TW528712B - Tape feeder and bonding device with the tape feeder - Google Patents

Tape feeder and bonding device with the tape feeder Download PDF

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Publication number
TW528712B
TW528712B TW90107706A TW90107706A TW528712B TW 528712 B TW528712 B TW 528712B TW 90107706 A TW90107706 A TW 90107706A TW 90107706 A TW90107706 A TW 90107706A TW 528712 B TW528712 B TW 528712B
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TW
Taiwan
Prior art keywords
belt
sprocket
conveyor belt
teeth
carrier tape
Prior art date
Application number
TW90107706A
Other languages
Chinese (zh)
Inventor
Makoto Ohta
Tadashi Ito
Original Assignee
Shibaura Mechatronics Corp
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Publication date
Application filed by Shibaura Mechatronics Corp filed Critical Shibaura Mechatronics Corp
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Publication of TW528712B publication Critical patent/TW528712B/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H20/00Advancing webs
    • B65H20/20Advancing webs by web-penetrating means, e.g. pins
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

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  • Supply And Installment Of Electrical Components (AREA)
  • Wire Bonding (AREA)
  • Advancing Webs (AREA)

Abstract

The present invention provide a tape feeder capable of feeding a carrier tape smoothly by effectively preventing the carrier tape from being caught into a sprocket even when a thin carrier tape is fed. A sprocket 11 of the tape feeder 10 is clockwise rotated with an axis of a pin slot driving shaft 22 as the rotating center. When the carrier tape 20 is fed from the left side along a guide rail, a plurality of teeth 11a of the sprocket 11 are engaged in order with perforations provided along both side edges of the carrier tape 20 to feed the carrier tape 20 in order to the right side, a wire 14 extending along the carrier tape 20 is provided under the carrier tape 20 fed drivingly by the sprocket 11. The carrier tape 20 is supported by the wire 14 at the time point when departing from the teeth 11a of the sprocket 11 and the perforations 20a of the carrier tape 20 are extracted surely from the teeth 11a of the sprocket 11.

Description

528712 _案號90107706_年月日 修正 五、發明說明(1) 發明之技術領域 本發明與一種輸送輸送帶之進帶裝置有關,尤與輸送沿 寬度方向側邊設有穿孔之輸送帶之進帶裝置及具備其之接 合裝置有關。 先前技術 自先前已知,有一種進帶裝置,為精確輸送輸送膠帶封 裝體(TCP)等,以一對鏈輪輸送沿寬度方向側邊設有穿孔 之輸送帶。 圖7係先前之進帶裝置圖。如圖7所示,先前之進帶裝置 4〇具有:一對鏈輪11、11,設於引導輸送帶20之一對導軌 34、34路徑中,具有嚙合於輸送帶20之穿孔20a之複數齒 1 1 a ;及一對夾輥1 2、1 2,於鏈輪1 1、1 1間夾持輸送帶2 0 。又鏈輪1 1、1 1藉栓槽驅動軸2 2以其軸線為中心旋轉。 然而,上述先前之進帶裝置40,若輸送帶之厚度極薄時 (例如厚度為5 0 # m以下時),起因於穿孔2 0 a之變形等致輸 送帶20卡進鏈輪11之齒11a,而有如圖7之二點虛線所示, 輸送帶20捲入鏈輪11、11與導執34、34之問題。 發明之揭示 本發明為考慮上述問題,其目的在提供一種進帶裝置及' 具備其之接合裝置,即使輸送厚度薄之輸送帶時,亦能有 效防止輸送帶捲入鏈輪,而能順暢輸送輸送帶。 本發明提供一種進帶裝置,其特徵為具有:具備複數齒 之鏈輪,嚙合於沿輸送帶寬度方向側邊所設穿孔;及拔出 構件,對上述輸送帶配置於上述鏈輪側,以嚙合於上述鏈 輪之上述各齒狀態下輸送之上述輸送帶,從上述鏈輪保持528712 _Case No. 90107706_ Amendment 5 、 Explanation of Invention (1) Technical Field of the Invention The present invention relates to a belt feeding device for a conveyer belt, and particularly relates to the conveyance of a conveyer belt with perforations along the widthwise side. The belt device and the joint device provided with the belt device. Prior art It is known from the prior art that there is a belt feeding device for precisely conveying a tape package (TCP) and the like, and conveys a conveyor belt having perforations along the widthwise side by a pair of sprocket wheels. FIG. 7 is a diagram of a previous belt feeding device. As shown in FIG. 7, the previous belt feeding device 40 has a pair of sprocket wheels 11 and 11 provided in a pair of guide rails 34 and 34 of a guide conveyor belt 20 and has a plurality of perforations 20 a that engage the conveyor belt 20. Tooth 1 1 a; and a pair of nip rollers 1 2 and 12 to clamp the conveyor belt 20 between the sprocket wheels 1 1 and 11. The sprocket wheels 1 1 and 1 1 rotate around the axis thereof by the bolt groove driving shaft 2 2. However, if the previous belt feeding device 40 described above is extremely thin (for example, when the thickness is 50 # m or less), the belt 20 is caught in the teeth of the sprocket 11 due to deformation of the perforation 20 a, etc. 11a, there is a problem that the conveyor belt 20 is caught in the sprocket 11, 11 and the guide 34, 34 as shown by the dotted line in FIG. DISCLOSURE OF THE INVENTION The present invention has been made in consideration of the above-mentioned problems, and an object thereof is to provide a belt feeding device and a bonding device provided with the belt feeding device, which can effectively prevent the belt from being caught in a sprocket even when conveying a thin belt, and can smoothly convey the belt. conveyor. The present invention provides a belt feeding device, comprising: a sprocket having a plurality of teeth engaged with perforations provided on the side of the width direction of the conveyor belt; and a pull-out member arranged on the sprocket side of the conveyor belt to The conveyor belt conveyed in the state of the teeth of the sprocket is held by the sprocket.

O:\70\70399-911002.ptc 第4頁 528712 案號 90107706 年 月 曰 修正 五、發明說明(2) 一定之輸送路徑送出,從上述各齒拔出上述輸送帶之 穿 孑L 。 又本發明最好上述拔出構件,對上述鏈輪配置於上述輸 送帶寬度方向中央側。又最好上述鏈輪具有對上述各齒於 上述輸送帶寬度方向中央側沿其外周邊所設之溝,而上述 拔出構件以插入上述溝之一部分狀態配置。此外,最好上 述拔出構件係沿上述輸送帶延伸之金屬線。 又本發明提供一種進帶裝置,其係將半導體元件接合於 輸送帶之接合裝置,其特徵為具有:進帶裝置,將輸送帶 移送至接合位置;及接合工具,將半導體元件接合於移送 至上述接合裝置之輸送帶;上述進帶裝置,具有:具備複 數齒之鏈輪,嚙合於沿輸送帶寬度方向側邊所設穿孔;及 拔出構件,對上述輸送帶配置於上述鏈輪側,以嚙合於上 述鏈輪之上述各齒狀態下輸送之上述輸送帶,從上述鏈輪 保持一定之輸送路徑送出,從上述各齒拔出上述輸送帶之 穿孔。 依本發明,因在由鏈輪輸送驅動之輸送帶之鏈輪側設有 拔出構件,俾從各齒拔出輸送帶之穿孔,故即使輸送帶卡 進鍵輪之齒,亦能從各鍵輪保持一定路徑送出輸送帶,故 能有效防止輸送帶捲入鏈輪,而能順暢輸送輸送帶。 « 圖式之簡要說明 圖1係依本發明之進帶裝置之一實施形態要部圖。 圖2係沿圖1之I I _ I I線之斷面圖。 圖3係圖2之III部分之放大斷面圖。 圖4係具備圖1所示進帶裝置之内部引線接合裝置整體構O: \ 70 \ 70399-911002.ptc Page 4 528712 Case No. 90107706 Month Amendment V. Description of the invention (2) Send out a certain conveying path, and pull out the feedthrough L of the conveying belt from the above-mentioned teeth. In the present invention, it is preferable that the extraction member is disposed on the center side of the width direction of the belt with respect to the sprocket. It is also preferable that the sprocket has grooves provided along the outer periphery of the teeth on the central side of the width direction of the conveyor belt, and the extraction member is disposed in a state of being inserted into a part of the grooves. Further, it is preferable that the extraction member is a metal wire extending along the conveyor belt. The present invention also provides a tape feeding device, which is a bonding device for bonding a semiconductor element to a conveyor belt, which is characterized by having a tape feeding device for transferring the conveyor belt to a bonding position; and a bonding tool for bonding the semiconductor element to the transfer device. The conveyor belt of the joining device; the belt feeding device includes: a sprocket having a plurality of teeth engaged with perforations provided on a side of the width direction of the conveyor belt; and a pull-out member arranged on the sprocket side of the conveyor belt, The conveyor belt conveyed under the state of the teeth of the sprocket is delivered from the sprocket while maintaining a certain conveyance path, and the perforations of the conveyor belt are pulled out from the teeth. According to the present invention, since a pull-out member is provided on the sprocket side of the conveyor belt driven by the sprocket conveyor, the perforations of the conveyor belt are pulled out from each tooth, so even if the conveyor belt is caught in the teeth of the key wheel, The key wheel keeps the path out of the conveyor belt, so it can effectively prevent the conveyor belt from being caught in the sprocket, and can smoothly convey the conveyor belt. «Brief Description of the Drawings Figure 1 is a diagram showing the essential parts of an embodiment of a tape feeding device according to the present invention. FIG. 2 is a sectional view taken along the line I I _ I I in FIG. 1. FIG. 3 is an enlarged sectional view of a part III in FIG. 2. FIG. 4 shows the overall structure of an internal wire bonding device provided with the tape feeding device shown in FIG. 1. FIG.

O:\70\70399-911002.ptc 第5頁 528712 案號 90107706 年 月 曰 修正 五、發明說明(3) 造示意圖。 圖5係圖4之V部分放大透視圖。 圖6係圖1所示進帶裝置之其他實施形態要部圖。 圖7係先前之進帶裝置圖。 實施發明之最佳形態 以下參考圖說明本發明之實施形態。圖1至圖5係依本發 明之進帶裝置之一實施形態說明圖。 先以圖4及圖5說明具有本實施形態有關之進帶裝置之内 部引線接合裝置。又圖4係内部引線接合裝置整體構造示 意圖。圖5係圖4之V部分放大透視圖。 圖4及圖5所示内部引線接合裝置30具有進給捲筒31 ,捲 繞輸送帶20,預先於表面形成内部引線20b (參考圖5)。 捲在進給捲筒31之輸送帶20,藉拉力滾輪33、33引導至導 執34、34,沿導執34、34之一定輸送路徑輸送後,藉拉力 滾輪35、35由捲取捲筒32捲取。 在此,導執3 4、3 4之中間位置設有接合部3 9。接合部3 9 具有··裝載台37,裝載半導體元件20c (參考圖5);及接 合工具38,接合裝載於裝載台37上之半導體元件20c與輸 送帶20之内部引線20b。又接合工具38下方設有具備開口 3 6 a之導帶件3 6。 又導執3 4、3 4之輸送方向下游側位置及輸送方向上游側 位置,分別設有進帶裝置1 0、1 0,俾輸送驅動輸送帶2 0。 進帶裝置10、10具有:一對具有複數齒11a之鏈輪11、11 ,嚙合於沿輸送帶2 0兩側邊所設穿孔2 0 a (參考圖5 );及 一對夾輥1 2、1 2,在鏈輪1 1、1 1間夾持輸送帶2 0以防止輸O: \ 70 \ 70399-911002.ptc Page 5 528712 Case No. 90107706 Month Amendment V. Description of Invention (3) Schematic drawing. FIG. 5 is an enlarged perspective view of part V of FIG. 4. FIG. 6 is a diagram showing the main parts of another embodiment of the tape feeding device shown in FIG. 1. FIG. FIG. 7 is a diagram of a previous belt feeding device. Best Mode for Carrying Out the Invention An embodiment of the present invention will be described below with reference to the drawings. 1 to 5 are explanatory views of an embodiment of a tape feeding device according to the present invention. First, an internal wire bonding device having a tape feeding device according to this embodiment will be described with reference to Figs. 4 and 5. Fig. 4 is a schematic view showing the overall structure of the internal wire bonding device. FIG. 5 is an enlarged perspective view of part V of FIG. 4. The internal wire bonding device 30 shown in Figs. 4 and 5 includes a feed roll 31 and a winding belt 20, and an internal lead 20b is formed on the surface in advance (see Fig. 5). The conveyor belt 20 wound on the feed roll 31 is guided to the guides 34 and 34 by the tension rollers 33 and 33. After being conveyed along a certain conveying path of the guides 34 and 34, the tension rollers 35 and 35 are used to take up the reel. 32 take-ups. Here, a joint portion 39 is provided at an intermediate position between the guides 3 4 and 3 4. The bonding portion 39 includes a mounting table 37 for mounting the semiconductor device 20c (refer to FIG. 5), and a bonding tool 38 for bonding the semiconductor device 20c mounted on the mounting table 37 and the inner lead 20b of the transmission tape 20. A belt guide 36 having an opening 3 6 a is provided below the joining tool 38. In addition, the downstream positions and upstream positions in the conveying direction of 3, 4 and 3 are provided with belt feeding devices 10, 10, and 20, respectively. The belt feeding device 10, 10 has: a pair of sprocket wheels 11, 11 having a plurality of teeth 11a, which are engaged with perforations 20a (refer to FIG. 5) provided along both sides of the conveyor belt 20, and a pair of nip rollers 1 2 , 1 2 , Clamp the conveyor belt 2 between sprocket 1 1 and 1 1 to prevent losing

O:\70\70399-911002.ptc 第6頁 528712O: \ 70 \ 70399-911002.ptc Page 6 528712

五、發明說明(4) 送帶2 0浮上。 其次,依圖1至圖n 一 1 0。又圖1係圖4 ύ坪細/兄明圖4及圖5所示進帶裝置1〇、 從導執34、34内包圖5所示進帶裝置10、之要部圖,即 鏈輪1 1之圖。圖2】看圖4及圖5所示一對鏈輪1 1、1 1中内側 及圖5所示面前糸沿圖1之1 1 — I I線之斷面圖,即顯示圖4 1 I I部分之放大^内側雙方之鏈輪1 1、Π。又圖3係圖2之 如圖i及圖2所斷面圖/ 中一方之鏈輪u = ’進帶裝置10、!〇具有一對鏈輪11。其 組合體23,固定〔圖2右側之鏈輪),藉裝在側板21之軸承 2 2。又另一方$於以其軸線為中心旋轉支持之栓槽驅動軸 之軸承組合體25鍵輪1 1 (圖2左側之鏈輪),藉裝在側板21 為中心旋轉支持,由與上述一方之鏈輪1 1同軸且以其軸線 合體24,插穿柊她此外,上述另一方之鏈輪Η裝有栓槽扣 向。m 2 動軸向軸方向滑動並扣合於旋轉方 册動軸22之一側端部(圖2右側端部),裝有皮 ^ 、’凡 '皮可2 7 ’可由馬達(未圖示)驅動栓槽驅動軸 L L ° 又進帶裝置10、10具有一對夾輥12、12,在鏈輪n、u、 間夾持輸送帶2 0。又夾輥1 2、1 2藉分別裝於支持臂2 9、2 9 之軸2 8、2 8,可旋轉支持。又夾輥1 2、1 2外側邊設有凹溝 12a、12a,以容納鏈輪11、11之齒na、iia。 在此,由鏈輪1 1、1 1輸送驅動之輸送帶2 〇下面側,設有 金屬線(拔出構件)1 4 (參考圖1及圖3 ),沿輸送帶2 〇延伸 ’從各齒1 1 a拔出輸送帶2 0之穿孔2 〇 a,俾從鏈輪丨丨以保持V. Description of the invention (4) The belt feeding 20 floats up. Secondly, according to Fig. 1 to Fig. N-10. Fig. 1 is a diagram of the main parts of the belt feeding device 10 shown in Fig. 4 and Fig. 4 and Fig. 5, and includes the belt feeding device 10 shown in Fig. 5 from the guides 34 and 34, that is, the sprocket 1. Figure of 1. Fig. 2] A cross-sectional view of the inner side of the pair of sprockets 11 and 11 shown in Figs. 4 and 5 and the front face shown in Fig. 5 along line 1 1-II in Fig. 1 shows part II in Fig. 4 1 Zoom in ^ The sprocket wheels 1 1, Π on both sides. Fig. 3 is a sectional view of Fig. 2 and Fig. 2 of Fig. 2 / in which one of the sprocket u = "belt feeding device 10"! 〇 Has a pair of sprocket 11. The assembly 23 is fixed (a sprocket on the right side in FIG. 2), and a bearing 22 mounted on the side plate 21 is borrowed. On the other side, the bearing assembly 25 key wheel 1 1 (the sprocket on the left side of FIG. 2) of the bolt-groove driving shaft supported by its axis as the center is supported by the side plate 21 as the center of rotation. The sprocket 11 is coaxial and fits on its axis 24, and is inserted through her. In addition, the other sprocket Η is equipped with a bolt groove to buckle. The m 2 slides in the direction of the axial axis and is fastened to one side end (the right end in FIG. 2) of the rotating square movable shaft 22, and is equipped with a leather ^, '凡' 皮 可 2 7 'can be motor (not shown) ) Drive the bolt groove drive shaft LL ° and the belt feeding device 10, 10 has a pair of nip rollers 12, 12 to clamp the conveyor belt 20 between the sprocket n, u, and. The nip rollers 1 2 and 1 2 can be rotated and supported by being mounted on the shafts 2 8 and 2 8 of the support arms 2 9 and 2 9 respectively. In addition, grooves 12a and 12a are provided on the outer sides of the nip rollers 1 and 12 to accommodate the teeth na and iia of the sprocket wheels 11 and 11. Here, the lower side of the conveyor belt 2 driven by the sprocket 1 1 and 1 1 is provided with a metal wire (pulling member) 1 4 (refer to FIG. 1 and FIG. 3). The tooth 1 1 a is pulled out of the perforation 2 0a of the conveyor belt 20, and is pulled from the sprocket to maintain

mm

IIII

III II O:\70\70399-911002.ptc 第7頁 528712 修正 五、發明說明(5) 一定之高度 輸送之輸送 13a、15 a, 滾子1 3、1 5 2 1 (參考圖 1 8連接於固 1 9,以彈簧 送帶20寬度 及圖3所示, ,金屬線1 4 其次說明 圖1中,ϋ 2 2之轴線為 執3 4、3 4送 沿輸送帶2 0 送帶2 0至右 兹因由鍵 屬線14,沿 之狀態輸送 屬線1 4之支 之穿孔20 a ^ 如此,依 送帶20下面 輸送帶20卡 一定之高度 £^90107706 册二了,送以响合於各鏈輪u各齒na之狀態 : 此,金屬線1 4繞於滾子1 3、1 5之V溝 亚i寻其兩端固定於金屬線固定構件16、17。又 2及二方之金屬線固定構件16,固定於側板21、 一。又另一方之金屬線固定構件丨7,藉彈箬 、21 (參考圖2)上之彈簧固定構件 =金屬線14之張力。又金屬線14配置於輸 鍵輪11各齒lla内側。具體而言,如圖1 u许輪11各齒11 a内側沿其外周邊設有溝丨1 b 从插入溝11 b之一部分狀態配置。 如^此構成之進帶裝置ίο、ίο之作用。 I帶裝置10、10之鏈輪u、u,以栓槽驅動轴 頁時針方向旋轉。當輸送帶2 〇從左側沿導 來日寸,鏈輪11、u之複數齒lla,依序嚙合於 兩側邊所設穿孔20a (參考圖5),依序輸送輸 側。 輪11^11輸送驅動之輸送帶20下面側,設有金 輪迗帶20延伸,而以嚙合於各鏈輪u各齒na 之輸送帶20,在離開各鏈輪丨丨各齒lla時受金 持’故從各鏈輪11各齒11a確實拔出輸送帶20 本貫%开>態’因在由鏈輪11、11輸送驅動之輸 側,设有金屬線1 4,沿輸送帶2 〇延伸,故即使 進鏈輪11之齒11a時,亦可在從各鏈輪丨丨保持 狀態下送出輸送帶2 0,故能有效防止輸送帶2 〇III II O: \ 70 \ 70399-911002.ptc Page 7 528712 Amendment V. Description of the invention (5) Conveying at a certain height 13a, 15a, roller 1 3, 1 5 2 1 (refer to Figure 1 8 connection Yu Gu 19, with the width of the spring conveyor 20 and shown in Fig. 3, and metal wire 1 4 Next, in Fig. 1, the axis of ϋ 2 2 is 3, 4, 3 4 along the conveyor 2 0, conveyor 2 From 0 to right, the perforation 20 of the branch of line 14 is conveyed along the state of the key line 14, and the conveyance belt 20 below the conveying belt 20 has a certain height of £ 20,90,107,706. In the state of each sprocket u and each tooth na: Therefore, the metal wire 14 is wound around the V grooves I of the rollers 1 3 and 15 and both ends are fixed to the metal wire fixing members 16, 17 and 2 and 2 The metal wire fixing member 16 is fixed to the side plate 21, one. The other metal wire fixing member 丨 7, the spring fixing member on the spring 21, (refer to FIG. 2) = the tension of the metal wire 14. The metal wire 14 is arranged on the inner side of each tooth 11a of the key input wheel 11. Specifically, as shown in Fig. 1, the inner side of each tooth 11a of the wheel 11 is provided with a groove along its outer periphery. 1b is arranged from a part of the state of the insertion groove 11b. The function of the belt-feeding device ίο and ίο with this structure. The sprocket u, u of the I-belt device 10, 10 rotates in the clockwise direction of the shaft driven by the bolt groove. When the conveyor belt 20 is guided from the left to the Japanese inch, the sprocket 11. The plural teeth la of u are sequentially engaged with the perforations 20a (refer to FIG. 5) provided on both sides, and the conveying side is conveyed in sequence. The lower side of the conveyor belt 20 driven by the wheel 11 ^ 11 is provided with a gold wheel reel 20 Extended, and the belt 20 meshing with each tooth na of each sprocket u is held by the gold when leaving each sprocket 丨 丨 each tooth 11a, so the belt 20 is surely pulled out from each sprocket 11 each tooth 11a The ">" state is provided on the transmission side driven by the sprocket 11, 11 with a metal wire 14 extending along the conveyor belt 20, so even when entering the teeth 11a of the sprocket 11, it can be driven from each chain. The wheel 丨 丨 keeps sending out the conveyor belt 2 0, so it can effectively prevent the conveyor belt 2 〇

II

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528712 案號 90107706 曰 修正 五、發明說明(6) 捲入鏈輪1 1、1 1,順暢輸送輸送帶2 0。 其他實施形態 其次,依圖6說明依本發明之進帶裝置之其他實施形態 。本發明之其他實施形態,除拔出構件使用梢代替金屬線 外,其他與圖1至圖5所示實施形態略為相同。於本發明之 其他實施形態,與圖1至圖5所示實施形態同一部分附予同 一符號,省略詳細說明。 圖6係表示本發明之其他實施形態有關之進帶裝置1 0、 10之要部之與圖1同樣之圖。如圖6所示由進帶裝置10、10 之鏈輪1 1、1 1輸送驅動之輸送帶2 0下面側,設有沿輸送帶 2 0延伸之梢(拔出構件)4 2、42,從各齒1 1 a拔出輸送帶2 0 之穿孔2 0 a,俾從各鏈輪1 1保持一定之高度狀態下送出以 嚙合於各鏈輪11各齒11a之狀態輸送之輸送帶20。在此, 梢4 2、4 2分別於圓柱狀支持構件4 1、4 1内,由螺栓4 3、4 3 固定。又圓柱狀支持構件4 1、4 1,固定於側板2 1、2 1 (參 考圖2)上。又梢42、42配置於輸送帶20寬度方向各鏈輪11 各齒11a内側。具體而言,如圖6所示,各鏈輪11各齒11a 内側沿其外周邊設有溝11 b,梢42、4 2將其前端部以插入 溝1 1 b之一部分狀態配置。 又梢42、42不一定需要設於鏈輪11、11之輸送方向下游 側及輸送方向上游側雙方,而可省略輸送方向上游側之梢 42 ° 又可於圖1及圖6,金屬線14或梢42,輸送帶20之穿孔 20a,從鏈輪11之齒11a拔出附近,設送風機構45,俾從下 方將壓縮氣體(空氣或離子化空氣等),吹至輸送帶20。此528712 Case No. 90107706 said Amendment V. Description of the invention (6) Engage the sprocket 1 1 and 1 1 and smoothly convey the conveyor belt 20. Other Embodiments Next, another embodiment of the tape feeding device according to the present invention will be described with reference to FIG. 6. Other embodiments of the present invention are similar to the embodiment shown in Figs. 1 to 5 except that the extraction member uses a tip instead of a metal wire. In other embodiments of the present invention, the same portions as those in the embodiments shown in Figs. 1 to 5 are given the same reference numerals, and detailed descriptions are omitted. Fig. 6 is a view similar to Fig. 1 showing the main parts of a tape feeding device 10 and 10 according to another embodiment of the present invention. As shown in FIG. 6, the lower side of the conveyor belt 20 driven by the sprocket wheels 1 1 and 1 1 of the belt feeding devices 10 and 10 is provided with a tip (pulling member) 4 extending along the conveyor belt 20. The perforation 20a of the conveyor belt 20 is pulled out from each tooth 1a, and the conveyor belt 20 is conveyed while being maintained at a certain height from each sprocket 11 to mesh with the teeth 11a of each sprocket 11. Here, the tips 4 2 and 4 2 are respectively fixed in the cylindrical support members 4 1 and 4 1 by bolts 4 3 and 4 3. The cylindrical supporting members 4 1 and 4 1 are fixed to the side plates 2 1 and 2 1 (refer to FIG. 2). The tips 42 and 42 are arranged inside the teeth 11 a of the sprocket 11 in the width direction of the conveyor belt 20. Specifically, as shown in FIG. 6, a groove 11b is provided on the inner side of each tooth 11a of each sprocket 11 along its outer periphery, and the tips 42 and 42 are arranged in a state where they are inserted into a part of the groove 1 1b. Further, the tips 42 and 42 do not necessarily need to be provided on both the downstream side and the upstream side in the conveying direction of the sprocket 11, 11 and the tips 42 on the upstream side in the conveying direction may be omitted. Or tip 42, the perforation 20a of the conveyor belt 20 is pulled out from the teeth 11a of the sprocket 11, and a blower mechanism 45 is provided to blow compressed gas (air or ionized air, etc.) from below to the conveyor belt 20. this

O:\70\70399-911002.ptc 第9頁 528712 _案號90107706_年月曰 修正_ 五、發明說明(7) 時,由於壓縮氣體之喷吹作用致舉起輸送帶2 0,故比僅以 金屬線1 4或梢4 2之情形,容易從鏈輪1 1之齒1 1 a拔出輸送 帶2 0穿孔2 0a。又噴吹之壓縮氣體用離子化空氣時,即使 從齒11a拔出穿孔20a時產生靜電,亦可去除該靜電,而可 由防止因產生之靜電致接合於輸送帶20或輸送帶20之内部 引線2 Ob之半導體元件20c發生靜電破壞等缺失。 又於圖1及圖6,將鏈輪1 1配置於輸送帶2 0下側,惟不一 定需要配置於下側,例如亦可配置於輸送帶2 0上側。此種 配置可由上下顛倒配置圖1及圖6所示進帶裝置1 0達成。此 時,上下顛倒配置圖1及圖6所示進帶裝置1 0時,最好設以 彈簧等將夾輥1 2施力於鏈輪1 1側之機構。O: \ 70 \ 70399-911002.ptc Page 9 528712 _Case No. 90107706_Year Month and Revise_ V. In the description of the invention (7), the conveyor belt 20 was lifted due to the blowing effect of compressed gas, so the ratio In the case of only the metal wire 14 or the tip 4 2, it is easy to pull out the conveyor belt 20 perforation 2 0a from the tooth 1 1 a of the sprocket 11 1. When the ionized air for compressed gas is blown, even if static electricity is generated when the perforation 20a is pulled out from the tooth 11a, the static electricity can be removed, and it can be prevented from being bonded to the conveyor belt 20 or the internal lead of the conveyor belt 20 due to the generated static electricity. The 2 Ob semiconductor element 20c is missing due to electrostatic breakdown. 1 and 6, the sprocket 11 is arranged on the lower side of the conveyor belt 20, but it does not necessarily need to be arranged on the lower side. For example, it may be arranged on the upper side of the conveyor belt 20. This arrangement can be achieved by arranging the feeding device 10 shown in Figs. 1 and 6 upside down. At this time, when the belt feeding device 10 shown in Figs. 1 and 6 is arranged upside down, it is preferable to provide a mechanism that biases the nip roller 12 to the sprocket 11 side with a spring or the like.

O:\70\70399-911002.ptc 第10頁 528712 案號 90107706 年 月 曰 修正 圖式簡單說明 元件符號說明 10 進 帶 裝 置 11 鏈 輪 1 la 齒 lib 溝 12 夾 輥 12a 凹 溝 13 滾 子 13a V溝 14 金 屬 線 15 滾 子 • 15a V溝 16 金 屬 線 固 定 構 件 17 金 屬 線 固 定 構 件 18 彈 簧 19 固 定 構 件 20 輸 送 帶 20a 穿 孔 20b 内 部 引 線 20c 半 導 体 素 子 21 側 板 22 栓 槽 驅 動 軸 23 軸 承 組 合 體 24 栓 槽 扣 合 體 25 軸 承 組 合 體 26 皮 帶 輪 27 皮 帶 28 轴 29 支 持 臂 30 内 部 引 線 接 合 裝置 31 進 給 捲 筒 32 捲 取 捲 筒 33 拉 力 滾 輪 34 導 軌 35 拉 力 滾 輪 36 導 帶 件 36a 開 π 37 載 置 台 38 接 合 工 具 39 接 合 部 40 習 知 之 進 帶 裝 置 41 圓 柱 狀 支 持 構 件 42 梢 43 螺 栓 45 % \/ 迗 風 機 構O: \ 70 \ 70399-911002.ptc Page 10 528712 Case No. 90107706 Revised drawing Simple description of component symbol description 10 Feeding device 11 Sprocket 1 la Tooth lib groove 12 Clamp roller 12a Groove 13 Roller 13a V groove 14 Metal wire 15 Roller • 15a V groove 16 Metal wire fixing member 17 Metal wire fixing member 18 Spring 19 Fixing member 20 Conveyor belt 20a Perforation 20b Internal lead 20c Semiconductor element 21 Side plate 22 Slotted drive shaft 23 Bearing assembly 24 Bolt and groove fastener 25 Bearing assembly 26 Pulley 27 Belt 28 Shaft 29 Support arm 30 Internal wire bonding device 31 Feed roll 32 Take-up roll 33 Pull roller 34 Guide rail 35 Pull roller 36 Belt guide 36a Open π 37 Mounting table 38 Splicing tool 39 Splicing section 40 Conventional tape feeding device 41 Cylindrical support member 42 Tip 43 Screw 45% \ / E wind mechanism

O:\70\70399-911002.ptc 第11頁O: \ 70 \ 70399-911002.ptc Page 11

Claims (1)

528712 案號 90107706 年 月 曰 修正 六、申請專利範圍 1 . 一種進 含複數 ;及 拔出構 帶裝置, 齒之鏈輪 穿孔 於上 鏈輪 帶之2. 件, 3. 具有 所設 置。 4. 上述 5. 其特 件,對上 述鏈輪之上述各 保持一定之輸送 穿孔。 如申請 係對上 如申請 對上述 之溝, 專利範圍 述鍵輪配 專利範圍 各齒於上 而上述拔 如申請專利範圍 拔出構件係沿上 一種接合裝置, 有·· 置,將輸 具,將半 之輸 輸送 於上 徵為具 進帶裝 接合工 送帶; 上述進 帶寬度 拔出構 述鍵輪 帶裝置, 方向側邊 件,對上 之上述各 其特徵為具有: ,嚙合於沿輸送帶寬度方向側邊所設 述輸送帶配置於上述鍵輪側,以响合 齒狀態下輸送之上述輸送帶,從上述 路徑送出,從上述各齒拔出上述輸送 第1項之進帶裝置,其中上述拔出構 置於上述輸送帶寬度方向中央側。 第2項之進帶裝置,其中上述鏈輪係 述輸送帶寬度方向中央側沿其外周邊 出構件以插入上述溝之一部分狀態配 第1至3項中任一項之進帶裝置,其中 述輸送帶延伸之金屬線。 其係將半導體元件接合於輸送帶者, 送帶移送至接合位置;及 導體元件接合於移送至上述接合裝置 具有:具備複數齒之鏈輪,嚙合於沿 所設穿孔;及 述輸送帶配置於上述鍵輪側’以唾合 齒狀態下輸送之上述輸送帶,從上述528712 Case No. 90107706 Amendment 6. Scope of patent application 1. A plurality of inward and outward belts; and a device for pulling out the structure, the toothed sprocket is perforated to 2. pieces of the upper sprocket belt, 3. has the settings. 4. The above 5. Its special feature is to maintain a certain conveying perforation for each of the above mentioned sprocket. If the application is applied to the above ditch, the patent scope describes the key wheel with each tooth of the patent scope and the above-mentioned extraction application scope is based on the previous joint device. Conveying half of the output to the upper part of the belt is equipped with a splicing belt. The above belt width is pulled out to describe the key wheel belt device. It is a side piece. Each of the above features is: The conveyor belt provided on the widthwise side of the conveyor belt is arranged on the side of the key wheel, and the conveyor belt conveyed in a state of ringing teeth is sent out from the path, and the belt feeding device of the conveyance item 1 is pulled out from the teeth. Wherein, the pull-out structure is disposed on the center side of the width direction of the conveyor belt. The belt feeding device according to item 2, wherein the sprocket is a belt feeding device according to any one of items 1 to 3 in a state in which a member on the center side of the width direction of the conveyor belt is inserted along a portion of the groove, and the belt feeding device according to any one of items 1 to 3 is described. The metal wire of the conveyor belt. The semiconductor device is bonded to a conveyor belt, and the belt is transferred to a bonding position; and the conductive component is bonded to the transfer device and has a sprocket with a plurality of teeth that meshes with perforations along the set; and the conveyor belt is arranged at The conveyor belt conveyed by the key wheel side ′ in a state of spitting teeth O:\70\70399-911002.ptc 第12頁 528712 案號90107706 年月日 修正O: \ 70 \ 70399-911002.ptc Page 12 528712 Case No. 90107706 Month / Date Amendment O:\70\70399-911002.ptc 第13頁O: \ 70 \ 70399-911002.ptc Page 13
TW90107706A 2000-03-31 2001-03-30 Tape feeder and bonding device with the tape feeder TW528712B (en)

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CN111942930A (en) * 2019-05-17 2020-11-17 亚亚科技股份有限公司 Electronic element material belt conveying device

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CN105800363B (en) * 2015-06-05 2019-08-09 广州奥翼电子科技股份有限公司 Jockey pulley, applicable coiled material and coiled material lossless transmission method

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JPS5935478Y2 (en) * 1979-11-30 1984-10-01 株式会社市金工業社 Cutting ear suction device for strip-shaped objects
US4805822A (en) * 1987-12-21 1989-02-21 Data Motion, Inc. Tractor with belt tensioning mechanism
JPH0420236U (en) * 1990-06-07 1992-02-20
US5339983A (en) * 1993-05-18 1994-08-23 Multifastener Corporation Dual pawl spool feeder

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CN111942930A (en) * 2019-05-17 2020-11-17 亚亚科技股份有限公司 Electronic element material belt conveying device

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