TW535026B - Copier device and method to manufacture circuit board - Google Patents

Copier device and method to manufacture circuit board Download PDF

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Publication number
TW535026B
TW535026B TW89117946A TW89117946A TW535026B TW 535026 B TW535026 B TW 535026B TW 89117946 A TW89117946 A TW 89117946A TW 89117946 A TW89117946 A TW 89117946A TW 535026 B TW535026 B TW 535026B
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TW
Taiwan
Prior art keywords
vacuum
patent application
item
scope
deformed
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Application number
TW89117946A
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Chinese (zh)
Inventor
Udo Webler
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Bacher Graphische Gerate Gmbh
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03BAPPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B27/00Photographic printing apparatus
    • G03B27/02Exposure apparatus for contact printing
    • G03B27/14Details
    • G03B27/18Maintaining or producing contact pressure between original and light-sensitive material
    • G03B27/20Maintaining or producing contact pressure between original and light-sensitive material by using a vacuum or fluid pressure
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0073Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
    • H05K3/0082Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the exposure method of radiation-sensitive masks

Abstract

The present invention relates to a copier device consisting of one rigid body, one spacer and one body which can be deformed under vacuum and which is separated from the rigid body by said spacer, whereby said deformation device can be adapted by reducing the distance therebetween in a contact volume in order to block a pattern master against a pattern receiver. The spacer is equipped with an element which can be extended and retracted between two positions, the regulating distance thereof being at least such that the body which is only slightly deformable under vacuum at the first position and which has a generally spherical shape, is fully adapted to the shape of the rigid body when it is at the second position.

Description

535026 經濟部智慧財產局員工消費合作社印製535026 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs

Μ--------^---- (請先閱讀背面之注意事項再填寫本頁) n IB I n I A7 --—----— B7 _ 五、發明說明(1·) 本發明包含各獨立憎專__述概念之研究,因 而本發明-般而言,係從-圖樣傳送件拷貝圖樣至另—圖 樣接觉件上,圖樣傳送件例如是膠片薄膜,圖樣接受件則 例如是電路板。 通常製造電路板時,將具電路線路圖樣之膠片薄膜置 於一對光敏感之塗膜電路板上,然後打光照射膠片薄膜。 此拷貝私序祐要有向精確度,尤其是在極細相鄰之線路時 更為如此,因此當膠片薄膜置於電路板上且相互疊置時, 不可有偏移,或者,在作為圖樣傳送件之各膠片薄膜及作 為圖樣接受件之電路板間不可封入氣泡。 kDE 43 20 792 A1可知一用於版畫手工業之拷貝器具 中之拷貝框,其中,-膠片係置於一拷貝材料上,然後此 拷貝材料置於一由一彈性圓板支持之橡膠蓋(真空蓋)上且 被壓在玻璃板上,此時,在橡膠蓋及玻璃板間之中間空間 則形成低壓。在此習知設計中,橡膠蓋及玻璃板間四周要 放置圍繞之、尤其是彈性之密封輪廓件,在此彈性圓板之 邊緣範圍尤其要設計多個等距之孔,且各孔與一真空泵功 能相連。藉此,彈性圓板與橡膠蓋從對稱軸開始,係壓在 玻璃板上,並徑向彎曲貼在玻璃板上,直到最大之低壓將 彈性板在密封輪廓件變形情況下,經整個拷貝材料及薄膜 之截面,以密封及平面方式壓在玻璃片上。 其餘將圖樣載具及圖樣接受件相互固定之例子可參見 DE 29 28 320 C2 ’其有一用於拷貝框之塾,以對在其平面 内具一透明板之剛性照相材料打光,尤其是玻璃板,及一 本紙張尺度過用甲國國豕標準(CNS)A4規格(21〇 X 29&公爱 發明說明(2·) 藉壓差作用而可施壓之、可彎曲及在其内彈性可變形且具 —由多個突出支持之表面之塾。 另外,在DEGBM 82 16 678 U1說明一拷貝框,其具 —透明板、一覆蓋透明板、可彎曲之板,一設置於透明及 可彎曲板邊緣間之彈性密封條,及一與二板及密封條所形 成之雯間,其於其抽吸侧連接之泵用以產生低壓,其中, 可彎曲板係由具咼彈性之材料、尤其是金屬組成,而且其 整個周圍係固定於一平面内。另外,在FR2436〇94、SU1 672 404 A2及DE 30 30 400 A1中提到一拷貝器具之橡膠 布,DE GBM 83 11 236 m、FR2 663 133 及EP 0 457 949 A1 〇 在以上裝置中,在剛性元件及作為橡膠布、典型的高 彈性及易變形之元件間形成接觸真空,以固定在電路板上 之膠片,其中之問題是,若所形成之接觸真空不均勻,則 不能完全排除以下之可能性:氣泡可能被封入。這可能造 成成像時之不準度,使解析度惡化。 本發明之任務係為,提供商用之新使用法。 本任務之解決方案均獨立申請專利。較偏好之實施形 式則出現於附屬申請專利範圍内。 本發明提出一具一剛性元件及一距離保持件之拷貝裝 置,其將剛性元件從一往復可由真空加以變形之元件分離 出。此可變形元件於接觸真空縮小距離時,若將圖樣傳送 件固定於圖樣接受件上貼於剛性元件上,其中可往復由真 空加以變形之元件只稍具彈性,且距離維持件包括一可在 535026 經濟部智慧財產局員工消费合作社印製 A7 _ ----------- B7 五、發明說明(3·) 二位置間進出運動之元件,此元件之運動行程至少是如此 之大,使在第一位置時,一般而言受真空影響呈球形彎曲 但只有些微彈性之元件,不會與剛性元件貼合,且只有在 距離維持件或定位元件之第二位置才發生。 本發明之一主要觀點係為,接觸真空壓力可在控制情 況下且以與接觸無關之方式建立,其中,在距離維持件内 使用一控制之、可運動之元件,藉此,剛性元件及變形元 件可相互運動逼近,再相互分離。用於固定所需之時間很 短,因為接觸真空可快速建立,不會封入氣泡。尤其是不 會有下述狀況:一太軟之元件,在突然之接觸真空壓力建 立時’太快向剛性元件運動,而使得氣泡被封入。另外, 接觸真空係於控制情況下建立。因此,本發明之裝置適用 於快速且極精準之固定。 本拷貝裝置也可用於版畫工業之其他領域,特別偏好 之應用係為電路板之拷貝,其中,圖樣傳送件即所稱之模 範(Master),而電路板則為圖樣接受件。以此發明之方法, 電路板之精確度可做到40//m或更好,在一實際之實施例 中,可達到38//m之精確度。 可由真空變形之元件最好與圖樣傳送件固定相連,或 是二者為同一元件,例如,一膠片薄膜做為圖樣傳送件, 特別是藉由第一真空固定於一有機玻璃板或玻璃板上,而 此有機玻璃則做為可由真空變形之元件,與板一起受第二 真空作用而使板變形。另一方式為,電路板圖樣直接置於 玻璃元件上,形成所謂之模範玻璃(Giasmaster)。 本紙張尺度適用中國國家標準(CNS)A4規格"mo X 297公釐)-----— « ttn α ·ϋ ϋ Μϋ ϋ mmi^eJI ·ϋ ϋ ϋ (請先閱讀背面之注意事項再填寫本頁} 蠢. 535026 經濟部智慧財產局員工消費合作社印製 A7 五、發明說明(4·) 可由真空變形之元件之變形性一般而言很小。所以較 偏好為60X60cm大小之可由真空變形之元件只運動如 1mm。此變形可很容易以玻璃板做到。另外可以預估,备 板之尺寸擴大時,在中央部份最大之變形也會相應増加。 不過,在較大尺寸之玻璃板最大之變形最好在例如3mm, 以降^^可伸出及縮回元件之行程,及與之相應之施壓時間。 剛性元件可為一構成電路板用之真空運輸框。 可以使用液壓或氣壓之活塞·汽缸-單元做為伸出及縮 回定位元件,在一特別偏好之實施形式中使用軸於一固定 外殼之軸承内可做進出運動。通常會使用多個定位元件, 以將剛性元件例如在四角上下運動。此運動最好是同步進 行’在使用軸時可藉一齒形傳送帶在玻璃板周圍,從一軸 到下一軸加以導引,使所有軸同步作動。 所偏好之,一元件相互共同平行相向與相離之運動可 由定位元件之同步性特別容易做到。定位元件最好如此設 計及/或如此固定於殼上,其驅使剛性元件向不動元件下降 或是從之離開。因為可由真空變形之元件通常是由透明板 構成、且在板下設置有一光源。不過要注意的是,輸送系 統,尤其是要進行雙侧打光時,有時也可由玻璃板取代,。 申請保護之專利範圍也包括一發明之打光方法。 以下藉圖式說明本發明之實施例。此圖式顯示之内容 如下: 圖一用於說明而極度簡化之發明拷貝裝置。 根據圖一,以符號1所標示之拷貝裝置丨係包括一剛 i張尺度翻t關家標準(CNS)A4祕(21ϋ x 29f^y ------Μ----------------- (靖先閱讀背面之注意事項再填寫本頁} 535026 經濟部智慧財產局員工消費合作社印製 A7 五、發明說明(5·) 性元件2、-距離維持件3,及一設置在外殼4内,可往 由真空變形《兀件5,其在受真空變形後之位置是以 線表示。 ^ 剛性元件2為一用於電路板之、習知之輸送框2,恭 路板6藉由真空管道7吸於該輸送框上。電路板6向下^ -對照相敏感之薄膜。真蜂道7經_真蜂路8與一真 空系(未示出)相連。剛性元件2在邊角上有支持件9,、距離 維持件3則壓於其上。 距離維持件3係以軸3a及軸套3b設計成定位元件。 在外殼4之各角均設有一軸。軸套3b及可伸縮之軸係 設置於外殼4内。 在各軸間有一齒形傳送帶(未示出)與板5平面平行, 並繞板轉動’傳送帶係導胁外殼4之壁面上^齒形傳送 帶如此與軸相連’使财㈣送帶之運動而伸出及縮回。 齒形傳送帶本純由步進馬軸動,步進馬達之控制信號 來自一中央設備控制器(未示出)。另外,設有一照明設備(未 示出)’藉之可由真空變形之元件5從下方打光。 可由真空變形之元件5係由透明之、高光學值之、無 紋影之玻璃組成,其有一周圍環繞之槽1〇,其藉一真空管 路11與一真空泵(未示出)相連。 在可由真空變形之元件5上設置有一膠片薄膜12,其 蓋住真空槽10。 一環繞之由橡皮組成之密封輪廓件13,從外殼4可外 伸出到達剛性元件2,不論距離維持件3在任何位置,在 ------------^ i——^--------- (請先閱讀背面之注意事項再填寫本頁)Μ -------- ^ ---- (Please read the notes on the back before filling this page) n IB I n I A7 -------------- B7 _ V. Description of the invention (1 · ) The present invention includes the study of the independent concepts described above, so the present invention-in general, copies the pattern from the -pattern transfer member to another -pattern sensor, the pattern transfer member is, for example, a film, and the pattern is accepted. The pieces are, for example, circuit boards. Generally, when a circuit board is manufactured, a film film having a circuit pattern is placed on a pair of light-sensitive coated circuit boards, and then the film film is irradiated with light. This copy must have a directional accuracy, especially when the adjacent lines are very thin, so when the film is placed on the circuit board and stacked on top of each other, there must be no offset, or it must be transmitted as a pattern. No air bubbles should be enclosed between the film films of the parts and the circuit board as the pattern receiving part. kDE 43 20 792 A1 shows a copy frame in a copying appliance for printmaking industry, where-the film is placed on a copy material, and then the copy material is placed on a rubber cover (vacuum cover) supported by an elastic circular plate ) And pressed on the glass plate, at this time, a low pressure is formed in the intermediate space between the rubber cover and the glass plate. In this conventional design, rubber seals and glass plates must be surrounded by, in particular, elastic sealing contours. The edge of the elastic circular plate must be designed with multiple equidistant holes, and each hole and one The vacuum pump is functionally connected. With this, the elastic circular plate and the rubber cover start from the axis of symmetry, are tied to the glass plate, and are bent and affixed radially to the glass plate, until the maximum low pressure deforms the elastic plate under the seal profile, and the entire copy material And the cross section of the film is pressed on the glass sheet in a sealed and flat manner. For other examples of fixing the pattern carrier and the pattern receiving member to each other, refer to DE 29 28 320 C2 'It has a frame for copying the frame to polish the rigid photographic material with a transparent plate in its plane, especially glass. Board, and a paper that has passed the national standard (CNS) A4 specification (21 × 29 & public love invention description (2 ·) which can be pressed by pressure difference, can be bent and elastic in it Deformable and has a surface supported by multiple protrusions. In addition, a copy frame is described in DEGBM 82 16 678 U1, which has a transparent plate, a covering transparent plate, a flexible plate, and a transparent plate. The elastic sealing strip between the edges of the curved plate, and the space formed by the first and second plates and the sealing strip. The pump connected to its suction side is used to generate low pressure. Among them, the flexible plate is made of flexible material, Especially the metal composition, and its entire periphery is fixed in a plane. In addition, in FR2436〇94, SU1 672 404 A2 and DE 30 30 400 A1, the rubber cloth of a copying appliance is mentioned, DE GBM 83 11 236 m, FR2 663 133 and EP 0 457 949 A1 〇 Above In the middle, a contact vacuum is formed between a rigid component and a rubber cloth, which is typically highly elastic and deformable, to fix the film on the circuit board. The problem is that if the contact vacuum formed is not uniform, it cannot The following possibilities are completely ruled out: bubbles may be enclosed. This may cause inaccuracy in imaging and deteriorate resolution. The task of the present invention is a new method used by the provider. The solutions of this task are all independently applied for patents The preferred implementation form appears in the scope of the attached patent application. The present invention proposes a copying device with a rigid element and a distance holder, which separates the rigid element from a reciprocating element that can be deformed by a vacuum. When the deformation element contacts the vacuum to reduce the distance, if the pattern transfer member is fixed on the pattern receiver and affixed to the rigid member, the component that can be deformed by the vacuum back and forth is only slightly elastic, and the distance maintaining member includes a Printed by the Consumer Cooperatives of the Ministry of Intellectual Property Bureau A7 _ ----------- B7 V. Invention Description (3 ·) 2 Location In and out of the moving element, the movement stroke of this element is at least so large that in the first position, generally, the element is spherically curved but affected by vacuum, but only slightly elastic, and will not fit with the rigid element, and only in the The second position of the distance maintaining element or positioning element only occurs. One of the main aspects of the present invention is that the contact vacuum pressure can be established under controlled conditions and in a manner independent of contact, wherein a controlled Movable components, by which rigid components and deformable components can move close to each other, and then separate from each other. The time required for fixing is very short, because the contact vacuum can be quickly established without enclosing air bubbles. In particular, there will not be the following situation: a component that is too soft and moves to a rigid component too quickly when a sudden contact with the vacuum pressure is established, so that air bubbles are enclosed. In addition, contact vacuum is established under controlled conditions. Therefore, the device of the present invention is suitable for fast and extremely accurate fixing. This copy device can also be used in other areas of the printmaking industry. The particularly preferred application is the copying of circuit boards. Among them, the pattern transmitting part is called the master, and the circuit board is the pattern receiving part. With the method of the present invention, the accuracy of the circuit board can be 40 // m or better, and in an actual embodiment, the accuracy can be 38 // m. The vacuum deformable element is preferably fixedly connected to the pattern conveying member, or both are the same element, for example, a film film is used as the pattern conveying member, especially fixed to a plexiglass plate or glass plate by a first vacuum. This plexiglass is used as a component that can be deformed by vacuum, and the plate is deformed by the second vacuum with the plate. In another way, the circuit board pattern is directly placed on the glass element to form a so-called model glass (Giasmaster). This paper size applies to China National Standard (CNS) A4 specifications " mo X 297 mm) ------«ttn α · ϋ ϋ Μϋ ϋ mmi ^ eJI · ϋ ϋ ϋ (Please read the precautions on the back before Fill out this page} Stupid. 535026 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7. 5. Description of the invention (4 ·) The deformability of the components that can be deformed by vacuum is generally very small. The movement of the element is only 1mm. This deformation can be easily achieved with a glass plate. In addition, it can be estimated that when the size of the spare plate is enlarged, the largest deformation in the center will increase accordingly. However, in the larger size glass The maximum deformation of the board is preferably, for example, 3mm, so as to reduce the stroke of the component that can be extended and retracted, and the corresponding pressing time. The rigid component can be a vacuum transport frame for the circuit board. It can be hydraulic or Pneumatic piston-cylinder units are used as extension and retraction positioning elements. In a particularly preferred embodiment, a shaft is used to move in and out of a fixed housing bearing. Usually multiple positioning elements are used to move the rigid For example, the moving element moves up and down the four corners. This movement is best performed synchronously. When using the shaft, a toothed belt can be used around the glass plate to guide it from one shaft to the next, so that all the shafts move synchronously. The movement of a component parallel to each other and facing away from each other can be particularly easily achieved by the synchronization of the positioning component. The positioning component is preferably designed and / or fixed on the shell, which drives the rigid component to descend or move away from the stationary component. Because the components that can be deformed by vacuum are usually composed of transparent plates and a light source is set under the plates. However, it should be noted that the conveying system, especially when double-side lighting is used, can sometimes be replaced by glass plates. The scope of the patent for which protection is applied also includes a lighting method of the invention. The following illustrates the embodiment of the present invention by means of diagrams. The contents of the diagrams are as follows: Fig. 1 is an extremely simplified invention copying device for illustration. The copying device marked with the symbol 1 includes a series of standard CNS A4 secrets (21ϋ x 29f ^ y ------ M ----------- ------ (Jing first read the precautions on the back before filling out this page) 535026 Printed A7 by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the invention (5 ·) Sexual element 2, distance-maintaining element 3, and one inside the casing 4 It can be deformed by vacuum. The element 5 is indicated by lines after being deformed by vacuum. ^ The rigid element 2 is a conventional conveying frame 2 for a circuit board, and the circuit board 6 is a vacuum pipe. 7 is sucked on the conveying frame. The circuit board 6 is downwardly ^-a film sensitive to the photo. The true bee path 7 is connected to a vacuum system (not shown) via the true bee path 8. The rigid element 2 is provided at the corners. The supporting member 9 and the distance maintaining member 3 are pressed on it. The distance maintaining member 3 is designed as a positioning element with the shaft 3a and the shaft sleeve 3b. A shaft is provided at each corner of the casing 4. A shaft sleeve 3b and a retractable shaft system are provided in the casing 4. Between each axis, a toothed belt (not shown) is parallel to the plane of the plate 5 and rotates around the plate. 'The conveyor belt is on the wall surface of the guide shell 4. The toothed belt is so connected to the shaft' to move the property belt. Extend and retract. The toothed belt is purely driven by a stepping horse shaft, and the control signal of the stepping motor comes from a central equipment controller (not shown). In addition, there is provided a lighting device (not shown) 'by which the element 5 which can be deformed by vacuum is illuminated from below. The vacuum deformable element 5 is composed of transparent, high optical value, non-striated glass, and has a groove 10 surrounding it, which is connected to a vacuum pump (not shown) by a vacuum pipe 11. A film film 12 is provided on the vacuum-deformable element 5 and covers the vacuum tank 10. A surrounding sealing profile 13 composed of rubber can protrude from the shell 4 to reach the rigid element 2, regardless of the distance maintaining member 3 at any position, at ------------ ^ i—— ^ --------- (Please read the notes on the back before filling this page)

A7A7

535026 五、發明說明(6·) 剛性元件2及彈性元件5 _形成密封之空間15,而JL夠 穩定可軸摘真空。真奸路Η從聽封轉之空間通 往一真空泵。 在開口 8、Η及11間及各真空關設有可控制之闕。 本發明之裝置係以下述方式操作: 首先電路板6被抽吸管道7於一定方向吸附於剛性元 件2上。 *然後’膠片薄膜12於一定方向置於玻璃板5上,並藉 管路11抽吸缝關定於槽1G上,由於膠片薄膜有極高 之彈性,氣泡不會被封入。 走位元件3之軸3a完全伸出,剛性元件2係設置於軸 上,因而在伸出軸上之支持件9用以支持剛性元件2,同 時,電路板6係位在膠片薄膜5上。 空間15由與剛性元件2及外殼4接觸之密封輪廓件13 形成贫閉空間。然後空氣經由管路14從密閉空間μ中抽 出。因外殼4及可由真空變形之元件5所構成之空間仍具 正常壓力,在向空間15方向有一壓力落差,因而玻璃板5 變形,成為虛線所示之形狀5,,且固定於其上之膠片薄膜 12也隨之變形《被真空吸附於元件5上之膠片薄膜12則 仍然吸附於已發生變形之元件5上。玻璃板之變形在圖中 係以誇大方式顯示出,實施上所造成之變形可很快形成, 因為實際所需之變形很小。 呈球形變形之破璃板5,由於伸出之距離維持件3與電 路板6最多只有點或在極小面積有接觸,但尚未與之相貼。 本紙張尺度適用中國國家標準(CNS)A4規格(21〇 X 297公釐) 請 先 閲 讀 背 之535026 V. Description of the invention (6 ·) The rigid element 2 and the elastic element 5 _ form a sealed space 15 and JL is stable enough to take off the vacuum. From the space where the seal is turned, the real gangster leads to a vacuum pump. A controllable cymbal is provided between the openings 8, Η and 11 and each vacuum gate. The device of the present invention operates in the following manner: First, the circuit board 6 is attracted to the rigid element 2 by the suction pipe 7 in a certain direction. * Then the 'film film 12 is placed on the glass plate 5 in a certain direction, and is fixed to the groove 1G by the suction slit of the pipe 11. Due to the extremely high elasticity of the film film, air bubbles will not be sealed. The shaft 3a of the positioning element 3 is fully extended, and the rigid element 2 is provided on the shaft. Therefore, the supporting member 9 on the extended shaft is used to support the rigid element 2. At the same time, the circuit board 6 is positioned on the film film 5. The space 15 is a closed space formed by a sealing profile 13 in contact with the rigid element 2 and the housing 4. The air is then extracted from the confined space µ via the pipe 14. Because the space formed by the casing 4 and the vacuum deformable element 5 still has normal pressure, there is a pressure drop in the direction of the space 15, so the glass plate 5 is deformed into the shape 5 shown by the dotted line, and the film fixed on it The film 12 is deformed accordingly. The film 12 which is vacuum-adsorbed on the component 5 is still adsorbed on the component 5 which has been deformed. The deformation of the glass plate is shown in an exaggerated manner in the figure, and the deformation caused by implementation can be formed quickly, because the actual required deformation is very small. The broken glass plate 5 having a spherical shape has at most points or contact with the circuit board 6 due to the extended distance, but it is not yet attached to it. This paper size is in accordance with Chinese National Standard (CNS) A4 (21 × 297 mm). Please read it first

Order

II

經 濟 部 智 慧 財 產 局 員 工 消 費 合 作 社 印 製 535026 A7 _____B7 ' --·--^^ 五、發明說明(7·) 當到達穩定狀態後,(或者有時已在變形期間),步進 馬達(未示出)係被啟動,帶齒形傳送帶及軸3a向下降。此 舉也使在軸上之剛性元件2下降。此下降動作繼績,直到 電路板貼到呈球形變形之玻璃體5,,最後至少膠片薄膜<12 表面有整面配合接觸。此時,軸之下降動作可以停止,並 可進行打光。此時,在電路板6及玻璃板5間不會封入氣 泡’因為接觸係於控制之下進行,而且是從中間向外連續 藉各轴同步下降而完成。 在打光結束後,可以適當方式將封閉之空間充以空氣, 使軸向上運動。照相後之電路板即可取出,再重複上述程 要注意的是軸之伸出位置係根據電路板6之厚度而 疋。另外各軸最好有滾珠軸承,例如使用滾珠螺旋變速器, 以確保運動之均勻性。 i — — — — — — — — ——Aew in ^« — — — — — III Γ«·先閱讀背面之注意事項再填寫本頁) 用 適 度 尺 紙___一本 經濟部智慧財產局員工消费合作社印製Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 535026 A7 _____B7 '-·-^^ V. Description of the invention (7 ·) After reaching a stable state (or sometimes during the deformation period), the stepping motor (not yet (Shown) is activated, the toothed belt and the shaft 3a are lowered. This also lowers the rigid element 2 on the shaft. This descending action continues until the circuit board is attached to the glass body 5 which is deformed in a spherical shape, and finally at least the surface of the film film < 12 has a mating contact with the entire surface. At this time, the axis lowering operation can be stopped and lighting can be performed. At this time, no bubbles are enclosed between the circuit board 6 and the glass plate 5 because the contact is performed under control, and it is completed continuously from the middle to the outside by synchronously lowering the axes. After the lighting is finished, the closed space can be filled with air in an appropriate manner to move the axial direction. The circuit board can be taken out after taking the picture, and the above process is repeated. It should be noted that the position of the shaft extension is determined by the thickness of the circuit board 6. In addition, each shaft is preferably provided with a ball bearing, for example, a ball screw transmission is used to ensure uniform motion. i — — — — — — — — — — Aew in ^ «— — — — — III Γ« · Read the notes on the back before filling out this page) Use a moderate rule paper ___ an employee of the Intellectual Property Bureau of the Ministry of Economic Affairs Printed by Consumer Cooperatives

Claims (1)

535026 A8 B8 C8535026 A8 B8 C8 第89117946號專利案申請專利範園修正本 1. 2. 4. 經 濟 部 智 慧 財 產 局 員 工 合 社 印 製 5· 6· 一種拷貝裝置,其具—剛奴件,-距離維持件及-由 此距離維持件而酬性元件分㈣而可由真空變形之 7C件’其於_接觸毅内在縮小轉時,將—圖樣傳送 件固定於—輯接受件而可財難元件上,其特徵 為,距離維持件包括一可在二位置間做進出運動之元 件,其行徑至少是如此之大,以致於在第一位置因真空 作用呈球形彎曲而可由真空作用而變形之元件,只於^ 二位置才完全貼於剛性元件上。 、根據申請翻細帛丨猶述之剌裝置,翻以將電 路板,樣從-模範拷貝至電路板上,其中,圖樣傳送二 係為模範且電路板係為圖樣接受件。 根據申請專利範圍第1項所述之拷貝裝置,其特徵為, 可由真空變形之元件與圖樣傳送件相同,或與圖 件緊密相連接。 λ 根據申請專利範圍第3項所述之拷貝裝置,其特徵為, 圖樣傳送件係包括-玻璃或有機韻板,而作為圖樣 送件之膠片薄膜尤其是可藉真空固定於破璃板上。 根據申請專利範圍第4項所述之拷貝裝置,其特徵為, 玻璃板或有機玻璃板具有一結構,尤其是一圍繞之槽, 藉之可將膠片薄膜加以固定。 根據申請專利範圍第3項所述之拷貝裝置,其特徵為, 可由真空變形之元件係為一模範玻璃。 、The patent case No. 89117946 applied for the amendment of the patent fan park 1. 2. 4. Printed by the staff of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. 6 · A copy device, which has-a slave, a distance-maintaining piece and-from this The 7C pieces which are separated from the maintenance parts and can be deformed by the vacuum. 'When the contact size is reduced, the pattern transfer part is fixed on the receiving part and the financially difficult part is characterized by the distance. The retaining part includes an element that can move in and out between the two positions, and its path is at least so large that the element can be deformed by the vacuum effect due to the spherical bending in the first position due to the vacuum effect. Only in the two positions Fully affixed to rigid elements. According to the application, please refer to the detailed description of the device described above, and copy the circuit board from the model to the circuit board. Among them, the pattern transfer system is the model and the circuit board is the pattern receiver. The copying device described in item 1 of the scope of the patent application is characterized in that the element that can be deformed in a vacuum is the same as the pattern transfer member or is tightly connected to the figure. λ The copying device according to item 3 of the scope of patent application, characterized in that the pattern conveying member includes-glass or organic rhyme plate, and the film film as the pattern conveying member can be fixed on the broken glass plate by vacuum in particular. The copying device according to item 4 of the scope of patent application, characterized in that the glass plate or the plexiglass plate has a structure, especially a surrounding groove, by which the film film can be fixed. The copying device according to item 3 of the scope of the patent application, wherein the vacuum deformable element is an exemplary glass. , 申凊專利範圍 7. 根據申請專利範圍第丨項所述之拷貝裝置,其特徵為, 可由真空變形之元件只有些微彈性,且在完全真空作用 下,在中央範圍向剛性元件之變形量不超過,最 好小於2mm,尤其最好只有。 8. 根據申請專利範圍中第1項所述之拷貝裝置,其特徵 為’剛性元件㈣-電路_之真线送框組成及/或 包括此輸送框。 9·根據申請專利範圍中第1項所述之拷貝裝置,其特徵 為’作為可進出運動之定位元件之距離維持件至少包括 一活塞-汽缸-單元。 10·根據申請專利範圍中第i項所述之拷貝裝置,其特徵 為’作為可進出運動之定位元件之距離維持件至少包括 一軸裝置。 u.根據中請專利綱中第1項所述之拷貝裝置,其特徵 為,其有多個相互有間距之定位元件。 12.根據中請專利範圍第項所述之拷貝裝置,其特徵 為,為使定位元件同步運動,多數軸與預定且單一之驅 動器,尤其是與一齒形傳送帶相連接。 13·根據中請專娜m巾第丨骑述之拷貝裝置,其特徵 為,足位元件之設計,使剛性元件及彈性元件間之距 離’藉由-至少二元件其中之—之—般平行運動而互相 逼近及遠離。 14·根據申請專利範圍中第i項所述之拷貝裝置,其特徵 為,疋位元件係如此固定,其使剛性元件對不運動而 535026 A8 g _____ D8 六、申請專利範圍 性之元件下降及/或提升遠離。 15. —種製造電路板之方法,其特徵為,一製出之電路板圖 樣在一可由真空變形但只有些微彈性之元件上,於可由 真至受形之元件對面設置一剛性元件,其可由真空變形 之凡件藉由施加變形真空而向剛性元件呈球形變形,且 此剛性元件隨即被控制,向真空變形之元件表面,藉調 整距離維持而下降。 (請先閱讀背面之注音?事項再填寫本頁) 訂---------線. 經濟部智慧財產局員工消費合作社印製Patent application scope 7. According to the copy device described in item 丨 of the patent application scope, it is characterized in that the element that can be deformed by vacuum is only slightly elastic, and under the action of complete vacuum, the deformation amount to the rigid element in the central range does not exceed , Preferably less than 2mm, especially preferably only. 8. The copying device according to item 1 in the scope of the patent application, characterized in that it is composed of a 'rigid element'-circuit-a true wire feed frame and / or includes the transport frame. 9. The copying device according to item 1 in the scope of the patent application, characterized in that 'the distance maintaining member as a positioning element capable of moving in and out includes at least one piston-cylinder-unit. 10. The copying device according to item i in the scope of the patent application, characterized in that 'the distance maintaining member as a positioning element capable of moving in and out includes at least one axis device. u. The copying device according to item 1 of the Chinese Patent Application, characterized in that it has a plurality of positioning elements with a distance from each other. 12. The copying device according to item 1 of the patent claim, characterized in that, in order to synchronize the positioning elements, most of the axes are connected to a predetermined and single drive, especially a toothed belt. 13. According to the copying device described in the Chinese patent, the feature is that the design of the foot element is such that the distance between the rigid element and the elastic element is generally parallel by-at least two of them-one of them. Move towards and away from each other. 14. The copying device described in item i in the scope of the patent application, characterized in that the positioning element is so fixed that it makes the rigid element pair not move and 535026 A8 g _____ D8 6. The scope of the patent application element is reduced and / Or lift away. 15. A method for manufacturing a circuit board, characterized in that a circuit board pattern is produced on a component that can be deformed by a vacuum but is only slightly elastic, and a rigid component is arranged opposite the component that can be true to shape, which can be The vacuum deformed parts are deformed into a spherical shape by applying a deformation vacuum to the rigid element, and the rigid element is then controlled, and the vacuum deformed element surface is lowered by maintaining the adjustment distance. (Please read the phonetic on the back? Matters before filling out this page) Order --------- line. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs -13 «-13 «
TW89117946A 1999-09-03 2000-09-01 Copier device and method to manufacture circuit board TW535026B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE1999142213 DE19942213A1 (en) 1999-09-03 1999-09-03 Spindle frame

Publications (1)

Publication Number Publication Date
TW535026B true TW535026B (en) 2003-06-01

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ID=7920779

Family Applications (1)

Application Number Title Priority Date Filing Date
TW89117946A TW535026B (en) 1999-09-03 2000-09-01 Copier device and method to manufacture circuit board

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DE (1) DE19942213A1 (en)
TW (1) TW535026B (en)
WO (1) WO2001018600A1 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004029063A (en) * 2002-06-21 2004-01-29 Adtec Engineeng Co Ltd Contact type exposure device

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2436094A1 (en) * 1978-09-13 1980-04-11 Vannier Photelec Anc Ets Photographic frame with metal base and top window - has space between sheets evaluated to maintain contact with the film
DD224126A1 (en) * 1984-05-31 1985-06-26 Mikroelektronik Zt Forsch Tech VACUUM CLAMPING DEVICE FOR SEMI-FINISHED DISCS WITH CROPPED SURFACES
US4812883A (en) * 1987-12-10 1989-03-14 Ernest Ohlig Graphic material registration apparatus and method
FR2640396A1 (en) * 1988-12-14 1990-06-15 Photomeca Sa Vacuum contact exposure holder (frame) for printing and copying
FR2663133A1 (en) * 1990-06-12 1991-12-13 Photomeca Sa Rapid vacuum system for exposure frame
DE4320792A1 (en) * 1993-06-23 1995-01-05 Bacher Graphische Geraete Gmbh Printing frame (copier frame) for copiers in the printing trade

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DE19942213A1 (en) 2001-04-12

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