C, one of the first R, the first board C, the foil C, and the copper base in the copper board. Attached to the cover is a cover for the general display of the first N, the current display of the plate A foil map copper six grease tree as shown in appendix 1! Is the system 1.) 3 3 (〇C window sequence plate copper process layer 1 Kong Zengcheng wears one form and one formula, and the square is real.) The last name f should be 2 rims, 3 cuts, C holes, and micro holes. One 3 through C through plate. The six holes in the hole B in the display are repeated. The electric hole C is slightly different. Hai Hai = ° = 0. It is placed on the edge of the continuous system. The 2 to 3 are connected to the C straight hole. Fang that hole, wearing He ί α body Shi Lei on the matter. 1. Time 2 pieces 3 cases b0 3 cases Figure 3 Figure Road Kui Road Kongdian Electricity Institute Blind one picture Electricity seventh guide The first one is like. A square stack is pressed, and β, Nl / it port / ^ N r—I 〇〇 the bottom is' 7 3 1 () 1 c hole 3 c cover micro 3 cover hole 7) The 7 1— <.
r-H 示 材 緣 絕二 第 1 將 式 方 刷 印 ο版 序網 程以 孔先 塞係 二, 古口一而 施體 實具 \)y h 。 氣 示之 所内 A ) 圖 4 八C 第料 如材 一緣 ,絕 )二 3第 3該 C於 孔在 盲存 電除 導抽 該式 入方 填空 真 4抽 C以 )4 4 ( C料 料材 材緣 緣絕 絕二 二第 第之 該N 化 3 固 3 及C 以孔 、 盲 )電 序導 程該 泡出 除溢 空將 真, 即後 C然 ο 200427386 五 明 說 明f 發予 平 整 5)磨 /IV 刷 以 材 緣 絕二 第 該 若 中 其 ο B 圖 八 第 如 中 境 環 空 真 在 係 程 過。 的序 )程 3之 3泡 C除 孔空 盲真 電行 導進 該再 入需 填無 4 , C行 料進 住 蓋 覆 供 4 3 (; 層示 體所 導圖 三九 第第 1 如 成一 形, 式/^ 方3 鍍3 電 C 以孔 Λ—/.盲 .1 電 導 玄 =0 第 一 實 第 該1 於5 先3 J /(V 言案 而圖 體空 具鏤 。二 序第 程有 成具 形一 路成 電形 二上 \)/ 4 3 Γν 層 體 導 三 5 3 二 第 I -νΰ 層於 絕再 阻 。 鍍示 電所 二 A 第圖電 之十二 如 例 6 3 層 路 如 1 圖圖 空十 鏤第 案 層 r—I 一 5 上 3 占 貝r-H shows the edge of the material. The first will be printed by a square brush. The version of the sequence is plugged with holes first, and the mouth is actually applied. The place where the gas is displayed A) Figure 4 Eight C materials are the same as the material, absolutely) 2 3 The 3 C holes are in the blind storage and the electricity is removed. The formula is filled in and the true 4 is drawn C) 4 4 (C material The edge of the material must be the second, the second, the N, the 3, the 3, and the C (hole, blind) electrical sequence lead, the bubble will be removed in addition to the empty space, then Cran. 200427386 Five Ming instructions f issued to Leveling 5) Grinding / IV brushing must be the second most important one. Figure B. Eighth as in the middle of the circle, the space really passes. The sequence is 3 to 3 bubbles C. The hole is removed. The blind and true electric wires are imported. The re-entry needs to be filled. 4. The C material is fed into the cover and covered for 4 3 (; In a shape, the formula / ^ square 3 plated 3 electric C with holes Λ-/. Blind. 1 conductance = 0 first real first 1 in 5 first 3 J / (V statement and the figure is hollow with cutout. Second order The first step is to form a shape all the way to form an electric shape. 2) The 4th Γν layer body 3 5 3 The second I-νΰ layer is completely resisted. Plating Institute 2A Figure 12 of the electric circuit as in Example 6 3 layers The road is like 1 figure, the ten-layered case layer r—I-1, 5 on 3
接 Ο 示 所 B 第第第 如一該 一鍍於 ,電該 膜内於 乾著 7 3 第 如 C後 層然 絕。 阻示 刻所 舞〇 二圖 第十 一第 鍍,如 電一 上, RW 氣 3锡 C 層 層一 路鍍 電電 二如 例圖 一於 施即 實, 、後 XJ Nly 5 7 3 3 Γ\ /{V 絕絕 阻阻 鍍刻 電姓 二二 第第 亥亥 =口=ΰ 去去 除除 序、 依序 地程 般刻 Fli 至二 D第 \)y oo 8 3 3 ( C孔 案盲 圖電 路導 電該 一一應 第對 一) 成8 形3 面C 表案 的圖 }路 3 電 C 二 板第 層該 增, 一中 第其 該。 •~3^巴 孑 Θ亏 盲導 電該 導同 該如 於即 合 蓋1—_ 供8 Nly 0〇 1 (' 8蓋 3孔 C 二 蓋第 孔該。 二,蓋 第之孔 一 十一口之 成簡} 形。3 係} 3 處 3 C 之3孔 j C盲It was shown that B was plated one after the other one by one, and the film was dried in the film 7 after the third layer was completely removed. The engraved image is shown in the figure 02. The eleventh is plated, such as the electric one, the RW gas 3 tin C layer is electroplated all the way. As shown in the example, the picture is applied immediately, XJ Nly 5 7 3 3 Γ \ / {V Absolutely resistive engraving and engraving electric name 22nd first Haihai = mouth = ΰ to remove the division order, and sequentially engraving Fli to second Dth \) y oo 8 3 3 (C hole case blind circuit The conductive one-to-one should be the first to the first) into the figure of the 8-shaped 3 plane C} Road 3 The second layer of the C board should increase, and the first one should be the first. • ~ 3 ^ 巴 孑 Θ is not conductive blindly, this guide should be closed as soon as possible 1—_ 8 Nly 0〇1 ('8 cover 3 holes C two cover first hole. Second, cover first 11口 之 成 简} Shape. 3 Departments} 3 places 3 C 3 holes j C blind
之孔藉 }通別 1 電分 C導} 板該7 基由1 該藉{ 悉係 得} 易 7 輕 1 45— 以C 一 可案第 ,圖該 中路且 察電, 觀一通 的第導 F的成 圖上構 十面而 第底} 由及2 面 ^—_ 頂 C 案 圖 路 ^¾ 上孔 }通 3 電 C導 板該 層 , 增之一 ^一一口 第換 該。 與通 而導 }成 3構 3 ) (8 孔3 盲 C 電案 導圖 的路 應電 對二 所第 由之Hole Borrow} Tongbei 1 Electricity C Guide} Board 7 bases by 1 You should borrow {知 系 得} Easy 7 Qing 1 45 — Take C as the first case, map the middle and check the electricity, watch the first guide The top surface of F is composed of ten planes and the bottom plane} is formed by two planes. ^ —_ Top C Case map path ^ ¾ Upper hole} Pass 3 layers of the electrical C guide plate, and add one ^ one by one. It leads to} to form 3 structures 3) (8 holes and 3 blind C electric case maps.
200427386 需要以 至j步 數愈多 在 面具有 係使用 合複數 路圖案 之導電 η層增 之導電 導通形 本發明 相 有下列 成的導 料可以 第十圖 驟即可 ,對應 第十圖 導體層 具有多 論如何 層增層 係藉由 盲孑L的 層板之 盲子L的 成於該 之主要 較於先 特點: 、該導 電層, 是塞孔 該第二 該第二 所顯示 覆執行 步驟重 愈南。 中,基 所示的 )° 不但顯 該基板 通,且 之孔蓋 第η -導通結 電路圖 電路圖案( 增層板(5 之結構,只 一次上述e 覆執行的次 板係使用兩 例子,基板 示一基板疊 上之各層電 該增層板上 上,以及第 1層增層板 構,以確實 案者’乃為 五、發明說明(6) (12)及該導電盲孔(33 印刷電路板的各層電路圖案。 在第十一圖所顯示的例子 3 8 )再登合一第^一增層板( 上形成一第三電路圖案(5 〜 F所示之結構為 獲得。同理,上 形成之電路圖案 F及第十一圖所 之雙面板。而在 層電路圖案之多 ,在上述的各個 板之結構,更重 該導電通孔貫穿 底部係疊合於該 導電盲孔的底部 孔蓋上。藉由這 基板及各增層板 訴求所指。 前技術所揭示之 電通孔及導電盲 其孔内則使用絕 樹脂或是非導電 係貫穿板厚地導通一多層 中,係在 5 ) Λ於 1 ),其 基礎地重 述e至j 的層數就 示的例子 第十二圖 層板(6 例子中, 要的是, 板厚地導 導電通孔 係疊合於 樣的層間 上之各層 製程及結構,本發明特別具 孔只有孔壁是以電鍍方々^200427386 It is necessary to increase the number of steps on the surface to increase the conductive continuity of the conductive η layer using a complex number of patterns. The conductors according to the present invention can be shown in the tenth step, corresponding to the tenth figure. Many discussions about how to increase the layer are based on the characteristics of the blind L of the layer of the blind L. The conductive layer is the second, the second, and the second. More south. (Indicated by the base) ° Not only shows the substrate, but also covers the η-conducting junction circuit diagram of the circuit pattern (the structure of the build-up board (5), the sub-board executed only once by the above e-layer uses two examples, the substrate Shows each layer of a substrate stacked on the build-up board, and the first build-up board structure, and it is the case that the case is' 5. Explanation of the invention (6) (12) and the conductive blind hole (33 printed circuit) The circuit pattern of each layer of the board. In the example shown in the eleventh figure 3 8), a third circuit pattern (a third circuit pattern (5 ~ F) is formed on the combined first-layer board (the structure shown in FIG. 5 to F is obtained.) Similarly, The circuit pattern F and the double panel shown in Fig. 11 are formed thereon. However, there are many circuit patterns in the layer. In the structure of each board described above, the conductive through-hole through the bottom is superimposed on the bottom of the conductive blind hole. The holes are covered by the base plate and the multi-layer boards. The electrical vias and conductive holes disclosed in the previous technology use a resin or non-conductive system to conduct a multilayer through the board. ) Λ in 1), which restates the number of layers e to j based on FIG ply twelfth example (example 6, to the sheet thickness based conductive vias turning process and the layers laminated between the layer structure of the sample, in particular the present invention is only apertured hole wall is plated side 々 ^
ImL· y t ^ N 7T^ 緣材料充填之,這些絕緣材 性錡膏,而無論使用那種絕ImL · y t ^ N 7T ^ Filled with edge materials, these insulating materials are pastes, no matter what kind of insulation is used
200427386 五、發明說明(7) 緣材料,都比導電膏便宜許多。與銅膏相比,塞孔樹脂的 價格僅約為銅膏的1 / 6〜1 / 8 ,非導電性銅膏的價格 僅約為銅膏的1 / 3〜1 / 4 。 二、 該導電通孔及導電盲孔的孔内完全以絕緣材料填 實,完全沒有孔口凹陷的情形發生,因此,各層電路圖案 覆蓋該導電通孔或導電盲孔的部份與其它部份一樣平整, 藉以確保下一層電路圖案的形成品質。 三、 執行上述a至j步驟的過程中,其層間對位的技 術門檻較低而無需投資昂貴的層間對位設備。 四、 由於未使用導電膏,因.此在疊合增層板時的熱壓 條件並不苛求。 ’ 五、 這種於導電通孔上疊合至少一導電盲孔、且該導 電通孔及導電盲孔内部均填實絕緣材料之特殊層間導通結 構,經熱油及熱衝擊等信賴度測試後,其電阻變化率在土 1 0%以内,是其層間導通品質顯然相當可靠。 综上所述,當知本發明具有產業上之利用性及進步性 ,且在同類產品中均未見有相同或類似者揭露在先而足具 新穎性,故已符合發明專利之申請要件,爰依法提出申請200427386 V. Description of the invention (7) The edge materials are much cheaper than the conductive paste. Compared with copper paste, the price of plug-hole resin is only about 1/6 ~ 1/8 of copper paste, and the price of non-conductive copper paste is only about 1/3 ~ 1/4 of copper paste. 2. The holes of the conductive vias and conductive blind holes are completely filled with insulating material, and there is no depression of the openings. Therefore, the circuit pattern of each layer covers the conductive vias or conductive blind holes and other parts. It is as flat as possible to ensure the formation quality of the next layer of circuit patterns. 3. In the process of performing steps a to j above, the technical threshold for inter-level alignment is relatively low without the need to invest in expensive inter-level alignment equipment. 4. Since the conductive paste is not used, the hot-pressing conditions when stacking the build-up boards are not critical. '' V. This kind of special interlayer conduction structure is stacked on the conductive vias with at least one conductive blind hole, and the conductive vias and conductive blind holes are filled with insulating material. After reliability tests such as thermal oil and thermal shock, , Its resistance change rate is less than 10% of the soil, and its interlayer conduction quality is obviously quite reliable. In summary, when it is known that the present invention has industrial applicability and advancement, and no similar or similar ones have been disclosed in similar products before, it is fully novel, so it has met the application requirements for invention patents. Apply according to law
第10頁 200427386 圖式簡單說明 第一至十圖,係以斷面示意圖的方’式表示本發明方法之步 驟a至j的執行過程。 第十一圖,係本發明之再一較佳實施例的斷面示意圖。 第十二圖,係本發明之另一較佳實施例的斷面示意圖。 明說號 圖 基第第第第第第微第第第第第多 板 \1/ ^—o \)y 00 4 3 6 3 ((3( C料案C案C }料案C案 層材圖層圖板2材圖層圖 體緣空路路層3緣空路路 導絕鏤電電增C絕鏤電電 一一 一一一 一孔二二二二 )4 ) 2 15 7 4 6 \)y 1 1 )3(( 2 1 層層 1 {絕絕 C 層阻.阻 孔體鍍刻 通導電餘 電二一 一 導第第第 蓋孔 7 3 5 () 板6 層 C增板 二層 5 T \)y xly 3 3 ^—_ )4((15 3 3 層層 00 c } 3 C絕絕3案 1 C層阻阻C圖 3孔體鍍刻蓋路 ,c盲導電飯孔電 一窗電三二二二三 第銅導第第第第第Page 10 200427386 Brief description of the drawings The first to tenth drawings are shown in the form of cross-sectional schematic diagrams' to show the execution process of steps a to j of the method of the present invention. Fig. 11 is a schematic sectional view of still another preferred embodiment of the present invention. Fig. 12 is a schematic sectional view of another preferred embodiment of the present invention. Mingtuo Tujidi No.1, No.3, No.3, No.3, No.2, and No.7 Multi-Board \ 1 / ^ —o \) y 00 4 3 6 3 ((3 (Case C Case C) Case C Case Layers Drawing board 2 material layers picture body edge empty road layer 3 edge empty road circuit to increase the electrical conductivity of the electrical insulation and increase the electrical insulation of the electrical insulation 1 1 1 1 1 hole 2 22 2) 4) 2 15 7 4 6 \) y 1 1) 3 ((2 1 层层 1 {绝 绝 C layer resistance. The barrier body is plated and etched with conductive residual electricity to conduct the first cover hole 7 3 5 () plate 6 layer C increase plate 2 layer 5 T \) y xly 3 3 ^ —_) 4 ((15 3 3 layers 00 c) 3 C absolutely 3 cases 1 C layer resistance C Figure 3 hole body plating engraved road, c blind conductive rice hole electric one window electric three two 22nd, 3rd, 2nd, 3rd, 2nd
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TWI386139B (en) * | 2008-06-04 | 2013-02-11 | Unimicron Technology Corp | Package substrate having double-sided circuits and fabrication method thereof |
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TWI386139B (en) * | 2008-06-04 | 2013-02-11 | Unimicron Technology Corp | Package substrate having double-sided circuits and fabrication method thereof |
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